A supportable double suction cup vacuum pen

Abstract

The present invention discloses a supportable double-suction cup vacuum pen, comprising a vacuum pen and a bracket. The present invention arranges the vacuum pen on a rotating sleeve of a rotating pen holder on the bracket, and sets a double suction nozzle assembly on the suction port of the vacuum pen, and simultaneously adsorbs the sample by two suction cups and suction nozzles, thereby ensuring the stability of the suction cup adsorbing the sample; by adjusting the first support rod and the second support rod by adjusting the assembly, the vacuum pen can be accurately placed at a height position of the sample, and by rotating the handle to rotate the turntable and the column, the vacuum pen can be driven to rotate 360° in a plane at a specified height position, and the sample on the vacuum pen suction cup is stably adsorbed and accurately placed in the in-situ sample rod, thereby avoiding damage caused by placing the sample multiple times, and ensuring the smooth progress of the electron microscope in-situ test sample. The present invention has the advantages of simple structure, practical convenience, and stable adsorption.

Description

Technical Field

[0001] The invention relates to the field of electron microscope in-situ technology, in particular to a supportable double-suction cup vacuum pen. Background Art

[0002] With the continuous maturity and development of in situ electron microscopy (TEM) technology, transmission electron microscopy (TEM) has expanded beyond the scope of external morphology characterization to include high-precision nanofabrication, performance testing, and in-depth observation of internal lattice defects. By employing a variety of in situ sample holders, such as those employing force fields, thermal fields, and optical fields, dynamic observations can be applied to samples using various external fields, further enabling investigation of the internal structure of semiconductor devices. However, the need to place the sample holder within the TEM's vacuum chamber limits sample size. Furthermore, the need for researchers to deeply observe the sample's crystal structure and its dynamic changes under various in situ fields also limits sample thickness. Samples prepared using FIB cutting techniques typically range in thickness from tens to hundreds of nanometers. Due to the small sample size, traditional manual sample clamping methods, often subject to vibration due to human effort, make it difficult to maintain a stable grip during the clamping process, and often require multiple attempts to successfully place the sample in the holder, which can easily damage the sample. For small samples, even minor damage can negatively impact further analysis of the adsorbed sample. Therefore, ensuring smooth, damage-free, and precise placement of the sample into the in-situ sample holder and into the vacuum chamber of a transmission electron microscope (TEM) is essential for successful testing. The patent "A Vacuum Pen" (Patent No. 201720319928) discloses a vacuum pen that adjusts the length of the pen holder to adsorb samples. However, because the pen is traditionally held, it is susceptible to human tremors, making it difficult to maintain smooth adsorption and precise placement of the sample into the in-situ sample holder. Furthermore, existing vacuum pen holders typically utilize a single nozzle for sample adsorption, which can lead to poor adsorption stability, causing slight oscillation between the suction cup and the sample, making it difficult to ensure precise placement of the sample into the in-situ sample holder. Therefore, ensuring smooth adsorption and precise placement of the sample is essential for successful in-situ TEM testing. Summary of the Invention

[0003] The present invention addresses the shortcomings of the prior art by providing a supportable double-suction cup vacuum pen. The present invention employs a method of placing the vacuum pen on a rotating sleeve of a rotating pen holder on a bracket, and attaching a double suction nozzle assembly to the suction port of the vacuum pen. The two suction cups and nozzles simultaneously adsorb samples, ensuring the stability of the sample adsorption by the suction cups. Adjusting the first and second support rods by adjusting the assembly allows the vacuum pen to accurately position the sample. Rotating the handle rotates the turntable and column, driving the vacuum pen to rotate 360 ​​degrees in a plane at a specified height, smoothly adsorbing the sample on the vacuum pen's suction cup and accurately placing it in the in-situ sample holder. This avoids damage to the sample caused by multiple sample placements and ensures smooth in-situ sample testing by an electron microscope. The present invention has the advantages of a simple structure and practical convenience.

[0004] The specific technical solution for achieving the purpose of the present invention is:

[0005] A supportable double-suction cup vacuum pen, characterized by comprising a vacuum pen and a support;

[0006] The vacuum suction pen is provided with a suction port and a double suction nozzle assembly;

[0007] The double suction nozzle assembly consists of a pen connecting cap, a filter screen, a buffer tube, a suction cup, a suction nozzle and a fixed cover;

[0008] The fixed cover is in the shape of a disc and has two suction nozzle holes radially arranged thereon;

[0009] The buffer tube is in the shape of a circular tube, one end of the buffer tube is provided with a fixed cover seat, and a filter seat is provided inside the buffer tube;

[0010] The penholder connecting cap is in the shape of a trapezoidal cylinder with a large end and a small end, and the small end is provided with a buffer tube interface;

[0011] The suction cup and the suction nozzle are both two pieces, one end of the suction nozzle is connected to the suction cup, and the other end of the suction nozzle is connected to the suction nozzle hole of the fixed cover;

[0012] The fixed cover is arranged on the fixed cover seat of the buffer tube;

[0013] The buffer tube is arranged on the buffer tube interface of the pen barrel connecting cap, and the filter is arranged on the filter seat in the buffer tube;

[0014] The large end of the pen holder connecting cap is connected to the suction port of the vacuum pen;

[0015] The bracket is composed of a bracket base, an adjustment component, a first support rod, a second support rod and a rotating pen holder;

[0016] The bracket seat is composed of a base, a turntable, a column, a rotating handle and a locking screw;

[0017] The base is a rectangular or circular table with a turntable seat on the surface, a handle seat and a locking screw hole on the side, a support rod shaft hole is provided on the top of the column, a large bevel gear is provided on the circumference of the turntable, and a column seat is provided on the axis. The rotating handle is a shaft-like part with a small bevel gear, the column is provided on the column seat of the turntable, the turntable is provided on the turntable seat of the base, the rotating handle is provided on the handle seat of the base, and the small bevel gear of the rotating handle is meshed with the large bevel gear of the turntable, the locking screw is provided in the locking screw hole of the base, and the head of the locking screw touches the rotating handle;

[0018] Both ends of the first support rod are provided with an axis hole, and one end of the first support rod is hinged to the support rod axis hole of the column via an adjustment component;

[0019] One end of the second support rod is provided with an axial hole, and the other end is provided with a core shaft hole, and the other end of the first support rod is hinged to one end of the second support rod via an adjustment component;

[0020] The rotating pen holder is composed of a core shaft and a rotating sleeve, and the core shaft of the rotating pen holder is connected to the core shaft hole of the second support rod;

[0021] The vacuum suction pen is arranged on a rotating sleeve of a rotating pen holder on the bracket.

[0022] The adjusting assembly is composed of a screw rod, a spring washer and a locking nut. The spring washer is arranged on the screw rod, and the locking nut is engaged with the screw rod.

[0023] The present invention employs a vacuum pen mounted on a rotating sleeve of a rotating pen holder on a bracket, and a dual suction nozzle assembly mounted on the suction port of the vacuum pen. The two suction cups and nozzles simultaneously absorb the sample, ensuring the stability of the sample absorption by the cups. Adjusting the first and second support rods by adjusting the assembly allows the vacuum pen to accurately position the sample. Rotating the handle rotates the turntable and column, driving the vacuum pen to rotate 360 ​​degrees in a plane at a specified height, smoothly absorbing the sample on the vacuum pen's suction cup and accurately placing it in the in-situ sample holder. This avoids damage to the sample caused by repeated placement and ensures smooth in-situ sample testing by an electron microscope. The present invention has the advantages of a simple structure and practical convenience. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of the present invention;

[0025] Figure 2 This is a schematic structural diagram of the vacuum suction pen and double suction nozzle assembly of the present invention;

[0026] Figure 3 It is a structural schematic diagram of the bracket seat of the present invention;

[0027] Figure 4 For the present invention Figure 1A--Schematic diagram of the structure of section A;

[0028] Figure 5 For the present invention Figure 1 B--Schematic diagram of the structure of B section;

[0029] Figure 6 This is a schematic diagram of the use state of placing samples in the present invention. DETAILED DESCRIPTION

[0030] See Figure 1 The present invention includes a vacuum pen 1 and a bracket 2.

[0031] See Figure 1 、 Figure 2 , the vacuum suction pen 1 is provided with a suction port 11 and a double suction nozzle assembly;

[0032] The double suction nozzle assembly consists of a pen connecting cap 12, a filter 13, a buffer tube 14, a suction cup 15, a suction nozzle 16 and a fixed cover 17;

[0033] The fixed cover 17 is in the shape of a disc and has two suction nozzle holes 171 radially provided thereon;

[0034] The buffer tube 14 is in a circular tube shape, and a fixed cover seat 142 is provided at one end of the buffer tube 14 , and a filter seat 141 is provided inside the buffer tube 14 ;

[0035] The pen barrel connecting cap 12 is a trapezoidal tube with a large end and a small end, and the small end is provided with a buffer tube interface 121;

[0036] The suction cup 15 and the suction nozzle 16 are both two pieces, one end of the suction nozzle 16 is connected to the suction cup 15, and the other end of the suction nozzle 16 is connected to the suction nozzle hole 171 of the fixed cover 17;

[0037] The fixing cover 17 is disposed on the fixing cover seat 142 of the buffer tube 14 .

[0038] The buffer tube 14 is provided on the buffer tube interface 121 of the pen barrel connecting cap 12, and the filter screen 13 is provided on the filter screen seat 141 in the buffer tube 14;

[0039] The large end of the pen connecting cap 12 is connected to the suction port 11 of the vacuum pen 1;

[0040] See Figure 1 、 Figure 3 The bracket 2 is composed of a bracket base 21, an adjustment component 22, a first support rod 23, a second support rod 24 and a rotating pen base 25;

[0041] The bracket 21 is composed of a base 211, a turntable 212, a column 213, a rotating handle 214 and a locking screw 215;

[0042] The base 211 is a rectangular or circular table component with a turntable seat on the surface, a handle seat and a locking screw hole on the side. The top of the column 213 is provided with a strut shaft hole. A large bevel gear is provided on the circumference of the turntable 212, and a column seat is provided on the axis. The rotating handle 214 is a shaft-like component with a small bevel gear. The column 213 is provided on the column seat of the turntable 212, and the turntable 212 is provided on the turntable seat of the base 211. The rotating handle 214 is provided on the handle seat of the base 211, and the small bevel gear of the rotating handle 214 is engaged with the large bevel gear of the turntable 212. The locking screw 215 is provided in the locking screw hole of the base 211, and the head of the locking screw 215 touches the rotating handle 214.

[0043] See Figure 1 、 Figure 4 Both ends of the first support rod 23 are provided with an axial hole, and one end of the first support rod 23 is hinged to the support rod axial hole of the column 213 through the adjustment component 22.

[0044] See Figure 1 、 Figure 5 One end of the second support rod 24 is provided with an axial hole and the other end is provided with a core shaft hole. The other end of the first support rod 23 is hinged to one end of the second support rod 24 through the adjustment component 22.

[0045] See Figure 1 、 Figure 2 The rotating pen holder 25 is composed of a core shaft and a rotating sleeve. The core shaft of the rotating pen holder 25 is connected to the core shaft hole of the second support rod 24; the vacuum suction pen 1 is arranged on the rotating sleeve of the rotating pen holder 25 on the bracket 2.

[0046] See Figure 1 、 Figure 4 、 Figure 5 The adjusting assembly 22 is composed of a screw rod 221 , a spring washer 222 and a locking nut 223 . The spring washer 222 is arranged on the screw rod 221 , and the locking nut 223 is engaged with the screw rod 221 .

[0047] Embodiments of the present invention:

[0048] See Figure 1 、 Figure 2 、 Figure 6 , connect the large end of the pen connecting cap 12 on the double nozzle assembly to the suction port 11 of the vacuum suction pen 1; open the sample box 3, start the vacuum suction pen 1, align the two suction cups 15 with the sample in the sample box 3 and absorb the sample.

[0049] See Figure 1 、 Figure 2 、 Figure 3 、 Figure 6, put the vacuum pen 1 and the sample into the rotating sleeve of the rotating pen holder 25 on the bracket 2, adjust the first support rod 23, make the first support rod 23 swing relative to the column 213, adjust the second support rod 24, make the second support rod 24 swing relative to the first support rod 23, make the sample on the vacuum pen 1 stay on one side of the TEM transmission electron microscope in-situ sample rod and be equal to the height of the in-situ sample rod, loosen the locking screw 215 on the base 211, turn the rotating handle 214, due to the rotating handle The small bevel gear of the handle 214 meshes with the large bevel gear of the turntable 212. The turntable 212 drives the column 213, the first support rod 23 and the second support rod 24 to rotate, so that the sample on the vacuum suction pen 1 is rotated to the in-situ sample rod. The locking screw 215 is tightened to lock the rotating handle 214. Finally, by adjusting the rotating sleeve of the rotating pen holder 25, the sample on the suction cup 15 of the vacuum suction pen 1 is accurately aligned with the in-situ sample rod 4. The vacuum suction pen 1 is closed, and the sample is smoothly and accurately delivered to the in-situ sample rod 4.

[0050] See Figure 1 、 Figure 2 The double suction nozzle assembly of the present invention is composed of a pen connecting cap 12, a filter 13, a buffer tube 14, a suction cup 15, a suction nozzle 16 and a fixed cover 17; the suction cup 15 and the suction nozzle 16 of the present invention are both two pieces, and the suction cup 15 and the suction nozzle 16 are respectively set in the two suction nozzle holes 171 of the fixed cover 17. The fixed cover 17 is connected to the suction port 11 of the vacuum suction pen 1 through the buffer tube 14 and the pen connecting cap 12 to form a double-suction cup vacuum suction pen.

[0051] See Figure 1 、 Figure 2 In the present invention, a filter 13 is provided in the buffer tube 14. The built-in filter 13 can effectively filter dust during the adsorption process to protect the components in the vacuum pen 1 and extend the service life of the vacuum pen 1.

[0052] See Figure 1 、 Figure 2 、 Figure 6 The bracket 2 of the present invention is used to adjust the spatial position of the sample on the vacuum pen 1 to ensure that the sample is smoothly and accurately delivered to the in-situ sample rod 4.

[0053] See Figure 1 、 Figure 4 、 Figure 5 The bracket 2 of the present invention adopts an adjustment component 22, a first support rod 23 and a second support rod 24 to adjust the relative height and rotation radius of the sample. One end of the first support rod 23 is hinged to the support rod axis hole of the column 213 through the adjustment component 22; the other end of the first support rod 23 is hinged to one end of the second support rod 24 through the adjustment component 22.

[0054] See Figure 1 、 Figure 4 、 Figure 5 The adjusting assembly 22 of the present invention is composed of a screw rod 221, a spring washer 222 and a locking nut 223. When one end of the first support rod 23 is hinged to the support rod axis hole of the column 213, the screw rod 221 is passed through the axis hole of the first support rod 23 and the column 213, and the spring washer 222 is arranged between the axis hole of the first support rod 23 and the column 213. The locking nut 223 is engaged with the screw rod 221. By adjusting the locking nut 223, the spring washer 222 can obtain a moderate friction force between the axis hole of the first support rod 23 and the column 213, ensuring that the first support rod 23 can be swung relative to the column 213 by applying force by hand. Once the external force disappears, the stability of the first support rod 23 relative to the column 213 can be guaranteed.

[0055] The other end of the first support rod 23 and the axial hole of one end of the second support rod 24 are hinged in the same manner as described above through the adjustment component 22, and have the same debugging effect. The first support rod 23 and the second support rod 24 jointly adjust the relative height and rotation radius of the sample.

[0056] See Figure 1 、 Figure 3 The bracket 2 of the present invention adopts a bracket seat 21 to adjust the rotational position of the sample within the rotation radius. The bracket seat 21 of the present invention is composed of a base 211, a turntable 212, a column 213, a rotating handle 214 and a locking screw 215; the present invention adopts a small bevel gear of the rotating handle 214 to engage with the large bevel gear of the turntable 212. By controlling the rotation of the rotating handle 214 to control the rotation angle of the column 213, the rotation angle of the vacuum suction pen 1 on the second support rod 24 can be accurately controlled to complete the adjustment of the rotational position of the sample within the rotation radius.

[0057] The present invention sets a locking screw 215 in the locking screw hole of the base 211. When the head of the locking screw 215 is locked with the rotating handle 214, the turntable 212 is locked and cannot rotate, thereby ensuring the stability and working reliability of the bracket 2 itself.

Claims

1. A supportable double suction cup vacuum pen, characterized in that: It comprises a vacuum suction pen (1) and a bracket (2); The vacuum suction pen (1) is provided with a suction port (11) and a double suction nozzle assembly; The double suction nozzle assembly is composed of a pen holder connecting cap (12), a filter screen (13), a buffer tube (14), a suction cup (15), a suction nozzle (16) and a fixing cover (17); The fixed cover (17) is in the shape of a disc and is provided with two suction nozzle holes (171) in the radial direction; The buffer tube (14) is in the shape of a circular tube, a fixed cover seat (142) is provided at one end of the buffer tube (14), and a filter seat (141) is provided inside the buffer tube (14); The pen holder connecting cap (12) is in the shape of a trapezoidal cylinder with a large end and a small end, and the small end is provided with a buffer tube interface (121); The suction cup (15) and the suction nozzle (16) are both two pieces, one end of the suction nozzle (16) is connected to the suction cup (15), and the other end of the suction nozzle (16) is connected to the suction nozzle hole (171) of the fixed cover (17); The fixed cover (17) is arranged on the fixed cover seat (142) of the buffer tube (14); The buffer tube (14) is arranged on the buffer tube interface (121) of the pen holder connecting cap (12), and the filter screen (13) is arranged on the filter screen seat (141) in the buffer tube (14); The large end of the pen holder connecting cap (12) is connected to the suction port (11) of the vacuum suction pen (1); The support (2) is composed of a support seat (21), an adjustment component (22), a first support rod (23), a second support rod (24) and a rotating pen seat (25); The support seat (21) is composed of a base (211), a rotating disk (212), a column (213), a rotating handle (214) and a locking screw (215); The base (211) is a rectangular or circular platform member with a turntable seat on the surface, a handle seat and a locking screw hole on the side, a support rod shaft hole is provided on the top of the column (213), a large bevel gear is provided on the circumference of the turntable (212), and a column seat is provided on the axis, and the rotating handle (214) is a shaft member provided with a small bevel gear, the column (213) is arranged on the column seat of the turntable (212), the turntable (212) is arranged on the turntable seat of the base (211), the rotating handle (214) is arranged on the handle seat of the base (211), and the small bevel gear of the rotating handle (214) is meshed with the large bevel gear of the turntable (212), and the locking screw (215) is arranged in the locking screw hole of the base (211), and the head of the locking screw (215) touches the rotating handle (214); Both ends of the first support rod (23) are provided with axial holes, and one end of the first support rod (23) is hinged to the support rod axial hole of the column (213) via an adjustment component (22); One end of the second support rod (24) is provided with an axial hole, and the other end is provided with a core shaft hole, and the other end of the first support rod (23) is hinged to one end of the second support rod (24) via an adjustment component (22); The rotating pen holder (25) is composed of a core shaft and a rotating sleeve, and the core shaft of the rotating pen holder (25) is connected to the core shaft hole of the second support rod (24); The vacuum suction pen (1) is arranged on a rotating sleeve of a rotating pen holder (25) on a bracket (2).

2. A supportable double suction cup vacuum pen according to claim 1, characterized in that: The adjustment assembly (22) is composed of a screw rod (221), a spring washer (222) and a locking nut (223); the spring washer (222) is arranged on the screw rod (221), and the locking nut (223) is meshed with the screw rod (221).

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