Probe unit

Abstract

The probe unit comprises: a plate-shaped probe having a first contact portion and a second contact portion at both ends in a first direction, respectively; a shell capable of housing the probe inside in a state where the first contact portion is arranged outside through an opening portion of an opening surface; a swing component supported to be able to swing relative to the shell along the first direction and the extension direction of the opening surface, and having a housing hole capable of housing the first contact portion; and a force applying portion, which applies a force to the swing component relative to the shell toward an initial position in the first direction, and applies a force to the swing component relative to the shell toward the center of the swing range of the swing component in the extension direction of the opening surface.

Description

Technical Field

[0001] The present invention relates to a probe unit. Background Art

[0002] In electronic component modules such as cameras and liquid crystal panels, generally, during the manufacturing process of the electronic component modules, conduction inspections and operation characteristic inspections are performed. These inspections are performed by connecting terminals for connection to a main substrate provided on the electronic component module to terminals of an inspection device using probe pins.

[0003] As such a probe, there is a Pogo Pin type probe described in Patent Document 1. This probe includes a plunger having a contact terminal and a plunger body provided coaxially with the contact terminal, and a barrel provided on the outer circumference of the plunger.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2016-142644 Summary of the invention

[0007] Problems to be solved by the invention

[0008] In recent years, the miniaturization of electronic component modules has been promoted, and the inspection equipment used to inspect electronic component modules is required to support miniaturization. Generally speaking, the more miniaturized the Pogo Pin type probe such as the above-mentioned probe is, the lower the rigidity is, and it is easy to be damaged. Therefore, the inspection equipment using the above-mentioned probe may not be able to support miniaturization.

[0009] An object of the present invention is to provide a probe unit that can support miniaturization.

[0010] Technical means to solve problems

[0011] A probe unit according to one example of the present invention has:

[0012] a plate-shaped probe having a first contact portion and a second contact portion at both ends of the plate-shaped probe in a first direction;

[0013] a housing having an opening surface intersecting the first direction, capable of housing the probe inside in a state where the first contact portion is arranged outside through an opening portion of the opening surface;

[0014] a swing member supported in a state of being swingable relative to the housing along the first direction and the extending direction of the opening surface, and having a receiving hole penetrating in the first direction and capable of receiving the first contact portion; and

[0015] The force-applying portion is arranged inside the shell and applies force to the swing component relative to the shell toward an initial position farthest from the opening surface in the first direction, and applies force to the swing component relative to the shell toward a center of a swing range of the swing component in an extending direction of the opening surface.

[0016] Effects of the Invention

[0017] According to the above-mentioned probe unit, the probe unit includes: the plate-shaped probe; and the swing member having the receiving hole capable of receiving the first contact portion of the probe. According to such a structure, the probe unit capable of supporting miniaturization can be easily realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a perspective view showing a probe unit according to one embodiment of the present invention.

[0019] Figure 2 It is along Figure 1 Cross-sectional view along line II-II.

[0020] Figure 3 It is along Figure 1 Cross-sectional view along line III-III.

[0021] Figure 4 It is shown Figure 1 A perspective view of the swing component of the probe unit.

[0022] Figure 5 yes Figure 4 A top view of the swinging part.

[0023] Figure 6 yes Figure 1 Magnified top view of the probe unit.

[0024] Figure 7 It is shown Figure 1 A perspective view of the probe of the probe unit.

[0025] Figure 8 It is shown Figure 1 A perspective view of a modified example of the probe unit.

[0026] Fig. 9 It is along Figure 8 A cross-sectional view taken along line IX-IX.

[0027] Fig.10 It is along Figure 8 A cross-sectional view taken along line VIII-VIII.

[0028] Fig.11 yes Figure 8 Magnified top view of the probe unit.

[0029] Fig.12 It is shown Figure 8 A perspective view of the probe of the probe unit. DETAILED DESCRIPTION

[0030] Hereinafter, an example of the present invention will be described with reference to the accompanying drawings. In addition, in the following description, terms indicating specific directions or positions are used as needed (for example, terms including "upper", "lower", "right", and "left"), but the use of these terms is to facilitate understanding of the present invention with reference to the accompanying drawings, and the meaning of these terms is not to limit the technical scope of the present invention. In addition, the following description is essentially illustrative and is not intended to limit the present invention, the applicable objects of the present invention, or the use of the present invention. Furthermore, the accompanying drawings are schematic, and the ratios of the various dimensions are not necessarily consistent with the ratios of the actual dimensions.

[0031] like Figure 1 As shown, a probe unit 1 according to an embodiment of the present invention comprises: a housing 10; a plate-shaped probe 20 housed inside the housing 10; and a swing member 30 supported so as to be swingable relative to the housing 10. In this embodiment, as an example, a plurality of probes 20 are housed inside the housing 10. Figure 2 and Figure 3 As shown, each probe 20 has a first contact portion 21 and a second contact portion 22 at both ends of the first direction X, and is arranged at intervals in a plate thickness direction Z that intersects (e.g., is orthogonal to) the first direction X. That is, the probes 20 are arranged in a row with the plate surfaces facing each other.

[0032] As an example, Figure 1 As shown, the housing 10 includes: a substantially rectangular parallelepiped base housing 11 ; and a core housing 12 housed inside the base housing 11 .

[0033] As an example, Figure 2As shown, the base shell 11 has a pair of opening surfaces 111, 112 (hereinafter referred to as the first opening surface 111 and the second opening surface 112) intersecting the first direction X. Approximately rectangular opening portions 113, 114 are respectively provided at the approximate center of the first opening surface 111 and the second opening surface 112 in the longitudinal direction (i.e., the plate thickness direction Z). A shell housing portion 13 for housing the core shell 12 is provided inside the base shell 11. The opening portions 113, 114 are respectively connected to the shell housing portion 13. The first contact portion 21 and the second contact portion 22 of the probe 20 are respectively arranged on the outside of the base shell 11 via the opening portions 113, 114. In this embodiment, as Figure 1 As shown, the base housing 11 is composed of three substantially rectangular plate members 116 , 117 , and 118 stacked in the first direction X. The plate members 116 , 117 , and 118 are integrated by the pin member 17 .

[0034] The core shell 12 of the base shell 11 is provided with a receiving groove 115 around it. The receiving grooves 115 are provided on both sides of the core shell 12 in the base shell 11 in the plate thickness direction Z. Each receiving groove 115 extends in the plate thickness direction Z and in a direction away from the core shell 12 inside the base shell 11. Inside each receiving groove 115, there are respectively received: a support portion 32 of the swing member 30 described later; and a coil spring 50 (an example of a force applying portion) which applies force to the support portion 32 in the first direction X and in a direction from the second opening surface 112 toward the first opening surface 111.

[0035] As an example, Figure 3 As shown, the core shell 12 has a first core shell 121 and a second core shell 122, and the first core shell 121 and the second core shell 122 are respectively provided with a plurality of probe storage parts 123 capable of storing the probes 20 therein. The probe storage parts 123 of each core shell 121, 122 are arranged adjacent to each other in a second direction Y intersecting (for example, orthogonal) with the first direction X and the plate thickness direction Z, and are independently positioned and held as a whole by the base shell 11. Figure 2 As shown, the probe housings 123 are arranged in a row at intervals in the plate thickness direction Z. In each probe housing 123 , one probe 20 is housed in a state where it is electrically independent from other probes 20 and the contacts 21 and 22 at both ends in the first direction X are located outside the core housings 121 and 122 .

[0036] In addition, if Figure 1As shown, the probe unit 1 has a swing member 30, which is arranged outside the housing 10. The swing member 30 has a swing plate portion 31, which is arranged to face the first opening surface 111; and a pair of support portions 32, which extend from both ends of the swing plate portion 31 in the plate thickness direction Z in the first direction X. The swing plate portion 31 is supported by the pair of support portions 32 so as to be swingable relative to the housing 10.

[0037] like Figure 3 As shown, the swing plate portion 31 has: a recessed portion 33, which is provided on the surface opposite to the surface opposite to the first opening surface 111 in the first direction X; and a plurality of receiving holes 34, which are provided on the bottom surface of the recessed portion 33. The recessed portion 33 is configured, for example, to receive a part of the connector when the connector of the inspection object or the inspection device as an example of the contact object is brought into contact with the probe unit 1, and to determine the position of the connector relative to the swing member 30. Each receiving hole 34 penetrates the swing plate portion 31 in the first direction X, and receives the first contact portion 21 of the probe 20. In this embodiment, the number of receiving holes 34 corresponding to the number of probes 20 to be received is provided.

[0038] like Figure 2 As shown, the distal end of each support portion 32, which is farther from the swing plate portion 31 in the first direction X, is received in the receiving groove 115 of the base housing 11. A flange portion 38 is provided at the distal end of each support portion 32, and the flange portion 38 extends in a direction away from each support portion 32. Each flange portion 38 is arranged to be able to contact the inner surface of the base housing 11 constituting the receiving groove 115 in the first direction X, and is urged relative to the base housing 11 by the coil spring 50.

[0039] In the probe unit 1, as Figure 4 and Figure 5 As shown, each flange portion 38 is urged relative to the base housing 11 by four coil springs 50. Specifically, each flange portion 38 has a substantially rectangular shape with the second direction Y as the long side when viewed from above along the first direction X, and a coil spring 50 is disposed at each end of each flange portion 38 in the second direction Y. In other words, each coil spring 50 is disposed so as to be located at each vertex of a quadrilateral surrounding the probe 20 when viewed from above along the first direction X.

[0040] In addition, if Figure 5As shown, when viewed from above along the first direction X, the center of gravity GP of the swing member 30 is located inside a quadrilateral whose sides are four imaginary straight lines L1 to L4 passing through arbitrary points (e.g., centers) of two coil springs 50 adjacent to each other in the first direction X and the second direction Y. In other words, each coil spring 50 is arranged so that the center of gravity GP of the swing member 30 is located inside a polygon whose vertices are the coil springs 50.

[0041] like Figure 2 and Figure 3 As shown in the figure, the movement of the swing member 30 in the first direction X is restricted between the initial position P1 and the operating position P2 by the flange portion 38 and the storage groove 115. The initial position P1 is the position farthest from the first opening surface 111 among the positions in the first direction X in which the swing member 30 can move. The swing member 30 is held at the initial position P1 by the biasing force of the coil spring 50 when no external force in the first direction X is applied. The operating position P2 is the position closest to the first opening surface 111 among the positions in the first direction X in which the swing member 30 can move.

[0042] In addition, if Figure 6 As shown, in a plan view along the first direction X, a gap 35 in the second direction Y and a gap 36 in the plate thickness direction Z are provided between each support portion 32 of the swing member 30 and the storage groove 115. In addition, Figure 6 Only one support portion 32 is shown. The movement of the swing member 30 in the second direction Y and the plate thickness direction Z is limited to the range of the gaps 35 and 36. When the position where the gaps 35 and 36 are formed between the receiving groove 115 and the extension direction of the first opening surface 111 (that is, the extension direction of the plane including the second direction Y and the plate thickness direction Z) is the center of the swing range, the swing member 30 is urged toward the center of the swing range by the four coil springs 50 in the extension direction of the first opening surface 111.

[0043] As an example, Figure 7 As shown, each probe 20 is in the shape of an elongated thin plate in the first direction X and has conductivity. Each probe 20 includes: an elastic portion 201 that can be elastically deformed along the first direction X; a first contact portion 202 that is connected to one end of the elastic portion 201 in the first direction X and is provided with a first contact portion 21; and a second contact portion 203 that is connected to the other end of the elastic portion 201 in the first direction X and is provided with a second contact portion 22. Each probe 20 is formed, for example, by electroforming, and the elastic portion 201, the first contact portion 202, and the second contact portion 203 are arranged in series along the first direction X and are integrally formed.

[0044] As an example, the elastic portion 201 is composed of a plurality of strip-shaped elastic pieces arranged with gaps therebetween. Each strip-shaped elastic piece is in the shape of an elongated strip and has substantially the same cross-sectional shape.

[0045] As an example, the first contact portion 202 includes a main body 23 connected to the elastic portion 201 in a direction intersecting the first direction X, and a pair of leg portions 24 and 25 extending from the main body 23 in the first direction X and away from the elastic portion 201 .

[0046] The main body portion 23 has a contact portion 231 which is provided at one end portion close to the elastic portion 201 in the first direction X and extends in the second direction Y.

[0047] Each leg 24, 25 is configured to be arranged with a gap 26 in the second direction Y, and can be elastically deformed in the second direction Y. A first contact portion 21 is provided at the end of each leg 24, 25. Each first contact portion 21 is configured to be able to contact a contact object (for example, a convex contact of an inspection object) from the first direction X. In addition, each leg 24, 25 has a protrusion 241, 251, which is provided on the side surfaces of each leg 24, 25 that are opposite to each other in the second direction Y. Each protrusion 241, 251 protrudes in a manner of blocking the gap 26 between a pair of legs 24, 25, thereby preventing the contact object from being excessively inserted into the gap 26.

[0048] In addition, if Figure 2 and Figure 3 As shown, each first contact portion 21 is accommodated in the accommodation hole 34 of the corresponding swing member 30 , and a portion thereof protrudes from the bottom surface of the recess 33 when the swing member 30 is located at the initial position P1 .

[0049] As an example, the second contact portion 203 includes a main body 27 connected to the elastic portion 201 in the second direction Y. The main body 27 includes a contact portion 271 extending in the second direction Y from an end of the main body 27 on the elastic portion 201 side in the first direction X. The end of the main body 27 in the first direction X has a substantially triangular shape that tapers in the first direction X as it moves away from the elastic portion 201, and constitutes the second contact portion 22.

[0050] The first contact portion 202 and the second contact portion 203 are respectively arranged on an imaginary straight line L5 that passes through the center of the pair of leg portions 24 and 25 of the first contact portion 202 in the second direction Y and extends in the first direction X. The elastic portion 201 and the contact portions 231 and 271 are respectively arranged on the same side in the second direction Y with respect to the imaginary straight line L5.

[0051] like Figure 3As shown, in a state where the probes 20 are stored in the probe housings 123 of the core housing 12, the abutting portions 231 of the first contact portion 202 and the abutting portions 271 of the second contact portion 203 are respectively configured to abut against the inner surfaces of the first core housing 121 and the second core housing 122 constituting the probe housings 123 in the first direction X. That is, the positions of the contact portions 21 and 22 of the probes 20 in the first direction X are determined by the abutting portions 231 and 271.

[0052] In addition, the elastic portion 201 is arranged on one side with respect to one end 232 in the width direction (i.e., the second direction Y) of the main body 23 of the first contact portion 202 and one end 272 in the width direction of the main body 27 of the second contact portion 203. In addition, in this embodiment, the one end 232 of the main body 23 of the first contact portion 202 and the one end 272 of the main body 27 of the second contact portion 203 are arranged on a straight line parallel to the imaginary straight line L5.

[0053] The probe unit 1 can be used, for example, for a module having a BtoB (Business-to-Business) connector as a connection medium, such as a camera module, and a semiconductor package such as a SOP (Small Outline Package), a QFP (Quad Flat Package), or a BGA (Ball grid array) for continuity inspection or operation characteristic inspection. In such an inspection, generally speaking, each probe 20 frequently and repeatedly contacts and releases contact with an inspection object or an inspection device, which is an example of a contact object, and therefore requires durability. When the probe 20 is miniaturized, the durability requirement is further increased.

[0054] Furthermore, the frequency of repeated contact and release between the inspection object and the first contact portion 21 is higher than the frequency of repeated contact and release between the inspection device and the second contact portion 22. Therefore, miniaturizing the probe unit 1 and ensuring the durability of the first contact portion 21 are important factors.

[0055] However, as a method of ensuring the durability of the probe 20, it is considered to change the material of the probe 20. When the probe 20 is formed of a material with high hardness such as a nickel alloy or a titanium alloy, it is possible to damage the contact object. On the contrary, when the probe 20 is formed of a material with low hardness such as beryllium steel or phosphor bronze, the probe 20 cannot have sufficient durability, and the contact portion is sometimes degraded due to sliding wear caused by repeated contact and release of contact with the contact object. Therefore, it is not easy to ensure the durability of the probe 20 by changing the material.

[0056] According to the probe unit 1, there is a plate-shaped probe 20; and a swing member 30 having a storage hole 34 capable of storing the first contact portion 21 of the probe 20. Since the probe 20 has a plate shape, it is possible to suppress the reduction in rigidity of the probe 20 even if it is miniaturized, for example, compared with a Pogo Pin type probe, thereby ensuring durability. In addition, since the first contact portion 21 of the probe 20 is stored in the storage hole 34 of the swing member 30, it is possible to reduce the occurrence of damage in the first contact portion 21 even when the probe 20 is miniaturized. That is, according to such a structure, it is possible to easily realize a probe unit 1 that can support miniaturization.

[0057] In addition, the swing member 30 is supported by the coil spring 50 in a state where it can swing relative to the housing 10 along the first direction X and the extension direction of the first opening surface 111 (i.e., the extension direction of the plane including the second direction Y and the plate thickness direction Z). According to such a structure, even if the position of the probe unit 1 relative to the contact object deviates, the probe 20 can be positioned more accurately according to the contact object.

[0058] Furthermore, the force-applying portion is composed of at least three coil springs 50, and the center of gravity of the swing member 30 is located inside a polygon having the coil springs 50 as vertices when viewed from above along the first direction X. By configuring in this manner, the swing member 30 can be more reliably swung not only along the first direction X but also along a plane including the second direction Y and the plate thickness direction Z.

[0059] In addition, the biasing portion includes four coil springs 50, which are located at respective vertices of a quadrilateral surrounding the probe 20 when viewed from above along the first direction X. According to this configuration, the swing member 30 can be more reliably swung not only along the first direction X but also along a plane including the second direction Y and the plate thickness direction Z.

[0060] In addition, the probe 20 includes: an elastic portion 201 that can be elastically deformed along the first direction X; a first contact portion 202 that is connected to one end of the elastic portion 201 in the first direction X and is provided with a first contact portion 21; and a second contact portion 203 that is connected to the other end of the elastic portion 201 in the first direction X and is provided with a second contact portion 22. The first contact portion 202 and the second contact portion 203 respectively include abutment portions 231 and 271 that extend along the second direction Y and abut against the inner surface of the housing 10 in the first direction X to restrict the movement of the probe 20 in the first direction X. According to such a structure, it is easier to realize a probe unit 1 that can support miniaturization.

[0061] In addition, the housing 10 includes: a first core housing 121 and a second core housing 122, each of which includes a probe storage portion 123 capable of storing and holding the probe 20; and a base housing 11, which positions and holds each core housing 121, 122 independently of each other in a state where the probe storage portions 123 of each core housing 121, 122 are arranged adjacent to each other in the second direction Y. According to such a structure, for example, by configuring the base housing 11 and the core housing 12 to be universal, a plurality of different core housings 12 predetermined in advance can be positioned and held as a whole relative to one base housing 11, thereby improving the productivity of the probe unit 1.

[0062] In addition, the biasing portion is not limited to being composed of four coil springs 50, and may be composed of at least three coil springs 50. For example, when the biasing portion is composed of three coil springs 50, one coil spring 50 may be arranged at the center of one flange portion 38 in the second direction Y, and one coil spring 50 may be arranged at each of the two ends of the other flange portion 38 in the second direction.

[0063] In addition, the probe unit 1 can also be used as Figure 8 to Figure 12 As shown. Figure 8 to Figure 12 In the probe unit 1 shown in FIG. 1 , the swing member 30 is disposed inside the housing 10, but not outside the housing 10. Fig. 9 and Fig.10 As shown, the housing housing portion 13 of the base housing 11 houses the core housing 12 and houses the swing member 30 in a state of surrounding the swing member 30 around the first direction X and allowing the swing member 30 to swing in the first direction X. A groove portion 18 is provided on the first opening surface 111 of the base housing 11. The groove portion 18 extends in the second direction Y and communicates with the opening portion 113 and the outside of the base housing 11.

[0064] like Fig. 9 and Fig.10 As shown, the swing member 30 is disposed in the opening portion 113, and the opening portion 113 is open in the first opening surface 111 of the base housing 11. Fig.11 As shown, in a plan view along the first direction X, a gap 35 in the second direction Y and a gap 36 in the plate thickness direction Z are provided between the swing plate portion 31 of the swing member 30 and the opening 113 .

[0065] In this way, Figure 8 to Figure 12 In the probe unit 1 shown, in the initial state P1, substantially the entire first contact portion 21 is covered by the housing 10 and the swing member 30. Therefore, since the occurrence of damage in the first contact portion 21 can be further reduced, the probe unit 1 that can support miniaturization can be more easily realized.

[0066] In addition, if Figure 8 As shown, a flat portion 37 is provided around the recessed portion 33 of the swing plate portion 31 . The flat portion 37 is disposed in the first direction X between the first opening surface 111 and the bottom surface of the groove portion 18 .

[0067] like Fig. 9 As shown, the pin member 17 integrating the plate members 116 , 117 , and 118 of the base housing 11 protrudes from the second opening surface 112 in the first direction X, and a part of the pin member 17 is located outside the housing 10 .

[0068] like Fig.12 As shown in FIG. 1 , the elastic portion 201 is composed of a plurality of elastic sheets (in this embodiment, two strip-shaped elastic sheets) arranged with gaps between them. Each elastic sheet has a meandering shape composed of four extensions extending in the second direction Y and three bends connected to adjacent extensions. The extensions at both ends arranged in the first direction X constitute the abutment portions 204 and 205, respectively. Fig.10 As shown, each of the contact portions 204 and 205 is configured to contact the inner surfaces of the first core case 121 and the second core case 122 constituting each probe housing portion 123 in the first direction X when housed in the core case 12 .

[0069] That is, the housing 10 is not limited to the above-described embodiment, and any housing 10 may have an opening surface 111 intersecting the first direction X and capable of housing the probe 20 inside with the first contact portion 21 arranged outside through the opening 113 of the opening surface 111 .

[0070] The probe 20 is not limited to the above-described embodiment, and may be in the form of a plate having the first contact portion 21 and the second contact portion 22 at both ends in the first direction X. Figure 1 The probe unit 1 is used Fig.12 The probe 20 can also be Figure 8 The probe unit 1 is used Figure 7 Probe 20.

[0071] In addition, the contact portions 204 and 205 may be provided only at one of the two ends in the first direction X, or both ends may be omitted. In this case, instead of providing the contact portions 204 and 205 on the elastic portion 201, contact portions 231 and 271 extending from the first contact portion 202 or the second contact portion 203 in the second direction Y may be provided.

[0072] The urging portion is not limited to the coil spring 50 , and any structure that can urge the swing member 30 toward the initial position P1 in the first direction X and toward the center of the swing range in the extending direction of the opening surface 111 may be employed.

[0073] In the above, various embodiments of the present invention have been described in detail with reference to the drawings, but various modes of the present invention will be described in the end. In addition, in the following description, reference numerals are also attached as an example.

[0074] A probe unit 1 according to a first aspect of the present invention includes:

[0075] The plate-shaped probe 20 has a first contact portion 21 and a second contact portion 22 at both ends in the first direction X;

[0076] The housing 10 has an opening surface 111 intersecting the first direction X, and can accommodate the probe 20 inside in a state where the first contact portion 21 is arranged outside through an opening portion 113 of the opening surface 111;

[0077] a swing member 30 supported to be swingable relative to the housing 10 along the first direction X and the extending direction of the opening surface 111, and having a receiving hole 34 penetrating in the first direction X and capable of receiving the first contact portion 21; and

[0078] The force-applying portion 50 is arranged inside the shell 10, and in the first direction X, applies force to the swing component 30 relative to the shell 10 toward an initial position P1 farthest from the opening surface 111, and in the extension direction of the opening surface 111, applies force to the swing component 30 relative to the shell 10 toward the center of the swing range of the swing component 30.

[0079] The probe unit 1 according to the first embodiment includes the plate-shaped probe 20 and the swing member 30 having the receiving hole 34 capable of receiving the first contact portion 21 of the probe 20. With such a configuration, the probe unit 1 capable of supporting miniaturization can be easily realized.

[0080] In the probe unit 1 according to the second aspect of the present invention,

[0081] The force applying part is composed of at least three coil springs 50.

[0082] In a plan view along the first direction X, the center of gravity of the swing member 30 is located inside a polygon having the coil springs 50 as vertices.

[0083] According to the probe unit 1 of the second embodiment, the swing member 30 can be supported in a state where it can swing more reliably in the first direction X and in the extending direction of the opening surface 111. As a result, even if the position of the probe unit 1 relative to the contact object is deviated, the probe 20 can be positioned more accurately according to the contact object.

[0084] In the probe unit 1 according to the third aspect of the present invention,

[0085] The urging portion includes the four coil springs 50 , and in a plan view along the first direction X, the four coil springs 50 are arranged at respective vertices of a quadrilateral surrounding the probe 20 .

[0086] According to the probe unit 1 of the third embodiment, the swing member 30 can be supported in a state where it can swing more reliably in the first direction X and in the extending direction of the opening surface 111. Even if the position of the probe unit 1 relative to the contact object is deviated, the probe 20 can be positioned more accurately according to the contact object.

[0087] In the probe unit 1 according to the fourth aspect of the present invention,

[0088] The probe 20 has:

[0089] an elastic portion 201 capable of elastically deforming along the first direction X;

[0090] a first contact portion 202 connected to one end of the elastic portion 201 in the first direction X and provided with the first contact point portion 21; and

[0091] The second contact portion 203 is connected to the other end of the elastic portion 201 in the first direction X and is provided with the second contact portion 22.

[0092] The elastic portion 201 has a first abutment portion 204, which extends along a second direction Y intersecting the first direction X and the plate thickness direction Z of the probe 20, and constitutes at least one of one end of the elastic portion 201 in the first direction X and the other end of the elastic portion 201 in the first direction X.

[0093] The first contact portion 204 contacts the inner surface of the housing 10 in the first direction X to restrict movement of the probe 20 in the first direction X.

[0094] According to the probe unit 1 of the fourth aspect, the probe unit 1 that can support miniaturization can be realized more easily.

[0095] In the probe unit 1 according to the fifth aspect of the present invention,

[0096] The probe 20 has:

[0097] an elastic portion 201 capable of elastically deforming along the first direction X;

[0098] a first contact portion 202 connected to one end of the elastic portion 201 in the first direction X and provided with the first contact point portion 21; and

[0099] The second contact portion 203 is connected to the other end of the elastic portion 201 in the first direction X and is provided with the second contact portion 22.

[0100] At least one of the first contact portion 202 and the second contact portion 203 has a second abutment portion 231, 271, which extends along a second direction Y intersecting the first direction X and the plate thickness direction Z of the probe 20, and abuts against the inner surface of the shell 10 in the first direction X to limit the movement of the probe 20 in the first direction X.

[0101] According to the probe unit 1 of the fifth aspect, the probe unit 1 capable of supporting miniaturization can be realized more easily.

[0102] In the probe unit 1 according to the sixth aspect of the present invention,

[0103] The housing 10 has:

[0104] The first core case 121 and the second core case 122 each have a probe housing portion 123 capable of housing and holding the probe 20; and

[0105] The base shell 11 positions the first core shell 121 and the second core shell 122 independently of each other and holds them as a whole when the probe housing portion 123 of the first core shell 121 and the probe housing portion 123 of the second core shell 122 are adjacently arranged in the second direction Y.

[0106] According to the probe 1 of the sixth embodiment, for example, by making the base shell 11 and the core shell 12 common, a plurality of predetermined different core shells 12 can be independently positioned and held as a whole relative to one base shell 11, thereby improving the productivity of the probe unit 1.

[0107] In the probe unit 1 according to the seventh aspect of the present invention,

[0108] The base housing 11 includes a housing housing portion 13 that houses the swing member 30 in a state where the swing member 30 is swingable in the first direction X and surrounds the swing member 30 in the first direction X.

[0109] According to the probe unit 1 of the seventh aspect, since the occurrence of damage in the first contact portion 21 can be further reduced, the probe unit 1 that can support miniaturization can be realized more easily.

[0110] In addition, by appropriately combining any of the various embodiments or variations, the effects of each embodiment or variation can be achieved. In addition, it is possible to combine the embodiments with each other, or to combine the embodiments with each other, and it is also possible to combine the features of different embodiments or embodiments with each other.

[0111] The present invention has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, and various modifications and variations will be apparent to those skilled in the art. It should be understood that such modifications and variations are included in the present invention as long as they do not depart from the scope of the present invention based on the appended claims.

[0112] Industrial Applicability

[0113] The probe unit of the present invention can be used, for example, for inspecting modules such as camera modules that have a BtoB (Business-to-Business) connector as a connection medium, and semiconductor packages such as SOP (Small Outline Package), QFP (Quad Flat Package), and BGA (Ball grid array).

[0114] Description of symbols

[0115] 1: probe unit; 10: housing; 11: base housing; 111: first opening surface; 112: second opening surface; 113, 114: openings; 115: storage groove; 116, 117, 118: plate member; 12: core housing; 121: first core housing; 122: second core housing; 123: probe storage portion; 13: housing storage portion; 17: pin member; 18: groove portion; 20: probe; 201: elastic portion; 202: first contact portion; 203: second contact portion; 204, 205: abutment portion; 21: first contact portion; 22: second contact portion; 23, 27: main body portion; 231, 271: abutment portion; 24, 25: foot portion; 241, 251: protrusion portion; 26: gap; 30: swing member; 31: swing plate portion; 32: support portion; 33: recessed portion; 34: storage hole; 35, 36: gap; 37: flat portion; 38: flange portion; 50: coil spring; P1: initial position; P2: action position; L1~L5: imaginary straight lines.

Claims

1. A probe unit, characterized in that: It has: A plate-shaped probe having a first contact portion and a second contact portion at both ends in a first direction; a housing having an opening surface intersecting the first direction, capable of housing the probe inside in a state where the first contact portion is arranged outside through an opening portion of the opening surface; a swing member supported in a state of being swingable relative to the housing along the first direction and the extending direction of the opening surface, and having a receiving hole penetrating in the first direction and capable of receiving the first contact portion; as well as a force applying portion disposed inside the housing and applying force to the swing member relative to the housing toward an initial position farthest from the opening surface in the first direction and applying force to the swing member relative to the housing toward a center of a swing range of the swing member in an extending direction of the opening surface, The probe has: an elastic portion capable of elastically deforming along the first direction; a first contact portion connected to one end of the elastic portion in the first direction and provided with the first contact point portion; and a second contact portion connected to the other end of the elastic portion in the first direction and provided with the second contact point portion, The housing has: a first core shell and a second core shell, each of which has a probe housing portion capable of housing and holding the probe; and A base shell which positions the first core shell and the second core shell independently and holds them as a whole when the probe housing portion of the first core shell and the probe housing portion of the second core shell are adjacently arranged in a second direction intersecting the first direction and the plate thickness direction of the probe.

2. The probe unit according to claim 1, characterized in that The force applying part has at least three coil springs, In a plan view along the first direction, the center of gravity of the swing member is located inside a polygon having the coil springs as vertices.

3. The probe unit according to claim 2, characterized in that: The urging portion includes four coil springs, and the four coil springs are arranged at respective vertices of a quadrilateral surrounding the probe in a plan view along the first direction.

4. The probe unit according to any one of claims 1 to 3, characterized in that: The elastic portion has a first abutment portion extending along a second direction intersecting the first direction and the plate thickness direction of the probe and constituting at least one of one end of the elastic portion in the first direction and the other end of the elastic portion in the first direction, The first contact portion contacts the inner surface of the housing in the first direction to restrict movement of the probe in the first direction.

5. The probe unit according to any one of claims 1 to 3, characterized in that: At least one of the first contact portion and the second contact portion has a second abutment portion extending along a second direction intersecting the first direction and the plate thickness direction of the probe, and abutting against the inner surface of the shell in the first direction to limit the movement of the probe in the first direction.

6. The probe unit according to claim 1, characterized in that: The base housing includes a housing housing portion that houses the swing member in a state in which the swing member is swingable in the first direction and surrounds the swing member in the first direction.

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