Substrate storage container

Abstract

This invention relates to a substrate storage container that ensures a tight seal relative to internal positive pressure and reduces particles generated by friction caused by opening and closing the lid. The substrate storage container comprises: a container body for storing a substrate; and a lid for closing an opening in the container body; wherein a first portion surrounding the opening in the container body and a second portion in the lid opposite to the first portion are non-contactly fitted to form a tortuous sealing structure.

Description

Technical Field

[0001] The invention relates to a substrate storage container. Background Art

[0002] The substrate storage container includes: a container body for storing a substrate; a cover for closing an opening of the container body; and an annular seal provided between the container body and the cover; and stores the substrate in an airtight state.

[0003] As such seals, there are known seals in which an extension piece is formed to form a substantially acute angle with the sealing surface on its extension line, a seal in which an extension piece is formed to be in contact with the sealing surface and bent on the outside of the substrate storage container, and a seal in which an extension piece is formed to be bent toward the outside of the opening front, etc. (for example, refer to Patent Documents 1 and 2).

[0004] These seals have good sealing performance because the extended piece is deformed in the direction of being pressed toward the sealing surface when the inside of the substrate storage container is under negative pressure, in other words, when the external pressure is high.

[0005] Prior art

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Publication No. 2002-068364

[0008] Patent Document 2: Japanese Patent Publication No. 2008-062979 Summary of the invention

[0009] Technical problem to be solved by the invention

[0010] However, in the conventional technology described above, it is difficult to reduce particles generated by friction caused by opening and closing the cover while ensuring sealing performance relative to the positive pressure inside. The seal is formed of an elastomer or the like, and particles are relatively easy to generate due to friction. In addition, when a purge gas such as an inert gas is supplied to the inside of the substrate storage container, that is, when the inside of the substrate storage container becomes a positive pressure, the extension sheet is deformed in the direction of peeling off from the sealing surface, so the sealing performance may be reduced.

[0011] Therefore, in one embodiment, the present invention aims to ensure sealing against the positive pressure inside and reduce particles generated by friction caused by opening and closing of the cover.

[0012] Technical means to solve technical problems

[0013] In one technical solution, a substrate storage container is provided, comprising: a container body for storing substrates; and a cover body for closing an opening of the container body; wherein a first portion around the opening in the container body and a second portion of the cover body opposite to the first portion are at least partially non-contactably matched to form a labyrinth seal structure.

[0014] Effects of the Invention

[0015] In one embodiment, according to the present invention, it is possible to ensure sealing performance against internal positive pressure and reduce particles generated by friction caused by opening and closing of the cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is an exploded schematic perspective view showing a substrate storage container according to one embodiment.

[0017] Figure 2 It is a schematic cross-sectional view showing a labyrinth seal structure according to one embodiment.

[0018] Figure 3 Yes means Figure 2 An illustration of the sealing effect of the labyrinth seal structure shown.

[0019] Figure 4 It is a schematic cross-sectional view showing a labyrinth seal structure according to another embodiment.

[0020] Figure 5 It is a schematic cross-sectional view showing a labyrinth seal structure according to another embodiment.

[0021] Figure 6 It is a schematic cross-sectional view showing a labyrinth seal structure according to another embodiment.

[0022] Fig. 7A It is a schematic cross-sectional view showing a labyrinth seal structure according to another embodiment.

[0023] Figure 7B Yes means Fig. 7A An illustration of the effect of the structure.

[0024] Figure 8 It is a schematic cross-sectional view showing a labyrinth seal structure 70 according to another embodiment.

[0025] Fig. 9 It is a schematic cross-sectional view showing a labyrinth seal structure 70 according to another embodiment.

[0026] Fig.10It is a schematic cross-sectional view showing a labyrinth seal structure 70 according to another embodiment.

[0027] Fig.11 It is a schematic cross-sectional view showing a labyrinth seal structure 70 according to another embodiment.

[0028] Fig.12 It is a schematic cross-sectional view showing a labyrinth seal structure 70 according to another embodiment.

[0029] Fig.13 It is a schematic cross-sectional view showing a labyrinth seal structure 70 according to another embodiment.

[0030] Fig.14 It is a schematic cross-sectional view showing a labyrinth seal structure 70 according to another embodiment.

[0031] Fig.15 It is a schematic cross-sectional view showing a labyrinth seal structure 70 according to another embodiment.

[0032] Description of Reference Numerals

[0033] 1 Substrate storage container

[0034] 10 Container body

[0035] 10C Container body

[0036] 11 Opening

[0037] 12 Sealing surface

[0038] 13 Support

[0039] 14 Robot flange

[0040] 15 Manual handle

[0041] 18 Air supply valve

[0042] 19 Exhaust valve

[0043] 20 Cover

[0044] 21 Cover body

[0045] 26 Locking mechanism

[0046] 27 Plate

[0047] 30 Front Retainer

[0048] 70A labyrinth seal structure

[0049] 101 Surface

[0050] 102 Surface

[0051] 110 First Part

[0052] 210 Second Part

[0053] 211 Surface

[0054] 212 Surface

[0055] 701 Narrow area

[0056] 702 Expansion

[0057] 710 Rib Group

[0058] AA Line

[0059] P0 Internal

[0060] P1 external

[0061] W substrate

[0062] δ1 gap

[0063] δ2 gap DETAILED DESCRIPTION

[0064] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0065] Figure 1 It is an exploded schematic perspective view showing a substrate storage container 1 according to one embodiment.

[0066] like Figure 1 As shown, the substrate storage container 1 includes a container body 10 for storing substrates W, and a cover 20 for closing an opening 11 in the container body 10 .

[0067] The container body 10 is a box-shaped body, and is a front-opening type with an opening 11 formed on the front. The opening 11 is formed in a curved shape with a step in a manner of expanding toward the outside, and the surface of the step portion is formed as a sealing surface 12 at the inner peripheral edge of the front of the opening 11. In addition, from the perspective of easy insertion of a substrate W having a diameter of 300 mm or 450 mm, although the container body 10 is preferably a front-opening type, it may also be a bottom-opening type with the opening 11 formed on the lower surface.

[0068] Support bodies 13 are arranged on the left and right sides of the container body 10. The support body 13 has the function of placing and positioning the substrate W. In the support body 13, two or more grooves are formed in the height direction to form so-called groove teeth. And the substrate W is placed on the groove teeth at the left and right positions at the same height. The material of the support body 13 can be the same as that of the container body 10, but different materials can also be used to improve the cleaning water control performance and sliding performance.

[0069] In addition, a rear holder (not shown) is arranged at the rear side (inner side) inside the container body 10. When the cover body 20 is closed, the rear holder and the front holder 30 described later hold the substrate W in pairs. However, in a modified example, the rear holder may not be provided, and the support body 13 may have a substrate holding portion, for example, in a "く" shape or a straight line shape, on the inner side of the groove teeth, so that the substrate W is held by the front holder 30 and the substrate holding portion. Here, the support body 13 and the rear holder are provided in the container body 10 by insert molding or interlocking.

[0070] The substrate W is supported by the support body 13 and accommodated in the container body 10. An example of the substrate W is a silicon wafer, but the substrate W is not particularly limited, and may be, for example, a quartz wafer, a gallium arsenide wafer, or the like.

[0071] A robot flange 14 is detachably provided at the center of the top of the container body 10. The substrate storage container 1 storing the substrates W in a clean state is held by the robot flange 14 by a transfer robot in the factory and is transferred to a processing device for each step of processing the substrates W.

[0072] In addition, manual grips 15 for the operator to hold are detachably mounted at the center of the outer surfaces of both side portions of the container body 10 .

[0073] For example, a gas supply valve 18 and an exhaust valve 19 having a check valve function are provided on the bottom surface of the container body 10. An inert gas such as nitrogen or dry air is supplied from the gas supply valve 18 to the inside of the substrate storage container 1 closed by the lid 20, and discharged from the exhaust valve 19, thereby replacing the gas inside the substrate storage container 1 or maintaining an airtight state. In addition, the gas supply valve 18 and the exhaust valve 19 are preferably located at a position deviated from the position of the substrate W projected on the bottom surface, but the number or position of the gas supply valve 18 and the exhaust valve 19 are not limited to the number or position shown in the figure. In addition, the gas supply valve 18 and the exhaust valve 19 have a filter for filtering the gas.

[0074] The purpose of replacing the internal gas is to blow off impurities on the stored substrates W or reduce the internal humidity, thereby maintaining the cleanliness of the interior of the substrate storage container 1 during transportation. The gas replacement can be confirmed by detecting the gas on the exhaust valve 19 side. In addition, when the internal gas is replaced or the cover 20 is installed on the container body 10 and closed, the interior of the substrate storage container 1 becomes a positive pressure. On the contrary, when the cover 20 is removed from the container body 10, the interior of the substrate storage container 1 becomes a negative pressure.

[0075] The cover 20 is mounted on the front side of the opening 11 of the container body 10 and has a substantially rectangular shape. Figure 1 As shown, the cover body 20 includes: a cover body 21; a pair of locking mechanisms 26, which are provided on the cover body 21 for locking; and a pair of plates 27, which cover the locking mechanisms 26 detachably; and are detachably fitted to the front opening of the container body 10. The cover body 20 is locked by fitting the locking claws into the locking holes (not shown) formed in the container body 10 through the locking mechanisms 26. In addition, the cover body 21, the pair of locking mechanisms 26, and the pair of plates 27 of the cover body 20 are molded using the same molding material as the container body 10.

[0076] In addition, the cover body 20 has a removably mounted or integrally formed elastic front retainer 30 for horizontally retaining the front peripheral edge of the substrate W at the center.

[0077] Since the front retainer 30 is the same as the groove teeth and substrate holding part of the support body 13, and is the part that directly contacts the wafer, a material with good cleaning water control and sliding properties is used. The front retainer 30 can also be set on the cover body 20 by insert molding or interlocking.

[0078] Examples of materials for the container body 10 and the cover 20 include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyethersulfone, polyetheretherketone, and liquid crystal polymer. Conductive agents such as conductive carbon, conductive fibers, metal fibers, and conductive polymers, various antistatic agents, and ultraviolet absorbers may be appropriately added to the thermoplastic resin.

[0079] Here, in this embodiment, the substrate storage container 1 does not have an annular seal that is originally used between the container body 10 and the cover 20. Instead, a labyrinth seal structure is formed between the container body 10 and the cover 20. Various examples of the labyrinth seal structure are described below.

[0080] Figure 2 It is a schematic cross-sectional view showing a labyrinth seal structure 70A according to one embodiment. Figure 2 (described later Figure 3 The same applies later) is along Figure 1 The sectional view of the container body 10 taken along the line AA shown in FIG. 1 (sectional view of the container body 10 in a state where the lid 20 closes the container body 10). Figure 2 In the figure, two orthogonal directions are defined as X and Y directions. In the X direction, the X1 side corresponds to the inner side, and the X2 side corresponds to the outer side. The X direction corresponds to the radial direction around the opening 11. In addition, in the Y direction, the Y1 side corresponds to the inner side, and the Y2 side corresponds to the outer side. In addition, when the substrate W is stored in the container body 10 (refer to Figure 1 ), the Y direction (an example of the first direction) is a direction substantially parallel to the surface of the substrate W.

[0081] like Figure 2 As shown, the first portion 110 around the opening 11 in the container body 10 and the second portion 210 of the cover body 20 opposite to the first portion 110 cooperate in a non-contact manner to form a labyrinth seal structure 70A.

[0082] Specifically, the first portion 110 has a surface 101 (an example of a first surface) that is opposite to the second portion 210 in the Y direction, and a surface 102 that is opposite to the second portion 210 in the X direction. In addition, the surface 101 forms a sealing surface 12 (see Figure 1 ). Similarly, the second portion 210 has a surface 211 (an example of a first surface) that is opposite to the first portion 110 in the Y direction, and a surface 212 that is opposite to the first portion 110 in the X direction. Thus, the first portion 110 and the second portion 210 are opposite to each other in the Y direction and are also opposite to each other in the X direction.

[0083] In addition, Figure 2 In the embodiment, the gap δ2 between the surface 101 and the surface 211 is substantially the same as the gap δ1 (minimum gap) between the surface 102 and the surface 212, but may be different. The gap δ2 and the gap δ2 are set so that the contact between the surface 101 and the surface 211 or the contact between the surface 102 and the surface 212 does not occur due to tolerances, etc. The gap δ1 and the gap δ2 are preferably greater than 0 mm and less than 1.0 mm, and more preferably less than 0.5 mm. This is because when it is greater than 1.0 mm, the sealing property cannot be effectively obtained.

[0084] The degree of non-contact between the first portion 110 around the opening 11 in the container body 10 and the second portion 210 in the cover body 20 opposite to the first portion 110 is evaluated as follows: when the contact degree is 0%, it is evaluated as "excellent" because no particles are generated; when the contact degree is 0-10%, it is evaluated as "good"; when the contact degree is 10-50%, it is evaluated as "acceptable" (because although it can be used, the superiority against particles is reduced); when the contact degree is more than 50%, it is evaluated as "poor".

[0085] exist Figure 2 In the embodiment, the labyrinth seal structure 70A is formed by the surface 101 of the first portion 110 and the surface 211 of the second portion 210 .

[0086] Specifically, the second portion 210 has a rib group 710 that protrudes toward the first portion 110 . Figure 2 In the embodiment, although the rib group 710 has three ribs 710-1, 710-2, and 710-3, the number of ribs is arbitrary. For example, any one or two of the three ribs 710-1, 710-2, and 710-3 may be omitted, or additional ribs may be set.

[0087] The ribs 710-1, 710-2, and 710-3 are formed all around the opening 11. For example, the ribs 710-1, 710-2, and 710-3 may be formed all around the opening with a uniform cross section. In addition, in a modified example, the ribs 710-1, 710-2, and 710-3 may have a cross section that changes in a portion of the circumference around the opening 11, or may be discontinuous in a portion of the circumference around the opening 11.

[0088] The ribs 710-1, 710-2, and 710-3 preferably have a shape that takes into account the moldability of the cover body 21, that is, a shape that is released from a mold. Figure 2 As shown, the outer peripheral surface is inclined inwardly in the direction toward the Y1 side. In this case, compared with the case where the inner peripheral surface is inclined outwardly in the direction toward the Y1 side, the sealing performance against the internal positive pressure can be improved (the principle will be described below). However, in the modified example, the inner peripheral surface of the ribs 710-2 and 710-3 may be inclined outwardly in the direction toward the Y1 side, or may not be inclined.

[0089] The ribs 710-1, 710-2, and 710-3 preferably have a height difference within 10 mm (see Figure 2 The height H in the figure may be, for example, in the range of 1 mm to 10 mm. Figure 2When the height H) is 5 times or more of the gap δ2, preferably 10 times or more, a large sealing effect can be expected. In addition, the shape of the second portion 210 on the cover body 21 side and the shape of the first portion 110 on the container body 10 side can be opposite. In addition, in the drawings, in order to easily explain the maze effect, the distances δ1 and δ2 are shown larger than the height H.

[0090] Figure 3 Yes means Figure 2 FIG. 2 is an explanatory diagram of the sealing effect of the labyrinth seal structure 70A shown.

[0091] like Figure 3 As shown ( Figure 2 The labyrinth seal structure 70A repeats the narrow portion 701 and the expanded portion 702 along the X direction. Therefore, for example, when the inside of the container body 10 is at a positive pressure, in the flow of gas from the inside P0 to the outside P1 of the container body 10, as shown in FIG. Figure 3 As schematically shown by the arrows, pressure loss is generated by repeating the rapid expansion of the flow path area when transitioning from the narrow portion 701 to the expanded portion 702, and the rapid reduction of the flow path area when transitioning from the expanded portion 702 to the narrow portion 701. In addition, when the gas transitions from the interior P0 of the container body 10 to the first narrow portion 701, pressure loss is generated because the flow path area is also rapidly reduced. In addition, when transitioning to the exterior P1 of the container body 10, pressure loss is generated because the flow path area is rapidly expanded. In this way, in the labyrinth seal structure 70A, the pressure gradually changes between the interior P0 and the exterior P1. As a result, the gas flow between the interior P0 and the exterior P1 of the labyrinth seal structure 70A is reduced or eliminated, and the sealing function is exerted. That is, the sealing performance relative to the positive pressure inside is ensured.

[0092] In addition, the sealing function is also performed when the inside of the container body 10 is at a negative pressure. This is because, in the flow from the outside P1 to the inside P0 of the container body 10, the flow path area is rapidly expanded when transitioning from the narrow part 701 to the expanded part 702, and the flow path area is rapidly reduced when transitioning from the expanded part 702 to the narrow part 701, thereby generating pressure loss.

[0093] In addition, the number of repetitions of rapid expansion and rapid contraction, including rapid contraction from the inside P0 of the container body 10 and rapid expansion toward the outside P1 of the container body 10, is preferably at least 3 times. That is, as described above, the number of ribs only needs to be 1 or more. However, in order to improve the sealing performance, the number of ribs is preferably 2 or more.

[0094] Here, the substrate storage container 1 is a container that can be used multiple times, and the lid 20 can be opened and closed multiple times. In this regard, in the case of a comparative example in which the sealing is ensured by using a sealing member formed of an elastomer or the like, particles are easily generated due to friction. That is, since the sealing member slides relative to the sealing surface as the lid is opened and closed, particles are easily generated. In a state where particles are generated, if the inside of the container body is under negative pressure when the lid is opened, the particles may enter the inside of the container body and contaminate the substrate W.

[0095] In the case of a comparative example in which a seal made of an elastic body or the like is used to ensure sealing, the seal comes into contact with the sealing surface of the container body, and the opening and closing torque of the lid 20 becomes excessive, causing errors in the manufacturing process.

[0096] In contrast, according to Figure 2 In the example shown, since no seal is used, the above-mentioned problems caused by the use of a seal (i.e., the problems caused by the comparative example) can be avoided. Figure 2 In the illustrated example, since the first portion 110 and the second portion 210 are not in contact with each other, the possibility of particles being generated from the first portion 110 and the second portion 210 due to friction is low.

[0097] In addition, according to Figure 2 In the example shown, although the first portion 110 and the second portion 210 are non-contacting, a high sealing performance can be ensured by the labyrinth seal structure 70A. The sealing effect of the labyrinth seal structure 70A is as described above with reference to Figure 3 described.

[0098] In this way, according to Figure 2 In the example shown, it is possible to ensure sealing properties against positive pressure and negative pressure inside the container body 10 , and also to reduce particles generated by friction caused by opening and closing of the lid 20 .

[0099] In addition, Figure 2 In the example shown, the labyrinth seal structure 70A is formed between the surface 101 of the first portion 110 and the surface 211 of the second portion 210. However, the same labyrinth seal structure may be formed between the surface 102 of the first portion 110 and the surface 212 of the second portion 210 instead of or in addition to this method.

[0100] In addition, Figure 2 In the illustrated example, although the rib group 710 is formed in the second portion 210 , the same rib group 710 may be formed in the first portion 110 instead of this.

[0101] Figure 4FIG. 2 is a schematic cross-sectional view showing a labyrinth seal structure 70B according to another embodiment. Figure 4 In the example shown, for Figure 2 In the illustrated example, the same components are denoted by the same reference numerals, and description thereof may be omitted.

[0102] Figure 4 The examples shown are relative to Figure 2 The example shown is different in that the cover 20 is replaced by a cover 20B. The cover 20B is different from the cover 20 in that the second portion 210B is mounted on the cover body 21B. That is, in the cover 20, the second portion 210 is a part of the cover body 21, whereas (as opposed to being integrally formed) the second portion 210 is a part of the cover body 21. Figure 4 In the illustrated cover 20B, the second portion 210B is not a part of the cover body 21B, but is integrated with the cover body 21B by being attached thereto.

[0103] The cover body 21B is formed of a resin material such as polycarbonate, cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polypropylene, etc. On the other hand, the second portion 210B may be formed of a resin material having high sliding properties such as polyetherketone, polybutylene terephthalate, or polyacetal in addition to polypropylene. In addition, even if the cover 20B is required to have low hygroscopicity, the second portion 210B may be formed of a non-hygroscopic material because it is a relatively small portion of the cover 20B.

[0104] In addition, as the material of the second part 210B, thermoplastic elastomers, fluorine rubber, ethylene propylene rubber, silicone rubber, etc., including polyester elastomers, polyolefin elastomers, fluorine elastomers, polyurethane elastomers, etc., can also be used. From the viewpoint of changing the adhesion, fillers including carbon, glass fiber, mica, talc, silicon dioxide, calcium carbonate, etc., and resins such as polyethylene, polyamide, polyacetal, fluorine resin, silicone resin, etc. can also be selectively added to these materials in a specified amount. In addition, from the viewpoint of imparting conductivity and antistatic properties, carbon fibers, metal fibers, metal oxides, various antistatic agents, etc. can be appropriately added.

[0105] The second portion 210B may be integrated with the cover body 21B, for example, by being fitted therewith. Alternatively, the second portion 210B may be integrated with the cover body 21B by being bonded therewith. Alternatively, the second portion 210B may be integrally formed with the cover body 21B (eg, two-color molding).

[0106] exist Figure 4In the embodiment, a first portion 110 around the opening 11 in the container body 10 and a second portion 210B in the cover body 20B opposite to the first portion 110 cooperate in a non-contact manner to form a labyrinth seal structure 70B.

[0107] The labyrinth seal structure 70B itself can also be Figure 2 The labyrinth seal structure 70A shown is the same. Figure 4 In the embodiment, since the second portion 210B and the cover body 21B are different components, it can be molded separately from the cover body 21B. Therefore, the second portion 210B can be designed without considering the moldability of the cover body 21B.

[0108] In addition, the second portion 210B may be provided on the container body 10 side.

[0109] according to Figure 4 The example shown can also be obtained with Figure 2 The same effect as the example shown. In addition, according to Figure 4 In the example shown, since the second portion 210B and the cover body 21B are different components, they can be formed of a material different from the cover body 21B. Therefore, the second portion 210B can be formed of a resin material with high sliding properties. In this case, even if the first portion 110 and the second portion 210B, which should not be in contact at the design value (nominal value), are in contact with each other due to component tolerances, etc., the generation of particles can be kept to a minimum.

[0110] In addition, even if part of the second portion 210B contacts the first portion 110, it can be absorbed if it is an elastic body, and since the other gap δ2 can be ensured, the dimensional accuracy of the molded product can be widely ensured, so it is easy to control and has stability.

[0111] Figure 5 FIG. 2 is a schematic cross-sectional view showing a labyrinth seal structure 70C according to another embodiment. Figure 5 In the example shown, for Figure 2 In the illustrated example, the same components are denoted by the same reference numerals, and description thereof may be omitted.

[0112] Figure 5 The examples shown are relative to Figure 2 The illustrated example is different in that the container body 10 is replaced by a container body 10C, and the cover 20 is replaced by a cover 20C.

[0113] The container body 10C is relative to Figure 2The container body 10 shown is different in that the first portion 110 is replaced by a first portion 110C. Figure 2 The cover 20 shown is different in that the cover body 21 is replaced by a cover body 21C. Figure 2 The illustrated cover body 21C differs in that the second portion 210 is replaced by a second portion 210C.

[0114] like Figure 5 As shown, a first portion 110C around the opening 11 in the container body 10C and a second portion 210C in the cover body 20C opposite to the first portion 110C cooperate in a non-contact manner to form a labyrinth seal structure 70C.

[0115] Specifically, the first portion 110C has a surface 101C (an example of a first surface) that is opposite to the second portion 210C in the Y direction, and a surface 102C that is opposite to the second portion 210C in the X direction. In addition, the surface 101C forms a sealing surface 12 (see Figure 1 ). Similarly, the second portion 210C has a surface 211C (an example of a first surface) that is opposite to the first portion 110C in the Y direction, and a surface 212C that is opposite to the first portion 110C in the X direction. Thus, the first portion 110C and the second portion 210C are opposite to each other in the Y direction, and are also opposite to each other in the X direction.

[0116] exist Figure 5 In the embodiment, the labyrinth seal structure 70C is formed by a surface 101C of a first portion 110C and a surface 211C of a second portion 210C.

[0117] Specifically, the first portion 110C has a rib group 120C that protrudes toward the second portion 210C. Figure 5 In the embodiment, the rib group 120C includes two ribs 120C-1 and 120C-2, but the number of ribs is arbitrary. For example, any one of the two ribs 120C-1 and 120C-2 may be omitted, or an additional rib may be provided.

[0118] In addition, the second portion 210C has a rib group 710C that protrudes toward the first portion 110C. Figure 5 In the embodiment, although the rib group 710C includes two ribs 710C-1 and 710C-2, the number of ribs is arbitrary. For example, any one of the two ribs 710C-1 and 710C-2 may be omitted, or additional ribs may be provided.

[0119] The ribs 120C-1, 120C-2 and the ribs 710C-1, 710C-2 are formed all around the opening 11. For example, the ribs 120C-1, 120C-2 and the ribs 710C-1, 710C-2 may be formed with a uniform cross section all around the opening. In addition, in a modified example, at least any one of the ribs 120C-1, 120C-2 and the ribs 710C-1, 710C-2 may have a cross section that changes in a portion of the circumference around the opening 11, or may be discontinuous in a portion of the circumference around the opening 11.

[0120] The ribs 120C-1 and 120C-2 preferably have a shape that takes into consideration the moldability of the container body 10C, that is, a shape that is released from a mold. Figure 5 As shown, the outer peripheral surface is inclined inwardly in the direction toward the Y2 side. However, in a modified example, the inner peripheral surface of the ribs 120C-1 and 120C-2 may be inclined inwardly in the direction toward the Y2 side.

[0121] The ribs 710C-1 and 710C-2 preferably have a shape that takes into account the moldability of the cover body 21C, that is, a shape that can be released from a mold. Figure 5 As shown, the outer peripheral surface is inclined inwardly in the direction toward the Y1 side. However, in a modified example, the inner peripheral surface of the rib 710-2 may be inclined inwardly in the direction toward the Y1 side.

[0122] The ribs 120C-1, 120C-2 and the ribs 710C-1, 710C-2 preferably have a height difference within 10 mm (see Figure 5 The height H in the gap is 1 mm to 10 mm. When the height difference is 5 times or more, preferably 10 times or more, of the gap δ2, a large sealing effect can be expected.

[0123] according to Figure 5 The example shown can also be obtained with Figure 2 The example shown has the same effect. Figure 5 In the example shown, the flow path of the gas is formed into a hook shape, and the path can be lengthened, and a higher sealing effect can be expected.

[0124] In addition, Figure 5 In the example shown, although the labyrinth seal structure 70C is formed between the surface 101C of the first portion 110C and the surface 211C of the second portion 210C, the same labyrinth seal structure may be formed between the surface 102C of the first portion 110C and the surface 212C of the second portion 210C instead of or in addition to this.

[0125] Figure 6 FIG. 1 is a schematic cross-sectional view showing a labyrinth seal structure 70D according to another embodiment. Figure 6 In the example shown, for Figure 5 In the illustrated example, the same components are denoted by the same reference numerals, and description thereof may be omitted.

[0126] Figure 6 The examples shown are relative to Figure 5 The example shown is different in that the cover 20C is replaced by a cover 20D. The cover 20D is different from the cover 20C in that the second portion 210D is mounted on the cover body 21D. That is, in the cover 20C, the second portion 210C is a part of the cover body 21C, whereas (as opposed to being integrally formed) the second portion 210C is a part of the cover body 21C. Figure 6 In the illustrated cover 20D, the second portion 210D is not a part of the cover body 21D, but is integrated with the cover body 21D by being attached thereto.

[0127] The cover body 21D is formed of a resin material with low hygroscopicity, such as polyetheretherketone or polypropylene. On the other hand, the second portion 210D may be formed of a resin material with high sliding properties, such as polyetherketone, polybutylene terephthalate or polyacetal, in addition to polypropylene. In addition, even if the cover 20D is required to have low hygroscopicity, the second portion 210D may be formed of a non-hygroscopic material because it is a relatively small portion of the cover 20D.

[0128] In addition, as the material of the second part 210D, thermoplastic elastomers including polyester elastomers, polyolefin elastomers, fluorine elastomers, polyurethane elastomers, etc., fluororubbers, ethylene propylene rubbers, silicone rubbers, etc., can also be used. From the viewpoint of changing the adhesion, fillers including carbon, glass fiber, mica, talc, silicon dioxide, calcium carbonate, etc., and resins such as polyethylene, polyamide, polyacetal, fluororesin, silicone resin, etc. can also be selectively added to these materials in a specified amount. In addition, from the viewpoint of imparting conductivity and antistatic properties, carbon fibers, metal fibers, metal oxides, various antistatic agents, etc. can be appropriately added.

[0129] Furthermore, even when the cover 20D is required to have low hygroscopicity, the second portion 210D is a relatively small portion of the cover 20D and can therefore be formed of a non-hygroscopic material.

[0130] The second portion 210D may be integrated with the cover body 21D, for example, by being fitted therein. Alternatively, the second portion 210D may be integrated with the cover body 21D by being bonded thereto. Alternatively, the second portion 210D may be integrally formed with the cover body 21D (eg, by two-color molding).

[0131] Figure 6 In the embodiment, a first portion 110C around the opening 11 in the container body 10C and a second portion 210D in the cover body 20D opposite to the first portion 110C cooperate in a non-contact manner to form a labyrinth seal structure 70D.

[0132] The labyrinth seal structure 70D can also be used with Figure 5 The labyrinth seal structure 70C shown is the same. Figure 6 In the embodiment, since the second portion 210D and the cover body 21D are different components, it can be molded separately from the cover body 21D. Therefore, the second portion 210D can be designed without considering the moldability of the cover body 21D.

[0133] according to Figure 6 The example shown can also be obtained with Figure 5 The same effect as the example shown. In addition, according to Figure 6 In the example shown, since the second portion 210D and the cover body 21D are different components, they can be formed by a material different from the cover body 21D. Therefore, the second portion 210D can be formed of a resin material with high sliding properties. In this case, even if the first portion 110C and the second portion 210D, which should not be in contact at the design value (nominal value), are in contact with each other due to component tolerances, etc., the generation of particles can be kept to a minimum. In addition, even if a part of the second portion 210D contacts the first portion 110C, if it is an elastomer, it can be absorbed. Since other gaps can be ensured, the dimensional accuracy of the molded product can be widely ensured, so it is easy to control and has stability.

[0134] Fig. 7A as well as Figure 7B FIG. 1 is a schematic cross-sectional view showing a labyrinth seal structure 70E according to another embodiment. Fig. 7A as well as Figure 7B In the example shown, for Figure 5 In the illustrated example, the same components are denoted by the same reference numerals, and description thereof may be omitted.

[0135] Fig. 7A The examples shown are relative to Figure 5 In the example shown, the labyrinth seal structure 70C is replaced by the labyrinth seal structure 70E. Fig. 7A as well as Figure 7B In the example shown, relative to Figure 5 In the illustrated example, the ribs 120C- 1 , 120C- 2 and the ribs 710C- 1 , 710C- 2 are replaced by the ribs 120E- 1 , 120E- 2 and the ribs 710E- 1 , 710E- 2.

[0136] The ribs 120E-1, 120E-2 and the ribs 710E-1, 710E-2 are formed so that the gap δ3 between the rib 120E-1 and the rib 710E-2 in the X direction and the gap δ3 between the rib 120E-2 and the rib 710E-1 in the X direction are constant in the Y direction. It is preferred that the gap δ3 is greater than 0 mm and is 1.0 mm or less, and more preferably 0.5 mm or less. This is because when the gap δ3 is greater than 1.0 mm, the sealing property cannot be effectively obtained.

[0137] according to Fig. 7A In the example shown, when the cover 20E is closed, the gaps between the side surfaces of the adjacent ribs arranged opposite to each other in the X direction (in Fig. 7A In the embodiment, the gap δ3 in the X direction between the rib 120E-1 and the rib 710E-2, and the gap δ3 in the X direction between the rib 120E-2 and the rib 710E-1) are set to be constant, so that even if the cover is not completely in the closed state (refer to Figure 7B ), the sealing effect can also be maintained. Accordingly, when the cover 20E is opened and closed, the sealing state can be ensured to the greatest extent, and even if the cover 20E is locked in a state where it is not tightly connected midway, good sealing can be ensured.

[0138] In addition, Fig. 7A In the example shown above, Figure 6 Similar to the example shown, a structure in which the second portion (the portion where the ribs 710E- 1 and 710E- 2 are formed) is separately mounted on the cover body 21E may be adopted.

[0139] Figure 8 : is a schematic cross-sectional view showing a labyrinth seal structure 70F according to another embodiment. Figure 8 The illustrated example is an example of a case where the rib is formed on the container main body side.

[0140] Figure 8 The examples shown are relative to Figure 5 The illustrated example is different in that the container body 10C is replaced by the container body 10F, and the cover body 20C is replaced by the cover body 20F.

[0141] The container body 10F is relative to Figure 5The container body 10C shown is different in that the first portion 110C is replaced by the first portion 110F. Figure 2 The cover 20C shown is different in that the cover body 21C is replaced by a cover body 21F. Figure 2 The illustrated cover body 21C differs in that the second portion 210C is replaced by a second portion 210F.

[0142] like Figure 8 As shown, the first portion 110F around the opening 11 in the container body 10F and the second portion 210F in the cover 20F opposite to the first portion 110F cooperate with each other in a non-contact manner to form a labyrinth seal structure 70F. The labyrinth seal structure 70F is formed by the surface 101F of the first portion 110F and the surface 211F of the second portion 210F.

[0143] Specifically, the first portion 110F has a rib group 120F that protrudes toward the second portion 210F. Figure 8 Although the rib group 120F includes three ribs 120F-1, 120F-2, and 120F-3, the number of ribs is arbitrary.

[0144] The ribs 120F-1, 120F-2, and 120F-3 are formed over the entire periphery of the opening 11. For example, the ribs 120F-1, 120F-2, and 120F-3 may be formed over the entire periphery of the opening with a uniform cross section. Figure 8 The example shown can also be obtained with Figure 2 The same effects as those of the example shown in the figure can be obtained. In addition, the shape of the second portion 210F on the cover body 21F side and the shape of the first portion 110F on the container body 10F side can be reversed.

[0145] Fig. 9 : is a schematic cross-sectional view showing a labyrinth seal structure 70G according to another embodiment. Fig. 9 The example shown is an example in which a slight height difference is formed between the ribs of the container body and the cap body. Fig. 9 The examples shown are relative to Figure 5 The illustrated example is different in that the container body 10C is replaced by the container body 10G, and the cover body 20C is replaced by the cover body 20G.

[0146] The container body 10G is Figure 5 The container body 10C shown is different in that the first portion 110C is replaced by the first portion 110G. Figure 5The cover 20C shown is different in that the cover body 21 is replaced by a cover body 21G. Figure 5 The illustrated cover body 21C differs in that the second portion 210C is replaced by a second portion 210G.

[0147] like Fig. 9 As shown, the first portion 110G around the opening 11 in the container body 10G and the second portion 210G in the cover 20G opposite to the first portion 110G cooperate with each other in a non-contact manner to form a labyrinth seal structure 70G. The labyrinth seal structure 70G is formed by the surface 101G of the first portion 110G and the surface 211G of the second portion 210G.

[0148] Specifically, the first portion 110G has a rib group 120G that protrudes toward the second portion 210G. Fig. 9 In the embodiment, the rib group 120G includes three ribs 120G-1, 120G-2, and 120G-3, but the number of ribs is arbitrary. In addition, the second portion 210G includes a rib group 710G that protrudes toward the first portion 110G. Fig. 9 Although the rib group 710G has three ribs 710G-1, 710G-2, and 710G-3, the number of ribs is arbitrary.

[0149] like Fig. 9 As shown, minute steps G-1, G-2, G-3 are formed in the ribs 120G-1, 120G-2, 120G-3, and minute steps G-11, G-12, and G-13 are formed in the ribs 710G-1, 710G-2, and 710G-3.

[0150] The ribs 120G-1, 120G-2, 120G-3 and 710G-1, 710G-2, 710G-3 are formed over the entire periphery of the opening 11. Fig. 9 The example shown can also be obtained with Figure 2 The example shown has the same effect.

[0151] Fig.10 It is a schematic cross-sectional view showing a labyrinth seal structure 70H according to another embodiment. Fig.10 The example shown is an example of a case where ribs are provided on the container body and the cap body, and a slight height difference is formed on the rib of the container body.

[0152] Fig.10 The examples shown are relative to Figure 5 The illustrated example is different in that the container body 10C is replaced by the container body 10H, and the cover 20C is replaced by the cover 20H.

[0153] The container body 10H is relative to Figure 5 The container body 10C shown is different in that the first portion 110C is replaced by the first portion 110H. Figure 5 The cover 20C shown is different in that the cover body 21C is replaced by a cover body 21H. Figure 5 The illustrated cover body 21C differs in that the second portion 210C is replaced by a second portion 210H.

[0154] like Fig.10 As shown, the first portion 110H around the opening 11 in the container body 10H and the second portion 210H in the cover 20H opposite to the first portion 110H cooperate with each other in a non-contact manner to form a labyrinth seal structure 70H. The labyrinth seal structure 70H is formed by a surface 101H of the first portion 110H and a surface 211H of the second portion 210H.

[0155] Specifically, the first portion 110H has a rib group 120H that protrudes toward the second portion 210H. Fig.10 In the embodiment, the rib group 120H includes three ribs 120H-1, 120H-2, and 120H-3, but the number of ribs is arbitrary. In addition, the second portion 210H includes a rib group 710H that protrudes toward the first portion 110H.

[0156] Fig.10 Although the rib group 710G has three ribs 710H-1, 710H-2 and 710H-3, the number of ribs is arbitrary. Fig.10 As shown, minute step portions H-1, H-2 and H-3 are formed on the rib portions 120H-1, 120H-2 and 120H-3.

[0157] The ribs 710H-1, 710H-2 and 710H-3 are formed with the inner peripheral surfaces inclined outward in the direction toward the Y1 side. The ribs 120H-1, 120H-2, 120H-3 and 710H-1, 710H-2, 710H-3 are formed over the entire periphery of the opening 11. Fig.10 The example shown can also be obtained with Figure 2 The example shown has the same effect.

[0158] Fig.11 : is a schematic cross-sectional view showing a labyrinth seal structure 70I according to another embodiment. Fig.11 The example shown is an example of a case where the shape of the rib of the container body is different from the shape of the rib of the cap body.

[0159] Fig.11 The examples shown are relative to Figure 5 The illustrated example is different in that the container body 10C is replaced by the container body 10I, and the cover 20C is replaced by the cover 20I.

[0160] The container body 10I is relative to Figure 5 The container body 10C shown is different in that the first portion 110C is replaced by the first portion 110I. Figure 5 The cover 20C shown is different in that the cover body 21C is replaced by a cover body 21I. Figure 5 The illustrated cover body 21C differs in that the second portion 210C is replaced by a second portion 210I.

[0161] like Fig.11 As shown, the first portion 110I around the opening 11 in the container body 10I and the second portion 210I in the cover 20I opposite to the first portion 110I cooperate with each other in a non-contact manner to form a labyrinth seal structure 70I. The labyrinth seal structure 70I is formed by a surface 101I of the first portion 110I and a surface 211I of the second portion 210I.

[0162] Specifically, the first portion 110I has a rib group 120I that protrudes toward the second portion 210I. Fig.11 In the embodiment, the rib group 120I includes four ribs 120I-1, 120I-2, 120I-3, ​​and 120I-4, but the number of ribs is arbitrary. In addition, the second portion 210I includes a rib group 710I that protrudes toward the first portion 110I.

[0163] exist Fig.11 In the embodiment, although the rib group 710I has two ribs 710I-1 and 710I-2, the number of ribs is arbitrary. Fig.11 As shown, the ribs 120I-1, 120I-2, and 120I-3 have inclinations I-1, I-2, I-3, and I-4 in which the inner peripheral surfaces are inclined outward in the direction toward the Y2 side.

[0164] The ribs 120I-2 and 120I-4 corresponding to the ribs 710I-2 and 710I-4 are formed lower than the ribs 120I-1 and 120I-3. The ribs 120I-1 and 120I-2 are formed closer to the surface 211I of the second part 210I than the front ends of the ribs 710I-1 and 710I-2.

[0165] The ribs 120I-1, 120I-2, 120I-3, ​​120I-4, 710I-1, and 710I-2 are formed over the entire periphery of the opening 11. Fig.11 The example shown can also be obtained with Figure 2 The same effects as those of the example shown in the figure can be obtained. In addition, the shape of the second portion 210I on the cover body 21I side and the shape of the first portion 110I on the container body 10I side can be reversed.

[0166] Fig.12 It is a schematic cross-sectional view showing a labyrinth seal structure 70J according to another embodiment. Fig.12 The examples shown are relative to Figure 5 The illustrated example is different in that the container body 10C is replaced by the container body 10J, and the cover body 20C is replaced by the cover body 20J.

[0167] The container body 10J is relative to Figure 5 The container body 10C shown is different in that the first portion 110C is replaced by a first portion 110J.

[0168] Cover 20J relative to Figure 5 The cover body 20C shown is different in that the cover body 21 is replaced by a cover body 21J. Figure 5 The illustrated cover body 21C differs in that the second portion 210 is replaced by a second portion 210J.

[0169] like Fig.12 As shown, the first portion 110J around the opening 11 in the container body 10J and the second portion 210J in the cover 20J opposite to the first portion 110J cooperate in a non-contact manner to form a labyrinth seal structure 70J. The labyrinth seal structure 70J is formed by a surface 101J of the first portion 110J and a surface 211J of the second portion 210J.

[0170] Specifically, the first portion 110J has a rib group 120J that protrudes toward the second portion 210J. Fig.12 In the embodiment, the rib group 120J includes three ribs 120J-1, 120J-2, and 120J-3, but the number of ribs is arbitrary. In addition, the second portion 210J includes a rib group 710J that protrudes toward the first portion 110J.

[0171] exist Fig.12 In the embodiment, although the rib group 710J has three ribs 710J-1, 710J-2, and 710J-3, the number of ribs is arbitrary. Fig.12As shown, the ribs 120J-1, 120J-2, and 120J-3 have inclinations J-1, J-2, and J-3 in which the outer peripheral surfaces are inclined inward in the direction toward the Y2 side.

[0172] The ribs 710J-1, 710J-2, and 710J-3 have inclinations J-11, J-12, and J-13 in which the inner peripheral surfaces are inclined outward in the direction toward the Y1 side.

[0173] The ribs 120J-1, 120J-2, 120J-3, 710J-1, and 710J-2 are formed over the entire periphery of the opening 11. Fig.12 The example shown can also be obtained with Figure 2 The example shown has the same effect.

[0174] Fig.13 It is a schematic cross-sectional view showing a labyrinth seal structure 70K according to another embodiment. Fig.13 The examples shown are relative to Figure 5 The illustrated example is different in that the container body 10C is replaced by the container body 10K, and the cover body 20C is replaced by the cover body 20K.

[0175] The container body 10K is relative to Figure 5 The container body 10C shown is different in that the first portion 110C is replaced by the first portion 110K. Figure 5 The cover 20C shown is different in that the cover body 21C is replaced by a cover body 21K. The cover body 21K is Figure 5 The illustrated cover body 21C differs in that the second portion 210C is replaced by a second portion 210K.

[0176] like Fig.13 As shown, the first portion 110K around the opening 11 in the container body 10K and the second portion 210K in the cover 20K opposite to the first portion 110K cooperate with each other in a non-contact manner to form a labyrinth seal structure 70K. The labyrinth seal structure 70K is formed by a surface 101K of the first portion 110K and a surface 211K of the second portion 210K.

[0177] Specifically, the first portion 110K has a rib 120K that protrudes toward the second portion 210K. In addition, the second portion 210K has a rib group 710K that protrudes toward the first portion 110K. Fig.13 In the embodiment, the rib group 710K includes two ribs 710K-1 and 710K-2, but the number of ribs is arbitrary. The rib 120K is formed of an embedded member and is embedded in the cover body 10K.

[0178] The rib 120K has protrusion shapes K-1 and K-2, so that its front end faces the ribs 710K-1 and 710K-2 on the peripheral side respectively. As the material of the rib 120K, elastomers such as thermoplastic elastomers including polyester elastomers, polyolefin elastomers, fluorine elastomers, polyurethane elastomers, fluororubbers, ethylene propylene rubbers, silicone rubbers, etc. can also be used. From the viewpoint of changing the adhesion, a specified amount of fillers including carbon, glass fiber, mica, talc, silica, calcium carbonate, etc., and resins such as polyethylene, polyamide, polyacetal, fluororesin, silicone resin, etc. can also be selectively added to these materials. In addition, from the viewpoint of imparting conductivity and antistatic properties, carbon fibers, metal fibers, metal oxides, various antistatic agents, etc. can be appropriately added.

[0179] The ribs 120K, 710K-1, and 710K-2 are formed over the entire periphery of the opening 11. Fig.13 The example shown can also be obtained with Figure 2 Since the rib 120K has two protrusion shapes K-1 and K-2, even if two narrow flow paths are provided, Fig.13 The structure can also achieve the effect of having a narrow dimension in the X direction. In addition, if the rib 120K is insert-molded with an elastic body, the allowable range of dimensional error becomes larger, which is more effective. In addition, the shape of the second portion 210K on the cover body 21K side and the shape of the first portion 110K on the container body 10K side can be opposite.

[0180] Fig.14 It is a schematic cross-sectional view showing a labyrinth seal structure 70L according to another embodiment. Fig.14 The examples shown are relative to Figure 5 The illustrated example is different in that the container body 10C is replaced by the container body 10L, and the cover body 20C is replaced by the cover body 20L.

[0181] The container body 10L is relative to Figure 5 The container body 10C shown is different in that the first portion 110C is replaced by the first portion 110L. Figure 5 The cover 20C shown is different in that the cover body 21C is replaced by a cover body 21L. The cover body 21L is relatively Figure 5 The illustrated cover body 21C differs in that the second portion 210C is replaced by a second portion 210L.

[0182] like Fig.14As shown, the first portion 110L around the opening 11 in the container body 10L and the second portion 210L in the cover 20L opposite to the first portion 110L cooperate in a non-contact manner to form a labyrinth seal structure 70L. The labyrinth seal structure 70L is formed by a surface 101L of the first portion 110L and a surface 211L of the second portion 210L.

[0183] Specifically, the first portion 110L has a rib group 120L that protrudes toward the second portion 210L. Fig.14 In the embodiment, although the rib group 120L includes the ribs 120L-1 and 120L-2, the number of ribs is arbitrary. In addition, the second portion 210L includes a rib group 710L protruding toward the first portion 110L. Fig.14 Although the rib group 710L includes two ribs 710L- 1 and 710L- 2 , the number of ribs is arbitrary.

[0184] The ribs 120L-1 and 120L-2 are formed of an embedded member and embedded in the cover 10L. The two ribs 120L-1 and 120L-2 have protrusion shapes L-1 and L-2, and their front ends face the ribs 710L-1 and 710L-2 on the outer peripheral side, respectively.

[0185] The ribs 120L- 1 and 120L- 2 are formed of a resin material such as polycarbonate, cycloolefin polymer, liquid crystal polymer, polyetheretherketone, or polypropylene.

[0186] The ribs 120L-1, 120L-2 and 710L-1, 710L-2 are formed over the entire periphery of the opening 11. Fig.14 The example shown can also be obtained with Figure 2 The example shown has the same effect.

[0187] Fig.15 FIG. 2 is a schematic cross-sectional view showing a labyrinth seal structure 70M according to another embodiment. Fig.15 In the illustrated example, the same components as those in the above-described example are denoted by the same reference numerals, and description thereof may be omitted. Fig.15 The examples shown are relative to Figure 5 The illustrated example is different in that the container body 10C is replaced by the container body 10M, and the cover body 20C is replaced by the cover body 20M.

[0188] The container body 10M is relative to Figure 5 The container body 10C shown is different in that the first portion 110C is replaced by the first portion 110M. Figure 5The cover 20C shown is different in that the cover body 21C is replaced by a cover body 21M. The cover body 21M is Figure 5 The illustrated cover body 21C differs in that the second portion 210C is replaced by a second portion 210M.

[0189] like Fig.15 As shown, the first portion 110M around the opening 11 in the container body 10M and the second portion 210M in the cover 20M opposite to the first portion 110M at least partially cooperate to form a labyrinth seal structure 70M in a non-contact manner. The labyrinth seal structure 70M is formed by the surface 101M of the first portion 110M and the surface 211M of the second portion 210M.

[0190] Specifically, the first portion 110M has a rib group 120M that protrudes toward the second portion 210M. Fig.15 In the embodiment, although the rib group 120M includes the ribs 120M-1 and 120M-2, the number of ribs is arbitrary. In addition, the second portion 210M includes a rib 710M protruding toward the first portion 110M. The ribs 120M-1 and 120M-2 are formed by an embedded member and embedded in the cover 10M.

[0191] The two ribs 120M-1 and 120M-2 have protrusion shapes M-1 and M-2 respectively protruding toward the rib 710M. The ribs 120M-1 and 120M-2 are formed of a resin material such as polycarbonate, cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polypropylene, or the like.

[0192] The ribs 120M-1, 120M-2 and 710M are formed over the entire circumference of the opening 11. Fig.15 The example shown can also be obtained with Figure 2 The same effect as in the example shown in the figure can be obtained. In addition, the shape of the second portion 210K on the cover body 21K side and the shape of the first portion 110K on the container body 10K side can also be reversed.

[0193] Fig.13 , Fig.14 as well as Fig.15 The second parts 210K, 210L and 210M shown in the figure can be formed of a resin material with high sliding properties such as polyetherketone, polybutylene terephthalate or polyacetal in addition to polypropylene. In addition, even if the cover bodies 20K, 20L and 20M are required to have low hygroscopicity, the second parts 210K, 210L and 210M are smaller parts of the cover bodies 20K, 20L and 20M and can therefore be formed of a non-hygroscopic material.

[0194] In addition, as the material of the second part 210K, 210L and 210M, thermoplastic elastomers including polyester elastomers, polyolefin elastomers, fluorine elastomers, polyurethane elastomers, etc., fluororubbers, ethylene propylene rubbers, silicone rubbers, etc., can also be used. From the viewpoint of changing the adhesion, fillers including carbon, glass fiber, mica, talc, silicon dioxide, calcium carbonate, etc., and resins such as polyethylene, polyamide, polyacetal, fluororesin, silicone resin, etc. can also be selectively added to these materials in a specified amount. In addition, from the viewpoint of imparting conductivity and antistatic properties, carbon fibers, metal fibers, metal oxides, various antistatic agents, etc. can be appropriately added.

[0195] In the above embodiments, since the container body is a large component, when insert molding a fine and complex structure or another component, it is more accurate to set it on the cover body side rather than the container body side. Therefore, it is preferable to set the complex structure or shape on the cover body side.

[0196] Although each embodiment has been described in detail above, the present invention is not limited to a specific embodiment, and various modifications and changes can be made within the scope described in the claims. In addition, all or two or more of the constituent elements of the above-mentioned embodiments may be combined.

Claims

1. A substrate storage container, characterized in that: include: A container body, used for storing the substrate; as well as a cover body detachably engaged with the opening of the container body in a manner of closing the opening of the container body; in, The cover has a pair of locking mechanisms configured to be locked by fitting locking claws of the locking mechanisms into locking holes formed in the container body. A first portion around the opening in the container body and at least a portion of a second portion of the cover body opposite to the first portion are non-contactly matched to form a labyrinth seal structure. At least one of the first portion and the second portion has: a rib forming the labyrinth seal structure, The rib is formed over the entire circumference of the opening and protrudes toward the other of the first portion and the second portion. The rib is formed of an elastic body.

2. The substrate storage container according to claim 1, wherein: The labyrinth seal structure is formed over the entire circumference of the opening.

3. The substrate storage container according to claim 1, wherein: The first portion and the second portion have first surfaces opposite to each other in a first direction, The first direction is parallel to the surface of the substrate when the substrate is accommodated in the container body; The labyrinth seal structure is formed by the first surface of the first portion and the first surface of the second portion.

4. The substrate storage container according to claim 1, wherein: The ribs are formed in two or more portions.

5. The substrate storage container according to claim 1 or 4, characterized in that: The height difference of the rib is within 10 mm.

6. The substrate storage container according to any one of claims 1 to 4, characterized in that: The second portion is formed of a material different from a main body material of the cover.

7. The substrate storage container according to claim 6, characterized in that: The second portion is a member different from the main body of the cover body and is attached to the main body of the cover body.

8. The substrate storage container according to claim 5, characterized in that: The second portion is formed of a material different from a main body material of the cover.

9. The substrate storage container according to claim 8, characterized in that: The second portion is a member different from the main body of the cover body and is attached to the main body of the cover body.

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