An anode box, an anode box assembly and a horizontal electroplating device

Abstract

The present invention provides an anode box, an anode box assembly and a horizontal electroplating device, which include a main body and a diaphragm. The main body has a frame structure, and the frame encloses to form a containing cavity, in which an anode member is adapted to be placed. The diaphragm is densely provided with a plurality of first through holes, and the diaphragm is arranged on one side of the frame structure of the main body. At least the surface of the diaphragm facing away from the anode member is a curved surface that is concave towards the anode member. The anode box is placed below the workpiece to be processed in the electroplating tank body, and the diaphragm is located between the lower surface of the workpiece to be processed and the anode member. Since the surface of the diaphragm facing the lower surface of the workpiece to be processed is a curved surface, after the bubbles generated by the reaction of the anode member in the electroplating solution rise to the surface of the diaphragm, they transfer from the concave area of the curved surface along the surface of the diaphragm to the highest point of the curved surface. There are no bubbles in the concave area of the curved surface, and the workpiece to be processed facing the concave area will not be affected by the bubbles, ensuring the uniformity and stability of electroplating.

Description

Technical Field

[0001] The present invention relates to the technical field of electroplating, and particularly relates to an anode box, an anode box assembly and a horizontal electroplating device. Background Art

[0002] In the existing horizontal electroplating line, the plate to be electroplated runs horizontally in the electroplating tank, and anode members are respectively arranged at intervals on the upper and lower sides of the plate. To ensure that the distance between the anode member and the plate surface of the plate to be electroplated is the same, the anode member mostly uses a titanium mesh plate. The titanium mesh plate is horizontally placed in the anode box, and an anode diaphragm is arranged between the titanium mesh plate and the plate to be electroplated. The anode diaphragm is densely distributed with through holes to facilitate the passage of current and cations.

[0003] During electroplating, hydrogen gas is precipitated on the surface of the titanium mesh plate located below the plate to be electroplated, forming hydrogen bubbles in the electroplating solution. The hydrogen bubbles float upward and adhere to the surface of the anode diaphragm. As time goes by, the bubbles gradually become larger. The existence of hydrogen bubbles is likely to cause the divergence of current in the electroplating solution, resulting in uneven power lines, and further causing uneven electroplating.

[0004] In addition, as the bubbles gradually become larger, their buoyancy also increases, so that they break away from the surface of the anode diaphragm and continue to float upward. The floating hydrogen bubbles are likely to impact the plate to be electroplated, causing the plate to shake, and the bubbles gather on the lower surface of the plate, affecting the uniformity of electroplating.

[0005] When the bubbles burst, hydrogen gas enters the surface of the plate to be electroplated during electroplating, which is likely to cause hydrogen embrittlement, that is, the trace hydrogen entering the surface of the plate to be electroplated causes the material to become brittle or even crack under the action of internal residual or external stress, seriously affecting the electroplating quality of the plate. Summary of the Invention

[0006] Therefore, the technical problem to be solved by the present invention is to overcome the influence of bubbles generated by the lower anode member during electroplating on the electroplating quality in the prior art.

[0007] For this purpose, the present invention provides an anode box, comprising:

[0008] A main body, in a frame structure, and the frame encloses to form a containing cavity; the containing cavity is suitable for placing an anode member;

[0009] A diaphragm, on which a plurality of first through holes are densely distributed, is arranged on one side of the frame structure of the main body; at least one side surface of the diaphragm facing away from the anode member is a curved surface concave towards the anode member.

[0010] The projection of the side surface of the diaphragm facing away from the anode member on a plane perpendicular to the running direction of the workpiece to be processed is a flat curve integrally in a C shape.

[0011] The projection of the main body on a plane perpendicular to the running direction of the workpiece to be processed is an axisymmetric figure;

[0012] One side surface of the diaphragm facing away from the anode member is in a concave arc shape that depresses from the symmetric two ends of the frame structure of the main body towards the middle.

[0013] The overall thickness of the diaphragm is uniform.

[0014] It further includes:

[0015] At least one reinforcing rib, which is arranged along the surface of the diaphragm and is fixedly connected to the main body and the diaphragm.

[0016] It further includes:

[0017] A circulation pipe, which is arranged in the accommodating cavity;

[0018] One end of the circulation pipe is communicated with an infusion device and is adapted to introduce a turbulent flow liquid into the circulation pipe.

[0019] A plurality of second through holes are densely distributed on the pipe wall of the circulation pipe.

[0020] The other end of the circulation pipe is communicated with a suction device.

[0021] The circulation pipe extends along a direction perpendicular to the running direction of the workpiece to be processed, and both ends are respectively fixed at both ends of the main body.

[0022] The pipe wall of the circulation pipe abuts against the lower surface of the diaphragm.

[0023] The circulation pipe is arranged at the middle position of the diaphragm.

[0024] A notch is formed on the side wall of the circulation pipe facing the diaphragm; the edge of the notch abuts against one side surface of the diaphragm facing the anode member;

[0025] The other end of the circulation pipe is communicated with a suction device.

[0026] It further includes:

[0027] An anti-foaming structure, which is formed on the surface of the diaphragm facing away from the accommodating cavity and is located at both ends of the diaphragm in the direction perpendicular to the running direction of the workpiece to be processed.

[0028] The anti-foaming structure is a plurality of sheets or spines protruding from the diaphragm.

[0029] It further includes a guiding structure, which is arranged in the accommodating cavity and is adapted to guide the anode member into the accommodating cavity.

[0030] The present invention provides an anode box assembly, which includes at least one of the above-mentioned anode boxes and at least one anode member; the anode member is placed in the accommodating cavity of the anode box.

[0031] The present invention provides a horizontal electroplating device, including at least one of the above-mentioned anode boxes.

[0032] The technical solution of the present invention has the following advantages:

[0033] 1. The anode box provided by the present invention includes a main body and a diaphragm. The main body is in a frame structure, and the frame encloses to form a receiving cavity. An anode member is suitable for being placed in the receiving cavity. The diaphragm is densely provided with a plurality of first through holes. The diaphragm is arranged on one side of the frame structure of the main body, and at least one side surface of the diaphragm facing away from the anode member is a curved surface recessed towards the anode member. The anode box is placed below the workpiece to be processed in the electroplating tank body, and the diaphragm is located between the lower surface of the workpiece to be processed and the anode member. Since one side surface of the diaphragm facing the lower surface of the workpiece to be processed is a curved surface, after the bubbles generated by the reaction of the anode member in the electroplating solution rise to the surface of the diaphragm, they transfer from the concave area of the curved surface along the surface of the diaphragm to the highest point of the curved surface. There are no bubbles in the concave area of the curved surface, and the workpiece to be processed facing the concave area will not be affected by the bubbles, ensuring the uniformity and stability of electroplating.

[0034] 2. For the anode box provided by the present invention, the projection of the side surface of the diaphragm facing away from the anode member on the plane perpendicular to the running direction of the workpiece to be processed is a flat curve integrally in a C shape, that is, the various parts on the curved surface of this side of the diaphragm are smoothly transitioned, and there is no situation of alternating peaks and valleys, so that the bubbles in the curved surface all transfer along the surface of the diaphragm to one end or both ends of the C shape.

[0035] 3. For the anode box provided by the present invention, the main body is in an axisymmetric structure, and the curved surface of the diaphragm is a concave inferior arc from the symmetric two ends on the frame structure towards the middle. During the electroplating process, the workpiece to be processed is placed horizontally. The symmetric structure makes the positions of the anode box relative to the workpiece to be processed symmetrically distributed, which is more conducive to controlling local changes such as current.

[0036] 4. For the anode box provided by the present invention, the overall thickness of the diaphragm is uniform, so that the two surfaces above and below the diaphragm can both generate the effect of making the bubbles climb and transfer along the curved surface.

[0037] 5. For the anode box provided by the present invention, a flow pipe is arranged in the receiving cavity. One end of the flow pipe is communicated with an infusion device, and electroplating solution or other disturbing liquids that do not affect the composition of the electroplating solution are conveyed into the flow pipe through the infusion device. The flowing liquid enters the almost static electroplating solution in the tank body, which can disturb the overall fluctuation of the electroplating solution, so as to take the bubbles transferred to both ends of the diaphragm away from the diaphragm to make them burst, or make them burst by the viscous force between fluid layers.

[0038] 6. For the anode box provided by the present invention, defoaming structures are arranged at both ends of the diaphragm, including a plurality of sheets or thorns protruding from the surface of the diaphragm, so that the bubbles collide with the sheets or thorns and burst when climbing and transferring along the curved surface to both ends. Description of the Drawings

[0039] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0040] Figure 1 It is a schematic structural diagram of the anode box of the present invention;

[0041] Figure 2 It is an exploded structural diagram of the anode box of the present invention;

[0042] Figure 3 It is a side view of the anode box of the present invention;

[0043] Figure 4 It is a schematic diagram of the partial structure of the anode box of the present invention Figure 1 ;

[0044] Figure 5 It is a schematic diagram of the partial structure of the anode box of the present invention Figure 2 。

[0045] Explanation of reference numerals:

[0046] 1. Main body; 11. Accommodating cavity; 2. Diaphragm; 3. Reinforcing rib; 4. Flow pipe; 41. Notch; 5. Guide structure; 6. Anode part; 7. Copper bar. Specific embodiments

[0047] The following will clearly and completely describe the technical solutions of the present invention in conjunction with the drawings. Obviously, the described embodiments are some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0048] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0049] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0051] Embodiment 1

[0052] This embodiment provides an anode box, as Figure 1 shown, including a main body 1 and a diaphragm 2. The main body 1 has a frame structure. In this embodiment, the cross-section of the frame structure is rectangular. The frame encloses to form a containing cavity 11, and an anode member 6 is suitable to be placed in the containing cavity 11. In this embodiment, as Figure 2 shown, the anode member 6 is a square flat plate-like structure, which is adapted to the rectangular structure of the frame.

[0053] In the anode box of this embodiment, during use, it is horizontally placed below the workpiece to be processed. The workpiece to be processed is plate-shaped, horizontally placed in an electroplating tank body, and is driven by a driving device to move linearly in the horizontal direction. Both the workpiece to be processed and the anode box are immersed in the electroplating solution.

[0054] The diaphragm 2 is arranged between the anode member 6 and the workpiece to be processed. A plurality of first through holes (not shown in the figure) are densely distributed on the diaphragm 2. As Figure 3 shown, the diaphragm 2 is arranged on the side of the frame structure of the main body 1 facing the workpiece to be processed. In this embodiment, the overall thickness of the diaphragm 2 is uniform. One side surface of the diaphragm 2 facing the lower surface of the workpiece to be processed is a curved surface. Therefore, after the bubbles generated by the reaction of the anode member 6 in the electroplating solution rise to the upper surface of the diaphragm 2, with the progress of the electroplating reaction and over time, the bubbles gradually increase, and the buoyancy force received gradually increases but is not yet sufficient to make them instantly break away from the surface of the diaphragm 2. During this process, the bubbles transfer from the concave area of the curved surface along the surface of the diaphragm 2 to the highest point of the curved surface. There are no bubbles in the concave area of the curved surface, and the workpiece to be processed facing this concave area will not be affected by the bubbles, ensuring the uniformity and stability of electroplating.

[0055] The projection of the surface of the diaphragm 2 facing the workpiece to be processed on a plane perpendicular to the running direction of the workpiece to be processed is a flat curve that is integrally C-shaped, that is, the various parts on the curved surface of the diaphragm 2 are smoothly transitioned, and there is no alternating situation of peaks and valleys, so that the air bubbles in the curved surface are all transferred along the surface of the diaphragm 2 to one end or both ends of the C shape. In this embodiment, as Figure 3 shown, the main body 1 has an axisymmetric structure, and the curved surface of the diaphragm 2 is a concave arc that depresses from the symmetric two ends of the frame structure to the middle. During the electroplating process, the workpiece to be processed is placed horizontally, and the symmetric structure makes the positions of the anode boxes relative to the workpiece to be processed symmetrically distributed, which is more conducive to controlling local changes such as current. The overall thickness of the diaphragm 2 is uniform. Therefore, both the upper and lower surfaces of the diaphragm 2 can enable the air bubbles to climb and transfer along the curved surface to both ends. In this embodiment, as Figure 1 shown, two reinforcing ribs 3 are uniformly spaced on the upper surface of the diaphragm 2. The reinforcing ribs 3 are arranged along the surface of the diaphragm 2 and are fixedly connected to the main body 1 and the diaphragm 2.

[0056] As Figure 1 or Figure 2 shown, a flow pipe 4 is arranged in the accommodating cavity 11. One end of the flow pipe 4 is communicated with an infusion device (not shown in the figure). An electroplating solution or other turbulence liquids that do not affect the composition of the electroplating solution are conveyed into the flow pipe 4 through the infusion device. The flowing liquid enters the almost static electroplating solution in the tank body, which can disturb the overall fluctuation of the electroplating solution, so as to take the air bubbles transferred to both ends of the diaphragm 2 away from the diaphragm 2 to make them burst, or make them burst by the viscous force between fluid layers. Further, a plurality of second through holes can be densely opened on the pipe wall of the flow pipe 4, so that part of the turbulence liquid entering the flow pipe 4 flows out from the second through holes to achieve the purpose of disturbing the electroplating solution. Furthermore, a suction device (not shown in the figure) can be arranged at the other end of the flow pipe 4 to promote the convection of the liquid from the second through holes, thereby improving the disturbance of the electroplating solution.

[0057] In this embodiment, as Figure 2 shown, the flow pipe 4 is arranged at the middle position of the diaphragm 2 and extends from one end of the main body 1 in a direction perpendicular to the running direction of the workpiece to be processed to the other end. As Figure 4 shown, a notch 41 is opened on the side wall of the flow pipe 4, and the edge of the notch 41 abuts against the lower surface of the diaphragm 2. One end of the flow pipe 4 is communicated with the infusion device, and the other end is communicated with the suction device.

[0058] In this embodiment, as Figure 2 shown, three anode members 6 are adapted to be arranged side by side in the horizontal direction in the accommodating cavity 11, corresponding to the middle section and both ends of the diaphragm 2 respectively. The anode members 6 are titanium meshes. As Figure 2As shown, within the anode box, three rectifying zones A, B, and C are arranged in parallel in a direction perpendicular to the running direction of the workpiece to be processed. Each titanium mesh corresponds to one rectifying zone. Each titanium mesh is connected to a copper bar 7 through a metal connector and is powered through the copper bar 7. Moreover, the current magnitudes in the A and C rectifying zones at both ends are the same, and the current magnitude in the B rectifying zone in the middle is different from that at both ends to accommodate workpieces to be processed with a relatively large width.

[0059] As Figure 5 shown, correspondingly, a guiding structure 5 is arranged in the accommodating cavity 11 of the main body 1 corresponding to the three titanium meshes. The guiding structure 5 is a conventional groove guiding structure 5, that is, two opposite sides of the titanium mesh are respectively inserted into the corresponding guiding grooves, and the titanium mesh slides into the accommodating cavity 11 along the guiding grooves on both sides.

[0060] As the first alternative embodiment of Embodiment 1, the thickness of the diaphragm 2 can be uneven, and it is only necessary to ensure that the surface on the side facing the workpiece to be processed is a curved surface.

[0061] Embodiment 2

[0062] This embodiment provides an anode box. Compared with the technical solution in Embodiment 1, the difference lies in that defoaming structures are respectively arranged at both ends of the diaphragm 2. The defoaming structures include several sheets or thorns protruding from the surface of the diaphragm 2, so that when the bubbles climb along the curved surface and transfer to both ends, they collide with the sheets or thorns and burst; further, the flow pipe 4 can be not provided, that is, no additional disturbance is imposed on the electroplating solution.

[0063] Embodiment 3

[0064] This embodiment provides an anode box assembly, including at least one anode box in Embodiment 1 or Embodiment 2 and at least one anode member 6, and the anode member 6 is placed in the accommodating cavity 11 of the anode box.

[0065] Embodiment 4

[0066] This embodiment provides a horizontal electroplating device, including at least one anode box in Embodiment 1 or Embodiment 2.

[0067] Obviously, the above embodiments are merely examples given for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or alterations can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or alterations derived therefrom still fall within the protection scope of the present invention.

Claims

1. An anode box, characterized in that, Comprising: A main body (1) in a frame structure, with the frame enclosing to form a receiving cavity (11); an anode member (6) is adapted to be placed in the receiving cavity (11); A diaphragm (2) with a plurality of first through holes densely distributed thereon, disposed on one side of the frame structure of the main body (1); at least one surface of the diaphragm (2) facing away from the anode member (6) is a curved surface concave towards the anode member (6); A circulation pipe (4) disposed in the receiving cavity (11); One end of the circulation pipe (4) is connected to an infusion device and is adapted to introduce a turbulent flow liquid into the circulation pipe (4); A notch (41) is formed on the side wall of the circulation pipe (4) facing the diaphragm (2); the edge of the notch (41) abuts against one surface of the diaphragm (2) facing the anode member (6); The other end of the circulation pipe (4) is connected to a suction device; The circulation pipe (4) extends along a direction perpendicular to the running direction of the workpiece to be processed, and both ends are respectively fixed at both ends of the main body (1); An anti-foaming structure is formed on the surface of the diaphragm (2) facing away from the receiving cavity (11) and is located at both ends of the diaphragm (2) in the direction perpendicular to the running direction of the workpiece to be processed.

2. The anode cassette according to claim 1, characterized in that, The projection of the surface of the diaphragm (2) facing away from the anode member (6) on a plane perpendicular to the running direction of the workpiece to be processed is a flat curve integrally in a C shape.

3. The anode box according to claim 2, characterized in that, The projection of the main body (1) on a plane perpendicular to the running direction of the workpiece to be processed is an axisymmetric figure; The surface of the diaphragm (2) facing away from the anode member (6) is a concave inferior arc shape that is symmetrically recessed from both ends of the frame structure of the main body (1) towards the middle.

4. The anode box according to claim 3, wherein The diaphragm (2) has a uniform overall thickness.

5. The anode box according to claim 1, characterized in that Further comprising: At least one reinforcing rib (3) is disposed along the surface of the diaphragm (2) and is fixedly connected to the main body (1) and the diaphragm (2).

6. The anode box according to claim 1, characterized in that, A plurality of second through holes are densely distributed on the pipe wall of the circulation pipe (4).

7. The anode box according to claim 6, characterized in that, The other end of the circulation pipe (4) is connected to a suction device.

8. The anode box according to claim 1, characterized in that, The pipe wall of the circulation pipe (4) abuts against the lower surface of the diaphragm (2).

9. The anode box according to claim 8, characterized in that, The circulation pipe (4) is disposed at the middle position of the diaphragm (2).

10. The anode box according to claim 1, characterized in that, The anti-foaming structure is a plurality of sheets or spines protruding from the diaphragm (2).

11. The anode box according to any one of claims 1-5, characterized in that, Further comprising a guiding structure (5) disposed in the receiving cavity (11) and adapted to guide the anode member (6) into the receiving cavity (11).

12. An anode box assembly, characterized in that, Comprising at least one anode box according to any one of claims 1-11 and at least one anode member (6); the anode member (6) is placed in the receiving cavity (11) of the anode box.

13. A horizontal electroplating device, characterized in that, Comprising at least one anode box according to any one of claims 1-11.

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