Air inlet device for a heating device

Abstract

The application provides an air inlet device for a heating device, which comprises a first air inlet assembly and a first air outlet assembly. The first air inlet assembly comprises a first air inlet ring pipe, a first air inlet branch pipe and a second air inlet branch pipe. The first air inlet ring pipe surrounds an inner container. The first air inlet branch pipe is communicated to the radial inner side of a material heating area. The second air inlet branch pipe is communicated to the radial outer side of the material heating area. The first air outlet assembly comprises a first air outlet ring pipe, a first air outlet branch pipe and a second air outlet branch pipe. The first air outlet ring pipe surrounds the inner container. The first air outlet branch pipe is communicated to the radial inner side of the material heating area. The second air outlet branch pipe is communicated to the radial outer side of the material heating area. By using the above technical scheme, the gas is simultaneously introduced into and discharged from the radial inner side and the radial outer side of the material heating area, so that the heating device can uniformly heat the material, thereby realizing the large-scale of the heating device.

Description

Technical Field

[0001] This application relates to an air inlet device for a heating device. Background Technology

[0002] In heating devices such as those used in deposition furnaces, the heating chamber can uniformly heat the material pipe placed between the air guide and the inner liner, promoting the rapid deposition reaction of the raw material gas within the material pipe. The heating effect plays a crucial role in the production efficiency and product quality of the deposition furnace.

[0003] Currently, hot air is distributed to multiple branch pipes through a ring pipe, and then passes through the inner liner and enters the heating chamber radially from the outside. The hot air enters evenly into the gaps between the material pipes along the circumference of the heating chamber. The air guide duct is located at the center of the heating chamber, which can guide the airflow to be evenly distributed along the axial and circumferential directions of the heating chamber.

[0004] Since hot air can only enter the gap of the material pipe area from the outside, when the size of the deposition furnace increases, the number of material pipes arranged radially along the heating chamber increases. As the flow resistance of hot air in the radial direction increases, a large temperature gradient will exist in the radial direction, making it difficult to achieve uniform heating, which in turn affects the production efficiency and product quality of the deposition furnace. Summary of the Invention

[0005] This application aims to provide an air inlet device for a heating device that can achieve uniform heating in large-scale heating devices.

[0006] This application discloses an air inlet device for a heating apparatus, the heating apparatus comprising a furnace body, the furnace body having a material heating zone, the material heating zone being annular, the outer peripheral surface of the material heating zone forming an inner liner, and the inner peripheral surface of the material heating zone forming an air guide duct.

[0007] The air inlet device for the heating device includes:

[0008] A first air intake assembly, comprising a first air intake ring pipe, a first air intake branch pipe, and a second air intake branch pipe, wherein the first air intake ring pipe surrounds the inner liner, the first air intake branch pipe is connected to the radially inner side of the material heating zone, and the second air intake branch pipe is connected to the radially outer side of the material heating zone; and

[0009] The first venting assembly includes a first venting ring pipe, a first venting branch pipe, and a second venting branch pipe. The first venting ring pipe surrounds the inner liner, the first venting branch pipe is connected to the radial inner side of the material heating zone, and the second venting branch pipe is connected to the radial outer side of the material heating zone.

[0010] Preferably, the first air intake assembly and the first air outlet assembly are used to pass high-temperature gas, and the first air intake assembly is located above the first air outlet assembly.

[0011] Preferably, the first intake branch pipe and the second intake branch pipe are arranged alternately in the circumferential direction of the heating device.

[0012] The first and second air outlet branches are arranged alternately in the circumferential direction of the heating device.

[0013] Preferably, the air guide duct is provided with a through hole, and the first air inlet branch pipe and the first air outlet branch pipe extend into the internal space of the air guide duct, so that the airflow can flow through the through hole to the radially inner part of the material heating zone.

[0014] Preferably, the air inlet device for the heating device further includes a partition that divides the internal space of the air duct into two independent spaces, with the first air inlet assembly and the first air outlet assembly located on both sides of the partition.

[0015] Preferably, the air inlet device for the heating device further includes:

[0016] The second air intake assembly includes a second air intake ring pipe, a third air intake branch pipe, and a fourth air intake branch pipe. The second air intake ring pipe surrounds the inner liner. The third air intake branch pipe is connected to the radially inner side of the material heating zone, and the fourth air intake branch pipe is connected to the radially outer side of the material heating zone.

[0017] The second air outlet assembly includes a second air outlet ring pipe, a third air outlet branch pipe, and a fourth air outlet branch pipe. The second air outlet ring pipe surrounds the inner liner, the third air outlet branch pipe is connected to the radial inner side of the material heating zone, and the fourth air outlet branch pipe is connected to the radial outer side of the material heating zone.

[0018] Preferably, in the axial direction of the air inlet device for the heating device, the second air inlet assembly and the second air outlet assembly are disposed between the first air inlet assembly and the first air outlet assembly.

[0019] Preferably, the second air inlet assembly and the second air outlet assembly are used to pass low-temperature gas, and the second air inlet assembly is disposed below the second air outlet assembly.

[0020] Preferably, the second air intake assembly and the second air outlet assembly are located on both sides of the partition.

[0021] Preferably, the third and fourth air intake branches are arranged alternately in the circumferential direction of the heating device.

[0022] The third and fourth air outlet branches are arranged alternately in the circumferential direction of the heating device.

[0023] By adopting the above technical solution, gas is introduced into and discharged from the radial inner and radial outer sides of the material heating zone, so that the heating device can heat the material evenly, thereby realizing the large-scale heating device. Attached Figure Description

[0024] Figure 1 A cross-sectional view of a heating device according to an embodiment of this application is shown.

[0025] Figure 2 It shows along Figure 1 A cross-sectional view of the MM line in the diagram.

[0026] Figure 3 It shows along Figure 1 A cross-sectional view of the NN line in the diagram.

[0027] Figure 4 It shows along Figure 1 A cross-sectional view of the PP line in the diagram.

[0028] Figure 5 It shows along Figure 1 A cross-sectional view of the QQ line in the image.

[0029] Explanation of reference numerals in the attached figures

[0030] 1. Outer shell 2. Inner liner

[0031] 3 air guide tubes, 31 through holes

[0032] 4 partitions

[0033] 5 First intake assembly 51 First intake ring pipe 52 First intake branch pipe 53 First intake branch pipe

[0034] 6 First exhaust assembly 61 First exhaust ring pipe 62 First exhaust branch pipe 63 Second exhaust branch pipe

[0035] 7 Second intake assembly 71 Second intake ring pipe 72 Third intake branch pipe 73 Fourth intake branch pipe

[0036] 8 Second exhaust assembly 81 Second exhaust ring pipe 82 Third exhaust branch pipe 83 Fourth exhaust branch pipe

[0037] 100 Material Heating Zone

[0038] A is axial, R is radial, and C is circumferential. Detailed Implementation

[0039] To more clearly illustrate the above-mentioned objectives, features, and advantages of this application, specific embodiments of this application are described in detail in conjunction with the accompanying drawings in this section. Besides the embodiments described in this section, this application can also be implemented in other different ways. Those skilled in the art can make corresponding improvements, modifications, and substitutions without departing from the spirit of this application; therefore, this application is not limited to the specific embodiments disclosed in this section. The scope of protection of this application should be determined by the claims.

[0040] In the following description, unless otherwise specified, axial direction A refers to the axial direction of the deposition furnace, radial direction R refers to the radial direction of the deposition furnace, and circumferential direction C refers to the circumferential direction of the deposition furnace.

[0041] like Figures 1 to 5 As shown, this application proposes a heating device for, for example, a deposition furnace. The deposition furnace includes a furnace body and an air inlet device. The furnace body includes an outer shell 1, an inner liner 2, and an air guide duct 3. The air inlet device includes a baffle 4, a first air inlet assembly 5, a first air outlet assembly 6, a second air inlet assembly 7, and a second air outlet assembly 8.

[0042] The outer shell 1, inner liner 2, and air guide duct 3 are all cylindrical. The outer shell 1 is fitted inside the inner liner 2, and the inner liner 2 is fitted inside the air guide duct 3. The inner liner 2 and air guide duct 3 are spaced apart along the radial direction R of the deposition furnace to form a material heating zone 100. Material pipes can be arranged in the material heating zone 100, and these pipes can be filled with solid materials and flowing gaseous materials. These materials can be heated through the heating chamber of the deposition furnace.

[0043] The sidewall of the air guide duct 3 is evenly provided with several through holes 31, which allow the internal space of the air guide duct 3 to communicate with the material heating zone 100. The air guide duct 3 can guide the airflow entering the material heating zone 100 to flow along the axial direction A and the circumferential direction C, thereby making the incoming gas evenly distributed (the airflow here is mainly the airflow entering the material heating zone 100 from the radial outside or the airflow exiting the material heating zone 100 from the radial outside), and the gas can also pass through the air guide duct 3 through the through holes 31.

[0044] like Figure 1 As shown, the baffle 4 can be connected to the air guide duct 3, dividing the interior of the air guide duct 3 into two independent spaces along the axial direction A of the deposition furnace. The baffle 4 can prevent the airflow entering the interior space of the air guide duct 3 from flowing along the axial direction A of the air guide duct 3, and instead allow it to enter the material heating zone 100 through the through hole 31, where it flows along the axial direction A of the deposition furnace.

[0045] (First intake assembly)

[0046] like Figure 1 and Figure 2As shown, the first intake assembly 5 includes a first intake ring pipe 51, a first intake branch pipe 52, and a second intake branch pipe 53. The first intake assembly 5 is located on one side of the partition 4, for example, the upper side.

[0047] The first intake ring pipe 51 can be circular and surrounds the outer casing 1. The first intake branch pipe 52 and the second intake branch pipe 53 are both connected to the first intake ring pipe 51. The first intake branch pipe 52 and the second intake branch pipe 53 have different lengths. For example, the length of the first intake branch pipe 52 is greater than the length of the second intake branch pipe 53.

[0048] The first air intake branch pipe 52 and the second air intake branch pipe 53 extend radially inward from the first air intake ring pipe 51 through the outer shell 1 and the inner liner 2. The first air intake branch pipe 52 extends to the air guide duct 3, so that the first air intake ring pipe 51 communicates with the internal space of the air guide duct 3. The second air intake branch pipe 53 extends to the material heating zone 100, so that the first air intake ring pipe 51 communicates with the material heating zone 100.

[0049] Multiple first air inlet branch pipes 52 and second air inlet branch pipes 53 are arranged circumferentially on the first air inlet ring pipe 51. The first air inlet branch pipes 52 and second air inlet branch pipes 53 are evenly alternately arranged in the circumferential direction C, so that the airflow entering the material heating zone 100 through the second air inlet branch pipe 53 can enter the material heating zone 100 evenly in the circumferential direction C, so that the material pipe of the material heating zone 100 can be evenly heated.

[0050] (First exhaust assembly)

[0051] like Figure 1 and Figure 3 As shown, the first air outlet assembly 6 includes a first air outlet ring pipe 61, a first air outlet branch pipe 62, and a second air outlet branch pipe 63. The first air outlet assembly 6 is located on the other side of the partition 4, for example, the lower side.

[0052] The first exhaust ring pipe 51 can be circular. The first exhaust ring pipe 61 surrounds the outer shell 1. The first exhaust branch pipe 62 and the second exhaust branch pipe 63 are both connected to the first exhaust ring pipe 61. The lengths of the first exhaust branch pipe 62 and the second exhaust branch pipe 63 are different. For example, the length of the first exhaust branch pipe 62 is greater than the length of the second exhaust branch pipe 63.

[0053] The first exhaust branch pipe 62 and the second exhaust branch pipe 63 extend radially inward from the first exhaust ring pipe 61 through the outer shell 1 and the inner liner 2. The first exhaust branch pipe 62 extends to the air guide duct 3, connecting the first exhaust ring pipe 61 with the internal space of the air guide duct 3. The second exhaust branch pipe 63 extends to the material heating zone 100, connecting the first exhaust ring pipe 61 with the material heating zone 100.

[0054] Multiple first exhaust branch pipes 62 and second exhaust branch pipes 63 are provided around the first exhaust ring pipe 61. The first exhaust branch pipes 62 and second exhaust branch pipes 63 are evenly and alternately arranged in the circumferential direction C.

[0055] The first inlet assembly 5 and the first outlet assembly 6 are used to supply high-temperature gas to the heating material pipe. The temperature of the high-temperature gas can be higher than room temperature. The first inlet assembly 5 is used to introduce high-temperature gas, thereby heating the material pipe placed in the material heating zone 100. The first outlet assembly 6 is used to discharge the high-temperature gas that has been cooled after heating the material pipe. The first inlet assembly 5 is located above the first outlet assembly 6, so that the high-temperature gas flows from top to bottom in the axial direction A. Since the high-temperature gas can spontaneously descend after being cooled, and the heated gaseous material can spontaneously rise, the material pipe can be fully heated.

[0056] When heating the material pipe in the heating zone 100, high-temperature gas is introduced into the first inlet ring pipe 51. Part of the high-temperature gas enters the interior of the guide duct 3 through the first inlet branch pipe 52 and enters the material heating zone 100 radially from the inner to the outer side through the through-hole 31. The other part of the high-temperature gas enters the material heating zone 100 radially from the outer to the inner side through the second inlet branch pipe 53. By complementing each other, the high-temperature gas can be evenly distributed radially (R) in the material heating zone 100. This air intake device can meet the needs of large-scale deposition furnaces, improving production efficiency and product quality. Furthermore, this air intake device can improve the effective utilization rate of thermal energy and reduce heat loss in the pipeline, making it both energy-saving and environmentally friendly.

[0057] The air inlet device of this application can also be used to modify existing deposition furnaces. Specifically, the original air guide duct is replaced with an air guide duct with a smaller radial dimension, thereby increasing the radial dimension of the material heating zone and allowing the material heating zone to accommodate more material pipes, which can also increase production capacity.

[0058] (Second intake assembly)

[0059] like Figure 1 and Figure 4 As shown, the second intake assembly 7 includes a second intake ring pipe 71, a third intake branch pipe 72, and a fourth intake branch pipe 73. The second intake assembly 7 is located on the other side of the partition 4, for example, the lower side.

[0060] The second intake ring pipe 71 can be circular and surrounds the outer casing 1. The third intake branch pipe 72 and the fourth intake branch pipe 73 are both connected to the second intake ring pipe 71. The lengths of the third intake branch pipe 72 and the fourth intake branch pipe 73 are different; for example, the length of the third intake branch pipe 72 is greater than the length of the fourth intake branch pipe 73.

[0061] The third air intake branch pipe 72 and the fourth air intake branch pipe 73 pass through the outer shell 1 and the inner liner 2, extending radially inward from the second air intake ring pipe 71. The third air intake branch pipe 72 extends to the air guide duct 3, connecting the second air intake ring pipe 71 with the internal space of the air guide duct 3. The fourth air intake branch pipe 73 extends to the material heating zone 100, connecting the second air intake ring pipe 71 with the material heating zone 100.

[0062] Multiple third air inlet branch pipes 72 and fourth air inlet branch pipes 73 are arranged circumferentially around the second air inlet ring pipe 71. The third air inlet branch pipes 72 and fourth air inlet branch pipes 73 are evenly alternately arranged in the circumferential direction C, so that the airflow entering the material heating zone 100 through the fourth air inlet branch pipe 73 can enter the material heating zone 100 evenly in the circumferential direction C, so that the material pipe of the material heating zone 100 can be uniformly cooled.

[0063] (Second air outlet assembly)

[0064] like Figure 1 and Figure 5 As shown, the second air outlet assembly 8 includes a second air outlet ring pipe 81, a third air outlet branch pipe 82, and a fourth air outlet branch pipe 83. The second air outlet assembly 8 is located on one side of the partition 4, for example, the upper side.

[0065] The second exhaust ring pipe 81 can be circular and surrounds the outer casing 1. The third exhaust branch pipe 82 and the fourth exhaust branch pipe 83 are both connected to the second exhaust ring pipe 81. The lengths of the third exhaust branch pipe 82 and the fourth exhaust branch pipe 83 are different; for example, the length of the third exhaust branch pipe 82 is greater than the length of the fourth exhaust branch pipe 83.

[0066] The third exhaust branch pipe 82 and the fourth exhaust branch pipe 83 pass through the outer shell 1 and the inner liner 2, extending radially inward from the second exhaust ring pipe 81. The third exhaust branch pipe 82 extends to the air guide duct 3, connecting the second exhaust ring pipe 81 with the internal space of the air guide duct 3. The fourth exhaust branch pipe 83 extends to the material heating zone 100, connecting the second exhaust ring pipe 81 with the material heating zone 100.

[0067] Both the third exhaust branch pipe 82 and the fourth exhaust branch pipe 83 are provided in multiples around the second exhaust ring pipe 81. The third exhaust branch pipe 82 and the fourth exhaust branch pipe 83 are evenly and alternately arranged in the circumferential direction C.

[0068] The second inlet assembly 7 and the second outlet assembly 8 are used to supply cryogenic gas for cooling the material tube. The temperature of the cryogenic gas is lower than that of the high-temperature gas; for example, the temperature of the cryogenic gas can be lower than room temperature. The second inlet assembly 7 is used to introduce cryogenic gas to cool the material tube placed in the material heating zone 100, so as to remove the solid material (or deposited product) inside the material tube. The second outlet assembly 8 is used to discharge the cryogenic gas after cooling the material tube. The second inlet assembly 7 is located below the second outlet assembly 8, so that the cryogenic gas flows from bottom to top in the axial direction A. Since the cryogenic gas can spontaneously rise after being heated, and the cooled gaseous material can spontaneously descend, this can fully cool the material tube.

[0069] Along the axial direction A of the deposition furnace, the second air inlet assembly 7 and the second air outlet assembly 8 can be disposed between the first air inlet assembly 5 and the first air outlet assembly 6.

[0070] Although the above-described embodiments are used with a deposition furnace as an example, the air inlet device proposed in this application can also be used for other heating devices.

[0071] It is understood that although the air inlet device of this application is used in a heating device for example, a deposition furnace, the heating device is not only used for heating, but also for cooling, for example, when the solid material (or deposited product) in the material pipe needs to be removed after heating is completed. Since the main purpose of the deposition furnace is heating, it is called a heating device.

[0072] In a possible implementation, the first intake branch pipe 52 and the first intake branch pipe 53 can also be combined into a single branch pipe. This single branch pipe is equipped with an inlet connecting to the internal space of the air guide duct 3 and an inlet connecting to the material heating zone 100, as well as a regulating valve. The opening of these two inlets can be adjusted using the regulating valve. By combining the two branch pipes, the number of branch pipe inlets in the circumferential direction C can be increased, for example, by double, without changing the total number of branch pipes, allowing the airflow to enter and exit more evenly along the circumferential direction C.

[0073] Similarly, the first exhaust branch pipe 62 and the second exhaust branch pipe 63 can also be combined into one branch pipe, the third intake branch pipe 72 and the fourth intake branch pipe 73 can also be combined into one branch pipe, and the third exhaust branch pipe 82 and the fourth exhaust branch pipe 83 can also be combined into one branch pipe.

[0074] In a possible implementation, only a first intake assembly and a first exhaust assembly may be provided, omitting the second intake assembly and the second exhaust assembly. The first intake ring pipe and the first exhaust ring pipe may each be equipped with a hot / cold gas pipe and a switching valve. During heating, hot gas enters through the first intake assembly and exits through the first exhaust assembly; during cooling, the switching valve allows cold gas to enter through the first exhaust assembly and exit through the first intake assembly, thus saving one set of intake and exhaust assemblies.

[0075] Although the present application has been described in detail using the above embodiments, it will be apparent to those skilled in the art that the present application is not limited to the embodiments described herein. The present application can be modified and implemented as alternative embodiments without departing from the spirit and scope of the present application as defined by the claims. Therefore, the description in this specification is for illustrative purposes only and does not have any limiting meaning for the present application.

Claims

1. An air inlet device for a heating device, the heating device comprising a furnace body provided with a material heating zone (100), the material heating zone (100) being annular, an outer circumferential surface of the material heating zone (100) being an inner shell (2), and an inner circumferential surface of the material heating zone (100) being a draft tube (3), characterized in that the air inlet device for the heating device comprises: a first air inlet assembly (5) comprising a first air inlet ring pipe (51) surrounding the inner shell (2), a first air inlet branch pipe (52) communicating to a radially inner side of the material heating zone (100) so that a part of high-temperature gas enters an inside of the draft tube (3) through the first air inlet branch pipe (52), and a second air inlet branch pipe (53) communicating to a radially outer side of the material heating zone (100) so that another part of high-temperature gas enters the material heating zone (100) from the radially outer side to the radially inner side through the second air inlet branch pipe (53), the two gas flows complementing each other to uniformly distribute the high-temperature gas in a radial direction (R) of the material heating zone (100); and a first air outlet assembly (6) comprising a first air outlet ring pipe (61) surrounding the inner shell (2), a first air outlet branch pipe (62) communicating to the radially inner side of the material heating zone (100), and a second air outlet branch pipe (63) communicating to the radially outer side of the material heating zone (100). The first air inlet assembly (5) and the first air outlet assembly (6) are used to pass high-temperature gas, the first air inlet assembly (5) being located above the first air outlet assembly (6).

3. The air inlet device for the heating device according to claim 1, characterized in that the first air inlet branch pipe (52) and the second air inlet branch pipe (53) are alternately arranged in a circumferential direction of the heating device, and the first air outlet branch pipe (62) and the second air outlet branch pipe (63) are alternately arranged in the circumferential direction of the heating device. The draft tube (3) is provided with a through hole (31), the first air inlet branch pipe (52) and the first air outlet branch pipe (62) extending to an inside space of the draft tube (3) so that the gas flow can flow to a radially inner side of the material heating zone (100) through the through hole (31).

2. The air inlet device for a heating device according to claim 1, characterized in that The air inlet device for the heating device further comprises a partition plate (4) separating the inside space of the draft tube (3) into two independent spaces, the first air inlet assembly (5) and the first air outlet assembly (6) being located on two sides of the partition plate (4). The air inlet device for the heating device further comprises: ​ ​ 4. The air inlet device for a heating device according to claim 1, characterized in that ​ 5. The air inlet device for a heating device according to claim 1, characterized in that ​ 6. The air inlet arrangement for a heating device according to claim 5, characterized in that ​ A second air inlet assembly (7) comprises a second air inlet ring (71), a third air inlet branch (72) and a fourth air inlet branch (73), the second air inlet ring (71) surrounds the inner container (2), the third air inlet branch (72) is communicated to the radial inner side of the material heating zone (100), and the fourth air inlet branch (73) is communicated to the radial outer side of the material heating zone (100); and A second air outlet assembly (8) comprises a second air outlet ring (81), a third air outlet branch (82) and a fourth air outlet branch (83), the second air outlet ring (81) surrounds the inner container (2), the third air outlet branch (82) is communicated to the radial inner side of the material heating zone (100), and the fourth air outlet branch (83) is communicated to the radial outer side of the material heating zone (100).

7. An air inlet arrangement for a heating device as claimed in claim 6, characterized in that In the axial direction (A) of the air inlet device for the heating device, the second air inlet assembly (7) and the second air outlet assembly (8) are arranged between the first air inlet assembly (5) and the first air outlet assembly (6).

8. The air inlet device for a heating device according to claim 6, characterized in that The second air inlet assembly (7) and the second air outlet assembly (8) are used for passing low-temperature gas, and the second air inlet assembly (7) is arranged below the second air outlet assembly (8).

9. The air inlet device for a heating device according to claim 6, characterized in that The second air inlet assembly (7) and the second air outlet assembly (8) are arranged on both sides of the partition plate (4).

10. The air inlet device for the heating device according to claim 6, wherein The third air inlet branch (72) and the fourth air inlet branch (73) are arranged alternately in the circumferential direction of the heating device. The third air outlet branch (82) and the fourth air outlet branch (83) are arranged alternately in the circumferential direction of the heating device.

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