A single crystal silicon rod feeding device and a feeding vehicle
By designing a single crystal silicon rod loading device, including a loading and locating device, the problems of morphological deviation and centerline deviation of the single crystal silicon rod when grasping the robot device is solved, and more accurate crystalline alignment and time-saving effects are achieved.
Patent Information
- Application Number
- CN201911049821.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2019-10-31
- Publication Date
- 2025-03-18
- Estimated Expiration
- 2039-10-31
AI Technical Summary
When cutting a single crystal silicon rod, the robot device may not necessarily grasp the center position of the single crystal silicon rod, resulting in morphological offset and centerline deviation, which in turn affects the completion of crystalline alignment.
A single crystal silicon rod loading device is designed, including a loading and placing device and a length measuring device. The feeding and placing device supports single crystal silicon rods through support frames and rollers. The length measuring device uses a servo motor, ball screw and transmission to measure the length of the single crystal silicon rods and adjust its position to ensure balance when the robot grasps.
By ensuring that the single crystal silicon rod remains balanced when grasped by the robot, the axis can be accurately aligned with the central axis of the clamping mechanism, saving alignment time and avoiding situations where alignment is not possible.
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Figure CN110744730B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the field of brittle and hard material cutting, and in particular to a single crystal silicon rod feeding device and a feeding cart. Background Art
[0002] When a round rod-shaped single crystal silicon rod is cut into a cubic single crystal silicon rod, the single crystal silicon rod before cutting is grabbed from the material cart device to the clamping device by a manipulator device. In actual use, since the length of the single crystal silicon rod raw material before cutting is inconsistent, even if the manipulator device has multiple clamps, the manipulator device may not necessarily grab the center of the single crystal silicon rod raw material. After grabbing, the weight of the two ends of the single crystal silicon rod deviates, which leads to a height difference at both ends of the single crystal silicon rod raw material. When the single crystal silicon rod is clamped by the front and rear clamping mechanisms, its center line will have a large angle deviation from the center line of the front and rear clamping mechanisms, and it will take more time to align the crystal line. If the angle deviation is too large, the crystal line alignment will not be completed. Summary of the invention
[0003] To this end, it is necessary to provide a single crystal silicon rod feeding device and a material cart to solve the problem that the robot device of the square cutting machine in the prior art does not necessarily grasp the center position of the single crystal silicon rod, resulting in the displacement of the shape of the single crystal silicon rod and then the deviation of the center line.
[0004] To achieve the above-mentioned purpose, the inventor provides a single crystal silicon rod loading device, including a loading and placing device and a length measuring device;
[0005] The loading and placing device comprises a support frame, both sides of which are symmetrically bent upwards, and at least two rollers are respectively arranged on both sides of the support frame, each roller is arranged in sequence along the length direction of the support frame, and is rotatably connected to the support frame, and all protrudes upwards from the support frame to roll and support the single crystal silicon rod;
[0006] The length measuring device includes a base, a ball screw, a servo motor, a transmission member, a measuring member and a positioning member; the base is arranged at one side of the support frame; the positioning member is located at the rear end of the support frame and protrudes upward from the support frame; the transmission member is movably arranged at the base and can move along the length direction of the support frame; the transmission member is provided with a threaded hole; the ball screw is rotatably arranged on the base, and the length direction of the ball screw is consistent with the length direction of the support frame, and passes through the threaded hole by threaded transmission; one end of the measuring member is connected to the transmission member, and the other end of the measuring member extends to the top of the support frame to abut against the single crystal silicon rod; the servo motor is transmission-connected to the ball screw, and is used to drive the ball screw to rotate to drive the measuring member to move.
[0007] As a preferred structure of the present invention, the base is provided with two slide rails parallel to the support frame, and the bottom of the transmission member is provided with a slide groove matched with the slide rails; the transmission member is slidably installed on the slide rail of the base through the slide groove.
[0008] As a preferred structure of the present invention, it also includes a reducer, and the servo motor is connected to the ball screw via the reducer.
[0009] As a preferred structure of the present invention, two ends of the ball screw are rotatably connected to the head end and the tail end of the base through bearings respectively.
[0010] As a preferred structure of the present invention, it also includes a guide rail and a base driving mechanism; the guide rail is arranged under the base, and the length direction of the guide rail is perpendicular to the length direction of the support frame; the base is arranged on the guide rail, and can slide along the guide rail towards or away from the support frame; the base driving mechanism is connected to the base in a transmission manner, and is used to drive the base towards or away from the support frame.
[0011] As a preferred structure of the present invention, the base driving mechanism is an air cylinder, an oil cylinder or a screw motor.
[0012] The inventor also provides a material cart, including a material cart frame and a single crystal silicon rod loading device, wherein the single crystal silicon rod loading device is any of the single crystal silicon rod loading devices described above; a walking wheel is provided at the bottom of the material cart frame; and the single crystal silicon rod loading device is arranged on the material cart frame.
[0013] As a preferred structure of the present invention, it also includes a material unloading placement device, and the structure of the material unloading placement device is consistent with the structure of the material loading placement device.
[0014] As a preferred structure of the present invention, the material blanking and placing device also includes a V-shaped frame, which is arranged in the cavity of the support frame of the material blanking and placing device, and a V-shaped groove is opened on the top surface of the V-shaped frame, and the length direction of the V-shaped groove is consistent with the length direction of the support frame of the material blanking and placing device.
[0015] Different from the prior art, the single crystal silicon rod loading device and the material cart described in the above technical scheme include a loading and placing device and a length measuring device; the loading and placing device includes a support frame, and the length measuring device includes a base, a ball screw, a servo motor, a transmission part, a measuring part and a positioning part. The measuring piece in the initial state is driven by the ball screw and moves from the position flush with the tail end of the support frame to the position flush with the head end of the support frame. At this time, it abuts against the head end of the base, and the torque of the servo motor changes and stops, and the rotation amount at this time is recorded, thereby obtaining the length from the head end to the tail end of the support frame; at this time, the measuring piece is flush with the head end of the support frame, and then when the single crystal silicon rod is placed on the material cart, the single crystal silicon rod is lifted and placed on the support frame, and the end of the single crystal silicon rod is against the positioning piece, and the servo motor is started at this time, and the servo motor drives the ball screw to rotate to drive the transmission piece and the measuring piece to move in the direction close to the positioning piece until the measuring piece abuts against the end of the single crystal silicon rod, at this time, the torque of the servo motor changes and stops, and the rotation amount at this time is recorded, thereby obtaining the distance between the end of the single crystal silicon rod and the head end of the support frame, and finally the length of the single crystal silicon rod can be known, so as to provide data for judgment for where the manipulator device grabs the single crystal silicon rod to ensure that the single crystal silicon rod can maintain balance after being grabbed by the manipulator device. The single crystal silicon rod can maintain balance after being grasped by the manipulator device, which can ensure that the central axis of the single crystal silicon rod can be accurately located at the central axis of the clamping mechanism after the single crystal silicon rod is moved to the clamping mechanism, which can save alignment time and avoid the situation where alignment cannot be achieved. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 This is a structural diagram of a single crystal silicon rod loading device according to an embodiment of the present invention;
[0017] Figure 2 is a structural diagram of a single crystal silicon rod loading device according to another embodiment of the present invention;
[0018] Figure 3 This is a structural diagram of a material cart involved in one embodiment of the present invention;
[0019] Figure 4 It is a structural diagram of a material placement device according to an embodiment of the present invention;
[0020] Figure 5 This is an end view of a material cart according to an embodiment of the present invention.
[0021] Description of reference numerals:
[0022] 1. Loading and placing device;
[0023] 100. Support frame;
[0024] 101, roller;
[0025] 2. Base;
[0026] 200, slide rail;
[0027] 3. Ball screw;
[0028] 4. Servo motor;
[0029] 5. Reducer;
[0030] 6. Transmission parts;
[0031] 7. Measuring parts;
[0032] 8. Positioning parts;
[0033] 9. Material carriage;
[0034] 900, guide rail;
[0035] 901, traveling wheel;
[0036] 902, base driving mechanism;
[0037] 10. Material placement device;
[0038] 1000, V-shaped frame;
[0039] 11. Single crystal silicon rod. DETAILED DESCRIPTION
[0040] In order to explain the technical content, structural features, achieved objectives and effects of the technical solution in detail, the following is a detailed description in conjunction with specific embodiments and accompanying drawings.
[0041] See also Figure 1 The present invention provides a single crystal silicon rod feeding device for assisting the square cutting machine body in feeding. While feeding, the length of the single crystal silicon rod 11 is measured to provide data for judgment as to where the manipulator device grabs the single crystal silicon rod 11 to ensure that the single crystal silicon rod 11 can maintain balance after being grabbed by the manipulator device.
[0042] In a specific embodiment, the single crystal silicon rod loading device includes a loading and placing device 1 and a length measuring device. The loading and placing device 1 is used to place uncut single crystal silicon rods 11, and the uncut single crystal silicon rods 11 can be placed flat on it; the length measuring device is used to measure the length of the uncut single crystal silicon rods 11 after the uncut single crystal silicon rods 11 are placed flat on it.
[0043] The loading and placing device 1 includes a support frame 100, both sides of which are symmetrically bent upwards, and at least two rollers 101 are respectively arranged on both sides of the support frame 100. Each roller 101 is arranged in sequence along the length direction of the support frame 100, and is rotatably connected to the support frame 100, and all protrudes upwards from the support frame 100 to roll and support the single crystal silicon rod 11. After the single crystal silicon rod 11 is placed on the support frame 100, the single crystal silicon rod 11 is pushed, and under the interaction between the single crystal silicon rod 11 and the roller 101, the single crystal silicon rod 11 can be easily pushed.
[0044] The length measuring device includes a base 2, a ball screw 3, a servo motor 4, a transmission member 6, a measuring member 7 and a positioning member 8; the base 2 is arranged at one side of the support frame 100, and is used to carry the ball screw 3, the servo motor 4, the transmission member 6, and the measuring member 7. Specifically, the base 2 is arranged parallel to the support frame 100, and the length direction of the base 2 is consistent with the length direction of the support frame 100; the ball screw 3 is used to rotate under the drive of the servo motor 4, thereby driving the transmission member 6 threadedly connected thereto to move; the servo motor 4 is used to drive the ball screw 3 to rotate; the transmission member 6 is used to drive the measuring member 7 to move under the drive of the ball screw 3; when the measuring member 7 moves to the end of the single crystal silicon rod 11, it abuts against the end of the single crystal silicon rod 11 to change the torque of the servo motor 4; the positioning member 8 is used to limit the movement of the single crystal silicon rod 11 and achieve the purpose of aligning the single crystal silicon rod 11.
[0045] The transmission member 6 is movably arranged at the base 2 and can move along the length direction of the support frame 100. The distance moved by the transmission member 6 is the length of the corresponding part of the support frame 100. In a certain embodiment, the base 2 is provided with two slide rails 200 parallel to the support frame 100, and the bottom of the transmission member 6 is provided with a slide groove matched with the slide rail 200; the transmission member 6 is slidably installed on the slide rail 200 of the base 2 through the slide groove, one end of the measuring member 7 is connected to the transmission member 6, and the other end of the measuring member 7 extends to the top of the support frame 100 to abut against the single crystal silicon rod 11. Such an arrangement enables the transmission member 6 to be movably connected to the base 2, and the length of the slide rail 200 ensures that when the measuring member 7 moves to the tail end of the slide rail 200, it will be flush with the tail end of the support frame 100.
[0046] The transmission member 6 is provided with a threaded hole; the ball screw 3 is rotatably arranged on the base 2, specifically, between the two slide rails 200, and the length direction of the ball screw 3 is consistent with the length direction of the support frame 100, and passes through the threaded hole of the transmission member 6 by threaded transmission. To ensure that the ball screw 3 is rotatably arranged on the base 2, the two ends of the ball screw 3 are rotatably connected to the head end and the tail end of the base 2 through bearings, the outer ring of the bearing is connected to the base 2, and the end of the ball screw 3 is fixed through the inner ring of the bearing; the output shaft of the servo motor 4 is connected to the ball screw 3 by transmission, specifically, it also includes a reducer 5, and the servo motor 4 is connected to the ball screw 3 through the reducer 5. After the servo motor 4 is started, it can drive the ball to rotate, and at this time, the transmission member 6 moves along the length direction of the ball screw 3 under the drive of the threaded transmission.
[0047] The positioning member 8 is located at the rear end of the support frame 100 and protrudes upward from the support frame 100. This arrangement allows the single crystal silicon rod 11 to be pushed and adjusted to rest against the positioning member 8 after the single crystal silicon rod 11 is lifted and placed on the support frame 100. The positioning member 8 achieves the purpose of limiting the single crystal silicon rod 11 and aligning the end of the single crystal silicon rod 11 to the rear end of the slide rail 200. At this time, the positioning member 8 can represent the starting position for measuring the length of the single crystal silicon rod 11.
[0048] The measuring piece 7 in the initial state is driven by the ball screw 3 and moves from the position flush with the rear end of the support frame 100 to the position flush with the head end of the support frame 100. At this time, it abuts against the head end of the base 2. The torque of the servo motor 4 changes and stops, and the rotation amount at this time is recorded, thereby obtaining the length from the head end to the tail end of the support frame 100. At this time, the measuring piece 7 is flush with the head end of the support frame 100, and then when the single crystal silicon rod 11 is placed on the material car, the single crystal silicon rod 11 is lifted and placed on the support frame 100, and the end of the single crystal silicon rod 11 is against the positioning piece 8, and the servo motor 4 is started at this time. , the servo motor 4 drives the ball screw 3 to rotate, so as to drive the transmission part 6 and the measuring part 7 to move in the direction close to the positioning part 8, until the measuring part 7 abuts against the end of the single crystal silicon rod 11, at which time the torque of the servo motor 4 changes and stops, and the rotation amount at this time is recorded, so as to know the distance between the end of the single crystal silicon rod 11 and the head end of the support frame 100, and finally the length of the single crystal silicon rod 11 can be known, so as to provide data for judgment on where the manipulator device grabs the single crystal silicon rod 11, so as to ensure that the single crystal silicon rod 11 can maintain balance after being grabbed by the manipulator device. If the single crystal silicon rod 11 can maintain balance after being grabbed by the manipulator device, it can ensure that after the single crystal silicon rod 11 is moved to the clamping mechanism, the central axis of the single crystal silicon rod 11 can be accurately located at the central axis of the clamping mechanism, which can save alignment time and avoid the situation where alignment cannot be achieved.
[0049] The single crystal silicon rod 11 is transported by a turnover vehicle. In order to conveniently transfer the single crystal silicon rod 11 from the turnover vehicle to the single crystal silicon rod loading device, please refer to Figure 2 In a further embodiment, it also includes a guide rail 900 and a base driving mechanism 902; the guide rail 900 is arranged under the base 2, and the length direction of the guide rail 900 is perpendicular to the length direction of the support frame 100; the base 2 is arranged on the guide rail 900, and can slide along the guide rail 900 close to or away from the support frame 100; the base driving mechanism 902 is transmission-connected with the base 2, and is used to drive the base 2 close to or away from the support frame 100. The base driving mechanism 902 can be a cylinder, an oil cylinder, a screw motor, or is consistent with the mechanism for driving the transmission member 6 to move, that is, a transmission nut is arranged under the base 2, and the ball screw passes through the transmission nut by threaded transmission, and the output shaft of the rotating motor is connected to the ball screw. Under the drive of the rotating motor, the ball screw rotates, and under the drive of the threaded transmission, the transmission nut moves with the base 2 along the guide rail 900.
[0050] On this basis, when it is necessary to transfer the single crystal silicon rod 11, start the base driving mechanism 902 to drive the base 2 to move in the direction away from the support frame 100 until the measuring piece 7 leaves the top of the support frame 100. At this time, the single crystal silicon rod 11 can be directly pushed from the head end of the support frame 100 to the tail end of the support frame 100 until the end of the single crystal silicon rod 11 abuts against the positioning piece 8; drive the measuring piece 7 from the tail end to the head end of the support frame 100, the measuring piece 7 abuts against the head end of the slide rail 200, the servo motor 4 stops due to the change in force torque, and record The rotation amount at this time is recorded, and the length from the front end to the rear end of the support frame 100 is obtained; then the base driving mechanism 902 is started to drive the base 2 to move toward the direction close to the support frame until the measuring piece 7 moves to the top of the support frame 100, and the measuring piece 7 is driven to move in the opposite direction until the measuring piece 7 rests against the end of the single crystal silicon rod 11. At this time, the torque of the servo motor 4 changes and stops, and the rotation amount at this time is recorded, and the distance between the end of the single crystal silicon rod 11 and the front end of the support frame 100 is obtained, and finally the length of the single crystal silicon rod 11 can be known.
[0051] See also Figure 3 The present invention also provides a material cart, including a material cart frame 9 and a single crystal silicon rod loading device, wherein the single crystal silicon rod loading device is any of the single crystal silicon rod loading devices described above; a walking wheel 901 is provided at the bottom of the material cart frame 9; the single crystal silicon rod loading device is arranged on the material cart frame 9, and by using the material cart to load materials, it is possible to measure the length of the uncut single crystal silicon rod 11 while loading the materials.
[0052] See also Figure 4In a further embodiment, a material unloading and placing device 10 is further included. The structure of the material unloading and placing device 10 is consistent with the structure of the material loading and placing device 1. The cut single crystal silicon rods 11 can be placed on the support frame 100 of the material unloading and placing device 10, and then the single crystal silicon rods 11 on the material unloading and placing device 10 are manually moved away.
[0053] Since the cut single crystal silicon rod 11 is a square column, in order to place the cut single crystal silicon rod 11 more stably, refer to Figure 5 In a further embodiment, the material unloading and placing device 10 further includes a V-shaped frame 1000, which is arranged in the cavity of the support frame 100 of the material unloading and placing device 10, and a V-shaped groove is opened on the top surface of the V-shaped frame 1000, and the length direction of the V-shaped groove is consistent with the length direction of the support frame 100 of the material unloading and placing device 10. When the cut single crystal silicon rod 11 is placed on the support frame 100 of the material unloading and placing device 10, one edge of the cut single crystal silicon rod 11 faces downward and perfectly rests against the V-shaped groove of the V-shaped frame 1000, so that the cut single crystal silicon rod 11 can be stably placed.
[0054] It should be noted that, although the above embodiments have been described in this article, the patent protection scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, changes and modifications made to the embodiments described herein, or equivalent structures or equivalent process changes made using the contents of the present invention specification and drawings, directly or indirectly applying the above technical solutions to other related technical fields, are all included in the patent protection scope of the present invention.
Claims
1. A single crystal silicon rod feeding device, characterized in that: It includes a loading and placing device and a length measuring device; The loading and placing device comprises a support frame, both sides of which are symmetrically bent upwards, and at least two rollers are respectively arranged on both sides of the support frame, each roller is arranged in sequence along the length direction of the support frame, and is rotatably connected to the support frame, and all protrudes upwards from the support frame to roll and support the single crystal silicon rod; The length measuring device comprises a base, a ball screw, a servo motor, a transmission member, a measuring member and a positioning member; the base is arranged at one side of the support frame; the positioning member is located at the rear end of the support frame and protrudes upward from the support frame; the transmission member is movably arranged at the base and can move along the length direction of the support frame; a threaded hole is provided on the transmission member; the ball screw is rotatably arranged on the base, and the length direction of the ball screw is consistent with the length direction of the support frame, and passes through the threaded hole by threaded transmission; one end of the measuring member is connected to the transmission member, and the other end of the measuring member extends to the top of the support frame to abut against the single crystal silicon rod; the servo motor is transmission-connected to the ball screw, and is used to drive the ball screw to rotate to drive the measuring member to move; The base is provided with two slide rails parallel to the support frame, and the bottom of the transmission member is provided with a slide groove adapted to the slide rails; the transmission member is slidably mounted on the slide rails of the base through the slide groove; It also includes a reducer, and the servo motor is connected to the ball screw through the reducer; It also includes a guide rail and a base driving mechanism; the guide rail is arranged under the base, and the length direction of the guide rail is perpendicular to the length direction of the support frame; the base is arranged on the guide rail and can slide along the guide rail towards or away from the support frame; the base driving mechanism is connected to the base for driving the base to move towards or away from the support frame.
2. The single crystal silicon rod feeding device according to claim 1, characterized in that: The two ends of the ball screw are rotatably connected to the head end and the tail end of the base through bearings respectively.
3. The single crystal silicon rod feeding device according to claim 1, characterized in that: The base driving mechanism is an air cylinder, an oil cylinder or a screw motor.
4. A material car, characterized in that: It comprises a material carriage frame and a single crystal silicon rod loading device, wherein the single crystal silicon rod loading device is the single crystal silicon rod loading device according to any one of claims 1 to 3; a walking wheel is arranged at the bottom of the material carriage frame; and the single crystal silicon rod loading device is arranged on the material carriage frame.
5. The skip according to claim 4, characterized in that: It also includes a material unloading placement device, and the structure of the material unloading placement device is consistent with the structure of the material loading placement device.
6. The skip according to claim 5, characterized in that: The material placement device also includes a V-shaped frame, which is arranged in the cavity of the support frame of the material placement device. The top surface of the V-shaped frame is provided with a V-shaped groove, and the length direction of the V-shaped groove is consistent with the length direction of the support frame of the material placement device.
Citation Information
Patent Citations
Monocrystalline silicon rod feeding device and skip car
CN211194520U