A vertical high-temperature furnace vacuum sealing reflective screen furnace structure

Abstract

The present invention provides a vacuum-sealed reflection screen furnace structure for a vertical high-temperature furnace, comprising a furnace cover, a furnace shell, and a furnace bottom flange which are fastened by bolts, sealed with a sealing ring, and a vacuum-sealed furnace chamber in which a sealing flange and a process pipe are movably sealed. The interior of the vacuum-sealed furnace chamber includes a process chamber defined by the process pipe for carrying out a process of producing process pieces. A furnace cover heat insulation screen, a furnace shell heat insulation screen, and a furnace bottom heat insulation screen are arranged inside the vacuum-sealed furnace chamber. A labyrinth-shaped sealing joint is formed between the furnace cover heat insulation screen, the furnace shell heat insulation screen, and the furnace bottom heat insulation screen. A heating chamber is provided between the furnace cover heat insulation screen, the furnace shell heat insulation screen, the furnace bottom heat insulation screen and the process pipe, and a heater is provided in the heating chamber. The present invention provides a furnace cover heat insulation screen, a furnace shell heat insulation screen, and a furnace bottom heat insulation screen formed by stacking multiple layers of heat insulation screens in a vacuum-sealed furnace chamber, and the three groups of heat insulation screens have labyrinthine sealing seams, so that the heat diffused outward from the vertical high-temperature oxidation furnace is reflected, which not only ensures that the temperature reached by heating can be maintained stably and energy consumption is reduced, but also reduces the high temperature impact on components outside the furnace.

Description

Technical Field

[0001] The invention relates to the technical field of high-temperature oxidation furnaces and annealing furnaces, and in particular to a vertical high-temperature furnace vacuum-sealed reflective screen furnace structure. Background Art

[0002] As a typical representative of third-generation semiconductor materials, SIC is an extremely ideal semiconductor material for high-temperature, high-frequency, radiation-resistant, and high-power applications. The main feature of the diffusion, oxidation, and annealing processes of SIC materials is that they require high temperatures or vacuum plus high temperatures and process gas conditions. In particular, high temperatures, generally 1400°C-2000°C, are impossible to achieve in the structure, method, and materials of components such as heaters and process chambers of second-generation semiconductor equipment with an operating temperature of 800-1200°C.

[0003] Conventional furnace structures typically operate at temperatures between 800°C and 1200°C. Traditionally, these furnaces consist of spirally wound wire, insulated, and wrapped in insulation material. However, these structures and materials are not suitable for high-temperature furnace applications. Therefore, a vertical high-temperature furnace vacuum-sealed reflective screen furnace structure is needed to address this issue. Summary of the Invention

[0004] In order to solve the above technical problems, the present invention provides a vertical high-temperature furnace vacuum sealed reflective screen furnace structure, which has multiple functions such as high-temperature heating, strong heat preservation, temperature reflection, and ensuring that the temperature transmitted to the outer shell is sufficiently low.

[0005] The present invention provides a vertical high-temperature furnace vacuum-sealed reflective screen furnace structure, comprising a furnace cover, a furnace shell, and a furnace bottom flange fastened by bolts, sealed with a sealing ring, and a vacuum-sealed furnace chamber with a sealing flange and a process pipe installed in a movable seal. The vacuum-sealed furnace chamber includes a process chamber defined by the process pipe for carrying out a process of a process sheet.

[0006] The vacuum sealed furnace is provided with a furnace cover heat insulation screen, a furnace shell heat insulation screen, and a furnace bottom heat insulation screen inside, and a labyrinth-shaped sealed seam is formed between the furnace cover heat insulation screen, the furnace shell heat insulation screen, and the furnace bottom heat insulation screen. A heating cavity is provided between the furnace cover heat insulation screen, the furnace shell heat insulation screen, the furnace bottom heat insulation screen and the process pipe, and a heater is provided in the heating cavity;

[0007] The heater is hoisted in the heating chamber through a heater electrode passing through the furnace cover and the furnace cover heat insulation screen, and an insulating sleeve is provided on the portion of the heater electrode not exposed in the heating chamber.

[0008] As an improvement, a furnace shell vacuum tube is set through the furnace shell insulation screen and the furnace shell to realize the vacuum state of the vacuum sealed furnace chamber, and a furnace shell air inlet pipe is used to fill inert gas into the vacuum sealed furnace chamber.

[0009] As an improvement, the furnace cover heat insulation screen, the furnace shell heat insulation screen and the furnace bottom heat insulation screen are all composed of heat insulation screens stacked at intervals.

[0010] As an improvement, the heat insulation screen is fixedly mounted on the heat insulation screen mounting plate by heat insulation screen mounting bolts, and the heat insulation screen mounting plate is fixedly connected to the furnace cover, furnace shell and furnace bottom flange respectively through support components.

[0011] As an improvement, the heat insulation screen mounting bolt sleeve is provided with a heat insulation screen spacer sleeve.

[0012] As an improvement, the heat insulation screen includes at least two of tungsten heat insulation screen, molybdenum heat insulation screen and stainless steel heat insulation screen.

[0013] As an improvement, the furnace outer part of the heater electrode is sheathed with an electrode insulating water-cooling sealing sleeve, the heater electrode and the electrode insulating water-cooling sealing sleeve are sealed by a sealing ring, the electrode water-cooling sealing sleeve is fixed to the furnace cover, and a wiring assembly is also provided at the end of the heater electrode for external power supply.

[0014] As an improvement, a thermocouple sealing seat is provided on the outside of the furnace shell, and the temperature-controlling thermocouple is sleeved in the thermocouple sealing seat through a thermocouple sealing ring.

[0015] As an improvement, the inert gas includes one of Ar2 or N2.

[0016] As an improvement, the furnace shell is a single-layer plate or a double-layer plate with water cooling.

[0017] Compared with the prior art, the vertical high-temperature furnace vacuum sealed reflective screen furnace structure provided by the present invention has the following beneficial effects:

[0018] (1) The present invention provides a vertical high-temperature furnace vacuum-sealed reflective screen furnace structure, which arranges a furnace cover heat insulation screen, a furnace shell heat insulation screen, and a furnace bottom heat insulation screen in the vacuum-sealed furnace chamber, and adopts a labyrinth-shaped sealing seam to prevent the internal temperature from dissipating from the joint surface, so that the temperature reached by the vertical high-temperature oxidation furnace can be stably maintained, thereby reducing energy consumption.

[0019] (2) The present invention provides a vertical high-temperature furnace with a vacuum-sealed reflective screen furnace structure. The furnace cover insulation screen, the furnace shell insulation screen, and the furnace bottom insulation screen adopt the method of spaced and stacked insulation screens, which can effectively reflect the temperature and prevent the external structures such as the furnace shell from being affected by high temperature. Choosing appropriate materials for the insulation screens at different positions can reduce costs.

[0020] (3) The present invention provides a vertical high-temperature furnace vacuum sealed reflective screen furnace structure, which effectively monitors the temperature inside the furnace by setting a temperature-controlled thermocouple to measure the temperature inside the furnace, thereby ensuring the safety of the process and the product qualification rate.

[0021] Based on the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will become more aware of the above and other objects, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic structural diagram of an embodiment of a vertical high-temperature furnace vacuum-sealed reflective screen hearth structure provided by the present invention;

[0023] Figure 2 for Figure 1 The structural diagram of A shown;

[0024] Figure 3 for Figure 1 The structural diagram of B shown;

[0025] Among them, 1. furnace cover, 2. furnace shell, 3. furnace bottom flange, 4. sealing flange, 5. process pipe, 6. furnace cover heat insulation screen, 7. furnace shell heat insulation screen, 8. furnace bottom heat insulation screen, 9. heater, 10. heater electrode, 11. insulation sleeve, 12. furnace shell vacuum tube, 13. furnace shell air inlet pipe, 14. heat insulation screen, 15. heat insulation screen mounting bolts, 16. heat insulation screen mounting plate, 17. heat insulation screen spacer, 18. electrode insulation water-cooled sealing sleeve, 19. wiring assembly, 20. thermocouple sealing seat, 21. temperature control thermocouple, 22. angle steel. DETAILED DESCRIPTION

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] See also Figure 1-3 The first embodiment of the present invention provides a vertical high-temperature furnace vacuum-sealed reflection screen furnace structure, including a furnace cover 1, a furnace shell 2, and a furnace bottom flange 3 fastened by bolts, sealed with a sealing ring, and the furnace bottom flange 3 is movably sealed and equipped with a sealing flange 4 and a process pipe 5. The interior of the vacuum-sealed furnace includes a process chamber defined by the process pipe 5, which is used to carry out the process of the process sheet.

[0028] Among them, the movably sealed sealing flange 4 and the process pipe 5 are in a sealed state with the furnace bottom flange 3, forming two independent sealed spaces, namely the vacuum sealed furnace and the process chamber formed by the process pipe 5 and the sealing flange 4. In this state, the heater 9 in the furnace is heated in an oxygen-free environment, and the process chamber carries out the oxidation and vacuum annealing process of the process sheet; when the process of the process sheet is completed, the sealing flange 4 is moved away by certain technical means. At this time, the furnace is still in a vacuum state, but the process chamber is in a non-vacuum state, and processes requiring a vacuum environment cannot be carried out. However, the process chamber can continue to carry out other processes that do not require a vacuum environment, such as an oxidation process, by filling the process chamber with process gas; or the process sheet can be taken and placed without filling the process gas.

[0029] The furnace shell 2 can be a single-layer plate or a double-layer plate with water cooling. The drawings only show the single-layer plate form.

[0030] The vacuum sealed furnace is also equipped with a furnace cover heat insulation screen 6, a furnace shell heat insulation screen 7, and a furnace bottom heat insulation screen 8. There is a labyrinth-shaped sealing seam between the three to prevent the internal heat from dissipating smoothly. A heating cavity is provided between the furnace cover heat insulation screen 6, the furnace shell heat insulation screen 7, the furnace bottom heat insulation screen 8 and the process pipe 5. A heater 9 is provided in the heating cavity. Figure 1-3 It is a cross-sectional view, and the heater 9 is actually cylindrical;

[0031] The heater 9 is hoisted in the heating chamber through a heater electrode 10 passing through the furnace cover 1 and the furnace cover heat insulation screen 6. The portion of the heater electrode 10 not exposed in the heating chamber is covered with an insulating sleeve 11.

[0032] It's important to note that the labyrinthine sealing seams of the three sets of heat shields are non-contact, ensuring that the reflection of heat radiation from different directions is not disturbed. While there are gaps in the labyrinthine sealing seams, allowing for some heat dissipation, the amount is minimal. Furthermore, the portion of the heater electrode 10 not exposed to the heating chamber is covered with an insulating sleeve 11, ensuring that the current in the heater electrode 10 does not short-circuit with the heat shield (because the heat shield is made of metal).

[0033] In the second embodiment, the furnace cover heat shield 6, the furnace shell heat shield 7, and the furnace bottom heat shield 8 are all composed of spaced-apart, stacked heat shields 14. The spacing is generally between 8 and 10 mm. This arrangement not only facilitates the formation of a labyrinthine sealing seam, but also prevents mutual interference between the heat shields in each layer. This is because the materials of the heat shields 14 within each set of heat shields vary from the inside out, for example, from tungsten, molybdenum, or stainless steel. The material types can be two or more, depending on the maximum temperature within the furnace and the heat resistance of the heat shield material. Furthermore, selecting materials based on temperature also reduces costs.

[0034] The heat shield 14 is mounted on the heat shield mounting plate 16 by means of heat shield mounting bolts 15. The heat shield mounting plate 16 is fixedly connected to the furnace cover 1, furnace shell 2 and furnace bottom flange 3 through support components. The support components can be of a commonly used structure, for example Figure 1-3 In the figure, the fixing structure of the furnace cover 1 and the furnace bottom flange 3 and the corresponding heat insulation screen mounting plate 16 is a reserved protrusion, and the furnace shell 2 and the corresponding heat insulation screen mounting plate 16 are fixed with the reserved protrusion fixed by the angle steel 22. Both are conventional technologies and will not be described in detail here.

[0035] It should be noted that the heat insulation screen mounting bolts 15 should also be covered with a heat insulation screen spacer 17 for separating the heat insulation screen layers.

[0036] The third embodiment is based on the first embodiment. The furnace outer part of the heater electrode 10 is sleeved with an electrode insulating water-cooling sealing sleeve 18. The heater electrode 10 and the electrode insulating water-cooling sealing sleeve 18 are sealed by a sealing ring. The electrode insulating water-cooling sealing sleeve 18 and the furnace cover 1 are sealed and consolidated by a sealing ring. A wiring assembly 19 is also provided at the end of the heater electrode 10 for external power supply.

[0037] The fourth embodiment, based on the first embodiment, includes a furnace shell vacuum tube 12 extending through the furnace shell heat shield 7 and the furnace shell 2 to achieve a vacuum in the vacuum-sealed furnace chamber. A furnace shell air inlet pipe 13 is used to fill the vacuum-sealed furnace chamber with an inert gas, preferably Ar2 or N2. After vacuuming, the inert gas is then introduced, further ensuring an oxygen-free furnace chamber and protecting the heater 9 and the furnace cover heat shield 6, furnace shell heat shield 7, and furnace bottom heat shield 8.

[0038] The fifth embodiment is based on the first embodiment. A thermocouple sealing seat 20 is provided outside the furnace shell 2. A temperature-controlling thermocouple 21 is sheathed in the thermocouple sealing seat 20 via a thermocouple sealing ring. The temperature-controlling thermocouple 21 is used to detect the temperature inside the furnace and perform precise control.

[0039] The scope of the present invention is defined by the appended claims rather than the foregoing description, and all changes that fall within the meaning and range of equivalents of the claims are intended to be embraced within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0040] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A vertical high-temperature furnace vacuum-sealed reflective screen furnace structure, comprising a furnace cover (1), a furnace shell (2), and a furnace bottom flange (3) fastened by bolts, sealed by a sealing ring, and a vacuum-sealed furnace chamber with a sealing flange (4) and a process pipe (5) movably mounted on the furnace bottom flange (3), wherein the vacuum-sealed furnace chamber includes a process chamber defined by the process pipe (5) for carrying out a process of a process sheet. It is characterized by: A furnace cover heat insulation screen (6), a furnace shell heat insulation screen (7), and a furnace bottom heat insulation screen (8) are provided inside the vacuum sealed furnace chamber, and labyrinth-shaped sealed joints are formed between the furnace cover heat insulation screen, the furnace shell heat insulation screen, and the furnace bottom heat insulation screen. A heating chamber is provided between the furnace cover heat insulation screen, the furnace shell heat insulation screen, the furnace bottom heat insulation screen, and the process pipe (5), and a heater (9) is provided in the heating chamber. The heater is hoisted in the heating chamber via a heater electrode (10) passing through the furnace cover and the furnace cover heat insulation screen, and the portion of the heater electrode not exposed in the heating chamber is covered with an insulating sleeve (11); A furnace shell vacuum tube (12) is provided through the furnace shell heat insulation screen and the furnace shell, for realizing a vacuum state in the vacuum sealed furnace chamber, and a furnace shell air inlet pipe (13) is provided, for filling inert gas into the vacuum sealed furnace chamber; The heat shield is fixedly mounted on a heat shield mounting plate (16) via heat shield mounting bolts (15), and the heat shield mounting plate is fixedly connected to the furnace cover, furnace shell, and furnace bottom flange respectively via support components; The heat shield mounting bolts (15) are sleeved with heat shield spacers (17); The heat shield includes at least two of tungsten heat shield, molybdenum heat shield and stainless steel heat shield; The furnace outer portion of the heater electrode (10) is sheathed with an electrode insulating water-cooling sealing sleeve (18), the heater electrode and the electrode insulating water-cooling sealing sleeve are sealed by a sealing ring, the electrode insulating water-cooling sealing sleeve is fixed to the furnace cover, and a wiring assembly (19) is also provided at the end of the heater electrode for connecting to an external power supply; A thermocouple sealing seat (20) is provided on the outside of the furnace shell, and a temperature-controlling thermocouple (21) is sleeved in the thermocouple sealing seat (20) via a thermocouple sealing ring; The inert gas includes one of Ar2 or N2.

2. The vertical high-temperature furnace vacuum sealed reflective screen furnace structure according to claim 1, characterized in that: The furnace cover heat insulation screen, the furnace shell heat insulation screen and the furnace bottom heat insulation screen are all composed of heat insulation screens (14) stacked at intervals.

3. The vertical high-temperature furnace vacuum sealed reflective screen furnace structure according to claim 1, characterized in that: The furnace shell is a single-layer plate or a double-layer plate with water cooling.

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