Ultra-small high-sensitivity magnetic sensor

A magnetic sensor and ultra-miniature technology, which can be used in devices applying electro-magnetic effects, magnetic field measurement using electromagnetic devices, instruments, etc., and can solve the problems of reduced detection sensitivity and difficulty in miniaturizing detection sensitivity.

CN110753850AActive Publication Date: 2020-02-04ASAHI INTECC CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2020-02-04

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Abstract

In order to provide an ultra-small high-sensitivity magnetic sensor that includes a magnetic field detection element formed integrally with an ASIC, the present invention is configured such that the thickness of a substrate film (10b) formed on the upper surface of an insulating protective film (10a) of an ASIC (4) is set to 1-20 um, a groove (11) having a depth of 1-10 um is formed in the substrate film (10b), an element (1) is formed along the groove (11) surface so as to partially or entirely bury a coil, an electrode of the element (1) and an electrode of the ASIC (4) are electrically connected via a through-hole type electrode joining part that penetrates the insulating protective film (10a) and the substrate film (10b), and the thickness of the portion of the element from the surfaceof the ASIC (4) is set not more than 20 um.
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Description

technical field

[0001] The present invention relates to a technology for ultraminiaturizing the size and thickness of a GSR sensor by integrally forming a GSR element with an application specific integrated circuit (hereinafter referred to as ASIC).

[0002] Among them, the GSR sensor is a highly sensitive micro-magnetic sensor based on the ultra-high-speed spin rotation effect (English expression: GHz Spin Rotation effect). Background technique

[0003] High-sensitivity micro-magnetic sensors, including horizontal FG sensors, vertical FG sensors, Hall sensors, GMR sensors, TMR sensors, MI sensors, GSR sensors and high-frequency carrier sensors, etc. Currently, these sensors are widely used in smartphones, automobiles, medicine and robotics. Among them, the GSR sensor (Patent Document 1) has attracted attention because it is relatively excellent in sensitivity and size.

[0004] Currently, researches on mounting a magnetic sensor on a device introduced into a living body s...

Examples

Embodiment

[0082] figure 1 A plan view of the GSR sensor and the GSR sensor element provided by the embodiment is shown, figure 2 A sectional view along line A1-A2 of the plan view is shown, image 3 A cross-sectional view along line B1-B2 is shown, and an embodiment of the present invention will be described below.

[0083] Here, the structure of the GSR sensor, the structure of the elements, and the electronic circuit are all based on the above-mentioned embodiments.

[0084] The dimensions of the element 1 are 0.10 mm in width and 0.40 mm in length. In terms of thickness, the thickness 40 of the ASIC 4 is 50 μm, the thickness 14 of the insulating protective film 10 a and the substrate film 10 b is 8 μm, and the thickness of the convex part of the element is 2 μm. The total thickness of the sensor is 60 μm.

[0085] In the central part of the element 1, a groove 11 with a width of 20 μm and a depth of 3 μm is formed on the substrate film 10b so that two magnet wires (21 and 22) can...