A hybrid acceleration sensor and displacement sensor test performance calibration device

Abstract

The present invention discloses a hybrid acceleration sensor and displacement sensor performance calibration device, comprising a sensor fixed support base module, a performance calibration control module, and a data acquisition and analysis module. The sensor fixed support base module includes a displacement sensor positioning fixture, an acceleration sensor mounting plate, and a U-shaped sensor shock-absorbing support. The performance calibration control module includes a servo motor, a ball screw moving platform, a rapid motion guide rail, and a moving guide rail positioning block. The data acquisition and analysis module includes a data acquisition instrument and an industrial computer. The servo motor drives the ball screw moving platform to perform pre-set regular movements on the rapid motion guide rail and calibrates the output signals of the displacement sensor and / or acceleration sensor to be calibrated. The industrial computer generates corresponding dynamic and static calibration curves based on the sensor output signals. The present invention adopts a fully automatic control method to achieve hybrid dynamic and static performance calibration of the displacement / acceleration sensor.

Description

Technical Field

[0001] The present invention relates to the technical field of sensor calibration, and more particularly to a hybrid acceleration sensor and displacement sensor test performance calibration device. Background Art

[0002] Displacement sensors are key sensors used to monitor the displacement, settlement, and deformation of soil, slopes, and other geotechnical structures during geotechnical field tests, geotechnical centrifuge model tests, and shaking table model tests. The accuracy and reliability of displacement sensor measurement data under dynamic loads such as earthquake loads and traffic loads are important mechanical parameters that characterize the settlement and failure of soil or geotechnical structures. Therefore, the dynamic response performance of displacement sensors has a significant impact on the results of geotechnical model tests. However, current geotechnical laboratories at home and abroad focus on static performance when calibrating displacement sensors. Furthermore, the vast majority of displacement sensor performance calibration test devices in existing geotechnical laboratories are manual static performance calibration devices, and there are no dynamic performance calibration test devices for displacement sensors used in geotechnical model tests. A micro-accelerometer is a key sensor used to monitor the magnitude of acceleration during soil vibration during physical model tests such as dynamic centrifuge model tests and shaking table model tests. In the prior art, conventional portable small-scale hybrid acceleration sensor and displacement sensor performance calibration devices have only fixed bandwidth, fixed amplitude, and special features (and due to the inconsistency of interface threads of micro-accelerometers produced by different manufacturers, the existing calibration devices are highly restrictive in calibrating different types of acceleration sensors). Therefore, they can only calibrate the dynamic performance of micro-accelerometers in a specific frequency band, thereby limiting the dynamic performance calibration range of the acceleration sensor.

[0003] However, the dynamic performance of displacement sensors and acceleration sensors has an important impact on the accuracy and reliability of measuring parameters such as displacement, settlement, deformation, slip and vibration load of geotechnical construction models under dynamic loads such as seismic loads and blast loads in geotechnical centrifuge model tests.

[0004] In summary, although displacement calibration devices and acceleration calibration devices have been developed in the existing technology, there is a lack of a calibration device that combines the two. Moreover, existing displacement calibration devices only meet the calibration requirements of static test accuracy and stability, but lack the calibration requirements of dynamic test accuracy and stability. At the same time, the frequency band of acceleration calibration devices is very limited, making it difficult to meet the simultaneous requirements of high-frequency acceleration and low-frequency acceleration calibration. Therefore, how to provide a miniature acceleration and displacement sensor performance calibration device that can achieve dynamic performance calibration of displacement sensors and acceleration sensors has become a technical problem that technical personnel in this field urgently need to solve. Summary of the Invention

[0005] In view of this, the present invention discloses a hybrid acceleration sensor and displacement sensor test performance calibration device to achieve dynamic performance calibration of the displacement sensor and the acceleration sensor.

[0006] A hybrid acceleration sensor and displacement sensor test performance calibration device, comprising: a sensor fixing support base module, a performance calibration control module and a data acquisition and analysis module;

[0007] The sensor fixing support base module includes: a displacement sensor positioning fixture, an acceleration sensor mounting plate and a U-shaped sensor shock-absorbing support;

[0008] The displacement sensor positioning fixture is used to fix and position the displacement sensor to be calibrated;

[0009] The acceleration sensor mounting plate is used to connect with the displacement sensor to be calibrated and the acceleration sensor to be calibrated;

[0010] The U-shaped sensor shock-absorbing support is used to fix and install the displacement sensor positioning fixture and to reduce the vibration of the displacement sensor positioning fixture;

[0011] The performance calibration control module includes: a servo motor, a ball screw moving platform, a fast moving guide rail and a moving guide rail positioning block;

[0012] The movable guide rail positioning block is used to fix the fast moving guide rail;

[0013] The servo motor is configured to start working after receiving a control signal carrying calibration parameters, drive the ball screw moving platform to perform a predetermined regular motion on the fast moving guide rail, and calibrate the sensor output signal of the displacement sensor to be calibrated and / or the sensor output signal of the acceleration sensor to be calibrated;

[0014] The data acquisition and analysis module includes: a data acquisition instrument and an industrial computer;

[0015] The data acquisition instrument is used to synchronously acquire a sensor output signal of the displacement sensor to be calibrated when the servo motor inputs a displacement signal to the displacement sensor to be calibrated, and output the sensor output signal of the displacement sensor to be calibrated to the industrial computer; and is also used to synchronously acquire a sensor output signal of the acceleration sensor to be calibrated when the servo motor inputs a vibration signal to the acceleration sensor to be calibrated, and output the sensor output signal of the acceleration sensor to be calibrated to the industrial computer;

[0016] The industrial computer is used to obtain a static calibration curve and a dynamic calibration curve of the displacement sensor based on the sensor output signal of the displacement sensor to be calibrated and the actual input displacement signal, and is also used to obtain a dynamic calibration curve of the acceleration sensor to be calibrated based on the sensor output signal of the acceleration sensor to be calibrated and the actual input displacement signal.

[0017] Optionally, the acceleration sensor mounting plate has a displacement sensor thread fixing knob, a micro-electromechanical system MEMS acceleration sensor positioning groove, a piezoelectric sensor ICP acceleration sensor mounting hole and a MEMS acceleration sensor screw hole;

[0018] The displacement sensor thread fixing knob is used to cooperate with the displacement sensor screw of the displacement sensor to be calibrated;

[0019] The MEMS acceleration sensor positioning groove is used to place and position the MEMS acceleration sensor;

[0020] The ICP acceleration sensor mounting hole is used to mount the ICP acceleration sensor;

[0021] The MEMS acceleration sensor screw hole is used to fix the MEMS acceleration sensor.

[0022] Optionally, the ball screw moving platform has: a moving guide rail embedding structure and a mounting plate positioning hole;

[0023] The movable guide rail embedding structure is used to embed the ball screw movable platform into the fast moving guide rail so that the ball screw movable platform can move freely;

[0024] The mounting plate positioning holes are used to install and fix the acceleration sensor mounting plate.

[0025] Optionally, when the hybrid acceleration sensor and displacement sensor test performance calibration device performs static performance calibration on the displacement sensor to be calibrated, the calibration parameters include: valve rise time and duration parameters;

[0026] When the hybrid acceleration sensor and displacement sensor test performance calibration device performs dynamic performance calibration on the displacement sensor to be calibrated, the calibration parameters include: valve operating frequency, duration parameter, valve rise time and duration frequency parameter;

[0027] When the hybrid acceleration sensor and displacement sensor test performance calibration device performs dynamic performance calibration on the acceleration sensor to be calibrated, the calibration parameters include: vibration acceleration parameters, valve operating frequency and duration parameters.

[0028] Optionally, the sensor fixing support base module further includes: a device armrest, a device bearing base and a shock-absorbing rubber block;

[0029] The device armrest is installed on the device support base, and is used to increase the portability of the hybrid acceleration sensor and displacement sensor test performance calibration device;

[0030] The shock-absorbing rubber block is installed on the device-carrying base, and is used to support the device-carrying base and reduce shock to the device-carrying base.

[0031] Optionally, the U-shaped sensor shock-absorbing support has a shock-absorbing support fixing hole, and the shock-absorbing support fixing hole is used to be fixedly connected to the device bearing base.

[0032] Optionally, the displacement sensor positioning fixture comprises: a displacement sensor body positioning hole, a screw positioning hole, a positioning fixture fixing hole and a tightening screw;

[0033] The displacement sensor body positioning hole is used to support the displacement sensor body;

[0034] The screw positioning hole is used to position the displacement sensor screw of the displacement sensor to be calibrated;

[0035] The positioning fixture fixing hole is used to connect with the U-shaped sensor shock-absorbing support;

[0036] The tightening screw is used to fix the displacement sensor body of the displacement sensor to be calibrated.

[0037] Optionally, the performance calibration control module further comprises: a control actuator and a programmable logic controller (PLC) handheld control panel;

[0038] The PLC handheld control panel has a visual graphic display interface for inputting calibration parameters and sending the calibration parameters to the control actuator;

[0039] The control actuator is used to perform digital-to-analog conversion on the calibration parameters to obtain a control signal, and output the control signal to the control servo motor shown, so that the servo motor drives the ball screw moving platform to perform pre-set regular movements on the fast-moving guide rail according to the control signal, and calibrates the sensor output signal of the displacement sensor to be calibrated.

[0040] Optionally, the number of the displacement sensor positioning fixtures is four, and the four displacement sensor positioning fixtures are symmetrically distributed along the center line;

[0041] There are four acceleration sensor mounting plates, and the four acceleration sensor mounting plates are symmetrically distributed along the center line.

[0042] Optionally, the acceleration sensor mounting plate is provided with two MEMS acceleration sensor positioning grooves and three ICP acceleration sensor mounting holes, the two MEMS acceleration sensor positioning grooves are symmetrically distributed along the center line, and the three ICP acceleration sensor mounting holes are symmetrically distributed along the center line.

[0043] Optionally, the industrial computer is specifically used to use the actual input displacement signal of the displacement sensor to be calibrated as the horizontal axis and the sensor output signal of the displacement sensor to be calibrated as the vertical axis to obtain the static calibration curve of the displacement sensor and the dynamic calibration curve of the displacement sensor.

[0044] Optionally, the industrial computer is specifically configured to obtain a dynamic calibration curve of the acceleration sensor by taking the actual input displacement signal of the acceleration sensor to be calibrated as the horizontal axis and the sensor output signal of the acceleration sensor to be calibrated as the vertical axis.

[0045] From the above technical solution, it can be seen that the present invention discloses a hybrid acceleration sensor and displacement sensor test performance calibration device, including: a sensor fixed support base module, a performance calibration control module and a data acquisition and analysis module. The sensor fixed support base module includes: a displacement sensor positioning fixture, an acceleration sensor mounting plate and a U-shaped sensor shock-absorbing support. The performance calibration control module includes: a servo motor, a ball screw moving platform, a fast moving guide rail and a moving guide rail positioning block. The data acquisition and analysis module includes: a data acquisition instrument and an industrial computer. The servo motor starts working after receiving a control signal carrying calibration parameters, driving the ball screw moving platform to perform pre-set regular movements on the fast moving guide rail, and calibrating the sensor output signal of the displacement sensor to be calibrated and / or the sensor of the acceleration sensor to be calibrated. The data acquisition instrument synchronously acquires the sensor output signal of the displacement sensor to be calibrated when the servo motor inputs the displacement signal to the displacement sensor to be calibrated, and outputs the sensor output signal of the displacement sensor to be calibrated to the industrial computer. Moreover, the data acquisition instrument can also synchronously acquire the sensor output signal of the acceleration sensor to be calibrated when the servo motor inputs the vibration signal to the acceleration sensor to be calibrated, and output the sensor output signal of the acceleration sensor to be calibrated to the industrial computer. Thus, the industrial computer obtains the static calibration curve and the dynamic calibration curve of the displacement sensor based on the sensor output signal of the displacement sensor to be calibrated and the actual input displacement signal, and obtains the dynamic calibration curve of the acceleration sensor to be calibrated based on the sensor output signal of the acceleration sensor to be calibrated and the actual input displacement signal. Therefore, the present invention not only realizes the dynamic performance calibration of displacement sensors and acceleration sensors, solving the problem that traditional displacement sensor calibration devices only have static calibration functions, but also realizes a fully automatic control mode. Compared with the traditional manual calibration method, the present invention shortens the calibration time, improves the calibration efficiency and calibration speed of the sensor, and at the same time, improves the calibration precision and accuracy of the sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the disclosed drawings without any creative work.

[0047] Figure 1 A schematic diagram of the structure of a hybrid acceleration sensor and displacement sensor test performance calibration device disclosed in an embodiment of the present invention;

[0048] Figure 2 This is a structural diagram of a displacement sensor to be calibrated disclosed in an embodiment of the present invention;

[0049] Figure 3 This is a structural schematic diagram of an acceleration sensor mounting plate disclosed in an embodiment of the present invention;

[0050] FIG4( a ) is a front view of a MEMS micro acceleration sensor disclosed in an embodiment of the present invention;

[0051] FIG4( b ) is a side view of a MEMS micro acceleration sensor disclosed in an embodiment of the present invention;

[0052] Figure 5 A schematic structural diagram of an ICP micro acceleration sensor disclosed in an embodiment of the present invention;

[0053] FIG6( a ) is a full view of the positional relationship between a servo motor and a fast-moving guide rail disclosed in an embodiment of the present invention;

[0054] FIG6( b ) is a side view showing the positional relationship between a servo motor and a fast-moving guide rail disclosed in an embodiment of the present invention;

[0055] Figure 7 This is a structural schematic diagram of a ball screw moving platform disclosed in an embodiment of the present invention;

[0056] Figure 8 A waveform diagram of a static displacement wave disclosed in an embodiment of the present invention;

[0057] Figure 9 A static calibration curve diagram of a displacement sensor disclosed in an embodiment of the present invention;

[0058] Figure 10 A waveform diagram of a dynamic displacement wave disclosed in an embodiment of the present invention;

[0059] Figure 11 A curve diagram of a displacement wave simulating dynamic settlement of soil on site disclosed in an embodiment of the present invention;

[0060] Figure 12 A dynamic calibration curve diagram of a displacement sensor disclosed in an embodiment of the present invention;

[0061] Figure 13 A calibration curve diagram of a simulated on-site soil dynamic settlement wave disclosed in an embodiment of the present invention;

[0062] Figure 14 A schematic diagram of a vibration waveform disclosed in an embodiment of the present invention;

[0063] Figure 15 A dynamic calibration curve diagram of an acceleration sensor disclosed in an embodiment of the present invention;

[0064] Figure 16A schematic structural diagram of another hybrid acceleration sensor and displacement sensor test performance calibration device disclosed in an embodiment of the present invention;

[0065] Figure 17 A full view of a hybrid acceleration sensor and displacement sensor test performance calibration device disclosed in an embodiment of the present invention;

[0066] Figure 18 A side view of a hybrid acceleration sensor and displacement sensor test performance calibration device disclosed in an embodiment of the present invention;

[0067] Figure 19 This is a schematic diagram of the installation positions of a displacement sensor positioning fixture and a U-shaped sensor shock-absorbing support disclosed in an embodiment of the present invention. DETAILED DESCRIPTION

[0068] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0069] An embodiment of the present invention discloses a hybrid acceleration sensor and displacement sensor test performance calibration device, comprising: a sensor fixed support base module, a performance calibration control module and a data acquisition and analysis module. The sensor fixed support base module comprises: a displacement sensor positioning fixture, an acceleration sensor mounting plate and a U-shaped sensor shock-absorbing support. The performance calibration control module comprises: a servo motor, a ball screw moving platform, a fast moving guide rail and a moving guide rail positioning block. The data acquisition and analysis module comprises: a data acquisition instrument and an industrial computer. The servo motor starts working after receiving a control signal carrying calibration parameters, drives the ball screw moving platform to perform pre-set regular movements on the fast moving guide rail, and calibrates the sensor output signal of the displacement sensor to be calibrated and / or the sensor output of the acceleration sensor to be calibrated. Signal, when the servo motor inputs a displacement signal to the displacement sensor to be calibrated, the data acquisition instrument synchronously collects the sensor output signal of the displacement sensor to be calibrated, and outputs the sensor output signal of the displacement sensor to be calibrated to the industrial computer. Moreover, when the servo motor inputs a vibration signal to the acceleration sensor to be calibrated, the data acquisition instrument synchronously collects the sensor output signal of the acceleration sensor to be calibrated, and outputs the sensor output signal of the acceleration sensor to be calibrated to the industrial computer, so that the industrial computer obtains a static calibration curve of the displacement sensor and a dynamic calibration curve of the displacement sensor based on the sensor output signal of the displacement sensor to be calibrated and the actual input displacement signal, and obtains a dynamic calibration curve of the acceleration sensor to be calibrated based on the sensor output signal of the acceleration sensor to be calibrated and the actual input displacement signal. Therefore, the present invention not only realizes the dynamic performance calibration of displacement sensors and acceleration sensors, solving the problem that traditional displacement sensor calibration devices only have static calibration functions, but also realizes a fully automatic control mode. Compared with the traditional manual calibration method, the present invention shortens the calibration time, improves the calibration efficiency and calibration speed of the sensor, and at the same time, improves the calibration precision and accuracy of the sensor.

[0070] See also Figure 1 , a structural diagram of a hybrid acceleration sensor and displacement sensor test performance calibration device disclosed in an embodiment of the present invention, the device includes: a sensor fixed support base module 100, a performance calibration control module 200 and a data acquisition and analysis module 300.

[0071] The sensor fixing support base module 100 includes: a displacement sensor positioning fixture 03 , an acceleration sensor mounting plate 05 and a U-shaped sensor shock-absorbing support 09 .

[0072] The displacement sensor positioning fixture 03 is used to fix and position the displacement sensor 01 to be calibrated, so as to prevent the displacement sensor 01 to be calibrated from moving due to high frequency and vibration.

[0073] For details, see Figure 2 The structural diagram of the displacement sensor to be calibrated is shown as follows. The displacement sensor to be calibrated 01 includes: a displacement sensor screw 011 and a displacement sensor body 012 , and the displacement sensor screw 011 passes through the displacement sensor body 012 .

[0074] Accelerometer mounting plate 05 is used to connect to the displacement sensor 01 to be calibrated and the acceleration sensor to be calibrated. In practical applications, accelerometer mounting plate 05 can be connected to the displacement sensor screw 011 of the displacement sensor 01 to be calibrated. The acceleration sensor to be calibrated can be a MEMS (Micro-Electro-Mechanical System) micro-accelerometer 11 or an ICP (Integrated-Circuits-Piezoelectric) micro-accelerometer 12.

[0075] For details, see Figure 3 The acceleration sensor mounting plate shown in FIG. 1 is a schematic structural diagram of an acceleration sensor mounting plate, wherein the acceleration sensor mounting plate has a displacement sensor thread fixing knob 051, a MEMS acceleration sensor positioning groove 052, an ICP acceleration sensor mounting hole 053, and a MEMS acceleration sensor screw hole 054;

[0076] The displacement sensor thread fixing knob 051 is used to cooperate with the displacement sensor screw 011;

[0077] The MEMS acceleration sensor positioning groove 052 is used for placing and positioning the MEMS acceleration sensor 11;

[0078] ICP acceleration sensor mounting hole 053, used for mounting the ICP acceleration sensor 12;

[0079] The MEMS acceleration sensor screw hole 054 is used to fix the MEMS acceleration sensor 11.

[0080] In this embodiment, the structure of the MEMS micro acceleration sensor 11 is shown in FIG. 4 ( a ) and FIG. 4 ( b ). The MEMS micro acceleration sensor 11 has a bolt mounting hole 111 .

[0081] The structure of ICP micro acceleration sensor 12 is shown in Figure 5 As shown, the ICP micro acceleration sensor 12 has an acceleration sensor nut 121 .

[0082] The U-shaped sensor shock-absorbing support 09 is used to fix the displacement sensor positioning fixture 03 and to reduce the vibration of the displacement sensor positioning fixture 03.

[0083] The performance calibration control module 200 includes: a servo motor 02 , a ball screw moving platform 04 , a fast moving guide rail 07 and a moving guide rail positioning block 13 .

[0084] The movable guide rail positioning block 13 is used to fix the fast moving guide rail 07 .

[0085] The servo motor 02 is used to start working after receiving a control signal carrying calibration parameters, driving the ball screw moving platform 04 to perform pre-set regular movements on the fast moving guide rail 07, and calibrating the sensor output signal of the displacement sensor 01 to be calibrated and / or the sensor output signal of the acceleration sensor to be calibrated.

[0086] Specifically, the installation position relationship between the servo motor 02 and the fast moving guide rail 07 can be seen in FIG6 (a) and FIG6 (b) which respectively show a full view and a side view of the position relationship of the servo motor and the fast moving guide rail.

[0087] See also Figure 7 The structural diagram of the ball screw moving platform shown in the figure has: a moving guide rail embedded structure 041 and a mounting plate positioning hole 042;

[0088] The movable guide rail embedding structure 041 is used to embed the ball screw movable platform 04 on the fast moving guide rail 07 so that the ball screw movable platform 04 can move freely;

[0089] The mounting plate positioning hole 042 is used to install and fix the acceleration sensor mounting plate 05.

[0090] The data acquisition and analysis module 300 includes: a data acquisition device 14 and an industrial computer 17;

[0091] The data acquisition device 14 is used to synchronously acquire the sensor output signal of the displacement sensor 01 to be calibrated when the servo motor 02 inputs a displacement signal to the displacement sensor 01 to be calibrated, and output the sensor output signal of the displacement sensor 01 to be calibrated to the industrial computer 17. It is also used to synchronously acquire the sensor output signal of the acceleration sensor to be calibrated when the servo motor 02 inputs a vibration signal to the acceleration sensor to be calibrated, and output the sensor output signal of the acceleration sensor to be calibrated to the industrial computer 17.

[0092] The industrial computer 17 is used to obtain a static calibration curve and a dynamic calibration curve of the displacement sensor based on the sensor output signal of the displacement sensor 01 to be calibrated and the actual input displacement signal. It is also used to obtain a dynamic calibration curve of the acceleration sensor to be calibrated based on the sensor output signal of the acceleration sensor to be calibrated and the actual input displacement signal.

[0093] The following describes in detail the static performance calibration process and the dynamic performance calibration process of the hybrid acceleration sensor and displacement sensor test performance calibration device for the displacement sensor to be calibrated 01, as well as the dynamic performance calibration process of the acceleration sensor to be calibrated. The acceleration sensors to be calibrated are described by taking the MEMS micro acceleration sensor 11 and the ICP micro acceleration sensor 12 as examples, as follows:

[0094] (1) Installation and static performance calibration process of the displacement sensor 01 to be calibrated

[0095] (1) Install the displacement sensor 01 to be calibrated on the displacement sensor positioning fixture 03, and connect the displacement sensor screw 011 to the displacement sensor thread fixing knob 051 on the acceleration sensor mounting plate 05. After the installation is completed, proceed to the next step;

[0096] (2) Turn on the data acquisition device 14 and preheat it for a first preset time period, such as 30 minutes. After the preheating is completed, proceed to the next step;

[0097] (3) Connect the position displacement sensor 01 to be calibrated with the data acquisition instrument 14, set a static sampling frequency, such as 1 Hz, and preheat the position displacement sensor 01 to be calibrated for a second preset time period, such as 5 minutes. The data acquisition instrument 14 collects the sensor output signal output by the position displacement sensor 01 to be calibrated, and transmits the sensor output signal to the industrial control computer 17. The industrial control computer 17 uses the sensor output signal to facilitate data analysis and acquisition software to determine whether the current state of all the position displacement sensors 01 to be calibrated is disturbed by the external environment, and if not, execute the next step;

[0098] (4) Open the PLC handheld control panel 16 (see Figure 8 ) is installed on the test parameter control software, and calibration parameters are set on the PLC handheld control panel 16. The calibration parameters include: valve rise time and duration parameters. The PLC handheld control panel 16 sends the calibration parameters to the control actuator 15, and the control actuator 15 performs digital-to-analog conversion on the calibration parameters to obtain a control signal. The control actuator 15 outputs the control signal to the control servo motor 02. The servo motor 02 drives the ball screw moving platform 04 to perform pre-set regular movements on the fast moving guide rail 07 according to the control signal, and calibrates the sensor output signal of the displacement sensor 01 to be calibrated.

[0099] (5) The servo motor 02 inputs a displacement signal to the displacement sensor 01 to be marked. The displacement signal is a static displacement wave, including: Figure 8 The data acquisition device 14 synchronously acquires the sensor output signal of the displacement sensor 01 to be calibrated, and the step displacement wave and the linear displacement wave are shown.

[0100] (6) After the static calibration test of the displacement sensor 01 to be calibrated is completed, the industrial computer 17 compares the sensor output signal of the displacement sensor 01 to be calibrated with the actual input displacement signal. Specifically, the actual input displacement signal of the displacement sensor 01 to be calibrated is used as the horizontal axis, and the sensor output signal of the displacement sensor 01 to be calibrated is used as the vertical axis to obtain Figure 9 The static calibration curve of the displacement sensor shown here completes the static performance calibration test process of the displacement sensor 01 to be calibrated.

[0101] (2) Dynamic performance calibration process of the displacement sensor 01 to be calibrated

[0102] The installation process of the displacement sensor 01 to be calibrated repeats the above steps (1) and (2), wherein in step (3), the dynamic data sampling rate of the data acquisition instrument 14 is set to 2kHz.

[0103] (4) Open the test parameter control software installed on the PLC handheld control panel 16, and set the calibration parameters on the PLC handheld control panel 16. The calibration parameters include: valve operating frequency, duration parameter, valve rise time and duration frequency parameter. Among them, a sinusoidal displacement wave can be generated according to the valve operating frequency and duration parameter, and a displacement wave simulating the dynamic settlement of the soil on site can be generated according to the valve rise time and duration frequency parameter. The PLC handheld control panel 16 sends the calibration parameters to the control actuator 15. The control actuator 15 performs digital-to-analog conversion on the calibration parameters to obtain a control signal. The control actuator 15 outputs the control signal to the control servo motor 02. The servo motor 02 drives the ball screw moving platform 04 to perform a pre-set regular action on the fast moving guide rail 07 according to the control signal, and calibrates the sensor output signal of the displacement sensor 01 to be calibrated.

[0104] (5) The servo motor 02 inputs a displacement signal to the displacement sensor 01 to be calibrated. The displacement signal is as follows: Figure 10 The dynamic displacement wave shown, such as the 50Hz sinusoidal displacement wave and the Figure 11 The simulated on-site soil dynamic settlement displacement wave shown, the data acquisition instrument 14 synchronously collects the sensor output signal of the displacement sensor 01 to be calibrated;

[0105] (6) After the dynamic calibration test of the displacement sensor 01 to be calibrated is completed, the industrial computer 17 compares the sensor output signal of the displacement sensor 01 to be calibrated with the actual input displacement signal. Specifically, the actual input displacement signal of the displacement sensor 01 to be calibrated is used as the horizontal axis, and the sensor output signal of the displacement sensor 01 to be calibrated is used as the vertical axis to obtain Figure 12 The displacement sensor dynamic calibration curve (or displacement sensor sine wave calibration curve) shown, and Figure 13The simulated on-site soil dynamic settlement wave calibration curve shown in the figure completes the dynamic performance calibration test process of the displacement sensor 01 to be calibrated.

[0106] (3) MEMS accelerometer installation and dynamic performance calibration process

[0107] (1) Place the MEMS micro acceleration sensor 11 in the MEMS acceleration sensor positioning groove 052 on the acceleration sensor mounting plate 05, and then use bolts to connect the bolt mounting hole 111 and the MEMS acceleration sensor screw hole 054. This completes the installation and positioning of the MEMS micro acceleration sensor 11 and proceeds to the next step.

[0108] (2) Turn on the data acquisition instrument 14, set the dynamic sampling frequency to the first sampling frequency, such as 2 kHz, preheat for a third preset time period, such as 30 minutes, and after the preheating is completed, proceed to the next step;

[0109] (3) Connecting the MEMS micro acceleration sensor 11 to the data acquisition instrument 14, preheating the MEMS micro acceleration sensor 11 for a fourth preset time period, such as 5 minutes, the data acquisition instrument 14 pre-collects the sensor output signal output by the MEMS micro acceleration sensor 11, and transmits the sensor output signal to the industrial control computer 17. The industrial control computer 17 is conducive to the data analysis and acquisition software based on the sensor output signal to determine whether the current state of all the displacement sensors 01 to be calibrated is disturbed by the external environment, and if not, execute the next step;

[0110] (4) Open the PLC handheld control panel 16 (see Figure 16 ) is installed on the test parameter control software, and calibration parameters are set on the PLC handheld control panel 16. The calibration parameters include: vibration acceleration parameters, valve operating frequency and duration parameters (generating vibration signals). The PLC handheld control panel 16 sends the calibration parameters to the control actuator 15, and the control actuator 15 performs digital-to-analog conversion on the calibration parameters to obtain a control signal. The control actuator 15 outputs the control signal to the control servo motor 02. The servo motor 02 drives the ball screw moving platform 04 to perform pre-set regular movements on the fast moving guide rail 07 according to the control signal, and calibrates the sensor output signal of the displacement sensor 01 to be calibrated.

[0111] (5) The servo motor 02 inputs a vibration signal to the MEMS micro acceleration sensor 11. The vibration signal is a vibration waveform (dynamic wave) such as Figure 14 As shown, the data acquisition device 14 synchronously acquires the sensor output signal of the MEMS micro acceleration sensor 11 .

[0112] (6) After the calibration test of the MEMS micro acceleration sensor 11 is completed, the industrial computer 17 compares the sensor output signal of the MEMS micro acceleration sensor 11 with the actual input vibration signal. Specifically, the actual input vibration signal of the MEMS micro acceleration sensor 11 is used as the horizontal axis, and the sensor output signal of the MEMS micro acceleration sensor 11 is used as the vertical axis to obtain Figure 15 The dynamic calibration curve of the acceleration sensor shown in FIG. 1 is used to complete the dynamic performance test calibration process of the MEMS micro acceleration sensor 11 .

[0113] (IV) ICP accelerometer installation and dynamic performance calibration process

[0114] (1) Place the ICP micro accelerometer 12 on the accelerometer mounting plate 05, then connect the ICP accelerometer nut 121 to the ICP accelerometer mounting hole 053 to complete the installation and positioning, and proceed to the next step;

[0115] Repeat steps (2) to (6) in the MEMS acceleration sensor installation and calibration process, and complete the dynamic performance calibration test process of the ICP micro acceleration sensor 12 by replacing the MEMS micro acceleration sensor 11 in steps (2) to (6) with the ICP micro acceleration sensor 12.

[0116] In summary, the present invention discloses a hybrid acceleration sensor and displacement sensor test performance calibration device, including: a sensor fixed support base module 100, a performance calibration control module 200 and a data acquisition and analysis module 300, the sensor fixed support base module 100 includes: a displacement sensor positioning fixture 03, an acceleration sensor mounting plate 05 and a U-shaped sensor shock-absorbing support 09, the performance calibration control module 200 includes: a servo motor 02, a ball screw moving platform 04, a fast moving guide rail 07 and a moving guide rail positioning block 13, the data acquisition and analysis module 300 includes: a data acquisition instrument 14 and an industrial computer 17, the servo motor 02 starts working after receiving a control signal carrying calibration parameters, drives the ball screw moving platform 04 to perform a pre-set regular action on the fast moving guide rail 07, and calibrates the sensor output signal of the displacement sensor to be calibrated 01 and / or the sensor output signal to be calibrated Calibrate the sensor output signal of the acceleration sensor. When the servo motor 02 inputs a displacement signal to the displacement sensor 01 to be calibrated, the data acquisition instrument 14 synchronously collects the sensor output signal of the displacement sensor 01 to be calibrated, and outputs the sensor output signal of the displacement sensor 01 to be calibrated to the industrial computer 17. Moreover, when the servo motor 02 inputs a vibration signal to the acceleration sensor to be calibrated, the data acquisition instrument 14 synchronously collects the sensor output signal of the acceleration sensor to be calibrated, and outputs the sensor output signal of the acceleration sensor to be calibrated to the industrial computer 17. Thus, the industrial computer obtains a static calibration curve and a dynamic calibration curve of the displacement sensor based on the sensor output signal of the displacement sensor 01 to be calibrated and the actual input displacement signal, and obtains a dynamic calibration curve of the acceleration sensor to be calibrated based on the sensor output signal of the acceleration sensor to be calibrated and the actual input displacement signal. Therefore, the present invention not only realizes the dynamic performance calibration of displacement sensors and acceleration sensors, solving the problem that traditional displacement sensor calibration devices only have static calibration functions, but also realizes a fully automatic control mode. Compared with the traditional manual calibration method, the present invention shortens the calibration time, improves the calibration efficiency and calibration speed of the sensor, and at the same time, improves the calibration precision and accuracy of the sensor.

[0117] In order to further optimize the above embodiment, Figure 1 Based on the embodiment shown, see Figure 16 , another structural diagram of a hybrid acceleration sensor and displacement sensor test performance calibration device disclosed in an embodiment of the present invention, combined with Figure 17 and Figure 18 The full view and side view of the hybrid acceleration sensor and displacement sensor test performance calibration device are shown respectively. The sensor fixing support base module 100 may also include: a device armrest 06, a device bearing base 08 and a shock-absorbing rubber block 10.

[0118] The device armrest 06 is installed on the device supporting base 08 to increase the portability of the hybrid acceleration sensor and displacement sensor test performance calibration device.

[0119] The shock-absorbing rubber block 10 is installed on the device supporting base 08 to support the device supporting base 08 and to reduce shock to the device supporting base 08 .

[0120] Among them, the U-shaped sensor shock-absorbing support 09 is installed on the device bearing base 08.

[0121] For details, see Figure 19 The schematic diagram of the installation position of the displacement sensor positioning fixture and the U-shaped sensor shock-absorbing support is shown. The U-shaped sensor shock-absorbing support 09 has a shock-absorbing support fixing hole 091 and a shock-absorbing support fixing hole 081 for fixed connection with the device bearing base 08;

[0122] The displacement sensor positioning fixture 03 has: a displacement sensor body positioning hole 031, a screw positioning hole 032, a positioning fixture fixing hole 033 and a tightening screw 034;

[0123] The displacement sensor body positioning hole 031 is used to support the displacement sensor body 012;

[0124] The screw positioning hole 032 is used to position the displacement sensor screw 011 to prevent the displacement sensor screw 011 from moving and deflecting;

[0125] Positioning fixture fixing hole 033, used to connect with the U-shaped sensor shock-absorbing support 09;

[0126] The tightening screw 034 is used to fix the displacement sensor body 012.

[0127] To further optimize the above embodiment, the performance calibration control module 200 may further include: a control actuator 15 and a PLC (Programmable Logic Controller) handheld control panel 16;

[0128] The PLC handheld control panel 16 has a visual graphic display interface for inputting calibration parameters, and the PLC handheld control panel 16 sends the calibration parameters to the control actuator 15;

[0129] The control actuator 15 is used to perform digital-to-analog conversion on the calibration parameters to obtain a control signal. The control actuator 15 outputs the control signal to the control servo motor 02, so that the servo motor 02 drives the ball screw moving platform 04 to perform pre-set regular movements on the fast-moving guide rail 07 according to the control signal, and calibrates the sensor output signal of the displacement sensor 01 to be calibrated.

[0130] It should be noted that, in practical applications, the number of the displacement sensor positioning fixture 03 and the acceleration sensor mounting plate 05 in the hybrid acceleration sensor and displacement sensor test performance calibration device can be multiple, such as Figure 17 and Figure 18 In the hybrid acceleration sensor and displacement sensor test performance calibration device, four displacement sensor positioning fixtures 03 and four acceleration sensor mounting plates 05 are provided. The four displacement sensor positioning fixtures 03 are symmetrically distributed along the center line, and the four acceleration sensor mounting plates 05 are symmetrically distributed along the center line, thereby effectively preventing the displacement sensors at both ends from twisting when the test wave is input into the performance calibration control module 200. While increasing the number of displacement sensor calibrations, it can also improve the synchronization of the displacement sensor with the input test wave movement.

[0131] Preferably, two MEMS acceleration sensor positioning grooves and three ICP acceleration sensor mounting holes are provided on the acceleration sensor mounting plate 05. The two MEMS acceleration sensor positioning grooves are symmetrically distributed along the center line, and the three ICP acceleration sensor mounting holes are symmetrically distributed along the center line. This can solve the problem that the traditional method of only being able to calibrate one displacement sensor or acceleration sensor can be solved from the perspective of the sensor mounting structure, thereby greatly improving the calibration work efficiency and calibration speed of the sensor and shortening the calibration time.

[0132] In the present invention, the hybrid acceleration sensor and displacement sensor test performance calibration device is achieved by setting the test parameter control software installed on the PLC handheld control panel 16, transmitting the calibration parameters to the control actuator 15, and then controlling the valve rise time, duration parameter, valve operating frequency, duration parameter and vibration acceleration parameter of the servo motor 02. The servo motor 02 drives the ball screw moving platform 04 to perform pre-set regular movements on the fast moving guide rail 07, and calibrates the sensor output signals of the displacement sensor 01 to be calibrated, the MEMS acceleration sensor 11, and the ICP acceleration sensor 12, and finally realizes a fully automatic calibration control method. Compared with the traditional manual calibration method, the present invention greatly improves the calibration precision and accuracy of the sensor.

[0133] Based on the above discussion, it can be seen that the hybrid acceleration sensor and displacement sensor test performance calibration device disclosed in the present invention not only has the static response calibration function of the displacement sensor, but also has a dynamic response calibration function, and can automatically output a step displacement wave (static wave - unlimited duration, rise time 0-15s, calibration range 0-150mm), a linear displacement wave (static wave unlimited dwell time, rise time 0.1-15s, calibration range 0.1-150mm), a sinusoidal displacement wave (dynamic wave - operating frequency 0.1Hz-50Hz, amplitude 1mm-150mm, duration 1-200s), and a simulated on-site soil settlement wave (dynamic wave - operating frequency. 0.1Hz-5Hz, amplitude 1mm-150mm, duration 1-50s), thereby solving the problem that the traditional displacement sensor calibration device only has a static calibration function.

[0134] The hybrid acceleration sensor and displacement sensor test performance calibration device disclosed in the present invention can also output a vibration signal with adjustable frequency and adjustable amplitude (dynamic wave - frequency 0.1Hz~100Hz, vibration acceleration value 0.01g~100g, duration 1~50s), thereby solving the problem that traditional ICP portable acceleration calibration devices can only output limited fixed-frequency and fixed-amplitude vibration signals.

[0135] Finally, it should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or device comprising the element.

[0136] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0137] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A hybrid acceleration sensor and displacement sensor test performance calibration device, characterized in that: include: Sensor fixed support base module, performance calibration control module and data acquisition and analysis module; The sensor fixing support base module includes: a displacement sensor positioning fixture, an acceleration sensor mounting plate and a U-shaped sensor shock-absorbing support; The displacement sensor positioning fixture is used to fix and position the displacement sensor to be calibrated; The acceleration sensor mounting plate is used to connect with the displacement sensor to be calibrated and the acceleration sensor to be calibrated; The U-shaped sensor shock-absorbing support is used to fix and install the displacement sensor positioning fixture and to reduce the vibration of the displacement sensor positioning fixture; The performance calibration control module includes: a servo motor, a ball screw moving platform, a fast moving guide rail and a moving guide rail positioning block; The movable guide rail positioning block is used to fix the fast moving guide rail; The servo motor is configured to start working after receiving a control signal carrying calibration parameters, drive the ball screw moving platform to perform a predetermined regular motion on the fast moving guide rail, and calibrate the sensor output signal of the displacement sensor to be calibrated and the sensor output signal of the acceleration sensor to be calibrated; The data acquisition and analysis module includes: a data acquisition instrument and an industrial computer; The data acquisition instrument is used to synchronously acquire a sensor output signal of the displacement sensor to be calibrated when the servo motor inputs a displacement signal to the displacement sensor to be calibrated, and output the sensor output signal of the displacement sensor to be calibrated to the industrial computer; and is also used to synchronously acquire a sensor output signal of the acceleration sensor to be calibrated when the servo motor inputs a vibration signal to the acceleration sensor to be calibrated, and output the sensor output signal of the acceleration sensor to be calibrated to the industrial computer; The industrial computer is used to obtain a static calibration curve and a dynamic calibration curve of the displacement sensor based on the sensor output signal of the displacement sensor to be calibrated and the actual input displacement signal, and is also used to obtain a dynamic calibration curve of the acceleration sensor to be calibrated based on the sensor output signal of the acceleration sensor to be calibrated and the actual input vibration signal; The ball screw moving platform has: a moving guide rail embedding structure and a mounting plate positioning hole; The movable guide rail embedding structure is used to embed the ball screw movable platform into the fast moving guide rail so that the ball screw movable platform can move freely; The mounting plate positioning hole is used to install and fix the acceleration sensor mounting plate; When the hybrid acceleration sensor and displacement sensor test performance calibration device performs static performance calibration on the displacement sensor to be calibrated, the calibration parameters include: valve rise time and duration parameters; When the hybrid acceleration sensor and displacement sensor test performance calibration device performs dynamic performance calibration on the displacement sensor to be calibrated, the calibration parameters include: valve operating frequency, duration parameter, valve rise time and duration frequency parameter; the valve rise time and duration frequency parameters are used to generate a simulated on-site soil dynamic settlement displacement wave; When the hybrid acceleration sensor and displacement sensor test performance calibration device performs dynamic performance calibration on the acceleration sensor to be calibrated, the calibration parameters include: vibration acceleration parameters, valve operating frequency and duration parameters.

2. The hybrid acceleration sensor and displacement sensor test performance calibration device according to claim 1, characterized in that: The acceleration sensor mounting plate has a displacement sensor thread fixing knob, a micro-electromechanical system (MEMS) acceleration sensor positioning groove, a piezoelectric sensor (ICP) acceleration sensor mounting hole, and a MEMS acceleration sensor screw hole; The displacement sensor thread fixing knob is used to cooperate with the displacement sensor screw of the displacement sensor to be calibrated; The MEMS acceleration sensor positioning groove is used to place and position the MEMS acceleration sensor; The ICP acceleration sensor mounting hole is used to mount the ICP acceleration sensor; The MEMS acceleration sensor screw hole is used to fix the MEMS acceleration sensor.

3. The hybrid acceleration sensor and displacement sensor test performance calibration device according to claim 1, characterized in that: The sensor fixing support base module also includes: a device armrest, a device bearing base and a shock-absorbing rubber block; The device armrest is installed on the device support base, and is used to increase the portability of the hybrid acceleration sensor and displacement sensor test performance calibration device; The shock-absorbing rubber block is installed on the device-carrying base, and is used to support the device-carrying base and reduce shock to the device-carrying base.

4. The hybrid acceleration sensor and displacement sensor test performance calibration device according to claim 3, characterized in that: The U-shaped sensor shock-absorbing support has a shock-absorbing support fixing hole, and the shock-absorbing support fixing hole is used to be fixedly connected to the device bearing base.

5. The hybrid acceleration sensor and displacement sensor test performance calibration device according to claim 1, characterized in that: The displacement sensor positioning fixture comprises: a displacement sensor body positioning hole, a screw positioning hole, a positioning fixture fixing hole and a tightening screw; The displacement sensor body positioning hole is used to support the displacement sensor body; The screw positioning hole is used to position the displacement sensor screw of the displacement sensor to be calibrated; The positioning fixture fixing hole is used to connect with the U-shaped sensor shock-absorbing support; The tightening screw is used to fix the displacement sensor body of the displacement sensor to be calibrated.

6. The hybrid acceleration sensor and displacement sensor test performance calibration device according to claim 1, characterized in that: The performance calibration control module also includes: a control actuator and a programmable logic controller PLC handheld control panel; The PLC handheld control panel has a visual graphic display interface for inputting calibration parameters and sending the calibration parameters to the control actuator; The control actuator is used to perform digital-to-analog conversion on the calibration parameters to obtain a control signal, and output the control signal to the servo motor shown, so that the servo motor drives the ball screw moving platform to perform pre-set regular movements on the fast-moving guide rail according to the control signal, and calibrates the sensor output signal of the displacement sensor to be calibrated.

7. The hybrid acceleration sensor and displacement sensor test performance calibration device according to claim 1, characterized in that: The number of the displacement sensor positioning fixtures is four, and the four displacement sensor positioning fixtures are symmetrically distributed along the center line; There are four acceleration sensor mounting plates, and the four acceleration sensor mounting plates are symmetrically distributed along the center line.

8. The hybrid acceleration sensor and displacement sensor test performance calibration device according to claim 1, characterized in that: The acceleration sensor mounting plate is provided with two MEMS acceleration sensor positioning grooves and three ICP acceleration sensor mounting holes, the two MEMS acceleration sensor positioning grooves are symmetrically distributed along the center line, and the three ICP acceleration sensor mounting holes are symmetrically distributed along the center line.

9. The hybrid acceleration sensor and displacement sensor test performance calibration device according to claim 1, characterized in that: The industrial computer is specifically used to obtain a static calibration curve of the displacement sensor and a dynamic calibration curve of the displacement sensor by taking the actual input displacement signal of the displacement sensor to be calibrated as the horizontal axis and the sensor output signal of the displacement sensor to be calibrated as the vertical axis.

10. The hybrid acceleration sensor and displacement sensor test performance calibration device according to claim 1, characterized in that: The industrial computer is specifically used to obtain the dynamic calibration curve of the acceleration sensor by taking the actual input vibration signal of the acceleration sensor to be calibrated as the horizontal axis and the sensor output signal of the acceleration sensor to be calibrated as the vertical axis.

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