Device, method and system for measuring the vacuum degree of an X-ray tube

Abstract

The present application relates to an apparatus, a method, and a system for measuring the vacuum degree of an X-ray tube. The apparatus includes: a measurement module, including a first power supply with positive and negative electrodes respectively connected to one end of the anode and the cathode filament of the X-ray tube, a second power supply connected in parallel with the cathode filament, a test power supply with positive and negative electrodes respectively connected to this end of the cathode filament and the outer shell metal part of the X-ray tube, and a test resistor connected between the test power supply and the outer shell metal part, the measurement module being configured to measure a voltage value or a current value corresponding to the test resistor when the first power supply, the second power supply, and the test power supply are energized; and a processing module, configured to obtain the voltage value or the current value and compare it with a reference curve to obtain the vacuum degree of the X-ray tube. Using the technical solution of the present application, the vacuum degree inside the X-ray tube can be measured at low cost, quickly, accurately, and non-destructively.

Description

Technical Field

[0001] This application relates to the field of measuring the vacuum degree of an X-ray tube. Specifically, this application relates to a device, a method, and a system for measuring the vacuum degree of an X-ray tube. Background Art

[0002] An X-ray tube is a vacuum diode operating under high voltage. It includes two electrodes: one is a filament for emitting electrons, serving as the cathode; the other is a target for receiving electron bombardment, serving as the anode. Both poles of the X-ray tube are sealed in a high-vacuum housing. The X-ray tube must operate under high vacuum. When the vacuum degree of the X-ray tube is insufficient (i.e., the content of residual gas in the vacuum tube is relatively high), a gas discharge phenomenon will occur. Severe gas discharge will cause a sudden increase in the tube current of the X-ray tube and even lead to breakdown of the X-ray tube. Therefore, it is necessary to test the vacuum degree of the X-ray tube.

[0003] Traditionally, the method used to test the vacuum degree of an X-ray tube requires destroying the external form of the original X-ray tube, then evacuating the X-ray tube core and detecting leak points in the tube core. After detecting no leak points, it is also necessary to re-evacuate and seal the X-ray tube, and the steps are complex. For non-destructive measurement, a common method is to qualitatively measure the vacuum degree through high-frequency electric sparks. The electric spark method judges the vacuum degree by observing the fluorescence of the electric sparks in the tube core of the X-ray tube under high voltage with the naked eye of a person. Therefore, it can only roughly estimate the vacuum level in the X-ray tube. The applicable vacuum degree range is limited to the low-vacuum region and is only applicable to X-ray tube products with a transparent glass housing. Summary of the Invention

[0004] Embodiments of this application provide a device and a method for measuring the vacuum degree of an X-ray tube, so as to at least solve the problem in the prior art that it is difficult to measure the vacuum degree in the X-ray tube quickly, accurately, at low cost, and non-destructively.

[0005] According to one aspect of the embodiments of this application, a device for measuring the vacuum degree of an X-ray tube is provided, including:

[0006] A measurement module, including a first power supply, whose positive pole is connected to the anode of the X-ray tube and whose negative pole is connected to one end of the cathode filament of the X-ray tube; a second power supply, connected in parallel with the cathode filament; a test power supply, whose positive pole is connected to this end of the cathode filament of the X-ray tube and whose negative pole is connected to the metal part of the X-ray tube housing; and a test resistor, further connected between the test power supply and the metal part of the housing, where the measurement module is configured to measure the voltage value or current value corresponding to the test resistor when the first power supply, the second power supply, and the test power supply are energized; and

[0007] A processing module, configured to obtain the voltage value or current value and compare it with a reference curve to obtain the vacuum degree of the X-ray tube, wherein the reference curve includes reference voltage values or reference current values corresponding to a test resistor measured in advance by a reference X-ray tube and a measurement module at different vacuum degrees of the given reference X-ray tube in the same measurement manner.

[0008] In this way, by using an easily available and low-cost power supply and resistor, the cathode filament of the X-ray tube, the metal part of the X-ray tube housing, the test power supply, and the test resistor form a measurement loop, and the vacuum degree value inside the X-ray tube can be obtained by measuring the voltage or current value in the measurement loop, enabling simple, rapid, and low-cost measurement of the vacuum degree of the X-ray tube.

[0009] In a schematic embodiment of the device for measuring the vacuum degree of an X-ray tube, obtaining a voltage value or current value and comparing it with a reference curve to obtain the vacuum degree of the X-ray tube includes: obtaining a reference voltage value or reference current value on the reference curve that is equal to the voltage value or current value; obtaining the value of the vacuum degree corresponding to the reference voltage value or reference current value as the value of the vacuum degree of the X-ray tube.

[0010] In this way, by using the one-to-one correspondence between the voltage value and the vacuum degree value on the pre-calibrated reference curve, and by comparing the measured voltage value or current value with the pre-calibrated reference curve, the accurate vacuum degree of the X-ray tube to be measured can be obtained.

[0011] In a schematic embodiment of the device for measuring the vacuum degree of an X-ray tube, the measurement module further includes a voltmeter connected in parallel with the test resistor, and the voltmeter measures the voltage value across the test resistor when the first power supply, the second power supply, and the test power supply are energized.

[0012] In a schematic embodiment of the device for measuring the vacuum degree of an X-ray tube, the measurement module further includes an ammeter connected in series with the test resistor, and the ammeter measures the current value flowing through the test resistor when the first power supply, the second power supply, and the test power supply are energized.

[0013] In this way, by using a common voltmeter or ammeter, three power supplies, and a test resistor, the measurement of the vacuum degree of the X-ray tube can be achieved. The measurement device does not need to use a high-voltage generator and a complex circuit, and has a simple structure, thus enabling simple and low-cost measurement of the vacuum degree of the X-ray tube.

[0014] According to another aspect of the embodiments of the present application, a method for measuring the vacuum degree of an X-ray tube is provided, including: connecting the positive electrode of a test power supply to one end of the cathode filament of the X-ray tube and the negative electrode to the outer shell metal part of the X-ray tube, wherein a test resistor is further connected between the test power supply and the outer shell metal part, the anode of the X-ray tube is connected to the positive electrode of a first power supply and this end of the cathode filament is connected to the negative electrode of the first power supply, and the cathode filament is connected in parallel with a second power supply; measuring the voltage value or current value corresponding to the test resistor when the first power supply, the second power supply, and the test power supply are energized; and obtaining the voltage value or current value and comparing it with a reference curve to obtain the vacuum degree of the X-ray tube, wherein the reference curve includes reference voltage values or reference current values corresponding to the test resistor measured in advance using a reference X-ray tube and the first power supply, the second power supply, the test power supply, and the test resistor at different vacuum degrees of the given reference X-ray tube in the same measurement manner.

[0015] In this way, by using easily obtainable and low-cost power supplies and resistors, a measurement circuit is formed by the cathode filament of the X-ray tube, the outer shell metal part of the X-ray tube, the test power supply, and the test resistor. By only measuring the voltage or current value in the measurement circuit, the value of the vacuum degree inside the X-ray tube can be obtained, enabling simple, rapid, and low-cost measurement of the vacuum degree of the X-ray tube.

[0016] In a schematic embodiment of the method for measuring the vacuum degree of an X-ray tube, obtaining the voltage value or current value and comparing it with the reference curve to obtain the vacuum degree of the X-ray tube includes: obtaining the reference voltage value or reference current value equal to the voltage value or current value on the reference curve; and determining the value of the vacuum degree corresponding to the reference voltage value or reference current value on the reference curve as the value of the vacuum degree of the X-ray tube.

[0017] In this way, by using the one-to-one correspondence between the voltage value and the vacuum degree value on the pre-calibrated reference curve, by comparing the measured voltage value or current value with the pre-calibrated reference curve, the accurate vacuum degree of the X-ray tube to be measured can be obtained.

[0018] According to another aspect of the embodiments of the present application, a system for measuring the vacuum degree of an X-ray tube is provided, including: the above-mentioned device for measuring the vacuum degree of an X-ray tube; and an X-ray tube, including a cathode filament, an anode, and an outer shell metal part for sealing the cathode filament and the anode.

[0019] In this way, without damaging the X-ray tube, by only using common and low-cost power supplies, resistors, and voltmeters or ammeters, the vacuum degree of the X-ray tube can be measured by forming a series circuit with the X-ray tube and external components. The measurement is simple and cost-effective, and it is easy to perform vacuum degree tests on a large number of X-ray tubes.

[0020] In a schematic embodiment of a system for measuring the vacuum degree of an X-ray tube, the system further includes a protection cabinet for accommodating the X-ray tube and a device for measuring the vacuum degree of the X-ray tube, and having a protection cabinet door serving as a safety switch of the system.

[0021] In this way, a safety loop is formed between the protection cabinet door and the system power supply, so that the power supply can be energized to test the X-ray tube only when the external protection cabinet door is closed, ensuring the personal safety of the test staff.

[0022] In an embodiment of the present application, a technical solution is provided in which a measurement loop is formed by only using a simple power supply and a resistor to connect the cathode filament of the X-ray tube, the metal part of the outer shell of the X-ray tube, the test power supply, and the test resistor, and the value of the vacuum degree inside the X-ray tube is obtained by measuring the voltage or current value in the measurement loop, so as to at least solve the technical problem in the prior art that it is difficult to measure the vacuum degree inside the X-ray tube quickly, accurately and at low cost, and achieve the technical effect of measuring the vacuum degree inside the X-ray tube at low cost, quickly, accurately and non-destructively. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings described herein are used to provide a further understanding of the present application and form a part of the present application. The schematic embodiments and descriptions thereof of the present application are used to explain the present application and do not constitute an improper limitation of the present application. In the drawings:

[0024] Figure 1 is a block diagram of a device for measuring the vacuum degree of an X-ray tube according to an embodiment of the present application;

[0025] Figure 2 is a block diagram of a device for measuring the vacuum degree of an X-ray tube according to an exemplary embodiment of the present application;

[0026] Figure 3 is a flowchart of a method for measuring the vacuum degree of an X-ray tube according to an embodiment of the present application;

[0027] Figure 4 is a block diagram of a system for measuring the vacuum degree of an X-ray tube according to an embodiment of the present application;

[0028] Figure 5 is a circuit diagram of a measurement module of a device for measuring the vacuum degree of an X-ray tube according to an exemplary embodiment of the present application;

[0029] Figure 6 is a schematic diagram of a reference curve of a device for measuring the vacuum degree of an X-ray tube according to an exemplary embodiment of the present application; and

[0030] Figure 7It is a circuit diagram of a measurement module of a device for measuring the vacuum degree of an X-ray tube according to another exemplary embodiment of the present application.

[0031] Symbol Explanation

[0032] 100: Device for measuring the vacuum degree of an X-ray tube

[0033] 101: Measurement module

[0034] 1011: First power supply

[0035] 1013: Second power supply

[0036] 1015: Test power supply

[0037] 1017: Test resistor

[0038] 103: Processing module

[0039] 1019: Voltmeter

[0040] S301: Connect the positive pole of the test power supply to one end of the cathode filament of the X-ray tube and the negative pole to the metal part of the outer shell of the X-ray tube. Wherein, the test resistor is further connected between the test power supply and the metal part of the outer shell. The anode of the X-ray tube is connected to the positive pole of the first power supply and this end of the cathode filament is connected to the negative pole of the first power supply. The cathode filament is connected in parallel with the second power supply.

[0041] S303: Measure the voltage value or current value corresponding to the test resistor when the first power supply, the second power supply and the test power supply are energized.

[0042] S305: Obtain the voltage value or current value and compare it with the reference curve to obtain the vacuum degree of the X-ray tube. Wherein, the reference curve includes reference voltage values or reference current values corresponding to the test resistor measured in advance by using a reference X-ray tube and the first power supply, the second power supply, the test power supply and the test resistor in the same measurement method at different vacuum degrees of the given reference X-ray tube.

[0043] 400: System for measuring the vacuum degree of an X-ray tube

[0044] 401: X-ray tube

[0045] 403: Cathode filament

[0046] 405: Anode

[0047] 407: Metal part of the outer shell Detailed implementation mode

[0048] To enable those skilled in the art to better understand the solution of this application, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of this application.

[0049] It should be noted that the terms "first", "second", etc. in the description and claims of this application and the above-mentioned accompanying drawings are used to distinguish similar objects, and do not necessarily need to be used to describe a specific order or sequence. It should be understood that such used data can be interchanged under appropriate circumstances so that the embodiments of this application described here can be implemented in an order other than those illustrated or described here. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or modules or units does not necessarily have to be limited to those steps or modules or units clearly listed, but may include other steps or modules or units not clearly listed or inherent to these processes, methods, products or devices.

[0050] According to an embodiment of this application, a device for measuring the vacuum degree of an X-ray tube is provided. Figure 1 It is a block diagram of a device for measuring the vacuum degree of an X-ray tube according to an embodiment of this application. Refer to Figure 1 According to an embodiment of this application, a device 100 for measuring the vacuum degree of an X-ray tube includes: a measurement module 101, and a processing module 103.

[0051] Among them, the measurement module 101 includes: a first power supply 1011, the positive pole of which is connected to the anode of the X-ray tube and the negative pole is connected to one end of the cathode filament of the X-ray tube; a second power supply 1013, which is connected in parallel with the cathode filament; a test power supply 1015, the positive pole of which is connected to this end of the cathode filament and the negative pole is connected to the metal part of the outer shell of the X-ray tube; and a test resistor 1017, which is further connected between the test power supply 1015 and the metal part of the outer shell. Among them, the measurement module 101 is configured to measure the voltage value or current value corresponding to the test resistor 1017 when the first power supply 1011, the second power supply 1013, and the test power supply 1015 are energized.

[0052] The processing module 103 is configured to obtain the voltage value or current value and compare it with a reference curve to obtain the vacuum degree of the X-ray tube, where the reference curve includes reference voltage values or reference current values corresponding to the test resistor 1017 that are pre-measured by a reference X-ray tube and the measurement module 101 in the same measurement manner at different vacuum degrees of the given reference X-ray tube.

[0053] In this embodiment, when the second power supply 1013 is powered on, thermoelectrons are generated due to the flow of current in the cathode filament of the X-ray tube. The thermoelectrons move directionally away from the surface of the cathode filament towards the anode of the X-ray tube under the action of the electric field formed by the first power supply 1011 between the anode and the cathode filament. When there is residual gas in the X-ray tube, the electrons bombard the residual gas molecules in the X-ray tube during the high-speed movement, thereby ionizing the residual gas molecules. At the same time, when the test power supply 1015 is powered on, since there is another constant electric field generated by the test power supply between the outer shell metal part and the cathode filament, the ions ionized from the residual gas molecules move towards the outer shell metal part under the action of this electric field, thereby forming a leakage current between the cathode filament and the outer shell metal part. At this time, the test power supply 1015, the cathode filament of the X-ray tube, the outer shell metal part, and the test resistor 1017 jointly form a measurement loop. Since the voltage of the test power supply 1015 is constant, by measuring the voltage across the test resistor 1017, the voltage between the cathode filament and the outer shell metal part can be obtained. Since this voltage is proportional to the leakage current, and the leakage current between the cathode filament and the outer shell metal part is proportional to the vacuum degree in the X-ray tube, the voltage between the cathode filament and the outer shell metal part is proportional to the vacuum degree in the X-ray tube. That is to say, the voltage across the test resistor 1017 is proportional to the vacuum degree in the X-ray tube.

[0054] By pre-calibrating the vacuum degree using a reference X-ray tube and the test module 101, that is, when the reference X-ray tube is at different given vacuum degrees, the measurement module 101 is used to measure the reference voltage value of the test resistor 1017 in the measurement loop formed by the cathode filament of the reference X-ray tube, the outer shell metal part, the test resistor 1017, and the test power supply 1015, a reference curve including multiple reference voltage values and multiple vacuum degree values corresponding one-to-one to the multiple reference voltage values can be obtained. The reference X-ray tube is any X-ray tube whose vacuum degree can be changed and is used for vacuum degree calibration.

[0055] Then, by obtaining the voltage value across the actually measured test resistor 1017 by the processing module 103 and comparing it with the reference curve, the value of the vacuum degree of the X-ray tube to be measured can be obtained.

[0056] In another embodiment, the measurement module 101 is used to measure the current value flowing through the test resistor 1017. When the cathode filament of the X-ray tube, the metal part of the outer shell, the test resistor 1017, and the test power supply 1015 jointly form a series measurement circuit, since the voltage of the test power supply 1015 is constant, the leakage current between the cathode filament and the metal part of the outer shell can be obtained by measuring the current value passing through the test resistor 1017. Since the leakage current between the cathode filament and the metal part of the outer shell is proportional to the vacuum degree inside the X-ray tube, the current passing through the test resistor 1017 is proportional to the vacuum degree inside the X-ray tube.

[0057] By pre-calibrating the vacuum degree using a reference X-ray tube and the test module 101, that is, when the reference X-ray tube is at different given vacuum degrees, the measurement module 101 is used to measure the reference current value in the measurement loop formed by the cathode filament of the reference X-ray tube, the metal part of the outer shell, the test resistor 1017, and the test power supply 1015, and a reference curve including a plurality of reference current values and a plurality of vacuum degree values corresponding one by one to the plurality of reference current values is obtained. The reference X-ray tube is any X-ray tube whose vacuum degree can be changed and is used for vacuum degree calibration.

[0058] Then, by the processing module 103 obtaining the actually measured current value passing through the test resistor 1017 and comparing it with the reference curve, the value of the vacuum degree of the X-ray tube to be measured can be obtained.

[0059] In this way, by making the cathode filament of the X-ray tube, the metal part of the outer shell of the X-ray tube, the test resistor 1017, and the test power supply 1015 form a measurement loop, the value of the vacuum degree inside the X-ray tube is obtained only by measuring the voltage or current value in the measurement loop, realizing simple, rapid, and low-cost measurement of the vacuum degree of the X-ray tube.

[0060] Furthermore, in the above embodiment, the processing module 103 obtains the actually measured voltage value or current value and compares it with the reference curve to obtain the value of the vacuum degree of the X-ray tube to be measured, including: obtaining the reference voltage value or reference current value on the reference curve that is equal to the voltage value or current value; obtaining the value of the vacuum degree corresponding to the reference voltage value or reference current value as the value of the vacuum degree of the X-ray tube.

[0061] In this way, by using the one-to-one correspondence between the voltage value and the vacuum degree value on the pre-calibrated reference curve and comparing the measured voltage value or current value with the pre-calibrated reference curve, the accurate vacuum degree of the X-ray tube to be measured can be obtained.

[0062] Figure 2It is a block diagram of a device for measuring the vacuum degree of an X-ray tube according to an exemplary embodiment of the present application. The device for measuring the vacuum degree of an X-ray tube according to an exemplary embodiment of the present application includes Figure 1 All components of the device shown, and the description of these components refers to the above-mentioned embodiments and will not be repeated here.

[0063] In addition, referring to Figure 2 , in the device 100 for measuring the vacuum degree of an X-ray tube according to an exemplary embodiment of the present application, the measurement module 101 further includes:

[0064] A voltmeter 1019 configured to measure the voltage value corresponding to the test resistor 1017 when the first power supply 1011, the second power supply 1013, and the test power supply 1015 are energized.

[0065] In this exemplary embodiment, the voltmeter 1019 is connected in parallel with the test resistor 1017 and measures the voltage value across the test resistor 1017 when the first power supply 1011, the second power supply 1013, and the test power supply 1015 are energized. Accordingly, the processing module 103 compares the measured voltage value with a reference curve including a plurality of reference voltage values and a plurality of vacuum degree values corresponding to the plurality of reference voltage values one by one.

[0066] In another exemplary embodiment, an ammeter is used instead of a voltmeter for measurement. The ammeter is connected in series with the test resistor 1017 and measures the current value flowing through the test resistor 1017 when the first power supply 1011, the second power supply 1013, and the test power supply 1015 are energized. Accordingly, the processing module 103 compares the measured current value with a reference curve including a plurality of reference current values and a plurality of vacuum degree values corresponding to the plurality of reference current values one by one. In another exemplary embodiment, the processing module 103 calculates the voltage value across the test resistor 1017 using the known resistance value of the test resistor 1017 and the measured current value, and then compares the calculated voltage value with a reference curve including a plurality of reference voltage values and a plurality of vacuum degree values corresponding to the plurality of reference voltage values one by one.

[0067] In this way, without a high-voltage generator and without a complex circuit, the measurement of the vacuum degree of the X-ray tube can be achieved only by using a voltmeter or an ammeter, three power supplies, and a test resistor, thereby realizing simple and low-cost measurement of the vacuum degree of the X-ray tube.

[0068] According to an embodiment of the present application, there is also provided a method for measuring the vacuum degree of an X-ray tube. Figure 3 It is a flowchart of a method for measuring the vacuum degree of an X-ray tube according to an embodiment of the present application. Referring to Figure 3, A method for measuring the vacuum degree of an X-ray tube according to an embodiment of the present application includes:

[0069] S301, Connect the positive pole of a test power supply to one end of the cathode filament of the X-ray tube and the negative pole to the outer shell metal part of the X-ray tube. Wherein, a test resistor is further connected between the test power supply and the outer shell metal part. The anode of the X-ray tube is connected to the positive pole of a first power supply and this end of the cathode filament is connected to the negative pole of the first power supply. The cathode filament is connected in parallel with a second power supply;

[0070] S303, Measure the voltage value or current value corresponding to the test resistor when the first power supply, the second power supply, and the test power supply are energized; and

[0071] S305, Obtain the voltage value or current value and compare it with a reference curve to obtain the vacuum degree of the X-ray tube. Wherein, the reference curve includes reference voltage values or reference current values corresponding to the test resistor measured in advance by using a reference X-ray tube and the first power supply, the second power supply, the test power supply, and the test resistor at different vacuum degrees of the given reference X-ray tube in the same measurement manner.

[0072] Figure 3 The method for measuring the vacuum degree of the X-ray tube shown is the same as Figure 1 , Figure 2 the method executed by the device for measuring the vacuum degree of the X-ray tube shown, which will not be elaborated here.

[0073] According to an embodiment of the present application, a system for measuring the vacuum degree of an X-ray tube is further provided. Figure 4 is a block diagram of a system for measuring the vacuum degree of an X-ray tube according to an embodiment of the present application. Refer to Figure 4 , The system 400 for measuring the vacuum degree of an X-ray tube according to an embodiment of the present application includes: a device 100 for measuring the vacuum degree of the X-ray tube, and an X-ray tube 401.

[0074] Wherein, the X-ray tube 401 includes a cathode filament 403, an anode 405, and an outer shell metal part 407 that seals the cathode filament 403 and the anode 405.

[0075] Among them, the positive and negative electrodes of the test power supply 1015 in the device 100 for measuring the vacuum degree of the X-ray tube are respectively connected to the negative extreme of the cathode filament 403 of the X-ray tube 401 and the metal part 407 of the outer shell. The test resistor 1017 is further connected between the test power supply 1015 and the metal part 407 of the outer shell. When the first power supply 1011, the second power supply 1013, and the test power supply 1015 are energized, the electrons moving towards the anode 405 in the X-ray tube 401 ionize the gas molecules in the X-ray tube 401. The ionized ions move towards the metal part 407 of the outer shell under the action of the electric field generated by the test power supply 1015, forming a conduction path between the cathode filament 403, the metal part 407 of the outer shell, the test power supply 1015, and the test resistor 1017. Thus, the leakage current between the cathode filament 403 and the metal part 407 of the outer shell can be measured, and then the vacuum degree of the X-ray tube 401 can be obtained.

[0076] In this way, without damaging the X-ray tube, the vacuum degree of the X-ray tube can be measured by simply forming a series circuit between the X-ray tube and external components. The measurement is simple and cost-effective, and it is easy to conduct vacuum degree tests on a large number of X-ray tubes.

[0077] It should be noted that the metal part 407 of the outer shell of the X-ray tube 401 in the system 400 for measuring the vacuum degree of the X-ray tube according to the embodiment of the present application does not have to be a completely metal outer shell. Instead, as long as the X-ray tube outer shell contains the metal part 407 and the test power supply 1015 is connected to this metal part, a constant electric field for ion movement can be formed between this metal part and the cathode filament 403 when the test power supply 1015 is energized.

[0078] In an exemplary embodiment according to the present application, the system 400 for measuring the vacuum degree of the X-ray tube further includes a protection cabinet (not shown in the figure), which is used to accommodate the X-ray tube and the device for measuring the vacuum degree of the X-ray tube and has a protection cabinet door serving as a safety switch of the system.

[0079] Figure 5 It is the circuit diagram of the measurement module of the device for measuring the vacuum degree of the X-ray tube according to the exemplary embodiment of the present application. Refer to Figure 5 , the circuit of the measurement module 101 of the device 100 for measuring the vacuum degree of the X-ray tube includes an X-ray tube loop and a test loop.

[0080] The X-ray tube circuit includes a first power supply 1011, a second power supply 1013, a cathode filament 403, an anode 405, and a housing metal part 407. The first power supply 1011 applies a voltage between the anode 405 and the cathode filament 403 of the X-ray tube, generating an electric field pointing from the anode 405 to the cathode filament 403. The second power supply 1013 is connected in parallel with the cathode filament 403, causing the cathode filament 403 to emit thermoelectrons by heating through current. During the movement of the thermoelectrons towards the anode 405 under the action of the electric field, they collide with gas molecules in the X-ray tube, ionizing the gas molecules into ions.

[0081] The test circuit includes a test power supply 1015, a test resistor 1017, and a voltmeter 1019. The positive pole of the test power supply 1015 is connected to one end of the cathode filament where the negative poles of the first power supply 1011 and the second power supply 1013 are connected and grounded, making the negative poles of the first power supply 1011, the second power supply 1013, and the positive pole of the test power supply 1015 the common zero potential. The negative pole of the test power supply 1015 is connected to one end of the test resistor 1017, and the other end of the test resistor 1017 is connected to the metal part of the housing metal part 407. The test power supply 1015 generates an electric field pointing from the cathode filament 403 to the metal part between the cathode filament 403 and the metal part of the housing metal part 407.

[0082] Under the action of the electric field generated by the test power supply 1015, the ions ionized from the gas molecules move towards the metal part of the housing metal part 407, making the measurement circuit formed by the test power supply 1015, the cathode filament 403, the metal part of the housing metal part 407, and the test resistor 1017 conductive. The voltmeter 1019 measures the voltage value across the test resistor 1017 when the circuit is conductive. By comparing the measured voltage value with a pre-calibrated reference curve, the accurate vacuum degree of the X-ray tube to be measured can be obtained.

[0083] In addition, safety switches are provided at the power control terminals of the first power supply 1011, the second power supply 1013, and the test power supply 1015. Only when the safety switches are closed can the X-ray tube circuit and the test circuit be powered on for testing. In an exemplary embodiment, the safety switch is set as the cabinet door of a protection cabinet that houses the X-ray tube and the device for measuring the vacuum degree of the X-ray tube. When the cabinet door is in the open state, the circuit of the system for measuring the vacuum degree of the X-ray tube is in an open circuit state, ensuring the safety of the test staff.

[0084] Figure 6 It is a schematic diagram of a reference curve for measuring the vacuum degree of an X-ray tube according to an exemplary embodiment of the present application. Figure 6The reference curve shown includes a given series of vacuum levels and the pre-measured voltage values across the test resistor corresponding to these vacuum levels, and this reference curve is Figure 5 an example of the reference curve used by the circuit shown.

[0085] Since the change sensitivity of the voltage / current corresponding to the test resistor 1017 is closely related to the change in the vacuum level inside the X-ray tube, by measuring the exact voltage / current values corresponding to the test resistor 1017 under a given series of vacuum levels, the exact voltage / current values on the test resistor 1017 corresponding to these vacuum levels can be obtained. Then, by correlating the actually measured voltage value across the test resistor 1017 with the voltage value on the reference curve, the exact vacuum level value of the actually measured X-ray tube can be obtained.

[0086] Figure 6 The reference curve shown is measured under the conditions that Figure 5 the voltage of the first power supply 1011 shown is 3000V, the current of the second power supply 1013 is 5A, the voltage of the test power supply 1015 is 40V, and the resistance of the test resistor 1017 is 1500Ω. Correspondingly, when using Figure 6 the reference curve shown, the system for measuring the vacuum level of the X-ray tube also measures the voltage value or current value on the test resistor 1017 with the voltage of the first power supply 1011 being 3000V, the current of the second power supply 1013 being 5A, the voltage of the test power supply 1015 being 40V, and the resistance of the test resistor 1017 being 1500Ω.

[0087] From Figure 6 the reference curve shown, it can be seen that under the above measurement conditions, the vacuum levels in the range of 1.0×10 -6 mbar to 1.0×10 - 3 mbar have an excellent one-to-one correspondence with the voltage values, and the vacuum levels in the range of 1.0×10 -8 mbar to 1.0×10 - 6 mbar have a good correspondence with the voltage values. Therefore, by using Figure 5 the circuit configuration of the measurement module 101 shown, it is only necessary to use a power supply voltage of up to 3000V to obtain the accurate vacuum level of the X-ray tube within a wide range. Therefore, in the device for measuring the vacuum level of the X-ray tube according to the present application, there is no need to use an expensive high-voltage generator, and only by using low-cost power supplies, resistors, voltmeters / ammeters and through a simple circuit configuration, an accurate measurement of the vacuum level of the X-ray tube can be obtained, and the measurement range of the vacuum level is wide.

[0088] However, those skilled in the art should note that the values of the first power supply 1011, the second power supply 1013, the test power supply 1015, and the test resistor 1017 shown are only examples, and those skilled in the art can conceive of various combinations of other values of the first power supply 1011, the second power supply 1013, the test power supply 1015, and the test resistor 1017 used to calibrate the reference curve and measure the voltage value or current value of the test resistor 1017.

[0089] Figure 7 is a circuit diagram of a measurement module of a device for measuring the vacuum degree of an X-ray tube according to another exemplary embodiment of the present application. Figure 7 The circuit shown is the same as Figure 5 The circuit shown includes the same X-ray tube circuit and a substantially same test circuit, and the only difference is that Figure 7 in the test circuit of

[0090] In Figure 7 an exemplary embodiment of Figure 7 by comparing the measured current value with a pre-calibrated reference curve including the vacuum degree and the corresponding current value, the accurate vacuum degree of the X-ray tube to be measured can be obtained. In

[0091] In the above embodiments of the present application, the descriptions of the respective embodiments have their own emphases. For parts not detailed in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0092] In several embodiments provided by the present application, it should be understood that the disclosed technical content can be implemented in other ways. Among them, the device embodiments described above are only illustrative. For example, the division of the units or modules is only a logical function division, and there may be other division methods in actual implementation. For example, multiple units or modules or components can be combined or integrated into another system, or some features can be ignored or not executed.

[0093] In addition, each functional unit or module in the various embodiments of the present application can be integrated in a processing unit or module, or each unit or module can exist physically alone, or two or more units or modules can be integrated in one unit or module. The above integrated unit or module can be implemented in the form of hardware or in the form of a software functional unit or module.

[0094] The above are only the preferred embodiments of the present application. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present application, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present application.

Claims

1. An apparatus (100) for measuring the vacuum degree of an X-ray tube, characterized in that, including: a measurement module (101), comprising: a first power supply (1011), whose positive pole is connected to the anode (405) of the X-ray tube (401), and whose negative pole is connected to one end of the cathode filament (403) of the X-ray tube (401); a second power supply (1013), connected in parallel with the cathode filament (403); a test power supply (1015), whose positive pole is connected to the said one end of the cathode filament (403), and whose negative pole is connected to the outer shell metal part (407) of the X-ray tube (401), and a test resistor (1017), further connected between the test power supply (1015) and the outer shell metal part (407), wherein, the measurement module (101) is configured to measure the voltage value or current value corresponding to the test resistor (1017) when the first power supply (1011), the second power supply (1013) and the test power supply (1015) are powered on; and a processing module (103), configured to obtain the voltage value or the current value and compare it with a reference curve to obtain the vacuum degree of the X-ray tube, wherein the reference curve includes reference voltage values or reference current values corresponding to the test resistor (1017) measured in advance by using a reference X-ray tube and the measurement module (101) at different vacuum degrees of the given reference X-ray tube in the same measurement manner.

2. The device (100) for measuring the vacuum degree of an X-ray tube according to claim 1, characterized in that, The measurement module is configured to obtain the reference voltage value or reference current value on the reference curve that is equal to the voltage value or the current value; obtain the value of the vacuum degree corresponding to the reference voltage value or the reference current value as the value of the vacuum degree of the X-ray tube (401).

3. The device (100) for measuring the vacuum degree of an X-ray tube according to claim 1 or 2, characterized in that, The measurement module (101) further includes a voltmeter (1019) connected in parallel with the test resistor (1017), and the voltmeter (1019) is used to measure the voltage value across the test resistor (1017) when the first power supply (1011), the second power supply (1013) and the test power supply (1015) are powered on.

4. The device (100) for measuring the vacuum degree of an X-ray tube according to claim 1 or 2, characterized in that, The measurement module (101) further includes an ammeter connected in series with the test resistor (1017), and the ammeter is used to measure the current value flowing through the test resistor (1017) when the first power supply (1011), the second power supply (1013) and the test power supply (1015) are powered on.

5. A method for measuring the vacuum degree of an X-ray tube, characterized in that, including: connecting the positive pole of the test power supply to one end of the cathode filament of the X-ray tube and the negative pole to the outer shell metal part of the X-ray tube, connecting the test resistor between the test power supply and the outer shell metal part, connecting the positive pole of the first power supply to the anode of the X-ray tube and the negative pole to the said one end of the cathode filament, and connecting the second power supply in parallel with the cathode filament; measuring the voltage value or current value corresponding to the test resistor when the first power supply, the second power supply and the test power supply are powered on; and Obtain the voltage value or the current value and compare it with a reference curve to obtain the vacuum degree of the X-ray tube, wherein the reference curve includes reference voltage values or reference current values corresponding to the test resistor that are pre-measured in the same measurement manner at different vacuum degrees of the given reference X-ray tube by using the reference X-ray tube, the first power supply, the second power supply, the test power supply, and the test resistor.

6. The method according to claim 5, characterized in that, Obtaining the voltage value or the current value and comparing it with a reference curve to obtain the vacuum degree of the X-ray tube includes: Obtaining the reference voltage value or the reference current value equal to the voltage value or the current value on the reference curve; and Determining the value of the vacuum degree corresponding to the reference voltage value or the reference current value on the reference curve as the value of the vacuum degree of the X-ray tube.

7. A system (400) for measuring the vacuum degree of an X-ray tube, characterized in that, Includes: The device (100) for measuring the vacuum degree of an X-ray tube according to any one of claims 1 to 4; And An X-ray tube (401), including a cathode filament (403), an anode (405), and a housing metal part (407) that seals the cathode filament (403) and the anode (405).

8. The system (400) for measuring the vacuum degree of an X-ray tube according to claim 7, characterized in that, Further includes: A protection cabinet for accommodating the X-ray tube (401) and the device (100) for measuring the vacuum degree of the X-ray tube, and the protection cabinet has a protection cabinet door that serves as a safety switch of the system (400).

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