Flatness measurement fixture and evaporation system

Abstract

The present disclosure provides a flatness measurement fixture and an evaporation system. The flatness measurement fixture includes: a base; a workbench, which includes at least one first hole extending in the thickness direction of the workbench and penetrating the workbench, and at least one second hole extending in a direction perpendicular to the thickness direction and corresponding to the at least one first hole; at least one support column, the at least one support column is arranged on the base and used to support the workbench; at least one sensor, each of the at least one sensor is arranged in one of the at least one first holes and used to measure the flatness of the surface of the object to be measured; and at least one display, each of the at least one display is connected to one of the at least one sensor through a signal line to display the measurement value of the sensor.

Description

Technical Field

[0001] The present disclosure relates to the technical field of organic light emitting diode (OLED) displays, and in particular, to a flatness measurement fixture and an evaporation system. Background Art

[0002] In the manufacturing process of products such as OLED panels and OLED display devices, various material layers including organic light-emitting layers are generally deposited on substrates using an evaporation process. Therefore, the surface flatness of the components of the equipment used to form these material layers has a direct impact on the yield of the formed products and the utilization rate of the equipment. It is crucial to quickly and accurately measure the current flatness of the components of the equipment in a very short time to adjust the components of the equipment to have the desired flatness. Summary of the invention

[0003] A first aspect of the present disclosure provides a flatness measurement tool, comprising:

[0004] Base;

[0005] A workbench comprising at least one first hole extending in a thickness direction of the workbench and penetrating the workbench, and at least one second hole extending in a direction perpendicular to the thickness direction and corresponding one-to-one with the at least one first hole;

[0006] at least one supporting column, the at least one supporting column being disposed on the base and used for supporting the workbench;

[0007] at least one sensor, each of the at least one sensor being disposed in one of the at least one first hole and configured to measure the flatness of a surface of an object to be measured; and

[0008] At least one display, each of the at least one display is connected to one of the at least one sensor through a signal line to display a measurement value of the sensor.

[0009] In one embodiment, each of the at least one sensor is used to measure a maximum height and a minimum height of the surface of the object to be measured, and the flatness of the surface of the object to be measured is equal to a difference between the maximum height and the minimum height.

[0010] In one embodiment, the flatness measurement fixture further includes at least one first fastener corresponding to the at least one support column, and the at least one first fastener is used to adjust the height of the workbench relative to the base and fix the workbench on the at least one support column.

[0011] In one embodiment, the flatness measuring jig further includes a first level located on the base and a second level located on the workbench, wherein the first level and the second level are used to detect the horizontality of the base and the horizontality of the workbench, respectively.

[0012] In one embodiment, the flatness measurement jig further includes at least one second fastener corresponding one-to-one to the at least one second hole, each of the at least one second hole is connected to the corresponding first hole, and the at least one second fastener is respectively arranged in the corresponding second hole for fixing the sensor located in the corresponding first hole.

[0013] In one embodiment, the base includes a main body and two protrusions, the main body is substantially rectangular, and the two protrusions are located on the same side of the main body at a distance from each other.

[0014] In one embodiment, the gap between the two protrusions is U-shaped.

[0015] In one embodiment, in the direction in which the two protrusions protrude from the main body, the size of the gap is larger than the size of the object to be measured.

[0016] In one embodiment, the at least one supporting column comprises two supporting columns, the two supporting columns are respectively arranged on ends of the two protrusions away from the main body, and the at least one display is located on the main body.

[0017] In one embodiment, each of the two supporting columns includes a wiring groove, each of the two protrusions includes a wiring groove, and the wiring groove of each of the two supporting columns and the wiring groove of the corresponding protrusion are connected to each other to accommodate the signal line.

[0018] In one embodiment, each of the at least one sensor comprises a contact digital sensor or a digital dial indicator.

[0019] In one embodiment, each of the at least one first fastener comprises a screw or a clamp.

[0020] In one embodiment, each of the at least one second fastener comprises a screw.

[0021] In one embodiment, the workbench is in the shape of a rounded rectangle.

[0022] In one embodiment, each of the at least one support column is detachably separable from any one of the base and the workbench.

[0023] A second aspect of the present disclosure provides an evaporation system, comprising:

[0024] Mask plate stage;

[0025] A mask plate frame located on the mask plate platform, the mask plate frame being used for mounting a mask plate;

[0026] A plurality of claws located on the mask frame, the plurality of claws are used to carry the substrate to be coated, and each of the plurality of claws can move in a plane parallel to the plane where the mask frame is located to align the substrate with the mask;

[0027] a cooling plate located on the plurality of claws, the cooling plate being used to cool the substrate; and

[0028] The flatness measurement jig according to any one of the various embodiments of the first aspect of the present disclosure.

[0029] In one embodiment, the at least one first hole comprises three first holes located on the same straight line, the at least one sensor comprises two sensors, and the at least one display comprises two displays; and

[0030] One of the two sensors is installed in the middle first hole among the three first holes with its probe away from the base to measure the flatness of the surface of the cooling plate close to the multiple claws, and outputs the measurement value to at least one of the two displays; or, the two sensors are installed in two first holes located at both ends of the three first holes with their probes close to the base respectively to measure the flatness of the surface of each of the multiple claws close to the cooling plate, and output the measurement values ​​to the two displays respectively.

[0031] In one embodiment, the distance between the two first holes at both ends is less than or equal to the dimension of each of the plurality of claws in the direction of the line connecting the two first holes at both ends.

[0032] The above technical solutions and their advantages will become more easily understood according to the following detailed description of exemplary embodiments in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 is a schematic perspective view of the structure of a flatness measurement jig according to an embodiment of the present disclosure;

[0034] Figure 2 is a schematic front view of the structure of a flatness measurement jig according to an embodiment of the present disclosure;

[0035] Figure 3is a schematic top view of the structure of a flatness measurement jig according to an embodiment of the present disclosure;

[0036] Figure 4 is a schematic perspective view of a structure of a part of components of an evaporation system according to an embodiment of the present disclosure;

[0037] Figure 5 For the use according to the embodiment of the present disclosure Figures 1 to 3 The flatness measurement fixture shown in the figure is used to measure Figure 4 A schematic diagram of the flatness of a cooling plate of an evaporation system shown; and

[0038] Figure 6 For the use according to the embodiment of the present disclosure Figures 1 to 3 The flatness measurement fixture shown in the figure is used to measure Figure 4 A schematic diagram of the flatness of a claw of the evaporation system is shown, where Figure 6 The left part is the front view, and Figure 6 The right part is a side view. DETAILED DESCRIPTION

[0039] In order to enable those skilled in the art to better understand the technical solution of the present invention, the flatness measurement fixture (which may also be called a flatness measurement instrument, a flatness measurement device, etc.) and the evaporation system of the present invention are further described in detail below in conjunction with the accompanying drawings and exemplary embodiments.

[0040] The inventors of the disclosed concept have found that in the production process of products such as OLED panels and OLED display devices, the flatness of the cooling plate and claws located in the evaporation chamber has a direct impact on the yield of the formed products and the utilization rate of the production equipment. Therefore, it is necessary to adjust the cooling plate and each claw so that they have the desired flatness. The inventors of the disclosed concept have also found that the current method for measuring the flatness of the cooling plate or each claw is to directly measure the flatness of the cooling plate or each claw with a micrometer. The shortcomings of this measurement method include the following aspects. When measuring, the micrometer needs to be fixed on a bracket, and the dial of the micrometer fixed on the bracket is easy to loosen and cause measurement errors. When measuring flatness with a micrometer, the setting operation of the origin is complicated. When measuring the flatness of each claw with a micrometer, it is necessary to measure two points of each claw, and the micrometer has only one probe and can only measure one point at a time, so it takes a long time. The micrometer is a dial type, and the measurement value is read by human eye observation, so the reading error range of the measurement value may be large. Therefore, in a case where an OLED panel production line includes dozens of evaporation chambers, each evaporation chamber has a cooling plate and dozens of claws, and two points of each claw and dozens of points of each cooling plate need to be measured, the existing flatness measurement method is time-consuming, has low accuracy, is complicated to operate, and cannot accurately and timely obtain flatness measurement results, which will cause defective products and reduce the utilization rate of production equipment.

[0041] At least to overcome the above-mentioned shortcomings, some embodiments of the present disclosure provide a flatness measurement jig and an evaporation system including the flatness measurement jig. The flatness measurement jig can quickly and accurately measure the flatness of an object to be measured (including but not limited to a cooling plate and a claw), thereby providing a basis for timely adjusting the position and orientation of the object to be measured.

[0042] Some embodiments of the present disclosure provide a flatness measurement tool, such as Figures 1 to 3 The flatness measuring jig includes: a base 10; a workbench 30, which includes a plurality of flatness measuring jigs in a thickness direction (for example, Figure 1 At least one first hole 31 (in the vertical direction) extending in the vertical direction of the workbench 30 and penetrating the workbench 30 Figure 1 , and in a direction perpendicular to the thickness direction (eg, Figure 1 At least one second hole 32 (in the horizontal direction) extending in the horizontal direction of the at least one first hole 31 and corresponding to the at least one first hole 31 Figure 1 Three second holes 32 are shown); at least one support column 20 ( Figure 1Two support columns 20 are shown in the figure), wherein at least one support column 20 is arranged on the base 10 and is used to support the workbench 30; at least one sensor 50 ( Figure 1 A sensor 50 is shown in FIG. Figure 6 , two sensors 50 are shown in the figure), each of the at least one sensor 50 is disposed in one of the at least one first hole 31 and is used to measure the flatness of the surface of the object to be measured (for example, the cooling plate 84 and each claw 82 to be described below, but the present disclosure is not limited thereto); and at least one display DP ( Figure 1 Two displays DP are shown in FIG. 1 ), each of the at least one display DP is connected to the display via a signal line 70 (eg, see Figure 2 ) is connected to one of the at least one sensor 50 to display the measurement value of the sensor 50. For example, the materials of the base 10, the at least one support column 20 and the workbench 30 may include metals such as carbon steel and stainless steel to have sufficient mechanical properties. For example, the workbench 30 is Figure 3 ) may have a rectangular or roughly rounded rectangular shape, but the present disclosure is not limited thereto. For example, each support post 20 may be a cylinder or a prism. For example, the size of each of the base 10, each support post 20, and the workbench 30 of the flatness measurement jig may be designed according to the size of the use environment of the flatness measurement jig (e.g., an evaporation chamber or a vacuum evaporation chamber). For example, each of the at least one sensor 50 may be a contact digital sensor, a high-precision contact digital sensor, a digital micrometer, etc., and may include a processing circuit portion and a probe coupled to each other (when measuring, the probe contacts or approaches the surface of the object to be measured). For example, each of the at least one display DP may be a known display, such as a cathode ray tube (CRT) display device, a liquid crystal display (LCD) device, or an organic light emitting diode (OLED) display device.

[0043] In one embodiment, each of the at least one sensor DP can be used to measure the maximum height and the minimum height of the surface of the object to be measured (for example, relative to a certain reference plane), and the flatness of the surface of the object to be measured is equal to the difference between the maximum height and the minimum height. For example, during measurement, the probe of the sensor DP can be moved on the surface of the object to be measured to measure a sufficient number of height values ​​of the potential of the surface (i.e., measurement values), thereby obtaining the maximum height and the minimum height.

[0044] In one embodiment, the flatness measurement jig may further include at least one first fastener 31 corresponding to the at least one support column 20, and the at least one first fastener 31 is used to adjust the height of the workbench 30 relative to the base 10 and fix the workbench 30 on the at least one support column 20. For example, the workbench 30 may have a through hole (not shown in the figure) for each support column 20 to pass through, so that the workbench 30 can move along the at least one support column 20 toward or away from the base 10. When the workbench 30 is moved to a suitable distance from the base 10, the at least one first fastener 31 can be installed in the hole in the workbench 30 that intersects with the at least one support column 20 to fix the workbench 30 at the current position of the at least one support column 20.

[0045] In one embodiment, the level measuring fixture may further include a first level G1 located on the base 10 and a second level G2 located on the workbench 30, wherein the first level G1 and the second level G2 are used to detect the horizontality of the base 10 and the horizontality of the workbench 30, respectively, so as to adjust the position and orientation of the base 10 and / or the workbench 30.

[0046] In one embodiment, the flatness measurement jig may further include at least one second fastener 60 corresponding to the at least one second hole 32 (for example, see Figure 2 ), each of the at least one second hole 32 is connected to the corresponding first hole 31, and the at least one second fastener 60 is respectively arranged in the corresponding second hole 32 for fixing the sensor 50 located in the corresponding first hole 31.

[0047] In one embodiment, the base 10 may include a main body 11 and two protrusions 12, wherein the main body 11 is substantially rectangular, and the two protrusions 12 are spaced apart from each other and are located on the same side of the main body 11. For example, the main body 11 and the two protrusions 12 may include the same material and be formed integrally, which may improve the mechanical properties and stability of the base 10.

[0048] In one embodiment, the gap between the two protrusions 12 is U-shaped. In this way, the width of the end of each protrusion 12 close to the main body 11 (for example, the dimension in the direction of the line connecting the two protrusions 12) is greater than the width of the end of the protrusion 12 away from the main body 11, thereby improving the reliability of the connection between the protrusion 12 and the main body 11.

[0049] In one embodiment, in the direction in which the two protrusions 12 protrude from the main body 11, the size of the gap is greater than the size of the object to be measured. In this way, when the distance between the workbench 30 and the base 10 is too small to pass the object to be measured between the workbench 30 and the base 10 to measure multiple points on the entire surface of the object to be measured, the object to be measured can move in the gap to complete the desired measurement. Alternatively, when the size of the use environment of the flatness measurement jig (for example, an evaporation chamber or a vacuum evaporation chamber) allows the object to be measured to pass between the workbench 30 and the base 10 to measure multiple points on the entire surface of the object to be measured, the size of the gap can be less than or equal to the size of the object to be measured.

[0050] In one embodiment, the at least one supporting column 20 includes two supporting columns 20 , the two supporting columns 20 are respectively disposed on ends of the two protrusions 12 away from the main body 11 , and the at least one display DP may be located on the main body 11 .

[0051] In one embodiment, each of the two support columns 20 includes a line groove 21, each of the two protrusions 12 includes a line groove 13, and the line groove 21 of each of the two support columns 20 and the line groove 13 of the corresponding protrusion 12 (i.e., the protrusion 12 connected to the support column 20) are connected to each other to accommodate the signal line 70. For example, the line groove 21 of each support column 20 and the line groove 13 of the corresponding protrusion 12 (i.e., the protrusion 12 connected to the support column 20) can both have a straight line shape and can be located in the same plane, such as Figure 1 In this way, the length of the signal line 70 can be reduced.

[0052] In one embodiment, as described above, each of the at least one sensor 50 may include a known contact digital sensor or a digital dial indicator.

[0053] In one embodiment, each of the at least one first fastener 40 may include a screw or a clamp. The material of the screw or the clamp may be metal. Each of the at least one first fastener 40 may be referred to as a height adjustment fastener (e.g., a height adjustment screw).

[0054] In one embodiment, each of the at least one second fastener 60 may include a screw. The material of the screw may be metal. Each of the at least one second fastener 60 may be referred to as a probe fastening screw.

[0055] In one embodiment, as described above, the workbench 30 may be in a rounded rectangular shape. Compared with an ideal rectangular shape, the workbench 30 in a rounded rectangular shape can be more flexibly moved in a smaller use environment for measurement.

[0056] In one embodiment, each support column 20 is detachably separated from any one of the base 10 and the workbench 30. In this way, the at least one support column 20, the base 10, etc. of the flatness measurement jig can be replaced with a support column and a base of appropriate size according to the size of the use environment. Therefore, while ensuring the stability of the flatness measurement jig, the difficulty of installation and maintenance of the flatness measurement jig is reduced.

[0057] The flatness measuring jig provided by any of the aforementioned embodiments of the present disclosure can at least achieve the following beneficial technical effects. The level of the flatness measuring jig can ensure the overall levelness of the flatness measuring jig. When the sensor is installed in the first hole with the probe facing upward (i.e., away from the base), the flatness measuring jig can measure the flatness of the object to be measured (e.g., a cooling plate) located above it, and when the sensor is installed in the first hole with the probe facing downward (i.e., close to the base), the flatness measuring jig can measure the flatness of another object to be measured (e.g., a claw) located below it. The various components of the flatness measuring jig can be detachably separated, making the installation and maintenance of the flatness measuring jig easy. The workbench can move up and down relative to the base along the support column, so that the flatness measuring jig can measure the objects to be measured at different positions. In addition, the display of the flatness measuring jig can quickly and accurately display the measured value, ensuring the accuracy of the measurement result and avoiding the error of the human eye reading the meter.

[0058] On the other hand, some embodiments of the present disclosure provide a vapor deposition system, such as Figures 1 to 4As shown. The evaporation system may include the following components located in the evaporation chamber (or vacuum evaporation chamber, not shown in the figure): a mask stage 80, which is used to support the following components located thereon; a mask frame 81 located on the mask stage 80, the mask frame 81 is used to install the mask (for example, the mask frame 81 can have a hollow structure, and the mask can be located in the central control part of the mask frame 81); a plurality of claws 82 located on the mask frame, the plurality of claws 82 are used to carry the substrate 83 to be coated, and each of the plurality of claws 82 can move in a plane parallel to the plane where the mask frame 81 is located to align the substrate 83 with the mask; and a cooling plate 84 located on the plurality of claws 82 and the substrate 83, the cooling plate 84 is used to cool the substrate 83 to prevent the components on the substrate 83 from being defective due to high temperature. In addition, the evaporation system also includes the following Figures 1 to 3 In one embodiment, the periphery of the cooling plate may include a plurality of through holes arranged at intervals, and the evaporation system may further include a plurality of CCD cameras located in the evaporation chamber, located on the side of the cooling plate 84 away from the mask frame 81, and respectively located above each through hole of the cooling plate 84, and the plurality of CCD cameras may monitor the alignment degree of the substrate 83 and the mask in real time. The plurality of CCD cameras may include a high-resolution CCD camera located above each corner of the cooling plate 84 and a low-resolution CCD camera located above the middle of each side edge of the cooling plate 84.

[0059] In one embodiment, as an example application scenario of the flatness measurement jig provided by the present disclosure, the at least one first hole 31 includes three first holes 31 located on the same straight line or on the same non-closed curve, the at least one sensor 50 may include two sensors 50, and the at least one display DP may include two displays DP; and one of the two sensors 50 is installed in the middle first hole 31 of the three first holes 31 in a manner that its probe is away from the base 10 to measure the flatness of the surface of the cooling plate 84 close to the plurality of claws 82, and outputs the measured value to at least one of the two displays DP ( Figure 510. The sensor 50 is shown as outputting the measured value to the two displays DP); or, the two sensors 50 are respectively installed in two first holes 31 at both ends of the three first holes 31 in such a way that their probes are close to the base 10 to measure the flatness of the surface of each of the plurality of claws 82 close to the cooling plate 84, and the measured values ​​are respectively output to the two displays DP. For example, the steps for each sensor 50 to perform the measurement can be as follows. First, the flatness measurement jig is installed, the workbench 30 is adjusted to a suitable height, and the workbench 30 and the base 10 are all adjusted to a horizontal orientation. Secondly, the sensor 50 is installed in a suitable first hole 31, and any point on the surface of the object to be measured (in this example, the cooling plate 84 or any claw 82) is measured as a base point to check whether the measured value is 0 (zero). If it is not 0, the position of the probe of the sensor 50 is adjusted until the measured value is 0, and the display of the display DP connected to the sensor 50 is set to zero through the corresponding button on the display DP, which is the zero point position. Afterwards, other points on the surface of the object to be measured are measured, and the measured values ​​are read on the corresponding display DP. The measured values ​​may be (the units of each measured value are millimeters (mm)): -0.03, -0.02, -0.01, 0, 0.01, 0.02, 0.03, etc., wherein a negative measured value indicates a point that is lower (concave) than the base point (zero point), a positive measured value indicates a point that is higher (convex) than the base point (zero point), and a measured value of 0 indicates a point that has the same height as the base point (zero point). Next, the maximum height (i.e., the maximum measured value) and the minimum height (i.e., the minimum measured value) are taken from all the measured values ​​of the same surface of the object to be measured. Finally, the difference between the maximum height and the minimum height is calculated as the flatness of the surface of the object to be measured. In this case, the smaller the value of the flatness, the flatter the surface. For example, in Figure 5 In the usage scenario shown, the measured surface of the cooling plate 84 generally has a plurality of protruding heat dissipation fins, so only one sensor 50 is used for measurement. However, the present disclosure is not limited thereto. For example, when the measured surface of the cooling plate 84 is close to a plane, a plurality of sensors 50 may be used for measurement. Figure 6 In the usage scenario shown, the measured surface of each claw 82 is close to a plane, so two sensors 50 can be used for measurement to improve the efficiency of measurement. However, the present disclosure is not limited to this. For example, the flatness of the surface of each claw 82 can be estimated in advance and more or fewer sensors 50 can be used for measurement.

[0060] It should be understood that the production field of OLED display panels is only an example application scenario of the flatness measurement fixture provided by the present disclosure, and the flatness measurement fixture provided by the present disclosure can be applied to any field that needs to measure the flatness of the surface of the object to be measured.

[0061] In one embodiment, the distance between the two first holes 31 at both ends is less than or equal to the size of each of the plurality of claws 82 in the direction of the line connecting the two first holes 31 at both ends. Figure 6 Otherwise, when one of the two sensors 50 in the two first holes 31 at both ends measures the claw 82, the other sensor will be outside the range of the claw 82 and cannot measure.

[0062] The evaporation system provided by the present disclosure can at least achieve the following beneficial technical effects. When the sensor is installed in the first hole in the middle with the probe facing upward (i.e., away from the base), the flatness measurement jig can measure the flatness of the cooling plate above it, and when the sensor is installed in one or both of the two first holes at both ends with the probe facing downward (i.e., close to the base), the flatness measurement jig can measure the flatness of the claw below it. In addition, the display of the flatness measurement jig can quickly and accurately display the measurement value, ensuring the accuracy of the measurement result and avoiding the error of the human eye reading the meter. Therefore, the current flatness of the cooling plate and each claw of the evaporation system can be measured quickly, accurately and efficiently, and the cooling plate and each claw can be adjusted in time to have the desired flatness. As a result, the yield of the formed OLED display panel, OLED display device and other products and the utilization rate of the evaporation system are improved.

[0063] In the absence of obvious conflicts, the aforementioned various embodiments of the present disclosure may be combined with each other.

[0064] It should be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present disclosure, but the present disclosure is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the protection scope of the present disclosure defined by the attached claims, and these modifications and improvements also belong to the protection scope of the present disclosure.

Claims

1. A flatness measurement fixture, comprising: Base; A workbench comprising at least one first hole extending in a thickness direction of the workbench and penetrating the workbench, and at least one second hole extending in a direction perpendicular to the thickness direction and corresponding one-to-one with the at least one first hole; at least one supporting column, the at least one supporting column being disposed on the base and used for supporting the workbench; at least one sensor, each of the at least one sensor being disposed in one of the at least one first hole and configured to measure the flatness of a surface of the object to be measured; as well as at least one display, each of the at least one display being connected to one of the at least one sensor via a signal line to display a measurement value of the sensor; wherein each of the at least one sensor is disposed in one of the at least one first holes in either a manner that its probe is away from the base or a manner that its probe is close to the base; The base comprises a main body and two protrusions, the main body is substantially rectangular, and the two protrusions are located on the same side of the main body at intervals; wherein the gap between the two protrusions is U-shaped; and Wherein, the at least one supporting column comprises two supporting columns, the two supporting columns are respectively arranged on the ends of the two protrusions away from the main body, and the at least one display is located on the main body.

2. The flatness measurement jig according to claim 1, wherein: Each of the at least one sensor is used to measure a maximum height and a minimum height of the surface of the object to be measured, and the flatness of the surface of the object to be measured is equal to a difference between the maximum height and the minimum height.

3. The flatness measurement fixture according to claim 1 or 2, further comprising at least one first fastener corresponding to the at least one support column, wherein the at least one first fastener is used to adjust the height of the workbench relative to the base and fix the workbench to the at least one support column.

4. The flatness measuring jig according to claim 1 or 2, further comprising a first level located on the base and a second level located on the workbench, wherein the first level and the second level are respectively used to detect the horizontality of the base and the horizontality of the workbench.

5. The flatness measurement jig according to claim 1 or 2, further comprising at least one second fastener corresponding to the at least one second hole one by one, each of the at least one second hole being connected to the corresponding first hole, and the at least one second fastener being respectively arranged in the corresponding second hole for fixing the sensor located in the corresponding first hole.

6. The flatness measurement jig according to claim 1, wherein: In the direction in which the two protrusions protrude from the main body, the size of the gap is larger than the size of the object to be measured.

7. The flatness measurement jig according to claim 1, wherein: Each of the two supporting columns includes a wiring groove, each of the two protruding portions includes a wiring groove, and the wiring groove of each of the two supporting columns and the wiring groove of the corresponding protruding portion communicate with each other to accommodate the signal line.

8. The flatness measurement jig according to claim 1 or 2, wherein: Each of the at least one sensor includes a contact digital sensor or a digital dial indicator.

9. The flatness measurement jig according to claim 3, wherein: Each of the at least one first fastener comprises a screw or a clamp.

10. The flatness measurement jig according to claim 5, wherein: Each of the at least one second fastener comprises a screw.

11. The flatness measurement jig according to claim 1 or 2, wherein: The workbench is in a rounded rectangular shape.

12. The flatness measurement jig according to claim 1 or 2, wherein: Each of the at least one supporting column is detachably separated from any one of the base and the workbench.

13. A vapor deposition system, comprising: Mask plate stage; A mask plate frame located on the mask plate platform, the mask plate frame being used for mounting a mask plate; A plurality of claws located on the mask frame, the plurality of claws are used to carry the substrate to be coated, and each of the plurality of claws can move in a plane parallel to the plane where the mask frame is located to align the substrate with the mask; a cooling plate located on the plurality of claws, the cooling plate being used to cool the substrate; as well as The flatness measurement jig according to any one of claims 1 to 12.

14. The evaporation system according to claim 13, wherein: The at least one first hole comprises three first holes located on the same straight line, the at least one sensor comprises two sensors, and the at least one display comprises two displays; and One of the two sensors is installed in the middle first hole among the three first holes with its probe away from the base to measure the flatness of the surface of the cooling plate close to the multiple claws, and outputs the measurement value to at least one of the two displays; or, the two sensors are installed in two first holes located at both ends of the three first holes with their probes close to the base respectively to measure the flatness of the surface of each of the multiple claws close to the cooling plate, and output the measurement values ​​to the two displays respectively.

15. The evaporation system according to claim 14, wherein: The distance between the two first holes at both ends is smaller than or equal to the dimension of each of the plurality of claws in the direction of the line connecting the two first holes at both ends.

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