A heating furnace body with a functional part supporting a process pipe

Abstract

The present invention discloses a heating furnace body with a functional part for supporting a process pipe, including a heating furnace body, a process pipe, an end flange, an equipment frame, an end baffle, a support pipe, an intermediate support, a furnace wire, a furnace wire insulator, an insulator pull rod, a heat preservation cotton, a furnace body shell and a silicon chip, wherein the surface of the heating furnace body is fixedly installed with a furnace body shell, a process pipe is arranged inside the heating furnace body, end flanges are fixedly installed at both ends of the process pipe, and an equipment frame is fixedly installed on the end flange. When the process pipe sinks and deforms, the present invention can significantly reduce the sinking tendency and deformation amount of the process pipe through the supporting function inside the furnace, and can realize the long-term use of the process pipe, without the need to regularly rotate the process pipe 180°, which greatly improves the service life of the process pipe, and no longer needs to shut down, disassemble, or rotate the process pipe, thereby improving the production capacity and reducing the cost of process pipe damage.

Description

Technical Field

[0001] The invention relates to the technical field of photovoltaic production equipment, in particular to a heating furnace body with a functional part for supporting a process pipe. Background Art

[0002] The photovoltaic industry has always pursued large production capacity and greater production capacity, resulting in a substantial increase in the heating furnace body. Now the photovoltaic heating furnace body has exceeded 4 meters in length. At the same time, the process tube has also been lengthened and needs to be longer than the length of the heating furnace body. The process tube is sealed, connected and supported by the end flanges at both ends, and the end flanges are consolidated with the equipment frame. The working temperature of some processes is also within the range of high temperature (1150℃) and sub-high temperature (1050℃). Since the process tube (commonly used quartz tube) passes through the inside of the heating furnace body and is subjected to high temperature together to realize the coating process of the silicon wafer inside the process tube, the process tube is found to be bent and deformed (sunk) downward in the middle part during long-term use. It is necessary to rotate the process tube (from the bottom to the top) 180° before using it after a period of use. This process is troublesome, requires downtime, affects production capacity, and may also cause the process tube to be damaged and scrapped during the disassembly and rotation (180°) of the process tube or the process tube is too bent to continue to be used. The same is true in the semiconductor industry, where the temperature sometimes needs to be even higher, above 1200°C. Similarly, process tubes will bend and need to be regularly disassembled, rotated, and reused. Summary of the invention

[0003] The object of the present invention is to provide a heating furnace body with a functional component for supporting process tubes, so as to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a heating furnace body with a functional part for supporting a process tube, comprising a heating furnace body, a process tube, an end flange, an equipment frame, an end baffle, a support tube, an intermediate support member, a furnace wire, a furnace wire insulator, a furnace wire insulator pull rod, thermal insulation cotton, a furnace body shell and a silicon wafer, wherein the furnace body shell is fixedly installed on the surface of the heating furnace body, a process tube is arranged inside the heating furnace body, end flanges are fixedly installed at both ends of the process tube, an equipment frame is fixedly installed on the end flange, an end baffle is fixedly installed inside the heating furnace body, a support tube is arranged on the side opposite to the end baffle, an intermediate support member is fixedly installed on the surface of the support tube, thermal insulation cotton is arranged inside the heating furnace body, a furnace wire insulator is fixedly installed inside the thermal insulation cotton, a furnace wire insulator pull rod is fixedly installed inside the furnace wire insulator, a furnace wire is arranged on the arc surface of the furnace wire insulator, and a silicon wafer is arranged inside the process tube.

[0005] Preferably, two support tubes are arranged at the lower part of the furnace of the heating furnace body, and the support tubes are ceramic tubes or ceramic rods.

[0006] Preferably, the support tube is installed freely and closely against the furnace wire and the intermediate support member at the lower part of the furnace chamber of the heating furnace body.

[0007] Preferably, there can be multiple intermediate supports, which are respectively arranged in the length direction of the heating furnace body. The intermediate supports are inserted between the two circles of furnace wire, and their outer diameter parts are firmly in contact with the inner surface of the metal shell of the furnace body of the heating furnace. The insulation material firmly fixes the intermediate supports, and two groups are formed on the left and right sides, that is, the intermediate supports form two rows.

[0008] Preferably, the intermediate support members form two rows, and end baffles are provided at both ends of the length of the left and right rows, and their installation form is the same as that of the intermediate support members to fix their positions.

[0009] Preferably, the furnace chamber, furnace wire, middle support member and end baffles in the heating furnace body form an installation space, and the support tubes are arranged in the space, with two groups arranged symmetrically on the left and right.

[0010] Compared with the prior art, the beneficial effects of the present invention are as follows: the heating furnace body with functional parts for supporting process pipes can significantly reduce the sinking tendency and deformation of the process pipes through the supporting function inside the furnace when the process pipes sink and deform, so that the process pipes can be used for a long time, and there is no need to rotate the process pipes 180° regularly, which greatly improves the service life of the process pipes. There is no need to shut down, disassemble, or rotate the process pipes, which effectively improves the integrity rate of the equipment, increases production capacity, reduces the cost of process pipe damage, etc. It has obvious advantages and has a broad development space and high promotion value. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a structural schematic diagram of the present invention;

[0012] Figure 2 It is a side view of the present invention;

[0013] Figure 3 For the present invention Figure 1 Enlarged view of point A in the middle;

[0014] Figure 4 For the present invention Figure 2 Enlarged view of point B in the middle.

[0015] In the figure: 1. Heating furnace body; 2. Process pipe; 3. End flange; 4. Equipment frame; 5. End baffle; 6. Support pipe; 7. Intermediate support; 8. Furnace wire; 9. Furnace wire insulator; 10. Furnace wire insulator pull rod; 11. Insulation cotton; 12. Furnace body shell; 13. Silicon wafer. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0017] See also Figure 1-4 An embodiment of the present invention is as follows: a heating furnace body with a functional part for supporting a process tube, comprising a heating furnace body 1, a process tube 2, an end flange 3, an equipment frame 4, an end baffle 5, a support tube 6, an intermediate support member 7, a furnace wire 8, a furnace wire insulator 9, a furnace wire insulator pull rod 10, a heat preservation cotton 11, a furnace body shell 12 and a silicon wafer 13. The furnace body shell 12 is fixedly installed on the surface of the heating furnace body 1, a process tube 2 is arranged inside the heating furnace body 1, end flanges 3 are fixedly installed at both ends of the process tube 2, an equipment frame 4 is fixedly installed at the bottom of the end flange 3, and an end baffle 5 is fixedly installed inside the heating furnace body 1. The intermediate support members 7 are formed into two rows, and end baffles 5 are arranged at both ends of the length of the left and right rows. The installation form is the same as that of the intermediate support member 7 for position fixing. A support tube 6 is arranged on the side opposite to the end baffle 5. Two support tubes 6 are arranged at the lower part of the furnace chamber of the heating furnace body 1. The support tubes 6 are made of insulating materials such as ceramic tubes or ceramic rods, quartz tubes or quartz rods. The support tubes 6 are freely installed close to the furnace wire 8 and the intermediate support member 7 at the lower part of the furnace chamber of the heating furnace body 1. The surface of the support tube 6 is fixedly installed with the intermediate support member 7. There can be multiple intermediate support members 7, which are respectively arranged in the length direction of the heating furnace body 1 and at both ends. An intermediate support member 7 is inserted between the coil furnace wires 8, and its outer diameter portion is in stable contact with the inner surface of the metal shell of the furnace body shell 12 of the heating furnace body 1. The insulation material firmly fixes the intermediate support member 7, and two groups are formed on the left and right sides, that is, the intermediate support members 7 are formed into two rows. Insulation cotton 11 is arranged inside the heating furnace body 1, and a furnace wire insulator 9 is fixedly installed inside the insulation cotton 11. A furnace wire insulator pull rod 10 is fixedly installed inside the furnace wire insulator 9, and the arc surface of the furnace wire insulator 9 is arranged with the furnace wire 8. The furnace chamber, furnace wire 8, intermediate support member 7, and end baffle 5 in the heating furnace body 1 form an installation space , and the support tube 6 is arranged in the space, and two groups are arranged symmetrically on the left and right. A silicon wafer 13 is arranged inside the process tube 2. When the process tube 2 sinks and deforms, the heating furnace body with the functional parts for supporting the process tube can significantly reduce the sinking tendency and deformation of the process tube 2 through the supporting function inside the furnace, so that the process tube 2 can be used for a long time, and there is no need to regularly rotate the process tube 2 by 180 degrees, which greatly improves the service life of the process tube 2. There is no need to shut down, disassemble, or rotate the process tube 2, which effectively improves the integrity rate of the equipment, increases production capacity, reduces the cost of damage to the process tube 2, and has obvious advantages.

[0018] Working principle: The heating furnace body 1 is a general furnace body, which is not the focus of the present invention, but the carrier of the present invention. The heating furnace body 1 is wound into a spiral shape by a furnace wire 8, and a furnace wire insulator 9 is placed between every two adjacent turns of the spiral furnace wire, and the entire spiral furnace wire is like this, forming a row of furnace wire insulators to separate and fix each turn of the furnace wire in an arc, and then the furnace wire insulator pull rod 10 is passed through the hole of the tail of each furnace wire insulator, and the whole row is tightened, and then the two ends of the pull rod are bent to complete the shaping of the tightened furnace wire insulator and fix the furnace wire 8; such a furnace wire insulator row is distributed at multiple points according to the furnace wire spiral diameter, which is used to completely fix the furnace wire 8 into shape; the outer surface of the spiral furnace wire is wrapped with insulation cotton 11 or insulation strips or an integrally solidified insulation layer; the two ends are placed on the solidified insulation ring to seal the furnace mouth and protect the insulation material in the middle; and then the furnace shell is wrapped and fixed, and the manufacturing process of the heating furnace body is completed. It is also necessary to arrange the furnace wire lead wire, thermocouple, etc., which is not shown, that is, the electrical control function of the heating furnace body is completed.

[0019] For those skilled in the art, the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or scope of the present invention. Therefore, the embodiments of the present invention are exemplary and non-restrictive. The scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention. Any reference numerals in the claims should not be regarded as limiting the claims involved.

Claims

1. A heating furnace body with a functional part for supporting a process tube, comprising a heating furnace body (1), a process tube (2), an end flange (3), an equipment frame (4), an end baffle (5), a support tube (6), an intermediate support member (7), a furnace wire (8), a furnace wire insulator (9), a furnace wire insulator brace (10), thermal insulation cotton (11), a furnace body shell (12) and a silicon wafer (13), characterized in that: A furnace shell (12) is fixedly mounted on the surface of the heating furnace body (1), a process tube (2) is arranged inside the heating furnace body (1), end flanges (3) are fixedly mounted at both ends of the process tube (2), an equipment frame (4) is fixedly mounted on the end flanges (3), an end baffle (5) is fixedly mounted inside the heating furnace body (1), a support tube (6) is arranged on the side opposite to the end baffle (5), an intermediate support member (7) is freely and closely mounted on the surface of the support tube (6), a heat insulation cotton (11) is arranged inside the heating furnace body (1), a furnace wire insulator (9) is fixedly mounted inside the heat insulation cotton (11), a furnace wire insulator pull rod (10) is fixedly mounted inside the furnace wire insulator (9), a furnace wire (8) is arranged on the arc surface of the furnace wire insulator (9), and a silicon wafer (13) is arranged inside the process tube (2); Two support tubes (6) are arranged at the lower part of the furnace of the heating furnace body (1), and the support tubes (6) are made of ceramic tubes or ceramic rods; The support tube (6) is installed closely to the furnace wire (8) and the intermediate support member (7) at the lower part of the furnace chamber of the heating furnace body (1); The intermediate support members (7) are provided in plurality and are arranged in the length direction of the heating furnace body (1). The intermediate support members (7) are inserted between two coils of furnace wire (8), and the outer diameter portion thereof is in stable contact with the inner surface of the metal shell of the furnace body shell (12) of the heating furnace body (1). The heat-insulating material securely fixes the intermediate support members (7), and two groups are formed on the left and right sides, that is, the intermediate support members (7) form two rows; The middle support member (7) is provided with end baffles (5) at both ends of the length of the left and right columns, and the end baffles (5) are fixed in position in the same manner as the middle support member (7); The furnace chamber, furnace wire (8), middle support member (7) and end baffle (5) in the heating furnace body (1) form an installation space, and the support tubes (6) are arranged in the space in two groups symmetrically arranged on the left and right.

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