Gas detection module

Abstract

A gas detection module comprises: a base, a piezoelectric actuator, a driving circuit board, a laser component, a particle sensor and an outer cover. The base is provided with a gas guide component bearing area and a laser setting area, and then a gas flow channel design is adopted. Finally, the driving circuit board is sealed on the bottom surface of the base, and the outer cover is sealed on the surface of the base, so that an air inlet groove of the base and the driving circuit board jointly define an air inlet path, and an air outlet groove of the base, the outer cover and the driving circuit board jointly define an air outlet path, so that the thickness of the gas detection module can be greatly reduced.

Description

Technical Field

[0001] This case relates to a gas detection module, and more particularly to an extremely thin gas detection module. Background Art

[0002] Suspended particulates refer to solid particles or droplets contained in gas. Due to their very fine particle size, they can easily enter the lungs through the nasal hair in the nasal cavity, causing lung inflammation, asthma or cardiovascular disease. If other pollutants are attached to suspended particulates, it will increase the harm to the respiratory system. In recent years, the problem of gas pollution has become increasingly serious, especially the concentration data of fine suspended particulates (such as PM2.5) is often too high. The monitoring of gas suspended particulate concentration has gradually received attention. However, since the gas will flow with the wind direction and wind volume, and the gas quality monitoring stations that detect suspended particulates are mostly fixed points, it is impossible to confirm the concentration of suspended particulates in the surrounding area. Therefore, a miniature and portable gas detection module is needed for users to detect the concentration of suspended particulates around them at all times and anywhere.

[0003] See also Figure 1 , which is a gas detection module shown in Taiwan Patent Application No. 107130404. The shell 11A of the existing gas detection module 1A is limited by the size of the air guide 12A and the internal gas flow channel, and it is difficult to reduce its volume. Figure 1 The arrows shown indicate the gas path. The gas needs to enter from the upper inlet and then be introduced into the lower layer. After detection, it is guided by a micro pump and finally returns to the upper outlet for discharge. The gas guide channel structure designed in this way is multi-layered, complex and thick, making it difficult to reduce the thickness of the overall gas detection module and difficult to implement in miniaturized mobile devices or other portable electronic devices. In view of this, how to reduce the thickness of the gas detection module is indeed an urgent problem that needs to be solved. Summary of the invention

[0004] The main purpose of this case is to provide a gas detection module, wherein a driving circuit board is attached to the second surface of a base, and an outer cover is attached to the first surface of the base, so that an inlet groove defines an inlet path, and an outlet groove defines an outlet path. In addition, a laser component is arranged on the driving circuit board, and the driving circuit board is directly used to cover the base, and the position of the piezoelectric actuator is separated from the position of the laser component by the structure of the base, so that the thickness of the gas detection module can be greatly reduced.

[0005] A general implementation of the present invention is a gas detection module, comprising: a base, having: a first surface; a second surface, opposite to the first surface; a laser setting area, hollowed out from the first surface toward the second surface; an air inlet groove, formed by depression from the second surface and adjacent to the laser setting area, the air inlet groove is provided with an air inlet, connected to the outside of the base, and a light-transmitting window is passed through the two side walls, connected to the laser setting area; an air guide component bearing area, formed by depression from the second surface, connected to the air inlet groove, and a vent hole is passed through the bottom surface, and the four corners of the air guide component bearing area are respectively provided with a positioning protrusion; and an air outlet groove, which is recessed from the first surface corresponding to the bottom surface of the air guide component bearing area, and is hollowed out from the first surface toward the second surface in the area of ​​the first surface that does not correspond to the air guide component bearing area, connected to the vent hole, and is provided with an air outlet, connected to the outside of the base; a piezoelectric actuator, which is accommodated in the air guide component bearing area; a driving circuit board, the cover is attached to the second surface of the base; a laser component, which is positioned and arranged on the driving circuit board and electrically connected to it, and is correspondingly accommodated in the laser setting area, and the emitted light beam passes through the light-transmitting window and forms a light inlet groove a particle sensor, which is positioned on the driving circuit board and electrically connected thereto, and is correspondingly disposed at a position in a direction orthogonal to the air inlet groove and the path of the light beam projected by the laser component, so as to detect particles passing through the air inlet groove and irradiated by the light beam projected by the laser component; and an outer cover, which covers the first surface of the base and has a side plate, wherein the side plate is respectively provided with an air inlet frame opening and an air outlet frame opening at positions corresponding to the air inlet and the air outlet of the base; wherein the base, the piezoelectric actuator, the driving circuit board, the laser component, the particle sensor and the outer cover are made of micro-materials. The base is provided with a module structure, and the module structure has a length, a width and a thickness. The outer cover is covered on the first surface of the base, and the driving circuit board is covered on the second surface, so that the air inlet groove and the driving circuit board jointly define an air inlet path, and the air outlet groove, the outer cover and the driving circuit board jointly define an air outlet path, so that the piezoelectric actuator accelerates and guides the external air into the air inlet path from the air inlet frame opening, and passes through the particle sensor to detect the particle concentration in the gas, and the gas is guided by the piezoelectric actuator, and is discharged into the air outlet path from the vent hole, and finally discharged from the air outlet frame opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] Figure 1 It is a three-dimensional schematic diagram of a gas detection module in the prior art.

[0007] Figure 2A This is a three-dimensional schematic diagram of the appearance of the gas detection module in this case.

[0008] Figure 2BThis is a three-dimensional schematic diagram of the appearance of the gas detection module in this case from another angle.

[0009] Figure 2C Shown is an exploded three-dimensional schematic diagram of the gas detection module in this case.

[0010] Figure 3A A three-dimensional schematic diagram of the base.

[0011] Figure 3B This is a three-dimensional schematic diagram of the base from another angle.

[0012] Figure 4 It is a three-dimensional schematic diagram of the base accommodating the laser component and the particle sensor.

[0013] Figure 5A It is an exploded three-dimensional schematic diagram of a piezoelectric actuator combined with a base.

[0014] Figure 5B It is a three-dimensional schematic diagram of a piezoelectric actuator combined with a base.

[0015] Fig. 6A This is an exploded perspective schematic diagram of a piezoelectric actuator.

[0016] Figure 6B This is a schematic exploded perspective view of a piezoelectric actuator from another angle.

[0017] Figure 6C Schematic diagram of a piezoelectric actuator from top view.

[0018] Fig. 7A It is a cross-sectional schematic diagram of the piezoelectric actuator combined with the air guide component bearing area.

[0019] Figure 7B and Figure 7C for Fig. 7A Schematic diagram of the piezoelectric actuator actuation.

[0020] FIG. 8A to FIG. 8C Schematic diagram of the gas path of the gas detection module.

[0021] Fig. 9 Schematic diagram of the beam path emitted by the laser assembly.

[0022] Fig. 10A Schematic diagram of the cross section of the MEMS pump.

[0023] Fig. 10B Schematic diagram of the MEMS pump.

[0024] FIG. 11A to FIG. 11C Schematic diagram of the micro-electromechanical pump actuation.

[0025] Fig.12 A schematic diagram of a particle monitoring module assembly for application in a miniaturized portable electronic device.

[0026] Fig.13 A schematic diagram of a particle monitoring module embedded in a miniaturized mobile device.

[0027] Description of Reference Numerals

[0028] 1A: Gas detection module

[0029] 11A: Housing

[0030] 12A: Air guide

[0031] 1: Base

[0032] 100: Gas detection module

[0033] 11: First surface

[0034] 12: Second Surface

[0035] 13: Laser setting area

[0036] 14: Intake groove

[0037] 14a: Air Inlet

[0038] 14b: Light-transmitting window

[0039] 15: Gas guide component bearing area

[0040] 15a: Ventilation hole

[0041] 15b: Positioning bump

[0042] 16: Vent groove

[0043] 16a: Air outlet

[0044] 16b: First interval

[0045] 16c: Second interval

[0046] 17: Light trap area

[0047] 17a: Light trapping structure

[0048] 2: Piezoelectric Actuator

[0049] 2A: Portable electronic devices

[0050] 21: Jet Hole Sheet

[0051] 210: Suspended sheet

[0052] 211: Hollow holes

[0053] 212: Gap

[0054] 22: Cavity frame

[0055] 23: Actuator

[0056] 231: Piezoelectric carrier

[0057] 2311: Piezoelectric pin

[0058] 232: Adjust the resonance plate

[0059] 233: Piezoelectric plate

[0060] 24: Insulation frame

[0061] 25: Conductive frame

[0062] 251: Conductive pin

[0063] 252: Conductive electrode

[0064] 26: Resonance Chamber

[0065] 27: Airflow Chamber

[0066] 2a: MEMS pump

[0067] 21a: First substrate

[0068] 211a: Inflow hole

[0069] 212a: First surface

[0070] 213a: Second surface

[0071] 22a: First oxide layer

[0072] 221a: Confluence Channel

[0073] 222a: Confluence chamber

[0074] 23a: Second substrate

[0075] 231a: Silicon wafer layer

[0076] 2311a: Actuating part

[0077] 2312a: Periphery

[0078] 2313a: Connection

[0079] 2314a: Fluid channel

[0080] 232a: Second oxide layer

[0081] 2321a: Vibration Chamber

[0082] 233a: Silicon layer

[0083] 2331a: Perforation

[0084] 2332a: Vibration Department

[0085] 2333a: Fixed part

[0086] 2334a: Third Surface

[0087] 2335a: The fourth surface

[0088] 24a: Piezoelectric components

[0089] 241a: Lower electrode layer

[0090] 242a: Piezoelectric layer

[0091] 243a: Insulation layer

[0092] 244a: Upper electrode layer

[0093] 3: Driver circuit board

[0094] 3A: Mobile Devices

[0095] 4: Laser components

[0096] 5: Particle sensor

[0097] 6: Outer cover

[0098] 61: Side panels

[0099] 61a: Air intake frame

[0100] 61b: Air outlet frame

[0101] 7a: First Volatile Organic Compound Sensor

[0102] 7b: Second VOC sensor

[0103] D: Light trap distance

[0104] H: Thickness

[0105] L, L1: length

[0106] W, W1: Width DETAILED DESCRIPTION

[0107] The embodiments that embody the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can have various variations in different aspects without departing from the scope of the present invention, and the descriptions and illustrations therein are essentially for illustrative purposes rather than for limiting the present invention.

[0108] See also FIG. 2A to FIG. 2CAs shown, the present case provides a gas detection module 100, comprising a base 1, a piezoelectric actuator 2, a driving circuit board 3, a laser component 4, a particle sensor 5 and an outer cover 6, and the base 1, the piezoelectric actuator 2, the driving circuit board 3, the laser component 4, the particle sensor 5 and the outer cover 6 are a module structure made of tiny materials, and the module structure has a length, a width and a thickness, wherein the length, width and thickness of the module structure are between 1 centimeter (mm) and 999 centimeters (mm), or between 1 micrometer (μm) and 999 micrometers (μm), or between 1 nanometer (nm) and 999 nanometers (nm), but are not limited thereto. In this embodiment, the module structure composed of the base 1, the piezoelectric actuator 2, the driving circuit board 3, the laser assembly 4, the particle sensor 5 and the outer cover 6 has a volume formed when its length is between 1 micron and 999 microns, its width is between 1 micron and 999 microns, and its thickness is between 1 micron and 999 microns, or the module structure has a volume formed when its length is between 1 nanometer and 999 nanometers, its width is between 1 nanometer and 999 nanometers, and its thickness is between 1 nanometer and 999 nanometers, but it is not limited thereto. Among them, the driving circuit board 3 is sealed and attached to the second surface 12 of the base 1, the laser assembly 4 is disposed on the driving circuit board 3 and is electrically connected to the driving circuit board 3, the particle sensor 5 is also disposed on the driving circuit board 3 and is electrically connected to the driving circuit board 3, and the outer cover 6 covers the base 1 and is attached and sealed on the first surface 11 of the base 1, and the outer cover 6 has a side plate 61, and the side plate 61 has an air inlet frame 61a and an air outlet frame 61b.

[0109] Please review Figure 3A and Figure 3B As shown, the base 1 has a first surface 11, a second surface 12, a laser setting area 13, an air inlet groove 14, an air guide component bearing area 15 and an air outlet groove 16. The first surface 11 and the second surface 12 are two surfaces arranged opposite to each other. The laser setting area 13 is hollowed out from the first surface 11 toward the second surface 12. The air inlet groove 14 is recessed from the second surface 12 and is adjacent to the laser setting area 13. The air inlet groove 14 is provided with an air inlet port 14a, which is connected to the outside of the base 1 and corresponds to the air inlet frame port 61a of the outer cover 6, and a light-transmitting window 14b is passed through the two side walls and is connected to the laser setting area 13; therefore, the first surface 11 of the base 1 is attached and covered by the outer cover 6, and the second surface 12 is attached and covered by the driving circuit board 3, so that the air inlet groove 14 and the driving circuit board 3 jointly define an air inlet path.

[0110] The air guide component carrying area 15 is formed by the depression of the second surface 12, and is connected to the air inlet groove 14, and a vent hole 15a is passed through the bottom surface; the air outlet groove 16 is provided with an air outlet 16a, and the air outlet 16a is arranged corresponding to the air outlet frame opening 61b of the outer cover 6, and the air outlet groove 16 includes a first interval 16b formed by the depression of the vertical projection area of ​​the first surface 11 corresponding to the air guide component carrying area 15, and an area extending from the vertical projection area of ​​the non-air guide component carrying area 15, and from the first surface 11 to the second surface 12 is hollowed out to form a second section 16c, wherein the first section 16b is connected to the second section 16c to form a step difference, and the first section 16b of the air outlet groove 16 is communicated with the vent hole 15a of the air guide component bearing area 15, and the second section 16c of the air outlet groove 16 is communicated with the air outlet 16a; therefore, when the first surface 11 of the base 1 is attached and covered by the outer cover 6 and the second surface 12 is attached and covered by the driving circuit board 3, the air outlet groove 16, the outer cover 6 and the driving circuit board 3 jointly define an air outlet path.

[0111] Figure 4 The schematic diagram of the base accommodating the laser component and the particle sensor is shown in FIG3 . The laser component 4 and the particle sensor 5 are both arranged on the driving circuit board 3 and in the base 1 . In order to clearly illustrate the positions of the laser component 4 and the particle sensor 5 in the base 1 , the driving circuit board 3 is omitted in FIG3 for clear explanation. Please review Figure 4 and Figure 2C The laser component 4 will be accommodated in the laser setting area 13 of the base 1, and the particle sensor 5 will be accommodated in the air intake groove 14 of the base 1 and aligned with the laser component 4. In addition, the laser component 4 corresponds to the light-transmitting window 14b, for the laser emitted by the laser component 4 to pass through, so that the laser is irradiated into the air intake groove 14, and the path of the light beam emitted by the laser component 4 passes through the light-transmitting window 14b and forms an orthogonal direction with the air intake groove 14.

[0112] The laser assembly 4 emits a projection light beam through the light-transmitting window 14b into the air inlet groove 14, irradiating the suspended particles contained in the gas in the air inlet groove 14. When the light beam contacts the suspended particles, it will scatter and generate a projection light spot. The particle sensor 5 receives the projection light spot generated by the scattering and calculates to obtain information related to the particle size and concentration of the suspended particles contained in the gas. The particle sensor 5 is a PM2.5 sensor.

[0113] See also Figure 5A and Figure 5BThe piezoelectric actuator 2 is accommodated in the air guide component carrying area 15 of the base 1. The air guide component carrying area 15 is a square, and a positioning protrusion 15b is respectively provided at its four corners. The piezoelectric actuator 2 is set in the air guide component carrying area 15 through the four positioning protrusions 15b. In addition, the air guide component carrying area 15 is communicated with the air inlet groove 14. When the piezoelectric actuator 2 is actuated, the piezoelectric actuator 2 draws the gas in the air inlet groove 14, allowing the gas to enter the piezoelectric actuator 2, and introduces the gas into the air outlet groove 16 through the air vent 15a of the air guide component carrying area 15.

[0114] Please review Fig. 6A and Figure 6B The piezoelectric actuator 2 includes: an air jet hole sheet 21, a cavity frame 22, an actuator 23, an insulating frame 24 and a conductive frame 25.

[0115] The jet hole sheet 21 is made of a flexible material and has a suspension sheet 210 and a hollow hole 211. The suspension sheet 210 is a sheet-like structure that can be bent and vibrated. Its shape and size roughly correspond to the inner edge of the air guide component bearing area 15, but it is not limited to this. The shape of the suspension sheet 210 can also be one of square, round, elliptical, triangular and polygonal. The hollow hole 211 runs through the center of the suspension sheet 210 to allow gas to flow. The piezoelectric actuator 2 can be set in the air guide component bearing area 15.

[0116] The cavity frame 22 is stacked on the jet hole sheet 21, and its appearance corresponds to the jet hole sheet 21. The actuator 23 is stacked on the cavity frame 22, and defines a resonance chamber 26 between the cavity frame 22 and the suspension sheet 210. The insulating frame 24 is stacked on the actuator 23, and its appearance is similar to the cavity frame 22. The conductive frame 25 is stacked on the insulating frame 24, and its appearance is similar to the insulating frame 24. The conductive frame 25 has a conductive pin 251 and a conductive electrode 252. The conductive pin 251 extends outward from the outer edge of the conductive frame 25, and the conductive electrode 252 extends inward from the inner edge of the conductive frame 25. In addition, the actuator 23 further includes a piezoelectric carrier 231, an adjustment resonance plate 232 and a piezoelectric plate 233. The piezoelectric carrier 231 is supported and stacked on the cavity frame 22, the adjustment resonance plate 232 is supported and stacked on the piezoelectric carrier 231, and the piezoelectric plate 233 is supported and stacked on the adjustment resonance plate 232. The adjustment resonance plate 232 and the piezoelectric plate 233 are accommodated in the insulating frame 24 and are electrically connected to the piezoelectric plate 233 by the conductive electrode 252 of the conductive frame 25. Among them, the piezoelectric carrier 231 and the adjustment resonance plate 232 are made of conductive materials. The piezoelectric carrier 231 has a piezoelectric pin 2311, and the piezoelectric pin 2311 is connected to the conductive pin 251. The driving circuit (not shown) on the driving circuit board 3 receives the driving signal (driving frequency and driving voltage). The driving signal is formed into a loop by the piezoelectric pin 2311, the piezoelectric carrier 231, the adjustment resonance plate 232, the piezoelectric plate 233, the conductive electrode 252, the conductive frame 25, and the conductive pin 251. The insulating frame 24 blocks the conductive frame 25 and the actuator 23 to avoid short circuit, so that the driving signal can be transmitted to the piezoelectric plate 233. After receiving the driving signal (driving frequency and driving voltage), the piezoelectric plate 233 is deformed due to the piezoelectric effect to further drive the piezoelectric carrier 231 and the adjustment resonance plate 232 to generate reciprocating bending vibrations.

[0117] As described above, the adjustment resonance plate 232 is located between the piezoelectric plate 233 and the piezoelectric carrier plate 231, and serves as a buffer between the two, and can adjust the vibration frequency of the piezoelectric carrier plate 231. Basically, the thickness of the adjustment resonance plate 232 is greater than the thickness of the piezoelectric carrier plate 231, and the thickness of the adjustment resonance plate 232 can be changed, thereby adjusting the vibration frequency of the actuator 23.

[0118] Please also see Fig. 6A , Figure 6B , Figure 6C and Fig. 7AIn order to be arranged in the air guide component bearing area 15, the overall size design of the piezoelectric actuator 2 will also affect the overall structural size design of the gas detection module 100. In order to meet the trend of lightweight and miniaturization, in a preferred embodiment, the piezoelectric actuator 2 of the larger size in this case adopts a length L1 and a width W1 of 9㎜~18㎜, preferably 12㎜~13.5㎜, the piezoelectric actuator 2 of the medium size adopts a length L1 and a width W1 of 5.5㎜~11㎜, preferably 7.5㎜~8.5㎜, and the piezoelectric actuator 2 of the small size adopts a length L1 and a width W1 of 3.5㎜~7㎜, preferably 4.5㎜~5.5㎜. The piezoelectric actuator 2 structures of the three sizes of large, medium and small embodiments are as follows: Under a specific driving signal waveform and frequency, it is beneficial to maintain a certain output power, achieve the effect of stable output power and extended service life; and, the jet hole sheet 21, the cavity frame 22, the actuator 23, the insulating frame 24 and the conductive frame 25 are stacked and positioned in the gas guide component bearing area 15 in sequence, so that the piezoelectric actuator 2 is supported and positioned in the gas guide component bearing area 15, and the bottom is fixed on the positioning protrusion 15b to support and position, so that the piezoelectric actuator 2 defines a gap 212 between the suspension sheet 210 and the inner edge of the gas guide component bearing area 15. The gap 212 surrounds the outer periphery of the piezoelectric actuator 2 for gas circulation.

[0119] Please refer to Fig. 7A An airflow chamber 27 is formed between the air jet hole sheet 21 and the bottom surface of the air guide component bearing area 15. The airflow chamber 27 is connected to the resonance chamber 26 between the actuator 23, the cavity frame 22 and the suspension sheet 210 through the hollow hole 211 of the air jet hole sheet 21. By controlling the vibration frequency of the gas in the resonance chamber 26 to make it close to the vibration frequency of the suspension sheet 210, the resonance chamber 26 and the suspension sheet 210 can generate a Helmholtz resonance effect, thereby improving the gas transmission efficiency.

[0120] Figure 7B and Figure 7C for Fig. 7A Schematic diagram of the piezoelectric actuator, please review Figure 7B As shown, when the piezoelectric plate 233 moves in a direction away from the bottom surface of the air guide component bearing area 15, it drives the suspension plate 210 of the air jet hole plate 21 to move in a direction away from the bottom surface of the air guide component bearing area 15, so that the volume of the air flow chamber 27 expands rapidly, and its internal pressure drops to form a negative pressure, attracting the gas outside the piezoelectric actuator 2 to flow in from the gap 212 and enter the resonance chamber 26 through the hollow hole 211, so that the air pressure in the resonance chamber 26 increases and a pressure gradient is generated. Figure 7CAs shown, when the piezoelectric plate 233 drives the suspension plate 210 of the jet hole plate 21 to move toward the bottom surface of the air guide component bearing area 15, the gas in the resonance chamber 26 flows out quickly through the hollow hole 211, squeezing the gas in the air flow chamber 27, and making the converged gas quickly and massively ejected in an ideal gas state close to Bernoulli's law and introduced into the vent 15a of the air guide component bearing area 15. Figure 7B and Figure 7C The action of makes the piezoelectric plate 233 vibrate reciprocatingly, and according to the principle of inertia, the internal air pressure of the resonance chamber 26 after exhaust is lower than the equilibrium air pressure, which will guide the gas to re-enter the resonance chamber 26, so that the vibration frequency of the gas in the resonance chamber 26 is controlled to be close to the vibration frequency of the piezoelectric plate 233, so as to produce the Helmholtz resonance effect and realize the high-speed and large-scale transmission of gas.

[0121] See also FIG. 8A to FIG. 8C , FIG. 8A to FIG. 8C The gas path diagram of the gas detection module is first reviewed Fig. 8A The gas enters through the air inlet frame opening 61a of the outer cover 6, enters the air inlet groove 14 of the base 1 through the air inlet opening 14a, and flows to the position of the particle sensor 5. Figure 8B As shown, the piezoelectric actuator 2 is continuously driven to absorb the gas in the air intake path, so that the external gas is quickly introduced and stably circulated, and passes through the top of the particle sensor 5. At this time, the laser component 4 emits a projection light beam through the light-transmitting window 14b into the air intake groove 14, irradiating the air intake groove 14 through the suspended particles contained in the gas above the particle sensor 5. When the light beam contacts the suspended particles, it will scatter and generate a projection light spot. The particle sensor 5 receives the projection light spot generated by the scattering and calculates to obtain relevant information on the particle size and concentration of the suspended particles contained in the gas. The gas above the particle sensor 5 is also continuously driven and transmitted by the piezoelectric actuator 2 and introduced into the vent hole 15a of the air guide component bearing area 15, and enters the first interval 16b of the air outlet groove 16. Finally, as shown in FIG. Figure 8C As shown, after the gas enters the first section 16b of the gas outlet groove 16, the piezoelectric actuator 2 will continuously deliver the gas into the first section 16b, and the gas in the first section 16b will be pushed to the second section 16c, and finally discharged outward through the gas outlet 16a and the gas outlet frame opening 61b.

[0122] like Fig. 9As shown, the base 1 further includes a light trap area 17, which is hollowed out from the first surface 11 to the second surface 12 and corresponds to the laser setting area 13, and the light trap area 17 passes through the light-transmitting window 14b so that the light beam emitted by the laser component 4 can be projected therein, and the light trap area 17 is provided with a light trap structure 17a with an oblique cone surface, and the light trap structure 17a corresponds to the path of the light beam emitted by the laser component 4; in addition, the light trap structure 17a makes the projected light beam emitted by the laser component 4 reflected into the light trap area 17 at the oblique cone surface structure to avoid the light beam being reflected to the position of the particle sensor 5, and a light trap distance D is maintained between the position of the projected light beam received by the light trap structure 17a and the light-transmitting window 14b, and this light trap distance D needs to be greater than 3mm. When the light trap distance D is less than 3mm, the projected light beam projected on the light trap structure 17a will be directly reflected back to the position of the particle sensor 5 due to excessive stray light after reflection, causing distortion of detection accuracy.

[0123] Please continue reviewing Fig. 9 and Figure 2C The gas detection module 100 of the present case can not only detect the particles in the gas, but also further detect the characteristics of the introduced gas. Therefore, the gas detection module 100 of the present case further includes a first volatile organic compound sensor 7a, which is positioned on the driving circuit board 3 and electrically connected thereto, and is accommodated in the gas outlet groove 16 to detect the gas discharged from the gas outlet path to detect the concentration of volatile organic compounds contained in the gas in the gas outlet path. Alternatively, the gas detection module 100 of the present case further includes a second volatile organic compound sensor 7b, which is positioned on the driving circuit board 3 and electrically connected thereto, and the second volatile organic compound sensor 7b is accommodated in the light trap area 17 to detect the concentration of volatile organic compounds in the gas introduced into the light trap area 17 through the gas inlet path of the gas inlet groove 14 and through the light-transmitting window 14b.

[0124] As can be seen from the above description, the gas detection module 100 of the present case has a structural design with appropriately configured laser setting area 13, air inlet groove 14, air guide component bearing area 15 and air outlet groove 16 on the base 1, and is matched with the cover sealing design of the outer cover 6 and the driving circuit board 3, so that the outer cover 6 is covered on the first surface 11 of the base 1, and the driving circuit board 3 is covered on the second surface 12, so that the air inlet groove 14 and the driving circuit board 3 jointly define an air inlet path, and the air outlet groove 16, the outer cover 6 and the driving circuit board 3 jointly define an air outlet path, forming a single-layer air guide channel path, so that the thickness of the overall structure of the gas detection module 100 of the present case is reduced, so that the length L of the gas detection module 100 is between 10mm and 35mm, the width W is between 10mm and 35mm, and the thickness H is between 1mm and 6.5mm, which is conducive to being assembled and combined with Fig.12The miniaturized portable electronic device 2A shown in the figure may be advantageously assembled and combined with a Fig.13 The miniaturized mobile device 3A shown is convenient for users to carry and detect the concentration of particles in the surrounding area.

[0125] In addition, another embodiment of the piezoelectric actuator 2 of the present invention may be a micro-electromechanical pump 2a, see Fig. 10A and Fig. 10B The micro-electromechanical pump 2a includes a first substrate 21a, a first oxide layer 22a, a second substrate 23a and a piezoelectric element 24a.

[0126] The first substrate 21a is a silicon wafer (Si wafer) with a thickness between 150 and 400 microns (μm). The first substrate 21a has a plurality of inflow holes 211a, a first surface 212a, and a second surface 213a. In this embodiment, the number of the plurality of inflow holes 211a is 4, but not limited thereto, and each inflow hole 211a penetrates from the second surface 213a to the first surface 212a. In order to improve the inflow effect, the inflow hole 211a presents a tapered shape from the second surface 213a to the first surface 212a.

[0127] The first oxide layer 22a is a silicon dioxide (SiO2) thin film with a thickness between 10 and 20 micrometers (μm). The first oxide layer 22a is stacked on the first surface 212a of the first substrate 21a. The first oxide layer 22a has a plurality of confluence channels 221a and a confluence chamber 222a. The number and position of the confluence channels 221a correspond to the inflow holes 211a of the first substrate 21a. In this embodiment, the number of the confluence channels 221a is also 4. One end of the 4 confluence channels 221a is respectively connected to the 4 inflow holes 211a of the first substrate 21a, and the other end of the 4 confluence channels 221a is connected to the confluence chamber 222a, so that the gas enters from the inflow holes 211a respectively, and then converges into the confluence chamber 222a through the corresponding confluence channels 221a.

[0128] The second substrate 23a is a silicon wafer (SOI wafer) with silicon on an insulating layer, comprising: a silicon wafer layer 231a, a second oxide layer 232a and a silicon material layer 233a; the thickness of the silicon wafer layer 231a is between 10 and 20 micrometers (μm), and has an actuating portion 2311a, a peripheral portion 2312a, a plurality of connecting portions 2313a and a plurality of fluid channels 2314a. The actuating portion 2311a is circular; the peripheral portion 2312a is hollow and annular, surrounding the periphery of the actuating portion 2311a; the plurality of connecting portions 2313a are respectively located between the actuating portion 2311a and the peripheral portion 2312a, and connect the two to provide a function of elastic support. The plurality of fluid channels 2314a are formed around the periphery of the actuating portion 2311a, and are respectively located between the plurality of connecting portions 2313a.

[0129] The second oxide layer 232a is a silicon oxide layer with a thickness between 0.5 and 2 micrometers (μm), formed on the silicon wafer layer 231a, in a hollow ring shape, and defines a vibration chamber 2321a with the silicon wafer layer 231a. The silicon material layer 233a is circular, stacked on the second oxide layer 232a and bonded to the first oxide layer 22a. The silicon material layer 233a is a silicon dioxide (SiO2) film with a thickness between 2 and 5 micrometers (μm), having a through hole 2331a, a vibrating portion 2332a, a fixed portion 2333a, a third surface 2334a and a fourth surface 2335a. The through hole 2331a is formed at the center of the silicon material layer 233a, the vibration part 2332a is located in the peripheral area of ​​the through hole 2331a and vertically corresponds to the vibration chamber 2321a, the fixed part 2333a is the peripheral area of ​​the silicon material layer 233a, and is fixed to the second oxide layer 232a by the fixed part 2333a, the third surface 2334a is bonded to the second oxide layer 232a, and the fourth surface 2335a is bonded to the first oxide layer 22a; the piezoelectric component 24a is stacked on the actuating part 2311a of the silicon wafer layer 231a.

[0130] The piezoelectric component 24a includes a lower electrode layer 241a, a piezoelectric layer 242a, an insulating layer 243a and an upper electrode layer 244a. The lower electrode layer 241a is stacked on the actuating portion 2311a of the silicon wafer layer 231a, and the piezoelectric layer 242a is stacked on the lower electrode layer 241a. The two are electrically connected through the contact area. In addition, the width of the piezoelectric layer 242a is smaller than the width of the lower electrode layer 241a, so that the piezoelectric layer 242a cannot completely cover the lower electrode layer 241a. An insulating layer 243a is stacked on a partial area of ​​242a and an area of ​​the lower electrode layer 241a that is not shielded by the piezoelectric layer 242a. Finally, an upper electrode layer 244a is stacked on the insulating layer 243a and the remaining surface of the piezoelectric layer 242a that is not shielded by the insulating layer 243a, so that the upper electrode layer 244a can be in contact with the piezoelectric layer 242a for electrical connection. At the same time, the insulating layer 243a is used to block the upper electrode layer 244a and the lower electrode layer 241a to avoid direct contact between the two to cause a short circuit.

[0131] Please refer to 11A to Fig. 11C , Figures 11A to 11C are schematic diagrams of the operation of the MEMS pump 2a. Fig.11A The lower electrode layer 241a and the upper electrode layer 244a of the piezoelectric component 24a receive the driving voltage and driving signal (not shown) transmitted by the driving circuit board 3 and transmit them to the piezoelectric layer 242a. After receiving the driving voltage and driving signal, the piezoelectric layer 242a begins to deform due to the influence of the inverse piezoelectric effect, which will drive the actuator 2311a of the silicon wafer layer 231a to start displacement. When the piezoelectric component 24a drives the actuator 2311a to move upward and increase the distance between it and the second oxide layer 232a, at this time, the volume of the vibration chamber 2321a of the second oxide layer 232a will increase, so that a negative pressure is formed in the vibration chamber 2321a, and the gas in the confluence chamber 222a of the first oxide layer 22a is sucked into it through the through hole 2331a. Please continue to refer to Fig. 11B When the actuating portion 2311a is pulled upward by the piezoelectric component 24a, the vibrating portion 2332a of the silicon material layer 233a will move upward due to the resonance principle. When the vibrating portion 2332a moves upward, it will compress the space of the vibration chamber 2321a and push the gas in the vibration chamber 2321a to move toward the fluid channel 2314a of the silicon wafer layer 231a, so that the gas can be discharged upward through the fluid channel 2314a. While the vibrating portion 2332a moves upward to compress the vibration chamber 2321a, the volume of the confluence chamber 222a is increased due to the displacement of the vibrating portion 2332a, and a negative pressure is formed inside the confluence chamber 222a, which absorbs the gas outside the micro-electromechanical pump 2a into it through the inflow hole 211a. Finally, as shown in FIG. Fig. 11CAs shown, when the piezoelectric component 24a drives the actuator 2311a of the silicon wafer layer 231a to move downward, the gas in the vibration chamber 2321a is pushed toward the fluid channel 2314a and the gas is discharged, and the vibration part 2332a of the silicon material layer 233a is also driven by the actuator 2311a to move downward, and the gas in the convergence chamber 222a is synchronously compressed to move toward the vibration chamber 2321a through the through hole 2331a. Subsequently, when the piezoelectric component 24a drives the actuator 2311a to move upward, the volume of the vibration chamber 2321a will be greatly increased, and then there will be a higher suction force to suck the gas into the vibration chamber 2321a, and the above actions are repeated, so that the piezoelectric component 24a continuously drives the actuator 2311a to move up and down to make the vibration part 2332a move up and down in conjunction, and by changing the internal pressure of the micro-electromechanical pump 2a, it continuously absorbs and discharges gas, thereby completing the action of the micro-electromechanical pump 2a.

[0132] Of course, in order to be embedded in the mobile device 3A, the piezoelectric actuator 2 of the present invention can be replaced by the structure of a micro-electromechanical pump 2a, so that the overall size of the gas detection module 100 of the present invention is further reduced, so that the length L and width W of the gas detection module 100 are reduced to between 2mm and 4mm, and the thickness H is between 1mm and 3.5mm. It is implemented in the current thin 5mm thick smartphone and other mobile devices 3A, and the gas detection module 100 is directly embedded in the smartphone, so that the user can detect the surrounding air quality in real time.

[0133] In summary, in the gas detection module provided in the present case, the laser component is directly arranged on the driving circuit board, and the driving circuit board is attached to the second surface of the base, and the first surface of the base is attached to the outer cover, so that the air inlet groove and the driving circuit board jointly define an air inlet path, and the air outlet groove, the outer cover and the driving circuit board jointly define an air outlet path, which can greatly reduce the thickness of the gas detection module. In addition, the piezoelectric actuator and the laser component are separated and arranged, and the gas channel design is used to avoid the piezoelectric actuator from interfering with the operation of the laser component and the particle sensor during operation, and the volume of the gas detection module can be reduced, and its length can be reduced. The length L can be reduced to between 10mm and 35mm, the width can be reduced to between 10mm and 35mm, and the thickness can be reduced to between 1mm and 6.5mm, or a micro-electromechanical pump can be used to replace the piezoelectric actuator to further reduce the length L and the width W to between 2mm and 4mm, and the thickness H to between 1mm and 3.5mm, so that the gas detection module of this case can be easy to carry, and the light trap structure in the light trap area can be reused to reduce the probability of scattered light generated by the laser component after the light beam of the particle sensor contacts the base itself and re-enter the particle sensor, which can improve the detection efficiency of the particle sensor and is extremely industrially applicable and progressive.

Claims

1. A gas detection module, comprising: A base having: a first surface; a second surface, opposite to the first surface; A laser setting area is formed by hollowing out from the first surface toward the second surface; An air inlet groove is formed by being recessed from the second surface and is adjacent to the laser setting area. The air inlet groove is provided with an air inlet port connected to the outside of the base, and a light-transmitting window is passed through the two side walls and is connected to the laser setting area; An air guide component bearing area is formed by being recessed from the second surface and connected to the air inlet groove, and has an air vent through the bottom surface, and each of the four corners of the air guide component bearing area has a positioning protrusion; as well as An air outlet groove is recessed from the first surface corresponding to the bottom surface of the air guide component bearing area, and is hollowed out from the first surface toward the second surface in the area of ​​the first surface not corresponding to the air guide component bearing area, and is connected to the vent hole, and is provided with an air outlet, which is connected to the outside of the base; a piezoelectric actuator, the piezoelectric actuator is arranged on the air guide component bearing area through four positioning bumps; a driving circuit board, the cover is attached to the second surface of the base; A laser assembly is positioned on the driving circuit board and electrically connected thereto, and is correspondingly accommodated in the laser setting area, and a light beam path emitted by the laser assembly passes through the light-transmitting window and forms an orthogonal direction with the air inlet groove; a particle sensor, positioned on the driving circuit board and electrically connected thereto, and correspondingly disposed at a position in a direction orthogonal to the air inlet groove and the path of the light beam projected by the laser assembly, so as to detect particles passing through the air inlet groove and irradiated by the light beam projected by the laser assembly; as well as An outer cover, covering the first surface of the base, and having a side plate, the side plate is respectively provided with an air inlet frame opening and an air outlet frame opening at positions corresponding to the air inlet and the air outlet of the base; The base, the piezoelectric actuator, the driving circuit board, the laser assembly, the particle sensor and the outer cover are a module structure made of micro materials, and the module structure has a length, a width and a thickness. The outer cover is covered on the first surface of the base, and the driving circuit board is covered on the second surface, so that the air inlet groove and the driving circuit board jointly define an air inlet path, and the air outlet groove, the outer cover and the driving circuit board jointly define an air outlet path, so that the piezoelectric actuator accelerates the external air to enter the air inlet path from the air inlet frame opening, and passes through the particle sensor to detect the particle concentration in the gas, and the gas is guided by the piezoelectric actuator, and is discharged into the air outlet path from the vent hole, and finally discharged from the air outlet frame opening. The base also includes a light trap area, which is hollowed out from the first surface toward the second surface and corresponds to the laser setting area. The light trap area is provided with a light trap structure with an oblique cone surface, which is arranged corresponding to the light beam path. The position of the projected light source received by the light trap structure maintains a light trap distance with the light-transmitting window, and the light trap distance is greater than 3mm.

2. The gas detection module according to claim 1, characterized in that: The module structure has a volume formed when the length is between 1 micrometer and 999 micrometers, the width is between 1 micrometer and 999 micrometers, and the thickness is between 1 micrometer and 999 micrometers.

3. The gas detection module according to claim 1, characterized in that: The module structure has a volume formed when the length is between 1 nanometer and 999 nanometers, the width is between 1 nanometer and 999 nanometers, and the thickness is between 1 nanometer and 999 nanometers.

4. The gas detection module according to claim 1, characterized in that: The particle sensor is a PM2.5 sensor.

5. The gas detection module according to claim 1, characterized in that: The piezoelectric actuator comprises: A jet hole sheet, comprising a suspension sheet and a hollow hole, the suspension sheet can bend and vibrate, and the hollow hole is formed at the center of the suspension sheet; A cavity frame, supported and stacked on the suspension sheet; An actuator is supported and stacked on the cavity frame to receive voltage and generate reciprocating bending vibration; An insulating frame, supported and stacked on the actuating body; as well as A conductive frame, supported and stacked on the insulating frame; The jet hole sheet is fixedly arranged on the positioning protrusion support and positioning in the air guide component bearing area, so that a gap is defined between the jet hole sheet and the inner edge of the air guide component bearing area for gas circulation, and an airflow chamber is formed between the jet hole sheet and the bottom of the air guide component bearing area, and a resonance chamber is formed between the actuator, the cavity frame and the suspension sheet. By driving the actuator to drive the jet hole sheet to resonate, the suspension sheet of the jet hole sheet produces reciprocating vibration displacement to attract gas to pass through the gap into the airflow chamber and then discharge it, thereby realizing the transmission flow of gas.

6. The gas detection module according to claim 5, characterized in that: The actuator comprises: A piezoelectric carrier plate is supported and stacked on the cavity frame; an adjustment resonance plate, supported and stacked on the piezoelectric carrier; and A piezoelectric plate is supported and stacked on the adjustment resonance plate to receive voltage to drive the piezoelectric carrier plate and the adjustment resonance plate to generate reciprocating bending vibration.

7. The gas detection module according to claim 1, characterized in that: The length and width of the piezoelectric actuator are between 9 mm and 18 mm.

8. The gas detection module according to claim 7, characterized in that: The length and width of the piezoelectric actuator are between 12 mm and 13.5 mm.

9. The gas detection module according to claim 1, characterized in that: The length and width of the piezoelectric actuator are between 5.5 mm and 11 mm.

10. The gas detection module according to claim 9, characterized in that: The length and width of the piezoelectric actuator are between 7.5 mm and 8.5 mm.

11. The gas detection module according to claim 1, characterized in that: The length and width of the piezoelectric actuator are between 3.5 mm and 7 mm.

12. The gas detection module according to claim 11, characterized in that: The length and width of the piezoelectric actuator are between 4.5 mm and 5.5 mm.

13. The gas detection module according to claim 1, characterized in that: It further comprises a first volatile organic compound sensor, which is positioned and electrically connected to the driving circuit board and accommodated in the gas outlet groove to detect the gas derived from the gas outlet path.

14. The gas detection module according to claim 1, characterized in that: The invention further comprises a second volatile organic compound sensor, which is positioned and electrically connected to the driving circuit board and accommodated in the light trap area to detect the gas introduced into the light trap area through the air intake path of the air intake groove and the light transmission window.

15. The gas detection module according to claim 1, 13 or 14, characterized in that: The gas detection module has a length between 10 mm and 35 mm, a width between 10 mm and 35 mm, and a thickness between 1 mm and 6.5 mm.

16. The gas detection module according to claim 1, characterized in that: The piezoelectric actuator is a micro-electromechanical pump, comprising: A first substrate having a plurality of inflow holes, wherein the plurality of inflow holes are tapered; A first oxide layer is stacked with the first substrate, the first oxide layer has a plurality of confluence channels and a confluence chamber, the plurality of confluence channels are connected between the confluence chamber and the plurality of inflow holes; A second substrate, bonded to the first substrate, comprising: A silicon wafer layer having: A moving part, circular in shape; An outer peripheral portion, in a hollow ring shape, surrounding the outer periphery of the actuating portion; A plurality of connecting parts, respectively connected between the actuating part and the peripheral part; and A plurality of fluid channels surround the periphery of the actuating portion and are respectively located between the plurality of connecting portions; a second oxide layer, formed on the silicon wafer layer, in a hollow ring shape, and defining a vibration chamber with the silicon wafer layer; and A silicon material layer, in a circular shape, located on the second oxide layer and bonded to the first oxide layer, having: A through hole formed in the center of the silicon material layer; a vibrating portion located in a peripheral area of ​​the through hole; and a fixing portion located at a peripheral region of the silicon material layer; and A piezoelectric component is circular and stacked on the actuating portion of the silicon wafer layer.

17. The gas detection module according to claim 16, characterized in that: The piezoelectric component comprises: The lower electrode layer; a piezoelectric layer stacked on the lower electrode layer; an insulating layer, laid on a portion of the surface of the piezoelectric layer and a portion of the surface of the lower electrode layer; as well as An upper electrode layer is stacked on the insulating layer and the remaining surface of the piezoelectric layer not provided with the insulating layer, and is used for electrically connecting with the piezoelectric layer.

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