Array X-ray source and X-ray imaging equipment

Abstract

The present disclosure provides an array X-ray source and an X-ray imaging device. The X-ray source (100) comprises a housing (101) and a plurality of X-ray generators (110) located in the housing, wherein the plurality of X-ray generators are arranged in an array, and the respective X-ray generators are arranged separately from each other and configured to emit X-rays independently of each other.

Description

Technical Field

[0001] Embodiments of the present disclosure generally relate to the field of X-ray detection, and more particularly to arrayed X-ray sources and X-ray imaging devices. Background Art

[0002] X-rays are widely used in industrial non-destructive testing, safety inspection, medical diagnosis and treatment, etc. The device that generates X-rays can be called an X-ray source or an X-ray generator, which includes a cathode and an anode. The cathode generates an electron beam, which is accelerated by the high-voltage electric field between the cathode and the anode and hits the anode target, thereby generating X-rays.

[0003] In a distributed X-ray source, cathodes as electron emission units are arranged in an array, and the emission of electrons is controlled by the voltage of the control grid, so that each cathode is controlled to emit electrons in sequence, bombarding the target points on the anode in the corresponding sequence position to generate X-rays. In order to improve the imaging quality of distributed X-ray imaging equipment, the number of X-ray sources is usually required to be between dozens and hundreds, which means that a large number of cathodes, anodes, control grids and other devices are required. If these devices are installed in the same vacuum chamber, when one or more sources are damaged, it is difficult to replace and maintenance is troublesome. Summary of the invention

[0004] The present disclosure is proposed to overcome at least one of the above and other problems and drawbacks of the prior art.

[0005] According to one aspect of the present disclosure, an array-type X-ray source is proposed, comprising a shell and a plurality of X-ray generators located in the shell, wherein the plurality of X-ray generators are arranged in an array, and the respective X-ray generators are separately disposed and configured to emit X-rays independently of each other.

[0006] In some embodiments, each of the multiple X-ray generators includes: an anode target, which generates X-rays when impacted by an electron beam; and an X-ray extraction window, which is arranged on the anode target so that at least a portion of the X-rays generated by the anode target are emitted from the X-ray extraction window.

[0007] In some embodiments, the X-ray extraction windows of the plurality of X-ray generators are all oriented toward the first direction.

[0008] In some embodiments, the plurality of X-ray generators are linearly arranged in the housing along the second direction in such a manner that the anode targets are located on the same side.

[0009] In some embodiments, the plurality of X-ray generators include at least a first row and a second row of X-ray generators arranged side by side, and the first row of X-ray generators and the second row of X-ray generators are offset from each other in the second direction.

[0010] In some embodiments, the plurality of X-ray generators include at least a first row of X-ray generators and a second row of X-ray generators arranged side by side, and anode targets of the first row of X-ray generators and the second row of X-ray generators face each other.

[0011] In some embodiments, each of the plurality of X-ray generators further comprises: a tubular housing having a closed first end and an opposite open second end, an anode target being disposed at the second end to define a vacuum space together with the tubular housing; and an electron beam generating device being disposed within the tubular housing near the first end and configured to emit an electron beam toward the anode target.

[0012] In some embodiments, each of the multiple X-ray generators also includes: a control grid, which is arranged in the vacuum space adjacent to the electron beam generating device and is configured to control the emission and cutoff of the electron beam of the electron beam generating device; and / or a focusing device, which is arranged in the vacuum space and is used to collect and focus the electron beam from the electron beam generating device, and the focused electron beam passes through the vacuum space and impacts the anode target.

[0013] In some embodiments, the anode target is provided with an opening connected to the vacuum space, at least a portion of the electron beam strikes the anode target through the opening, and the X-ray extraction window closes the opening, so that at least a portion of the X-rays generated by the anode target are emitted from the X-ray extraction window through the opening.

[0014] In some embodiments, at least one of the plurality of X-ray generators is a single focus X-ray generator.

[0015] In some embodiments, at least one of the plurality of X-ray generators is a pulsed X-ray generator.

[0016] In some embodiments, the array X-ray source further includes insulating oil located in the housing, and the plurality of X-ray generators are at least partially immersed in the insulating oil.

[0017] In some embodiments, the shell is made of metal, ceramic or glass; and / or the X-ray extraction window is made of a metal foil selected from the group consisting of titanium foil, copper foil, aluminum foil, beryllium foil, stainless steel foil, or is made of a ceramic sheet or a glass sheet.

[0018] According to another aspect of the present disclosure, an X-ray imaging device is provided, which includes the arrayed X-ray source described in any one of the embodiments of the present disclosure.

[0019] Other objects and advantages of the present disclosure will be apparent from the following detailed description of the present disclosure with reference to the accompanying drawings, and will help to have a comprehensive understanding of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The features and advantages of the present disclosure can be more clearly understood by referring to the accompanying drawings, which are schematic and should not be construed as limiting the present disclosure in any way. In the accompanying drawings:

[0021] Figure 1 A perspective schematic diagram showing the arrangement of an arrayed X-ray source according to an exemplary embodiment of the present disclosure;

[0022] Figure 2 A schematic top view showing the arrangement of an arrayed X-ray source according to an exemplary embodiment of the present disclosure;

[0023] Figure 3 A perspective view showing the structure of a single-focus X-ray generator in an array-type X-ray source according to an exemplary embodiment of the present disclosure;

[0024] Figure 4 A cross-sectional view showing the structure of a single-focus X-ray generator in an array-type X-ray source according to an exemplary embodiment of the present disclosure;

[0025] Figure 5 A perspective cross-sectional view showing the structure of a single-focus X-ray generator in an array-type X-ray source according to an exemplary embodiment of the present disclosure; and

[0026] Figure 6 FIG. 1 is a top perspective view showing the arrangement of an arrayed X-ray source according to another exemplary embodiment of the present disclosure. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0028] In addition, in the detailed description below, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, it is apparent that one or more embodiments may be implemented without these specific details. In other cases, known structures and devices are embodied in a schematic manner to simplify the accompanying drawings.

[0029] Figure 1The arrangement of an array X-ray source according to an exemplary embodiment of the present disclosure is schematically shown. As shown in the figure, the exemplary array X-ray source 100 is a distributed X-ray source, which mainly includes a housing 101 and a plurality of X-ray generators 110 located in the housing 101. The housing can be made of metal, ceramic or glass. According to an embodiment of the present disclosure, a plurality of X-ray generators 110 are arranged in an array in the housing 101, and each X-ray generator is arranged separately from each other and can emit X-rays independently of each other. Exemplarily, a working voltage can be supplied separately to each X-ray generator 110 in the housing 101 through a connector interface 102. For example, by controlling each X-ray generator to work in turn, a rapid scan of the object to be inspected can be achieved. Therefore, by using an X-ray source with such an arrangement, each X-ray generator is independent of each other, which is convenient for disassembly, installation and maintenance, and reduces the equipment cost. For example, if one of the X-ray generators is abnormal or damaged, it can be directly replaced with a new X-ray generator, thereby reducing the maintenance cost and difficulty.

[0030] In some embodiments, the array X-ray source 100 also includes insulating oil or coolant located in the shell 101, and multiple X-ray generators 110 are at least partially immersed in the insulating oil or coolant, which can provide high-voltage insulation on the one hand, and remove the heat generated by the X-ray generator through fluid circulation on the other hand.

[0031] In some embodiments, at least one X-ray generator is a single-focus X-ray generator, which is configured as a single device capable of independently emitting X-rays. The X-ray generator is, for example, a pulsed X-ray generator. In other embodiments, the X-ray generator itself may also be a multi-focus or distributed X-ray generating device, each of which forms an independent sub-X-ray source.

[0032] like Figure 1-5As shown, the X-ray generator 110 includes an anode target 111 and an X-ray extraction window 112 disposed on the anode target 111. The anode target 111 generates X-rays under the impact of particles such as electron beams, and can also take away excess heat. At least a portion of the generated X-rays are emitted from the X-ray extraction window 112. The X-ray generator 110 has a tubular housing 113, which has opposite first ends (right ends in the figure) and second ends (left ends in the figure). The first end is closed, such as being closed by a sealing plate 115. The sealing plate 115 can be formed as a whole with the tubular housing 113, or formed separately and sealedly mounted to the first end of the tubular housing 113. As shown in the figure, the anode target 111 is disposed at the second end of the tubular housing 113, thereby defining a vacuum space V in the tubular housing, so that particles such as electron beams travel toward the anode target 111 in the vacuum space V. In other embodiments, the entire anode target can be disposed in the housing, for example, sealed in the vacuum space V, and the generated X-rays can be emitted through the housing.

[0033] In some embodiments, the X-ray generator 110 further has an electron beam generating device 114, which is used to emit an electron beam toward the anode target 112. For example, the electron beam generating device 114 is disposed in the tubular housing 113 near the first end of the tubular housing 113, and emits an electron beam under the control of a voltage, and the electron beam passes through the vacuum space V and hits the anode target 111, so that the anode target 111 generates X-rays. At the first end of the tubular housing 113, for example, on the sealing plate 115, a connector 116 is sealedly disposed, and an external power supply supplies a negative high voltage to the electron beam generating device 114 through the connector 116.

[0034] In some examples, the anode target may be made of at least one of tungsten, copper, silver, and palladium. The X-ray extraction window may be made of metal foil, such as titanium foil, copper foil, aluminum foil, beryllium foil, stainless steel foil, etc., or non-metallic materials, such as ceramic sheets, glass sheets, etc. The X-ray extraction window may be sealed on the anode target in a variety of ways, such as welding, brazing, crimping, sintering, suitable connectors or fixings, etc.

[0035] Exemplarily, the X-ray generator may be an X-ray tube or an accelerator. When the X-ray generator is an X-ray tube, the electron beam generating device is a cathode; when the X-ray source is an accelerator, the electron beam generating device includes an electron gun and an accelerator tube. In this case, the X-ray generator may also include components such as a microwave power source and a waveguide. The following description takes an X-ray tube as an example.

[0036] In the illustrated embodiment, the X-ray generator 110 further includes a control grid 117 and / or a focusing device 118. The control grid 117 may also be referred to as a control grid, which is disposed in the vacuum space V defined in the housing 113, adjacent to the electron beam generating device 114, for example, at the electron emission port of the electron beam generating device 114, and is used to control the emission and cutoff of the electron beam of the electron beam generating device 114. For example, when a suitable voltage (for example, a negative voltage, whose absolute value may be greater than the absolute value of the voltage on the electron beam generating device, that is, the voltage applied to the control grid is a negative voltage relative to the voltage on the electron beam generating device) is applied to the control grid, no electrons are emitted to the anode target, and thus the X-ray generator does not generate X-rays; when the voltage applied to the control grid is a positive voltage relative to the voltage on the electron beam generating device, the electrons emitted by the electron beam generating device are drawn out through the control grid and hit the anode target to generate X-rays. The amount of electrons in the electron beam emitted by the electron beam generating device can be adjusted by adjusting the voltage on the control grid, thereby adjusting the output of X-rays. The focusing device 118 is arranged in the vacuum space V defined in the outer shell 113, for example, located downstream of the control grid 117, and is used to collect and focus the electron beam from the electron beam generating device 114. The focused electron beam passes through the vacuum space V and hits the anode target 111 under the action of the electric field.

[0037] In some embodiments of the present disclosure, Figure 4 and 5 As shown, the anode target 111 is provided with an opening 119 connected to the vacuum space V defined in the housing 113, and at least a portion of the electron beam hits the target point on the anode target 111 through the opening 119, while the X-ray extraction window 112 closes the opening 119, thereby at least a portion of the X-rays generated by the anode target 111 are emitted from the X-ray extraction window 112 through the opening 119. Exemplarily, the opening 119 is axially aligned with the electron beam generating device 114 (e.g., also with the control grid 117 and / or the focusing device 118), so that most of the electron beam generated by the electron beam generating device 114 hits the inside of the anode target 111 through the opening 119, so that the X-rays generated by the anode target 111 are emitted from the X-ray extraction window 112.

[0038] In some embodiments, Figure 1 and 6 As shown, the X-ray extraction windows 112 of the plurality of X-ray generators 110 are generally oriented in the same direction (first direction). Figure 1In the embodiment, a plurality of X-ray generators 110 are linearly arranged in a housing 101 along a second direction (also referred to as an arrangement direction) in such a manner that anode targets 111 are located on the same side. For example, the arrangement direction of the plurality of X-ray generators 110 is approximately perpendicular to an extension direction or an axial direction of a single X-ray generator. The individual X-ray generators 110 are spaced apart at a fixed or variable interval so that the corresponding anode targets 111 are insulated and separated from each other, so that the emitted X-rays do not interfere with each other.

[0039] In such Figure 6 In the illustrated embodiment, the arrayed X-ray source includes at least a first row of X-ray generators and a second row of X-ray generators, which are arranged side by side along a third direction (such as the up-down direction in the figure) and insulated from each other, and each row of X-ray generators is, for example, a linear array. In some examples, the first and second rows of X-ray generators are staggered or offset from each other in their arrangement direction (such as the left-right direction in the figure, i.e., the second direction), for example, the central axis of one X-ray generator in the first row of X-ray generators is located between the central axes of two adjacent X-ray generators in the second row of X-ray generators, thereby increasing the spatial density of the X-ray source. As shown in the figure, the anode targets of the first row of X-ray generators and the second row of X-ray generators can face each other, thereby increasing the spatial density of the X-ray source; further, the anode targets of the first row of X-ray generators and the second row of X-ray generators can be offset from each other in the arrangement direction (such as the left and right direction in the figure), for example, the position or target point hit by the electron beam on the anode target of the first row of X-ray generators is not aligned with the position or target point hit by the electron beam on the anode target of the second row of X-ray generators, such as not aligned with each other in the extension direction or axial direction of the X-ray generator, thereby achieving a staggered arrangement with a compact structure. In some other examples, the X-ray extraction of the first and second rows of X-ray generators can also be staggered or offset from each other in their arrangement direction (such as the left and right direction in the figure).

[0040] The first row of X-ray generators and the second row of X-ray generators may be located in the same housing, or alternatively, the first row of X-ray generators and the second row of X-ray generators may be located in different sub-housings arranged side by side.

[0041] The embodiments of the present disclosure also provide an X-ray imaging device, which includes the aforementioned array-type X-ray source, and is therefore easy to disassemble, install, and maintain, thereby reducing the cost of the device.

[0042] While embodiments of the present disclosure have been shown and described, it will be appreciated by those skilled in the art that changes may be made to these embodiments without departing from the principles and spirit of the disclosure, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An array type X-ray source (100), comprising a housing (101) and a plurality of X-ray generators (110) located in the housing, wherein the plurality of X-ray generators are arranged in an array, and the respective X-ray generators are disposed separately from each other and are configured to emit X-rays independently of each other. in, Each of the plurality of X-ray generators comprises: an anode target (111), which generates X-rays when struck by the electron beam; a tubular housing (113) having a closed first end and an opposite open second end, an anode target being arranged at the second end to define a vacuum space (V) together with the tubular housing, the anode target being at least partially positioned outside the vacuum space and the tubular housing; and An X-ray extraction window (112) is arranged on the circumferential outer side of the anode target that is recessed relative to the tubular housing, so that at least a portion of the X-rays generated by the anode target are emitted from the X-ray extraction window, and the orientation of the X-ray extraction window intersects with the axial direction of the X-ray generator. wherein the X-ray extraction windows of the plurality of X-ray generators are all oriented toward a first direction, wherein the plurality of X-ray generators are linearly arranged in the housing along a second direction, and Wherein, the multiple X-ray generators include at least a first row of X-ray generators and a second row of X-ray generators arranged side by side along a third direction, the first row of X-ray generators and the second row of X-ray generators are offset from each other in the second direction, and the anode targets of the first row of X-ray generators and the second row of X-ray generators face each other.

2. The array X-ray source according to claim 1, in, Each of the plurality of X-ray generators further comprises: An electron beam generating device (114) is disposed in the tubular housing near the first end and is configured to emit an electron beam toward the anode target.

3. The array X-ray source according to claim 2, in, Each of the plurality of X-ray generators further comprises: a control grid (117), which is arranged in the vacuum space adjacent to the electron beam generating device and is configured to control the emission and cutoff of the electron beam of the electron beam generating device; and / or A focusing device (118) is arranged in the vacuum space and is used to collect and focus the electron beam from the electron beam generating device, and the focused electron beam passes through the vacuum space and impacts the anode target.

4. The array X-ray source according to claim 2, in, The anode target is provided with an opening (119) communicating with the vacuum space, and at least a portion of the electron beam strikes the anode target through the opening, and The X-ray extraction window closes the opening, so that at least a portion of the X-rays generated by the anode target are emitted from the X-ray extraction window through the opening.

5. The array X-ray source according to any one of claims 1 to 4, in, At least one of the plurality of X-ray generators is a single-focus X-ray generator.

6. The array X-ray source according to any one of claims 1 to 4, in, At least one of the plurality of X-ray generators is a pulsed X-ray generator.

7. The arrayed X-ray source according to any one of claims 1 to 4, further comprising insulating oil located in the housing, wherein the plurality of X-ray generators are at least partially immersed in the insulating oil.

8. The array X-ray source according to any one of claims 1 to 4, in, The housing is made of metal, ceramic or glass; and / or The X-ray extraction window is made of a metal foil selected from the group consisting of titanium foil, copper foil, aluminum foil, beryllium foil, and stainless steel foil, or is made of a ceramic sheet or a glass sheet.

9. An X-ray imaging device, comprising an array X-ray source according to any one of claims 1 to 8.

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