Imaging system and method for determining imaging lens parameters

Abstract

The present invention relates to the field of light spot alignment technology, and specifically to an imaging system and a method for determining imaging lens parameters. The imaging system includes: a light source and a projection surface, the projection surface having a metric size; an imaging lens assembly formed on the optical path between the light source and the projection surface, and the light emitted by the light source forms a target light spot on the projection surface after passing through the imaging lens assembly; an adjustment assembly connected to the imaging lens assembly, and the adjustment assembly is used to adjust the parameters of the imaging lens assembly based on the target light spot and the metric size so that the metric size matches the target light spot, so as to determine the parameters of the imaging lens assembly; the parameters include the distance between lenses in the imaging lens assembly, or the distance between the imaging lens assembly and the light source. The imaging system provided by the present invention directly adjusts the light spot irradiated onto the exposure chip without the need for other optical lenses, and has higher adjustment accuracy, shorter duration, and higher reliability of light spot matching.

Description

Technical Field

[0001] The present invention relates to the field of light spot alignment technology, and in particular to an imaging system and a method for determining imaging lens parameters. Background Art

[0002] In order to ensure the accuracy of the exposure pattern, it is necessary to align the target light spot irradiated by the light source onto the exposure chip with the exposure chip to ensure that the target light spot covers the exposure chip.

[0003] Figure 1 This is a schematic diagram of the working scene of the exposure chip, such as Figure 1 As shown, the light emitted by the light source 10 passes through the imaging lens assembly 30 and the reflection assembly 40, and is projected onto the surface of the exposure chip to form a target light spot. After being reflected by the exposure chip, the target light spot passes through other optical lenses such as a projection objective lens and a magnification adjustment lens, etc., to generate an exposure pattern on the exposure surface. In order to ensure the accuracy and integrity of the exposure pattern, it is generally required that the size of the target light spot matches the exposure chip. In the prior art, since the exposure chip is in a completely closed environment after installation and the adjustment space on the equipment is relatively small, it is impossible to directly observe the target light spot irradiated on the exposure chip, and therefore it is impossible to directly adjust the size of the target light spot projected on the exposure chip. The target light spot can only be adjusted by observing the reflected light spot formed on the exposure surface. However, the inventors found that when adjusting by this method, not only the other optical lenses and the exposure chip are involved, but also the imaging lens assembly 30 and the reflection assembly 40 are involved, resulting in a reduction in the matching reliability of the target light spot and the exposure chip and requiring a lot of time and manpower. Summary of the invention

[0004] In view of this, an embodiment of the present invention provides an imaging system and a method for determining imaging lens parameters to solve the problem of low reliability of spot matching of the imaging system in the prior art.

[0005] According to a first aspect, an embodiment of the present invention provides an imaging system, comprising: a light source and a projection surface, wherein the projection surface has a metric dimension; an imaging lens assembly, formed on an optical path between the light source and the projection surface, wherein light emitted by the light source forms a target light spot on the projection surface after passing through the imaging lens assembly; an adjustment assembly, connected to the imaging lens assembly, wherein the adjustment assembly is used to adjust the parameters of the imaging lens assembly based on the target light spot and the metric dimension so that the metric dimension matches the target light spot, so as to determine the parameters of the imaging lens assembly; wherein the parameters include the distance between lenses in the imaging lens assembly, or the distance between the imaging lens assembly and the light source.

[0006] The imaging system provided by the embodiment of the present invention utilizes a projection surface to receive the target light spot formed after the light source passes through the imaging lens assembly, and utilizes an adjustment component to adjust the parameters of the imaging lens assembly according to the metric size, without manual operation, to ensure the reliability of the matching between the metric size and the target light spot, wherein the metric size is an ideal light spot that matches the exposure chip. Compared with the prior art, the present invention utilizes the projection surface to receive the target light spot, and adjusts the parameters of the imaging lens assembly through the adjustment component, so that the target light spot matches the metric size, which is equivalent to directly adjusting the light spot irradiated onto the exposure chip, without the need for other optical lenses, and has higher adjustment accuracy, shorter duration, and higher reliability of light spot matching.

[0007] Optionally, the imaging system further includes: a reflection component formed on the optical path between the light source and the projection surface, and the light emitted by the light source forms a target light spot on the projection surface after passing through the imaging lens component and the reflection component.

[0008] Optionally, the adjustment component includes: an image acquisition device, used to acquire the target light spot on the projection surface; an adjustment device, connected to the image acquisition device and the imaging lens assembly, and the adjustment component is used to adjust the parameters of the imaging lens assembly based on the target light spot and the measurement size.

[0009] Optionally, the adjustment device includes: a guide rail, on which the imaging lens assembly is arranged; a controller, connected to the image acquisition device, and used to form a control instruction based on the target light spot and the measured size and send it to the adjustment member; the adjustment member, connected to the imaging lens assembly, and used to adjust the parameters of the imaging lens assembly based on the control instruction; and a measuring member, used to measure the parameters of the imaging lens assembly.

[0010] The imaging system provided by the embodiment of the present invention matches the target light spot with the measured size and determines the parameters of the imaging lens assembly through the cooperation between the image acquisition device, the guide rail, the controller, the adjustment part, and the measuring part, thereby ensuring that after installation, the target light spot formed by the light source passing through the imaging lens assembly and the reflection assembly matches the exposure chip. In actual use, the matching degree and accuracy of the light spot irradiated on the exposure chip and the exposure chip are improved, thereby improving the adjustment efficiency.

[0011] Optionally, the reflective component includes: a first reflector and a second reflector; wherein the light emitted by the light source is projected onto the projection surface through the first reflector and the second reflector.

[0012] The imaging system provided by the embodiment of the present invention shortens the optical path of the imaging system through the first reflector and the second reflector, and has a more compact structure.

[0013] Optionally, the imaging lens assembly includes: a first lens, arranged between the light source and the first reflector and close to the light source; a second lens, arranged between the first lens and the first reflector; wherein the adjustment assembly is used to adjust the distance between the second lens and the first lens.

[0014] The imaging system provided by the embodiment of the present invention utilizes the first lens and the second lens to expand and shape the light emitted by the light source, thereby ensuring that the target light spot is evenly distributed, thus providing a basis for subsequent chip exposure.

[0015] Optionally, the adjustment component is further used to adjust the distance between the first lens and the light source to adjust the clarity of the target light spot.

[0016] Optionally, the imaging lens assembly further includes: a third lens, disposed between the first reflector and the second reflector; wherein the adjustment assembly is further used to adjust the distance between the third lens and the projection surface.

[0017] Optionally, the metric size is a size of a target digital micromirror device.

[0018] The imaging system provided by the embodiment of the present invention can be applied to a digital micro-mirror device. Through the cooperation of the above-mentioned components, after installation, the light spot irradiated onto the digital micro-mirror device is uniform and matches the digital micro-mirror device, providing a basis for the subsequent operation of the digital micro-mirror device.

[0019] According to a second aspect, an embodiment of the present invention provides a method for determining imaging lens parameters, comprising: obtaining a metric dimension on a projection surface and a target light spot formed on the projection surface after a light source passes through an imaging lens assembly; based on the metric dimension and the target light spot, adjusting the parameters of the imaging lens assembly so that the metric dimension matches the target light spot, so as to determine the parameters of the imaging lens assembly; wherein the parameters include the distance between lenses in the imaging lens assembly, or the distance between the imaging lens assembly and the light source.

[0020] Optionally, adjusting the parameters of the imaging lens assembly based on the metric size and the target light spot so that the metric size matches the target light spot to determine the parameters of the imaging lens assembly includes: comparing the target light spot with the metric size to determine the difference between the target light spot and the metric size; forming an adjustment instruction based on the difference, and sending the instruction to an adjustment component in the adjustment component so that the adjustment component adjusts the parameters of the imaging lens assembly.

[0021] Optionally, after the light source passes through the imaging lens assembly and the reflection assembly, a target light spot is formed on the projection surface, the reflection assembly includes a first reflector and a second reflector, and the light emitted by the light source is projected onto the projection surface through the first reflector and the second reflector; the imaging lens assembly includes a first lens and a second lens, the first lens is arranged between the light source and the first reflector and close to the light source, and the second lens is arranged between the first lens and the first reflector; wherein the difference includes a size difference between the target light spot and the measured dimension, and / or a clarity difference between the target light spot and the measured dimension; the forming of an adjustment instruction based on the difference and sending it to the adjustment assembly so that the adjustment assembly adjusts the parameters of the imaging lens assembly includes: forming a first adjustment instruction based on the size difference and sending it to the adjustment assembly so that the adjustment assembly adjusts the distance between the first lens and the second lens; and / or forming a second adjustment instruction based on the clarity difference and sending it to the adjustment assembly so that the adjustment assembly adjusts the distance between the first lens and the light source.

[0022] The method for determining the parameters of an imaging lens provided in an embodiment of the present invention obtains the metric size on the projection surface and the target light spot formed on the projection surface after the light source passes through the imaging lens assembly; based on the metric size and the target light spot, the parameters of the imaging lens assembly are adjusted so that the metric size matches the target light spot, so as to determine the parameters of the imaging lens assembly. Compared with the method in the prior art, the present invention uses the projection surface to receive the target light spot, and adjusts the parameters of the imaging lens assembly through the adjustment assembly so that the target light spot matches the metric size, which is equivalent to directly adjusting the light spot irradiated onto the exposure chip without the need for other optical lenses, and the adjustment accuracy is higher, the time is shorter, and the reliability of light spot matching is higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 This is a schematic diagram of the working scene of the exposure chip;

[0025] Figure 2 This is a schematic diagram of the deformation of the working optical path of the exposure chip;

[0026] Figure 3 is a schematic structural diagram of an imaging system according to an embodiment of the present invention;

[0027] Figure 4 is a schematic structural diagram of an imaging system according to an optional embodiment of the present invention;

[0028] Figure 5 is a schematic diagram of the structure of the adjustment component 50 according to an embodiment of the present invention;

[0029] Figure 6 is a schematic diagram of the structure of the regulating device 52 according to an embodiment of the present invention;

[0030] Figure 7 is a complete structural schematic diagram of an imaging system according to an embodiment of the present invention;

[0031] Figure 8 It is a schematic diagram of the alignment of the DMD chip and the target light spot;

[0032] Fig. 9 is a flow chart of a method for determining imaging lens parameters according to an embodiment of the present invention. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0034] Combination Figure 1 In the actual working optical path, since the reflective component 40 only plays the role of changing the direction of the light and does not affect the size of the target light spot on the exposure chip, Figure 1The light path composed of the light source 10, the imaging lens assembly 30, and the reflective assembly 40 is as shown in FIG. Figure 2 Deformation shown.

[0035] According to a first aspect, an embodiment of the present invention provides an imaging system, such as Figure 3 As shown, the imaging system includes: a light source 10 and a projection surface 20, the projection surface 20 having a metric dimension; an imaging lens assembly 30, formed on an optical path between the light source 10 and the projection surface 20, the light emitted by the light source 10 forms a target light spot on the projection surface 20 after passing through the imaging lens assembly 30; an adjustment assembly 50, connected to the imaging lens assembly 30, the adjustment assembly 50 is used to adjust the parameters of the imaging lens assembly 30 based on the target light spot and the metric dimension so that the metric dimension matches the target light spot, so as to determine the parameters of the imaging lens assembly 30; wherein the parameters include the distance between lenses in the imaging lens assembly 30, or the distance between the imaging lens assembly 30 and the light source 10.

[0036] Figure 3 is a schematic diagram of the structure of an imaging system according to an embodiment of the present invention. Figure 3 As shown, the light source 10 can be a three-color laser source and a light rod, which is used to homogenize the point light source emitted by the light source 10; the imaging lens assembly 30 is arranged on the optical path of the light source 10, wherein the imaging lens assembly 30 is used to collimate and expand the point light source emitted by the light source to obtain a uniformly distributed target light spot. Specifically, the adjustment assembly 50 is connected to the imaging lens assembly 30, and the adjustment assembly 50 may include movable devices such as slide rails and guide rails, which are connected to the lens in the imaging lens assembly 30 to drive the imaging lens assembly 30 or the lens in the imaging lens assembly 30 to move.

[0037] As an optional implementation of an embodiment of the present invention, a metric dimension is provided on the projection surface 20, and the metric dimension may be a reference frame, a size scale or the preset light spot, etc., which is consistent with the shape and size of the preset light spot (ideal light spot), so as to facilitate the alignment operation of the target light spot with the metric dimension. When the target light spot deviates from the metric dimension, the adjustment component 50 adjusts the parameters of the imaging lens assembly 30 so that the target light spot is aligned with the reference frame. When the target light spot deviates in size from the reference frame, the imaging lens assembly 30 is adjusted. Here, the imaging system may be provided with a processor and a controller, the processor being used to compare the target light spot received by the projection surface 20 with the reference frame and calculate the deviation, and the controller being connected to the adjustment component 50, and being used to generate corresponding adjustment instructions based on the deviation and send them to the adjustment component 50.

[0038] The imaging system provided by the embodiment of the present invention utilizes a projection surface to receive the target light spot formed after the light source passes through the imaging lens assembly, and utilizes an adjustment component to adjust the parameters of the imaging lens assembly according to the metric size, without manual operation, to ensure the reliability of the matching between the metric size and the target light spot, wherein the metric size is the size of the ideal light spot that matches the exposure chip. Compared with the prior art, the present invention utilizes the projection surface to receive the target light spot, and adjusts the parameters of the imaging lens assembly through the adjustment component, so that the target light spot matches the metric size, which is equivalent to directly adjusting the light spot irradiated onto the exposure chip, without the need for other optical lenses, and has higher adjustment accuracy, shorter duration, and higher reliability of light spot matching.

[0039] Alternatively, if Figure 4 As shown, the imaging system also includes: a reflection component 40, which is formed on the optical path between the light source 10 and the projection surface 20, and the light emitted by the light source 10 forms a target light spot on the projection surface 20 after passing through the imaging lens component 30 and the reflection component 40.

[0040] Here, the reflection component 40 is provided in the imaging system, and the direction of the light in the imaging system can be adjusted, thereby adjusting the position of the target light spot on the projection surface 20. Specifically, the reflection component 40 can be a 45° reflector or an angle-adjustable reflector. In actual use, a corresponding adjustment device can be provided to rotate the reflection component 40 to a corresponding angle, thereby adjusting the position of the target light spot on the projection surface 20.

[0041] Alternatively, if Figure 5 As shown, the adjustment component 50 includes: an image acquisition device 51, used to acquire the target light spot on the projection surface 20; an adjustment device 52, connected to the image acquisition device 51 and the imaging lens assembly 30, and the adjustment component 50 is used to adjust the parameters of the imaging lens assembly 30 based on the target light spot and the measurement size.

[0042] As an optional implementation of the embodiment of the present invention, Figure 5 As shown, the adjustment component 50 includes an image acquisition device 51 and an adjustment device 52. The image acquisition device 51 is aligned with the projection surface 20 to acquire the target light spot. The image acquisition device 51 has an image processor to compare the target light spot with the measured size to obtain a deviation, such as a size deviation, a position deviation, and a shape deviation, and send the deviation to the adjustment device 52. The adjustment device 52 adjusts the parameters of the imaging lens assembly 30 according to the deviation.

[0043] Alternatively, if Figure 6 As shown, the adjusting device 52 includes: a guide rail 521, and the imaging lens assembly 30 is arranged on the guide rail 521; a controller 522, connected to the image acquisition device 51, and used to form a control instruction based on the target light spot and the measurement size and send it to the adjusting member 523; the adjusting member 523, connected to the imaging lens assembly 30, and used to adjust the parameters of the imaging lens assembly 30 based on the control instruction; a measuring member, used to measure the parameters of the imaging lens assembly 30.

[0044] Here, each lens in the imaging lens assembly 30 is movably arranged on the guide rail 521 through the adjusting member 523, and each adjusting member 523 is provided with the measuring member, such as a position sensor, and each measuring member is connected to the controller 522 to feedback the distance moved each time by the adjusting member 523, as well as the parameters of the imaging lens assembly 30, including the distance between the lenses in the imaging lens assembly 30, or the distance between the imaging lens assembly 30 and the light source 10.

[0045] It should be noted that the adjustment member 523 corresponds to the lens that needs to be adjusted in the imaging lens assembly 30. It can be understood that when adjusting, the position of the preset lens in the imaging lens assembly 30 can be fixed and remain unchanged, and it is only necessary to adjust the positions of other lenses except the preset lens to achieve the adjustment of the size, shape, clarity, etc. of the target light spot.

[0046] The imaging system provided by the embodiment of the present invention matches the target light spot with the measured size and determines the parameters of the imaging lens assembly through the cooperation between the image acquisition device, the guide rail, the controller, the adjustment part, and the measuring part, thereby ensuring that after installation, the target light spot formed by the light source passing through the imaging lens assembly and the reflection assembly matches the exposure chip. In actual use, the matching degree and accuracy of the light spot irradiated on the exposure chip and the exposure chip are improved, thereby improving the adjustment efficiency.

[0047] Alternatively, if Figure 7 As shown, the reflective assembly 40 includes: a first reflector 41 and a second reflector 42 ; wherein the light emitted by the light source 10 is projected onto the projection surface 20 through the first reflector 41 and the second reflector 42 .

[0048] Alternatively, if Figure 7As shown, the imaging lens assembly 30 includes: a first lens 31, which is arranged between the light source 10 and the first reflector 41 and is close to the light source 10; a second lens 32, which is arranged between the first lens 31 and the first reflector 41; wherein the adjustment assembly 50 is used to adjust the distance between the second lens 32 and the first lens 31.

[0049] Specifically, see Figure 7 , the imaging lens assembly 30 includes a first lens 31 and a second lens 32, and the reflection assembly includes a first reflector 41 and a second reflector 42. The first reflector 41 is arranged at the light outlet of the second lens 32, and is used to change the optical path to make the system more compact, and preferably a 45° reflector is used; the second reflector 42 is arranged between the light outlet of the imaging lens assembly 30 and the projection surface 20, and is an angle-adjustable reflector, and is used to adjust the position and angle of the target light spot on the projection surface 20. The first lens 31 and the second lens 32 form a collimating lens group, which expands and shapes the point light source emitted by the light source 10 to obtain a uniformly distributed rectangular light spot. Among them, the distance between the first lens 31 and the light source 10 can adjust the clarity of the target light spot on the projection surface 20, and the distance between the first lens 31 and the second lens 32 can adjust the size of the target light spot.

[0050] Optionally, the adjustment component 50 is further used to adjust the distance between the first lens 31 and the light source 10 to adjust the clarity of the target light spot.

[0051] The imaging system provided by the embodiment of the present invention shortens the optical path of the imaging system through the first reflector and the second reflector, and has a more compact structure.

[0052] The imaging system provided by the embodiment of the present invention utilizes the first lens and the second lens to expand and shape the light emitted by the light source, thereby ensuring that the target light spot is evenly distributed, thus providing a basis for subsequent chip exposure.

[0053] Alternatively, if Figure 7 As shown, the imaging lens assembly further includes: a third lens 33, which is arranged between the first reflector 41 and the second reflector 42; wherein the adjustment assembly 50 is also used to adjust the distance between the third lens 33 and the projection surface 20.

[0054] Here, the third lens 33 and the first reflector 41 are at the same horizontal point, and are used to collimate the light reflected by the first reflector 41. The adjustment component 50 adjusts the distance between the third lens 33 and the projection surface 20, so that the distance between the third lens 33 and the projection surface 20 in the direction perpendicular to the projection surface 20 is a constant value, which is consistent with the working optical path on the actual device.

[0055] Optionally, the metric size is a size of a target digital micromirror device.

[0056] The Digital Micromirror Device (DMD) is composed of multiple reflective mirrors. The number of mirrors is determined by the display resolution. One mirror corresponds to one pixel. Grayscale graphics are created by controlling the on / off duty cycle of each mirror. Due to its high reflectivity, high contrast, and high precision, it is widely used in photolithography technology. Compared with traditional photolithography, the photolithography technology using DMD does not require a mask. Its main principle is to write the required photolithography pattern into the DMD chip 01 through software through a computer, and change the angle of the mirror on the DMD chip 01 according to the distribution of black and white pixels of the image. The light source is irradiated onto the DMD chip 01 to form a light pattern consistent with the required pattern, and finally the light pattern is projected onto the substrate surface. In order to ensure the accuracy of the light pattern, the target light spot 02 irradiated by the light source to the DMD chip 01 needs to be aligned with the DMD chip 01 to ensure that the target light spot 02 covers the surface of the DMD chip 01 (such as Figure 8 shown).

[0057] In a specific embodiment, the size of the DMD chip 01 is 20.736mm*3.629mm, and the size of the metric size can be set to 21mm*4mm to ensure the margin. After adjusting the target light spot 02 to match the metric size using the above imaging system, the parameters of the imaging lens assembly 30 are measured, and the parameters include the distance between the first lens 31 and the light source, or the distance between the first lens 31 and the second lens. During installation, the target light spot matching the DMD chip can be obtained using the parameters.

[0058] The imaging system provided by the embodiment of the present invention can be applied to a digital micro-mirror device. Through the cooperation of the above-mentioned components, after installation, the light spot irradiated onto the digital micro-mirror device is uniform and matches the digital micro-mirror device, providing a basis for the subsequent operation of the digital micro-mirror device.

[0059] According to a second aspect, an embodiment of the present invention provides a method for determining imaging lens parameters, which can be applied to the controller 522 described in the first aspect, such as Fig. 9As shown, the method comprises the following steps:

[0060] S11, obtaining the metric dimensions on the projection surface and the target light spot formed on the projection surface after the light source passes through the imaging lens assembly.

[0061] Here, the metric size can be acquired by the controller 522 from the projection surface through an image acquisition device, or can be preset in the controller 522 in advance, or can be acquired from the outside through other means; the target light spot formed on the projection surface after the light source passes through the imaging lens assembly can be acquired by the controller 522 from the projection surface in real time through an image acquisition device, or can be preset in the controller 522 in advance, or can be acquired from the outside through other means. Regardless of how the controller 522 acquires the metric size and the target light spot formed on the projection surface after the light source passes through the imaging lens assembly, it is only necessary to ensure that the controller 522 can obtain the metric size and the target light spot formed on the projection surface after the light source passes through the imaging lens assembly.

[0062] Here, the specific contents about the measurement size and the target light spot formed on the projection surface after the light source passes through the imaging lens assembly can be found in the imaging system described in the first aspect, which will not be repeated here.

[0063] S12, based on the metric size and the target light spot, adjusting the parameters of the imaging lens assembly so that the metric size matches the target light spot, to determine the parameters of the imaging lens assembly. The parameters include the distance between lenses in the imaging lens assembly, or the distance between the imaging lens assembly and the light source.

[0064] Here, the controller 522 may adjust the parameters of the imaging lens assembly according to the difference between the measured size and the target light spot, and specifically, may include the following steps:

[0065] S121, comparing the target light spot with the measured dimension to determine the difference between the target light spot and the measured dimension. Here, the controller 522 can establish a model of the target light spot and the measured dimension in the same coordinate system, and perform coordinate comparison to obtain the deviation between the target light spot and the measured dimension, such as size deviation, shape deviation, etc.

[0066] S122, forming an adjustment instruction based on the difference, and sending it to the adjustment member in the adjustment assembly, so that the adjustment member adjusts the parameters of the imaging lens assembly. Specifically, the imaging lens assembly is movably arranged on a guide rail by the adjustment member, and the adjustment member is provided with a position sensor, and the parameters of the imaging lens assembly are adjusted through the cooperation of the guide rail, the position sensor and the controller 522.

[0067] Further, after the light source passes through the imaging lens assembly and the reflection assembly, a target light spot is formed on the projection surface, the reflection assembly includes a first reflector and a second reflector, and the light emitted by the light source is projected onto the projection surface through the first reflector and the second reflector; the imaging lens assembly includes a first lens and a second lens, the first lens is arranged between the light source and the first reflector and close to the light source, and the second lens is arranged between the first lens and the first reflector; wherein the difference includes a size difference between the target light spot and the measured size, and / or a clarity difference between the target light spot and the measured size;

[0068] The S122 includes:

[0069] (1) forming a first adjustment instruction based on the size difference and sending the first adjustment instruction to the adjustment component so that the adjustment component adjusts the distance between the first lens and the second lens; specifically, in combination with the imaging system described in the first aspect, the distance between the first lens and the second lens can adjust the size of the target light spot.

[0070] (2) Based on the clarity difference, a second adjustment instruction is formed and sent to the adjustment component, so that the adjustment component adjusts the distance between the first lens and the light source. Specifically, in combination with the imaging system described in the first aspect, the distance between the first lens and the light source can adjust the clarity of the target light spot.

[0071] It should be noted that there is no order of precedence for the above (1) and (2), and they can be performed simultaneously or only one of them can be performed. Generally, the clarity of the target light spot can be adjusted first to ensure that the controller 522 can obtain a clear image of the target light spot, and then the size can be adjusted.

[0072] The method for determining the parameters of an imaging lens provided in an embodiment of the present invention obtains the metric size on the projection surface and the target light spot formed on the projection surface after the light source passes through the imaging lens assembly; based on the metric size and the target light spot, the parameters of the imaging lens assembly are adjusted so that the metric size matches the target light spot, so as to determine the parameters of the imaging lens assembly. Compared with the method in the prior art, the present invention uses the projection surface to receive the target light spot, and adjusts the parameters of the imaging lens assembly through the adjustment assembly so that the target light spot matches the metric size, which is equivalent to directly adjusting the light spot irradiated onto the exposure chip without the need for other optical lenses, and the adjustment accuracy is higher, the time is shorter, and the reliability of light spot matching is higher.

[0073] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. An imaging system, characterized in that: include: A light source and a projection surface, wherein the projection surface has a metric dimension; An imaging lens assembly is formed on the optical path between the light source and the projection surface, and the light emitted by the light source forms a target light spot on the projection surface after passing through the imaging lens assembly; an adjusting component connected to the imaging lens assembly, the adjusting component being used to adjust the parameters of the imaging lens assembly based on the target light spot and the metric size so that the metric size matches the target light spot, so as to determine the parameters of the imaging lens assembly; wherein the parameters include the distance between lenses in the imaging lens assembly, or the distance between the imaging lens assembly and the light source; The adjustment component comprises: An image acquisition device, used for acquiring the target light spot on the projection surface, wherein the image acquisition device has an image processor, used for comparing the target light spot with the measured size to obtain a deviation; An adjusting device is connected to the image acquisition device and the imaging lens assembly, and the adjusting component is used to adjust the parameters of the imaging lens assembly based on the deviation.

2. The imaging system according to claim 1, characterized in that Also includes: A reflective component is formed on the optical path between the light source and the projection surface. The light emitted by the light source forms a target light spot on the projection surface after passing through the imaging lens component and the reflective component.

3. The imaging system according to claim 2, characterized in that The regulating device comprises: A guide rail, on which the imaging lens assembly is arranged; A controller connected to the image acquisition device, and configured to form a control instruction based on the target light spot and the measurement size and send it to the adjustment member; The adjusting member is connected to the imaging lens assembly and is used to adjust the parameters of the imaging lens assembly based on the control instruction; The measuring component is used to measure the parameters of the imaging lens assembly.

4. The imaging system according to claim 2, characterized in that: The reflective component comprises: A first reflector and a second reflector; wherein the light emitted by the light source is projected onto the projection surface through the first reflector and the second reflector.

5. The imaging system according to claim 4, characterized in that: The imaging lens assembly comprises: a first lens, disposed between the light source and the first reflector and close to the light source; The second lens is arranged between the first lens and the first reflector; wherein the adjustment component is used to adjust the distance between the second lens and the first lens.

6. The imaging system according to claim 5, characterized in that: The adjustment component is also used to adjust the distance between the first lens and the light source to adjust the clarity of the target light spot.

7. The imaging system according to claim 5, characterized in that: The imaging lens assembly further comprises: The third lens is arranged between the first reflector and the second reflector; wherein the adjustment component is also used to adjust the distance between the third lens and the projection surface.

8. The imaging system according to claim 1, characterized in that: The metric size is the size of the target digital micromirror device.

9. A method for determining imaging lens parameters, characterized in that: include: Acquire the metric dimensions on the projection surface and the target light spot formed on the projection surface after the light source passes through the imaging lens assembly; Based on the metric size and the target light spot, the parameters of the imaging lens assembly are adjusted so that the metric size matches the target light spot, so as to determine the parameters of the imaging lens assembly; wherein the parameters include the distance between lenses in the imaging lens assembly, or the distance between the imaging lens assembly and the light source; wherein, including: Comparing the target light spot with the measured size to determine the difference between the target light spot and the measured size; An adjustment instruction is formed based on the difference and sent to an adjustment member in the adjustment component, so that the adjustment member adjusts the parameters of the imaging lens assembly.

10. The method according to claim 9, characterized in that After the light source passes through the imaging lens assembly and the reflection assembly, a target light spot is formed on the projection surface, the reflection assembly includes a first reflector and a second reflector, and the light emitted by the light source is projected onto the projection surface through the first reflector and the second reflector; the imaging lens assembly includes a first lens and a second lens, the first lens is arranged between the light source and the first reflector and close to the light source, and the second lens is arranged between the first lens and the first reflector; wherein the difference includes a size difference between the target light spot and the measured size, and / or a clarity difference between the target light spot and the measured size; The forming of an adjustment instruction based on the difference and sending the instruction to an adjustment component in an adjustment assembly so that the adjustment component adjusts the parameters of the imaging lens assembly comprises: forming a first adjustment instruction based on the size difference, and sending the first adjustment instruction to the adjustment component so that the adjustment component adjusts the distance between the first lens and the second lens; and / or, A second adjustment instruction is formed based on the clarity difference and sent to the adjustment component, so that the adjustment component adjusts the distance between the first lens and the light source.

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