Drive and sense balance, fully coupled 3-axis gyroscope

Abstract

The present invention provides an exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibration rate gyroscope architecture with fully coupled sensing modes. Embodiments may employ balanced drive and / or balanced sensing components to reduce induced vibration and / or component-to-component coupling. Embodiments may include two inner frame gyroscopes for GY sensing mode and one outer frame gyroscope or saddle gyroscope for GX sensing mode and drive system coupling, a drive shuttle coupled to the two inner frame gyroscopes or outer frame gyroscopes, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sensing mode. Components may be removed from the exemplary monolithic structure to make a single axis or dual axis gyroscope and / or may be configured such that the number of proof masses may be reduced by half from the exemplary monolithic structure to make a half gyroscope. Other embodiments may employ a stress isolation frame to reduce packaging induced stress.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to U.S. non-provisional patent application serial number 16 / 138,637, filed on September 21, 2018, entitled “DRIVE AND SENSING BALANCED, FULLY COUPLED 3-AXIS GYROSCOPE,” the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] The present invention generally relates to angular velocity sensors, and more particularly to angular velocity sensors including a guided mass system. Background Art

[0004] Angular velocity sensing is typically performed using a vibratory rate gyroscope, which generally operates by driving a sensor into a first motion and measuring a second motion of the sensor that is responsive to both the first motion and the angular velocity to be sensed.

[0005] Furthermore, conventional vibration rate microelectromechanical system (MEMS) gyroscopes may not provide adequate solutions to reduce sensitivity to vibration and part-to-part coupling, reduce in-phase offset shift caused by suspension forces, and / or reduce sensitivity to package stress.

[0006] Therefore, it is desirable to provide a system and method that overcomes the above-mentioned problems. The present invention addresses this need.

[0007] The above shortcomings are intended to only summarize some of the problems with conventional implementations and are not exhaustive. Other problems with conventional implementations and techniques, as well as corresponding advantages of the various aspects described herein, may become more apparent after reviewing the following description. Summary of the Invention

[0008] The following is a simplified summary of the specification to provide a basic understanding of some aspects of the specification. This summary is not a comprehensive overview of the specification. It is not intended to identify key or critical elements of the specification, nor to delineate the specific scope of any embodiments of the specification or any scope of the claims. Its sole purpose is to present some concepts of the specification in a simplified form as a prelude to the more detailed description that follows.

[0009] A linear and angular momentum balanced 3-axis gyroscope structure is disclosed for better offset stability, vibration suppression, and lower inter-component coupling. In a non-limiting embodiment, a linear and angular momentum balanced 3-axis gyroscope structure is described that can include one or more inner frame gyroscopes, two or more drive shuttles coupled to the one or more inner frame gyroscopes, two or more proofmasses coupled to the inner frame gyroscopes, and / or one or more outer frame gyroscopes or saddle gyroscopes coupled to the inner frame gyroscopes.

[0010] Various embodiments described herein may facilitate providing a linear and angular momentum balanced 3-axis gyroscope structure for better offset stability, vibration suppression, and lower inter-component coupling.Further non-limiting embodiments may be directed to methods associated with various embodiments described herein.

[0011] These and other embodiments are described in greater detail below. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Various non-limiting embodiments are further described with reference to the accompanying drawings, in which:

[0013] Figure 1 is a functional block diagram of a non-limiting embodiment of an exemplary gyroscope architecture according to non-limiting aspects of the present invention;

[0014] Figure 2 A non-limiting embodiment of an exemplary gyroscope architecture in driving motion is shown (e.g., corresponding to Figure 10 ) which illustrates further non-limiting aspects of the present invention;

[0015] Figure 3 depicts further aspects of non-limiting embodiments of exemplary gyroscope architectures as described herein;

[0016] Figure 4 depicts yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture;

[0017] Figure 5 depicts yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture;

[0018] Figure 6 depicts yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture;

[0019] Figure 7 yet another non-limiting embodiment of an exemplary gyroscope architecture in accordance with non-limiting aspects of the present invention is depicted;

[0020] Figure 8 depicts exemplary drive mode shapes for non-limiting embodiments of exemplary gyroscope architectures in accordance with further non-limiting aspects described herein;

[0021] Figure 9 depicts an exemplary GX mode shape of a non-limiting embodiment of an exemplary gyroscope architecture according to yet another non-limiting aspect described herein;

[0022] Figure 10 depicts an exemplary GY mode shape of a non-limiting embodiment of an exemplary gyroscope architecture according to yet another non-limiting aspect described herein;

[0023] Figure 11 depicts an exemplary GZ sensing mode shape of a non-limiting embodiment of an exemplary gyroscope architecture according to non-limiting aspects described herein;

[0024] Figure 12 depicts an exemplary GZ parasitic mode shape of a non-limiting embodiment of an exemplary gyroscope architecture according to yet another non-limiting aspect described herein;

[0025] Figure 13 a functional block diagram illustrating another non-limiting embodiment of an exemplary gyroscope architecture according to further non-limiting aspects of the present invention; and

[0026] Figure 14 Another functional block diagram illustrating other non-limiting embodiments of exemplary gyroscope architectures according to further non-limiting aspects of the present invention is shown. DETAILED DESCRIPTION

[0027] The present invention generally relates to angular velocity sensors and, more specifically, to angular velocity sensors that include a guided mass system. The following description is provided to enable one of ordinary skill in the art to make and use the invention and is provided in the context of a patent application and its requirements. Various modifications to the preferred embodiments and the general principles and features described herein will be apparent to those skilled in the art. Therefore, the present invention is not intended to be limited to the embodiments shown, but is to be given the widest scope consistent with the principles and features described herein. Therefore, although a brief overview is provided, certain aspects of the invention described or depicted herein are for illustrative purposes only and not for limiting purposes. Therefore, variations of the disclosed embodiments suggested by the disclosed apparatus, systems, and methods are intended to be included within the scope of the subject matter disclosed herein.

[0028] As described above, conventional MEMS vibratory rate gyroscopes may not provide adequate solutions to reduce sensitivity to vibration (e.g., linear vibration and / or angular vibration) and inter-component coupling, reduce in-phase shifts caused by suspension forces, and / or reduce sensitivity to packaging stress. Various embodiments described herein may overcome one or more of these and / or related shortcomings of conventional MEMS vibratory rate gyroscopes.

[0029] The present invention provides an exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibration rate gyroscope architecture with a fully coupled sensing mode. In a non-limiting aspect, various exemplary embodiments may employ balanced drive and / or balanced sensing components to reduce induced vibrations and / or component-to-component coupling, as described herein. In another non-limiting aspect, various exemplary embodiments may employ a stress isolation frame to reduce packaging-induced stresses, as further described herein. In another non-limiting aspect, various exemplary embodiments may employ mechanical coupling to facilitate linear vibration suppression. In yet another non-limiting aspect, various exemplary embodiments may employ one or more drive shuttles to reject in-phase shifts caused by suspension forces. Furthermore, as described herein, various exemplary embodiments may facilitate the manufacture of gyroscopes with improved transverse-axis sensitivity due to the decoupling of in-plane and out-of-plane gyroscopes.

[0030] As non-limiting examples, exemplary embodiments may include two inner-frame (e.g., GY) gyroscopes, wherein the inner-frame gyroscopes may facilitate a GY sensing mode and may facilitate drive system coupling, one outer-frame (e.g., GX) gyroscope, wherein the outer-frame gyroscope may facilitate a GX sensing mode and may facilitate drive system coupling, four drive shuttles coupled to either the two inner-frame gyroscopes or the outer-frame gyroscopes, four GZ proof masses coupled to the inner-frame gyroscopes, and / or a coupling mechanism that facilitates coupling the GZ proof masses, coupling the inner-frame gyroscopes, and / or facilitating coupling the inner-frame gyroscopes to the outer-frame gyroscopes and / or the drive shuttles. In further non-limiting aspects, various exemplary embodiments may be configured such that components may be removed from the exemplary overall architecture to create a single-axis or dual-axis gyroscope and / or may be configured such that the number of proof masses may be halved from the exemplary overall architecture to create a half-gyroscope, as further described herein. For example, according to non-limiting aspects, the exemplary 3-axis (e.g., GX, GY, and GZ) gyroscope can be simplified to a 2-axis or 1-axis gyroscope by removing components from the architecture. By using fewer sense transducers, etc., and by abandoning the drive and / or sense balance aspects of the exemplary 3-axis (e.g., GX, GY, and GZ) gyroscope architecture, the exemplary gyroscope architecture described herein can be functionally cut in half to create a more compact 3-axis (e.g., GX, GY, and GZ) gyroscope.

[0031] Figure 1 A functional block diagram of a non-limiting embodiment of an exemplary gyroscope architecture 100 according to non-limiting aspects of the present invention is shown. As a non-limiting example, an exemplary embodiment of the gyroscope architecture 100 may include a MEMS device disposed in an XY plane parallel to a substrate 102 and may include two inner-frame (e.g., GY) gyroscopes, each of which may include two inner-frame proof masses (e.g., GY proof masses 104, 106, 108, 110) coupled to lever arms 112, 114, 116, 118, wherein the inner-frame gyroscopes are configured to facilitate providing a GY sensing mode, or measuring an angular velocity component associated with the MEMS device about an axis (e.g., the Y axis), and may be configured to couple a drive system to the inner-frame gyroscopes. In another non-limiting aspect, an exemplary embodiment of the gyroscope architecture 100 may include a coupling mechanism that couples the two inner-frame (e.g., GY) gyroscopes to each other. In another non-limiting aspect, an exemplary embodiment of the gyroscope architecture 100 may include a drive system comprising four drive shuttles (not shown), including guidance masses and configured to be coupled to two inner-frame gyroscopes, respectively.

[0032] In another non-limiting aspect, the exemplary gyroscope architecture 100 may include four GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) configured to be coupled to one another via coupling mechanisms 128 and 130, respectively (e.g., via springs and / or other coupling structures), wherein respective pairs of the four GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are coupled to one another via coupling mechanisms or lever arms 128, 130 configured to couple respective pairs of motions of the four proof masses (e.g., GZ proof masses 120, 122, 124, 126), and wherein the four GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) may be configured to facilitate providing a GZ sensing mode, or measuring an angular velocity component associated with a MEMS device about another axis (e.g., the Z-axis). In yet another non-limiting aspect, the exemplary gyroscope architecture 100 can include an outer frame gyroscope or a saddle (e.g., GX) gyroscope (e.g., GX) including two outer frame gyroscopes, including two pairs of two proof masses (e.g., GX proof masses 132, 134, 136, 138), wherein the GX, outer frame, or saddle gyroscopes can be configured to facilitate providing a GX sensing mode, or measuring an angular velocity associated with the MEMS device about another axis (e.g., the X axis). The GX proof masses of the pair may be configured to be coupled to each other via respective outer-frame lever arms 140 / 142.

[0033] In other non-limiting aspects, the exemplary gyroscope architecture 100 may include exemplary anchor points (e.g., depicted herein as rectangles with Xs) that may facilitate anchoring various components to the substrate 102 and / or to an exemplary stress isolation frame (not shown) configured to be attached to the substrate 102 or package. In further non-limiting aspects, Figure 1The exemplary gyroscope architecture 100 is depicted as including exemplary fixed pivot points 144 (e.g., black filled circles), which may functionally represent centers about which various components may be configured to rotate (e.g., in a plane parallel to the XY plane of the substrate 102, in a plane orthogonal to the XY plane of the substrate 102, etc.), which may include exemplary anchor points, and including exemplary translational pivot points 146 (e.g., white filled circles), which may functionally represent pivot points or hinges about which various components may be configured to rotate and translate (e.g., in a plane parallel to the XY plane of the substrate 102, in a plane orthogonal to the XY plane of the substrate 102, etc.). These exemplary pivot points may be understood as functional representations of centers of rotational motion as a result of the processes required to create such devices through MEMS fabrication, which typically includes a set of springs, flexures, rigid bodies, or suspension mechanisms or components configured to produce the desired motion, as further described herein.

[0034] therefore, Figure 1 The exemplary gyroscope architecture 100 is depicted as including exemplary springs (e.g., springs 145), suspension elements, or coupling mechanisms, which may include flexures or other structures that are particularly rigid, or flexible in particular directions and / or torsionally compliant, to constrain or define motion (e.g., anti-phase motion, in-plane motion, proof-of-contact motion of a proof-of-contact, etc.) and / or transfer motion of various components of the exemplary gyroscope architecture 100, e.g., to suspend the various components of the exemplary gyroscope architecture 100 to exemplary anchor points 302, as shown. Figure 3 As shown, as further described herein, serve as an exemplary fixed pivot point 144 and / or an exemplary translational pivot point 146, etc.

[0035] As a non-limiting example, Figure 1An exemplary gyroscope architecture 100 is depicted as including an outer frame or saddle (e.g., GX) gyroscope (e.g., a GX, outer frame, or saddle gyroscope) that may include two GX outer frame gyroscopes including two pairs of two proof masses (e.g., GX proof masses 132, 134, 136, 138), wherein the GX, outer frame, or saddle gyroscopes may be configured to couple to inner frame gyroscopes (e.g., via couplings 148 / 150), respectively, to lever arms 112 / 114 of an exemplary GY frame gyroscope including GY proof masses 104, 106, thereby facilitating providing a fixed pivot point between the lever arms 112 / 114 of the exemplary GY frame gyroscope and the GX proof masses 132 / 134. Likewise, the exemplary GX, outer frame, or saddle gyroscopes can be configured to couple to the inner frame gyroscopes (e.g., via couplings 152 / 154), respectively, to the lever arms 116 / 118 of the exemplary GY frame gyroscopes including the GY proof masses 108, 110, thereby facilitating providing a fixed pivot point between the lever arms 116 / 118 of the exemplary GY frame gyroscopes and the GX proof masses 136 / 138. For example, in Figures 3 to 6 Such an exemplary coupling is schematically shown in .

[0036] As another non-limiting example, corresponding pairs of four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) can be coupled to each other via coupling mechanisms or lever arms 128, 130 that are configured to couple the motion of the corresponding pairs of the four proof masses (e.g., GZ proof masses 120 / 122, 124 / 126). For example, the exemplary GZ proof mass 120 is coupled to the exemplary GZ proof mass 122 via the coupling mechanism or lever arm 128 and is configured to force the corresponding pairs of the four proof masses (e.g., exemplary GZ proof masses 120 / 122) into anti-phase motion, generally in the XY plane, parallel to the exemplary substrate 102, due to an angular velocity component associated with the MEMS device about the Z axis. For example, such exemplary coupling may be performed in a manner that: Figure 1 Functionally shown in FIG as a rotation of a coupling mechanism or lever arm 128 about a fixed pivot point, centered on the coupling mechanism or lever arm 128, and in FIG. Figures 3 to 6 It is schematically shown in FIG.

[0037] As another non-limiting example, two example inner frame gyroscopes may be configured to be coupled to each other (e.g., functionally shown as coupling example GY proof mass 106 to example GY proof mass 108 via springs, such as schematically shown as associated with GX proof mass 136). Figure 1145) to facilitate limiting the motion associated with the two GY or inner frame gyroscopes to a condition of linear and angular momentum balance. For example, as further described herein, the exemplary GY proof mass 106 can be coupled to the exemplary GY proof mass 108 via a spring or other structure or combination of structures that can facilitate limiting the motion associated with the two inner frame gyroscopes to a condition of linear and angular momentum balance, as further described herein. For example, such coupling Figures 3 to 6 In another non-limiting example, two exemplary GX or outer frame (saddle) gyroscopes, each including two proof masses (e.g., GX proof masses 132, 134, 136, 138) may be coupled to two exemplary GY or inner frame gyroscopes, respectively, and / or may be configured to couple two exemplary GX, outer frame, or saddle gyroscopes to four drive shuttles (not shown), as further described herein. For example, such coupling may be Figure 3 138 (132 and 134) to provide a rotational axis for the GY proof masses 104, 106, 108, 110 transversely through the GX proof masses 132, 134, 136, 138, while simultaneously translating the respective motions of the GY proof masses 104 and 106 (108 and 110) to the GX proof masses 132, 134, 136, 138. For example, in Figures 3 to 6 Such an exemplary coupling is schematically shown in .

[0038] also, Figure 1The exemplary gyroscope architecture 100 is depicted as including various sensing electrodes or transducer elements that can be configured to detect motion of various proof masses or other components of the exemplary gyroscope architecture 100, such as detecting motion due to Coriolis forces on various proof masses to provide measurements of angular velocity about the X, Y, or Z axes, to detect drive motion, etc. Although electrostatic actuators and sensors are described herein, those skilled in the art will recognize that various actuators and / or sensors can be used to implement these functions and that such use is within the spirit and scope of the present invention. For example, exemplary actuators and / or sensors can include piezoelectric, thermal, electromagnetic, and / or other types of actuators and / or sensors. In non-limiting aspects, the exemplary gyroscope architecture 100 may include capacitive electrodes 156, 158, 160, 162 configured to detect motion of the exemplary GX proof masses 132, 134, 136, 138, respectively, and may include capacitive electrodes 164, 166, 168, 170 configured to detect motion of the exemplary GY proof masses 104, 106, 108, 110, respectively, etc. As further described herein, it will be appreciated that the exemplary capacitive electrodes 156, 158, 160, 162, 164, 166, 168, 170 may be configured to primarily facilitate detection of Coriolis forces acting on respective proof masses due to angular velocities associated with the MEMS device about respective axes (e.g., the X or Y axis). As further described herein, these Coriolis forces acting on the respective proof masses as a result of angular velocities associated with the MEMS device about respective axes (e.g., the X or Y axis) can result in out-of-plane motion of the respective proof masses, where out-of-plane motion is defined as motion in the Z-axis direction (e.g., outside the XY plane).

[0039] in addition, Figure 1 An exemplary gyroscope architecture 100 is depicted in Figure 2 , which undergoes a driven motion at a specific moment in time, which is indicated by a solid arrow in the direction of each component of the exemplary gyroscope architecture 100. As further described herein, to generate the driven motion, an electrostatic force can be applied using exemplary drive combs (not shown) that can be respectively coupled to exemplary drive shuttles (not shown), which can include a guidance mass configured to be coupled to two inner frame gyroscopes GX, such as the GX described herein, outer frame or saddle gyroscopes, and / or combinations or portions thereof. By applying an alternating current (AC) voltage to each of the exemplary drive combs (not shown) at a drive frequency, an electrostatic force can be applied to the exemplary drive shuttle (not shown) through the exemplary drive combs (not shown) to generate a drive force at the drive frequency, which can result in the following. Figure 1The driving force applied to each of the exemplary drive shuttles (not shown) is configured to be transmitted to the various components of the exemplary gyroscope architecture 100 through the coupling mechanisms, lever arms, pivot points, and springs as described above, which results in the driving motion of the various components of the exemplary gyroscope architecture 100, such as Figure 1 and results in translation of various components of the exemplary gyroscope architecture 100, as shown Figure 2 Please note that Figure 2 Depicted are the deflections of various components of the exemplary gyroscope architecture 100 due to Coriolis forces arising from angular velocities about various axes when a given direction of drive motion is positive (e.g., GX+, GY+), or above the XY plane of the MEMS device, or negative (e.g., GX-, GY-), or below the XY plane of the MEMS device.

[0040] Note that, as described above, the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are configured to be coupled (e.g., via springs or other coupling structures) to the four GY proof masses 104, 106, 108, 110, respectively, wherein corresponding pairs of the four GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are coupled to each other via coupling mechanisms or lever arms 128, 130 that are configured to couple the motion of corresponding pairs of the four proof masses (e.g., GZ proof masses 120, 122, 124, 126). As further described herein, due to the angular velocity associated with the MEMS device about the Z-axis, the Coriolis force acting on each GZ proof mass (e.g., GZ proof mass 120, 122, 124, 126) may cause generally in-plane motion of each GZ proof mass (e.g., GZ proof mass 120, 122, 124, 126), where in-plane motion is defined as motion along the X-axis direction (e.g., within the XY plane), as shown. Thus, Figure 1 The various GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) of the exemplary gyroscope architecture 100 are depicted as undergoing sensed motion at a particular moment, as indicated by Figure 2 The dashed arrows in FIG. 1 indicate the directions of the various components of the exemplary gyroscope architecture 100 .

[0041] Thus, as another non-limiting example, the exemplary gyroscope architecture 100 may include additional capacitive electrodes (not shown) that may be configured to respectively detect motion of each GZ proof mass (e.g., GZ proof masses 120, 122, 124, 126). As further described herein, it will be appreciated that such exemplary capacitive electrodes may be configured to primarily facilitate detection of Coriolis forces acting on each proof mass due to angular velocity associated with the MEMS device about the Z-axis. As noted above, while the aforementioned sensors, electrodes, or actuators (e.g., drive combs) are described as capacitive sensors, electrodes, or actuators, various types of sensors, electrodes, or actuators may be used, including but not limited to piezoelectric, thermal, electromagnetic, optical, etc., as appropriate, and their use is intended to be within the spirit and scope of the present invention.

[0042] Figure 2 A non-limiting example of an exemplary gyroscope architecture in driving motion is shown (e.g., corresponding to Figure 1 ) is a functional block diagram 200 illustrating further non-limiting aspects of the present invention. Figure 2 The translational and rotational motions produced by the various components of the exemplary gyroscope architecture 100 are depicted as a result of the drive forces applied to the various exemplary drive shuttles (not shown) and transferred to the various components of the exemplary gyroscope architecture 100 through the coupling mechanisms, lever arms, pivot points, and springs described above, as described above. Further note that for clarity, the components such as the exemplary drive shuttles are not shown in the functional block diagram 200. Figure 1 Some reference characters and / or components of an exemplary gyroscope architecture 100 are shown.

[0043] from Figures 1 to 2 Several key points can be seen from the review of FIG. First, note that, according to various non-limiting embodiments, the drive motions of the various proof masses and assemblies are linearly and / or angularly momentum balanced. That is, the drive motions of the exemplary drive shuttle (not shown) can be in anti-phase motion or in opposite directions, as further described herein. Second, the drive motions of the two inner-frame gyroscopes are also anti-phase or in opposite directions, which is facilitated by the anti-phase drive motions of four exemplary drive shuttles (not shown) coupled to the GY proof masses (e.g., GY proof masses 104, 106, 108, 110) via respective exemplary lever arms 112, 114, 116, 118 that provide rotation about a fixed pivot point and translation of an X proof mass (e.g., GX proof masses 132, 134, 136, 138) via the pivot point, and by coupling the two exemplary GY or inner-frame gyroscopes to each other (e.g., functionally shown by coupling exemplary GY proof mass 106 to exemplary GY proof mass 108 via springs). Figure 1145 associated with the GX proof mass 136 as exemplarily shown in FIG. 14). Thus, the two inner frame gyroscopes form a four-bar system that deforms into a parallelogram under the action of the drive motion. Furthermore, the coupling of the exemplary GX, outer frame, or saddle gyroscope to the corresponding GY or inner frame gyroscope ensures that the drive motion of the GX, outer frame, or saddle gyroscope is also in anti-phase or opposite direction. Finally, note that the drive motion of the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) that are respectively coupled (e.g., by springs or other coupling structures) to the GY proof masses (e.g., GY proof masses 104, 106, 108, 110) is also in anti-phase or opposite direction. Thus, according to the exemplary aspects described herein, as Figures 1 to 2 The driving motion of the illustrated 3-axis (eg, GX, GY, and GZ) gyroscope may benefit from linear and angular momentum balancing.

[0044] According to various non-limiting embodiments, vibration suppression can be improved by employing balancing masses configured such that their driven motions are opposite to each other and that the net linear and angular momentum of their driven motions is zero. For example, by coupling the various components of the exemplary gyroscope architecture 100, the various components do not move independently of each other. As used herein, motion in the same direction is referred to as common motion or common mode, while motion in opposite directions is referred to as anti-phase motion or differential motion. It will be appreciated that common motion is susceptible to acceleration from external sources (e.g., vibration), where acceleration can be thought of as a uniform body load. Because it is uniform, it is defined as a single direction, or linear acceleration. This linear acceleration will stimulate common motion. However, because the various driven motions are physically coupled to ensure they are anti-phase (non-common) or in opposite directions, the uniform body load or linear acceleration does not, in various non-limiting aspects, produce motion in the sensing mode, thereby improving the ability to suppress vibration. Furthermore, by employing balanced masses arranged so that their driven motions oppose each other and their net linear and angular momentum is zero, the torque applied to the device package on a printed circuit board (PCB) at the drive frequency can be minimized. Thus, in exemplary implementations where multiple MEMS gyroscope devices are mounted to the same PCB, with resonant frequencies close to each other, the exemplary devices described herein can minimize cross-talk, or coupling between components, which can otherwise result in unwanted noise and offset from devices experiencing cross-talk due to mass or momentum imbalance.

[0045] Note that Figure 1 As shown in Figure 2The deflections of the various components of the exemplary gyroscope architecture 100 are depicted as a result of the Coriolis forces resulting from the angular velocity about the various axes when a given direction of the driving motion is positive (e.g., GX+, GY+), or above the XY plane of the MEMS device, and negative (e.g., GX-, GY-), or below the XY plane of the MEMS device. Figures 1 to 2 As seen in FIG, under a given drive motion, the Coriolis forces generated by the angular velocities about the respective axes in a given direction of the drive motion will result in out-of-plane (e.g., out of the XY plane) deflections of the GY or inner frame gyroscope and the GX or outer frame gyroscope or saddle gyroscope. As described above, the exemplary capacitive electrodes 156, 158, 160, 162, 164, 166, 168, 170 can be configured to primarily facilitate detection of the Coriolis forces acting on the respective proof masses due to the angular velocities associated with the MEMS device about the respective axes (e.g., the X or Y axis).

[0046] Note further, however, that the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are respectively coupled (e.g., via springs or other coupling structures) to the GY proof masses (e.g., GY proof masses 104, 106, 108, 110), wherein the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are coupled to each other via coupling mechanisms or lever arms 128, 130 that are configured to couple respective pairs of motions of the four proof masses (e.g., GZ proof masses 120, 122, 124, 126). Thus, the driven motion of the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) is in the Y direction, and in a given direction of the driven motion, the Coriolis force resulting from the angular velocity about the Z axis will result in an in-plane deflection in the X direction (e.g., in the XY plane). Accordingly, the exemplary gyroscope architecture 100 may include further capacitive electrodes (not shown) that may be configured to respectively detect the motion of each GZ proof mass (e.g., GZ proof masses 120, 122, 124, 126) to primarily facilitate detection of the Coriolis force acting on each proof mass due to the angular velocity associated with the MEMS device about the Z axis.

[0047] Please note that regarding Figures 1 to 2The exemplary drive system of the embodiment can be decoupled from the exemplary GX, outer frame or saddle gyroscope, and / or the exemplary GY or inner frame gyroscope such that the drive motion on the exemplary GX, outer frame or saddle gyroscope and the exemplary GY or inner frame gyroscope can be symmetrical, and / or according to various non-limiting aspects, the GZ gyroscope including the GZ proof mass (e.g., GZ proof mass 120, 122, 124, 126) can be configured such that the GZ gyroscope including the GZ proof mass (e.g., GZ proof mass 120, 122, 124, 126) is very compliant with out-of-plane motion. However, as Figures 11 to 12 As shown, it is noted that, in another non-limiting aspect, exemplary embodiments as described herein may experience a parasitic mode on a GZ sensing mode.

[0048] As described above, conventional MEMS vibratory rate gyroscopes may not provide an adequate solution to reduce sensitivity to vibration (e.g., linear and / or angular vibration) and inter-component coupling, reduce in-phase shifts due to suspension forces, and / or reduce sensitivity to packaging stress. However, according to various non-limiting implementations, as described herein, by placing an exemplary drive system in an exemplary drive shuttle (not shown), and by employing weak coupling between out-of-plane gyroscopes (e.g., a GY or inner-frame gyroscope and a GX, outer-frame or saddle gyroscope), various non-limiting embodiments can help minimize out-of-plane forces or suspension forces transmitted to the GZ gyroscope and / or reject them. Furthermore, decoupling the in-plane and out-of-plane gyroscopes can improve cross-axis sensitivity.

[0049] This can result in better offset stability because, as a sensor measuring a quantity of interest (e.g., angular velocity about the Z-axis as determined by detecting the Coriolis force on four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126), the sensor is expected to output a signal proportional to the angular velocity. By decoupling or employing weak coupling between the out-of-plane gyroscopes (e.g., the GY or frame gyroscope and the GX, outer frame or saddle gyroscope) and the in-plane gyroscope (e.g., the GZ gyroscope), the offset or bias error, i.e., the amount of offset between the quantity of interest and the reported quantity (e.g., the Coriolis force due to angular velocity about the Z-axis), will be reduced, thereby reducing the out-of-plane force (or suspension force) on the GZ gyroscope that might otherwise be detected as an applied angular velocity.

[0050] For example, various embodiments described herein can reduce in-phase shifts caused by suspension forces by using exemplary drive shuttles (not shown) on the GX and / or GY gyroscopes. For example, as described above, the GY or inner frame gyroscope and the GX, outer frame or saddle gyroscope are out-of-plane gyroscopes, wherein rotation of the MEMS device about the X-axis or the Y-axis results in out-of-plane motion of the GY proof mass (e.g., GY proof mass 104, 106, 108, 110) and the GX proof mass (e.g., GX proof mass 132, 134, 136, 138). Because the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are coupled to one another via coupling mechanisms or lever arms 128, 130, rotation of the MEMS device about the Z axis will only result in motion of the four exemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) in-plane, or parallel to, the XY plane (i.e., the plane of the MEMS device). By separately defining the motion of the in-plane motion component (GZ) and the out-of-plane motion components (GX, GY), and by connecting the out-of-plane motion components (GX, GY) with the flexible coupling mechanisms (e.g., via couplings 148, 150, 152, 154), the transmission of the suspension forces (and associated deflections) associated with the in-plane motion components (GZ) (e.g., GZ proof masses 120, 122, 124, 126) and the out-of-plane motion components (GX, GY) can be minimized.

[0051] Figure 3 100 , further aspects of a non-limiting embodiment of an exemplary gyroscope architecture 100 as described herein are depicted. Note the relative positions and configurations of the exemplary GY proof masses (e.g., GY proof masses 104 , 106 , 108 , 110 ), exemplary GX proof masses (e.g., GX proof masses 132 , 134 , 136 , 138 ), couplings therebetween, exemplary lever arms 112 , 114 , 116 , 118 , anchor points 302 and various springs 145 (e.g., GZ spring 304 , etc.), couplings (e.g., GX or outer frame gyroscope to drive shuttle coupling 306 , etc.), suspension elements, etc., depicted therein.

[0052] in addition, Figure 3 An exemplary stress isolation frame 308 is depicted according to other non-limiting aspects. Recall that the offset may be caused by the suspension forces generated in the drive shuttle or by deformation of the gyroscope architecture caused by external stresses (e.g., packaging stress). The offset may also be affected by other sources such as packaging stress, temperature effects, etc. In order to decouple the packaging deformation from the exemplary device and thereby minimize the offset caused by the packaging deformation, the exemplary stress isolation frame 308 may be used in various non-limiting embodiments. Although in Figure 1, but an exemplary stress isolation frame 308 may be shown connected to Figure 3 302. Here, it is noted that the exemplary stress isolation frame 308 can be connected to the package or substrate 102, and peripheral components of the exemplary gyroscope architecture 100 can be suspended therefrom and / or anchored to, including but not limited to, the four exemplary drive shuttles 310, the exemplary coupling mechanisms or lever arms 128, 130, and the like. Thus, according to further non-limiting aspects, package bending or deformation sensitivity can be improved, wherein deflections resulting from package bending associated with MEMS devices can be reduced by using one or more of the exemplary stress isolation frames 308 and the exemplary drive shuttles 310, etc., as described herein.

[0053] Figure 3 Further depicted is an exemplary drive sense comb 312 that can be configured to detect drive motion. Note that while in a non-limiting embodiment, the exemplary drive sense comb 312 is depicted as being coupled to a GY or inner-frame gyroscope assembly (e.g., GY proof masses 104, 106, 108, 110), in further non-limiting embodiments, the exemplary drive sense comb 312 can be coupled to other components of the various components of the exemplary gyroscope architecture 100, including, but not limited to, one or more of the four exemplary drive shuttles 310, etc. Figure 3 Further depicted is an exemplary drive comb 314 that can be coupled to the exemplary drive shuttle 310 to generate a drive force at a drive frequency, and which can result in driven motion of various components of the exemplary gyroscope architecture 100, as described above with respect to FIG. Figures 1 to 2 In addition, Figure 3 Other capacitive electrodes 316 are depicted that may be configured to detect motion of individual GZ proof masses (eg, GZ proof masses 120, 122, 124, 126), respectively, as described above with respect to FIG. Figures 1 to 2 Further description of .

[0054] Figure 4 Describes yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture 100. For example, Figure 4 Depicted in Figure 3 The relative positions of the exemplary capacitive electrodes 156, 158, 160, 162, 164, 166, 168, 170 in FIG. 1 are, for example, as described above with respect to FIG. Figure 1 As further described, it can be configured to primarily facilitate detection of Coriolis forces acting on respective proof masses due to angular velocities associated with the MEMS device about respective axes (eg, X or Y axes).

[0055] Figure 5Describes yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture 100. Note that in Figure 5 In FIG, the location of the anchor point 302 is depicted as a black box, rather than as Figures 1 to 2 As shown. Figure 5 Describes about Figure 6 Further description of the inset 502. For example, Figure 6 Yet another exemplary aspect of a non-limiting embodiment of an exemplary gyroscope architecture 100 is depicted. Figure 6 Depicts the relative positions and configurations of the various components of an exemplary gyroscope architecture 100, such as Figures 1 to 5 As shown, for thumbnail 502. Figure 7 Another non-limiting embodiment of an exemplary gyroscope architecture 100 is depicted in Figure 7 The relative positions of exemplary capacitive electrodes 156, 158, 160, 162, 164, 166, 168, 170 are depicted in FIG, which can be configured to primarily facilitate detection of Coriolis forces acting on respective proof masses due to angular velocities associated with the MEMS device about respective axes (e.g., X or Y axes), for example, as described above with respect to Figure 1 and Figure 4 Further note the manufacturing design of the coupling mechanisms or lever arms 128, 130, which are configured to couple the motion of respective pairs of four proof masses (e.g., GZ proof masses 120, 122, 124, 126), which respectively correspond to the configuration of functional fixed pivot points between respective pairs of GZ proof masses, as described above with respect to Figures 1 to 2 As stated.

[0056] Figure 8 Depicts exemplary drive mode shapes for a non-limiting embodiment of an exemplary gyroscope architecture 100 in accordance with further non-limiting aspects described herein. Figure 2 As shown, the drive motion applied via the four example drive shuttles 310 as described above results in deflection and translation of the various components of the example gyroscope architecture 100, as described herein. Figure 8As can be seen from the relative lack of displacement of the in-plane motion component (GZ), the in-plane motion component (GZ) is separated from the out-of-plane motion component (GX) and is limited by the coupling mechanism or lever arms 128, 130, which are configured to couple the motion of the four proof masses (e.g., GZ proof masses 120, 122, 124, 126) in respective pairs. As described herein, various embodiments can be configured to limit the transmission of the out-of-plane motion component (GX, GY) to the in-plane motion component (GZ) (drive shuttle, Z proof mass), and therefore, the transmission of suspension forces associated with the out-of-plane motion components (GX, GY) can be minimized.

[0057] Figure 9 Depicted are exemplary GX mode shapes of a non-limiting embodiment of an exemplary gyroscope architecture 100 in accordance with yet another non-limiting aspect described herein. Figure 9 Relative displacements above and below the XY plane are depicted, where a "+" sign indicates displacement above the XY plane and a "-" sign indicates displacement below the plane, in lieu of a color heat map or appropriate grayscale resolution. Figure 9 As can be seen from the diagram, the GX, frame, or saddle gyroscope sensing mode is a balanced sensing mode, where each GX proof mass is in anti-phase motion, as indicated by Figure 9 The illustrated structure is facilitated by the exemplary fixed pivot points that are functionally created.

[0058] Figure 10 Depicted are exemplary GY mode shapes of a non-limiting embodiment of an exemplary gyroscope architecture in accordance with yet another non-limiting aspect described herein. Figure 10 Relative displacements above and below the XY plane are depicted, where a "+" sign indicates displacement above the XY plane and a "-" sign indicates displacement below the plane, in lieu of a color heat map or appropriate grayscale resolution. Figure 10 As can be seen in , the GY or frame gyroscope sensing mode is a balanced sensing mode, where each GY proof mass is in anti-phase motion (eg, both linear and angular momentum balance). Figure 10 This can be further seen in the relative lack of displacement of the in-plane motion component (GZ) of FIG. 1 , which is separated from the out-of-plane motion component (GX) and is limited by the coupling mechanism or lever arms 128, 130 configured to couple the motion of the four proof masses (e.g., GZ proof masses 120, 122, 124, 126) to respective pairs of proof masses. As various embodiments described herein can be configured to limit the transmission of the out-of-plane motion component (GX, GY) to the in-plane motion component (GZ) (drive shuttle, Z proof mass), the transmission of the suspension forces associated with the out-of-plane motion component (GX, GY) can be minimized. Furthermore, from FIG. Figure 10 As can be seen, it can help to isolate the suspension forces on the drive comb (eg, drive comb 314) from being transferred to the frame proof mass.

[0059] Figure 11 Depicted are exemplary GZ sensing mode shapes of non-limiting embodiments of exemplary gyroscope architectures according to non-limiting aspects described herein. Figure 11 Relative displacements in the XY plane are depicted, where a "+" sign indicates a +X displacement and a "-" sign indicates a -X displacement, in lieu of a color heatmap or appropriate grayscale resolution. Figure 11 As can be seen in FIG, the GZ gyroscope sensing mode is a balanced sensing mode, where each GZ proof mass is in anti-phase motion.

[0060] Figure 12 Depicted are exemplary GZ parasitic mode shapes of a non-limiting embodiment of an exemplary gyroscope architecture according to yet another non-limiting aspect described herein. Figure 12 The relative displacement in the XY plane is depicted, where a "+" sign indicates a + displacement and a "-" sign indicates a - displacement, in lieu of a color heat map or appropriate grayscale resolution. Figure 12 As can be seen in Figure 2, the GZ gyroscope has linear and angular momentum balance parasitic modes.

[0061] Thus, exemplary non-limiting embodiments may include a 3-axis Coriolis rate gyroscope having a substantially 2-dimensional device architecture, a substantially flat geometry, and capable of being fabricated in silicon. In non-limiting aspects, exemplary embodiments as described herein may include two inner frame (e.g., GY) gyroscopes, wherein the inner frame gyroscope facilitates GY sensing mode and drive system coupling, two outer frame gyroscopes or saddle gyroscopes, four drive shuttles coupled to the two outer frame gyroscopes, four GZ proof masses coupled to the GY or inner frame gyroscopes, and / or two lever arms or coupling mechanisms that facilitate coupling the GZ proof masses. In further non-limiting aspects, various exemplary embodiments may be configured such that components may be removed from the exemplary overall architecture to create a single-axis or dual-axis gyroscope and / or may be configured such that the number of proof masses may be halved from the exemplary overall architecture to create a half gyroscope, as further described herein.

[0062] For example, Figure 131 shows a functional block diagram of another non-limiting embodiment of an exemplary gyroscope architecture 100 according to further non-limiting aspects of the present invention. For example, according to non-limiting aspects, the exemplary 3-axis (e.g., GX, GY, and GZ) gyroscope architecture 100 can be reduced to a 2-axis or 1-axis gyroscope by removing components from the architecture, using fewer sensing sensors, etc., and the exemplary gyroscope architecture described herein can be functionally cut in half to create a more compact 3-axis (e.g., GX, GY, and GZ) gyroscope by abandoning the drive and / or sense balance aspects of the exemplary 3-axis (e.g., GX, GY, and GZ) gyroscope structure. For example, as Figure 13 As shown, the four GZ proof masses can be omitted to produce a balanced dual-axis (e.g., XY gyroscope). In another non-limiting aspect, as shown in FIG15 , two GX proof masses or outer frame gyroscopes and corresponding GY or inner frame gyroscopes can be omitted from fabrication to produce a 2-axis gyroscope with half the footprint of a balanced 2-axis gyroscope. In other non-limiting aspects, the GY electrodes 162, 164, 166, 168 can be omitted from fabrication or electrical connections, such that variations of the exemplary gyroscope architecture 100 can produce a 1-axis gyroscope.

[0063] In another non-limiting example, Figure 14 Another functional block diagram of another non-limiting embodiment of an exemplary gyroscope architecture 100 according to further non-limiting aspects of the present invention is shown. For example, by omitting half of the components of the exemplary gyroscope architecture 100, the exemplary gyroscope architecture 100 can produce a more compact, but unbalanced, drive and sense 3-axis gyroscope. Other variations can include omitting the GZ proof mass to produce a 2-axis XY gyroscope with a drive system coupled to a GY or frame gyroscope as described herein.

[0064] Thus, in other non-limiting implementations, an exemplary MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) includes one or more inner-frame gyroscopes (e.g., a GY or inner-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.), for example, as described herein, configured to sense a first component of angular velocity associated with the MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) about a first axis (e.g., a Y-axis). As used herein, a frame gyroscope may be understood to include a guidance mass system consisting of two proof masses and a rotating arm connecting the two proof masses and constraining the proof masses to anti-phase motion. As further used herein, an outer-frame gyroscope may be understood to surround and / or be flexibly coupled to the inner-frame gyroscope.

[0065] As further described herein, an example MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) may further include an outer-frame gyroscope (e.g., a GX or outer-frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.) that is flexibly coupled (e.g., via couplings 148 / 150 / 152 / 154 or portions thereof) to one or more inner-frame gyroscopes (e.g., a GY or inner-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) and configured to sense a second component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100, or a portion thereof) about a second axis (e.g., an X-axis) that may be orthogonal to the first axis (e.g., the Y-axis).

[0066] Additionally, the example MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) may further include two or more proof masses (GZ proof masses 120, 122, 124, 126) coupled to one or more inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including two or more GY proof masses 104, 106, 108, 110, etc.) and configured to sense a third component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) about a third axis (e.g., Z-axis) that may be orthogonal to the first axis (e.g., Y-axis) and the second axis (e.g., X-axis).

[0067] In a non-limiting aspect, motion associated with two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) can be at least partially coupled to in-plane motion (e.g., an XY plane) of one or more inner-frame gyroscopes (e.g., a GY or inner-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) via respective coupling mechanisms (e.g., via coupling mechanisms or lever arms 128, 130), wherein the in-plane motion can be defined with reference to a plane including a first axis (e.g., a Y axis) and a second axis (e.g., an X axis). For example, in another non-limiting aspect, two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) can be configured to facilitate at least partially constraining motion associated with the two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) to conditions of linear and angular momentum balance.

[0068] As further described herein, an exemplary MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) may further include one or more coupling mechanisms (e.g., coupling mechanisms or lever arms 128, 130) between two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) that are configured to force the two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) into anti-phase motion due to a third component of angular velocity applied to the MEMS device (e.g., including the exemplary gyroscope structure 100 or a portion thereof) about a third axis (e.g., the Z-axis).

[0069] Additionally, an exemplary MEMS device (e.g., including the exemplary gyroscope architecture 100 or portions thereof) may further include two or more drive shuttles (e.g., drive shuttle 310) coupled (e.g., via lever arms 112, 114, 116, 118, or portions thereof) to one or more inner-frame gyroscopes (e.g., a GY or inner-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) or outer-frame gyroscopes (e.g., including two or more GY proof masses 104, 106, 108, 110, etc.). The gyroscope may be a GX or outer-frame gyroscope (e.g., a GX or outer-frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.) and configured to force one or more of the one or more inner-frame gyroscopes (e.g., a GY or inner-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) or the outer-frame gyroscope (e.g., a GX or outer-frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.) to vibrate. In a non-limiting aspect, an outer-frame gyroscope (e.g., a GX or outer-frame gyroscope including two or more GX proof masses 132, 134, 136, 138, etc.) can be coupled to one or more inner-frame gyroscopes (e.g., a GY or inner-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) at least in part via the two or more drive shuttles (e.g., drive shuttle 310).

[0070] In another non-limiting aspect, one or more outer-frame gyroscopes (e.g., GX or outer-frame gyroscopes including two or more GX proof masses 132, 134, 136, 138, etc.), one or more inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including two or more GY proof masses 104, 106, 108, 110, etc.), or two or more drive shuttles can be configured to sense drive motion associated with vibration (e.g., via drive sense comb 312). In another non-limiting aspect, two or more drive shuttles (e.g., drive shuttle 310) can be configured to move with anti-phase drive motion and can be configured to minimize transmission of out-of-plane motion of the two or more drive shuttles (e.g., drive shuttle 310) to one or more inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including two or more GY proof masses 104, 106, 108, 110, etc.).

[0071] As further described herein, an example MEMS device (e.g., including example gyroscope architecture 100 or portions thereof) may further include one or more outer-frame gyroscopes (e.g., GX or outer-frame gyroscopes including two or more GX proof masses 132, 134, 136, 138, etc.) or one or more inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including two or more GY proof masses 104, 106, 108, 110, etc.) that may be configured to be driven by a set of drive electrodes (e.g., drive combs 314), e.g., as described herein.

[0072] Furthermore, in other non-limiting embodiments, an example MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) includes one or more inner-frame gyroscopes (e.g., a GY or inner-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) configured to sense a first component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) about a first axis (e.g., the Y-axis), e.g., as described herein.

[0073] As further described herein, an example MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) may further include two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) coupled to one or more inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including two or more GY proof masses 104, 106, 108, 110, etc.) and configured to sense a second component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) about a second axis (e.g., Z-axis) that may be orthogonal to the first axis (e.g., Y-axis).

[0074] Furthermore, in other non-limiting embodiments, an example MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) includes one or more coupling mechanisms between two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) configured to force the two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) into anti-phase motion due to a second component of angular velocity applied to the MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) about a second axis (e.g., the Z-axis), e.g., as described herein. In a non-limiting aspect, the motion associated with two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) can be at least partially coupled to the in-plane motion of one or more inner-frame gyroscopes (e.g., a GY or inner-frame gyroscope including two or more GY proof masses 104, 106, 108, 110, etc.) via respective coupling mechanisms, wherein the in-plane motion can be defined with reference to a plane perpendicular to the second axis (e.g., an XY plane). In another non-limiting aspect, the two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) can be configured to facilitate at least partially constraining the motion associated with the two or more proof masses (e.g., GZ proof masses 120, 122, 124, 126) to a condition of linear and angular momentum balance.

[0075] As further described herein, an exemplary MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) may further include two or more drive shuttles (e.g., drive shuttle 310) coupled to the one or more inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including two or more GY proof masses 104, 106, 108, 110, etc.), the drive shuttles configured to force the one or more inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including two or more GY proof masses 104, 106, 108, 110, etc.) to vibrate. In non-limiting aspects, the two or more drive shuttles (e.g., drive shuttle 310) may be configured to move with anti-phase drive motions and may be configured to minimize the transmission of out-of-plane motion of the two or more drive shuttles (e.g., drive shuttle 310) to the one or more inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including two or more GY proof masses 104, 106, 108, 110, etc.).

[0076] In other non-limiting embodiments, an exemplary MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) includes two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) configured to sense a first component of angular velocity about a first axis (e.g., a Y-axis) associated with the MEMS device (e.g., including the exemplary gyroscope structure 100 or a portion thereof), e.g., as described herein. As non-limiting examples, an exemplary MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) can be configured to operate as one or more of a dual-axis gyroscope or a three-axis gyroscope. In a non-limiting aspect, one of the two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) can be flexibly coupled (e.g., via a spring or flexure 145) to the other of the two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) and configured to constrain out-of-plane motion and in-plane motion of the two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) to be in phase.

[0077] As further described herein, an example MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) may further include two off-frame gyroscopes (e.g., GX or off-frame gyroscopes including GX proof masses 132, 134, 136, 138, etc.) configured to sense a second component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) about a second axis (e.g., an X-axis) that may be orthogonal to the first axis (e.g., a Y-axis). In non-limiting aspects, two outer-frame gyroscopes (e.g., GX or outer-frame gyroscopes including GX proof masses 132, 134, 136, 138, etc.) can be coupled (e.g., by couplings 148 / 150 / 152 / 154 or portions thereof) to two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including two or more GY proof masses 104, 106, 108, 110, etc.) at least in part via four drive shuttles (e.g., drive shuttle 310). In another non-limiting aspect, one or more outer-frame gyroscopes (e.g., GX or outer-frame gyroscopes including two or more GX proof masses 132, 134, 136, 138, etc.) or two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) can be configured to be driven by a set of drive electrodes (e.g., drive combs 314, as further described herein).

[0078] As another non-limiting example, two outer-frame gyroscopes (e.g., GX or outer-frame gyroscopes including GX proof masses 132, 134, 136, 138, etc.) may be flexibly coupled (e.g., via couplings 148 / 150 / 152 / 154 or portions thereof) to two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) and configured to constrain out-of-plane motion and in-plane motion of the two outer-frame gyroscopes (e.g., GX or outer-frame gyroscopes including GX proof masses 132, 134, 136, 138, etc.) and the two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) to be in phase.

[0079] Additionally, the example MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) may further include four proof masses (e.g., GZ proof masses 120, 122, 124, 126) coupled to two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) and configured to sense a third component of angular velocity associated with the MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) about a third axis (e.g., Z-axis) that may be orthogonal to the first axis (e.g., Y-axis) and the second axis (e.g., X-axis).

[0080] Furthermore, in other non-limiting implementations, an exemplary MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) includes two coupling mechanisms (e.g., coupling mechanisms or lever arms 128, 130) associated with a pair of four proof masses (e.g., GZ proof masses 120, 122, 124, 126) configured to provide a positive force applied to the MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) about a third axis (e.g., the Z axis). The system may further comprise a plurality of proof masses (e.g., GZ proof masses 120, 122, 124, 126) configured to force pairs of four proof masses (e.g., GZ proof masses 120, 122, 124, 126) into anti-phase motion due to a third component of the angular velocity of the structure 100 or a portion thereof, and configured to generate no net angular momentum in the four proof masses (e.g., GZ proof masses 120, 122, 124, 126) due to two inner-frame gyroscopes (e.g., the GY or inner-frame gyroscopes including the GY proof masses 104, 106, 108, 110, etc.), e.g., as described herein.

[0081] As further described herein, an example MEMS device (e.g., including the example gyroscope architecture 100 or portions thereof) may also include four drive shuttles (e.g., drive shuttle 310) coupled to one or more of the two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) or outer-frame gyroscopes (e.g., GX or outer-frame gyroscopes including two or more GX proof masses 132, 134, 136, 138, etc.) and configured to force one or more of the two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.) or outer-frame gyroscopes (e.g., GX or outer-frame gyroscopes including two or more GX proof masses 132, 134, 136, 138, etc.) to vibrate. In a non-limiting aspect, one or more outer-frame gyroscopes (e.g., GX or outer-frame gyroscopes including two or more GX proof masses 132, 134, 136, 138, etc.), two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.), or one or more of four drive shuttles (e.g., drive shuttle 310) can be configured to sense drive motion associated with vibration (e.g., by driving sense comb 312). In another non-limiting aspect, pairs of four drive shuttles (e.g., drive shuttle 310) can be configured to move with anti-phase drive motion and can be configured to minimize transmission of out-of-plane motion of the pairs of four drive shuttles (e.g., drive shuttle 310) to the two inner-frame gyroscopes (e.g., GY or inner-frame gyroscopes including GY proof masses 104, 106, 108, 110, etc.), as further described herein.

[0082] Furthermore, in other non-limiting embodiments, an example MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) includes a coupling mechanism (e.g., via a fixed pivot point 144 and corresponding outer frame lever arms 140 / 142 or portions thereof) associated with two outer frame gyroscopes (e.g., GX or outer frame gyroscopes including GX proof masses 132, 134, 136, 138, etc.) that is configured to force the two outer frame gyroscopes (e.g., GX or outer frame gyroscopes including GX proof masses 132, 134, 136, 138, etc.) into anti-phase motion due to a second component of angular velocity applied to the MEMS device (e.g., including the example gyroscope architecture 100 or a portion thereof) about a second axis (e.g., the X-axis), e.g., as described herein.

[0083] Other non-limiting implementations of the exemplary MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) may include a stress isolation frame (e.g., stress isolation frame 308) coupled to the MEMS device (e.g., including the exemplary gyroscope architecture 100 or a portion thereof) and configured to reject stress transmitted to the MEMS device (e.g., including the exemplary gyroscope structure 100 or a portion thereof) from a package associated with the MEMS device (e.g., including the exemplary gyroscope structure 100 or a portion thereof), e.g., as further described herein.

[0084] In view of the subject matter described above, various methods may be implemented according to the methods of operation for the various embodiments described herein, according to the movement of various components, actuation of the drive system, experience of applied angular momentum, sensing thereof, etc., as well as methods for manufacturing in the form of various manufacturing steps to form part of the various embodiments herein. For purposes of simplicity of explanation, such methods may be described as a series of steps, and it should be understood and appreciated that, based on a review of the embodiments herein, one skilled in the art will understand that such illustrations or corresponding descriptions are not limited to the order of the steps, as some steps may occur in a different order and / or concurrently with other steps depicted and / or described herein.

[0085] The foregoing includes examples of embodiments of the present invention. Although specific embodiments and examples have been described in the present invention for illustrative purposes, as those skilled in the relevant art will recognize, various modifications considered within the scope of these embodiments and examples are possible. Of course, in order to describe the claimed subject matter, it is impossible to describe every conceivable combination of configurations, components and / or methods, but it should be understood that many further combinations and arrangements of various embodiments are possible. Therefore, although the disclosed subject matter has been described according to the embodiments shown, it will be readily appreciated by those skilled in the art that there may be variations in the embodiments, and these variations will be within the spirit and scope of the disclosed subject matter. Therefore, those skilled in the art can make many modifications without departing from the spirit and scope of the disclosed subject matter. Therefore, the claimed subject matter is intended to include all these changes, modifications and variations that fall within the spirit and scope of the appended claims.

[0086] Furthermore, the words “example” or “exemplary” as used herein refer to serving as an example, instance, or illustration. Any aspect or design described herein as “exemplary” is not necessarily to be construed as preferred or advantageous over other aspects or designs. Rather, the word “exemplary” is used to present concepts in a concrete manner. Throughout this application, the term “or” is intended to mean an inclusive “or,” not an exclusive “or.” That is, unless otherwise specified or clear from the context, “X employs A or B” means any naturally inclusive permutation. That is, if X employs A; X employs B; or X employs both A and B, then in any of the above cases, “X employs A or B” is satisfied. Furthermore, unless otherwise specified or clear from the context to be in the singular, the terms “a” and “an” as used in this application and the appended claims should generally be construed to mean “one or more.”

[0087] Furthermore, while an aspect may be disclosed with respect to only one of several embodiments, the features described may be combined with one or more other features of other embodiments as may be necessary and advantageous for any given or particular application. Furthermore, to the extent that the terms "include," "comprising," "having," "containing," variations thereof, and other similar terms are used in the detailed description or claims, these terms are intended to be inclusive in a manner similar to the term "comprising," as open transition words, without excluding any additional or other elements.

Claims

1. A micro-electromechanical system (MEMS) device, comprising: at least one in-frame gyroscope configured to sense a first component of angular velocity associated with the MEMS device about a first axis; an outer-frame gyroscope flexibly coupled to the at least one inner-frame gyroscope and configured to sense a second component of angular velocity associated with the MEMS device about a second axis orthogonal to the first axis; as well as At least two drive shuttles are coupled to at least one of the at least one inner frame gyroscope or the outer frame gyroscope and are configured to force the at least one of the at least one inner frame gyroscope or the outer frame gyroscope to vibrate, wherein the outer frame gyroscope is coupled to the at least one inner frame gyroscope at least in part through the at least two drive shuttles.

2. The MEMS device according to claim 1, further comprising: At least two proof masses are coupled to the at least one inner-frame gyroscope and are configured to sense a third component of angular velocity associated with the MEMS device about a third axis orthogonal to the first axis and the second axis.

3. The MEMS device according to claim 2, wherein: Motion associated with the at least two proof masses is at least partially coupled to in-plane motion of the at least one inner-frame gyroscope via respective coupling mechanisms, and wherein the in-plane motion is defined with reference to a plane including the first axis and the second axis.

4. The MEMS device according to claim 3, wherein: The at least two proof masses are configured to help at least partially define the motion associated with the at least two proof masses to a condition of linear and angular momentum balance.

5. The MEMS device according to claim 2, further comprising: At least one coupling mechanism between the at least two proof masses is configured to force the at least two proof masses into anti-phase motion as a result of the third component of angular velocity applied to the MEMS device about the third axis.

6. The MEMS device according to claim 1, wherein: At least one of the outer-frame gyroscope, the at least one inner-frame gyroscope, or at least one of the at least two drive shuttles is configured to sense drive motion associated with the vibration.

7. The MEMS device according to claim 1, wherein: The at least two drive shuttles are configured to drive motion in anti-phase and are configured to minimize transmission of out-of-plane motion of the at least two drive shuttles to at least one of the outer-frame gyroscope or the at least one inner-frame gyroscope.

8. The MEMS device according to claim 1, wherein: At least one of the outer frame gyroscope or the at least one inner frame gyroscope is configured to be driven by a set of drive electrodes.

9. A micro-electromechanical system (MEMS) device comprising: at least one in-frame gyroscope configured to sense a first component of angular velocity associated with the MEMS device about a first axis; at least two proof masses coupled to the at least one inner-frame gyroscope and configured to sense a second component of angular velocity associated with the MEMS device about a second axis orthogonal to the first axis; at least one coupling mechanism between the at least two proof masses configured to force the at least two proof masses into anti-phase motion as a result of the second component of angular velocity applied to the MEMS device about the second axis; as well as At least two drive shuttles are coupled between the at least one inner frame gyroscope and a set of drive electrodes and are configured to force the at least one inner frame gyroscope to vibrate.

10. The MEMS device according to claim 9, wherein: Motion associated with the at least two proof masses is at least partially coupled to in-plane motion of the at least one inner-frame gyroscope via respective coupling mechanisms, and wherein the in-plane motion is defined with reference to a plane perpendicular to the second axis.

11. The MEMS device according to claim 10, wherein: The at least two proof masses are configured to help define, at least in part, the motion associated with the at least two proof masses to a condition of linear and angular momentum balance.

12. The MEMS device according to claim 9, wherein: The at least two drive shuttles are configured to move with anti-phase drive motions and are configured to minimize transmission of out-of-plane motions of the at least two drive shuttles to the at least one inner-frame gyroscope.

13. A micro-electromechanical system (MEMS) device comprising: two in-frame gyroscopes configured to sense a first component of angular velocity associated with the MEMS device about a first axis; two outer frame gyroscopes configured to sense a second component of angular velocity associated with the MEMS device about a second axis orthogonal to the first axis; four proof masses coupled to the two inner-frame gyroscopes and configured to sense a third component of angular velocity associated with the MEMS device about a third axis orthogonal to the first axis and the second axis; as well as The two outer frame gyroscopes are coupled to the two inner frame gyroscopes at least partially via four drive shuttles.

14. The MEMS device according to claim 13, further comprising: Two coupling mechanisms associated with the pairs of four proof masses are configured to force the pairs of four proof masses into anti-phase motion due to the third component of angular velocity applied to the MEMS device about the third axis and are configured to cause no net angular momentum to be generated in the four proof masses due to the two inner-frame gyroscopes.

15. The MEMS device according to claim 13, wherein: The MEMS device is configured to operate as at least one of a single-axis gyroscope, a dual-axis gyroscope, or a three-axis gyroscope.

16. The MEMS device according to claim 13, wherein: The four drive shuttles are coupled to at least one of the two inner frame gyroscopes or the outer frame gyroscope and are configured to force the at least one of the two inner frame gyroscopes or the outer frame gyroscope to vibrate.

17. The MEMS device according to claim 16, wherein: At least one of the outer frame gyroscope, the two inner frame gyroscopes, or at least one of the four drive shuttles is configured to sense drive motion associated with the vibration.

18. The MEMS device according to claim 16, wherein: The pairs of four drive shuttles are configured to move with anti-phase drive motions and are configured to minimize transmission of out-of-plane motions of the pairs of four drive shuttles to the two inner-frame gyroscopes.

19. The MEMS device of claim 13, wherein: At least one of the outer frame gyroscope or at least one of the two inner frame gyroscopes is configured to be driven by a set of drive electrodes.

20. The MEMS device of claim 13, wherein: The two outer frame gyroscopes are flexibly coupled to the two inner frame gyroscopes and are configured to constrain out-of-plane motion and in-plane motion of the two outer frame gyroscopes and the two inner frame gyroscopes to be in phase.

21. The MEMS device of claim 20, wherein: One of the two inner frame gyroscopes is flexibly coupled to the other of the two inner frame gyroscopes and is configured to constrain out-of-plane motion and in-plane motion of the two inner frame gyroscopes to be in phase.

22. The MEMS device of claim 13, further comprising: A coupling mechanism associated with the two outer frame gyroscopes is configured to force the two outer frame gyroscopes into anti-phase motion as a result of the second component of angular velocity applied to the MEMS device about the second axis.

23. The MEMS device of claim 13, further comprising: A stress isolation frame couples the MEMS device to at least one of a substrate or a package including the MEMS device.

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