High-efficiency capacitor structure

Abstract

A capacitor structure includes at least one first layer and at least one second layer alternately stacked. The at least one first layer includes first and second electrodes alternately arranged in a first direction, and the at least one second layer includes third and fourth electrodes alternately arranged in a second direction intersecting the first direction, the third and fourth electrodes being electrically connected to the first and second electrodes. Each of the first and second electrodes includes a base and a branch protruding from the base, and the third and fourth electrodes are arranged side by side to correspond to the branch.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the benefit of Korean Patent Application No. 10-2018-0166408 filed on December 20, 2018, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] Apparatuses consistent with embodiments relate to capacitor structures, and more particularly, to efficient capacitor structures for achieving high integration in a small area of ​​an integrated circuit. Background Art

[0004] Capacitors are components of integrated circuits such as sensors, amplifiers, filters, analog-to-digital converters (ADCs), phase-locked loops (PLLs), and power management integrated circuits (PMICs). Such capacitors occupy a relatively large area in an integrated circuit, so highly integrated capacitor structures are desirable. Summary of the Invention

[0005] According to an embodiment, a capacitor structure includes at least one first layer and at least one second layer alternately stacked. The at least one first layer includes first and second electrodes alternately arranged in a first direction, and the at least one second layer includes third and fourth electrodes alternately arranged in a second direction intersecting the first direction, the third and fourth electrodes being electrically connected to the first and second electrodes. Each of the first and second electrodes includes a base and a branch protruding from the base, and the third and fourth electrodes are arranged side by side to correspond to the branch.

[0006] Each first electrode may be capacitively coupled to a corresponding one of the second electrodes in a horizontal direction of the at least one first layer, and may be capacitively coupled to a corresponding one of the fourth electrodes in a vertical direction of the at least one first layer.

[0007] Each second electrode may be capacitively coupled to a corresponding one of the first electrodes in a horizontal direction of the at least one first layer, and may be capacitively coupled to a corresponding one of the third electrodes in a vertical direction of the at least one first layer.

[0008] The second direction may be perpendicular to the first direction.

[0009] The base portion may extend in the second direction, and the branch portions may protrude from the base portion in the first direction.

[0010] The branches may be spaced apart from each other and arranged side by side in the second direction.

[0011] The branch portions of the first electrode may be arranged between the branch portions of the second electrode.

[0012] The third electrodes may be arranged at a plurality of first positions corresponding to the branch portions of the second electrode, and the fourth electrodes may be arranged at a plurality of second positions corresponding to the branch portions of the first electrode.

[0013] The capacitor structure may further include at least one first contact element interposed between the first electrode and the third electrode and at least one second contact element interposed between the second electrode and the fourth electrode.

[0014] The at least one first contact element may be arranged at one or more first positions corresponding to the base of each first electrode, and the at least one second contact element may be arranged at one or more second positions corresponding to the base of each second electrode.

[0015] The at least one first layer may include a plurality of first layers, and the at least one second layer may be interposed between the plurality of first layers.

[0016] The first electrode may be disposed on an outer side of the at least one first layer, and the third electrode may be disposed on an outer side of the at least one second layer.

[0017] The capacitor structure may further include a first plate electrode and a second plate electrode configured to cover outer sides of the plurality of first layers and electrically connected to the first electrode.

[0018] According to an embodiment, a capacitor structure is provided that includes at least one first layer and at least one second layer alternately stacked. The at least one first layer includes first electrodes arranged in a first direction, the at least one second layer includes second electrodes electrically connected to the first electrodes, each first electrode includes a base and a branch protruding from the base, and the second electrodes correspond to the branch.

[0019] The at least one first electrode may not be physically connected to the at least one second electrode, and the at least one first electrode may be capacitively coupled to the at least one second electrode.

[0020] The second electrodes may be arranged side by side to correspond to the branch portions.

[0021] The at least one first electrode may not be physically connected to the at least one second electrode, and the at least one first electrode may not be capacitively coupled to the at least one second electrode.

[0022] The base portion may extend in a second direction perpendicular to the first direction, and the branch portion may protrude from the base portion in the first direction.

[0023] The branches may be spaced apart from each other and arranged side by side in the second direction.

[0024] The capacitor structure may further include at least one contact element interposed between the first electrode and the second electrode.

[0025] According to an embodiment, a capacitor structure is provided, comprising a first layer, a second layer disposed on the first layer, and a third layer disposed on the second layer. Each of the first and third layers includes a first electrode and a second electrode alternately arranged in a first direction, and each of the first and second electrodes includes a base and a branch protruding from the base. The second layer includes a third electrode and a fourth electrode alternately arranged in a second direction perpendicular to the first direction, and the third electrode and the fourth electrode are arranged to correspond to the branch portions, respectively. The capacitor structure also includes one or more first contact elements inserted between the base of each first electrode and the third electrode, and one or more second contact elements inserted between the base of each second electrode and the fourth electrode.

[0026] Different voltages may be applied to the first electrode and the second electrode, respectively, and different voltages may be applied to the third electrode and the fourth electrode, respectively. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is an exploded perspective view illustrating a capacitor structure according to an embodiment.

[0028] Figure 2A and Figure 2B It's a picture Figure 1 A perspective view of the first and second layers of a capacitor structure is shown in FIG.

[0029] Figure 3A and Figure 3B It's a picture Figure 1 A plan view of the first and second layers of the capacitor structure is shown in FIG.

[0030] Figure 4A It is along Figure 1 Cross-sectional view along line II'.

[0031] Figure 4B It is along Figure 1 Cross-sectional view along line II-II'.

[0032] Figure 5A is a plan view illustrating a capacitor structure of the related art.

[0033] Figure 5B is a plan view illustrating a capacitor structure according to an embodiment.

[0034] Figure 6 is a plan view illustrating a capacitor structure according to another embodiment.

[0035] Figure 7is a plan view illustrating a capacitor structure according to an embodiment.

[0036] Figure 8 is a plan view illustrating a capacitor structure according to an embodiment. DETAILED DESCRIPTION

[0037] Reference will now be made in detail to the embodiments of the examples illustrated in the accompanying drawings. In the drawings, similar reference numerals refer to similar elements throughout, and for clarity of illustration, element sizes may be exaggerated. In this regard, the current embodiments may have different forms and may be interpreted as not being limited to the description set forth herein. Therefore, the embodiments are described below with reference to the accompanying drawings to explain various aspects. As used herein, the term "and / or" includes any and all combinations of one or more related listed items. When a statement such as "at least one" follows a list of elements, it modifies the entire list of elements, rather than a single element in the list.

[0038] In the following description, when an element is referred to as being "on" or "above" another element, it can be directly on the other element while in contact with the other element, or can be above the other element without being in contact with the other element. Terms in the singular may include plural forms unless otherwise mentioned. It will be further understood that the terms "include" and / or "comprising" as used herein indicate the presence of stated features or elements, but do not exclude the presence or addition of one or more other features or elements.

[0039] An element referred to using the definite article or demonstrative pronoun may be interpreted as one or more elements, even if it is in the singular. The operations of the method may be performed in the appropriate order unless explicitly described or described to the contrary in terms of order. That is, the operations are not limited to the order in which they are described. The examples or terms used herein are intended only to describe the technical concepts and should not be considered as limiting unless otherwise specified in the claims.

[0040] A high-efficiency capacitor structure is provided for achieving high integration in a small area of ​​an integrated circuit.

[0041] Figure 1 is an exploded perspective view illustrating a capacitor structure 100 according to an embodiment. Figure 2A and Figure 2B It's a picture Figure 1 A perspective view of a first layer M1 and a second layer M2 is shown in FIG. Figure 3A and Figure 3B It's a picture Figure 1 A plan view of the first layer M1 and the second layer M2 is shown in FIG.

[0042] refer to Figures 1 to 3B, the capacitor structure 100 includes at least one first layer M1 and at least one second layer M2 alternately stacked in a vertical direction (eg, z-axis direction). Figure 1 In the example shown, the capacitor structure 100 includes first to fifth layers M1, M2, M3, M4, and M5 stacked sequentially in the z-axis direction. Here, the third layer M3 and the fifth layer M5 are the same as the first layer M1, and the fourth layer M4 is the same as the second layer M2. Figure 1 In the figure, it can be understood that three first layers M1 and two second layers M2 are alternately stacked in the z-axis direction.

[0043] The first layer M1 may include at least one first electrode 110 and at least one second electrode 120 alternately arranged in a first direction (eg, a y-axis direction). Different voltages may be applied to the first electrode 110 and the second electrode 120 . Figure 2A and Figure 3A The diagram illustrates an example in which two first electrodes 110 and two second electrodes 120 are alternately arranged in the y-axis direction in the first layer M1. However, this is not a limiting example. That is, the number of first electrodes 110 and second electrodes 120 provided in the first layer M1 can be variously selected. The first electrodes 110 and the second electrodes 120 can include a highly conductive metal material.

[0044] Each first electrode 110 may include a base portion 111 and a plurality of branches 112 protruding from the base portion 111. The base portion 111 may extend in a second direction (e.g., an x-axis direction) perpendicular to the first direction (e.g., a y-axis direction), and the plurality of branches 112 may protrude from the base portion 111 in the first direction. Here, the plurality of branches 112 may be spaced apart from each other and arranged side by side in the second direction.

[0045] In the first electrode 110 located at the edge portion of the first layer M1 , multiple branches 112 may protrude from one side of the base 111 , while in the first electrode 110 located at the center portion of the first layer M1 , multiple branches 112 may protrude from both sides of the base 111 . Figure 2A and Figure 3A An example is illustrated in which four branches 112 protrude from one side of the base portion 111 of each first electrode 110 in the first direction (eg, the y-axis direction).

[0046] Each second electrode 120 may include a base 121 and a plurality of branches 122 protruding from the base 121. The base 121 may extend in a second direction perpendicular to the first direction, and the plurality of branches 122 may protrude from the base 121 in the first direction. Here, the plurality of branches 122 may be spaced apart from each other and arranged side by side in the second direction. The plurality of branches 122 of the second electrode 120 may be arranged between the branches 112 of the first electrode 110.

[0047] In the second electrode 120 located at the edge portion of the first layer M1 , multiple branches 122 may protrude from one side of the base 121 , while in the second electrode 120 located at the center portion of the first layer M1 , multiple branches 122 may protrude from both sides of the base 121 . Figure 2A and Figure 3A An example is illustrated in which four branch portions 122 protrude from one side of the base portion 121 of each second electrode 120 in the y-axis direction.

[0048] A plurality of contact elements 151 and 152 may be provided on the first layer M1. For example, the plurality of contact elements 151 and 152 may include one or more first contact elements 151 provided on the first electrode 110 and one or more second contact elements 152 provided on the second electrode 120.

[0049] The first contact element 151 can electrically connect the first electrode 110 of the first layer M1 to the third electrode 130 of the second layer M2 and can include a conductive material. The first contact element 151 can be provided on the base 111 of the first electrode 110. However, this is a non-limiting example. For example, the first contact element 151 can be provided on the branch 112 of the first electrode 110.

[0050] The second contact element 152 can electrically connect the second electrode 120 of the first layer M1 to the fourth electrode 140 of the second layer M2 and can include a conductive material. The second contact element 152 can be provided on the base 121 of the second electrode 120. However, this is a non-limiting example. For example, the second contact element 152 can be provided on the branch 122 of the second electrode 120.

[0051] The second layer M2 may include one or more third electrodes 130 and one or more fourth electrodes 140 alternately arranged in a second direction (e.g., the x-axis direction). Different voltages may be applied to the third electrodes 130 and the fourth electrodes 140. The third electrode 130 may be electrically connected to the first electrode 110 via the first contact element 151, so that the same voltage may be applied to the third electrode 130 and the first electrode 110. In addition, the fourth electrode 140 may be electrically connected to the second electrode 120 via the second contact element 152, so that the same voltage may be applied to the fourth electrode 140 and the second electrode 120. Therefore, different voltages may be applied to the first electrode 110 and the fourth electrode 140, and different voltages may be applied to the second electrode 120 and the third electrode 130.

[0052] Figure 2B and Figure 3BThe diagram illustrates an example in which four third electrodes 130 and four fourth electrodes 140 are alternately arranged in the x-axis direction in the second layer M2. However, this is a non-limiting example. That is, the number of third electrodes 130 and fourth electrodes 140 provided in the second layer M2 can be variously selected. The third electrodes 130 and the fourth electrodes 140 can include a metal material having high conductivity. Here, each of the third electrodes 130 and the fourth electrodes 140 can have a linear shape extending in a first direction (e.g., the y-axis direction), and the linear third electrodes 130 and the fourth electrodes 140 can be arranged side by side.

[0053] The branch portion 112 of the first electrode 110 provided in the first layer M1 may correspond to the fourth electrode 140 of the second layer M2. For example, the fourth electrode 140 of the second layer M2 may be arranged such that the branch portion 112 of the first electrode 110 provided in the first layer M1 may be aligned with the fourth electrode 140 in a vertical direction (e.g., z-axis direction). In addition, the first electrode 110 and the third electrode 130 may be electrically connected to each other via a first contact element 151 provided on the base 111 of the first electrode 110.

[0054] The branch portion 122 of the second electrode 120 provided in the first layer M1 may correspond to the third electrode 130 of the second layer M2. For example, the third electrode 130 of the second layer M2 may be arranged such that the branch portion 122 of the second electrode 120 provided in the first layer M1 may be aligned with the third electrode 130 in a vertical direction. In addition, the second electrode 120 and the fourth electrode 140 may be electrically connected to each other via a second contact element 152 provided on the base 121 of the second electrode 120.

[0055] A plurality of contact elements 151 and 152 may be provided on the second layer M2. For example, one or more first contact elements 151 may be provided at positions on the third electrode 130 corresponding to the base 111 of the first electrode 110 of the first layer M1. The first contact elements 151 provided on the second layer M2 are used to electrically connect the third electrode 130 to the first electrode 110 of the third layer M3 (which is the same as the first layer M1) provided above the second layer M2.

[0056] One or more second contact elements 152 may be provided on the fourth electrode 140 at a position corresponding to the base 121 of the second electrode 120 of the first layer M1. The second contact element 152 provided on the second layer M2 is used to electrically connect the fourth electrode 140 to the second electrode 120 of the third layer M3 (which is the same as the first layer M1) provided above the second layer M2.

[0057] A third layer M3 identical to the first layer M1 is placed above the second layer M2, and a fourth layer M4 identical to the second layer M2 is placed above the third layer M3. In addition, a fifth layer M5 identical to the first layer M1 is placed above the fourth layer M4.

[0058] Figure 4A It is along Figure 1 A cross-sectional view of the capacitor structure 100 is shown along line II′.

[0059] refer to Figure 4A The branches 112 of the first electrode 110 and the branches 122 of the second electrode 120 are alternately arranged in the second direction (e.g., the x-axis direction), and the third electrode 130 and the fourth electrode 140 are alternately arranged in the second direction (e.g., the x-axis direction). The branches 112 of the first electrode 110 and the fourth electrode 140 are alternately arranged in the vertical direction (e.g., the z-axis direction), and the branches 122 of the second electrode 120 and the third electrode 130 are alternately arranged in the vertical direction (e.g., the z-axis direction).

[0060] As described above, different voltages are applied to the first electrode 110 and the second electrode 120, and different voltages are applied to the third electrode 130 and the fourth electrode 140. In addition, because the same voltage is applied to the first electrode 110 and the third electrode 130, different voltages are applied to the first electrode 110 and the fourth electrode 140, and because the same voltage is applied to the second electrode 120 and the fourth electrode 140, different voltages are applied to the second electrode 120 and the third electrode 130.

[0061] The branch portion 112 of the first electrode 110 can be capacitively coupled to the branch portion 122 of the second electrode 120 in the horizontal direction of the first layer M1, and can also be capacitively coupled to the fourth electrode 140 in the vertical direction of the first layer M1. In addition, the branch portion 122 of the second electrode 120 can be capacitively coupled to the branch portion 112 of the first electrode 110 in the horizontal direction of the first layer M1, and can also be capacitively coupled to the third electrode 130 in the vertical direction of the first layer M1. As a result, the capacitive coupling area can be increased.

[0062] Figure 4B It is along Figure 1 A cross-sectional view of the capacitor structure 100 is shown along line II-II′.

[0063] refer to Figure 4B , the third electrodes 130 and the fourth electrodes 140 are alternately arranged in the second direction (eg, the x-axis direction). In addition, the bases 111 of the first electrodes 110 and the fourth electrodes 140 are alternately arranged in the vertical direction (eg, the z-axis direction). Figure 4BAlthough not shown in the figure, the bases 121 of the second electrodes 120 and the third electrodes 130 are alternately arranged in a vertical direction (eg, z-axis direction).

[0064] The base portion 111 of the first electrode 110 can be capacitively coupled to the branch portion 122 of the second electrode 120 in the horizontal direction of the first layer M1, and can also be capacitively coupled to the fourth electrode 140 in the vertical direction of the first layer M1. In addition, the base portion 121 of the second electrode 120 can be capacitively coupled to the branch portion 112 of the first electrode 110 in the horizontal direction of the first layer M1, and can also be capacitively coupled to the third electrode 130 in the vertical direction of the first layer M1. Therefore, capacitive coupling is formed between the base portion 111 of the first electrode 110 and the fourth electrode 140, and between the base portion 121 of the second electrode 120 and the third electrode 130, thereby increasing the capacitive coupling area.

[0065] The example of alternating stacking of three first layers M1 and two second layers M2 has been described above. However, the present disclosure is not limited thereto. For example, three second layers M2 and two first layers M1 may be alternately stacked. Furthermore, although the example of stacking five layers has been described above, the number of layers in the capacitor structure 100 may be variously selected.

[0066] Figure 5A is a plan view illustrating a capacitor structure 200 of the related art.

[0067] refer to Figure 5A The capacitor structure 200 of the related art includes a stack of multiple layers having the same shape, each of which includes a first electrode 210 and a second electrode 220. The first electrode 210 includes a base 211 and a plurality of branches 212 protruding from the base 211, and the second electrode 220 includes a base 221 and a plurality of branches 222 protruding from the base 221. Here, the branches 212 of the first electrode 210 and the branches 222 of the second electrode 220 are alternately arranged.

[0068] exist Figure 5A In FIG, area B indicates an area that operates normally even when area A is damaged. Figure 5A As shown, in the related art capacitor structure 200 , when region A is damaged, only region B operates normally, and thus the overall capacitance may be significantly reduced.

[0069] Figure 5B is a plan view illustrating a capacitor structure 100 according to an embodiment.

[0070] refer to Figure 5B The capacitor structure 100 according to the embodiment includes at least one first layer M1 (refer to Figure 1 ) and at least one second layer M2 (reference Figure 1 ). Since the capacitor structure 100 has been described above, a detailed description thereof will not be repeated here. The first layer M1 includes first electrodes 110 and second electrodes 210 arranged alternately in a first direction, and the second layer M2 includes third electrodes 130 and fourth electrodes 140 arranged alternately in a second direction. The first electrodes 110 and the second electrode 210 include bases 111 and 211, respectively, and a plurality of branches 112 and 212 protruding from the bases 111 and 211. Here, the branches 112 of the first electrode 110 and the branches 212 of the second electrode 210 are arranged alternately. In addition, the third electrode 130 and the fourth electrode 140 have parallel lines to each other.

[0071] exist Figure 5B In FIG, region D indicates a region that operates normally even when region C is damaged. Figure 5B As shown, in the capacitor structure 100 according to the embodiment, even when the region C is damaged, the region D occupying most of the area of ​​the capacitor structure 100 can still operate normally, so the total capacitance of the capacitor structure 100 is not significantly affected. As described above, the capacitor structure 100 according to the embodiment is very robust, so that even when some regions of the capacitor structure 100 are damaged, the total capacitance of the capacitor structure 100 is not significantly affected.

[0072] Figure 5A The capacitor structure 200 and the related art shown Figure 5B The capacitor structure 100 according to the embodiment shown is manufactured to have the same area (1.9×12.9 μm 2 ), and their capacitance values ​​were measured by simulation. The capacitor structures 200 and 100 both have the same electrode width and spacing and a five-layer structure.

[0073] Figure 5A The capacitance value of the related art capacitor structure 200 shown in FIG is about 31.75 femtofarads (fF), while Figure 5B The capacitance value of the capacitor structure 100 according to the embodiment shown in FIG is about 39.38 fF. That is, the capacitance of the capacitor structure 100 according to the embodiment is improved by about 24% compared with the capacitor structure 200 of the related art.

[0074] Before and after area A was destroyed, the measurement Figure 5A The capacitance of the capacitor structure 200 of the related art shown is 31.75fF and 13.61fF respectively. That is, the capacitance of the capacitor structure 200 is reduced by about 57%. However, before and after the region C is damaged, the measured Figure 5BThe capacitances of the capacitor structure 100 according to the embodiment are shown to be 39.38 fF and 37.39 fF, respectively. That is, the capacitance of the capacitor structure 100 is reduced by only about 5%. As described above, the capacitor structure 100 according to the embodiment is very robust, so that even if some areas of the capacitor structure 100 are damaged, the total capacitance of the capacitor structure 100 does not change significantly.

[0075] In the capacitor structure 200 of the related art, multiple layers of the same shape are stacked. Therefore, the capacitor structure 200 has a low capacitance per unit area. If the area of ​​the capacitor structure 200 is increased to obtain a high capacitance, the manufacturing cost and inherent resistance of the capacitor structure 200 will increase. In addition, since the electrical connection between the electrodes of the capacitor structure 200 and the external wires is very low, there may be additional area for wiring, so the cost may increase. In addition, when a portion of the capacitor structure 200 is damaged, the total capacitance of the capacitor structure 200 may be significantly reduced.

[0076] However, in the capacitor structure 100 according to the embodiment, the first electrode 110 can be capacitively coupled to the second electrode 120 in the horizontal direction and to the fourth electrode 140 in the vertical direction. In addition, the second electrode 120 can be capacitively coupled to the first electrode 110 in the horizontal direction and to the third electrode 130 in the vertical direction. In addition, capacitive coupling can be formed between the base 111 of the first electrode 110 and the fourth electrode 140, and between the base 121 of the second electrode 120 and the third electrode 130. As described above, the capacitive coupling area of ​​the capacitor structure 100 can be increased, so the capacitor structure 100 can have high capacitance per unit area and can be provided in a small area of ​​an integrated circuit to achieve high integration.

[0077] Furthermore, the electrical connection between the electrodes of the capacitor structure 100 and external lines can be improved to reduce the area used for wiring, increase integration efficiency, and reduce costs and inherent resistance. In addition, the capacitor structure 100 is very robust, so that even if a portion of the capacitor structure 100 is damaged, the total capacitance of the capacitor structure 100 will not be significantly reduced.

[0078] Figure 6 is a plan view illustrating a capacitor structure 300 according to an embodiment.

[0079] refer to Figure 6 , the capacitor structure 300 includes at least one first layer M1 and at least one second layer M2 alternately stacked in a vertical direction (eg, z-axis direction). Figure 6 The diagram shows a plan view of the first to third layers M1, M2 and M3 stacked in sequence in the z-axis direction. Here, the third layer M3 is the same as the first layer M1, and therefore it can be considered that Figure 6 In the embodiment, two first layers M1 and one second layer M2 are alternately stacked in the z-axis direction.

[0080] The first layer M1 may include at least one first electrode 310, at least one second electrode 320, at least one third electrode 330, and at least one fourth electrode 340 periodically arranged in a first direction (eg, y-axis direction). Figure 6 In the illustrated example, the first electrodes 310 are disposed at the edge portions of both sides of the first layer M1, while the second, third, and fourth electrodes 320, 330, and 340 are disposed at the center portion of the first layer M1. However, the number of the first, second, third, and fourth electrodes 310, 320, 330, and 340 disposed in the first layer M1 may be variously selected. Different voltages may be applied to the first, second, third, and fourth electrodes 310, 320, 330, and 340. The first, second, third, and fourth electrodes 310, 320, 330, and 340 may comprise a highly conductive metal material.

[0081] The first electrode 310, the second electrode 320, the third electrode 330, and the fourth electrode 340 may include: base portions 311, 321, 331, and 341; and a plurality of branch portions 312, 322, 332, and 342 protruding from the base portions 311, 321, 331, and 341, respectively. The base portions 311, 321, 331, and 341 may extend in a second direction (e.g., an x-axis direction) perpendicular to the first direction (e.g., a y-axis direction), and the plurality of branch portions 312, 322, 332, and 342 may protrude from the base portions 311, 321, 331, and 341 in the first direction. Here, the plurality of branch portions 312, 322, 332, and 342 may be spaced apart from each other and arranged side by side in the second direction. Here, the branches 312 , 322 , 332 , and 342 of the first, second, third, and fourth electrodes 310 , 320 , 330 , and 340 may be arranged such that a branch of one electrode is arranged between branches of an adjacent electrode.

[0082] A plurality of contact elements 351, 352, 353, and 354 may be provided on the first layer M1. For example, first, second, third, and fourth contact elements 351, 352, 353, and 354 may be provided on the first electrode 310, the second electrode 320, the third electrode 330, and the fourth electrode 340, respectively. The first contact element 351 may electrically connect the first electrode 310 of the first layer M1 to the fifth electrode 350 of the second layer M2 and may be provided on the base 311 of the first electrode 310. The second contact element 352 may electrically connect the second electrode 320 of the first layer M1 to the sixth electrode 360 ​​of the second layer M2 and may be provided on the base 321 of the second electrode 320.

[0083] The third contact element 353 may electrically connect the third electrode 330 of the first layer M1 to the seventh electrode 370 of the second layer M2 and may be disposed on the base 331 of the third electrode 330. The fourth contact element 354 may electrically connect the fourth electrode 340 of the first layer M1 to the eighth electrode 380 of the second layer M2 and may be disposed on the base 341 of the fourth electrode 340.

[0084] The second layer M2 may include one or more fifth electrodes 350, one or more sixth electrodes 360, one or more seventh electrodes 370, and one or more eighth electrodes 380 alternately arranged in a second direction (e.g., the x-axis direction). Different voltages may be applied to the fifth electrode 350, the sixth electrode 360, the seventh electrode 370, and the eighth electrode 380.

[0085] The fifth electrode 350 may be electrically connected to the first electrode 310 via the first contact element 351, so that the same voltage can be applied to the fifth electrode 350 and the first electrode 310. The sixth electrode 360 ​​may be electrically connected to the second electrode 320 via the second contact element 352, so that the same voltage can be applied to the sixth electrode 360 ​​and the second electrode 320. The seventh electrode 370 may be electrically connected to the third electrode 330 via the third contact element 353, so that the same voltage can be applied to the seventh electrode 370 and the third electrode 330. The eighth electrode 380 may be electrically connected to the fourth electrode 340 via the fourth contact element 354, so that the same voltage can be applied to the eighth electrode 380 and the fourth electrode 340.

[0086] Figure 6 The diagram illustrates an example in which two fifth electrodes 350, two sixth electrodes 360, two seventh electrodes 370, and two eighth electrodes 380 are periodically arranged in the second layer M2 in the x-axis direction. However, this is a non-limiting example. That is, the number of the fifth electrodes 350, the sixth electrodes 360, the seventh electrodes 370, and the eighth electrodes 380 provided in the second layer M2 can be variously selected. The fifth electrodes 350, the sixth electrodes 360, the seventh electrodes 370, and the eighth electrodes 380 can include a metal material having high conductivity. Here, each of the fifth electrodes 350, the sixth electrodes 360, the seventh electrodes 370, and the eighth electrodes 380 can have a linear shape extending in a first direction (e.g., the y-axis direction), and the linear fifth electrodes 350, the sixth electrodes 360, the seventh electrodes 370, and the eighth electrodes 380 can be arranged side by side.

[0087] The fifth electrode 350 of the second layer M2 may correspond to the branches 322 and 342 of the second electrode 320 and the fourth electrode 340 provided in the first layer M1. For example, the fifth electrode 350 of the second layer M2 may be arranged such that the branches 322 and 342 of the second electrode 320 and the fourth electrode 340 provided in the first layer M1 may be aligned with the fifth electrode 350 in a vertical direction (e.g., z-axis direction). Here, the first electrode 310 and the fifth electrode 350 may be electrically connected to each other through a first contact element 351 provided on the base 311 of the first electrode 310.

[0088] The sixth electrode 360 ​​of the second layer M2 may correspond to the branches 312 and 332 of the first electrode 310 and the third electrode 330 provided in the first layer M1. For example, the sixth electrode 360 ​​of the second layer M2 may be arranged such that the branches 312 and 332 of the first electrode 310 and the third electrode 330 provided in the first layer M1 may be aligned with the sixth electrode 360 ​​in the vertical direction. Here, the second electrode 320 and the sixth electrode 360 ​​may be electrically connected to each other through the second contact element 352 provided on the base 321 of the second electrode 320.

[0089] The seventh electrode 370 of the second layer M2 may correspond to the branches 322 and 342 of the second electrode 320 and the fourth electrode 340 provided in the first layer M1. For example, the seventh electrode 370 of the second layer M2 may be arranged such that the branches 322 and 342 of the second electrode 320 and the fourth electrode 340 provided in the first layer M1 may be aligned with the seventh electrode 370 in the vertical direction. Here, the third electrode 330 and the seventh electrode 370 may be electrically connected to each other through the third contact element 353 provided on the base 331 of the third electrode 330.

[0090] The eighth electrode 380 of the second layer M2 may correspond to the branches 312 and 332 of the first electrode 310 and the third electrode 330 provided in the first layer M1. For example, the eighth electrode 380 of the second layer M2 may be arranged such that the branches 312 and 332 of the first electrode 310 and the third electrode 330 provided in the first layer M1 may be aligned with the eighth electrode 380 in the vertical direction. Here, the fourth electrode 340 and the eighth electrode 380 may be electrically connected to each other through a fourth contact element 354 provided on the base 341 of the fourth electrode 340.

[0091] A plurality of contact elements 351, 352, 353, and 354 may be provided on the second layer M2. For example, one or more first contact elements 351 may be provided at positions on the fifth electrode 350 corresponding to the base 311 of the first electrode 310 of the first layer M1. The first contact elements 351 provided on the second layer M2 are used to electrically connect the fifth electrode 350 to the first electrode 310 of the third layer M3 (which is the same as the first layer M1) provided above the second layer M2.

[0092] One or more second contact elements 352 may be provided at positions on the sixth electrode 360 ​​corresponding to the base 321 of the second electrode 320 of the first layer M1. The second contact element 352 provided on the second layer M2 is used to electrically connect the sixth electrode 360 ​​to the second electrode 320 of the third layer M3 (which is the same as the first layer M1) provided above the second layer M2.

[0093] One or more third contact elements 353 may be provided on the seventh electrode 370 at a position corresponding to the base 331 of the third electrode 330 of the first layer M1. The third contact element 353 provided on the second layer M2 is used to electrically connect the seventh electrode 370 to the third electrode 330 of the third layer M3 (which is the same as the first layer M1) provided above the second layer M2. One or more fourth contact elements 354 may be provided on the eighth electrode 380 at a position corresponding to the base 341 of the fourth electrode 340 of the first layer M1. The fourth contact element 354 provided on the second layer M2 is used to electrically connect the eighth electrode 380 to the fourth electrode 340 of the third layer M3 (which is the same as the first layer M1) provided above the second layer M2. The third layer M3, which is the same as the first layer M1, is placed above the second layer M2.

[0094] In the capacitor structure 300, for example, the second electrode 320 of the first layer M1 can be capacitively coupled to the first electrode 310 and the third electrode 330 of the first layer M1, and can also be capacitively coupled to the fifth electrode 350, the seventh electrode 370, and the eighth electrode 380 of the second layer M2, thereby forming multiple capacitive couplings. In addition, the capacitor structure 300 of this embodiment can be easily configured by adjusting the positions of the contact elements 151 and 152 in the capacitor structure 100 of the previous embodiment.

[0095] Although the capacitor structure 300 having a three-layer structure in which two first layers M1 and one second layer M2 are alternately stacked has been described above, the embodiment is not limited thereto. That is, the number of the first layers M1 and the second layers M2 may be variously selected.

[0096] Figure 7 is a plan view illustrating a capacitor structure 400 according to an embodiment.

[0097] refer to Figure 7 , the capacitor structure 400 includes at least one first layer M1 and at least one second layer M2 alternately stacked in a vertical direction (eg, z-axis direction). Figure 7 The diagram shows a plan view of the first to third layers M1, M2 and M3 stacked in sequence in the z-axis direction. Here, the third layer M3 is the same as the first layer M1, so it can be considered that Figure 7 In the embodiment, two first layers M1 and one second layer M2 are alternately stacked in the z-axis direction.

[0098] The first layer M1 may include at least one first electrode 410, at least one second electrode 420, at least one third electrode 430, and at least one fourth electrode 440 periodically arranged in a first direction (eg, y-axis direction). Figure 7 In the example shown, the first electrode 410 is disposed at the edge portions of both sides of the first layer M1, while the second electrode 420, the third electrode 430, and the fourth electrode 440 are disposed at the center portion of the first layer M1. Different voltages can be applied to the first electrode 410, the second electrode 420, the third electrode 430, and the fourth electrode 440.

[0099] The first electrode 410, the second electrode 420, the third electrode 430, and the fourth electrode 440 may include: base portions 411, 421, 431, and 441; and a plurality of branch portions 412, 422, 432, and 442 protruding from the base portions 411, 421, 431, and 441, respectively. The base portions 411, 421, 431, and 441 may extend in a second direction (e.g., an x-axis direction) perpendicular to the first direction (e.g., a y-axis direction), and the plurality of branch portions 412, 422, 432, and 442 may protrude from the base portions 411, 421, 431, and 441 in the first direction. Here, the plurality of branch portions 412, 422, 432, and 442 may be spaced apart from each other and arranged side by side in the second direction. The plurality of branches 412 , 422 , 432 , and 442 of the first, second, third, and fourth electrodes 410 , 420 , 430 , and 440 may be arranged such that branches of one electrode are arranged between branches of an adjacent electrode.

[0100] A plurality of contact elements 451, 452, 453, and 454 may be provided on the first layer M1. For example, first, second, third, and fourth contact elements 451, 452, 453, and 454 may be provided on the first electrode 410, the second electrode 420, the third electrode 430, and the fourth electrode 440, respectively. The first contact element 451 may electrically connect the first electrode 410 of the first layer M1 to the fifth electrode 450 of the second layer M2 and may be provided on the base 411 of the first electrode 410. The second contact element 452 may electrically connect the second electrode 420 of the first layer M1 to the sixth electrode 460 of the second layer M2 and may be provided on the base 421 of the second electrode 420.

[0101] The third contact element 453 may electrically connect the third electrode 430 of the first layer M1 to the seventh electrode 470 of the second layer M2 and may be disposed on the base 431 of the third electrode 430. The fourth contact element 454 may electrically connect the fourth electrode 440 of the first layer M1 to the eighth electrode 480 of the second layer M2 and may be disposed on the base 441 of the fourth electrode 440.

[0102] The second layer M2 may include one or more fifth electrodes 450, one or more sixth electrodes 460, one or more seventh electrodes 470, and one or more eighth electrodes 480 arranged in a second direction (e.g., the x-axis direction). Different voltages may be applied to the fifth electrode 450, the sixth electrode 460, the seventh electrode 470, and the eighth electrode 480.

[0103] The fifth electrode 450 may be electrically connected to the first electrode 410 via the first contact element 451, so that the same voltage can be applied to the fifth electrode 450 and the first electrode 410. The sixth electrode 460 may be electrically connected to the second electrode 420 via the second contact element 452, so that the same voltage can be applied to the sixth electrode 460 and the second electrode 420. The seventh electrode 470 may be electrically connected to the third electrode 430 via the third contact element 453, so that the same voltage can be applied to the seventh electrode 470 and the third electrode 430. The eighth electrode 480 may be electrically connected to the fourth electrode 440 via the fourth contact element 454, so that the same voltage can be applied to the eighth electrode 480 and the fourth electrode 440.

[0104] The fifth electrode 450 and the seventh electrode 470 may have a linear shape extending in a first direction (e.g., the y-axis direction). In addition, the sixth electrode 460 may be arranged in a linear shape in an area corresponding to the area where the first electrode 410 and the second electrode 420 of the first layer M1 are provided, and the eighth electrode 480 may be arranged in a linear shape in an area corresponding to the area where the first electrode 410 and the fourth electrode 440 of the first layer M1 are provided. The fifth electrode 450, the sixth electrode 460, the seventh electrode 470, and the eighth electrode 480 of the second layer M2 may correspond to the branches 412, 422, 432, and 442 of the first electrode 410, the second electrode 420, the third electrode 430, and the fourth electrode 440 of the first layer M1.

[0105] A plurality of contact elements 451, 452, 453, and 454 may be provided on the second layer M2. For example, one or more first contact elements 451 may be provided on the fifth electrode 450 at a position corresponding to the base 411 of the first electrode 410 of the first layer M1. One or more second contact elements 452 may be provided on the sixth electrode 460 at a position corresponding to the base 421 of the second electrode 420 of the first layer M1.

[0106] One or more third contact elements 453 may be provided at a position corresponding to the base 431 of the third electrode 430 of the first layer M1 on the seventh electrode 470. One or more fourth contact elements 454 may be provided at a position corresponding to the base 441 of the fourth electrode 440 of the first layer M1 on the eighth electrode 480. A third layer M3 identical to the first layer M1 is placed above the second layer M2.

[0107] In the capacitor structure 400, for example, the second electrode 420 of the first layer M1 can be capacitively coupled to the first electrode 410 and the third electrode 430 of the first layer M1, and can also be capacitively coupled to the fifth electrode 450 and the seventh electrode 470 of the second layer M2, thereby forming multiple capacitive couplings. However, the second electrode 420 is capacitively isolated from the fourth electrode 440 and the eighth electrode 480, and no capacitive coupling is formed. In this way, by enhancing the coupling between some electrodes and not forming coupling between other electrodes, the degree of coupling can be adjusted. Although the capacitor structure 400 having a three-layer structure with two first layers M1 and one second layer M2 stacked alternately has been described above, the embodiment is not limited thereto. That is, the number of first layers M1 and second layers M2 can be variously selected.

[0108] Figure 8 is a plan view illustrating a capacitor structure 500 according to an embodiment.

[0109] refer to Figure 8The capacitor structure 500 includes: a first plate electrode P1 and a second plate electrode P2 spaced apart from each other in a vertical direction (e.g., z-axis direction); and at least one first layer M1 and at least one second layer M2 alternately stacked in the vertical direction between the first plate electrode P1 and the second plate electrode P2. Figure 8 The diagram shows a plan view of the first plate electrode, the first layer M1, the second layer M2, the third layer M3, and the second plate electrode P2 stacked in sequence in the z-axis direction. Here, the third layer M3 is the same as the first layer M1. Figure 8 , it can be considered that two first layers M1 and one second layer M2 are alternately stacked between the first plate electrode P1 and the second plate electrode P2 in the z-axis direction.

[0110] The first plate electrode P1 covers the lower portion of the first layer M1. The first plate electrode P1 may include a metal material having high conductivity. One or more first contact elements 551 may be provided on the first plate electrode P1 to electrically connect the first plate electrode P1 to the first electrode 510 of the first layer M1. The first contact elements 551 may be provided at positions corresponding to the base 511 of the first electrode 510.

[0111] The first layer M1 is disposed on the first plate electrode P1. The first layer M1 may include at least one first electrode 510 and at least one second electrode 520 alternately arranged in a first direction (eg, y-axis direction). In this case, the first electrode 510 may be arranged outside the first layer M1. Figure 8 The diagram shows an example in which the first electrode 510 is located outside the first layer M1 and one second electrode 520 is located in the inner region of the first layer M1. The number of the first electrode 510 and the second electrode 520 in the first layer M1 can be variously selected. The first electrode 510 and the second electrode 520 can include a metal material having high conductivity.

[0112] Different voltages may be applied to the first electrode 510 and the second electrode 520. The first electrode 510 is electrically connected to the first plate electrode P1 through a first contact member 551 provided on the first plate electrode P1, so that the same voltage may be applied to the first electrode 510 and the first plate electrode P1.

[0113] The first electrode 510 and the second electrode 520 may include: bases 511 and 521; and a plurality of branches 512 and 522 protruding from the bases 511 and 521. The bases 511 and 521 may extend in a second direction (e.g., an x-axis direction) perpendicular to the first direction (e.g., the y-axis direction), and the plurality of branches 512 and 522 may protrude from the bases 511 and 521 in the first direction. The plurality of branches 512 and 522 may be spaced apart from each other and arranged side by side in the second direction. Here, the plurality of branches 522 of the second electrode 520 may be arranged between the branches 512 of the first electrode 510.

[0114] A plurality of contact elements 551 and 552 may be provided on the first layer M1. For example, the plurality of contact elements 551 and 552 may include one or more first contact elements 551 provided on the first electrode 510 and one or more second contact elements 552 provided on the second electrode 520. The first contact element 551 may electrically connect the first electrode 510 of the first layer M1 to the third electrode 530 of the second layer M2 and may be provided on the base 511 of the first electrode 510. The second contact element 552 may electrically connect the second electrode 520 of the first layer M1 to the fourth electrode 540 of the second layer M2 and may be provided on the base 521 of the second electrode 520.

[0115] The second layer M2 may include one or more third electrodes 530 and one or more fourth electrodes 540 alternately arranged in a second direction (e.g., the x-axis direction). The third electrodes 530 and the fourth electrodes 540 may have a linear shape extending in a first direction (e.g., the y-axis direction) and may be arranged side by side. In this case, the third electrode 530 may be arranged outside the second layer M2. Figure 8 The diagram shows an example in which three third electrodes 530 and two fourth electrodes 540 are alternately arranged. The number of the third electrodes 530 and the fourth electrodes 540 can be variously selected. The third electrodes 530 and the fourth electrodes 540 can include a metal material having high conductivity.

[0116] Different voltages can be applied to the third electrode 530 and the fourth electrode 540. The third electrode 530 can be electrically connected to the first electrode 510 via the first contact element 551, so that the same voltage can be applied to the third electrode 530 and the first electrode 510. In addition, the fourth electrode 540 can be electrically connected to the second electrode 520 via the second contact element 552, so that the same voltage can be applied to the fourth electrode 540 and the second electrode 520.

[0117] The fourth electrode 540 of the second layer M2 may correspond to the branch portion 512 of the first electrode 510 of the first layer M1. For example, the fourth electrode 540 of the second layer M2 may be arranged such that the branch portion 512 of the first electrode 510 of the first layer M1 may be aligned with the fourth electrode 540 in a vertical direction (e.g., the z-axis direction). The first electrode 510 and the third electrode 530 may be electrically connected to each other via a first contact element 551 provided on the base 511 of the first electrode 510.

[0118] The third electrode 530 of the second layer M2 may correspond to the branch portion 522 of the second electrode 520 of the first layer M1. For example, the third electrode 530 of the second layer M2 may be arranged such that the branch portion 522 of the second electrode 520 of the first layer M1 may be vertically aligned with the third electrode 530. The second electrode 520 and the fourth electrode 540 may be electrically connected to each other via a second contact element 552 provided on the base portion 521 of the second electrode 520.

[0119] A plurality of contact elements 551 and 552 may be provided on the second layer M2. For example, one or more first contact elements 551 may be provided at positions on the third electrode 530 corresponding to the base 511 of the first electrode 510 of the first layer M1. The first contact elements 551 provided on the second layer M2 are used to electrically connect the third electrode 530 to the first electrode 510 of the third layer M3 (which is the same as the first layer M1) provided above the second layer M2.

[0120] One or more second contact elements 552 may be provided at positions on the fourth electrode 540 corresponding to the base 521 of the second electrode 520 of the first layer M1. The second contact element 552 provided on the second layer M2 is used to electrically connect the fourth electrode 540 to the second electrode 520 of the third layer M3 (which is the same as the first layer M1) provided above the second layer M2.

[0121] A third layer M3, identical to the first layer M1, is disposed above the second layer M2. A first contact element 551 may be disposed on the base 511 of the first electrode 510 of the third layer M3. The first contact element 551 may electrically connect the first electrode 510 of the third layer M3 to the second plate electrode P2 disposed above the third layer M3. The second plate electrode P2 covers the upper portion of the third layer M3. The second plate electrode P2 may include a highly conductive metal material.

[0122] In capacitor structure 500, first plate electrode P1 and second plate electrode P2 cover the lower and upper portions of first layer M1, second layer M2, and third layer M3. First electrode 510 is positioned outside first layer M1 and third layer M3, and third electrode 530 is positioned outside second layer M2. Because first plate electrode P1, first electrode 510, third electrode 530, and second plate electrode P2 are electrically connected to each other via first contact element 551, the same voltage can be applied to first plate electrode P1, first electrode 510, third electrode 530, and second plate electrode P2.

[0123] As described above, the second electrode 520 and the fourth electrode 540 placed inside the capacitor structure 500 are surrounded by the first plate electrode P1, the first electrode 510, the third electrode 530, and the second plate electrode P2 placed outside the capacitor structure 500 and electrically connected to each other. Therefore, the second electrode 520 and the fourth electrode 540 can be prevented from being affected by external noise signals.

[0124] In the above description, two first layers M1 and one second layer M2 are alternately stacked between the first plate electrode P1 and the second plate electrode P2. However, the number of the first layers M1 and the second layers M2 may be variously selected.

[0125] The capacitive coupling area of ​​the capacitor structure of the example embodiment can be increased to increase the capacitance per unit area, and the capacitor structure can be arranged in a small area of ​​the integrated circuit to achieve high integration. In addition, the electrical connection between the electrodes of the capacitor structure and the external lines can be improved to reduce the wiring area, increase the integration efficiency and reduce the cost and inherent resistance. In addition, the capacitor structure is very robust so that the capacitance of the capacitor structure will not be significantly reduced even when a part of the capacitor structure is damaged. Although the embodiments have been described, these embodiments are only for exemplary purposes and those skilled in the art can make various modifications thereto.

[0126] It should be understood that the embodiments described herein are intended to be illustrative only and not restrictive, and that the description of features or aspects within each embodiment may be considered applicable to other similar features or aspects in other embodiments.

[0127] Although one or more embodiments have been described with reference to the drawings, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope as defined by the following claims.

Claims

1. A capacitor structure comprising: at least one first layer and at least one second layer stacked alternately, The first layer includes a first electrode, a second electrode, a third electrode and a fourth electrode arranged in sequence along a first direction, The second layer includes a fifth electrode, a sixth electrode, a seventh electrode, and an eighth electrode arranged along a second direction intersecting the first direction, the fifth electrode being electrically connected to the first electrode, the sixth electrode being electrically connected to the second electrode, the seventh electrode being electrically connected to the third electrode, and the eighth electrode being electrically connected to the fourth electrode, Each of the first electrode, the second electrode, the third electrode, and the fourth electrode includes a base portion and a branch portion protruding from the base portion, The fifth electrode is arranged to correspond to the branch portion of the second electrode and the branch portion of the fourth electrode, the sixth electrode is arranged to correspond to the branch portion of the first electrode and the branch portion of the third electrode, the seventh electrode is arranged to correspond to the branch portion of the second electrode and the branch portion of the fourth electrode, and the eighth electrode is arranged to correspond to the branch portion of the first electrode and the branch portion of the third electrode. The first electrode is capacitively coupled to the second electrode in a horizontal direction of the first layer, and is capacitively coupled to the sixth electrode, the seventh electrode, and the eighth electrode in a vertical direction of the first layer, The second electrode is capacitively coupled to the first electrode and the third electrode in the horizontal direction, and is capacitively coupled to the fifth electrode, the seventh electrode, and the eighth electrode in the vertical direction, The third electrode is capacitively coupled to the second electrode and the fourth electrode in the horizontal direction, and is capacitively coupled to the fifth electrode, the sixth electrode, and the eighth electrode in the vertical direction, and The fourth electrode is capacitively coupled to the third electrode in the horizontal direction, and is capacitively coupled to the fifth electrode, the sixth electrode, and the seventh electrode in the vertical direction. 2 . The capacitor structure of claim 1 , wherein the second direction is perpendicular to the first direction.

3. The capacitor structure according to claim 1 , wherein the base extends in the second direction, and The branch portion protrudes from the base portion in the first direction. 4 . The capacitor structure according to claim 3 , wherein the branches are spaced apart from each other and arranged side by side in the second direction. 5 . The capacitor structure of claim 1 , wherein the fourth electrode is further capacitively coupled to the first electrode in the horizontal direction.

6. A capacitor structure according to claim 5, wherein the branch portion of the first electrode is arranged between the branch portions of the second electrode, the branch portion of the second electrode adjacent to the first electrode is arranged between the branch portions of the first electrode, the branch portion of the second electrode adjacent to the third electrode is arranged between the branch portions of the third electrode, the branch portion of the third electrode adjacent to the second electrode is arranged between the branch portions of the second electrode, the branch portion of the third electrode adjacent to the fourth electrode is arranged between the branch portions of the fourth electrode, the branch portion of the fourth electrode adjacent to the third electrode is arranged between the branch portions of the third electrode, and the branch portion of the fourth electrode adjacent to the first electrode is arranged between the branch portions of the first electrode.

7. The capacitor structure of claim 1 , further comprising: at least one first contact element interposed between the first electrode and the fifth electrode; at least one second contact element interposed between the second electrode and the sixth electrode; at least one third contact element interposed between the third electrode and the seventh electrode; as well as At least one fourth contact element is interposed between the fourth electrode and the eighth electrode.

8. The capacitor structure according to claim 7, wherein the first, second, third and fourth contact elements are respectively arranged at positions corresponding to respective bases of the first, second, third and fourth electrodes.

9. The capacitor structure of claim 1 , wherein the at least one first layer comprises a plurality of first layers, and The at least one second layer is interposed between the plurality of first layers.

10. The capacitor structure according to claim 9, wherein the first electrode is provided on an outer side of the first layer, and The fifth electrode is disposed outside the second layer.

11. The capacitor structure of claim 1, wherein the second electrode and the fourth electrode are not capacitively coupled to each other.

12. A capacitor structure comprising: at least one first layer and at least one second layer stacked alternately, The first layer includes a first electrode, a second electrode, a third electrode and a fourth electrode arranged in sequence along a first direction, The second layer includes a fifth electrode, a sixth electrode, a seventh electrode, and an eighth electrode arranged along a second direction intersecting the first direction, the fifth electrode being electrically connected to the first electrode, the sixth electrode being electrically connected to the second electrode, the seventh electrode being electrically connected to the third electrode, and the eighth electrode being electrically connected to the fourth electrode, Each of the first electrode, the second electrode, the third electrode, and the fourth electrode includes a base portion and a branch portion protruding from the base portion, The fifth electrode is arranged to correspond to the branch portion of the second electrode and the branch portion of the fourth electrode, the sixth electrode is arranged to correspond to the branch portion of the first electrode and the branch portion of the third electrode, the seventh electrode is arranged to correspond to the branch portion of the second electrode and the branch portion of the fourth electrode, and the eighth electrode is arranged to correspond to the branch portion of the first electrode and the branch portion of the third electrode. The first electrode is capacitively coupled to the second electrode in a horizontal direction of the first layer, and is capacitively coupled to the sixth electrode and the seventh electrode in a vertical direction of the first layer, The second electrode is capacitively coupled to the first electrode and the third electrode in the horizontal direction, and is capacitively coupled to the fifth electrode and the seventh electrode in the vertical direction, The third electrode is capacitively coupled to the second electrode and the fourth electrode in the horizontal direction, and is capacitively coupled to the fifth electrode in the vertical direction, and The fourth electrode is capacitively coupled to the third electrode in the horizontal direction, and is capacitively coupled to the fifth electrode and the seventh electrode in the vertical direction. The capacitor structure of claim 12 , wherein the second direction is perpendicular to the first direction.

14. The capacitor structure according to claim 12, wherein the base extends in the second direction, and The branch portion protrudes from the base portion in the first direction. 15 . The capacitor structure of claim 14 , wherein the branches are spaced apart from each other and arranged side by side in the second direction.

16. The capacitor structure of claim 12, wherein the fourth electrode is further capacitively coupled to the first electrode in the horizontal direction.

17. A capacitor structure according to claim 16, wherein the branch portion of the first electrode is arranged between the branch portions of the second electrode, the branch portion of the second electrode adjacent to the first electrode is arranged between the branch portions of the first electrode, the branch portion of the second electrode adjacent to the third electrode is arranged between the branch portions of the third electrode, the branch portion of the third electrode adjacent to the second electrode is arranged between the branch portions of the second electrode, the branch portion of the third electrode adjacent to the fourth electrode is arranged between the branch portions of the fourth electrode, the branch portion of the fourth electrode adjacent to the third electrode is arranged between the branch portions of the third electrode, and the branch portion of the fourth electrode adjacent to the first electrode is arranged between the branch portions of the first electrode.

18. The capacitor structure of claim 12, further comprising: at least one first contact element interposed between the first electrode and the fifth electrode; at least one second contact element interposed between the second electrode and the sixth electrode; at least one third contact element interposed between the third electrode and the seventh electrode; as well as At least one fourth contact element is interposed between the fourth electrode and the eighth electrode.

19. The capacitor structure of claim 18, wherein the first, second, third, and fourth contact elements are respectively arranged at positions corresponding to respective bases of the first, second, third, and fourth electrodes.

20. The capacitor structure of claim 12, wherein the at least one first layer comprises a plurality of first layers, and The at least one second layer is interposed between the plurality of first layers.

21. The capacitor structure of claim 20, wherein the first electrode is disposed outside the first layer, and The fifth electrode is disposed outside the second layer.

22. The capacitor structure of claim 12, wherein the second electrode and the fourth electrode are not capacitively coupled to each other.

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