An automatic calibration device for flip chip material picking suction head

Abstract

The present invention relates to an automatic calibration device for a flip chip pick-up head, which is used for alignment and correction with the position of a feeding head below, and comprises a CCD visual acquisition module, a light source, a first right-angle prism, a second right-angle prism and a terminal controller, wherein the inclined surfaces of the first right-angle prism and the second right-angle prism are arranged at a 90-degree angle, and the CCD visual acquisition module is used to acquire images of the pick-up head and the feeding head, and to acquire images of the pick-up head and the feeding head obtained by reflection of the inclined surfaces of the first right-angle prism and the second right-angle prism, and the terminal controller calculates the movement compensation data of the pick-up head according to the upper and lower corresponding relationship between the three images of the pick-up head and the feeding head, and drives the pick-up head to perform position compensation. Only one set of CCD visual acquisition modules is used to acquire three images, and obtain position relationship data in the front and back and left and right directions, thereby simplifying the mechanical structure, being small in size and low in cost.

Description

Technical Field

[0001] The invention relates to the technical field of automation equipment, and in particular to an automatic calibration device for a flip chip material taking suction head. Background Art

[0002] The flip chip picking and placement process generally requires the use of a feeding head and a picking head. The picking head takes the flip chip off the feeding head and then mounts it. In order to ensure the position accuracy of the flip chip picking and placing, the positions of the feeding head and the picking head need to be calibrated and aligned, both front and back and left and right. Therefore, two sets of CCD visual inspection systems need to be set up to detect the front and back position relationship and left and right position relationship of the feeding head and the picking head respectively, and then use the terminal controller to calculate the movement compensation data of the picking head to achieve the effect of automatic calibration of the picking head. This automatic calibration device has a complex structure, a large volume, and a high cost, and needs to be improved. Summary of the invention

[0003] The object of the present invention is to provide an automatic calibration device for a flip chip material taking suction head which has a simple structure, a small volume and a low cost.

[0004] The technical solution provided by the present invention is: an automatic proofreading device for a flip chip picking suction head, which is used for aligning and correcting the position of a feeding suction head below, comprising a CCD vision acquisition module, a light source, a first right-angle prism, a second right-angle prism and a terminal controller, wherein the inclined surfaces of the first right-angle prism and the second right-angle prism are arranged at a 90-degree angle, and the feeding suction head is located in the middle position between the first right-angle prism and the second right-angle prism, and the light source is used to fill light for the CCD vision acquisition module, and the CCD vision acquisition module is used to collect images of the picking suction head and the feeding suction head, as well as collect images of the picking suction head and the feeding suction head obtained by reflection of the inclined surfaces of the first right-angle prism and the second right-angle prism, and the terminal controller calculates the movement compensation data of the picking suction head according to the upper and lower corresponding relationship between the three images of the picking suction head and the feeding suction head, and drives the picking suction head to perform position compensation.

[0005] The device further comprises a third right-angle prism, the CCD vision acquisition module and the first right-angle prism and the second right-angle prism are arranged vertically, and the third right-angle prism is used to reflect light by 90 degrees.

[0006] The light source is arranged at the front end of the third right-angle prism, and a light hole is also arranged in the middle of the light source for the reflected light to pass through.

[0007] The device further comprises a Y-axis slide cylinder, a Z-axis slide cylinder, a prism fixing plate and a base plate, wherein the first right-angle prism and the second right-angle prism are fixed on the prism fixing plate, the prism fixing plate is arranged on the Z-axis slide cylinder, the Z-axis slide cylinder is arranged on the Y-axis slide cylinder, the Y-axis slide cylinder is fixed on the base plate, and the Y-axis slide cylinder and the Z-axis slide cylinder are respectively used to drive the first right-angle prism and the second right-angle prism to move in the Y direction and the Z direction.

[0008] The CCD vision acquisition module includes a camera, a lens and a horizontal fine-tuning slide, the camera is fixed on the horizontal fine-tuning slide, and the lens is fixed on the camera.

[0009] Wherein, the CCD vision acquisition module also includes a light shield for covering the camera, the lens and the third right-angle prism.

[0010] The beneficial effects of the present invention are as follows: the flip chip material picking suction head automatic calibration device uses the first right-angle prism and the second right-angle prism arranged at a 90-degree angle to obtain the reflected images of the material picking suction head and the feeding suction head in two directions, and the CCD visual acquisition module can acquire three different position relationship images in total by adding the real images of the material picking suction head and the feeding suction head. At this time, the terminal controller calculates the movement compensation data of the material picking suction head according to the upper and lower corresponding relationship (position deviation) of the three images of the material picking suction head and the feeding suction head, drives the material picking suction head to perform position compensation, and realizes the automatic position calibration of the material picking suction head and the feeding suction head. Only one set of CCD visual acquisition modules can be used to acquire three images and obtain the position relationship data in the front and back and left and right directions, which simplifies the mechanical structure, is small in size, and has low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a three-dimensional diagram of the overall structure of an embodiment of the automatic calibration device for the flip chip material taking suction head of the present invention;

[0012] Figure 2 It is a partially exploded structural stereogram of an embodiment of the automatic calibration device for a flip chip material taking suction head of the present invention;

[0013] Figure 3 It is a top view of an embodiment of the automatic calibration device for the flip chip material taking suction head of the present invention (the light shield and the prism fixing plate are hidden);

[0014] Figure 4 This is a principle diagram of the optical path of an embodiment of the automatic calibration device for the flip chip material pickup head of the present invention;

[0015] Figure 5 It is a schematic diagram of the CCD vision acquisition module of the present invention being arranged on a base plate (other structures are omitted);

[0016] Figure 6 It is a diagram of the coordination relationship between the Y-axis slide cylinder, the Z-axis slide cylinder, the prism fixing plate and the feeding suction head of the present invention;

[0017] Figure 7 It is a diagram showing the coordination relationship of the Y-axis slide cylinder, the Z-axis slide cylinder, the prism fixing plate and the feeding suction head at another angle of the present invention;

[0018] Figure 8 It is a schematic diagram of three images collected when the front, back, left, and right positions of the material taking suction head and the material feeding suction head of the present invention are aligned;

[0019] Fig. 9 It is a schematic diagram of three images collected when the material taking suction head and the material feeding suction head of the present invention are offset forward and backward and aligned left and right;

[0020] Fig.10 These are three image schematic diagrams of the material picking suction head and the material feeding suction head of the present invention collected when they are aligned front to back and offset left to right.

[0021] Among them, 1. CCD visual acquisition module; 11. Camera; 12. Lens; 13. Horizontal fine-tuning slide; 14. Light shield; 2. Light source; 21. Light hole; 3. First right-angle prism; 4. Second right-angle prism; 5. Vacuum generator; 6. Third right-angle prism; 7. Y-axis slide cylinder; 8. Z-axis slide cylinder; 9. Prism fixing plate; 10. Bottom plate; 100. Material picking suction head; 200. Material feeding suction head. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0023] As an embodiment of the automatic calibration device for flip chip material picking suction head of the present invention, Figures 1 to 10As shown, it is used for position alignment and correction with the feeding suction head 200 below, including a CCD vision acquisition module 1, a light source 2, a first right-angle prism 3, a second right-angle prism 4 and a terminal controller (integrated in the equipment master controller, not shown in the figure), the inclined surfaces of the first right-angle prism 3 and the second right-angle prism 4 are arranged at a 90-degree angle, and the feeding suction head 200 is located in the middle position between the first right-angle prism 3 and the second right-angle prism 4, the light source 2 is used to fill light for the CCD vision acquisition module 1, the CCD vision acquisition module 1 is used to collect images of the material collection suction head 100 and the feeding suction head 200, and collect images of the material collection suction head 100 and the feeding suction head 200 obtained by reflection of the inclined surfaces of the first right-angle prism 3 and the second right-angle prism 4, the terminal controller calculates the movement compensation data of the material collection suction head according to the upper and lower corresponding relationship between the three images of the material collection suction head 100 and the feeding suction head 200, and drives the material collection suction head 100 to perform position compensation.

[0024] The flip chip material picking head automatic calibration device uses the first right angle prism 3 and the second right angle prism 4 arranged at a 90-degree angle to obtain the reflected images of the material picking head 100 and the feeding head 200 in two directions. In addition to the real images of the material picking head 100 and the feeding head 200, the CCD visual acquisition module 1 can acquire a total of three different position relationship images. At this time, the terminal controller calculates the movement compensation data of the material picking head 100 according to the upper and lower corresponding relationship (position deviation) of the three images of the material picking head 100 and the feeding head 200, drives the material picking head 100 to perform position compensation, and realizes the automatic position calibration of the material picking head 100 and the feeding head 200. Only one set of CCD visual acquisition modules 1 can be used to collect three images and obtain the position relationship data in the front and back and left and right directions, which simplifies the mechanical structure, has a small size, and is low in cost.

[0025] In this embodiment, the device further includes a third right-angle prism 6, and the CCD visual acquisition module 1 and the first right-angle prism 3 and the second right-angle prism 4 are arranged vertically, and the third right-angle prism 6 is used to reflect the light by 90 degrees. In this way, the CCD visual acquisition module 1 and the first right-angle prism 3 and the second right-angle prism 4 are arranged in a staggered manner, making the mechanical structure more compact and saving space.

[0026] In this embodiment, the light source 2 is arranged at the front end of the third right-angle prism 6, and a light hole 21 is also arranged in the middle of the light source 2 for the reflected light to pass through. The light source 2 uses a coaxial light source to illuminate the material pickup head 100 and the feeding head 200, obtain reflected light, and enter the CCD visual acquisition module 1, so that the fill light effect is good and the imaging quality is high.

[0027] In this embodiment, the device also includes a Y-axis slide cylinder 7, a Z-axis slide cylinder 8, a prism fixing plate 9 and a base plate 10. The first right-angle prism 3 and the second right-angle prism 4 are fixed on the prism fixing plate 9, and the prism fixing plate 9 is arranged on the Z-axis slide cylinder 8. The Z-axis slide cylinder 8 is arranged on the Y-axis slide cylinder 7, and the Y-axis slide cylinder 7 is fixed on the base plate 10. The Y-axis slide cylinder 7 and the Z-axis slide cylinder 8 are respectively used to drive the first right-angle prism 3 and the second right-angle prism 4 to move in the Y direction and the Z direction. When alignment is required, the Y-axis slide cylinder 7 and the Z-axis slide cylinder 8 are started to move the first right-angle prism 3 and the second right-angle prism 4 to the working position. When the alignment is completed, the Y-axis slide cylinder 7 and the Z-axis slide cylinder 8 move the first right-angle prism 3 and the second right-angle prism 4 to the avoidance position to avoid the risk of mechanical interference with the material picking suction head 100 and the feeding suction head 200 during the movement, thereby realizing the compactness of the mechanism.

[0028] In this embodiment, the CCD visual acquisition module 1 includes a camera 11, a lens 12 and a horizontal fine-tuning slide 13, wherein the camera 11 is fixed on the horizontal fine-tuning slide 13, and the lens 12 is fixed on the camera 11. The horizontal fine-tuning slide 13 is an XY bidirectional horizontal fine-tuning slide, and the position can be fine-tuned in the X direction and the Y direction by rotating the knob and the screw rod, so as to achieve fine-tuning of the position of the camera 11 and the lens 12 in the horizontal plane, so as to align the material pickup suction head 100 and the material feeding suction head 200.

[0029] In this embodiment, the CCD visual acquisition module 1 further includes a light shield 14 for covering the camera 11, the lens 12 and the third right-angle prism 6 to prevent external light from interfering with the imaging of the camera 11. The component numbered 5 is a vacuum generator of the feeding suction head.

[0030] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An automatic calibration device for a flip chip pick-up suction head, used for aligning and calibrating the position of the feeding suction head below, characterized in that: It includes a CCD vision acquisition module, a light source, a first right-angle prism, a second right-angle prism and a terminal controller, wherein the oblique surfaces of the first right-angle prism and the second right-angle prism are arranged at a 90-degree angle, the feeding suction head is located in the middle between the first right-angle prism and the second right-angle prism, the light source is used to fill light for the CCD vision acquisition module, the CCD vision acquisition module is used to acquire images of the material pickup head and the feeding suction head, and acquire images of the material pickup head and the feeding suction head obtained by reflection of the oblique surfaces of the first right-angle prism and the second right-angle prism, the terminal controller calculates the movement compensation data of the material pickup head according to the upper and lower corresponding relationship between the three images of the material pickup head and the feeding suction head, and drives the material pickup head to perform position compensation; The device also includes a third right-angle prism, the CCD visual acquisition module and the first right-angle prism and the second right-angle prism are arranged vertically, and the third right-angle prism is used to reflect light by 90 degrees; The light source is arranged at the front end of the third right-angle prism, and a light hole is also arranged in the middle of the light source for the reflected light to pass through; The device also includes a Y-axis slide cylinder, a Z-axis slide cylinder, a prism fixing plate and a base plate. The first right-angle prism and the second right-angle prism are fixed on the prism fixing plate. The prism fixing plate is arranged on the Z-axis slide cylinder. The Z-axis slide cylinder is arranged on the Y-axis slide cylinder. The Y-axis slide cylinder is fixed on the base plate. The Y-axis slide cylinder and the Z-axis slide cylinder are used to drive the first right-angle prism and the second right-angle prism to move in the Y direction and the Z direction respectively.

2. The automatic calibration device for flip chip material pickup tips according to claim 1, characterized in that: The CCD vision acquisition module comprises a camera, a lens and a horizontal fine-tuning slide, wherein the camera is fixed on the horizontal fine-tuning slide, and the lens is fixed on the camera.

3. The automatic calibration device for flip chip material picking suction head according to claim 2 is characterized in that: The CCD vision acquisition module also includes a light shield, which is used to cover the camera, the lens and the third right-angle prism.

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