A transmission shaft connection structure and its application

Abstract

The present invention discloses a transmission shaft connection structure, including a transmission shaft, one end of which is provided with a mounting hole; a screw is inserted into the mounting hole, a coupling is provided at the end of the screw away from the transmission shaft, and an extrusion head is provided at the end of the screw inserted into the mounting hole; a tapered portion is provided at the end of the extrusion head away from the screw; an expansion sleeve and an elastic sleeve are sequentially mounted on the outer periphery of the extrusion head; the side circumferential wall of the tapered portion opens the expansion sleeve, and presses the expansion sleeve and the elastic sleeve onto the inner circumferential wall of the mounting hole; a limiting washer is mounted on the screw, and a nut is also provided on the screw, and the nut locks the limiting washer onto the transmission shaft. The connection structure of the present invention has a large elasticity and adjustable range, and can cope with sizes within a certain range. The connection structure of the present invention has an elastic sleeve, which can provide a certain buffer, and disperse the stress on the inner circumferential surface of the mounting hole of the transmission shaft, reduce the stress peak, and avoid stress concentration in one place causing the transmission shaft to break and be damaged.

Description

Technical Field

[0001] The invention relates to a mechanical transmission structure, in particular to a transmission shaft connection structure and a chain furnace using the transmission shaft connection structure. Background Art

[0002] In mechanical transmission structures, it is rare and difficult to achieve a power transmission system with a single transmission shaft and no connection structure. The aforementioned power transmission system is difficult to design, difficult to process, and expensive, and is not suitable for application in ordinary industrial fields. In conventional transmission structures, the transmission shafts must be connected to each other through certain technical means to transmit power.

[0003] As for the joints, fine machining is generally required to ensure smooth transmission and reliable connection. However, for some special materials, such as ceramics and quartz glass, there are problems such as difficult processing, high processing costs, and low yields. Therefore, the size and shape position accuracy of the transmission shaft made of the above materials is generally low. The above special materials are difficult to withstand high shear stress and tensile stress, otherwise they are prone to breakage and deformation.

[0004] The traditional transmission shaft connection structures commonly used at present can be divided into two categories: ① Axial connection of transmission shafts on the same straight line, common solutions include various couplings, clutches, etc.; ② Connection of transmission shafts not on the same straight line, common solutions include various gears, belts, chains, etc.

[0005] The present invention mainly relates to the transmission shaft made of the aforementioned special material and the connection type described in the aforementioned classification ①, but the conventional solutions currently in common use cannot cope with this situation.

[0006] The traditional solutions currently in common use all require a tight rigid connection between the connection structure and the drive shaft, but this connection method cannot be applied to the aforementioned special materials because: ① its processing accuracy is low and it cannot perfectly match the traditional connection structure; ② it is fragile and easy to damage, and various fastening measures cannot be applied to it, such as set screws.

[0007] In addition, the chain annealing furnace used in silicon wafer production often uses a transmission shaft made of special materials. However, since the existing transmission shaft connection structure is not perfect, it will affect the stability of the silicon wafers in the chain furnace during the transmission process, and even increase the offset of the silicon wafers during the tape-out process. Summary of the invention

[0008] The object of the present invention is to provide a transmission shaft connection structure, comprising a transmission shaft, one end of which is provided with a mounting hole, the mounting hole being coaxial with the transmission shaft;

[0009] A screw is inserted into the mounting hole, a coupling is provided at one end of the screw away from the transmission shaft, and an extrusion head is provided at one end of the screw inserted into the mounting hole; a conical portion is provided at one end of the extrusion head away from the screw, the conical portion is coaxial with the screw, and the small diameter end of the conical portion faces the screw;

[0010] The outer circumference of the extrusion head is sequentially covered with an expansion sleeve and an elastic sleeve; the side circumferential wall of the tapered portion opens the expansion sleeve and presses the expansion sleeve and the elastic sleeve against the inner circumferential wall of the mounting hole;

[0011] A limiting washer is sleeved on the screw rod, and the limiting washer is located outside the transmission shaft; a nut is also provided on the screw rod, and the nut locks the limiting washer on the transmission shaft.

[0012] Preferably, the transmission shaft is a ceramic shaft or a quartz glass shaft.

[0013] Preferably, the elastic sleeve is a rubber sleeve or a plastic sleeve.

[0014] Preferably, a pair of bearings is mounted on the transmission shaft, and the pair of bearings are respectively arranged at both ends of the transmission shaft, and the transmission shaft is supported by the pair of bearings.

[0015] Preferably, the transmission shaft is also equipped with a rotation detection device.

[0016] Preferably, the screw is connected to the drive shaft via a coupling.

[0017] The present invention also provides a chain furnace, which adopts the above-mentioned transmission shaft connection structure.

[0018] Preferably, the chain furnace is a chain annealing furnace.

[0019] The advantages and beneficial effects of the present invention are:

[0020] ① The connection structure of the present invention has greater elasticity and adjustable range, and can cope with sizes within a certain range.

[0021] ② The connection structure of the present invention has an elastic sleeve, which can provide a certain buffer and disperse the stress on the inner circumference of the mounting hole of the transmission shaft, thereby reducing the stress peak and avoiding stress concentration in one place to cause the transmission shaft to break and be damaged.

[0022] ③ The connection structure of the present invention can be applied to a chain furnace (such as a chain annealing furnace), which can improve the stability of the silicon wafer in the chain furnace during the transmission process and reduce the offset of the silicon wafer during the wafer flow process. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic diagram of the present invention;

[0024] Figure 2 yes Figure 1 A partial enlarged view of . DETAILED DESCRIPTION

[0025] The specific implementation of the present invention is further described below in conjunction with the accompanying drawings and embodiments. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0026] The technical solution specifically implemented in the present invention is:

[0027] like Figure 1 and Figure 2 As shown, a transmission shaft connection structure includes a transmission shaft 1, which is a ceramic shaft or a quartz glass shaft; a mounting hole 2 is opened at one end of the transmission shaft 1, and the mounting hole 2 is coaxial with the transmission shaft 1;

[0028] A screw rod 3 is inserted into the mounting hole 2, a coupling 4 is provided at one end of the screw rod 3 away from the transmission shaft 1, and an extrusion head 5 is provided at one end of the screw rod 3 inserted into the mounting hole 2; a tapered portion 6 is provided at one end of the extrusion head 5 away from the screw rod 3, the tapered portion 6 is coaxial with the screw rod 3, and the small diameter end of the tapered portion 6 faces the screw rod 3;

[0029] The outer circumference of the extrusion head 5 is sequentially covered with an expansion sleeve 7 and an elastic sleeve 8, and the elastic sleeve 8 is a rubber sleeve or a plastic sleeve; the side wall of the tapered portion 6 opens the expansion sleeve 7, and presses the expansion sleeve 7 and the elastic sleeve 8 onto the inner circumferential wall of the mounting hole 2;

[0030] The screw rod 3 is sleeved with a limiting washer 9 , which is located outside the transmission shaft 1 ; the screw rod 3 is also provided with a nut 10 , which locks the limiting washer 9 on the transmission shaft 1 .

[0031] The transmission shaft 1 is sleeved with a pair of bearings 11 , which are disposed at both ends of the transmission shaft 1 , and the transmission shaft 1 is supported by the pair of bearings 11 .

[0032] The transmission shaft 1 is also provided with a rotation detection device 12 , which monitors the rotation of the transmission shaft 1 .

[0033] The screw rod 3 is also connected to the driving shaft 13 via a coupling 4 .

[0034] The principle of the connection structure is as follows: the right end face of the limiting washer 9 is close to the left end face of the transmission shaft 1, and the nut 10 is close to the limiting washer 9. When the nut 10 is tightened to the right, the screw 3 and the extrusion head 5 are pulled to the left, which will cause the expansion sleeve 7 to be gradually expanded by the tapered portion 6 of the extrusion head 5, and then compress the elastic sleeve 8, so that the elastic sleeve 8 is tightly matched with the inner circumferential wall of the mounting hole 2 of the transmission shaft 1; at this time, due to the friction between the tapered portion 6 of the extrusion head 5, the expansion sleeve 7, the elastic sleeve 8 and the transmission shaft 1, if the driving shaft 13 drives the screw 3 to rotate through the coupling 4, the transmission shaft 1 will rotate with the screw 3; the elastic sleeve 8 can do a certain buffering and disperse the stress on the inner circumferential surface of the mounting hole 2 of the transmission shaft 1, reduce the stress peak, and avoid the stress concentration in one place causing the transmission shaft 1 to be broken and damaged.

[0035] The present invention also provides a chain annealing furnace, which adopts the above-mentioned transmission shaft connection structure. The connection structure of the present invention has greater elasticity and adjustable range, can improve the stability of the silicon wafer in the chain annealing furnace transmission process, can reduce the offset of the silicon wafer in the wafer taping process, and improve the reliability of equipment operation.

[0036] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A chain annealing furnace for silicon wafer production, It is characterized in that It adopts a transmission shaft connection structure to axially connect the transmission shafts on the same straight line; The transmission shaft connection structure comprises a transmission shaft, which is a ceramic shaft or a quartz glass shaft; a mounting hole is provided at one end of the transmission shaft, and the mounting hole is coaxial with the transmission shaft; A screw is inserted into the mounting hole, a coupling is provided at one end of the screw away from the transmission shaft, and an extrusion head is provided at one end of the screw inserted into the mounting hole; a conical portion is provided at one end of the extrusion head away from the screw, the conical portion is coaxial with the screw, and the small diameter end of the conical portion faces the screw; The outer circumference of the extrusion head is sequentially covered with an expansion sleeve and an elastic sleeve; the side circumferential wall of the tapered portion opens the expansion sleeve and presses the expansion sleeve and the elastic sleeve against the inner circumferential wall of the mounting hole; The screw rod is provided with a limit washer, which is located outside the transmission shaft; the screw rod is also provided with a nut, and the nut locks the limit washer on the transmission shaft; The screw is connected to the driving shaft through a coupling.

2. The chain annealing furnace for silicon wafer production according to claim 1, It is characterized in that The elastic sleeve is a rubber sleeve or a plastic sleeve.

3. The chain annealing furnace for silicon wafer production according to claim 1, It is characterized in that A pair of bearings is sleeved on the transmission shaft. The pair of bearings are arranged at both ends of the transmission shaft, and the transmission shaft is supported by the pair of bearings.

4. The chain annealing furnace for silicon wafer production according to claim 1, It is characterized in that The transmission shaft is also equipped with a rotation detection device.

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