Nano film fatigue performance testing method and device

Abstract

The present application discloses a method and device for testing the fatigue performance of a nanofilm. The method for testing the fatigue performance of a nanofilm comprises the following steps: providing a testing environment; the testing environment comprises a first environment with a constant pressure of a first value and a second environment with an adjustable pressure; providing a test sample; arranging a first nanofilm between the first environment and the second environment so that both sides of the first nanofilm are affected by the pressure difference between the first environment and the second environment; acquiring data; adjusting the pressure of the second environment so that the pressure of the second environment is periodically switched between the second value and the third value, and recording the number of switching times until the first nanofilm is broken. The technical solution provided by the present application can test the fatigue performance of a nanofilm.

Description

Technical Field

[0001] The present application relates to the technical field of nano film performance testing, and in particular to a method and device for testing the fatigue performance of a nano film. Background Art

[0002] In the prior art, nanoindenters are often used to test the fatigue properties of nano-thick films. This method can only test the fatigue properties of films with micron-level pores, but cannot test the fatigue properties of nano-films with millimeter-level, especially centimeter-level and above pore sizes. Summary of the invention

[0003] The present application provides a method and device for testing fatigue performance of nano-films, which can test fatigue performance of nano-films with pore sizes in the millimeter range, especially in the centimeter range and above.

[0004] In a first aspect, the present invention provides a method for testing fatigue performance of a nano film, comprising the following steps:

[0005] Providing a testing environment: the testing environment includes a first environment with a constant pressure of a first value and a second environment with an adjustable pressure;

[0006] Providing a test sample: arranging a first nanofilm in a suspended manner between a first environment and a second environment, so that two sides of the first nanofilm are affected by a pressure difference between the first environment and the second environment;

[0007] Data acquisition: adjusting the pressure of the second environment so that the pressure of the second environment switches periodically between the second value and the third value, and recording the number of switching times until the first nanofilm is broken.

[0008] In the above implementation process, the nano film fatigue performance test method includes the following steps: providing a test environment, providing a test sample, and acquiring data. The tester performs the steps of providing a test environment and providing a test sample;

[0009] The nanofilm is placed between a first environment and a second environment, and the first nanofilm can be deformed under the action of the pressure difference between the two environments;

[0010] The experimenter adjusts the pressure of the second environment so that the pressure of the second environment switches periodically between a set second value and a set third value. At least one of the second value and the third value is different from the first value to ensure that the first nanofilm can undergo periodic deformation. As the first nanofilm continues to deform periodically, the first nanofilm will eventually rupture. When the nanofilm ruptures, the recording stops. The current number of recordings is used to obtain the life of the first nanofilm under the set conditions, that is, the fatigue performance.

[0011] In an optional embodiment, the first value is equal to the third value.

[0012] In the above implementation process, when executing the data acquisition step, the first value is equal to the third value. When the pressure of the second environment is the second value, a pressure difference is generated with the first environment, causing the first nanofilm to deform. When the pressure of the second environment periodically switches between the second value and the third value, the first nanofilm will be subjected to and released by a force in a single direction.

[0013] In an optional embodiment, the first value is equal to the atmospheric pressure value.

[0014] In the above implementation process, the first environment can be an atmospheric environment, that is, one side of the first nanofilm is in contact with the atmosphere to ensure that the pressure of the first environment is constant. At the same time, the source of the first environment is simple, which is conducive to saving testing costs.

[0015] In an optional embodiment, the second value is smaller than the first value.

[0016] In the above implementation process, when one side of the first nanofilm is in contact with the atmosphere, negative pressure is applied to the other side of the first nanofilm, so that the magnitude of the negative pressure can be easily and stably controlled, which is beneficial to the accuracy of the fatigue performance test of the first nanofilm.

[0017] In an optional embodiment, the method further comprises the steps of:

[0018] Determining whether the test sample is broken: in the process of executing the data acquisition step, the pressure value of the second environment is synchronously detected. If the pressure value of the second environment does not change periodically in any switching cycle, it is determined that the first nanofilm is broken.

[0019] In the above implementation process, since the first nanofilm is deformed under the action of pressure difference and the first nanofilm can isolate the first environment and the second environment, if the first nanofilm is ruptured, the first environment and the second environment will be connected. Therefore, by detecting the change of the pressure value of the second environment within a switching cycle, it is possible to accurately determine whether the test sample is ruptured.

[0020] In an optional embodiment, the method further comprises the steps of:

[0021] Determine the test value: suspend the second nanofilm between the first environment and the second environment, adjust the pressure value of the second environment until the second nanofilm breaks, and determine the second value based on the pressure value when the second nanofilm breaks.

[0022] In the above implementation process, the second value can be determined first by the second nanofilm to improve the accuracy of the test of the fatigue performance of the first nanofilm. The first nanofilm and the second nanofilm are the same, and the second nanofilm is placed between the first environment and the second environment. The pressure of the second environment is adjusted so that the pressure difference on both sides of the second nanofilm gradually increases until the second nanofilm breaks. The pressure of the second value can be determined based on the current pressure value of the second environment.

[0023] In a second aspect, the present invention provides a nano film fatigue performance testing device, comprising:

[0024] A test base is formed with a test slot and a pressure regulating pipeline, the pressure regulating pipeline is connected to the test slot, the inside of the slot of the test slot is defined as the second environment, the outside of the slot of the test slot is defined as the first environment, and the nano film is configured to be set in the slot of the test slot;

[0025] a gas pressure regulating assembly, connected to the pressure regulating pipeline and configured to periodically regulate the pressure of the second environment; and

[0026] The counting module is used to record the number of adjustments of the gas pressure regulating component.

[0027] In the above implementation process, a nano film fatigue performance test device is provided, which can be used to test the fatigue performance of the nano film. The test personnel fix the nano film in the notch of the test slot, manipulate the air pressure regulating component, so that the pressure difference between the first environment and the second environment changes periodically, and the counting module synchronously records the number of adjustments of the air pressure regulating component. When the nano film breaks, the counting module stops recording, and the life of the nano film under the set conditions, that is, the fatigue performance, is obtained; it should be noted that the test personnel can first use a same nano film to obtain the maximum pressure difference between the first environment and the second environment when the nano film breaks through the nano film fatigue performance test device, and determine the setting conditions for the nano film fatigue performance test based on the maximum pressure difference.

[0028] In an optional embodiment, the air pressure regulating assembly includes a vacuum pump, a regulating valve, an electromagnetic reversing valve and a differential pressure gauge;

[0029] The vacuum pump is connected to the regulating valve, and the pressure regulating pipeline is connected to the regulating valve and the atmosphere through the electromagnetic reversing valve;

[0030] The differential pressure gauge is installed in the pressure regulating pipeline.

[0031] In the above implementation process, the air pressure regulating component has a simple structure and can simply and accurately adjust the pressure of the second environment, which is beneficial to the accuracy of the test results. The vacuum pump is used to generate negative pressure in the second environment; the solenoid valve is used to connect the second environment to the atmosphere; the pressure difference between the first environment and the second environment, that is, the pressure difference on both sides of the nanofilm, can be displayed by the differential pressure gauge; the regulating valve can control the size of the pressure difference on the nanofilm, and the solenoid reversing valve can control the direction of the airflow, so that the pressure difference on both sides of the nanofilm changes periodically. According to the number of reversing times of the solenoid reversing valve, the fatigue performance of the nanofilm can be determined.

[0032] In an optional implementation, the electromagnetic reversing valve is connected to a relay and controlled by the relay; the counting module includes a counter, and the counter is connected to the relay.

[0033] In the above implementation process, the relay controls the switching and switching frequency of the electromagnetic reversing valve, and the counter counts the number of switching times of the electromagnetic reversing valve.

[0034] In an optional embodiment, the nano film fatigue performance testing device also includes a pressure sensor, and the pressure sensor is arranged in the pressure regulating pipeline.

[0035] During the above implementation process, the pressure sensor detects the pressure in the second environment. When there is no periodic change within a cycle, it indicates that the nanofilm is broken. For example, when the second environment deforms the nanofilm through negative pressure, if no negative pressure is generated within a cycle, it indicates that the nanofilm is broken. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 This is a flow chart of the method for testing the fatigue performance of nanofilms in this embodiment;

[0038] Figure 2 Schematic diagram of a nano film fatigue performance testing device in this embodiment;

[0039] Figure 3 Schematic diagram of the suspended bracket in this embodiment.

[0040] Icons: 10-test base; 11-air pressure regulating assembly; 12-counting module; 13-test slot; 14-pressure regulating pipeline; 15-suspension bracket; 16-vacuum pump; 17-regulating valve; 18-electromagnetic reversing valve; 19-differential pressure gauge; 20-relay; 21-counter; 22-pressure sensor. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0043] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0044] In the description of the embodiments of the present application, it should be understood that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the products of the application are conventionally placed when in use, or are the orientations or positional relationships conventionally understood by those skilled in the art. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0045] In the description of the embodiments of the present application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0046] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other.

[0047] The technical solution in this application will be described below in conjunction with the accompanying drawings.

[0048] This embodiment provides a method for testing the fatigue performance of a nano film, which can test the fatigue performance of a nano film.

[0049] See also Figure 1 , Figure 1 Flow chart of the method for testing the fatigue performance of nanofilm in this embodiment.

[0050] The fatigue performance test method of the nano film includes the following steps:

[0051] Providing a testing environment: the testing environment includes a first environment with a constant pressure of a first value and a second environment with an adjustable pressure;

[0052] Providing a test sample: arranging a first nanofilm in a suspended manner between a first environment and a second environment, so that two sides of the first nanofilm are affected by a pressure difference between the first environment and the second environment; and

[0053] Data acquisition: adjusting the pressure of the second environment so that the pressure of the second environment switches periodically between the second value and the third value, and recording the number of switching times until the first nanofilm is broken.

[0054] In the above implementation process, the nano film fatigue performance testing method includes the following steps: providing a testing environment, providing a test sample, and acquiring data.

[0055] The test personnel execute the steps of providing the testing environment and providing the test samples;

[0056] The nanofilm is placed between a first environment and a second environment, and the first nanofilm can be deformed under the action of the pressure difference between the two environments;

[0057] The experimenter adjusts the pressure of the second environment so that the pressure of the second environment switches periodically between a set second value and a set third value. At least one of the second value and the third value is different from the first value to ensure that the first nanofilm can undergo periodic deformation. As the first nanofilm continues to deform periodically, the first nanofilm will eventually rupture. When the nanofilm ruptures, the recording stops. The current number of recordings is used to obtain the life of the first nanofilm under the set conditions, that is, the fatigue performance.

[0058] It should be noted that the setting conditions include a first value, a second value, a third value, and a frequency of switching between the second value and the third value.

[0059] In the present disclosure, the first value is equal to the third value.

[0060] In the above implementation process, when executing the data acquisition step, the first value is equal to the third value. When the pressure of the second environment is the second value, a pressure difference is generated with the first environment, causing the first nanofilm to deform. When the pressure of the second environment periodically switches between the second value and the third value, the first nanofilm will be subjected to and released by a force in a single direction.

[0061] In the present disclosure, the first numerical value is equal to the atmospheric pressure value.

[0062] In the above implementation process, the first environment can be an atmospheric environment, that is, one side of the first nanofilm is in contact with the atmosphere to ensure that the pressure of the first environment is constant. At the same time, the source of the first environment is simple, which is conducive to saving testing costs.

[0063] In the present disclosure, the second value is smaller than the first value.

[0064] In the above implementation process, when one side of the first nanofilm is in contact with the atmosphere, negative pressure is applied to the other side of the first nanofilm, so that the magnitude of the negative pressure can be easily and stably controlled, which is beneficial to the accuracy of the fatigue performance test of the first nanofilm.

[0065] The present disclosure also includes the steps of:

[0066] Determine whether the test sample is broken: during the data acquisition step, the pressure value of the second environment is detected synchronously, and if the pressure value of the second environment does not change periodically in any switching cycle, the first nanofilm is determined to be broken. It should be noted that under the conditions that the first value is equal to the atmospheric pressure value, the first value is equal to the third value, and the second value is less than the first value, if the pressure value of the second environment is not less than the atmospheric pressure value in any switching cycle, the first nanofilm is determined to be broken.

[0067] In the above implementation process, since the first nanofilm is deformed under the action of pressure difference and the first nanofilm can isolate the first environment and the second environment, if the first nanofilm is ruptured, the first environment and the second environment will be connected. Therefore, by detecting the change of the pressure value of the second environment within a switching cycle, it is possible to accurately determine whether the test sample is ruptured.

[0068] The present disclosure also includes the steps of:

[0069] Determine the test value: suspend the second nanofilm between the first environment and the second environment, adjust the pressure value of the second environment until the second nanofilm breaks, and determine the second value based on the pressure value when the second nanofilm breaks.

[0070] In the above implementation process, the second value can be determined first by the second nanofilm to improve the accuracy of the test of the fatigue performance of the first nanofilm. The first nanofilm and the second nanofilm are the same, and the second nanofilm is placed between the first environment and the second environment. The pressure of the second environment is adjusted so that the pressure difference on both sides of the second nanofilm gradually increases until the second nanofilm breaks. The pressure of the second value can be determined based on the current pressure value of the second environment.

[0071] It should be noted that the present disclosure also provides a nano film fatigue performance testing device, which can be used to clearly explain the nano film fatigue performance testing method provided above:

[0072] See also Figure 2 , Figure 2 Schematic diagram of the nano film fatigue performance testing device in this embodiment.

[0073] The nano film fatigue performance testing device comprises a testing base 10 , an air pressure regulating component 11 and a counting module 12 .

[0074] The test base 10 is formed with a test slot 13 and a pressure regulating pipeline 14, the pressure regulating pipeline 14 is connected to the test slot 13, the inside of the slot of the test slot 13 is defined as the second environment, the outside of the slot of the test slot 13 is defined as the first environment, and the nano film is configured to be suspended in the slot of the test slot 13.

[0075] The air pressure regulating assembly 11 is in communication with the pressure regulating pipeline 14 and is configured to periodically regulate the pressure of the second environment.

[0076] The counting module 12 is used to record the number of adjustments of the air pressure regulating component 11 .

[0077] In the above implementation process, a nano film fatigue performance test device is provided, which can be used to test the fatigue performance of the nano film. The test personnel fix the nano film in the notch of the test slot 13, manipulate the air pressure regulating component 11, so that the pressure difference between the first environment and the second environment changes periodically, and the counting module 12 synchronously records the number of adjustments of the air pressure regulating component 11. When the nano film breaks, the counting module 12 stops recording, and the life of the nano film under the set conditions, that is, the fatigue performance, is obtained; it should be noted that the test personnel can first use a same nano film to obtain the maximum pressure difference between the first environment and the second environment when the nano film breaks through the nano film fatigue performance test device, and determine the setting conditions for the nano film fatigue performance test based on the maximum pressure difference.

[0078] It should be noted that in the present disclosure, a suspended bracket 15 can be used to fix the nano film, such as Figure 3The suspended bracket 15 is ring-shaped, and the nano film is fixed on the suspended bracket 15 by vaseline. The test personnel place the suspended bracket 15 in the notch of the test slot 13 to ensure that the nano film is tested in a stable, suspended state.

[0079] In the present disclosure, the air pressure regulating assembly 11 includes a vacuum pump 16, a regulating valve 17, an electromagnetic reversing valve 18 and a differential pressure gauge 19. The vacuum pump 16 is connected to the regulating valve 17, and the pressure regulating pipeline 14 is connected to the regulating valve 17 and the atmosphere through the electromagnetic reversing valve 18. The differential pressure gauge 19 is arranged on the pressure regulating pipeline 14.

[0080] In the above implementation process, the air pressure regulating component 11 has a simple structure and can simply and accurately adjust the pressure of the second environment, which is beneficial to the accuracy of the test results. Through the vacuum pump 16, the second environment generates negative pressure; through the solenoid valve, the second environment can be connected to the atmosphere; through the differential pressure gauge 19, the pressure difference between the first environment and the second environment, that is, the pressure difference on both sides of the nanofilm, can be displayed; the regulating valve 17 can control the size of the pressure difference on the nanofilm, and the electromagnetic reversing valve 18 can control the direction of the airflow, so that the pressure difference on both sides of the nanofilm changes periodically. According to the number of reversals of the electromagnetic reversing valve 18, the fatigue performance of the nanofilm can be determined.

[0081] In the present disclosure, the electromagnetic reversing valve 18 is connected to the relay 20 and controlled by the relay 20. The counting module 12 includes a counter 21, and the counter 21 is connected to the relay 20.

[0082] In the above implementation process, the relay 20 controls the switching and switching frequency of the electromagnetic reversing valve 18 , and the counter 21 counts the number of switching times of the electromagnetic reversing valve 18 .

[0083] It should be noted that, in other implementations, the PLC may directly control the switching of the solenoid valve and record the number of switching times.

[0084] In the present disclosure, the nano film fatigue performance testing device further includes a pressure sensor 22 , and the pressure sensor 22 is disposed in the pressure regulating pipeline 14 .

[0085] During the above implementation process, the pressure sensor 22 detects the pressure in the second environment. When the pressure does not change periodically within a cycle, it indicates that the nanofilm is broken. For example, when the second environment deforms the nanofilm through negative pressure, if no negative pressure is generated within a cycle, it indicates that the nanofilm is broken.

[0086] When the above nano film fatigue performance testing device is applied to the nano film fatigue performance testing method:

[0087] Providing a testing environment, that is, providing a nano film fatigue performance testing device;

[0088] Determine the test value: that is, a nanofilm is suspended in the notch of the test slot 13, and the vacuum pump 16 is working to control the regulating valve 17 to gradually increase the pressure difference on both sides of the nanofilm. When the pressure sensor 22 detects a non-negative pressure value of the second environment, it is determined that the nanofilm is broken, and the current pressure difference value is recorded, which is defined as the fracture pressure difference. Based on the fracture pressure difference, a certain percentage (the specific value of the percentage includes but is not limited to 80%, 70% or 60%, etc.) is taken to determine the pressure difference during the fatigue performance test, which is defined as the test pressure difference, and the second value can be determined.

[0089] Providing a test sample: that is, placing a new nanofilm in the air at the notch of the test slot 13 .

[0090] Data acquisition: that is, the vacuum pump 16 works to control the regulating valve 17 to adjust the pressure difference to the test pressure difference, and the relay 20 (or PLC) sets the switching cycle of the electromagnetic reversing valve 18; the step of determining whether the test sample is ruptured is synchronously executed, that is, the pressure sensor 22 detects the pressure in the second environment. If no negative value is detected within a cycle, the nanofilm is ruptured, and the number of switching times of the electromagnetic reversing valve 18 recorded by the counter 21 (or PLC) is the fatigue life of the nanofilm.

[0091] Four test examples are given below:

[0092] Test Example 1: Nanofilm 1 (5 mm in diameter, 60 nm in thickness), the fracture differential pressure measured by the nanofilm fatigue performance testing device is 4000 Pa, 80% of this value, 3200 Pa, is taken as the test differential pressure, and the switching period of the electromagnetic reversing valve 18 is set to 0.1 s.

[0093] The test results show that the nanofilm 1 breaks after 95,000 times. It can be obtained that the fatigue life of the nanofilm 1 is 95,000 times under the condition of 80% of the rupture pressure difference of 4000 Pa and the switching frequency of 10 Hz.

[0094] Test Example 2, nanofilm 2 (diameter 28mm, thickness 30nm), the fracture pressure difference measured by the nanofilm fatigue performance testing device is 2000Pa, 80% of this value, 1600Pa, is taken as the test pressure difference, and the switching period of the electromagnetic reversing valve 18 is set to 0.4s.

[0095] The test results show that the nanofilm 2 breaks after 85,000 times. It can be obtained that the fatigue life of the nanofilm 1 is 85,000 times under the condition of 80% of the rupture pressure difference of 2000 Pa and the switching frequency of 2.5 Hz.

[0096] Test Example 3, nanofilm 3 (diameter 5mm, thickness 60nm), the fracture pressure difference measured by the nanofilm fatigue performance testing device is 4000Pa, 70% of this value, 2800Pa, is taken as the test pressure difference, and the switching period of the electromagnetic reversing valve 18 is set to 0.1s.

[0097] The test results show that the nanofilm 3 breaks after 145,000 times. It can be obtained that the fatigue life of the nanofilm 1 is 145,000 times under the condition of 70% of the rupture pressure difference of 4000 Pa and the switching frequency of 10 Hz.

[0098] Test Example 4: Nanofilm 4 (5 mm in diameter, 60 nm in thickness). The fracture differential pressure measured by the nanofilm fatigue performance testing device is 4000 Pa. 60% of this value, 2400 Pa, is taken as the test differential pressure. The switching period of the electromagnetic reversing valve 18 is set to 0.1 s.

[0099] The test results show that the nanofilm 4 breaks after 145,000 times. It can be obtained that the fatigue life of the nanofilm 1 is 220,000 times under the condition of 60% of the rupture pressure difference of 4000 Pa and the switching frequency of 10 Hz.

[0100] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A method for testing fatigue properties of nanofilms, characterized in that: The following steps are involved: Providing a testing environment: the testing environment includes a first environment with a constant pressure of a first value and a second environment with adjustable pressure; Providing a test sample: suspending a first nanofilm between the first environment and the second environment, so that two sides of the first nanofilm are affected by the pressure difference between the first environment and the second environment; as well as Data acquisition: adjust the pressure of the second environment so that the pressure of the second environment switches periodically between the second value and the third value, and record the number of switches until the first nanofilm ruptures, the first value is equal to the third value, the first value is equal to the atmospheric pressure value, and the second value is less than the first value.

2. The method for testing the fatigue performance of nanofilm according to claim 1, characterized in that: Also includes the steps: Determine the test value: suspend the second nanofilm between the first environment and the second environment, adjust the pressure value of the second environment until the second nanofilm breaks, and determine the second value based on the pressure value when the second nanofilm breaks.

3. The method for testing fatigue performance of nanofilm according to claim 1, characterized in that: Also includes the steps: Determining whether the test sample is broken: in the process of executing the data acquisition step, synchronously detecting the pressure value of the second environment, if the pressure value of the second environment does not change periodically in any switching cycle, determining that the first nanofilm is broken.

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