An electric heating and water-washing type waste gas treatment device

Abstract

The present invention relates to an electric heating and water-washing type waste gas treatment device, which includes a first air inlet, an electric heating device, a dust filtering device, an intelligent cooling and water-washing system and an air outlet. The first air inlet is arranged on the electric heating device, the electric heating device is arranged on the dust filtering device, the dust filtering device is arranged above the water tank of the intelligent cooling and water-washing system, and the air outlet is arranged above the intelligent cooling and water-washing system. It also includes a combustion chamber fouling removal device arranged on the tee above the first air inlet. The combustion chamber fouling removal device is provided with a stainless steel brush, which can reach the combustion chamber of the electric heating device and brush off the dust on the inner wall of the combustion chamber. The present invention can automatically and regularly clean the silane dust adhering to the inner wall of the combustion chamber, reduce the water consumption of fresh water, lower the operation cost, use a 4-bit float to control the low water level, high water level and ultra-high water level in the water tank, improve the safety performance during the use of the equipment, and adopt a four-stage spraying system to improve the waste gas treatment efficiency.

Description

Technical Field

[0001] The present invention belongs to the field of waste gas treatment in the technical fields of semiconductors, solar energy, thin film batteries, TFT, etc., and particularly relates to an electric heating water washing type waste gas treatment device. Background Art

[0002] Process waste gas treatment equipment belongs to both the environmental protection industry and the special high-end intelligent auxiliary equipment dedicated to emerging industries such as semiconductors. In the production and manufacturing process of integrated circuits, some process modules (Modules) such as chemical vapor deposition (CVD), etching (Etch), ion implantation (Implant), and diffusion (Diffusion), as well as the PECVD process of amorphous silicon thin film solar energy and liquid crystal TFT-LCD thin films, etc. will use a large amount of special gases. After these gases participate in the process reaction, they are discharged in the form of waste gas, and their types can be divided into: toxic, acidic, alkaline, self-ignitable, flammable, caustic / corrosive, and perfluorinated compounds (PFCs) and volatile organic compound (VOC) gases, etc.

[0003] These originally toxic and harmful gases, which are process raw materials or reaction by-products, some of them are dangerous for corroding various pipelines, some have the danger of fire and explosion when meeting other hazards or accumulating at a higher concentration, and there are also hazards such as poisoning of operating personnel and damage to the atmospheric environment. To avoid the occurrence of these hazards, these gases must be harmlessly treated and meet the national atmospheric emission standards before they can be discharged into the atmosphere. A variety of special gases are used in the production and manufacturing processes in these fields, and these gases often have characteristics such as highly toxic, flammable, and explosive. The unreacted special gases are centrally introduced into the exhaust pipeline, and a process gas treatment device needs to be connected to the rear end of the pipeline for treatment before it can be discharged below the national emission standards.

[0004] In the prior art, there are already treatment devices for semiconductor waste gas, such as CN204034529U. This prior art is mainly used to prevent the drainage pipeline from being damaged due to the water hammer effect during drainage and can treat the waste gas generated during the production of semiconductor products. However, there are still many disadvantages in this prior art. For example: 1. During the use process, fresh water is continuously discharged and waste water is continuously drained, resulting in a large water consumption; 2. The scraper is divided into an inner scraper and an outer scraper, and the inner wall crystallization is scraped by a rotating method. The scraper is easy to get stuck and not easy to maintain; 3. A double scrubber is adopted, with high cost and large equipment external dimensions; 4. The second scrubber reduces the concentration of the gas after treatment by introducing external air for mixing, and it is difficult to judge the treatment efficiency of the equipment for harmful gases; 5. After the crystallization is scraped by the scraper and falls into the water tank, it is easy to deposit and scale, and cannot be effectively discharged; 6. During the process that the high-temperature gas enters the second scrubber after pyrolysis, the temperature of the water tank and the pipeline flowing through will be too high; 7. When the liquid level gauge at the high water level fails or is damaged, the liquid level is uncontrollable.

[0005] Based on this, the present invention is specifically proposed. Summary of the Invention

[0006] In order to solve the above problems existing in the prior art, the present invention provides an electrically heated water-washing type waste gas treatment device, and the specific technical solutions are as follows:

[0007] An electrically heated water-washing type waste gas treatment device includes a first air inlet, an electric heating device, a dust filtering device, an intelligent cooling water-washing system and an air outlet. The first air inlet is arranged on the electric heating device, the electric heating device is arranged on the dust filtering device, the dust filtering device is arranged above the water tank of the intelligent cooling water-washing system, and the air outlet is arranged above the intelligent cooling water-washing system; it further includes a combustion chamber scale removal device arranged on the tee above the first air inlet. The combustion chamber scale removal device is provided with a stainless steel brush, which can reach the combustion chamber of the electric heating device and brush the dust on the inner wall of the combustion chamber.

[0008] Furthermore, the combustion chamber scale removal device includes a power driving component, a flange and a stainless steel brush. The power driving component is fixedly connected with the flange. The end of the telescopic rod of the power driving component is provided with a stainless steel brush, and the stainless steel brush can approach or move away from the flange under the drive of the telescopic rod.

[0009] Optionally, the power driving component is a cylinder component, including a long-stroke cylinder body, a first air pipe quick-change joint, a second air pipe quick-change joint and a telescopic rod. The first air pipe quick-change joint and the second air pipe quick-change joint are respectively arranged near both ends of the long-stroke cylinder body and are used to drive the telescopic rod to reciprocate linearly.

[0010] Furthermore, the flange is a NW160 standard installation flange.

[0011] Furthermore, the first air inlet is a multifunctional air inlet, including a CF flange, a fresh water interface, an NW flange, an air inlet pressure monitoring interface and an air inlet pipe, the CF flange is arranged at the middle and lower part of the air inlet pipe, the NW flange is arranged at the top of the air inlet pipe, and the fresh water interface and the air inlet pressure monitoring interface are separately arranged on the wall of the air inlet pipe between the two flanges.

[0012] Furthermore, the first air inlet is connected to the electric heating device via a flange, the air inlet pipe extends into the combustion chamber of the electric heating device, an annular space is formed between the outer wall of the air inlet pipe and the inner wall of the combustion chamber, a second air inlet is provided on the inner wall of the combustion chamber, and the second air inlet is communicated with the annular space.

[0013] Furthermore, the electric heating device includes a heating part and a heat-insulating part. The heating part includes a combustion chamber and two ceramic heaters. The two ceramic heaters are semi-cylindrical structures. The two ceramic heaters are closed and cover the combustion chamber; the heat-insulating part includes an aluminum cover, ceramic fiber cotton and a high-temperature resistant silicone sheet installed on the inner surface of the aluminum cover. The aluminum cover covers the outside of the two ceramic heaters, and the high-temperature resistant silicone sheet covers the outside of the aluminum cover.

[0014] Furthermore, ceramic fiber wool is filled between the two ceramic heaters and the aluminum cover.

[0015] Optionally, the material of the combustion chamber is a nickel-based alloy.

[0016] Furthermore, the dust filtering device includes a vortex device, a dust tray and a filter plate. The vortex device is arranged on the water tank of the intelligent cooling water washing system, and the dust tray is hung at the bottom of the vortex device through a hook; the filter plate is arranged inside the water tank to divide the inside of the water tank into two areas.

[0017] Furthermore, the intelligent cooling water washing system includes a water tank, a multi-stage spray system, a temperature monitoring device and a water level control device. The multi-stage spray system is respectively arranged in the dust filtering device, in the water tank and in front of the air outlet. The temperature monitoring device is used to detect the temperature of the gas in the water tank. The water level control device is arranged near the exhaust port of the water tank to monitor the water level in the water tank.

[0018] Further, the multi-stage spraying system includes a first-stage spraying system, a second-stage spraying system, a third-stage spraying system, and a fourth-stage spraying system; the first-stage spraying system is composed of a first spray head on the eddy current device, and the system water supply is provided by the externally connected fresh water; the second-stage spraying system includes a water pump and a second spray head. The water pump draws water from the filtered circulating water in the water tank and supplies it to the second spray head. The second spray head is arranged at the upper part of the water tank; the spray heads of the third-stage spraying system and the fourth-stage spraying system are integrated in the water washing tower device. The water washing tower device is provided with two layers of spaces. The lower space accommodates the third spray head of the third-stage spraying system, and the upper space accommodates the fourth spray head of the fourth-stage spraying system. Both layers of spaces are filled with spray packing materials; the third spray head is connected to the circulating water provided by the water pump, and the fourth spray head is provided with the system water supply by the externally connected fresh water.

[0019] Further, the intelligent cooling water washing system further includes a stirring system in the water tank. An air vent pipe is arranged at the bottom of the water tank, and through holes are arranged on the pipe wall of the air vent pipe.

[0020] Further, the temperature monitoring device includes a first thermocouple arranged near the air inlet of the water tank and a second thermocouple arranged near the air outlet of the water tank. Both the first thermocouple and the second thermocouple are connected to the PLC.

[0021] Further, the water level control device is a four-position float water level control device.

[0022] Further, a demister is arranged in the air outlet.

[0023] Further, the electric heating water washing type waste gas treatment device further includes a pressure monitoring safety system, which includes an automatic pressure relief device, an automatic alarm device and several pressure gauges connected to the PLC. The pressure gauges include a first pressure gauge for monitoring the pressure of the first air inlet, a second pressure gauge for monitoring the pressure in the water tank, and a third pressure gauge for monitoring the pressure of the air outlet. The automatic pressure relief device is a bypass pipe connected to the discharge pipe. A pressure relief pneumatic valve is arranged in the middle of the bypass pipe, and the pressure relief pneumatic valve is controlled by the PLC.

[0024] The beneficial effects of the present invention compared with the prior art:

[0025] 1. The scaling removal device of the combustion chamber adopts a stainless steel brush, which can automatically clean the silane dust adhered to the inner wall of the combustion chamber regularly up and down, and can prevent the blockage of the inner wall of the combustion chamber.

[0026] 2. The fresh water / circulating water is controlled by the water level and time, and the power is provided by the water pump, reducing the consumption of fresh water and lowering the operation cost;

[0027] 3. A 4-bit float is adopted to control the low water level, high water level, and ultra-high water level in the water tank, ensuring the normal water level in the water tank and improving the safety performance during equipment use.

[0028] 4. The water wall and water curtain formed by the eddy current device reduce the temperature of the gas after the combustion reaction from 800 °C to about 40 °C, preventing adverse effects of high temperature on other parts.

[0029] 5. The dust tray is placed below the eddy current device, and the dust generated by combustion falls into the tray, reducing the chance of dust entering the water tank and avoiding problems such as water pump damage and nozzle blockage, which can improve the operating stability of the equipment.

[0030] 6. A four-stage spraying system is adopted to improve the waste gas treatment efficiency.

[0031] 7. A stirring system is set up to prevent dust from depositing and scaling in the water tank, enabling the dust to be discharged through the water outlet in a timely manner.

[0032] 8. The pressures at the air inlet, air outlet, and water tank are monitored in real time, and together with the pressure relief system, it avoids damage to water pipes and air pipes caused by excessive equipment pressure.

[0033] 9. A demister is set at the air outlet to prevent acidic water vapor from entering the discharge pipe with the air flow and causing pipe corrosion.

[0034] 10. The heating system first heats the gas in the enclosed space by a ceramic heater and then conducts heat to the combustion cavity, thus ensuring the temperature uniformity in the entire combustion cavity and improving the waste gas treatment efficiency.

[0035] 11. The nickel-based alloy heating pipe and the air inlet pipe form an annular space area, effectively preventing the CDA (dry cold air) air inlet from being blocked by silica. At the same time, when the dry cold air CDA enters the combustion cavity, it can effectively flow evenly downward in this area, enabling the waste gas to fully react with oxygen by combustion. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a schematic external view of an embodiment of the electric heating water washing type waste gas treatment device of the present invention.

[0037] Figure 2 It is a schematic structural view of an embodiment of the electric heating water washing type waste gas treatment device of the present invention.

[0038] Figure 3 It is a schematic structural view of an embodiment of the combustion cavity scale removal device of the electric heating water washing type waste gas treatment device of the present invention.

[0039] Figure 4 It is a schematic structural view of an embodiment of the first air inlet of the electric heating water washing type waste gas treatment device of the present invention.

[0040] Figure 5 is Figure 4 a schematic diagram showing the connection between the first air inlet and the electric heating device.

[0041] Figure 6 is a schematic structural diagram of an embodiment of the electric heating device of the electric heating and water-washing waste gas treatment device of the present invention.

[0042] Figure 7 is a schematic structural diagram of the combination of the dust filtering device and the water tank of the electric heating and water-washing waste gas treatment device of the present invention.

[0043] Figure 8 is a schematic structural diagram of the main part of the dust filtering device of the electric heating and water-washing waste gas treatment device of the present invention.

[0044] Figure 9 is a schematic structural diagram of an embodiment of the intelligent cooling and water-washing system of the electric heating and water-washing waste gas treatment device of the present invention.

[0045] Figure 10 is a schematic structural diagram of the water-washing tower device in the intelligent cooling and water-washing system of the electric heating and water-washing waste gas treatment device of the present invention.

[0046] Figure 11 is a schematic structural diagram of the water level control device in the intelligent cooling and water-washing system of the electric heating and water-washing waste gas treatment device of the present invention.

[0047] Figure 12 is a schematic structural diagram of the pressure monitoring and safety system of the electric heating and water-washing waste gas treatment device of the present invention.

[0048] Among them, 100 - the first air inlet, 110 - CF flange, 120 - fresh water interface, 130 - NW flange, 140 - air inlet pressure monitoring interface, 150 - air inlet pipe, 160 - tee; 200 - electric heating device, 201 - thermocouple 1, 202 - thermocouple 2, 210 - combustion cavity, 211 - second air inlet, 220 - first ceramic heater, 230 - second ceramic heater, 240 - first half aluminum cover, 250 - second half aluminum cover, 260 - first high-temperature silica gel sheet, 270 - second high-temperature silica gel sheet; 300 - dust filtration device, 310 - eddy current device, 311 - first spray head, 320 - dust tray, 321 - hook, 330 - filter plate; 400 - intelligent cooling and water washing system, 410 - water tank, 411 - first space area, 412 - second space area, 420 - first-stage spraying system, 430 - second-stage spraying system, 431 - water pump, 432 - second spray head, 440 - third-stage spraying system, 441 - third spray head, 450 - fourth-stage spraying system, 451 - fourth spray head, 460 - temperature monitoring device, 461 - first thermocouple, 462 - second thermocouple, 470 - water level control device, 480 - water washing tower device, 481 - lower space, 482 - upper space, 483 - packing material, 490 - stirring system inside the water tank, 491 - ventilation pipe; 500 - air outlet, 510 - demister; 600 - combustion cavity scale removal device, 610 - long-stroke cylinder body, 620 - first air pipe quick-release joint, 630 - second air pipe quick-release joint, 640 - flange, 650 - telescopic rod 650, 660 - stainless steel brush; 700 - pressure monitoring and safety system, 710 - first pressure gauge, 720 - second pressure gauge, 730 - third pressure gauge, 740 - automatic pressure relief device, 741 - pressure relief pneumatic valve, 750 - automatic alarm device; 800 - discharge pipe; A - annular space. Detailed implementation mode

[0049] The following describes the specific technical solutions of the present invention in detail through embodiments. It should be noted that the following embodiments can only be used to explain the technical solutions of the present invention and cannot be construed as a limitation to the present invention.

[0050] As Figure 1 shown, it is an external view schematic diagram of an embodiment of the electric heating and water washing type waste gas treatment device of the present invention. As Figure 2As shown in the figure, it is a schematic structural diagram of an embodiment of the electric heating and water washing type waste gas treatment device of the present invention. The electric heating and water washing type waste gas treatment device includes a first air inlet 100, an electric heating device 200, a dust filtering device 300, an intelligent cooling and water washing system 400, and an air outlet 500. The first air inlet 100 is arranged on the electric heating device 200, the electric heating device 200 is arranged on the dust filtering device 300, the dust filtering device 300 is arranged above the water tank 410 of the intelligent cooling and water washing system 400, and the air outlet 500 is arranged above the intelligent cooling and water washing system 400. The electric heating and water washing type waste gas treatment device further includes a combustion chamber scale removal device 600 arranged above the first air inlet. The combustion chamber scale removal device 600 is provided with a stainless steel brush 660, which can reach into the combustion chamber body 210 of the electric heating device 200 and brush off the dust on the inner wall of the combustion chamber body 210.

[0051] As Figure 3 shown, the combustion chamber scale removal device 600 includes a power drive assembly, a flange 640, and a stainless steel brush 660. The power drive assembly is fixedly connected to the flange 640. The end of the telescopic rod 650 of the power drive assembly is provided with the stainless steel brush 660. The stainless steel brush 660 can approach or move away from the flange 640 under the drive of the telescopic rod 650. That is to say, under the drive of the drive assembly, the stainless steel brush 660 can perform a reciprocating linear motion.

[0052] The power drive assembly can be a pneumatic, hydraulic drive or electric drive assembly. In a preferred embodiment, the power drive assembly is a cylinder assembly, including a long-stroke cylinder body 610, a first air pipe quick-change joint 620, a second air pipe quick-change joint 630, and a telescopic rod 650. The first air pipe quick-change joint 620 and the second air pipe quick-change joint 630 are respectively arranged near both ends of the long-stroke cylinder body 610 for driving the telescopic rod 650 to move. Preferably, the flange 640 is a NW160 standard installation flange.

[0053] Due to the adoption of the combustion chamber scale removal device 600 of the present invention, the problem of blockage caused by the accumulation of dust structure in the combustion chamber of the equipment is successfully solved, and the equipment maintenance cycle can be extended; the present invention adopts the NW vacuum flange and the snap-in installation method, which has the advantages of good sealing performance and easy installation and maintenance; the present invention adopts the stainless steel brush structure, which can not only ensure the strength of removing dust scale, but also ensure that it will not be stuck during operation due to its flexibility; the dust can fall smoothly into the lower dust tray, and the situation of dust accumulation on the brush will not occur.

[0054] As Figure 4As shown, in one embodiment, the first air inlet 100 is a multi-functional air inlet, including a CF flange 110, a fresh water interface 120, an NW flange 130, an air inlet pressure monitoring interface 140, and an air inlet pipe 150. The CF flange 110 is arranged at the middle-lower part of the air inlet pipe 150, the NW flange 130 is arranged at the top end of the air inlet pipe 150, and the fresh water interface 120 and the air inlet pressure monitoring interface 140 are separately arranged on the pipe wall of the air inlet pipe 150 between the two flanges, and are respectively used for accessing fresh water and a pressure gauge.

[0055] As Figure 5 As shown, the first air inlet 100 is connected to the electric heating device 200 through a flange 130, and the air inlet pipe 150 extends into the combustion cavity 210 of the electric heating device 200. An annular space A is formed between the outer wall of the air inlet pipe 150 and the inner wall of the combustion cavity 210. A second air inlet 211 is arranged on the inner wall of the combustion cavity 210, and the second air inlet 211 communicates with the annular space A.

[0056] Since CDA (dry cold air) and water are required to participate in the reaction during the combustion of semiconductor waste gas, the advantages of the first air inlet 100 of the present invention are as follows: 1. The standard CF and NW flange structures are adopted, which are convenient for installation and have good sealing performance; 2. It has a fresh water interface 120, and water is injected through a pipe joint. After the water enters the reaction chamber, it turns into water vapor due to high temperature, and the water vapor is a necessary reactant for treating some fluorides; 3. The air inlet pressure monitoring interface 140 is used to connect a pressure gauge to monitor the air inlet pressure in real time; 4. After the first air inlet 100 and the combustion cavity 210 are installed, the air inlet pipe 150 extends into the combustion cavity 210, and a circular space A is formed between the outer wall of the air inlet pipe 150 and the inner wall of the combustion cavity 210. During the heating process of the device, CDA is introduced through the second air inlet 211. When the CDA enters this space A, it is fully mixed and flows downward into the combustion cavity 210 to provide oxygen for combustion; during the shutdown process of the device, nitrogen is introduced through the second air inlet 211 to quickly cool the combustion cavity 210 and purge and discharge the remaining harmful gases. At the same time, this structure can ensure that no dust such as silicon dioxide is generated in this area A, can ensure that the air inlets of CDA or nitrogen will not be blocked, and can fully guarantee the oxygen required for combustion.

[0057] As Figure 6As shown, the electric heating device 200 includes a heating part and a heat preservation part. The heating part includes a combustion chamber 210 and two ceramic heaters (220, 230), namely a first ceramic heater 220 and a second ceramic heater 230. The two ceramic heaters (220, 230) are both semi-cylindrical structures. The two ceramic heaters (220, 230) are closed and cover the combustion chamber 210; the heat preservation part includes an aluminum cover (240, 250), ceramic fiber cotton installed on the inner surface of the aluminum cover, and a high-temperature resistant silicone sheet (260, 270 ), the aluminum cover (240, 250) is a first half aluminum cover 240 and a second half aluminum cover 250, the first half aluminum cover 240 and the second half aluminum cover 250 are coated on the outside of the two ceramic heaters (220, 230) to form a cylindrical aluminum cover; the high temperature resistant silicone sheet (260, 270) is a first high temperature resistant silicone sheet 260 and a second half high temperature resistant silicone sheet 270, the first high temperature resistant silicone sheet 260 and the second high temperature resistant silicone sheet 270 are coated on the outside of the aluminum cover (240, 250) to form a cylindrical high temperature resistant silicone sheet insulation layer.

[0058] Preferably, ceramic fiber wool is filled between the two ceramic heaters ( 220 , 230 ), namely the first ceramic heater 220 and the second ceramic heater 230 , and the aluminum covers 240 , 250 .

[0059] Preferably, the material of the combustion chamber 210 is a nickel-based alloy.

[0060] In the present invention, the temperature of the ceramic heater can be set as high as 1100°C when the device is running. In order to prevent the high temperature from affecting other parts in the hardware frame of the device, it is necessary to ensure that the surface temperature of the heating device is lower than 50°C. Therefore, a layer of high-temperature resistant ceramic fiber cotton is wrapped on the outer surface of the ceramic heater (220, 230), and then it is fixed by a clamp or the like; then the insulation cotton is wrapped by an aluminum cover (240, 250), and the two semicircular aluminum covers (240, 250) are installed together by buckles, which can also protect the ceramic heater (220, 230) from being damaged by external impact. Two standard 1 / 4 inch joints are welded on the top of the aluminum cover (240, 250) to install two thermocouples (thermocouple 1 201, thermocouple 2 202), one for controlling the temperature of the ceramic heater and the other for over-temperature protection; finally, in order to prevent the risk of burns caused by the aluminum cover (240, 250) due to human touch, a layer of high-temperature resistant silicone sheet (260, 270) is added to the outer surface of the aluminum cover.

[0061] In the present invention, the ceramic fiber thermal insulation layer can effectively prevent heat loss, reduce energy loss, and lower equipment operating costs; the ceramic fiber thermal insulation layer prevents heat from dissipating and effectively protects the operating safety of other parts in the equipment; the aluminum cover can effectively protect the ceramic heater from being damaged by external forces; the silicone sheet can effectively avoid the risk of burns caused by human body touching the surface of the ceramic heating device.

[0062] As Figure 7 and Figure 8 shown, the dust filtering device 300 includes a vortex device 310, a dust tray 320, and a filter plate 330. The vortex device 310 is arranged on the water tank 410 of the intelligent cooling and water washing system 400. The dust tray 320 is suspended below the vortex device 310 through a hook 321. The filter plate 330 is arranged inside the water tank 410, dividing the interior of the water tank 410 into two space areas: a first space area 411 and a second space area 412.

[0063] The dust filtering device 300 of the present invention adopts double filtration. The first layer of filtration: Some semiconductor processes use gases such as silane. Therefore, when the waste gas treatment equipment operates, a large amount of dust such as silicon dioxide will be generated during the combustion process of the electric heating combustion device. The dust is knocked down into the dust tray 320 through the spraying system of the vortex device 310. The tray surface has sieve holes with a pore size of 200 meshes (the pore size can be determined according to the dust size), which can allow water to flow out and prevent most of the dust from falling into the water tank 410. This dust tray 320 is mainly composed of a hook and a tray. The dust is concentrated in the tray, making maintenance convenient, reducing working hours, and improving the equipment operation rate. The second layer of filtration: This filtration layer is formed by the combination of the filter plate 330 and the water tank 410. It is inevitable that not all dust can be collected in the tray in the first filtration layer. Some dust will enter the water tank 410 along with the water flow. At this time, the filter plate 330 divides the water tank 410 into two spaces. There will be some dust in the first space area 411. The filter plate 330 prevents the dust in the first space area 411 from entering the second space area 412, thus avoiding problems such as the failure and damage of parts such as water pumps, flow meters, spray heads, and liquid level floats due to dust. As a result, the equipment maintenance cycle is extended, the failure rate is low, and the maintenance cost is reduced. The surface of the filter plate 330 is a porous structure, which prevents dust from passing through but allows water flow to pass through.

[0064] As Figure 9 shown, the intelligent cooling and water washing system 400 includes a water tank 410, a multi-stage spraying system, a temperature monitoring device 460, and a water level control device 470. The multi-stage spraying system is respectively arranged inside the dust filtering device 300, inside the water tank 410, and in front of the air outlet 500. The temperature monitoring device 460 is used to detect the temperature of the gas inside the water tank 410. The water level control device 470 is arranged near the exhaust port of the water tank and is used to monitor the water level inside the water tank 410.

[0065] The multi-stage spraying system includes a first-stage spraying system 420, a second-stage spraying system 430, a third-stage spraying system 440, and a fourth-stage spraying system 450. The first-stage spraying system 420 is composed of a first spray head 311 on the vortex device 310 (see Figure 8) It is supplied with water by an externally connected fresh water supply system; the second-stage spray system 430 includes a water pump 431 and a second spray head 432. The water pump 431 draws water from the filtered circulating water in the water tank 410 and supplies it to the second spray head 432. The second spray head 432 is arranged at the upper part of the water tank 410; the spray heads (441, 451) of the third-stage spray system 440 and the fourth-stage spray system 450 are integrated in the water washing tower device 480. The water washing tower device 480 is provided with two layers of spaces (481, 482). The lower space 481 houses the third spray head 441 of the third-stage spray system 440, and the upper space 482 houses the fourth spray head 451 of the fourth-stage spray system 450. Both layers of spaces (481, 482) are filled with spray packing materials 483; the third spray head 451 is connected to the circulating water provided by the water pump 431, and the fourth spray head 451 is supplied with water by an externally connected fresh water supply system.

[0066] The first-stage spray system 420: After the waste gas is burned by the combustion device, the gas flows through the first-stage spray system (formed by the fresh water spray heads 311 of the eddy current device 310). The fresh water of the eddy current device is ejected from 8 fresh water spray heads 311 evenly distributed around, and forms a water curtain to absorb part of the water-soluble waste gas, knock down the dust into the dust tray, and the temperature of the waste gas is instantly cooled from about 800 °C to about 40 °C, thus completing the first-stage spray.

[0067] The second-stage spray system 430: When the waste gas flows through the first-stage spray system 420, it immediately enters the second spray system 430. This spray system is connected to the circulating water and powered by the water pump 431. The water in the water tank 410 is pumped out, flows through the pressure switch and the flow meter, and finally is ejected from multiple second spray heads 432. The direction of the water flow ejection is opposite to the direction of the waste gas flow, which is beneficial to better hitting and absorbing the waste gas.

[0068] The third / fourth-stage spray systems (440, 450): As Figure 10 shown, the third-stage and fourth-stage spray systems are mainly combined with the water washing tower device 480. After the air flow flows through the second-stage water washing system 430, it immediately enters the third spray system 440. This spray system is connected to the circulating water. Different from the second spray system, this system includes spray packing materials 483. When the waste gas passes through, the packing materials 483 can maximize the contact area with the waste gas, thereby improving the adsorption efficiency. Finally, it flows through the fourth spray system 450. The difference between this system and the third-stage spray system 440 is that fresh water is used; when the fresh water is sprayed from top to bottom, it can effectively clean the dust on the packing materials 483 of the third-stage spray system 440, thereby ensuring the fluidity of the waste gas and avoiding blockage.

[0069] Each stage of the spray system can be equipped with a flow switch and a flow meter to ensure that the spray heads are not blocked, thereby ensuring the waste gas treatment efficiency and the equipment safety.

[0070] The temperature monitoring device 460 includes a first thermocouple 461 disposed near the air inlet of the water tank 410 and a second thermocouple 462 disposed near the air outlet of the water tank 410. Both the first thermocouple 461 and the second thermocouple 462 are connected to the PLC.

[0071] As Figure 11 shown, the water level control device 470 is a four-position float water level control device. This control device uses four floats 471 to respectively control the low water level, normal water level, high water level, and ultra-high water level in the water tank. When the water level in the water tank triggers the low water level float, the pneumatic inlet valve on the water tank 410 opens to inject fresh water, and the pneumatic inlet valve closes after the water level reaches the normal water level; when the water level in the water tank triggers the high water level float alarm, the pneumatic drain valve opens to drain the waste water, and the pneumatic drain valve closes after the water level is at the normal water level; when the high water level float fails, the water level will trigger the ultra-high water level float, so that the pneumatic drain valve opens and the pneumatic inlet valve closes, and the drain valve closes after the water level is normal. This control device sets a timer through the PLC system to completely replace the water in the water tank.

[0072] In a preferred embodiment, the intelligent cooling water washing system 400 further includes a stirring system 490 in the water tank. An air vent pipe 491 is provided at the bottom of the water tank 410. The pipe wall of the pipe 491 has through holes, and air passes through the inside of the pipe 491 to achieve the stirring function by generating bubbles, preventing dust deposition and scaling.

[0073] The present invention adopts an intelligent cooling water washing system, which has the following advantages: 1. Due to the adoption of a long-stroke four-stage spraying system, the water-soluble waste gas treatment efficiency reaches more than 99.99%; 2. The high-temperature gas is instantly cooled to 40°C to ensure the safety of the equipment; 3. The flow switch senses whether the nozzle is blocked at all times to ensure the waste gas treatment efficiency; 4. The flow meter ensures that the water spraying force of each nozzle is sufficient; 5. The filler increases the contact area between the water-soluble gas and water to improve the waste gas treatment efficiency; 6. The thermocouple temperature control system monitors the temperatures of the waste gas and water to ensure the safety of the equipment; 7. The four floats ensure the normal water level in the tank.

[0074] As Figure 2 shown, a demister 510 is provided in the air outlet 500, which can prevent acidic water mist from being carried out of the equipment by the air flow and flowing into the discharge pipe 800, causing pipeline corrosion.

[0075] As Figure 1 、 Figure 2 and Figure 12As shown in the figure, the electric heating and water-washing type waste gas treatment device further includes a pressure monitoring safety system 700, which includes an automatic pressure relief device 740 connected to the PLC and several pressure gauges. The pressure gauges include a first pressure gauge 710 for monitoring the pressure at the air inlet, a second pressure gauge 720 for monitoring the pressure in the water tank 410, and a third pressure gauge 730 for monitoring the pressure at the air outlet. The automatic pressure relief device 740 is a bypass pipe connected to the discharge pipe 800. A pressure relief pneumatic valve 741 is arranged in the middle of the bypass pipe, and the pressure relief pneumatic valve 741 is controlled by the PLC. The pressure monitoring mainly monitors the pressure changes at three places: the first air inlet 100, inside the water tank 410, and the air outlet 500. When the pressure value exceeds the preset value, the automatic alarm device 750 in the PLC will issue an alarm. The first pressure gauge 710 monitors whether the combustion reaction cavity is blocked by dust, which will affect the waste gas flow and treatment efficiency; the second pressure gauge 720 monitors whether the water washing tower device 480 is blocked; the third pressure gauge 730 monitors whether the air outlet 500 is blocked. Through the pressure monitoring at these three places, the equipment failure points can be effectively judged, and the safety performance of the equipment can be improved. When the pressure in the water tank 410 is too high, the equipment automatically starts the pressure relief device and opens the pressure relief pneumatic valve for pressure relief operation to avoid damage to the equipment.

[0076] The present invention adopts multiple monitoring means to ensure the safe operation of the equipment.

[0077] The typical working process of an embodiment of the electric heating and water-washing type waste gas treatment device of the present invention is as follows. 1. The flammable, explosive and water-soluble waste gas discharged from the process end enters the equipment through the air inlet tee 160.

[0078] 2. The waste gas flows through the first air inlet 100 and enters the nickel-based alloy reaction combustion cavity 210; this combustion cavity heats the air through external ceramic heaters (220, 230) and then conducts heat evenly to raise the temperature inside the combustion cavity.

[0079] 3. The combustion temperature in the gas combustion cavity is about 800 °C. After combustion, the gas flows through the eddy current device 310.

[0080] 3.1 The injection of circulating water in the eddy current device 310 forms a water wall along the pipe wall to prevent heat conduction to the outer surface and cause damage to parts and personnel.

[0081] 3.2 The injection of fresh water forms a water curtain on the cross-section through which the waste gas passes. The temperature of the waste gas is instantly cooled from about 800 °C to about 40 °C, absorbing some water-soluble gases and knocking down the dust generated during the combustion process; the knocked-down dust is collected through the dust tray 320, which can prevent 90% of the dust from falling into the water tank 410 to avoid the failure of functions of parts such as water pumps, flow meters, and nozzles.

[0082] 4. The exhaust gas enters the water tank 410. The water tank serves as a collection container for the liquid. The water in the water tank plays a role in cooling and adsorbing some water-soluble gases. There are the following mechanisms in the water tank 410:

[0083] 4.1 The multi-spray head spraying system (the second-stage spraying system 430), which is in the opposite direction to the flowing direction of the exhaust gas, can better treat water-soluble gases.

[0084] 4.2 The stirring system 490 in the water tank. CDA is introduced into its ventilation pipe 491, and holes are drilled on the pipe wall to generate bubbles to achieve the stirring function, prevent dust deposition and scaling, and enable the dust to be discharged through the water outlet in time.

[0085] 4.3 The pressure monitoring system 700 monitors the pressure change in the water tank at all times. When the pressure is too high, the automatic pressure relief device 740 is opened. The pressure relief device is mainly composed of a PVC pipe and a pneumatic valve, and is controlled by a PLC.

[0086] 4.4 Thermocouples (461, 462) monitor the real-time temperatures of the gas and water in the water tank.

[0087] 5. After the exhaust gas flows through the water tank 410, it enters the water scrubber device 480 to clean the water-soluble gases, and the treatment efficiency is over 99.99%;

[0088] 5.1 First, it passes through the third-stage spraying system 440 in the water scrubber device, which is composed of the packing 483 and the third spray head 441. The water used in this spraying system is recycled water;

[0089] 5.2 Secondly, it flows through the fourth spraying system 450 in the water scrubber device;

[0090] 5.3 Finally, the gas flows through the demister in the water scrubber to prevent acidic water mist from being carried out of the equipment by the gas flow and flowing into the discharge pipeline, causing pipeline corrosion.

[0091] 6. The treated gas enters the discharge pipeline 800 through the air outlet 500. The air outlet is equipped with a pressure monitoring device to monitor the pressure change in real time.

[0092] The present invention is mainly used to treat toxic and harmful gases such as arsine, phosphine, silane, hydrogen, ammonia, chlorine (Cl2), hydrogen bromide (HBr), hydrogen chloride (HCl), etc. used in processes such as etching (ETCH), diffusion (Diff), epitaxy (Epi), ion implantation (Ion), chemical vapor deposition (CVD), etc.

[0093] The embodiments in the above specification are only used to illustrate the present invention, and they do not limit the protection scope of the present invention. The protection scope of the present invention is only limited by the claims. Any omission, substitution or modification made on the basis of the disclosed embodiments of the present invention will fall within the protection scope of the present invention.

Claims

1. An electric heating and water washing type waste gas treatment device, comprising a first air inlet (100), an electric heating device (200), a dust filtering device (300), an intelligent cooling and water washing system (400) and an air outlet (500). The first air inlet (100) is arranged on the electric heating device (200), the electric heating device (200) is arranged on the dust filtering device (300), the dust filtering device (300) is arranged above the water tank (410) of the intelligent cooling and water washing system (400), and the air outlet (500) is arranged above the intelligent cooling and water washing system (400); characterized in that, It also includes a combustion chamber fouling removal device (600) disposed on the upper tee (160) of the first air inlet (100), wherein the combustion chamber fouling removal device (600) is provided with a stainless steel brush (660) capable of reaching into the combustion chamber (210) of the electric heating device (200) and brushing away dust on the inner wall of the combustion chamber (210); The first air inlet (100) is a multifunctional air inlet, comprising a CF flange (110), a fresh water interface (120), an NW flange (130), an air inlet pressure monitoring interface (140) and an air inlet pipe (150), wherein the CF flange (110) is arranged at the middle and lower part of the air inlet pipe (150), the NW flange (130) is arranged at the top of the air inlet pipe (150), and the fresh water interface (120) and the air inlet pressure monitoring interface (140) are separately arranged on the wall of the air inlet pipe (150) between the two flanges; The first air inlet (100) is connected to the electric heating device (200) via a flange, the air inlet pipe (150) extends into the combustion chamber (210) of the electric heating device (200), an annular space (A) is formed between the outer wall of the air inlet pipe (150) and the inner wall of the combustion chamber (210), and a second air inlet (211) is provided on the inner wall of the combustion chamber (210), and the second air inlet (211) is communicated with the annular space (A).

2. The electric heating and water-washing type waste gas treatment device according to claim 1, characterized in that, The combustion chamber fouling removal device (600) comprises a power drive assembly, a flange (640) and a stainless steel brush (660); the power drive assembly is fixedly connected to the flange (640); a stainless steel brush (660) is arranged at the end of a telescopic rod (650) of the power drive assembly; and the stainless steel brush (660) can approach or move away from the flange (640) under the drive of the telescopic rod (650).

3. The electric heating and water-washing type waste gas treatment device according to claim 2, wherein, The power drive assembly is a cylinder assembly, comprising a long-stroke cylinder body (610), a first air pipe quick-change joint (620), a second air pipe quick-change joint (630) and a telescopic rod (650). The first air pipe quick-change joint (620) and the second air pipe quick-change joint (630) are respectively arranged near the two ends of the long-stroke cylinder body (610) and are used to drive the telescopic rod (650) to reciprocate linearly.

4. The electric heating and water-washing type waste gas treatment device according to claim 2, wherein, The flange (640) of the combustion chamber fouling removal device (600) is a NW160 standard mounting flange.

5. The electric heating and water-washing type waste gas treatment device according to claim 1, wherein, The electric heating device (200) comprises a heating part and a heat-insulating part, wherein the heating part comprises a combustion chamber (210) and two ceramic heaters (220, 230), wherein the two ceramic heaters (220, 230) are both semi-cylindrical structures, and the two ceramic heaters (220, 230) are closed together and cover the combustion chamber (210); the heat-insulating part comprises an aluminum cover (240, 250), ceramic fiber cotton and high-temperature resistant silicone sheets (260, 270) installed on the inner surface of the aluminum cover, wherein the aluminum cover (240, 250) covers the outside of the two ceramic heaters (220, 230), and the high-temperature resistant silicone sheets (260, 270) covers the outside of the aluminum cover (240, 250).

6. The electric heating and water-washing type waste gas treatment device according to claim 5, characterized in that, Ceramic fiber cotton is filled between the two ceramic heaters (220, 230) and the aluminum covers (240, 250).

7. The electric heating and water-washing type waste gas treatment device according to claim 5, characterized in that The material of the combustion chamber (210) is nickel-based alloy.

8. The electric heating and water-washing type waste gas treatment device according to claim 1, wherein The dust filtering device (300) includes a vortex device (310), a dust tray (320) and a filter plate (330). The vortex device (310) is arranged on the water tank (410) of the intelligent cooling and water washing system (400). The dust tray (320) is suspended below the vortex device (310) through a hook (321). The filter plate (330) is arranged inside the water tank (410) to divide the interior of the water tank (410) into two areas.

9. The electric heating and water-washing type waste gas treatment device according to claim 1, characterized in that The intelligent cooling and water washing system (400) includes a water tank (410), a multi-stage spraying system, a temperature monitoring device (460) and a water level control device (470). The multi-stage spraying system is respectively arranged inside the dust filtering device (300), inside the water tank (410) and in front of the air outlet (500). The temperature monitoring device (460) is used to detect the temperature of the gas inside the water tank (410). The water level control device (470) is arranged near the exhaust port of the water tank and is used to monitor the water level inside the water tank (410).

10. The electric heating and water-washing type waste gas treatment device according to claim 9, characterized in that, The multi-stage spraying system includes a first-stage spraying system (420), a second-stage spraying system (430), a third-stage spraying system (440) and a fourth-stage spraying system (450). The first-stage spraying system (420) is composed of a first spray head (311) on the vortex device (310), and is supplied with water by an external fresh water supply system. The second-stage spraying system (430) includes a water pump (431) and a second spray head (432). The water pump (431) takes water from the filtered circulating water in the water tank (410) and supplies it to the second spray head (432). The second spray head (432) is arranged at the upper part of the water tank (410). The spray heads (441, 451) of the third-stage spraying system (440) and the fourth-stage spraying system (450) are integrated inside the water washing tower device (480). The water washing tower device (480) is provided with two layers of spaces (481, 482). The lower space (481) accommodates the third spray head (441) of the third-stage spraying system (440), and the upper space (482) accommodates the fourth spray head (451) of the fourth-stage spraying system (450). Both layers of spaces (481, 482) are filled with spray packing materials (483). The third spray head (441) is connected to the circulating water provided by the water pump (431), and the fourth spray head (451) is supplied with water by an external fresh water supply system.

11. The electric heating and water-washing type waste gas treatment device according to claim 9, wherein, The intelligent cooling and water washing system (400) further includes a stirring system inside the water tank (490). An air vent pipe (491) is arranged at the bottom of the water tank (410), and the pipe wall of the air vent pipe (491) has through holes.

12. The electric heating and water-washing type waste gas treatment device according to claim 9, characterized in that, The temperature monitoring device (460) includes a first thermocouple (461) arranged near the air inlet of the water tank (410) and a second thermocouple (462) arranged near the air outlet of the water tank (410). Both the first thermocouple (461) and the second thermocouple (462) are connected to the PLC.

13. The electric heating and water-washing type waste gas treatment device according to claim 9, characterized in that, The water level control device (470) is a four-float water level control device.

14. The electric heating and water-washing type waste gas treatment device according to claim 1, characterized in that, A demister (510) is provided in the air outlet (500).

15. The electric heating and water-washing type waste gas treatment device according to claim 1, wherein, The electric heating water-washing type waste gas treatment device further includes a pressure monitoring safety system (700), which includes an automatic pressure relief device (740) connected to the PLC and several pressure gauges. The pressure gauges include a first pressure gauge (710) for monitoring the inlet air pressure, a second pressure gauge (720) for monitoring the pressure in the water tank (410), and a third pressure gauge (730) for monitoring the outlet air pressure. The automatic pressure relief device (740) is a bypass pipe connected to the discharge pipe (800). A pressure relief pneumatic valve (741) is provided in the middle of the bypass pipe, and the pressure relief pneumatic valve (741) is controlled by the PLC.

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