Ultra-precision jet polishing device and method for complex surface devices

Abstract

The present invention discloses an ultra-precision jet polishing device for complex surface devices, which includes a liquid supply system and a polishing nozzle component installed on a six-axis motion platform. The liquid supply system sprays the pre-mixed polishing liquid onto the surface of the workpiece to be processed fixed on the workbench through the jet nozzle at a specified pressure and speed. The particles in the polishing liquid interact with the surface of the workpiece to be processed, performing nano-removal of materials, and finally achieving the removal and finishing processing of the surface material of the workpiece to be processed. In the present invention, the jet nozzle has various different structural forms such as an eccentric single-hole structure, an eccentric multi-hole structure, and a non-eccentric multi-hole structure, which can be selected according to needs. Using the jet polishing device of the present invention for polishing processing can ensure that the liquid supply system can provide stable polishing liquid such as pressure, concentration, temperature, flow rate, pH value, etc. during the ultra-precision jet polishing process of complex surface devices, and ensure the polishing quality of the workpiece surface.

Description

Technical Field

[0001] The present invention belongs to the technical field of surface polishing. More specifically, it designs an ultra-precision polishing device and method for complex-shaped surface devices. Background Art

[0002] With the development of modern optical industry and optical technology, aspherical optical elements are widely used in advanced optical telescopes, high-sensitivity sensors, high-resolution cameras and other fields due to their excellent optical properties. The demand for high-performance and high-quality complex-shaped surface optical elements is increasing continuously, which puts higher and higher requirements on the processing equipment and processing technology of complex-shaped surface parts. At present, there are many polishing methods for complex-shaped surface devices, such as abrasive water jet polishing, but there are many deficiencies in the existing technology. Since the material removal rate of jet polishing is relatively small, the processing time is long, and it is impossible to ensure that parameters such as the concentration, temperature, pressure and pH value of the polishing liquid remain unchanged during the processing, the polishing quality cannot be guaranteed. For complex-shaped surface devices, the machine tool needs to have sufficient degrees of freedom during the processing to complete the processing of each surface. In addition, during the processing with a single nozzle, it is not easy to obtain an ideal removal function, which will affect the polishing quality, and the processing efficiency of a single nozzle is low. Summary of the Invention

[0003] Aiming at the above-mentioned existing technology, the purpose of the present invention is to solve the deficiencies in the existing jet polishing technology, ensure that the liquid supply system can provide a polishing liquid with stable pressure, concentration, temperature, flow rate, pH value, etc. during the ultra-precision jet polishing process of complex-shaped surface devices, and ensure the polishing quality of the workpiece surface; the liquid supply system sprays the pre-mixed polishing liquid onto the surface of the workpiece to be processed fixed on the workbench at a specified pressure and speed, and uses the interaction between the particles in the suspension and the workpiece to perform nano-removal of materials, and finally realizes the purpose of material removal and finishing processing. By switching between single nozzles of different sizes and multi-nozzle arrays of different types, different devices can be processed to meet the processing requirements of different devices, greatly improving the polishing efficiency; the six-axis motion platform can make the nozzle move with 6 degrees of freedom, which can meet the processing requirements of complex-shaped surface devices.

[0004] In order to solve the above technical problems, an ultra-precision jet polishing device for complex-shaped surface devices proposed by the present invention includes a liquid supply system and a polishing nozzle component installed on a six-axis motion platform. The liquid supply system sprays the pre-mixed polishing liquid onto the surface of the workpiece to be processed fixed on the workbench at a specified pressure and speed through the jet nozzle, and the particles in the polishing liquid interact with the surface of the workpiece to be processed to perform nano-removal of materials, and finally realize the removal and finishing processing of the surface material of the workpiece to be processed.

[0005] Furthermore, for the ultra-precision jet polishing device for complex-shaped surface devices of the present invention,

[0006] The liquid supply system includes a polishing liquid supply control system, a stirring device, a precision chiller, a concentration compensation device, a pH adjustment device, a polishing liquid container, a pressure and flow rate adjustment device, an output pump, a pressure gauge, a concentration measuring device, a temperature sensor, a flow rate sensor, and a pH measuring device; the precision chiller, the concentration compensation device, and the pH adjustment device are all connected to the polishing liquid container through a liquid supply pipeline, the stirring device is arranged inside the polishing liquid container, the input end of the output pump is connected to the polishing liquid container, and the output end of the output pump transports the polishing liquid to the input end of the rotary joint of the polishing nozzle component through a liquid supply pipeline; the workbench is provided with a polishing liquid return output port, and a polishing liquid recovery pipeline is connected between the polishing liquid return output port and the polishing liquid container to the recovery device; the pressure gauge, the concentration measuring device, the temperature sensor, the flow rate sensor, and the pH measuring device are arranged on the liquid supply pipeline section at the outlet of the output pump to collect relevant data signals, and feedback the collected data signals to the polishing liquid supply control system, and the polishing liquid supply control system controls the states of the stirring device, the precision chiller, the concentration compensation device, the pH adjustment device, and the pressure and flow rate adjustment device according to the collected data signals to ensure that the liquid supply system sprays the pre-mixed polishing liquid onto the surface of the workpiece to be processed through the jet nozzle at a specified pressure, concentration, temperature, pH value, and speed.

[0007] A filter I is provided on the liquid supply pipeline section between the output pump and the polishing liquid container, and a filter II is provided on the polishing liquid recovery pipeline section where the recovery device is connected to the polishing liquid container.

[0008] A damper is arranged on the liquid supply pipeline section between the output pump and the polishing nozzle component to reduce the pressure pulsation and flow rate pulsation of the liquid supply pipeline and ensure the stability of the pressure and flow rate of the sprayed polishing liquid.

[0009] An overflow valve is arranged on the liquid supply pipeline section between the damper and the polishing nozzle component to achieve the pressure overload protection of the liquid supply system.

[0010] The polishing nozzle component includes a rotary joint, a rotating main shaft, a jet nozzle, and a through-type motor; the rotating main shaft is a hollow shaft, one end of the rotating main shaft is connected to the output end of the rotary joint, and the other end of the rotating main shaft is connected to the jet nozzle; the through-type motor includes a hollow rotor and a stator, the hollow rotor is sleeved on the rotating main shaft and is fixedly connected to the rotating main shaft by a threaded connection; upper end covers and lower end covers are respectively fixed at the upper and lower ends of the stator; rolling bearings are respectively provided between the upper end cover and the lower end cover and the rotating main shaft; when the hollow rotor rotates, power is transmitted to the rotating main shaft, thereby driving the jet nozzle to rotate; at the same time, the output end of the rotary joint rotates following the rotating main shaft, and the input end of the rotary joint is fixed; during polishing, first, the polishing nozzle component is installed on a six-axis motion platform, the liquid supply system transports polishing liquid to the input end of the rotary joint through a liquid supply pipeline, and then enters the hollow cavity of the rotating main shaft through the output end of the rotary joint, and the polishing liquid reaches the jet nozzle through the hollow cavity of the rotating main shaft and is sprayed onto the surface of the workpiece through the spray holes of the jet nozzle at a certain pressure and speed.

[0011] The six-axis motion platform is provided with a slider, a first connecting rod, and a second connecting rod. The slider is connected to one end of the first connecting rod, the other end of the first connecting rod is connected to one end of the second connecting rod, and the other end of the second connecting rod is connected to an end plate of a right-angle support mounting seat. The polishing nozzle component is fixed on the other end plate of the right-angle support mounting seat.

[0012] The jet nozzle includes a main body. A polishing liquid channel and a liquid collecting cavity that are coaxially penetrated with the hollow cavity of the rotating main shaft are provided in the main body from top to bottom. Jet spray holes are provided at the bottom of the liquid collecting cavity; according to the structural form of the jet spray holes provided at the bottom of the liquid collecting cavity, the jet nozzle has the following several situations:

[0013] 1) The jet nozzle with an eccentric single-hole structure: The number of jet spray holes is one. The center of the jet spray hole is eccentric relative to the axis of the polishing liquid channel, and the axis of the jet spray hole is inclined to the lower end surface of the jet nozzle; during polishing, under the drive of the rotating main shaft, the jet nozzle rotates, and the jet flow ejected by the jet nozzle rotates around the removal spot formed on the workpiece, so that the polishing liquid jet forms a Gaussian-like removal function.

[0014] 2) Jet nozzle with eccentric porous structure: The number of jet holes is multiple, and the extension lines of the axes of the multiple jet holes intersect at point O, which is on the axis of the polishing liquid channel and is located below the multiple jet holes; during polishing, by adjusting the distance between the jet nozzle and the workpiece, point O is made to fall on the workpiece surface. Under the drive of the rotating main shaft, the jet nozzle rotates, so that the jet of polishing liquid forms a Gaussian removal function to improve the polishing efficiency.

[0015] 3) Jet nozzle with non - eccentric porous structure: The number of jet holes is multiple, and the axes of the multiple jet holes are all perpendicular to the lower end face of the jet nozzle. During polishing, under the drive of the rotating main shaft, the jet nozzle rotates, so as to uniformly remove the workpiece surface and achieve efficient polishing.

[0016] For the ultra - precision jet polishing device for complex - shaped surface devices of the present invention, the aperture of the jet hole is 0.05 - 5 mm; the included angle between the axis of the jet hole of the jet nozzle and the lower end face of the jet nozzle is 30 - 90°.

[0017] Meanwhile, a polishing method using the above - mentioned ultra - precision jet polishing device for complex - shaped surface devices is also proposed in the present invention, and the steps are as follows:

[0018] Step 1: Select a suitable jet nozzle, install it at the lower end of the rotating main shaft, assemble the polishing nozzle component, install the polishing nozzle component on the six - axis motion platform through the installation component, clamp the workpiece to be polished at a suitable position on the workbench, adjust the position of the workpiece, and clamp the workpiece tightly; start the motion platform and adjust the relative position of the jet nozzle and the workpiece.

[0019] Step 2: Start the stirring device, then add an appropriate amount of prepared polishing liquid to the polishing liquid container. After the polishing liquid is stirred evenly, start the output pump; set the pressure, concentration, flow rate, temperature and pH value of the polishing liquid through the polishing liquid supply control system, and set a suitable rotation speed of the jet nozzle according to the material, surface shape and size characteristics of the workpiece to be polished, and the nozzle starts to rotate.

[0020] Step 3: The pressurized polishing liquid sprays out from the jet nozzle. At this time, the polishing liquid is not yet stable. The polishing liquid supply control system performs closed - loop control. After the pressure, concentration, temperature, pH value and flow rate of the polishing liquid are stable, start the six - axis motion platform, adjust the motion platform, and run the processing program to make the jet spray onto the workpiece and impact the workpiece surface to start polishing; during the polishing process, the movement trajectory of the jet nozzle is controlled by the numerical control system of the six - axis motion platform, and precise polishing is achieved by controlling the nozzle residence time and the movement trajectory.

[0021] Step 4: After the polishing liquid impacts the surface of the workpiece, it flows into the recycling device and re-enters the polishing liquid container through the polishing liquid recycling pipeline for recycling.

[0022] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0023] (1) The ultra-precision jet polishing device for complex surface devices proposed by the present invention adopts closed-loop control, which can ensure the stability of the pressure, concentration, flow rate, temperature and pH value of the polishing liquid during the jet polishing process, and improve the machining quality of the workpiece surface.

[0024] (2) The device of the present invention can adjust the relative position between the nozzle and the workpiece through a six-axis motion platform, and can polish the surface of complex surface devices.

[0025] (3) During the processing of the device of the present invention, by replacing single nozzles with different sizes and multi-nozzle arrays of different types, it can be applied to process different workpieces, greatly improving the polishing efficiency of the workpieces. Brief Description of the Drawings

[0026] Figure 1 is a schematic diagram of the liquid supply system of the ultra-precision jet polishing device for complex surface devices of the present invention;

[0027] Figure 2 is a three-dimensional schematic diagram of the motion platform of the ultra-precision jet polishing device for complex surface devices of the present invention;

[0028] Figure 3 is a front view of the motion platform of the ultra-precision jet polishing device for complex surface devices of the present invention;

[0029] Figure 4 is a schematic diagram of the structure of the polishing nozzle component in the present invention;

[0030] Figure 5-1 is a schematic diagram of the first structural form of the jet nozzle of the polishing nozzle component in the present invention;

[0031] Figure 5-2 is a schematic diagram of the second structural form of the jet nozzle of the polishing nozzle component in the present invention;

[0032] Figure 5-3 is a schematic diagram of the third structural form of the jet nozzle of the polishing nozzle component in the present invention;

[0033] Figure 6 is a schematic diagram of the structure of the nozzle mounting component in the present invention.

[0034] In the figure:

[0035] 1 - Polishing liquid supply control system 2 - Stirring device 3 - Precision chiller

[0036] 4 - Concentration compensation device 5 - PH adjustment device 6 - Polishing liquid container

[0037] 7 - Pressure and flow rate adjustment device 8 - Filter Ⅰ 9 - Output pump

[0038] 10 - Filter Ⅱ 11 - Pressure gauge 12 - Concentration measurement device

[0039] 13 - Temperature sensor 14 - Flow sensor 15 - PH measurement device

[0040] 16 - Damper 17 - Overflow valve 18 - Recycling device

[0041] 20 - Polishing nozzle component 21 - Rotary joint 22 - Hollow rotating shaft

[0042] 23 - Upper end cover 24 - First rolling bearing 25 - Rotor

[0043] 26 - Stator 27 - Second rolling bearing 28 - Lower end cover

[0044] 29 - Sealing gasket 30 - Jet nozzle 101 - Polishing liquid channel

[0045] 102 - Liquid collection chamber 103 - Jet hole 104 - Annular groove

[0046] 31 - Slide block 32 - First connecting rod 33 - Second connecting rod

[0047] 34 - Right - angle support mounting base 41 - Base 42 - Workbench Detailed implementation manners

[0048] The following further describes the present invention in conjunction with the attached drawings and specific embodiments, but the following embodiments are by no means restrictive to the present invention.

[0049] The present invention provides a super - precision jet polishing device for complex - shaped surface devices, including a liquid supply system and a polishing nozzle component 20 installed on a six - axis motion platform. The liquid supply system sprays the pre - mixed polishing liquid onto the surface of a workpiece to be processed fixed on a workbench 42 at a specified pressure and speed through the polishing nozzle. The particles in the polishing liquid interact with the surface of the workpiece to be processed, performing nano - removal of materials, and finally achieving the removal and finishing processing of the surface material of the workpiece to be processed.

[0050] As Figure 1As shown in the figure, the liquid supply system includes a polishing liquid supply control system 1, a stirring device 2, a precision chiller 3, a concentration compensation device 4, a PH adjustment device 5, a polishing liquid container 6, a pressure and flow rate adjustment device 7, an output pump 9, a pressure gauge 11, a concentration measuring device 12, a temperature sensor 13, a flow rate sensor 14, and a PH measuring device 15; the precision chiller 3, the concentration compensation device 4, and the PH adjustment device 5 are all connected to the polishing liquid container 6 through a liquid supply pipeline, the stirring device 2 is arranged inside the polishing liquid container 6, the input end of the output pump 9 is connected to the polishing liquid container 6, and the output end of the output pump 9 transports the polishing liquid to the input end of the rotary joint 21 of the polishing nozzle component 20 through a liquid supply pipeline; the workbench 42 is provided with a polishing liquid return output port, and the polishing liquid return output port and the polishing liquid container 6 are connected to the recovery device 18 through a polishing liquid recovery pipeline; the pressure gauge 11, the concentration measuring device 12, the temperature sensor 13, the flow rate sensor 14, and the PH measuring device 15 are arranged on the liquid supply pipeline section at the outlet of the output pump 9 to collect relevant data signals and feedback the collected data signals to the polishing liquid supply control system 1, and the polishing liquid supply control system 1 controls the states of the stirring device 2, the precision chiller 3, the concentration compensation device 4, the PH adjustment device 5, and the pressure and flow rate adjustment device 7 according to the collected data signals, including:

[0051] 1) When the pressure gauge 11 detects a change in the polishing liquid pressure within the system, the polishing liquid supply control system 1 can adjust the polishing liquid pressure through the pressure adjustment device 7, thereby ensuring the stability of the polishing liquid pressure.

[0052] 2) When the concentration measuring device 12 detects a change in the polishing liquid concentration, the polishing liquid supply control system 1 can adjust the polishing liquid concentration through the concentration compensation device 4, thereby ensuring the stability of the polishing liquid concentration.

[0053] 3) When the flow rate sensor 14 detects a change in the flow rate of the polishing liquid, the polishing liquid supply control system 1 can adjust the flow rate and speed of the output pump 9 to adjust the polishing liquid flow rate, thereby ensuring the stability of the polishing liquid flow rate.

[0054] 4) When the temperature of the polishing liquid increases due to environmental factors or the like, the temperature sensor 13 feeds back the signal to the polishing liquid supply control system 1, and the polishing liquid supply control system 1 can adjust the polishing liquid temperature by controlling the precision chiller, thereby ensuring the stability of the polishing liquid temperature.

[0055] 5) When the PH measuring device 15 detects a change in the PH value of the polishing liquid, the polishing liquid supply control system 1 can adjust the PH value of the polishing liquid through the PH adjustment device 5, thereby ensuring the stability of the PH value of the polishing liquid.

[0056] Thus, it is ensured that the liquid supply system sprays the pre-mixed polishing liquid onto the surface of the workpiece to be processed through the jet nozzle at a specified pressure, concentration, temperature, pH value and speed.

[0057] The stirring device 2 is used to stir the polishing liquid in the polishing liquid container 6, which can prevent the abrasives in the polishing liquid from depositing and affecting the concentration of the polishing liquid.

[0058] The output pump 9 pumps out the polishing liquid from the polishing liquid container 6 through a pipeline and then pressurizes it. A filter I 8 is provided on the liquid supply pipeline section between the output pump 9 and the polishing liquid container 6. The filter I 8 can filter out the impurities in the polishing liquid container 6 to prevent the impurities from damaging the output pump 9, the liquid supply pipeline and the jet nozzle 30.

[0059] In order to reduce the vibration of the system, a damper 16 is provided on the liquid supply pipeline section between the output pump 9 and the polishing nozzle component 20. When the system is disturbed and the pressure and flow rate of the polishing liquid in the liquid supply pipeline fluctuate, the damper 16 can eliminate the vibration of the liquid supply pipeline, reduce the pressure pulsation and flow rate pulsation of the pressurized polishing liquid, ensure the stability of the pressure and flow rate of the polishing liquid sprayed by the jet nozzle 30, and thus ensure the polishing quality of the workpiece.

[0060] To ensure the safety of the system and prevent excessive pipeline pressure, an overflow valve 17 is provided on the liquid supply pipeline section between the damper 16 and the polishing nozzle component 20. When a failure occurs in the liquid supply system and the pressure of the polishing liquid in the liquid supply pipeline increases and exceeds the set value, the overflow valve 17 can overflow part of the polishing liquid to reduce the pressure in the liquid supply pipeline, thereby realizing the pressure overload protection of the liquid supply system and ensuring the safety of the liquid supply system.

[0061] The polishing liquid in the present invention can be recycled, reducing the processing cost. After the polishing liquid sprayed by the jet nozzle impacts the surface of the workpiece, it flows into the polishing liquid recovery device 18 under the workbench 42 and returns to the polishing liquid container 6 through the polishing liquid recovery pipeline for recycling. A filter II 10 is provided on the polishing liquid recovery pipeline section connecting the recovery device 18 and the polishing liquid container 6, which can filter out impurities to prevent the impurities from entering the polishing liquid container.

[0062] Such as Figure 2 and Figure 3As shown in the figure, the polishing nozzle component 20 in the present invention is mounted on a six-axis motion platform through a right-angle support mount 34; a slider 31, a first connecting rod 32 and a second connecting rod 33 are provided on the six-axis motion platform. The slider 31 is assembled on the six-axis motion platform. One end of the first connecting rod 32 is fixed to the slider 31. The other end of the second connecting rod 33 is connected to one end of the first connecting rod 32. The other end of the second connecting rod 32 is fixed to an end plate of the right-angle support mount 34. The lower end cover 28 of the polishing nozzle component 20 is fixed to the other end plate of the right-angle support mount 34.

[0063] As Figure 4 shown, the polishing nozzle component 20 includes a rotary joint 21, a rotating main shaft 22, a jet nozzle 30 and a through-type motor; the rotating main shaft 22 is a hollow shaft. One end of the rotating main shaft 22 is connected to the output end of the rotary joint 21. The other end of the rotating main shaft 22 is connected to the jet nozzle 30; the through-type motor includes a hollow rotor 25 and a stator 26. The hollow rotor 25 is sleeved on the rotating main shaft 22 and is fixedly connected to the rotating main shaft 22 by a threaded connection; upper end covers 23 and lower end covers 28 are respectively fixed to the upper and lower ends of the stator 26; rolling bearings are respectively provided between the upper end cover 23 and the lower end cover 28 and the rotating main shaft; when the hollow rotor 25 rotates, power is transmitted to the rotating main shaft 22, thereby driving the jet nozzle 30 to rotate; at the same time, the output end of the rotary joint 21 rotates following the rotating main shaft 22, and the input end of the rotary joint 21 is fixed; during polishing, first, the polishing nozzle component 20 is installed on the six-axis motion platform. The liquid supply system transports the polishing liquid to the input end of the rotary joint 21 through a liquid supply pipeline, and then enters the hollow cavity of the rotating main shaft 22 through the output end of the rotary joint 21. The polishing liquid reaches the jet nozzle 30 through the hollow cavity of the rotating main shaft 22 and is sprayed onto the surface of the workpiece through the spray holes of the jet nozzle 30 at a certain pressure and speed.

[0064] As Figure 5-1 , Figure 5-2 and Figure 5-3 shown, the jet nozzle 30 includes a main body. A polishing liquid channel 101 and a liquid collection cavity 102 that are coaxially penetrated with the hollow cavity of the rotating main shaft 22 are provided in the main body from top to bottom. A jet spray hole 103 is provided at the bottom of the liquid collection cavity 102. The jet nozzle 30 can replace single nozzles of different sizes or multi-nozzle arrays of different types according to the surface shape and size characteristics of the polished workpiece. A single nozzle is used for processing micro and small workpieces, and a multi-nozzle array can be used for processing relatively large workpieces, and is suitable for different workpieces, improving the efficiency of polishing. According to the structural form of the jet spray holes provided at the bottom of the liquid collection cavity 102, the jet nozzle has the following several situations:

[0065] 1) Jet nozzle with eccentric single-hole structure: As Figure 5-1 shown, the number of jet holes 103 is one, and the center of the jet hole 103 is eccentric relative to the axis of the polishing liquid channel 101. The axis of the jet hole 103 is inclined to the lower end surface of the jet nozzle. During polishing, the jet nozzle 30 rotates under the drive of the rotating main shaft 22, and the jet ejected by the jet nozzle 30 rotates around the removal spot formed on the workpiece, so that the polishing liquid jet forms a Gaussian-like removal function.

[0066] 2) Jet nozzle with eccentric multi-hole structure: As Figure 5-2 shown, the number of jet holes 103 is multiple, and the extension lines of the axes of the multiple jet holes 103 intersect at point O. The point O is on the axis of the polishing liquid channel 101 and is located below the multiple jet holes 103. During polishing, by adjusting the distance between the jet nozzle and the workpiece, the point O is made to fall on the workpiece surface. The jet nozzle 30 rotates under the drive of the rotating main shaft 2, so that the polishing liquid jet forms a Gaussian removal function to improve the polishing efficiency.

[0067] 3) Jet nozzle with non-eccentric multi-hole structure: As Figure 5-3 shown, the number of jet holes 103 is multiple, and the axes of the multiple jet holes 103 are all perpendicular to the lower end surface of the jet nozzle. During polishing, the jet nozzle 30 rotates under the drive of the rotating main shaft 2, so as to uniformly remove the workpiece surface and achieve high-efficiency polishing.

[0068] The aperture of the jet hole is 0.05 - 5 mm; the included angle between the axis of the jet hole of the jet nozzle 30 and the lower end surface of the jet nozzle is 30 - 90°.

[0069] The six-axis motion platform used in the present invention has three linear motion degrees of freedom X, Y, Z and three rotational degrees of freedom A, B, C. It includes a base 41 and a workbench 42. The workbench 42 can move along the X-axis direction; the workbench can rotate around the C-axis direction; the motion platform can drive the nozzle to move along the Y-axis and Z-axis directions; the motion platform can adjust the angle between the nozzle and the workpiece through the rotating shafts A and B; the motion platform has 6 degrees of freedom and can complete the surface polishing of complex-shaped devices.

[0070] Using the above-mentioned ultra-precision jet polishing device for complex-shaped devices proposed by the present invention for polishing, as Figure 1 、 Figure 2 and Figure 3 shown, the steps are as follows,

[0071] Step 1: Select a suitable jet nozzle 30, install it at the lower end of the rotating main shaft 22, assemble the polishing nozzle component 20, install the jet nozzle component 20 on the six-axis motion platform through the installation component, clamp the workpiece to be polished at a suitable position on the workbench 42, adjust the position of the workpiece, and clamp the workpiece tightly; Start the motion platform, adjust the relative position of the jet nozzle 30 and the workpiece; Avoid the jet nozzle 30 facing the workpiece.

[0072] Step 2: Start the stirring device 2, then add an appropriate amount of prepared polishing liquid to the polishing liquid container 6. After the polishing liquid is stirred evenly, start the output pump 9; Set the pressure, concentration, flow rate, temperature, and pH value of the polishing liquid through the polishing liquid supply control system 1, and set a suitable rotation speed for the jet nozzle 30 according to the material, surface shape, and dimensional characteristics of the workpiece to be polished, and the nozzle starts to rotate;

[0073] Step 3: The pressurized polishing liquid sprays out from the jet nozzle. At this time, the polishing liquid is not yet stable. The polishing liquid supply control system performs closed-loop control. After the pressure, concentration, temperature, pH value, and flow rate of the polishing liquid are stable, start the six-axis motion platform, adjust the motion platform, and run the processing program to make the jet spray onto the workpiece, impact the surface of the workpiece, and start the polishing process; During the polishing process, the movement trajectory of the jet nozzle is controlled by the numerical control system of the six-axis motion platform. By controlling the nozzle dwell time and the movement trajectory, precise polishing is achieved;

[0074] Step 4: After the polishing liquid impacts the surface of the workpiece, it flows into the recovery device 18 and re-enters the polishing liquid container 6 through the polishing liquid recovery pipeline for recycling.

[0075] Although the present invention has been described above in conjunction with the accompanying drawings, the present invention is not limited to the above specific embodiments. The above specific embodiments are merely illustrative and not restrictive. Under the inspiration of the present invention, those of ordinary skill in the art can also make many modifications without departing from the purpose of the present invention, and these all fall within the protection scope of the present invention.

Claims

1. An ultra-precision jet polishing device for complex surface components, characterized in that: The invention comprises a liquid supply system and a polishing nozzle component (20) mounted on a six-axis motion platform, wherein the liquid supply system sprays a premixed polishing liquid at a specified pressure and speed through the polishing nozzle component onto the surface of a workpiece to be processed fixed on a workbench, and particles in the polishing liquid interact with the surface of the workpiece to be processed to perform nano-removal of the material, thereby finally achieving removal and finishing of the surface material of the workpiece to be processed; The polishing nozzle component (20) includes a rotary joint (21), a rotating main shaft (22), a jet nozzle (30) and a through-type motor; the rotating main shaft (22) is a hollow shaft, one end of the rotating main shaft (22) is connected to the output end of the rotary joint (21), and the other end of the rotating main shaft (22) is connected to the jet nozzle (30); The through-type motor comprises a hollow rotor (25) and a stator (26), wherein the hollow rotor (25) is sleeved on the rotating main shaft (22) and is fixed to the rotating main shaft (22) by a threaded connection; an upper end cover (23) and a lower end cover (28) are fixed to the upper and lower ends of the stator (26), respectively; rolling bearings are respectively provided between the upper end cover (23) and the lower end cover (28) and the rotating main shaft; when the hollow rotor (25) rotates, power is transmitted to the rotating main shaft (22), thereby driving the jet nozzle (30) to rotate; at the same time, the output end of the rotary joint (21) rotates along with the rotating main shaft (22), and the input end of the rotary joint (21) is fixed; During polishing, first, the polishing nozzle component (20) is mounted on the six-axis motion platform, the liquid supply system delivers the polishing liquid to the input end of the rotary joint (21) through the liquid supply pipeline, and then enters the hollow cavity of the rotating spindle (22) through the output end of the rotary joint (21), and the polishing liquid reaches the jet nozzle (30) through the hollow cavity of the rotating spindle (22), and is sprayed onto the surface of the workpiece through the spray hole of the jet nozzle (30) at a certain pressure and speed; The jet nozzle (30) comprises a main body, wherein a polishing liquid channel (101) and a liquid collecting chamber (102) are provided from top to bottom in the main body and are coaxially connected to the hollow cavity of the rotating main shaft (22); a jet nozzle (103) is provided at the bottom of the liquid collecting chamber (102); A jet nozzle with an eccentric porous structure: the number of the jet nozzle holes (103) is multiple, and the axis extension lines of the multiple jet nozzle holes (103) intersect at point O, the point O is on the axis of the polishing liquid channel (101), and the point O is located below the multiple jet nozzle holes (103); during polishing, the distance between the jet nozzle and the workpiece is adjusted so that the point O falls on the surface of the workpiece, and the jet nozzle (30) rotates under the drive of the rotating spindle (22), so that the polishing liquid jet forms a Gaussian removal function to improve the polishing efficiency; The liquid supply system comprises a polishing liquid supply control system (1), a stirring device (2), a precision chiller (3), a concentration compensation device (4), a pH regulating device (5), a polishing liquid container (6), a pressure and flow regulating device (7), an output pump (9), a pressure gauge (11), a concentration measuring device (12), a temperature sensor (13), a flow sensor (14) and a pH measuring device (15); a damper (16) is provided on the liquid supply pipeline section between the output pump (9) and the polishing nozzle component (20) to reduce pressure pulsation and flow pulsation of the liquid supply pipeline, thereby ensuring stable pressure and flow of the sprayed polishing liquid; An overflow valve (17) is provided on the liquid supply pipe section between the damper (16) and the polishing nozzle component (20), thereby achieving pressure overload protection for the liquid supply system.

2. The ultra-precision jet polishing device for complex surface components according to claim 1 is characterized in that: The precision chiller (3), the concentration compensation device (4), and the pH adjustment device (5) are all connected to the polishing liquid container (6) through a liquid supply pipeline. The stirring device (2) is arranged in the polishing liquid container (6). The input end of the output pump (9) is connected to the polishing liquid container (6). The output end of the output pump (9) transports the polishing liquid to the input end of the rotary joint (21) of the polishing nozzle component (20) through the liquid supply pipeline. The workbench is provided with a polishing liquid reflux outlet, and the polishing liquid reflux outlet and the polishing liquid container (6) are connected to a recovery device (18) via a polishing liquid recovery pipeline; The pressure gauge (11), concentration measuring device (12), temperature sensor (13), flow sensor (14) and pH measuring device (15) are arranged on the liquid supply pipe section at the outlet of the output pump (9) to collect relevant data signals and feed the collected data signals back to the polishing liquid supply control system (1). The polishing liquid supply control system (1) controls the states of the stirring device (2), precision chiller (3), concentration compensation device (4), pH regulating device (5) and pressure and flow regulating device (7) according to the collected data signals to ensure that the liquid supply system sprays the premixed polishing liquid at a specified pressure, concentration, temperature, pH value and speed through the jet nozzle onto the surface of the workpiece to be processed.

3. The ultra-precision jet polishing device for complex surface components according to claim 2, characterized in that: A filter I (8) is provided on the liquid supply pipe section between the output pump (9) and the polishing liquid container (6), and a filter II (10) is provided on the polishing liquid recovery pipe section connecting the recovery device (18) and the polishing liquid container (6).

4. The ultra-precision jet polishing device for complex surface components according to claim 1, characterized in that: The six-axis motion platform is provided with a slider (31), a first connecting rod (32), and a second connecting rod (33). The slider (31) is connected to one end of the first connecting rod (32), the other end of the first connecting rod (32) is connected to one end of the second connecting rod (33), the other end of the second connecting rod (33) is connected to one end plate of a right-angle support mounting seat (34), and the polishing nozzle component (20) is fixed to the other end plate of the right-angle support mounting seat (34).

5. The ultra-precision jet polishing device for complex surface components according to claim 1, characterized in that: The aperture of the jet nozzle is 0.05-5 mm; the angle between the axis of the jet nozzle of the jet nozzle (30) and the lower end surface of the jet nozzle is 30-90 degrees.

6. A method for ultra-precision jet polishing of complex surface components, characterized in that: Using the ultra-precision jet polishing device for complex surface components as described in any one of claims 1 to 5, the steps of jet polishing are as follows: Step 1: Select a suitable jet nozzle (30), install it on the lower end of the rotating spindle (22), assemble the polishing nozzle component (20), install the polishing nozzle component (20) on the six-axis motion platform through the installation component, clamp the workpiece to be polished on the appropriate position of the workbench (42), adjust the position of the workpiece, and clamp the workpiece; Start the motion platform and adjust the relative position of the jet nozzle (30) and the workpiece; Step 2: Start the stirring device (2), then add an appropriate amount of prepared polishing liquid to the polishing liquid container (6), and after the polishing liquid is evenly stirred, start the output pump (9); set the pressure, concentration, flow rate, temperature and pH value of the polishing liquid through the polishing liquid supply control system (1), and set the appropriate speed of the jet nozzle (30) according to the material, surface shape and size characteristics of the workpiece to be polished, and the nozzle starts to rotate; Step 3: The pressurized polishing liquid is ejected from the jet nozzle. At this time, the polishing liquid is not stable. The polishing liquid supply control system uses closed-loop control. After the pressure, concentration, temperature, pH value and flow rate of the polishing liquid are stabilized, the six-axis motion platform is started, the motion platform is adjusted, and the processing program is run to make the jet spray onto the workpiece, impact the workpiece surface, and start the polishing process. The motion trajectory of the jet nozzle during the polishing process is controlled by the CNC system of the six-axis motion platform. By controlling the nozzle residence time and motion trajectory, precise polishing is achieved. Step 4: After impacting the workpiece surface, the polishing liquid flows into the recovery device (18) and enters the polishing liquid container (6) again through the polishing liquid recovery pipeline for recycling.

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