Liquid-carrying roller for wet etching and wet etching method

Abstract

The present invention relates to a liquid-carrying roller for wet etching and a wet etching method thereof, belonging to the technical field of solar cell manufacturing, and solving the problem of abnormal roller level in the process of solar cell manufacturing in the prior art. The liquid-carrying roller for wet etching of the present invention comprises a first end shaft (110), a second end shaft (120) and a liquid-carrying shaft (130), wherein the first end shaft (110) and the second end shaft (120) are respectively located at two ends of the liquid-carrying shaft (130), the first end shaft (110), the second end shaft (120) and the liquid-carrying shaft (130) are arranged concentrically, and the diameters of the first end shaft (110) and the second end shaft (120) can be adjusted. The diameters of the two end shafts of the liquid-carrying shaft of the present invention are adjustable, and when the roller level is abnormal due to wear at both ends of the liquid-carrying roller or the machining accuracy of the etching groove, the horizontal state of the liquid-carrying roller on the bracket is ensured, and while ensuring the quality of the solar cell etching process, the operation cost of the wet etching equipment is greatly reduced.

Description

Technical Field

[0001] The invention relates to the technical field of solar cell manufacturing, and in particular to a liquid-carrying roller for wet etching and a wet etching method. Background Art

[0002] In recent years, the production technology of solar cells has been continuously improved, the production cost has been continuously reduced, and the efficiency of cells has been continuously improved, making the application of photovoltaic power generation increasingly popular and developing rapidly, and gradually becoming an important source of electricity supply. Etching is an important process in the preparation of silicon solar cells. Its purpose is to remove the PN junction and the phosphorus silicon glass on the front of the cell. The quality of etching directly affects the conversion efficiency of the cell. The current etching methods of silicon wafers mainly include dry etching and wet etching. The production process of wet etching is: the silicon solar cell after diffusion is corroded by the HNO3 and HF mixed acid solution in the etching tank to achieve edge insulation.

[0003] The existing wet etching process is usually connected by a series of tank modules, which are etching tank → water washing tank 1 → alkali tank → water washing tank 2 → acid tank → water washing tank 3 → drying. Most wet etching equipment suitable for wet etching process currently adopts roller transmission. On wet etching equipment, the shafts at both ends of the liquid roller are usually directly inserted into the bracket hole to realize the rotation of the roller, thereby realizing the transfer of silicon wafers from loading to unloading; after long-term use, the diameter of the roller will become smaller due to wear, resulting in the inability to move horizontally during the transportation process of the running silicon wafer, affecting the etching quality of the solar cell, and at the same time, the water film covering the upper surface will also slide into the chemical solution due to the unevenness of the roller, resulting in abnormal concentration and affecting the etching effect; the machining accuracy of the etching tank bracket and the machining accuracy deviation of the roller will cause abnormal levels of individual rollers, affecting the overall etching effect. Summary of the invention

[0004] In view of the above analysis, the embodiments of the present invention aim to provide a liquid-carrying roller for wet etching and a wet etching method, so as to solve the problem of abnormal roller level in the existing solar cell manufacturing process.

[0005] On the one hand, the present invention provides a liquid-carrying roller for wet etching, comprising a first end shaft, a second end shaft and a liquid-carrying shaft, the first end shaft and the second end shaft are respectively located at two ends of the liquid-carrying shaft, the first end shaft and the second end shaft are concentrically arranged with the liquid-carrying shaft, and the diameters of the first end shaft and the second end shaft can be adjusted.

[0006] Further, the first end shaft includes a plurality of first wedges, a plurality of second wedges, a first brake, a second brake and a first center shaft.

[0007] Furthermore, the first brake and the second brake are both mounted on the first central shaft, the first brake is connected to the first wedge, the second brake is connected to the second wedge, and one end of the first central shaft is connected to the central hole of the fluid-carrying shaft.

[0008] Further, the second end shaft includes a plurality of third wedges, a plurality of fourth wedges, a third brake, a fourth brake and a second center shaft.

[0009] Furthermore, the third brake and the fourth brake are both mounted on the second central shaft, the third brake is connected to the third wedge, the fourth brake is connected to the fourth wedge, and one end of the second central shaft is connected to the central hole of the fluid-carrying shaft.

[0010] Furthermore, the first wedge member and the second wedge member are arranged alternately, and the side surface of the first wedge member is always in contact with the side surface of the second wedge member; the third wedge member and the fourth wedge member are arranged alternately, and the side surface of the third wedge member is always in contact with the side surface of the fourth wedge member.

[0011] Furthermore, the first brake and the second brake are capable of relative movement along the first central axis.

[0012] Further, the first wedge member can move in the radial direction of the first brake, and the second wedge member can move in the radial direction of the second brake.

[0013] Furthermore, the third brake and the fourth brake are relatively movable along the second central axis.

[0014] Further, the third wedge member can move in a radial direction of the third brake, and the fourth wedge member can move in a radial direction of the fourth brake.

[0015] Further, the first wedge and the second wedge define a first outer surface forming a first end shaft;

[0016] The third wedge and the fourth wedge define a second outer surface forming a second end shaft.

[0017] Further, the first outer surface has a first effective diameter, which increases or decreases according to the axial movement between the first wedge and the second wedge; the second outer surface has a second effective diameter, which increases or decreases according to the axial movement between the third wedge and the fourth wedge.

[0018] Furthermore, the first end shaft, the second end shaft and the fluid-carrying shaft are made of PVDF or PTFE.

[0019] On the other hand, the present invention provides a wet etching method, using the above-mentioned liquid-carrying roller for wet etching, the steps comprising:

[0020] Step 1: Adjust the shaft end of the liquid roller to make the solar wafer level;

[0021] The brake is moved in opposite directions, so that the wedge moves toward the center of the cylinder of the end shaft, and the diameter of the end shaft increases; the brake is moved in the opposite direction, so that the wedge moves in the opposite direction of the cylinder center of the end shaft, and the diameter of the end shaft decreases;

[0022] Step 2: The liquid roller drives the solar wafer to move for wet etching.

[0023] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0024] (1) The diameters of the first end shaft and the second end shaft are adjustable. When the two ends of the liquid-carrying roller are worn or the roller level is abnormal due to the etching groove processing accuracy, the two end sizes of the individual liquid-carrying roller can be adjusted in real time to ensure that the liquid-carrying roller is placed horizontally on the bracket. While ensuring the quality of the solar cell etching process, the operating cost of the wet etching equipment can be greatly reduced.

[0025] (2) The first wedge and the second wedge are respectively arranged on the first brake and the second brake. The first brake and the second brake can move relative to each other along the first center axis. The first wedge and the second wedge can move radially relative to the first brake and the second brake, thereby realizing the change of the diameter of the first end shaft. The diameter adjustment of the second end shaft is the same as the diameter adjustment method of the first end shaft.

[0026] (3) The brake includes a connecting seat and a telescopic rod. The connecting seat is sleeved with the central axis. One end of the telescopic rod is vertically connected to the radial direction of the connecting seat, and the other end is a free end connected to the wedge. The free end can be telescoped relative to the connecting seat, thereby driving the wedge to telescope along the radial direction of the brake, thereby realizing the diameter adjustment of the end shaft of the liquid-carrying roller.

[0027] In the present invention, the above-mentioned technical solutions can also be combined with each other to achieve more preferred combination solutions. Other features and advantages of the present invention will be described in the subsequent description, and some advantages can become obvious from the description, or can be understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained through the contents particularly pointed out in the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The drawings are only for the purpose of illustrating particular embodiments and are not to be considered limiting of the present invention. Like reference symbols denote like components throughout the drawings.

[0029] Figure 1 It is a schematic structural diagram of the liquid-carrying roller of the present invention;

[0030] Figure 2 This is a schematic structural diagram of the initial state of the first end shaft of the present invention;

[0031] Figure 3 It is a schematic structural diagram of the present invention after the diameter of the first end shaft is adjusted to be larger;

[0032] Figure 4 It is a schematic structural diagram of the present invention after the diameter of the first end shaft is adjusted to be smaller;

[0033] Figure 5 It is a schematic diagram of the diameter adjustment change of the second end shaft of the present invention;

[0034] Figure 6 It is a schematic diagram of the connection between the first brake and the first central axis of the present invention;

[0035] Figure 7 It is a schematic diagram of the connection between the second brake and the first central shaft of the present invention;

[0036] Figure 8 It is a schematic diagram of the connection between the third brake and the second central shaft of the present invention;

[0037] Fig. 9 It is a schematic diagram of the connection between the fourth brake and the second central shaft of the present invention;

[0038] Fig.10 It is an exploded schematic diagram of the liquid-carrying axis and the first central axis of the present invention;

[0039] Fig.11 It is a structural schematic diagram of the wet etching tank of the present invention;

[0040] Fig.12 It is a cross-sectional schematic diagram of the connection between the liquid-carrying roller and the bracket of the present invention.

[0041] Reference numerals:

[0042] 100-fluid roller; 110-first end shaft; 111-first wedge; 112-second wedge; 113-first brake; 114-second brake; 115-first center shaft; 120-second end shaft; 121-third wedge; 122-fourth wedge; 123-third brake; 124-fourth brake; 125-second center shaft; 130-fluid shaft;

[0043] 200- bracket; 210- bracket body; 220- mounting hole;

[0044] 300-solar wafer; 400-water film; 500-etching groove; 600-etching liquid. DETAILED DESCRIPTION

[0045] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0046] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the term "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, or it can be indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] The terms "top", "bottom", "above", "lower", and "on" used throughout the description are relative to the relative positions of components of a device, such as the relative positions of the top and bottom substrates within a device. It is understood that devices are multifunctional regardless of their orientation in space.

[0048] Example 1

[0049] A specific embodiment of the present invention, as Figure 1-Figure 12 As shown, a liquid-carrying roller for wet etching is disclosed, including a first end shaft 110, a second end shaft 120 and a liquid-carrying shaft 130, the first end shaft 110 and the second end shaft 120 are respectively located at two ends of the liquid-carrying shaft 130, the first end shaft 110, the second end shaft 120 are concentrically arranged with the liquid-carrying shaft 130, and the diameters of the first end shaft 110 and the second end shaft 120 are both adjustable.

[0050] Compared with the prior art, when the roller with liquid used for wet etching provided in this embodiment is abnormally level due to wear at both ends or etching groove processing accuracy, the diameters of both ends of the individual roller with liquid can be adjusted in real time to ensure that the roller with liquid is placed horizontally on the bracket, thereby greatly reducing the operating cost of the wet etching equipment while ensuring the quality of the solar cell etching process.

[0051] In this embodiment, the first end shaft 110 and the second end shaft 120 are collectively referred to as end shafts, the first brake 113, the second brake 114, the third brake 123 and the fourth brake 124 are collectively referred to as brakes, and the first wedge 111, the second wedge 112, the third wedge 121 and the fourth wedge 122 are collectively referred to as wedges.

[0052] The first end shaft 110 includes a plurality of first wedges 111, a plurality of second wedges 112, a first brake 113, a second brake 114 and a first center shaft 115. The first brake 113 and the second brake 114 are both sleeved on the first center shaft 115. The first brake 113 is connected to the first wedge 111, the second brake 114 is connected to the second wedge 112, the first center shaft 115 is connected to the center hole of the liquid-carrying shaft 130, and a first limit block is provided at one end of the first center shaft 115. The first limit block is a regular hexahedron structure and is provided in the center hole of the liquid-carrying shaft 130 to limit the relative rotation of the first end shaft 110 and the liquid-carrying shaft 130.

[0053] The first wedge 111 is composed of a first arc surface, a second arc surface, two non-parallel side surfaces and two parallel end surfaces, and the second wedge 112 is composed of a third arc surface, a fourth arc surface, two non-parallel side surfaces and two parallel end surfaces. The first arc surface of the first wedge 111 and the third arc surface of the second wedge 112 form the outer circumference of the first end shaft 110, and the side surfaces of adjacent first wedge 111 and second wedge 112 are tightly attached together.

[0054] It is worth noting that the first arc surface and the second arc surface are concentric, and the third arc surface and the fourth arc surface are concentric, so that the outer circumferential surface formed by the first end shaft 110 is a cylindrical surface, avoiding the formation of line contact between the first end shaft 110 and the mounting hole 220 of the bracket 200 of the wet etching groove after assembly.

[0055] In order to achieve the adjustable diameter of the first end shaft 110 , the first brake 113 and the second brake 114 are both slidably connected to the first central shaft 115 .

[0056] Specifically, the first brake 113 includes a first telescopic rod and a first connecting seat. The first connecting seat is cylindrical and is sleeved on the outside of the first center axis 115. The inner hole diameter of the first connecting seat is equal to the diameter of the first center axis 115, so that the first connecting seat can move on the first center axis 115 under the action of external force.

[0057] In this embodiment, the external force that enables the first brake 113 to move relative to the first central axis 115 is the operator manually moving the first brake 113 so that the first brake 113 can stop at a desired position and the first end shaft 110 can obtain the diameter required for adjusting the level.

[0058] The first telescopic rods are evenly distributed on the periphery of the first connecting seat, one end of the first telescopic rod is connected to the first connecting seat, and the other end is a free end, which can be telescoped relative to the fixed end. Specifically, the second arc surface of the first wedge-shaped piece 111 is provided with a first mounting hole, and the first mounting hole is provided at the large end close to the first wedge-shaped piece 111, and the free end of the first telescopic rod is installed in the first mounting hole.

[0059] Specifically, the first telescopic rod includes a first telescopic spring, a first inner telescopic rod and a first connecting rod. A hole is opened at one end of the first connecting rod and a cavity is formed inside the first connecting rod. The first telescopic spring is arranged in the cavity. The other end of the first connecting rod is fixedly connected to the first connecting seat. One end of the first inner telescopic rod enters the cavity through the hole on the first connecting rod and presses against the first telescopic spring. The other end of the first inner telescopic rod is connected to the first wedge-shaped member 111.

[0060] It is worth noting that the extension line of the fixed end of the first telescopic rod passes through the axis of the first connecting seat, that is, the first telescopic rod is vertically arranged along the radial direction of the first connecting seat.

[0061] The second brake 114 includes a second telescopic rod and a second connecting seat. The second connecting seat is cylindrical and is sleeved on the outside of the first central axis 115. The inner hole diameter of the second connecting seat is equal to the diameter of the first central axis 115, so that the second connecting seat can move on the first central axis 115 under the action of external force.

[0062] In this embodiment, the external force that enables the second brake 114 to move relative to the first central axis 115 is the operator manually moving the second brake 114 so that the second brake 114 can stop at the desired position and the first end shaft 110 can obtain the diameter required for adjusting the level.

[0063] The second telescopic rods are evenly distributed on the periphery of the second connecting seat, one end of the second telescopic rod is connected to the second connecting seat, and the other end is a free end, which can be telescoped relative to the fixed end. Specifically, the fourth arc surface of the second wedge-shaped piece 112 is provided with a second mounting hole, and the second mounting hole is provided at the large end close to the second wedge-shaped piece 112, and the free end of the second telescopic rod is installed in the second mounting hole.

[0064] Specifically, the second telescopic rod includes a second telescopic spring, a second inner telescopic rod and a second connecting rod. One end of the second connecting rod is opened and a cavity is formed inside the second connecting rod. The second telescopic spring is arranged in the cavity. The other end of the second connecting rod is fixedly connected to the second connecting seat. One end of the second inner telescopic rod enters the cavity through the hole on the second connecting rod and presses against the second telescopic spring. The other end of the second inner telescopic rod is connected to the second wedge-shaped member 112.

[0065] In this embodiment, the first telescopic rod automatically retracts and retracts as the first brake 113 moves, and the second telescopic rod automatically retracts and retracts as the second brake 114 moves. Since the first wedge 111 and the second wedge 112 are in contact with each other on the sides, the telescopic amount of the first telescopic rod and the second telescopic rod can be limited under the action of the first wedge 111 and the second wedge 112, that is, when the positions of the first brake 113 and the second brake 114 are fixed, the first telescopic rod and the second telescopic rod can maintain a specific length under the action of the lateral squeezing force of the first wedge 111 and the second wedge 112.

[0066] It is worth noting that the second telescopic rod passes through the diameter direction of the second connecting seat.

[0067] It should be noted that the external force that causes the first brake 113 and the second brake 114 to move relative to the first central axis 115 is not limited to manual operation, and any driving method that can cause the first brake 113 and the second brake 114 to move relative to the first central axis 115 is acceptable.

[0068] In this embodiment, the first brake 113 controls the movement of the first wedge 111, and the second brake 114 controls the movement of the second wedge 112. When the first end shaft 110 is worn and the diameter is reduced, under the action of the first telescopic rod and the second telescopic rod, the first wedge 111 and the second wedge 112 move radially outward along the first end shaft 110. The first brake 113 and the second brake 114 are manually moved to make the first brake 113 and the second brake 114 move relative to each other along the first center axis 115. The side surface of the first wedge 111 is pressed against the side surface of the second wedge 112, and the first arc surface of the first wedge 111 and the third arc surface of the second wedge 112 form the outer circle of the first end shaft 110 with a new diameter.

[0069] The second end shaft 120 includes multiple third wedge pieces 121, multiple fourth wedge pieces 122, a third brake 123, a fourth brake 124 and a second center shaft 125. The third brake 123 and the fourth brake 124 are both mounted on the second center shaft 125. The third brake 123 is connected to the third wedge piece 121, the fourth brake 124 is connected to the fourth wedge piece 122, the second center shaft 125 is connected to the center hole of the liquid-carrying shaft 130, and a second limit block is provided at one end of the second center shaft 125. The second limit block is a regular hexahedron structure and is disposed in the center hole of the liquid-carrying shaft 130 to limit the relative rotation of the second end shaft 120 and the liquid-carrying shaft 130.

[0070] The third wedge 121 is composed of a fifth arc surface, a sixth arc surface, two non-parallel side surfaces and two parallel end surfaces, and the fourth wedge 122 is composed of a seventh arc surface, an eighth arc surface, two non-parallel side surfaces and two parallel end surfaces. The fifth arc surface of the third wedge 121 and the seventh arc surface of the fourth wedge 122 form the outer circumference of the second end shaft 120, and the side surfaces of adjacent third wedge components 121 and the side surfaces of the fourth wedge components 122 are tightly attached together.

[0071] It is worth noting that the fifth arc surface is concentric with the sixth arc surface, and the seventh arc surface is concentric with the eighth arc surface, so that the outer circumferential surface formed by the second end shaft 120 is a cylindrical surface, avoiding the formation of line contact between the second end shaft 120 and the mounting hole 220 of the bracket 200 of the wet etching groove after assembly.

[0072] In order to achieve the adjustable diameter of the second end shaft 120 , the third brake 123 and the fourth brake 124 can be slidably connected to the second central shaft 125 .

[0073] Specifically, the third brake 123 includes a third telescopic rod and a third connecting seat. The third connecting seat is cylindrical and is sleeved on the outside of the second center axis 125. The inner hole diameter of the third connecting seat is equal to the diameter of the second center axis 125, so that the third connecting seat can move on the second center axis 125 under the action of external force.

[0074] In this embodiment, the external force that enables the third brake 123 to move relative to the second center axis 125 is the operator manually moving the third brake 123 so that the third brake 123 can stop at the desired position and the second end shaft 120 can obtain the diameter required for adjusting the level.

[0075] The third telescopic rods are evenly distributed on the periphery of the third connecting seat, one end of the third telescopic rod is connected to the third connecting seat, and the other end is a free end, which can be telescoped relative to the fixed end. Specifically, the sixth arc surface of the third wedge-shaped piece 121 is provided with a third mounting hole, and the third mounting hole is provided near the big head end of the third wedge-shaped piece 121, and the free end of the third telescopic rod is installed in the third mounting hole.

[0076] Specifically, the third telescopic rod includes a third telescopic spring, a third inner telescopic rod and a third connecting rod. One end of the third connecting rod is opened and a cavity is formed in the third connecting rod. The third telescopic spring is arranged in the cavity. The other end of the third connecting rod is fixedly connected to the third connecting seat. One end of the third inner telescopic rod enters the cavity through the hole on the third connecting rod and presses against the third telescopic spring. The other end of the third inner telescopic rod is connected to the third wedge-shaped member 121.

[0077] It is worth noting that the third telescopic rod passes through the diameter direction of the third connecting seat.

[0078] Similarly, the fourth brake 124 includes a fourth telescopic rod and a fourth connecting seat. The fourth connecting seat is cylindrical and is sleeved on the outside of the second center axis 125. The inner hole diameter of the fourth connecting seat is equal to the diameter of the second center axis 125, so that the fourth connecting seat can move on the second center axis 125 under the action of external force.

[0079] In this embodiment, the external force that enables the fourth brake 124 to move relative to the second center axis 125 is the operator manually moving the fourth brake 124 so that the fourth brake 124 can stop at the desired position and the second end shaft 120 can obtain the diameter required for adjusting the level.

[0080] The fourth telescopic rod is evenly distributed on the outer circumference of the fourth connecting seat, one end of the fourth telescopic rod is connected to the fourth connecting seat, and the other end is a free end, which can be telescoped relative to the fixed end. Specifically, the eighth arc surface of the fourth wedge-shaped piece 122 is provided with a fourth mounting hole, and the fourth mounting hole is provided near the big head end of the fourth wedge-shaped piece 122, and the free end of the fourth telescopic rod is installed in the fourth mounting hole.

[0081] Specifically, the fourth telescopic rod includes a fourth telescopic spring, a fourth inner telescopic rod and a fourth connecting rod. One end of the fourth connecting rod is opened and a cavity is formed in the fourth connecting rod. The fourth telescopic spring is arranged in the cavity. The other end of the fourth connecting rod is fixedly connected to the fourth connecting seat. One end of the fourth inner telescopic rod enters the cavity through the hole on the fourth connecting rod and presses against the fourth telescopic spring. The other end of the fourth inner telescopic rod is connected to the fourth wedge-shaped member 122.

[0082] In this embodiment, the third telescopic rod automatically retracts and retracts as the third brake 123 moves, and the fourth telescopic rod automatically retracts and retracts as the fourth brake 124 moves. Since the third wedge 121 and the fourth wedge 122 fit sideways, the telescopic amounts of the third telescopic rod and the fourth telescopic rod can be limited under the action of the third wedge 121 and the fourth wedge 122, that is, when the positions of the third brake 123 and the fourth brake 124 are fixed, the third telescopic rod and the fourth telescopic rod can maintain a specific length under the action of the lateral squeezing pressure of the third wedge 121 and the fourth wedge 122.

[0083] It is worth noting that the fourth telescopic rod passes through the diameter direction of the fourth connecting seat.

[0084] It should be noted that the external force that causes the third brake 123 and the fourth brake 124 to move relative to the second central axis 125 is not limited to manual operation, and any driving method that can cause the third brake 123 and the fourth brake 124 to move relative to the second central axis 125 is acceptable.

[0085] In this embodiment, the third brake 123 controls the movement of the third wedge 121, and the fourth brake 124 controls the movement of the fourth wedge 122. When the second end shaft 120 is worn and the diameter is reduced, under the action of the third telescopic rod and the fourth telescopic rod, the third wedge 121 and the fourth wedge 122 move radially outward along the second end shaft 120. The third brake 123 and the fourth brake 124 are manually moved to make the third brake 123 and the fourth brake 124 move relative to each other along the second center axis 125. The side surface of the third wedge 121 is pressed against the side surface of the fourth wedge 122. The fifth arc surface of the third wedge 121 and the seventh arc surface of the fourth wedge 122 form the outer circle of the second end shaft 120 with a new diameter, as shown in FIG. Figure 5 As shown, Figure 5 (a) is a schematic diagram showing the change in the diameter of the second end shaft 120 from the initial position. Figure 5 (b) is a schematic diagram showing the diameter of the second end shaft 120 in an initial state, Figure 5 (c) is a schematic diagram showing the change in diameter of the second end shaft 120.

[0086] It should be noted that, in order to reduce processing costs, the first end shaft 110 and the second end shaft 120 have the same size and structure.

[0087] It is worth noting that the first wedge 111 and the second wedge 112 define a first outer surface of the first end shaft 110 (formed by the first arc surface of the first wedge 111 and the third arc surface of the second wedge), and the first outer surface has a first effective diameter, and the first effective diameter increases or decreases according to the axial movement between the first wedge 111 and the second wedge 112 (that is, the first wedge 111 and the second wedge 112 move toward each other along the first central axis 115, and the first effective diameter increases, and the first wedge 111 and the second wedge 112 move in the opposite direction along the first central axis 115, and the first effective diameter decreases). ); the third wedge 121 and the fourth wedge 122 define a second outer surface of the second end shaft 120 (formed by the fifth arc surface of the third wedge 121 and the seventh arc surface of the fourth wedge 122), and the second outer surface has a second effective diameter, and the second effective diameter increases or decreases according to the axial movement between the third wedge 121 and the fourth wedge 122 (i.e., the third wedge 121 and the fourth wedge 122 move toward each other along the second center axis 125, and the second effective diameter increases, and the third wedge 121 and the fourth wedge 122 move in opposite directions along the second center axis 125, and the second effective diameter decreases).

[0088] Since the roller material must be acid-resistant and alkali-resistant, the first end shaft 110 , the second end shaft 120 and the fluid-carrying shaft 130 are all made of PVDF (Poly vinylidene fluoride) or PTFE (Poly tetrafluoroethylene).

[0089] The liquid-carrying roller 100 in this embodiment is applied to a wet etching groove, and the etching groove 500 includes a bracket 200 and a liquid-carrying roller 100. An etching liquid 600 is provided in the etching groove 500, and a solar chip 300 is provided on the liquid-carrying roller 100. A water film 400 is provided on the upper surface of the solar chip 300. The liquid-carrying roller 100 is connected to the bracket 200. Specifically, the bracket 200 includes a bracket body 210, and mounting holes 220 are evenly opened on the bracket body 210. The first end shaft 110 and the second end shaft 120 of the liquid-carrying roller 100 are respectively placed in the mounting holes 220 of the bracket body 210 on both sides of the bracket 200.

[0090] In this embodiment, when the fluid-carrying roller 100 and the bracket 200 are worn due to friction, there is no need to replace the entire fluid-carrying roller 100. Only the end shaft diameter needs to be adjusted, thereby reducing the operating cost of the etching groove 500. In addition, the horizontality of the fluid-carrying roller 100 can be independently adjusted.

[0091] Example 2

[0092] Another specific embodiment of the present invention discloses a wet etching method, using the liquid-carrying roller for wet etching of embodiment 1, the steps comprising:

[0093] Step 1: Adjust the shaft end of the liquid-carrying roller 100 to ensure that the solar wafer 300 is placed on the liquid-carrying roller 100 in a horizontal state.

[0094] It should be noted that a plurality of liquid-carrying rollers 100 are installed on the etching tank 500 , and all the liquid-carrying rollers 100 need to be adjusted so that the solar wafer 300 is in a horizontal position.

[0095] The first brake 113 and the second brake 114 are moved toward each other, so that the first wedge 111 and the second wedge 112 are moved toward the center of the first end shaft 110, and the diameter of the first end shaft 110 is increased; the third brake 123 and the fourth brake 124 are moved toward each other, so that the third wedge 121 and the fourth wedge 122 are moved toward the center of the second end shaft 120, and the diameter of the second end shaft 120 is increased;

[0096] The first brake 113 and the second brake 114 are moved in the opposite direction to the center of the first end shaft 110, and the diameter of the first end shaft 110 is reduced; the third brake 123 and the fourth brake 124 are moved in the opposite direction to the center of the second end shaft 120, and the diameter of the second end shaft 120 is reduced.

[0097] Step 2: Place the solar wafer 300 on the liquid roller 100. The liquid roller 100 rotates under the action of an external force (such as a motor), driving the solar wafer 300 to move forward while brushing the etching liquid 600 onto the back of the solar wafer 300 for wet etching.

[0098] It should be noted that, since the water film 400 is provided on the front side of the solar wafer 300 , damage to the front side of the solar wafer 300 by the etching liquid 600 is avoided.

[0099] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A wet etching method, characterized in that the steps include: Step 1: Adjust the shaft end of the liquid roller to make the solar wafer level; The brakes are moved in opposite directions, so that the wedge moves toward the center of the cylinder of the end shaft, and the diameter of the end shaft increases; the brakes are moved in the opposite direction, so that the wedge moves in the opposite direction of the cylinder center of the end shaft, and the diameter of the end shaft decreases; Step 2: The liquid roller drives the solar wafer to move for wet etching; The liquid-carrying roller comprises a first end shaft (110), a second end shaft (120) and a liquid-carrying shaft (130); the first end shaft (110) and the second end shaft (120) are respectively located at two ends of the liquid-carrying shaft (130); the first end shaft (110), the second end shaft (120) and the liquid-carrying shaft (130) are arranged concentrically; the diameters of the first end shaft (110) and the second end shaft (120) are both adjustable; and the diameters of the first end shaft (110) and the second end shaft (120) are adjusted independently of each other; The first end shaft (110) comprises a plurality of first wedge-shaped pieces (111), a plurality of second wedge-shaped pieces (112), a first brake (113), a second brake (114) and a first central shaft (115); the first brake (113) comprises a first telescopic rod and a first connecting seat, the first connecting seat is sleeved on the outer side of the first central shaft (115) and can slide along the first central shaft (115), one end of the first telescopic rod is connected to the first connecting seat, and the other end is a free end that can be telescoped relative to the fixed end, the second arc surface of the first wedge-shaped piece (111) is provided with a first mounting hole, and the free end of the first telescopic rod is mounted in the first mounting hole; The second brake (114) comprises a second telescopic rod and a second connecting seat, the second connecting seat is sleeved on the outer side of the first central axis (115) and can slide along the first central axis (115), one end of the second telescopic rod is connected to the second connecting seat, and the other end is a free end that can be telescoped relative to the fixed end, the fourth arc surface of the second wedge-shaped member (112) is provided with a second mounting hole, the free end of the second telescopic rod is mounted in the second mounting hole, the first telescopic rod automatically telescopes with the movement of the first brake (113), and the second telescopic rod automatically telescopes with the movement of the second brake (114).

2. The wet etching method according to claim 1, characterized in that: The second end shaft (120) includes a plurality of third wedge-shaped members (121), a plurality of fourth wedge-shaped members (122), a third brake (123), a fourth brake (124) and a second center shaft (125).

3. The wet etching method according to claim 1, characterized in that: The first brake (113) and the second brake (114) are relatively movable along a first central axis (115).

4. The wet etching method according to claim 1, characterized in that: The first wedge (111) is movable in a radial direction of the first brake (113), and the second wedge (112) is movable in a radial direction of the second brake (114).

5. The wet etching method according to claim 2, characterized in that: The third brake (123) and the fourth brake (124) are capable of relative movement along the second central axis (125).

6. The wet etching method according to claim 2, characterized in that: The third wedge (121) is movable in a radial direction of the third brake (123), and the fourth wedge (122) is movable in a radial direction of the fourth brake (124).

7. The wet etching method according to claim 2, characterized in that: The first wedge (111) and the second wedge (112) define a first outer surface forming a first end shaft (110); The third wedge (121) and the fourth wedge (122) define a second outer surface forming a second end shaft (120).

8. The wet etching method according to claim 1, characterized in that: The first end shaft (110), the second end shaft (120) and the fluid-carrying shaft (130) are made of PVDF or PTFE.

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