An optical path integrated structure based on atomic force microscope

Abstract

An optical path integrated structure based on an atomic force microscope includes: a substrate for providing a supporting base; a stage assembly, arranged on the substrate for placing an object to be measured; a laser generating assembly, arranged on the substrate for emitting a laser beam; a first reflecting assembly, arranged on the substrate for reflecting the laser beam generated by the laser generating assembly to the stage assembly; a second reflecting assembly, arranged on the substrate for reflecting the laser beam reflected back from the stage assembly to a detector unit; a detector unit, arranged on the substrate for receiving the laser beam reflected from the second reflecting assembly and sensing the landing position of the laser beam. The beneficial effect of the present invention is that the structure of the present invention can be precisely positioned by a double reflecting mirror, and the positioning accuracy can reach the nanometer level. The stage assembly and the probe adjuster can realize more subtle and precise control of the movement of the probe, saving a lot of optical path adjustment time, so that the experimental efficiency is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of microscope equipment, and in particular is an optical path integration structure based on an atomic force microscope. Background Art

[0002] Atomic force microscopy is an analytical instrument that can be used to study the surface structure of solid materials, including insulators. It studies the surface structure and properties of materials by detecting the extremely weak atomic interaction force between the surface of the sample to be tested and a miniature force-sensitive element. A pair of micro-cantilevers that are extremely sensitive to weak forces are fixed at one end, and the tiny needle tip at the other end is close to the sample. At this time, it will interact with it, and the force will cause the micro-cantilever to deform or change its motion state. When scanning the sample, the sensor is used to detect these changes, and the force distribution information can be obtained, thereby obtaining surface morphology structure information and surface roughness information with nanometer resolution.

[0003] Due to the problem of the service life of the probe of the current atomic force microscope, the probe needs to be replaced frequently. Traditionally, after each replacement of the probe, the laser optical path of the laser needs to be adjusted to make the laser reflect on the probe. However, since the probe is very small, a magnifying glass is not used to assist in the traditional adjustment of the optical path. The adjustment time can sometimes take 3 to 4 hours, which results in a significant waste of time and a significant reduction in experimental efficiency. Therefore, we propose an optical path integrated structure based on atomic force microscopy. Summary of the invention

[0004] The purpose of the present invention is to provide an optical path integrated structure based on an atomic force microscope in order to solve the problem that the laser optical path needs to be readjusted after the probe of the existing atomic force microscope is replaced, resulting in reduced efficiency and waste of time.

[0005] The technical solution adopted by the present invention is as follows:

[0006] An optical path integrated structure based on an atomic force microscope, comprising:

[0007] A base plate, which is used to provide a supporting foundation;

[0008] A stage assembly, arranged on the substrate for placing the object to be tested;

[0009] A laser generating component, arranged on the substrate and used for emitting a laser beam;

[0010] A first reflection component, disposed on the substrate, for reflecting the laser beam generated by the laser generating component to the stage component;

[0011] A second reflection component is arranged on the substrate and is used to reflect the laser beam reflected back by the stage component to the detector unit;

[0012] The detector unit is arranged on the substrate and is used for receiving the laser beam reflected by the second reflection component and sensing the landing point of the laser beam.

[0013] Optionally, the stage assembly is arranged on one side of the upper surface of the substrate, the laser generating assembly, the first reflecting assembly, the second reflecting assembly and the detector unit are arranged on the other side of the upper surface of the substrate, the first reflecting assembly and the second reflecting assembly are arranged between the laser generating assembly and the detector unit, the first reflecting assembly is arranged close to the laser generating assembly, and the second reflecting assembly is arranged close to the detector unit.

[0014] Optionally, the first reflection assembly includes: a first adjustment seat and a first reflection mirror, the first adjustment seat is rotatably disposed on the substrate, and the first reflection mirror is fixed on the first adjustment seat.

[0015] Optionally, the second reflection assembly includes: a second adjustment seat and a second reflection mirror, the second adjustment seat is rotatably disposed on the substrate, and the second reflection mirror is fixed on the second adjustment seat.

[0016] Optionally, a convex lens is provided at the output end of the laser generating assembly.

[0017] Optionally, the stage assembly includes: a base, a motor, a threaded propulsion rod, a tubular piezoelectric scanner, a fixed slider, a slide, and a probe;

[0018] The fixed slider is slidably arranged in the base, the motor is arranged at one end of the base, a threaded hole is arranged on the fixed slider, one end of the threaded push rod is connected to the output end of the motor, the other end of the threaded push rod cooperates with the threaded hole of the fixed slider, a fixed plate is arranged on the fixed slider, the tubular piezoelectric scanner is arranged on the fixed plate, the specimen slide is arranged on one end of the tubular piezoelectric scanner away from the threaded push rod, and the probe is arranged on the specimen slide.

[0019] Optionally, the base includes: two corner seats symmetrically arranged on the substrate and a cover plate arranged on the corner seats, the corner seats and the cover plate form a slide groove for allowing the fixed slider to slide inside, and a ceramic coating is provided on one side of the corner seat and the cover plate close to the fixed slider.

[0020] Optionally, a shock-absorbing pad is provided at the bottom of the base plate, a plurality of fixing holes are opened on the base plate, bolts are provided in the fixing holes, a spring is provided at a position of the bolt below the base plate, and a gasket is provided at the bottom of the spring.

[0021] Optionally, the laser generating assembly includes: a cylinder, a fixed block, a reflecting plate, and a laser diode. The laser diode is arranged at one end of the cylinder, and the reflecting plates are respectively arranged obliquely on the upper and lower sides of the laser diode. One end of the reflecting plate abuts against the laser diode, and the other end of the reflecting plate is fixed to the inner wall of the cylinder. The fixed block is arranged on one side of the emission direction of the laser diode. The fixed blocks are respectively arranged on the upper and lower sides of the cylinder, and a channel is defined between the fixed blocks on the upper and lower sides. A reflecting film is provided on the side of the fixed block close to the laser diode, and a light absorbing layer is provided on the fixed block close to the channel side and on the side away from the laser diode.

[0022] Optionally, the probe is fixed to the slide by a probe adjuster, and the probe adjuster includes: a probe seat, a base, a gear group and an adjustment knob, the probe seat is used to fix the probe, the base is fixedly set at one end of the slide, the probe seat is set on the base, a slide groove is provided in the base close to the probe seat, a limiting slider extending into the slide groove is provided on the probe seat close to the base, the gear group is provided in the base with one end exposed, a convex tooth is provided on the probe seat close to the base, the convex tooth is meshed with the gear group, and the adjustment knob is provided on the outside of the base and connected to the other end of the gear group.

[0023] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0024] 1. In the present invention, the angles of the laser generating assembly, the reflector, the probe and the detector unit are fixed to ensure that the laser of the laser generating assembly is irradiated onto the probe through the first reflector, the laser on the probe is reflected to the second reflector, and then irradiated onto the detector unit. When the probe needs to be replaced, the probe seat is driven to adjust and move by controlling the gear set. A reduction gear set can be set, such as three gear transmissions of different sizes, so that the movement control of the probe seat is more subtle and precise, saving a lot of light path adjustment time, thereby improving the experimental efficiency.

[0025] 2. In the present invention, a shock-absorbing pad is arranged at the bottom of the substrate, and a spring is arranged on the bolts for fixing the substrate. When in use, the shock-absorbing pad and the spring absorb the vibration force caused by collision or movement during use, thereby ensuring the stability of the substrate. At the same time, it also prevents the probe from being excessively vibrated and hitting the detected object, causing the probe to break, resulting in unnecessary losses and troubles.

[0026] 3. In the present invention, a reflective film and a reflective plate are arranged opposite to the laser diode in the laser generating assembly. When the laser diode emits laser, the reflective film and the reflective plate continuously reflect the diffused laser back into the laser beam to avoid large laser loss. At the same time, a light-absorbing layer is arranged on the left side of the channel and the fixed block to absorb the scattered light emitted by the laser to avoid the situation where the probe laser intensity is low due to light scattering and the reflected laser is weak and affects the detection of the detector unit.

[0027] 4. In the present invention, a stepper motor is used to drive the slide to move forward and backward, and the probe is adjusted left and right and front and back with the help of a probe adjuster, which saves a lot of time for manual adjustment of the optical path with a magnifying glass. At the same time, a ceramic coating is provided in the corner seat in close contact with the fixed slider to increase wear resistance and avoid the situation where the spacing is too large due to wear and tear over a long period of time, resulting in offset that affects the laser alignment probe. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A top view of the present invention;

[0029] Figure 2 It is a schematic diagram of the structure of the fixed base in the present invention;

[0030] Figure 3 is a side view of the present invention;

[0031] Figure 4 It is a partial cross-sectional view of the laser generating assembly in the present invention;

[0032] Figure 5 The figure is a schematic diagram showing the structure of the probe adjuster in the present invention.

[0033] Markings in the figure: 1. substrate; 2. base; 3. motor; 4. threaded push rod; 5. tubular piezoelectric scanner; 6. specimen slide; 7. fixing hole; 8. laser generating assembly; 9. convex lens; 10. first adjustment seat; 11. first reflector; 12. second adjustment seat; 13. second reflector; 14. detector unit; 15. probe adjuster; 16. bolt; 17. spring; 18. gasket; 19. shock-absorbing pad; 20. cylinder; 21. fixing block; 22. reflecting plate; 23. laser diode; 24. reflecting film; 25. light-absorbing layer; 26. channel; 27. angle seat; 28. cover plate; 29. ​​ceramic coating; 30. fixing plate; 31. fixing slider; 32. probe; 33. probe seat; 34. convex tooth; 35. limit slider; 36. slide groove; 37. first gear; 38. second gear; 39. third gear; 40. base. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0035] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention; the terms "first", "second", and "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance; in addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] Embodiment 1: Figure 1 As shown, an optical path integrated structure based on an atomic force microscope comprises:

[0037] Base plate 1, used to provide a supporting foundation;

[0038] A stage assembly, arranged on the substrate 1 for placing the object to be tested;

[0039] A laser generating component 8, arranged on the substrate 1 and used for emitting a laser beam;

[0040] A first reflection component, disposed on the substrate 1, for reflecting the laser beam generated by the laser generating component 8 to the stage component;

[0041] A second reflection component, disposed on the substrate 1, for reflecting the laser beam reflected back by the stage component to the detector unit 14;

[0042] The detector unit 14 is disposed on the substrate 1 and is used for receiving the laser beam reflected by the second reflection component and sensing the landing position of the laser beam.

[0043] The stage assembly is arranged on one side of the upper surface of the substrate 1, and the laser generating assembly 8, the first reflecting assembly, the second reflecting assembly and the detector unit 14 are arranged on the other side of the upper surface of the substrate 1, the first reflecting assembly and the second reflecting assembly are arranged between the laser generating assembly 8 and the detector unit 14, the first reflecting assembly is arranged close to the laser generating assembly 8, and the second reflecting assembly is arranged close to the detector unit 14.

[0044] The first reflective assembly includes: a first adjustment seat 10 and a first reflector 11 . The first adjustment seat 10 is rotatably disposed on the substrate 1 , and the first reflector 11 is fixed on the first adjustment seat 10 .

[0045] The second reflective assembly includes: a second adjustment seat 12 and a second reflector 13 . The second adjustment seat 12 is rotatably disposed on the substrate 1 , and the second reflector 13 is fixed on the second adjustment seat 12 .

[0046] The detector unit 14 includes but is not limited to being a four-quadrant detector.

[0047] A convex lens 9 is provided at the output end of the laser generating component 8 .

[0048] like Figure 2 As shown, the stage assembly includes: a base 2 , a motor 3 , a threaded push rod 4 , a tubular piezoelectric scanner 5 , a fixed slider 31 , a slide 6 , and a probe 32 .

[0049] The fixed slider 31 is slidably disposed in the base 2, the motor 3 is disposed at one end of the base 2, a threaded hole is disposed on the fixed slider 31, one end of the threaded push rod 4 is connected to the output end of the motor 3, and the other end of the threaded push rod 4 is matched with the threaded hole of the fixed slider 31. When the motor 3 drives the threaded push rod 4 to rotate, the threaded push rod 4 drives the fixed slider 31 to slide in the base 2. A fixed plate 30 is disposed on the fixed slider 31, the tubular piezoelectric scanner 5 is disposed on the fixed plate 30, the specimen slide 6 is disposed on the end of the tubular piezoelectric scanner 5 away from the threaded push rod 4, and the probe 32 is disposed on the specimen slide 6.

[0050] The base 2 includes: two corner seats 27 symmetrically arranged on the substrate 1 and a cover plate 28 arranged on the corner seats 27. The corner seats 27 and the cover plate 28 form a slide groove for allowing the fixed slider 31 to slide inside. A ceramic coating 29 is provided on one side of the corner seats 27 and the cover plate 28 close to the fixed slider 31.

[0051] When in use, the laser emitted by the laser generating assembly 8 is reflected by the first reflector 11 to the probe 32, and then the probe 32 reflects the laser to the second reflector 13 to the detector unit 14. After the probe is replaced, the position of the probe 32 is adjusted so that the light path can still be irradiated onto the probe 32 after being reflected by the first reflector 11, and the probe 32 reflects the laser to the second reflector 13 to the detector unit 14. The detector unit 14 senses the landing point of the laser, thereby accurately adjusting the light path, and the adjustment accuracy can reach the nanometer level.

[0052] Embodiment 2: Figure 3 As shown, this embodiment is basically the same as the above embodiment, except that a shock-absorbing pad 19 is provided at the bottom of the substrate 1, a plurality of fixing holes 7 are provided on the substrate 1, bolts 16 are provided in the fixing holes 7, springs 17 are provided at the position of the bolts below the substrate 1, and a gasket 18 is provided at the bottom of the spring 17. The shock-absorbing pad 19 and the spring 17 can absorb the vibration force during collision or movement during use, ensure the stability of the substrate 1, and also prevent the probe from being excessively struck on the detected object by the vibration, resulting in the breakage of the probe 32, causing unnecessary losses and troubles.

[0053] Embodiment 3: Figure 4 As shown, this embodiment is basically the same as the above embodiment, except that the laser generating assembly 8 includes: a cylinder 20, a fixed block 21, a reflecting plate 22, and a laser diode 23. The laser diode 23 is arranged at one end of the cylinder 20, and the reflecting plate 22 is obliquely arranged on the upper and lower sides of the laser diode 23, one end of the reflecting plate 22 is in contact with the laser diode 23, and the other end of the reflecting plate 22 is fixed to the inner wall of the cylinder 20. The fixed block 21 is arranged on one side of the emission direction of the laser diode 23. The fixed blocks 21 are respectively arranged on the upper and lower sides of the cylinder 20, and a channel 26 is defined between the fixed blocks 21 on the upper and lower sides. A reflecting film 24 is provided on the side of the fixed block 21 close to the laser diode 23, and a light absorbing layer 25 is provided on the fixed block 21 close to the channel 26 and on the side away from the laser diode 23.

[0054] By setting a reflective film 24 and a reflective plate 22 in the laser generator 8 directly opposite the laser diode 23, when the laser diode 23 emits a laser, the reflective film 24 and the reflective plate 22 continuously reflect the diffused laser back into the laser beam to avoid large laser loss. At the same time, a light-absorbing layer 25 is set on the left side of the channel 26 and the fixed block 21 to absorb the scattered light emitted by the laser, thereby avoiding the situation where the probe laser intensity is low due to light scattering and the reflected laser is weak and affects the detector detection.

[0055] Embodiment 4: Figure 5As shown, this embodiment is basically the same as the above embodiment, except that the probe 32 is fixed on the slide 6 by the probe adjuster 15, and the probe adjuster 15 includes: a probe seat 33, a base 40, a gear set and an adjustment knob (not shown in the figure), the probe seat 33 is used to fix the probe 32, the base 40 is fixedly arranged at one end of the slide 6, the probe seat 33 is arranged on the base 40, and a sliding groove 36 is opened in the base 40 near the probe seat 33. The probe seat 33 is close to the base 40. 0 is provided with a limiting slider 35 extending into the slide groove 36 on one side, and the slide groove 36 cooperates with the limiting slider 35 to allow the probe seat 33 to slide relatively along the base 40. The gear group is arranged in the base 40 and one end is exposed. The probe seat 33 is provided with a convex tooth 34 on the side close to the base 40, and the convex tooth 34 is meshed with the gear group. The adjusting knob is arranged outside the base 40 and connected to the other end of the gear group. By turning the adjusting knob, the gear group can be driven to rotate, thereby causing the probe seat 33 to move.

[0056] The gear set includes: a first gear 37, a second gear 38 and a third gear 39. The first gear 37, the second gear 38 and the third gear 39 are meshed with each other, the first gear 37 is meshed with the convex teeth 34, and the third gear 39 is connected to the adjustment knob. The gear set can be a reduction gear set, and the displacement distance of the probe seat can be accurately adjusted by turning the adjustment knob.

[0057] When the probe needs to be replaced, the third gear in the gear group is controlled to rotate and then drive the probe holder to adjust and move. The transmission of three gears of different sizes makes the movement control of the probe holder more subtle and precise, saving a lot of light path adjustment time and improving experimental efficiency.

[0058] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An optical path integration structure based on atomic force microscopy, characterized in that: include: A base plate (1) for providing a supporting foundation; A stage assembly, arranged on the substrate (1) and used for placing an object to be tested; A laser generating component (8), arranged on the substrate (1) and used for emitting a laser beam; A first reflection component, arranged on the substrate (1) and used for reflecting the laser beam generated by the laser generating component (8) to the stage component; A second reflection component, arranged on the substrate (1) and used for reflecting the laser beam reflected back by the stage component to a detector unit (14); A detector unit (14) is arranged on the substrate (1) and is used to receive the laser beam reflected by the second reflection component and sense the landing point of the laser beam; The stage assembly comprises: a base (2), a motor (3), a threaded push rod (4), a tubular piezoelectric scanner (5), a fixed slider (31), a slide (6), and a probe (32); The fixed slider (31) is slidably arranged in the base (2), the motor (3) is arranged at one end of the base (2), a threaded hole is arranged on the fixed slider (31), one end of the threaded propulsion rod (4) is connected to the output end of the motor (3), the other end of the threaded propulsion rod (4) cooperates with the threaded hole of the fixed slider (31), a fixed plate (30) is arranged on the fixed slider (31), the tubular piezoelectric scanner (5) is arranged on the fixed plate (30), the specimen slide (6) is arranged on the end of the tubular piezoelectric scanner (5) away from the threaded propulsion rod (4), and the probe (32) is arranged on the specimen slide (6); The probe (32) is fixed on the slide (6) through a probe adjuster (15). The probe adjuster (15) comprises: a probe seat (33), a base (40), a gear set and an adjusting knob. The probe seat (33) is used to fix the probe (32). The base (40) is fixedly arranged at one end of the slide (6). The probe seat (33) is arranged on the base (40). A slide groove (36) is provided in the base (40) on a side close to the probe seat (33). A limiting slider (35) extending into the slide groove (36) is provided on a side close to the base (40) of the probe seat (33). The gear set is arranged in the base (40) and one end is exposed. A convex tooth (34) is provided on a side close to the base (40) of the probe seat (33). The convex tooth (34) meshes with the gear set. The adjusting knob is arranged outside the base (40) and connected to the other end of the gear set. The stage assembly is arranged on one side of the upper surface of the substrate (1); the laser generating assembly (8), the first reflecting assembly, the second reflecting assembly and the detector unit (14) are arranged on the other side of the upper surface of the substrate (1); the first reflecting assembly and the second reflecting assembly are arranged between the laser generating assembly (8) and the detector unit (14); the first reflecting assembly is arranged close to the laser generating assembly (8) and the second reflecting assembly is arranged close to the detector unit (14).

2. The optical path integrated structure based on atomic force microscope according to claim 1, characterized in that: The first reflection component comprises: a first adjustment seat (10) and a first reflection mirror (11); the first adjustment seat (10) is rotatably arranged on the substrate (1); and the first reflection mirror (11) is fixed on the first adjustment seat (10).

3. The optical path integrated structure based on atomic force microscope according to claim 1 is characterized in that: The second reflective assembly comprises: a second adjustment seat (12) and a second reflector (13); the second adjustment seat (12) is rotatably arranged on the substrate (1); and the second reflector (13) is fixed on the second adjustment seat (12).

4. The optical path integrated structure based on atomic force microscope according to claim 1, characterized in that: The output end of the laser generating component (8) is provided with a convex lens (9).

5. The optical path integrated structure based on atomic force microscope according to claim 1, characterized in that: The base (2) comprises: two angle seats (27) symmetrically arranged on the base plate (1) and a cover plate (28) arranged on the angle seats (27); the angle seats (27) and the cover plate (28) form a slide groove for allowing the fixed slider (31) to slide inside the slide groove; and a ceramic coating (29) is provided on one side of the angle seats (27) and the cover plate (28) close to the fixed slider (31).

6. The optical path integrated structure based on atomic force microscope according to claim 1, characterized in that: A shock-absorbing pad (19) is arranged at the bottom of the base plate (1), a plurality of fixing holes (7) are opened on the base plate (1), bolts (16) are arranged in the fixing holes (7), a spring (17) is arranged at a position below the bolts of the base plate (1), and a gasket (18) is arranged at the bottom of the spring (17).

7. The optical path integrated structure based on atomic force microscope according to claim 1, characterized in that: The laser generating assembly (8) comprises: a cylinder (20), a fixing block (21), a reflecting plate (22), and a laser diode (23). The laser diode (23) is arranged at one end of the cylinder (20). The reflecting plate (22) is arranged obliquely on the upper and lower sides of the laser diode (23). One end of the reflecting plate (22) abuts against the laser diode (23). The other end of the reflecting plate (22) is fixed to the inner wall of the cylinder (20). The fixing block (21) is arranged on one side of the emission direction of the laser diode (23). The fixing blocks (21) are arranged on the upper and lower sides of the cylinder (20). A channel (26) is defined between the fixing blocks (21) on the upper and lower sides. A reflecting film (24) is provided on the side of the fixing block (21) close to the laser diode (23). A light absorbing layer (25) is provided on the side of the fixing block (21) close to the channel (26) and on the side away from the laser diode (23).

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