A magnetic field probe station

Abstract

The application provides a magnetic field probe station, comprising: a table, at least one pair of probe seats, at least one pair of electrical probes, at least one pair of in-plane magnetic poles, a magnetic conductive structure, an excitation coil, an excitation coil power supply unit and a table support device; compared with a conventional probe station structure, the magnetic conductive structure and the excitation coil are placed below the table, do not interfere with the configuration of the electrical probes and the optical module, save space, and can allow the configuration of a sample table and a vertical magnet below the table; when an objective lens is switched by rotation, the objective lens in the optical module does not collide with the coil due to the excessively large volume of the excitation coil; the magnetic pole fixing mode provided by the application is set to a mode in which the distance between the magnetic poles is adjustable, the distance between the magnetic poles is set according to test requirements, different test requirements are adapted to, and the application can also be used in cooperation with a magneto-optical Kerr microscope.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of test and measurement technology, and particularly relates to a magnetic field probe station. BACKGROUND

[0002] A measurement system capable of integrating magnetic field, electrical and optical modules has important use for the test of electronic devices. However, since the magnetic field generating module (including electromagnet), the electrical module (including DC / high-frequency AC probe, etc.), and the optical detection module (including objective lens, etc.) all need to occupy space and are incompatible, it brings great difficulty to system integration. In order to achieve a high magnetic field, ferromagnetic material is generally used as a magnetic pole or a magnetic shoe, which needs to be close to the sample. At the same time, in order to make the system compatible with optical testing needs, there needs to be enough space near the sample on the probe station to accommodate optical elements such as objective lenses; in order to carry out electrical testing, multiple probes are usually configured, and the probes need to be compatible with the magnetic field generating device and the optical module. Especially when a high magnification objective lens is used for imaging measurement, the sample needs to be very close to the objective lens (i.e., the sample must be located on the focal point of the objective lens imaging), which brings challenges to the compatible configuration of the magnetic field generating device, the electrical testing device and the optical module.

[0003] Current various probe stations are difficult to realize the integration of multi-dimensional magnetic field, DC / AC probe and high magnification imaging. SUMMARY

[0004] Based on the above technical deficiencies, the present application discloses a magnet probe station, which can be compatible with high magnification imaging microscope on the basis of integrating multi-dimensional magnets and multi-functional test probes, and can solve the above problems.

[0005] The present application designs a magnetic field probe station structure, which can integrate multi-dimensional magnetic field, electrical testing module. The probe station can be compatible with high magnification imaging module.

[0006] A magnetic field probe station, comprising: a table top, at least one pair of probe seats, at least one pair of electrical probes, at least one pair of in-plane magnetic poles, a magnetic conducting structure, an excitation coil, an excitation coil power supply unit and a table top supporting device.

[0007] The table top is a ring structure, the in-plane magnetic poles are fixed on the inner side of the lower ring structure of the table top, the probe seats are fixed on the upper surface of the table top, the electrical probes are installed on the probe seats, the magnetic conducting structure is fixed on the lower surface of the table top, the excitation coil is wound on the surface of the magnetic conducting structure, the excitation coil power supply unit supplies power to the excitation coil, and the table top supporting device fixes the table top on the experiment table.

[0008] The ring structure is a closed ring structure or an open ring structure.

[0009] The in-plane magnetic poles have pole fixing devices, each in-plane magnetic pole is fixed to the inner side of the under-table annular structure through its corresponding fixing device, and the distance between the magnetic poles can be adjusted by adjusting the pole fixing devices.

[0010] The probe holder is provided with space displacement adjusting devices, which can adjust the spatial position in three dimensions.

[0011] The electrical probe is a direct current probe or a microwave probe.

[0012] The in-plane magnetic poles are magnetic poles generating a magnetic field parallel to the surface of the sample to be tested.

[0013] The sample to be tested is placed between the in-plane magnetic poles, and a sample table is arranged below the sample, and the sample to be tested is placed on the sample table.

[0014] A vertical magnetic pole can be arranged below the sample to be tested.

[0015] A magneto-optical Kerr microscope is arranged above the sample to be tested.

[0016] The materials of the table and the probe holder are non-magnetic materials, and the materials of the in-plane magnetic poles and the magnetic conducting structure are ferromagnetic or ferrimagnetic substances.

[0017] Beneficial technical effects:

[0018] The conventional commonly used ferromagnetic structure is to wind the excitation coil around the magnetic pole, and in the structure integrating the magnetic field, electricity and optical testing, the configuration of such excitation coil makes the configuration of the electrical probe and the optical path difficult, and the incompatibility problem is easily appeared in space.

[0019] The magnetic field probe table provided by the application places the excitation coil around the magnetic conductive structure, and the magnetic conductive structure and the excitation coil are placed below the table top, which does not interfere with the arrangement of the electrical probe and the optical module. In addition, the magnetic conductive structure and the excitation coil are fixed below the table top, which not only has the advantage of being beautiful, but also saves space, allowing the arrangement of structures such as the sample table (for the sake of uniformity, the application does not involve the displacement of the sample table) and the vertical magnet unit below the table top. When the objective lens is switched by rotation, the objective lens will not collide with the coil due to the large volume of the excitation coil. In the electromagnet structure, if the relative magnetic pole distance is reduced under the condition that other conditions remain unchanged, the magnetic field between the magnetic poles increases, but the size of the sample that can be accommodated (or the operation space) becomes smaller. Conversely, increasing the distance between the relative magnetic poles increases the operation space, but the magnetic field decreases. The magnetic pole fixing mode provided by the application is set to a mode in which the distance between the relative magnetic poles is adjustable, so that the product can be adjusted by the user, the magnetic pole distance is set according to the test requirements, and different test requirements are met. The upper surface of the table top is left with a smooth surface, which can be used to fix the probe seat by vacuum suction, and the number of probe seats can be increased or decreased according to test requirements, or the angle and position of the probe seat fixing can be randomly changed. Compared with the magnetic suction fixing mode, the vacuum suction fixing mode used by the application avoids interference with the magnetic field signal.

[0020] The number of in-plane magnetic poles of the application can be increased or decreased according to test requirements, vertical magnetic fields can be added, and the application can be used with a magneto-optical Kerr microscope. The magneto-optical Kerr microscope uses at least one pair of polarizers as a polarizer or an analyzer, and uses an optical imaging method to see the change in the magnetic properties of the sample. The traditional probe table structure cannot be integrated with the magneto-optical Kerr microscope. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a top view of a magnetic field probe table according to an embodiment of the application;

[0022] Figure 2 It is a top view of a magnetic field probe table according to an embodiment of the application;

[0023] Figure 3 It is a bottom view of a magnetic field probe table according to an embodiment of the application;

[0024] Figure 4 It is a bottom view of a magnetic field probe table according to an embodiment of the application;

[0025] Figure 5 It is a three-dimensional view of a magnetic field probe table according to an embodiment of the application, adding an optical module and a vertical magnetic pole;

[0026] Wherein, 1 - table, 2 - probe base, 3 - electrical probe, 4 - in-plane magnetic pole, 5 - magnetic conductive structure, 6 - excitation coil, 7 - table support device, 8 - optical module, 9 - vertical magnetic pole, 10 - sample to be tested, 11 - sample table. DETAILED DESCRIPTION

[0027] The present application will be described in detail below with reference to the accompanying drawings and specific embodiments, a magnetic field probe table, as shown in Figure 1 、 Figure 3 , comprising: a table 1, at least one pair of probe base 2, at least one pair of electrical probe 3, at least one pair of in-plane magnetic pole 4, magnetic conductive structure 5, excitation coil 6, excitation coil power supply unit and table support device 7.

[0028] The table 1 is a ring structure, the in-plane magnetic pole 4 is fixed to the inner side of the lower ring structure of the table 1, the probe base 2 is fixed to the upper surface of the table 1, the electrical probe 3 is installed on the probe base 2, the magnetic conductive structure 5 is fixed to the lower surface of the table, the excitation coil 6 is wound on the surface of the magnetic conductive structure 5, the excitation coil power supply unit is the power supply of the excitation coil, and the table support device 7 fixes the table on the experiment table. The table support device 7 of the present embodiment is a three support column structure.

[0029] The table support device of the present embodiment is a three column structure.

[0030] The ring structure is a closed ring structure or an open ring structure, as shown in Figure 2 、 Figure 4 .

[0031] The in-plane magnetic pole 4 has a magnetic pole fixing device, each in-plane magnetic pole 4 is fixed to the inner side of the lower ring structure of the table through its corresponding fixing device, and the distance between the magnetic poles can be adjusted by adjusting the magnetic pole fixing device.

[0032] The magnetic conductive structure 5 has a gap or no gap between one end and one of the pair of in-plane magnetic poles 4, and the other end and the other of the pair of in-plane magnetic poles 4.

[0033] The probe base 2 is a vacuum suction type probe base bottom or a slide type probe base or other fixed way of probe base.

[0034] If the probe base 2 is a vacuum probe base, the vacuum probe base bottom has a vacuum suction cup, which is fixed on the table 1 by means of a suction pump through a suction pipe, and the table 1 corresponding to the fixed vacuum probe base requires a smooth surface.

[0035] The probe base 2 is provided with a spatial displacement adjusting device capable of adjusting the spatial position in three dimensions, a probe base X direction adjusting knob (adjusting left and right in the horizontal direction), a probe base Y direction adjusting knob (adjusting up and down in the horizontal direction), and a probe base Z direction adjusting knob (adjusting in the vertical direction).

[0036] The electric probe 3 is a direct current probe or a microwave probe.

[0037] The in-plane magnetic pole 4 is a magnetic pole generating a magnetic field parallel to the surface of the sample 10 to be tested.

[0038] The sample 10 to be tested is placed between the in-plane magnetic poles 4, and a sample stage 11 is arranged below the sample 10 to be tested, and the sample is placed on the sample stage 11, as shown in Figure 5 .

[0039] A vertical magnetic pole 9 can be arranged below the sample 10 to be tested.

[0040] A magneto-optical Kerr microscope is arranged above the sample 10 to be tested, and the magneto-optical Kerr microscope is the optical module 8.

[0041] The materials of the table top 1 and the probe base 2 are non-magnetic materials, and the materials of the in-plane magnetic pole 4 and the magnetic conductive structure 5 are ferromagnetic or ferrimagnetic substances.

[0042] The magnetic field probe table system provided by the application contains a probe table top 1, a probe base 2, an electric probe 3 (a direct current probe or an alternating current probe), an in-plane magnetic pole 4, a magnetic conductive structure 5, an excitation coil 6, and a probe table support device 7. The material of the probe table top 1 can be aluminum, aluminum alloy, copper, non-magnetic stainless steel, etc., and the upper surface of the table top has a smooth surface in all or part of the area, wherein the smooth surface should account for more than half of the total area of the upper surface of the table top; the main structure of the probe base 2 is made of non-magnetic material (except that some screws or springs can have magnetism), and is provided with a vacuum chuck which can be adsorbed on the table top 1 under the action of an air pump; the electric probe 3 can be a direct current probe or a high-frequency alternating current probe; the probe base 2 is provided with a fine adjustment knob which can adjust the probe in multiple spatial dimensions; the material of the magnetic pole 4 can be selected from, but not limited to, ferromagnetic metals such as iron, cobalt, nickel, alloys thereof, or compounds containing the elements, etc., and no coil is wound around the magnetic pole; it should be pointed out that the magnetic field probe table provided by the application can be a closed structure, as shown in Figure 1 , or an open structure, as shown in Figure 2 ; the magnetic pole 4 can have four magnetic poles, and two of them are opposite to each other, as shown in Figure 1The magnetic pole 4 can also have only one pair; the magnetic pole 4 is fixed under the probe station table top by screw or sliding slot structure, and the distance between the opposite magnetic poles can be adjusted; the magnetic conductive structure 5 can be made of ferromagnetic metal such as iron, cobalt, nickel, or its alloy, or a magnetic compound containing such elements, but not limited to; the magnetic conductive structure 5 is wound with an excitation coil 6; the magnetic conductive structure 5 is fixed under the probe station table top 1; the table top 1 is connected with the support column 7, so that it can be stably placed on the plane.

[0043] The magnetic pole 4 is fixed under the table top 1, and the distance between the opposite magnetic poles can be adjusted, which can be realized in various ways, for example, a plurality of sliding slot structures are left on the magnetic pole, and a plurality of screw holes are left under the table top, and the magnetic pole is fixed by screwing the screw through the sliding slot and fixing it in the screw hole, and the position of the magnetic pole is adjusted by adjusting the position of the sliding slot relative to the screw; another example is that a plurality of through holes are left on the magnetic pole, and a plurality of threaded holes are left under the table top, and the position of the magnetic pole can be controlled by controlling the corresponding relationship between the through holes on the magnetic pole and the threaded holes on the table top, and fixed by screwing.

[0044] When working, the magnetic coil power supply module supplies current to the excitation coil, and a magnetic field can be induced between the opposite magnetic poles; by adjusting the distance between the opposite magnetic poles, a compromise between high magnetic field and large operation space can be achieved, so that the system can adapt to different test environments.

[0045] The magnetic field probe station proposed in the application can be used in combination with a magneto-optical Kerr microscope. The probe station is placed on the horizontal plane by the support column 7, the probe seat 2 and the probe vacuum are adsorbed above the table top. The sample is fixed between the magnetic poles by the sample table 11. The magneto-optical Kerr microscope optical system, i.e. the optical module 8, is located above the probe station, as shown in Figure 5 .

[0046] The applicant of the present application has made a detailed description and explanation of the embodiments of the present application in combination with the drawings of the specification, but those skilled in the art should understand that the above embodiments are only preferred embodiments of the present application, and the detailed description is only to help the reader better understand the spirit of the present application, and is not a limitation on the protection scope of the present application, on the contrary, any improvement or modification based on the spirit of the present application should fall within the protection scope of the present application.

Claims

1. A magnetic field probe station, characterized in that: The probe station includes: a table, at least one pair of probe seats, at least one pair of electrical probes, at least one pair of in-plane magnetic poles, a magnetic conductive structure, an excitation coil, an excitation coil power supply unit and a table support device; The table is an annular structure, the in-plane magnetic poles are fixed to the inner side of the annular structure under the table, the relative distance between the magnetic poles can be adjusted, the probe seat is fixed to the upper surface of the table, the electrical probe is installed on the probe seat, the magnetic conductive structure is fixed to the lower surface of the table, the excitation coil is wound on the surface of the magnetic conductive structure, the excitation coil power supply unit supplies power to the excitation coil, and the table support device fixes the table to the experimental table; The table and probe seat are made of non-magnetic materials, and the in-plane magnetic poles and magnetic conductive structure are made of ferromagnetic or ferrimagnetic materials; There is a gap or no gap between one end of the magnetic conductive structure and one of the in-plane magnetic poles in a pair of in-plane magnetic poles, and there is a gap or no gap between the other end of the magnetic conductive structure and the other in-plane magnetic pole in a pair of in-plane magnetic poles; the annular structure is a closed annular structure or an open annular structure.

2. The magnetic field probe station according to claim 1, characterized in that: The in-plane magnetic poles have magnetic pole fixing devices, and each in-plane magnetic pole is fixed to the inner side of the annular structure under the table through its corresponding fixing device. The distance between the magnetic poles can be adjusted by adjusting the magnetic pole fixing devices.

3. The magnetic field probe station according to claim 1, characterized in that: The probe seat is provided with a spatial displacement adjustment device, which can adjust the spatial position in three dimensions.

4. The magnetic field probe station according to claim 1, characterized in that: The electrical probe is a DC probe or a microwave probe.

5. The magnetic field probe station according to claim 1, characterized in that: The in-plane magnetic poles are magnetic poles that generate a magnetic field parallel to the surface of the sample to be tested.

6. The magnetic field probe station according to claim 1, characterized in that: A sample to be tested is placed between the in-plane magnetic poles, and a sample stage is provided below the sample, on which the sample to be tested is placed.

7. The magnetic field probe station according to claim 6, characterized in that: A vertical magnetic pole can be provided below the sample to be tested.

8. The magnetic field probe station according to claim 6, characterized in that: A magneto-optical Kerr microscope is arranged above the sample to be tested.

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