Sample holder and charged particle beam device

Abstract

A sample holder and a charged particle beam device are provided, which can suppress the complexity of the device structure and can easily change the position and posture of the sample. The sample holder (19) has a base (41), a sample carrying part (42), a rotating guide part (43), a cooling platform (46), a connecting part (47), a first supporting part and a fixed guiding part (48). The base (41) is fixed to a platform (12) driven by a platform driving mechanism (13). The rotating guide part (43) guides the synchronous rotation of the base (41) and the sample carrying part (42). The cooling platform (46) cools the sample (S). The connecting part (47) is connected to the cooling platform (46). The first supporting part supports the base (41) driven by the platform (12). The fixed guiding part (48) is connected to the base (41) via the first supporting part, and guides the fixation of the connecting part (47) independently of the base (41).

Description

Technical Field

[0001] The invention relates to a sample holder and a charged particle beam device. Background Art

[0002] Conventionally, in charged particle beam devices such as electron beam devices, converged ion beam devices, or composite beam devices of converged ion beams and electron beams, it is preferred to perform various sample analyses based on so-called in-situ. For example, there is known a charged particle beam device that includes a cooling stage for processing and observing a sample while cooling it, a multi-probe for analyzing the electrical properties of the sample, and a nanoindenter for analyzing the mechanical properties of the sample.

[0003] For example, a converged ion beam device is known, which includes: a sample holder, which holds a sample inside a sample chamber for cooling the sample; and a heat transfer component for cooling, which is connected to the sample holder and is guided to the outside via a cooling port provided in the sample chamber (for example, refer to patent document 1).

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2005-136389 Summary of the invention

[0007] Problem that the invention aims to solve

[0008] However, in the charged particle beam device described above, various tubes and cables are sometimes arranged at a plurality of dedicated ports formed in the sample chamber corresponding to a plurality of different sample analyses. However, when a plurality of dedicated ports are formed in the sample chamber, the layout of various devices may be restricted. In addition, for example, in the case of a stage (sample stage) driven by a rotating mechanism having a plurality of different rotating axes, the tubes and cables required for various sample analyses are connected to the stage or the sample holder, and thus, it may be difficult to perform the desired drive.

[0009] An object of the present invention is to provide a sample holder and a charged particle beam device that can suppress the complexity of the device structure and can easily change the position and posture of a sample.

[0010] Means used to solve problems

[0011] In order to solve the above-mentioned problems, the sample holder of the present invention comprises: a base portion, which is fixed to a driving stage; a sample carrying portion, which carries the sample; a driving guide portion, which guides the synchronous driving of the base portion and the sample carrying portion; a functional portion, which acts a prescribed function on the sample; a connecting component, which is connected to the functional portion; a first supporting portion, which supports the base portion driven by the driving stage and the connecting component so as to be relatively movable; and a fixing guide portion, which is connected to the base portion via the first supporting portion and guides the fixing of the connecting component independently of the base portion.

[0012] In the above configuration, the sample holder may include a second support portion that supports the sample mounting portion driven by the driving stage and the functional portion so as to be relatively movable, and the functional portion may be connected to the sample mounting portion via the second support portion.

[0013] In the above configuration, the functional portion may cool the sample mounting portion using a refrigerant flowing through a flow path formed inside and the connecting member.

[0014] In the above configuration, the drive guide portion may have a heat insulating structure.

[0015] In the above configuration, the sample holder may include a conductive connection portion that connects the functional portion fixed to the sample mounting portion driven by the driving stage and the connection member so as to be relatively movable in a conductive state.

[0016] The charged particle beam device of the present invention comprises: any one of the above-mentioned sample holders; a sample chamber, which is equipped with the driving stage; a charged particle beam barrel, which irradiates the sample with a charged particle beam; a replacement chamber, which is installed in the sample chamber; an opening and closing part, which opens and closes the sample chamber and the replacement chamber; and a conveying component, which conveys the sample holder between the sample chamber and the replacement chamber.

[0017] Effects of the Invention

[0018] According to the present invention, the fixing guide portion that guides the fixing of the connection member connected to the functional portion independently of the base portion driven by the driving stage can suppress the complexity of the device structure and easily change the position and posture of the sample. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a perspective view showing the structure of a charged particle beam device in an embodiment of the present invention.

[0020] Figure 2This is a diagram showing a portion of a sample chamber and a replacement chamber of the charged particle beam device according to the embodiment of the present invention cut away and viewed from the Z-axis direction.

[0021] Figure 3 It is a perspective view showing the structure of a stage and a sample holder of the charged particle beam device in the embodiment of the present invention.

[0022] Figure 4 It is a perspective view showing the structure of a sample holder in the embodiment of the present invention.

[0023] Figure 5 It is a cross-sectional view showing the structure of a sample holder in the embodiment of the present invention.

[0024] Figure 6 It is a cross-sectional view showing the structure of a sample holder in a first modified example of the embodiment of the present invention.

[0025] Figure 7 This is a diagram showing an example of a functional stage in a first modified example of an embodiment of the present invention.

[0026] Figure 8 This is a diagram showing another example of the functional stage in the first modified example of the embodiment of the present invention.

[0027] Fig. 9 It is a cross-sectional view showing the structure of a sample holder in a second modified example of the embodiment of the present invention.

[0028] Fig.10 yes Fig. 9 A partial enlarged view of area X is shown.

[0029] Description of symbols

[0030] O: rotation axis; S: sample; 10: charged particle beam device; 11: sample chamber; 12: stage (driving stage); 13: stage driving mechanism; 14: detector; 15: gas supply unit; 16: electron beam column (charged particle beam column); 17: converged ion beam column (charged particle beam column); 18: replacement chamber; 19, 19A, 19B: sample holder; 21: rotation mechanism; 22: direct-acting mechanism; 30: partition valve (opening and closing unit); 31: conveying component; 32: feedthrough; 41: base unit; 42: sample carrying unit ; 42a: sample fixing part; 42b: connecting part; 43, 43A, 43B: rotating guide part (driving guide part); 44: first supporting part (first supporting part); 45: second supporting part (second supporting part); 46: cooling platform; 46b: cooling part (functional part); 46d: circulating flow path (flow path); 47, 47A: connecting part; 48: fixing guide part; 49: guiding supporting part; 51: functional platform; 61: sample carrying part; 62: functional part; 63: connecting part; 64: connecting end; 65: conductive connecting part. DETAILED DESCRIPTION

[0031] Hereinafter, a sample holder and a charged particle beam device according to embodiments of the present invention will be described with reference to the drawings.

[0032] (Charged particle beam device)

[0033] Figure 1 It is a perspective view showing the structure of the charged particle beam device 10 in the embodiment. Figure 2 It is a diagram in which a portion of the sample chamber 11 and the replacement chamber 18 of the charged particle beam device 10 in the embodiment is cut off and observed from the Z-axis direction. In addition, below, the X-axis, Y-axis and Z-axis constitute a three-dimensional orthogonal coordinate system. The directions of the X-axis, Y-axis and Z-axis orthogonal to each other in the three-dimensional space are directions parallel to the axes. The X-axis direction and the Y-axis direction are parallel to a reference plane (such as a horizontal plane) orthogonal to the up-down direction of the charged particle beam device 10. The Z-axis direction is parallel to the up-down direction (such as a vertical direction orthogonal to the horizontal plane) of the charged particle beam device 10.

[0034] The charged particle beam device 10 is a composite beam device of, for example, an electron beam and a converged ion beam. The charged particle beam device 10 includes a sample chamber 11, a stage (sample stage) 12, a stage drive mechanism 13, a detector 14, a gas supply unit 15, an electron beam column 16, a converged ion beam column 17, a replacement chamber 18, and a sample holder 19.

[0035] The sample chamber 11 maintains the interior in a reduced pressure state.

[0036] The stage 12 is disposed in a stage driving mechanism 13 inside the sample chamber 11. The stage 12 fixes the sample holder 19. The stage driving mechanism 13 is fixed inside the sample chamber 11. The stage driving mechanism 13 drives the stage 12 according to a command from a control device (not shown).

[0037] Figure 3 1 is a perspective view showing the structure of the stage 12 and the sample holder 19 of the charged particle beam device 10 in the embodiment. The stage driving mechanism 13 has, for example, a rotating mechanism 21 and a direct-acting mechanism 22. The rotating mechanism 21 rotates the stage 12 around a predetermined rotation axis. The axial direction of the predetermined rotation axis of the rotating mechanism 21 is, for example, parallel to the Z-axis direction. The direct-acting mechanism 22 slides and moves the stage 12 and the rotating mechanism 21 in a predetermined direction. The predetermined direction of the direct-acting mechanism 22 is, for example, parallel to the Y-axis direction. The direct-acting mechanism 22 has, for example, a sliding table 22a on which the rotating mechanism 21 is arranged, a direct-acting shaft portion 22b extending in a predetermined direction, and a driving portion 22c that moves the sliding table 22a along the direct-acting shaft portion 22b.

[0038] like Figure 1 As shown, the detector 14 is fixed to the sample chamber 11. The detector 14 is, for example, a secondary charged particle detector that detects secondary charged particles (secondary electrons and secondary ions) generated from the sample S by irradiation with the converged ion beam.

[0039] The gas supply unit 15 is fixed to the sample chamber 11. The gas supply unit 15 supplies etching gas and deposition gas to the sample S. The etching gas selectively promotes the etching of the sample S by the converged ion beam according to the material of the sample S. The deposition gas forms a deposited film based on a deposit of a metal or insulator on the surface of the sample S.

[0040] The electron beam column 16 is fixed to the sample chamber 11. The electron beam column 16 includes an electron source that generates an electron beam and an electron optical system that converges and deflects the electron beam generated from the electron source.

[0041] The converged ion beam column 17 is fixed to the sample chamber 11. The converged ion beam column 17 includes an ion source that generates an ion beam and an ion optical system that converges, deflects, and corrects the ion beam generated from the ion source.

[0042] like Figure 1 and Figure 2 As shown, the replacement chamber 18 is installed in the sample chamber 11 via a partition valve 30. The partition valve 30 switches the opening and closing of a through hole (not shown) that communicates the internal spaces of the sample chamber 11 and the replacement chamber 18. When the replacement chamber 18 communicates with the sample chamber 11, the interior is kept in a decompressed state.

[0043] The replacement chamber 18 has a transport member 31 and a feedthrough 32 .

[0044] The outer shape of the transport member 31 is, for example, a rod. The central axis of the transport member 31 is, for example, parallel to the X-axis direction. The first end 31a of the transport member 31 in the axial direction protrudes to the outside of the replacement chamber 18. The second end 31b of the transport member 31 in the axial direction is connected to the sample holder 19. The transport member 31 moves forward and backward in the axial direction, thereby transporting the sample holder 19 between the replacement chamber 18 and the sample chamber 11.

[0045] The feedthrough 32 is connected to a connection member 47 of the sample holder 19 described later. The feedthrough 32 transmits an electrical signal or a fluid, etc., between the inside and the outside of the replacement chamber 18. By providing the feedthrough 32 in the replacement chamber 18, the degree of freedom in the layout of various devices is increased compared to the case where a dedicated port is provided in the sample chamber 11, and the complexity of the device structure is suppressed.

[0046] (Specimen holder)

[0047] Figure 4 It is a perspective view showing the structure of the sample holder 19 in the embodiment. Figure 5 It is a cross-sectional view showing the structure of the sample holder 19 in the embodiment.

[0048] like Figure 3 to Figure 5 As shown, the sample holder 19 includes a base portion 41 , a sample mounting portion 42 , a rotation guide portion 43 , a first support portion 44 , a second support portion 45 , a cooling stage 46 , a connecting member 47 , and a fixed guide portion 48 .

[0049] The base 41 is fixed to the stage 12. The base 41 is connected to the cooling stage 46 via the first support 44. An attachment portion 41a is provided at a portion of the peripheral portion of the base 41, for example, on the replacement chamber 18 side along the X-axis direction, and the second end portion 31b of the conveying member 31 of the replacement chamber 18 is attached to the attachment portion 41a.

[0050] The sample mounting portion 42 mounts the sample S. The sample mounting portion 42 is connected to the base portion 41 via the rotation guide portion 43. The sample mounting portion 42 is thermally connected to the cooling stage 46 via the second support portion 45. The sample mounting portion 42 includes, for example, a sample fixing portion 42a and a connecting portion 42b fixed to the sample fixing portion 42a.

[0051] The sample fixing portion 42a fixes the sample S. The connecting portion 42b is connected and fixed to the rotation guide portion 43. The connecting portion 42b is supported by the second supporting portion 45. The connecting portion 42b supported by the second supporting portion 45 rotates around the rotation axis O together with the sample fixing portion 42a by the rotation driving force input from the rotation guide portion 43. The rotation axis O is, for example, the same as the central axis of the sample mounting portion 42. The axial direction of the rotation axis O is, for example, parallel to the Z-axis direction.

[0052] The rotation guide 43 is connected and fixed to the base 41 and the sample mounting part 42. The rotation guide 43 guides the synchronous rotation of the base 41 and the sample mounting part 42. For example, when the stage 12 is driven to rotate around the rotation axis O by the rotation mechanism 21 of the stage driving mechanism 13, the rotation guide 43 rotates the base 41 and the sample mounting part 42 integrally with the stage 12. The rotation guide 43 includes, for example, a base connection part 43a, a heat insulating part 43b, and a heat insulating connection part 43c.

[0053] The outer shape of the base connection portion 43a is, for example, a plate-like shape parallel to the XZ plane or a Fig. 9 and Fig.10 The first end of both ends of the base connection portion 43a in the Z-axis direction is fixed to the base portion 41. The base connection portion 43a is arranged offset from the rotation axis O in the XY plane, for example.

[0054] The heat insulating portion 43b is provided at the second end of the base connecting portion 43a in the Z-axis direction. The heat insulating portion 43b is formed of a heat insulating material such as a resin having a low thermal conductivity. The heat insulating portion 43b supports the heat insulating connecting portion 43c.

[0055] The heat insulating connecting portion 43c is a heat insulating member having a structure with low thermal conductivity such as a thin-walled tube, for example. The heat insulating connecting portion 43c is fixed to the connecting portion 42b of the sample mounting portion 42 by fastening or the like.

[0056] The first support portion 44 is, for example, a bearing, etc. The first support portion 44 is disposed on the cooling stage 46. The first support portion 44 supports the base portion 41 which is rotatably moved around the rotation axis O relative to the cooling stage 46.

[0057] The second support portion 45 is, for example, a bearing. The second support portion 45 is disposed on the cooling stage 46. The second support portion 45 supports the sample mounting portion 42 that is relatively rotatably moved about the rotation axis O with respect to the cooling stage 46. The second support portion 45 thermally connects the sample mounting portion 42 and the cooling stage 46 by contact or the like, so that heat conduction occurs between the sample mounting portion 42 and the cooling stage 46.

[0058] The cooling stage 46 includes, for example, a first end portion 46 a , a cooling portion 46 b , and a second end portion 46 c which are sequentially arranged along the Z-axis direction and integrated with each other.

[0059] The first end portion 46 a is connected to the second support portion 45 .

[0060] The cooling part 46b cools the sample S of the sample mounting part 42 via the first end part 46a and the second support part 45. The cooling part 46b is arranged to cross the rotation axis O. The central axis of the cooling part 46b is the same as the rotation axis O. The cooling part 46b is connected to the connecting part 47. The cooling part 46b has, for example, a circulation flow path 46d of a refrigerant supplied and discharged via the connecting part 47, a temperature sensor that outputs an electrical signal via the connecting part 47, and a Peltier element that is energized via the connecting part 47. The connecting part 47 has, for example, a cable 47a having a connector for electrical signals and power supply, and a pair of pipes 47b for supplying and discharging the refrigerant. The refrigerant is, for example, water or a fluorine-based liquid for cooling the heat dissipation side of the Peltier element, or nitrogen for indirectly cooling the sample S.

[0061] The second end portion 46 c is connected to the first support portion 44 and is fixed to the fixing guide portion 48 .

[0062] The fixing guide portion 48 is fixed to the cooling stage 46. The fixing guide portion 48 is connected to the base portion 41 via the first support portion 44. The fixing guide portion 48 guides the fixing of the cooling stage 46 and the connecting member 47 connected to the cooling stage 46 independently of the base portion 41. The fixing guide portion 48 includes, for example, a fixing portion 48a, a pair of connecting portions 48b, and a position restricting portion 48c.

[0063] The outer shape of the fixing portion 48a is, for example, a plate-like shape extending along the X-axis direction toward the replacement chamber 18. The fixing portion 48a protrudes toward the replacement chamber 18 side from the base portion 41 along the X-axis direction. A first end of both ends of the fixing portion 48a in the X-axis direction is fixed to a second end 46c of the cooling stage 46. A second end of both ends of the fixing portion 48a in the X-axis direction is connected to the position restricting portion 48c via a pair of connecting portions 48b.

[0064] The outer shape of the pair of connecting parts 48b is, for example, a rod-like shape extending in the Z-axis direction. When viewed from the X-axis direction, the pair of connecting parts 48b are arranged on both sides of the mounting part 41a of the base part 41 in the Y-axis direction. The pair of connecting parts 48b are arranged at a predetermined interval in the Y-axis direction so as not to interfere with the conveying member 31 mounted on the mounting part 41a.

[0065] The position limiting portion 48c has a plate-like shape extending in the Y-axis direction. The position limiting portion 48c is fixed to a pair of connecting portions 48b. The position limiting portion 48c is limited in position by a guide support portion 49, which is disposed at Figure 3The position limiting portion 48c is, for example, mounted in a groove 49a formed in the guide support portion 49 and extending in the X-axis direction, thereby fixing the position around the rotation axis O inside the sample chamber 11. In particular, when the stage 12 and the rotation mechanism 21 are slid in the Y-axis direction by the direct-acting mechanism 22, the position limiting portion 48c maintains the state in which the position around the rotation axis O is fixed.

[0066] As described above, the sample holder 19 of the embodiment has the fixing guide 48, which guides the fixing of the connecting member 47 independently of the base 41, thereby making it possible to easily change the position and posture of the sample S. When the base 41 and the sample mounting portion 42 rotate synchronously, the fixing guide 48 can also restrict the position of the connecting member 47 connected to the cooling stage 46 relative to the sample chamber 11. As a result, it is possible to suppress the occurrence of undesirable conditions such as twisting or winding of the connecting member 47, and the position and posture of the sample S can be arbitrarily set by the stage driving mechanism 13, which can improve the accuracy of the production and processing of the sample S.

[0067] It has a second support portion 45 that supports a sample carrier 42 that is driven to rotate synchronously with the base portion 41 and is connected to a cooling stage 46, thereby being able to limit the position of the cooling stage 46 relative to the sample chamber 11 and ensuring desired heat conduction between the sample carrier 42 and the cooling stage 46.

[0068] The rotation guide portion 43 connecting the base portion 41 and the sample mounting portion 42 includes a heat insulating portion 43 b and a heat insulating connecting portion 43 c , thereby preventing the cooling of the sample mounting portion 42 by the cooling stage 46 from being inhibited.

[0069] (Variation Example)

[0070] Next, modifications of the embodiment will be described.

[0071] In the above embodiment, the sample holder 19 includes the cooling stage 46 , but the present invention is not limited thereto, and a functional stage that exerts a predetermined function on the sample S may be provided instead of the cooling stage 46 .

[0072] Figure 6 It is a cross-sectional view showing the structure of a sample holder 19A in a first modified example of the embodiment. Figure 7 This is a diagram showing an example of the functional stage 51 in the first modified example of the embodiment. Figure 8 1 is a diagram showing another example of the functional stage 51 in the first modified example of the embodiment. In the following, the same reference numerals are given to the same parts as those in the above-mentioned embodiment, and the description thereof will be omitted or simplified.

[0073] The sample holder 19A according to the first modified example includes a base portion 41 , a functional stage 51 , a rotation guide portion 43A, a first support portion 44 , a connection member 47A, and a fixed guide portion 48 .

[0074] The functional stage 51 includes, for example, a sample mounting portion 61 , a functional portion (analyzing portion, testing portion, controlling portion) 62 , a connecting portion 63 , a connecting end portion 64 , and a conductive connecting portion 65 .

[0075] The sample mounting portion 61 mounts and fixes the sample S. The sample mounting portion 61 is fixed to the functional portion 62. The sample mounting portion 61 has a structure corresponding to the role of the functional portion 62.

[0076] For example Figure 7 As shown, in the case of the functional unit 62 that analyzes the electrical characteristics or defective parts of the sample S, the sample carrying unit 61 has an actuator 61a and a probe 61b. The actuator 61a brings the probe 61b into contact with the sample S, and applies a voltage to the sample S via the probe 61b. The functional unit 62 applies and measures current and voltage via the actuator 61a and the probe 61b.

[0077] For example Figure 8 As shown in the figure, in the case of the functional unit 62 for analyzing the mechanical characteristics of the sample S, the sample mounting unit 61 has an actuator 61c and a movable mechanism unit 61d. The actuator 61c performs extension, compression, torsion, shearing, etc. of the sample S by driving the movable mechanism unit 61d. The functional unit 62 supplies power and measures state quantities such as load and displacement via the actuator 61c and the movable mechanism unit 61d.

[0078] The connection portion 63 is fixed to the functional portion 62. The connection portion 63 is connected to the rotation guide portion 43A.

[0079] The rotating guide portion 43A is connected and fixed to the base portion 41 and the connecting portion 63. The rotating guide portion 43A guides the synchronous rotation of the base portion 41, the sample mounting portion 61, and the functional portion 62. For example, when the stage 12 is driven to rotate around the rotation axis O by the rotating mechanism 21 of the stage driving mechanism 13, the rotating guide portion 43A causes the base portion 41, the sample mounting portion 61, and the functional portion 62 to rotate integrally with the stage 12. The rotating guide portion 43A includes, for example, a base connecting portion 43a and an insulating connecting portion 43d. The insulating connecting portion 43d is formed of a material with high electrical insulation, such as resin or ceramic. The insulating connecting portion 43d is fixed to the connecting portion 63 of the functional stage 51 by fastening or the like.

[0080] The connection end portion 64 is connected to the first support portion 44 and fixed to the fixing guide portion 48. The connection end portion 64 is connected to the connection member 47A. The connection member 47A has, for example, a cable 47a having a connector for an electric signal and a power supply. The first support portion 44 supports the base portion 41 that is relatively rotatable about the rotation axis O with respect to the connection end portion 64. The fixing guide portion 48 guides the fixing of the connection end portion 64 and the connection member 47A connected to the connection end portion 64 independently of the base portion 41.

[0081] like Figure 6 As shown, the connection portion 63 and the connection end portion 64 are connected to the conductive connection portion 65. The conductive connection portion 65 is, for example, a connector for rotational connection. The conductive connection portion 65 connects the sample mounting portion 61 driven by the stage 12, the functional portion 62, the connection portion 63, the connection end portion 64, and the connection component 47A connected to the connection end portion 64 so as to be relatively movable in the conductive state. The conductive connection portion 65 has, for example, a first connection portion 65a fixed to the connection portion 63, and a second connection portion 65b fixed to the connection end portion 64. The first connection portion 65a and the second connection portion 65b maintain a conductive state with each other and relatively rotate and move around the rotation axis O.

[0082] In the first modified example, the fixing guide 48 is provided, which guides the fixing of the connecting member 47A independently of the base 41, and on this basis, the conductive connecting portion 65 is provided, which connects the sample carrying portion 61 driven by the stage 12 and the connecting member 47A whose position is restricted relative to the sample chamber 11 in a conductive state in a relatively movable manner, thereby making it easy to change the position and posture of the sample S. The conductive connecting portion 65 includes a first connecting portion 65a and a second connecting portion 65b that maintain a conductive state with each other and rotate relatively, thereby suppressing the occurrence of adverse conditions such as twisting or winding of the connecting member 47A. As a result, the application and measurement of the current and voltage to the sample S can be ensured, and the position and posture of the sample S can be arbitrarily set by the stage driving mechanism 13, and various sample analyses can be easily performed.

[0083] In the above embodiment, the base connection portion 43 a of the rotation guide portion 43 is offset from the rotation axis O. However, the present invention is not limited thereto, and the central axis of the base connection portion 43 a may be the same as the rotation axis O.

[0084] Fig. 9 It is a cross-sectional view showing the structure of a sample holder 19B in a second modified example of the embodiment. Fig.10 yes Fig. 9 FIG. 1 is a partial enlarged view of the region X. In the following, the same reference numerals are given to the same parts as those in the above-mentioned embodiment, and the description thereof will be omitted or simplified.

[0085] like Fig.10 As shown, in the sample holder 19B of the second modification, the rotation guide portion 43B includes a base connection portion 43a, a heat insulating portion 43b, a heat insulating connection portion 43c, and an insulating connection portion 43d which are sequentially arranged along the rotation axis O and integrated with each other.

[0086] The outer shape of the base connection portion 43 a is, for example, a rod shape extending along the rotation axis O. A first end portion of both ends of the base connection portion 43 a in the Z-axis direction is fixed to the base portion 41 .

[0087] The heat insulating portion 43b is provided at the second end of the base connecting portion 43a in the Z-axis direction. The heat insulating portion 43b is formed of a heat insulating material such as a resin having a low thermal conductivity. The heat insulating portion 43b supports the heat insulating connecting portion 43c.

[0088] The heat insulating connection part 43c is a heat insulating member having a structure with low thermal conductivity, such as a thin-walled tube, for example. The heat insulating connection part 43c is fixed to the insulating connection part 43d.

[0089] The insulating connection portion 43d is fixed to the connection portion 42b of the sample mounting portion 42. The insulating connection portion 43d is formed of a heat insulating material such as a resin having a low thermal conductivity.

[0090] like Fig. 9 As shown, the first support portion 44 of the sample holder 19B is not disposed on the cooling stage 46 but on the shaft portion 48e connected to the fixing portion 48a of the fixing guide portion 48. The first support portion 44 supports the base portion 41 which is relatively rotatable about the rotation axis O relative to the fixing guide portion 48.

[0091] The cooling stage 46 of the sample holder 19B is arranged so as to be sandwiched from both sides in the Z-axis direction by the second support portion 45 and the fixing portion 48a of the fixing guide portion 48 at a position offset from the rotation axis O when viewed in the Y-axis direction. The second end portion 46c of the cooling stage 46 is not connected to the first support portion 44 but is fixed to the fixing guide portion 48.

[0092] The fixing guide portion 48 of the second modification example includes a third support portion 48d disposed on the fixing portion 48a. The third support portion 48d is, for example, a bearing, etc. The third support portion 48d supports the base connection portion 43a that is relatively rotatable about the rotation axis O with respect to the fixing portion 48a.

[0093] In the second modification, the central axis of the rotating guide 43B is the same as the rotating axis O, so that even when the base 41 and the sample mounting portion 42 rotate 360° around the rotating axis O, the rotating guide 43B and the connecting member 47 connected to the cooling stage 46 can be prevented from interfering with each other. Thus, it is possible to suppress the occurrence of inconveniences such as twisting or winding of the connecting member 47, and the position and posture of the sample S can be arbitrarily set by the stage driving mechanism 13, so that the accuracy of the production and processing of the sample S can be improved.

[0094] The charged particle beam device 10 of the embodiment and the modified example includes a transporting member 31 that transports the sample holders 19, 19A, and 19B between the sample chamber 11 and the replacement chamber 18, thereby preventing the device structure from becoming complicated and realizing various functions for the sample S. For example, there is no need to modify the stage 12 in the sample chamber 11, and there is no need to form various ports for the sample chamber 11, and various functions for the sample S can be easily changed by replacing the sample holders 19, 19A, and 19B.

[0095] In the above embodiment, the charged particle beam device 10 is a composite beam device of an electron beam and a converged ion beam, but the present invention is not limited thereto. For example, the charged particle beam device 10 may be a converged ion beam device or an electron beam device.

[0096] The embodiments of the present invention are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the scope of the invention. These embodiments and their variations are included in the scope and spirit of the invention, and are also included in the invention described in the claims and their equivalents.

Claims

1. A charged particle beam device, characterized in that The charged particle beam device has a sample holder, The sample holder has: A base portion, which is fixed to the driving stage; a sample carrying portion for carrying the sample; a driving guide portion that guides synchronous driving of the base portion and the sample carrying portion; a functional part that acts on the sample to provide a predetermined function; A connecting component connected to the functional part; a first support portion that supports the base portion driven by the driving stage and the connecting member so as to be relatively movable; as well as a fixing guide portion connected to the base portion via the first support portion and guiding the fixing of the connecting member independently of the base portion, The charged particle beam device further comprises: A sample chamber, which is provided with the driving stage; a charged particle beam column for irradiating the sample with a charged particle beam; a replacement chamber installed in the sample chamber; an opening and closing unit that opens and closes the sample chamber and the replacement chamber; and A transport member transports the sample holder between the sample chamber and the replacement chamber.

2. The charged particle beam device according to claim 1, characterized in that The sample holder has a second support portion that supports the sample mounting portion driven by the driving stage and the functional portion so as to be relatively movable. The functional portion is connected to the sample mounting portion via the second supporting portion.

3. The charged particle beam device according to claim 1 or 2, characterized in that: The functional portion cools the sample mounting portion using a refrigerant flowing through a flow path formed inside and the connecting member.

4. The charged particle beam device according to claim 3, characterized in that The drive guide has a heat insulating structure.

5. The charged particle beam device according to claim 1, characterized in that The sample holder has a conductive connection portion that connects the functional portion fixed to the sample mounting portion driven by the driving stage and the connection member so as to be relatively movable in a conductive state.

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