A molding die and method for forming a planar ceramic target

Abstract

The present invention discloses a molding die and method for a planar ceramic target. The mold includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover and a lower steel cover. The upper steel cover and the lower steel cover are assembled to form a cavity. The flexible mold sleeve is installed at both ends of the steel mold and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate and a lower rubber plate and is placed in the cavity of the steel mold. The cavity formed between the upper rubber plate, the lower rubber plate and the flexible mold sleeve is a powder filling cavity; the Shore hardness of the flexible mold sleeve is 40-90 degrees, and the Shore hardness of the flexible plate is 20-60 degrees. The mold of the present invention is used to perform cold isostatic pressing on the granulated powder to obtain a ceramic target green body with regular and flat size. After sintering, a high-density target can be obtained. The process of hydraulic press molding is reduced in the production process of the ceramic target, and the investment in equipment and hydraulic molds is reduced. At the same time, the risk of cracking of the ceramic target green body during transportation is also reduced.

Description

Technical Field

[0001] The invention relates to the technical field of ceramic target material forming, and in particular to a forming die and method for a planar ceramic target material. Background Art

[0002] At present, the main molding methods of ceramic rotary target blanks are extrusion, in-situ colloidal solidification molding, slip injection molding and cold isostatic pressing. Extrusion, in-situ colloidal solidification molding and slip injection molding can all be molded to near net size, and have certain advantages in making special-shaped parts. However, the blank obtained by the extrusion method contains a large amount of organic matter and water, which is difficult to sinter densely; in-situ colloidal solidification molding also contains a large amount of organic matter and water, and large-scale molding is prone to cracking during drying, and it is difficult to obtain ultra-high density; slip injection molding has strict requirements on powder particle size and distribution, slurry and porous molds, and the drying control of the green blank is strict, which is technically difficult.

[0003] At present, all processes using the cold isostatic pressing method require a hydraulic press to perform a primary molding, and then a secondary molding using a cold isostatic press to obtain a target blank. However, this molding method has the following shortcomings: 1) The process is cumbersome and requires molding first and then cold isostatic pressing; 2) Although the size of the blank after molding is regular, the density uniformity of the blank is poor. When it goes through the cold isostatic pressing process, the pressure of the cold isostatic pressing is equal at 360°, and the target material will bend, deform or crack; 3) The strength of the blank after a single molding is not high, and it is particularly prone to cracking during transportation; 4) The hydraulic press equipment and molds used for cold isostatic pressing are expensive, and the production process consumes time, labor, electricity, etc.; 5) The molds currently used for molding are generally square, which is difficult to make into special-shaped molds. Special-shaped targets can only be cut later, and there will be a lot of waste of scraps. Summary of the invention

[0004] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a molding mold and method for a flat ceramic target. By using the mold to perform cold isostatic pressing on granulated powder, a ceramic target green body with regular size and flatness can be obtained, which can then be sintered to obtain a high-density target. The hydraulic press molding process is reduced in the production process of the ceramic target, the investment in equipment and hydraulic molds is reduced, and the risk of cracking of the ceramic target green body during transportation is also reduced.

[0005] To achieve the above purpose, the technical solution adopted by the present invention is as follows:

[0006] A forming mold for a planar ceramic target comprises a steel mold, a flexible mold sleeve and a flexible plate, wherein the steel mold comprises an upper steel cover and a lower steel cover, the upper steel cover and the lower steel cover are assembled to form a cavity, the flexible mold sleeve is mounted at both ends of the steel mold and is sealed with the steel mold, the flexible plate is formed by an upper rubber plate and a lower rubber plate, and is placed in the cavity of the steel mold, and the cavity formed between the upper rubber plate, the lower rubber plate and the flexible mold sleeve is a powder filling cavity; the Shore hardness of the flexible mold sleeve is 40-90 degrees, and the Shore hardness of the flexible plate is 20-60 degrees.

[0007] The mold of the present invention is obtained by combining a steel mold, a flexible mold sleeve and a flexible plate, and the hardness of the flexible mold sleeve and the flexible mold sleeve is optimized through experiments. The mold is used to perform cold isostatic pressing on granulated powder to obtain a ceramic target material blank with regular and flat dimensions, reducing defects such as bending, deformation or cracking, and then sintering to obtain a high-density target material. The hydraulic press molding process is reduced in the production process of the ceramic target material, the investment in equipment and hydraulic molds is reduced, and the risk of cracking of the ceramic target material blank during transportation is also reduced, and the yield rate is high.

[0008] In the present invention, the powder filling cavity is a square cavity or a special-shaped cavity.

[0009] Preferably, the Shore hardness of the flexible mold sleeve is 60-80 degrees, which is more conducive to eliminating pressing defects such as pits and shrinkage on the surface of the target green body and improving the density of the target green body.

[0010] Preferably, the Shore hardness of the flexible plate is 30-40 degrees, which is more conducive to improving the density of the target green body.

[0011] Preferably, the surface roughness of the flexible plate is less than 3.2 μm, and the roughness of the flexible plate is reduced as much as possible, so that the surface of the target green body after cold isostatic pressing is smooth.

[0012] Preferably, both ends of the steel mold are provided with grooves, and the flexible mold sleeve is installed in the grooves.

[0013] Preferably, the parallelism of the two end surfaces of the flexible mold sleeve is less than 0.5 mm, which is conducive to the uniform thickness of the ceramic target green body after cold isostatic pressing. The two end surfaces of the flexible mold sleeve refer to the surface of the flexible mold sleeve in contact with the powder filling cavity and the surface of the flexible mold sleeve close to the powder filling cavity.

[0014] Preferably, the thickness of the flexible plate is 5-15 mm, which is beneficial to improving the density of the target green body.

[0015] Preferably, the flexible mold sleeve and the flexible plate are made of silicone rubber or polyurethane, preferably polyurethane.

[0016] The present invention also provides a method for forming a planar ceramic target, comprising the following steps:

[0017] (1) Assembling the lower steel cover, the lower rubber plate and the flexible mold sleeve in the above mold to form a powder filling cavity;

[0018] (2) Fill the granulated powder into the assembled powder filling cavity and scrape its surface flat;

[0019] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0020] (4) The assembled mold and the granulated powder filled therein are placed in a cold isostatic press for pressing and molding. The cold isostatic pressing pressure is 100-300 MPa. After demolding, a target green body is obtained.

[0021] In the molding method of the planar target material of the present invention, the granulated powder is loaded into the mold and then directly placed in a cold isostatic press for compression molding, without the need for pre-molding, and the production process is simple.

[0022] Preferably, the cold isostatic pressing pressure is 200-270 MPa, which is beneficial to reducing the deformation degree of the blank after cold pressing and improving the density of the target material.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] The mold of the present invention has a simple structure, is easy to manufacture, has a low cost, and is easy to process into a special-shaped mold. Using the mold of the present invention for cold isostatic pressing reduces the process of one-time molding and transportation of the hydraulic press, reduces the investment in equipment and hydraulic molds, shortens the production cycle, improves production efficiency, reduces the risk of cracking of the ceramic target green body during transportation, and can obtain a ceramic target green body with regular and flat size, and then after sintering, a high-density target product can be obtained, which is beneficial to improving the product yield and material recovery rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of the forming mold of the planar ceramic target material of the present invention, 1-upper steel cover, 2-lower steel cover, 3-upper rubber plate, 4-lower rubber plate, 5-flexible mold sleeve. DETAILED DESCRIPTION

[0026] To better illustrate the purpose, technical solutions and advantages of the present invention, the present invention will be further described below in conjunction with specific embodiments. It should be understood by those skilled in the art that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0027] In the examples, the experimental methods used are conventional methods unless otherwise specified, and the materials, reagents, etc. used are all commercially available unless otherwise specified.

[0028] Example 1

[0029] A molding die for a planar ceramic target, such as Figure 1 As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are assembled and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is placed in a cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the flexible mold sleeve 5 is made of polyurethane with a Shore hardness of 40 degrees; the flexible plate is made of polyurethane with a Shore hardness of 60 degrees, a thickness of 10 mm, and a surface roughness of less than 3.2 μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5 mm.

[0030] A method for forming a planar ceramic target comprises the following steps:

[0031] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0032] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0033] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0034] (4) placing the assembled mold together with the granulated powder filled therein in a cold isostatic press for pressing and molding, the cold isostatic pressing pressure is 200 MPa, and demolding after pressure relief to obtain a target green body;

[0035] (5) The target green body is placed in a sintering furnace and sintered at a sintering temperature of 1550° C. for 30 hours to obtain a densely sintered target.

[0036] Example 2

[0037] A molding die for a planar ceramic target, such as Figure 1As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are assembled and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 304 stainless steel. Grooves are provided at both ends of the steel mold. The flexible mold sleeve is installed in the groove and sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, which is a square cavity. The flexible mold sleeve 5 is made of polyurethane with a Shore hardness of 60 degrees. The flexible plate is made of polyurethane with a Shore hardness of 40 degrees, a thickness of 10 mm, and a surface roughness of less than 3.2 μm. The parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5 mm.

[0038] A method for forming a planar ceramic target comprises the following steps:

[0039] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0040] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0041] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0042] (4) placing the assembled mold together with the granulated powder filled therein in a cold isostatic press for pressing and molding, the cold isostatic pressing pressure being 230 MPa, and demolding after pressure relief to obtain a target green body;

[0043] (5) The target green body is placed in a sintering furnace and sintered at a sintering temperature of 1550° C. for 30 hours to obtain a densely sintered target.

[0044] Example 3

[0045] A molding die for a planar ceramic target, such as Figure 1As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the flexible mold sleeve 5 is made of polyurethane with a Shore hardness of 80 degrees; the flexible plate is made of polyurethane with a Shore hardness of 30 degrees, a thickness of 10 mm, and a surface roughness of less than 3.2 μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5 mm.

[0046] A method for forming a planar ceramic target comprises the following steps:

[0047] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0048] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0049] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0050] (4) placing the assembled mold together with the granulated powder filled therein in a cold isostatic press for pressing and molding, the cold isostatic pressing pressure being 270 MPa, and demolding after pressure relief to obtain a target green body;

[0051] (5) The target green body is placed in a sintering furnace and sintered at a sintering temperature of 1550° C. for 30 hours to obtain a densely sintered target.

[0052] Example 4

[0053] A molding die for a planar ceramic target, such as Figure 1As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of TA1. Grooves are provided at both ends of the steel mold. The flexible mold sleeve is installed in the groove and sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4 and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, which is a square cavity; the flexible mold sleeve 5 is made of polyurethane with a Shore hardness of 90 degrees; the flexible plate is made of polyurethane with a Shore hardness of 20 degrees, a thickness of 10 mm, and a surface roughness of less than 3.2 μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5 mm.

[0054] A method for forming a planar ceramic target comprises the following steps:

[0055] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0056] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0057] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0058] (4) placing the assembled mold together with the granulated powder filled therein in a cold isostatic press for pressing and molding, the cold isostatic pressing pressure is 200 MPa, and demolding after pressure relief to obtain a target green body;

[0059] (5) The target green body is placed in a sintering furnace and sintered at a sintering temperature of 1550° C. for 30 hours to obtain a densely sintered target.

[0060] Example 5

[0061] A molding die for a planar ceramic target, such as Figure 1As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the material of the flexible mold sleeve 5 is polyurethane, and the Shore hardness is 70 degrees; the material of the flexible plate is polyurethane, and the Shore hardness is 35 degrees, the thickness is 5mm, and the surface roughness is less than 3.2μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5mm.

[0062] A method for forming a planar ceramic target comprises the following steps:

[0063] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0064] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0065] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0066] (4) placing the assembled mold together with the granulated powder filled therein in a cold isostatic press for pressing and molding, the cold isostatic pressing pressure is 200 MPa, and demolding after pressure relief to obtain a target green body;

[0067] (5) The target green body is placed in a sintering furnace and sintered at a sintering temperature of 1550° C. for 30 hours to obtain a densely sintered target.

[0068] Example 6

[0069] A molding die for a planar ceramic target, such as Figure 1As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the material of the flexible mold sleeve 5 is polyurethane, and the Shore hardness is 70 degrees; the material of the flexible plate is polyurethane, and the Shore hardness is 35 degrees, the thickness is 20mm, and the surface roughness is less than 3.2μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5mm.

[0070] A method for forming a planar ceramic target comprises the following steps:

[0071] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0072] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0073] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0074] (4) placing the assembled mold together with the granulated powder filled therein in a cold isostatic press for pressing and molding, the cold isostatic pressing pressure is 200 MPa, and demolding after pressure relief to obtain a target green body;

[0075] (5) The target green body is placed in a sintering furnace and sintered at a sintering temperature of 1550° C. for 30 hours to obtain a densely sintered target.

[0076] Example 7

[0077] A molding die for a planar ceramic target, such as Figure 1As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the flexible mold sleeve 5 is made of polyurethane with a Shore hardness of 70 degrees; the flexible plate is made of polyurethane with a Shore hardness of 35 degrees, a thickness of 30 mm, and a surface roughness of less than 3.2 μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5 mm.

[0078] A method for forming a planar ceramic target comprises the following steps:

[0079] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0080] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0081] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0082] (4) placing the assembled mold together with the granulated powder filled therein in a cold isostatic press for pressing and molding, the cold isostatic pressing pressure is 200 MPa, and demolding after pressure relief to obtain a target green body;

[0083] (5) The target green body is placed in a sintering furnace and sintered at a sintering temperature of 1550° C. for 30 hours to obtain a densely sintered target.

[0084] Example 8

[0085] A molding die for a planar ceramic target, such as Figure 1As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the material of the flexible mold sleeve 5 is polyurethane, and the Shore hardness is 70 degrees; the material of the flexible plate is polyurethane, and the Shore hardness is 35 degrees, the thickness is 50mm, and the surface roughness is less than 3.2μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5mm.

[0086] A method for forming a planar ceramic target comprises the following steps:

[0087] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0088] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0089] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0090] (4) placing the assembled mold together with the granulated powder filled therein in a cold isostatic press for pressing and molding, the cold isostatic pressing pressure being 250 MPa, and demolding after pressure relief to obtain a target green body;

[0091] (5) The target green body is placed in a sintering furnace and sintered at a sintering temperature of 1550° C. for 30 hours to obtain a densely sintered target.

[0092] Example 9

[0093] A molding die for a planar ceramic target, such as Figure 1As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the flexible mold sleeve 5 is made of polyurethane with a Shore hardness of 75 degrees; the flexible plate is made of polyurethane with a Shore hardness of 35 degrees, a thickness of 10 mm, and a surface roughness of less than 3.2 μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5 mm.

[0094] A method for forming a planar ceramic target comprises the following steps:

[0095] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0096] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0097] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0098] (4) placing the assembled mold together with the granulated powder filled therein in a cold isostatic press for pressing and molding, the cold isostatic pressing pressure being 220 MPa, and demolding after pressure relief to obtain a target green body;

[0099] (5) The target green body is placed in a sintering furnace and sintered at a sintering temperature of 1550° C. for 30 hours to obtain a densely sintered target.

[0100] Example 10

[0101] A molding die for a planar ceramic target, such as Figure 1As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the material of the flexible mold sleeve 5 is polyurethane, and the Shore hardness is 70 degrees; the material of the flexible plate is polyurethane, and the Shore hardness is 40 degrees, the thickness is 15mm, and the surface roughness is less than 3.2μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5mm.

[0102] A method for forming a planar ceramic target comprises the following steps:

[0103] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0104] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 98:2 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0105] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0106] (4) placing the assembled mold together with the granulated powder filled therein in a cold isostatic press for pressing and molding, the cold isostatic pressing pressure being 300 MPa, and demolding after pressure relief to obtain a target green body;

[0107] (5) The target green body is placed in a sintering furnace and sintered at a sintering temperature of 1550° C. for 30 hours to obtain a densely sintered target.

[0108] Comparative Example 1

[0109] A molding die for a planar ceramic target, such as Figure 1As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the material of the flexible mold sleeve 5 is polyurethane, and the Shore hardness is 20 degrees; the material of the flexible plate is polyurethane, and the Shore hardness is 60 degrees, the thickness is 10mm, and the surface roughness is less than 3.2μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5mm.

[0110] A method for forming a planar ceramic target comprises the following steps:

[0111] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0112] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0113] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0114] (4) The assembled mold together with the granulated powder filled therein is placed in a cold isostatic press for pressing and molding. The cold isostatic pressing pressure is 220 MPa. After the pressure is released, the mold is demolded. When the mold is disassembled, it is found that the mold is leaking.

[0115] Comparative Example 2

[0116] A molding die for a planar ceramic target, such as Figure 1 As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the material of the flexible mold sleeve 5 is polyurethane, and the Shore hardness is 90 degrees; the material of the flexible plate is polyurethane, and the Shore hardness is 70 degrees, the thickness is 15mm, and the surface roughness is less than 3.2μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5mm.

[0117] A method for forming a planar ceramic target comprises the following steps:

[0118] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0119] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0120] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0121] (4) The assembled mold together with the granulated powder filled therein is placed in a cold isostatic press for pressing and molding. The cold isostatic pressing pressure is 180 MPa. After the pressure is released, the mold is demolded and the mold is disassembled to find that cracks are present.

[0122] Comparative Example 3

[0123] A molding die for a planar ceramic target, such as Figure 1 As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the material of the flexible mold sleeve 5 is polyurethane, and the Shore hardness is 65 degrees; the material of the flexible plate is polyurethane, and the Shore hardness is 10 degrees, the thickness is 30mm, and the surface roughness is less than 3.2μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5mm.

[0124] A method for forming a planar ceramic target comprises the following steps:

[0125] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0126] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0127] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0128] (4) The assembled mold together with the granulated powder filled therein is placed in a cold isostatic press for pressing and molding. The cold isostatic pressing pressure is 80 MPa. After the pressure is released, the mold is demolded. When the target material is disassembled, it is found that the surface of the target material is uneven, the strength of the target material is low, and cracks occur during the disassembly process.

[0129] Comparative Example 4

[0130] A molding die for a planar ceramic target, such as Figure 1 As shown, it includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover 1 and a lower steel cover 2. The upper steel cover 1 and the lower steel cover 2 are installed and combined to form a cavity. The upper steel cover 1 and the lower steel cover 2 are both made of 45# steel. Both ends of the steel mold are provided with grooves. The flexible mold sleeve is installed in the grooves and is sealed with the steel mold. The flexible plate is formed by combining an upper rubber plate 3 and a lower rubber plate 4, and is placed in the cavity in the steel mold. The cavity formed between the upper rubber plate 3, the lower rubber plate 4 and the flexible mold sleeve 5 is a powder-filled cavity, and the powder-filled cavity is a square cavity; the material of the flexible mold sleeve 5 is polyurethane, and the Shore hardness is 60 degrees; the material of the flexible plate is polyurethane, and the Shore hardness is 50 degrees, the thickness is 10mm, and the surface roughness is less than 3.2μm; the parallelism of the two end faces of the flexible mold sleeve 5 is processed to be less than 0.5mm.

[0131] A method for forming a planar ceramic target comprises the following steps:

[0132] (1) First, assemble the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold of this embodiment to form a powder filling cavity;

[0133] (2)In 2 O 3 :SnO 2 ITO granulated powder with a composition ratio of 90:10 is filled into the assembled powder filling cavity, and its surface is scraped flat;

[0134] (3) Assemble the upper rubber plate and upper steel cover in sequence;

[0135] (4) The assembled mold together with the granulated powder filled therein is placed in a cold isostatic press for pressing and molding. The cold isostatic pressing pressure is 260 MPa. After the pressure is released, the mold is demolded and the target green body is found to be cracked when it is disassembled.

[0136] Table 1

[0137]

[0138]

[0139] It can be seen from Examples 1-10 and Comparative Examples 1-4 that by using the mold of the present invention, placing the powder in the powder filling cavity formed by the lower steel cover, the lower rubber plate and the flexible mold sleeve for cold isostatic pressing, a ceramic target green body with regular size and flatness can be obtained, and then sintering can obtain a high-density target material, especially when the Shore hardness of the flexible mold sleeve is 60-80 degrees, the Shore hardness of the flexible plate is 30-40 degrees, the thickness of the flexible plate is 5-15mm, the cold isostatic pressing pressure is 200-270Mpa, and the material of the flexible mold sleeve and the flexible plate is polyurethane.

[0140] The invention saves the process of forming by hydraulic press in the production process, reduces the investment in equipment and hydraulic molds; and also reduces the risk of transportation, thus generating huge economic benefits.

[0141] The material of the flexible plate of the present invention is silicone rubber or polyurethane, which facilitates processing of the flexible plate so that it has a special-shaped cavity and is used for the production of special-shaped planar targets.

[0142] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the present invention can be modified or replaced by equivalents without departing from the essence and scope of the technical solution of the present invention.

Claims

1. A molding die for a planar ceramic target, characterized in that: It includes a steel mold, a flexible mold sleeve and a flexible plate. The steel mold includes an upper steel cover and a lower steel cover. The upper steel cover and the lower steel cover are installed in combination to form a cavity. The flexible mold sleeve is installed at both ends of the steel mold and is sealed with the steel mold. Both ends of the steel mold are provided with grooves, and the flexible mold sleeve is installed in the grooves. The flexible plate is formed by combining an upper rubber plate and a lower rubber plate and is placed in the cavity of the steel mold. The cavity formed between the upper rubber plate, the lower rubber plate and the flexible mold sleeve is a powder-filled cavity. The Shore hardness of the flexible mold sleeve is 40-90 degrees, and the Shore hardness of the flexible plate is 20-60 degrees.

2. The forming mold of the planar ceramic target according to claim 1, characterized in that: The Shore hardness of the flexible mold sleeve is 60-80 degrees.

3. The forming mold of the planar ceramic target according to claim 1, characterized in that: The Shore hardness of the flexible board is 30-40 degrees.

4. The forming mold of the planar ceramic target according to claim 1, characterized in that: The surface roughness of the flexible board is less than 3.2 μm.

5. The forming mold of the planar ceramic target according to claim 1, characterized in that: The processing parallelism of the two end surfaces of the flexible mold sleeve is less than 0.5mm.

6. The forming mold of the planar ceramic target according to claim 1, characterized in that: The thickness of the flexible board is 5-15 mm.

7. The forming mold of the planar ceramic target according to claim 1, characterized in that: The flexible mold sleeve and the flexible plate are made of silicone rubber or polyurethane.

8. A method for forming a planar ceramic target, characterized in that: The following steps are involved: (1) Assembling the lower steel cover, the lower rubber plate and the flexible mold sleeve in the mold according to any one of claims 1 to 7 to form a powder filling cavity; (2) Fill the granulated powder into the assembled powder filling cavity and scrape its surface flat; (3) Assemble the upper rubber plate and upper steel cover in sequence; (4) The assembled mold and the granulated powder filled therein are placed in a cold isostatic press for pressing and molding. The cold isostatic pressing pressure is 100-300 MPa. After demolding, a target green body is obtained.

9. The method for forming a planar ceramic target according to claim 8, characterized in that: The cold isostatic pressing pressure is 200-270 MPa.

Images