Ion exchange membrane fixing device and electroplating device

Abstract

The present invention provides an ion exchange membrane fixing device and an electroplating device, the ion exchange membrane fixing device comprising: an ion membrane skeleton, on which a groove structure is formed; a first gasket, arranged at the bottom of the groove structure; a second gasket, arranged in the groove structure and located above the first gasket; the ion exchange membrane comprises a to-be-fixed area, the to-be-fixed area is at least located between the first gasket and the second gasket, the sum of the thickness of the first gasket, the second gasket and the ion exchange membrane is equal to the depth of the groove structure; at least one fixing component is at least arranged on the ion membrane skeleton to fix the ion exchange membrane on the ion membrane skeleton. The ion exchange membrane fixing device of the present invention sets the depth of the groove structure equal to the sum of the thickness of the first gasket, the second gasket and the ion exchange membrane, which can effectively fix the ion exchange membrane and reduce the problem of damage to the ion exchange membrane due to fixing.

Description

Technical Field

[0001] The invention relates to the field of ion exchange in electroplating solution, and in particular to an ion exchange membrane fixing device and an electroplating device. Background Art

[0002] In the interconnection technology of ultra-large-scale integrated circuits, as the integration of circuits continues to increase and the size of circuits continues to shrink, the requirements for the quality of the coating are also increasing. For example, the biggest feature of the "precision phosphor copper anode" is to increase the density of the phosphor copper anode, so that phosphorus is evenly and densely distributed in the anode metal structure, without segregation, and can improve the density of the coating; adding a small amount of phosphorus to the copper anode, a layer of black "phosphorus film" is generated on the surface of the copper anode during the electroplating process. This "phosphorus film" has metallic conductivity, controls the electroplating speed, makes the coating uniform, and does not produce copper powder, which can effectively improve the quality of the coating. In the wet electroplating process, the anode continuously electrolyzes the metal of the corresponding coating and also produces a large amount of anode mud. The anode mud has a great influence on the quality of the coating. How to prevent the anode mud from diffusing into the plating solution containing additives is particularly important.

[0003] In order to solve the above problems, an ion exchange membrane is arranged in the electroplating chamber of the electroplating device, and the electroplating chamber is separated into an independent cathode chamber and an anode chamber by the ion exchange membrane. On the one hand, the ion exchange membrane can well isolate the anode and cathode plating solutions, thereby isolating the cross contamination of the anode and cathode plating solutions; on the other hand, it can replenish the metal ions to be plated to the cathode chamber through the concentration difference. However, in the existing electroplating devices, the ion exchange membrane is difficult to be effectively fixed, and there may be problems such as damage to the ion exchange membrane or poor sealing of the ion exchange membrane installation, leakage, etc., which makes it impossible to effectively isolate the plating solution, resulting in cross contamination of the plating solution and reduced coating quality.

[0004] Therefore, it is necessary to provide an ion exchange membrane fixing device and an electroplating device to solve the above problems in the prior art. Summary of the invention

[0005] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide an ion exchange membrane fixing device and an electroplating device, which are used to solve the problems in the prior art such as the inability to effectively fix the ion exchange membrane.

[0006] To achieve the above-mentioned purpose and other related purposes, the present invention provides an ion exchange membrane fixing device suitable for fixing an ion exchange membrane, the ion exchange membrane fixing device comprising:

[0007] An ion membrane skeleton, wherein a groove structure is formed on the ion membrane skeleton;

[0008] A first gasket, disposed at the bottom of the groove structure;

[0009] A second gasket, disposed in the groove structure and located above the first gasket;

[0010] Wherein, the ion exchange membrane includes a to-be-fixed area, the to-be-fixed area is at least located between the first gasket and the second gasket, and the sum of the thicknesses of the first gasket, the second gasket and the ion exchange membrane is equal to the depth of the groove structure; and

[0011] At least one fixing component is disposed at least on the ion membrane skeleton to fix the ion exchange membrane on the ion membrane skeleton.

[0012] Optionally, the fixing assembly includes a pressure ring and a fixing piece, the pressure ring is arranged on the second gasket, and the fixing piece passes through the pressure ring, the second gasket, the ion exchange membrane, the first gasket in sequence and extends into the ion membrane skeleton to be fixed to the ion membrane skeleton.

[0013] Optionally, the compression deformation rate of the pressure ring is less than 5%.

[0014] Optionally, the material of the pressure ring includes any one of stainless steel, titanium and tantalum.

[0015] Optionally, the surface of the pressure ring is plated with a corrosion-resistant layer.

[0016] Optionally, the fixing member includes a bolt, which includes a bolt nut, a first fixing part and a second fixing part connected in sequence, wherein an external thread is formed on the surface of the second fixing part, the diameter of the first fixing part is larger than the diameter of the second fixing part, and the lower surface of the first fixing part is in contact with the surface of the ion membrane skeleton exposed by the groove structure.

[0017] Optionally, the notch edge of the groove structure includes a passivation structure.

[0018] Optionally, the material of the first gasket and the second gasket includes any one of a silicone material and a rubber material.

[0019] Optionally, the ion exchange membrane also includes a main membrane area, the area to be fixed is located at the periphery of the main membrane area, the area to be fixed includes a protective portion, a laminated portion and a bending portion in sequence, the bending portion is connected to the main membrane area, the laminated portion is located between the first gasket and the second gasket, and the protective portion and the bending portion are respectively located on two opposite sides of the second gasket.

[0020] The present invention also provides an electroplating device, comprising an ion exchange membrane fixing device as described in any one of the above schemes, wherein the ion exchange membrane separates the cathode liquid in the cathode chamber of the electroplating device from the anode liquid in the anode chamber of the electroplating device.

[0021] As described above, the ion exchange membrane fixing device and electroplating device of the present invention set the depth of the groove structure to be equal to the sum of the thicknesses of the first gasket, the second gasket and the ion exchange membrane, which can effectively fix the ion exchange membrane and reduce the problem of damage to the ion exchange membrane due to fixation. By setting the pressure ring, the leakage problem caused by the fixation of the ion membrane can be effectively alleviated. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Shown is a bottom view of an ion membrane skeleton having a groove structure provided by an embodiment of the present invention.

[0023] Figure 2 Display as Figure 1 HH section view.

[0024] Figure 3 Display as Figure 2 A partial enlarged view of point J in the middle.

[0025] Figure 4 Shown is a top view of a pressure ring provided in an embodiment of the present invention.

[0026] Figure 5 Shown is a bottom view of the ion membrane frame after bolts are installed according to an embodiment of the present invention.

[0027] Figure 6 Display as Figure 5 MM section view.

[0028] Figure 7 Display as Figure 6 A partial enlarged view of the middle Z.

[0029] Figure 8 Shown is a schematic structural diagram of an electroplating device provided by an embodiment of the present invention.

[0030] Component number description

[0031] 100 Ion membrane skeleton

[0032] 101 Groove Structure

[0033] 102 Bolt mounting holes

[0034] 103 Ion exchange membrane

[0035] 107 Pressure Ring

[0036] 108 First gasket

[0037] 109 Second gasket

[0038] 110 Area to be fixed

[0039] 111 Protection Department

[0040] 112 Lamination Department

[0041] 113 Bending part

[0042] 114 Main membrane area

[0043] 115 Bolt

[0044] 116 Bolt cap

[0045] 117 First fixed part

[0046] 118 Second fixed part

[0047] 300 Ion exchange membrane fixing device

[0048] 301 cathode chamber

[0049] 302 Anode chamber DETAILED DESCRIPTION

[0050] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

[0051] For example, when describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional view showing the device structure will not be partially enlarged according to the general scale, and the schematic view is only an example, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional space dimensions of length, width and depth should be included.

[0052] For ease of description, spatially relative terms such as "under", "below", "below", "below", "above", "on", etc. may be used herein to describe the relationship of one element or feature shown in the drawings to other elements or features. It will be understood that these spatially relative terms are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the drawings. In addition, when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present.

[0053] In the context of the present application, a structure in which a first feature is described as being "above" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0054] It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and therefore the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0055] like Figure 1-7 As shown, the present invention provides an ion exchange membrane fixing device, based on which the installation and fixation of the ion exchange membrane 103 can be achieved, the ion exchange membrane fixing device includes: an ion membrane skeleton 100, a groove structure 101 arranged on the ion membrane skeleton 100, a first gasket 108, a second gasket 109 and at least one fixing component, wherein the first gasket 108 is arranged at the bottom of the groove structure 101; the second gasket 109 is arranged in the groove structure 101 and is located above the first gasket 108; the ion exchange membrane 103 includes a to-be-fixed area 110, and the to-be-fixed area 110 is at least located between the first gasket 108 and the second gasket 109, wherein the sum of the thickness of the first gasket 108, the second gasket 109 and the ion exchange membrane 103 is equal to the depth of the groove structure 101; the fixing component is at least arranged on the ion membrane skeleton 100 to fix the ion exchange membrane on the ion membrane skeleton 100.

[0056] Specifically, the present invention provides an ion exchange membrane fixing device, which can fix the ion exchange membrane 103 on the ion membrane skeleton 100 to isolate the positive and negative electrode plating solutions. In one example, the ion exchange membrane 103 isolates the anode chamber and the cathode chamber, so that the electrolytes in the two chambers are isolated from each other, wherein the electrolyte compositions in the two chambers are slightly different, and additives are usually added to the electrolyte in the cathode chamber. During the process, anode mud will be generated in the anode chamber. The ion exchange membrane 103 isolates the cathode chamber and the anode chamber to avoid mixing of the electrolytes in the two chambers, thereby avoiding cross-contamination of the positive and negative electrode plating solutions.

[0057] The ion exchange membrane fixing device of the present invention is adopted, and the ion exchange membrane 103 is fixed on the ion membrane skeleton 100 based on the area to be fixed 110 of the ion exchange membrane 103, wherein, in the ion exchange membrane fixing device of the present invention, the depth of the groove structure 101 is set equal to the sum of the thickness of the first gasket 108, the second gasket 109 and the ion exchange membrane 103, so that the space formed by the groove structure 101 just accommodates the three, thereby effectively fixing the ion exchange membrane 103. In addition, in view of the characteristic that the ion exchange membrane 103 itself has a small amount of deformation, it is easy to be damaged during installation. In the present invention, the groove structure 101 is shallowly grooved, and the groove depth is equivalent to the thickness of the first gasket 108 and the second gasket 109 plus the ion exchange membrane 103, reducing the depth of the area to be fixed 110 of the ion exchange membrane 103 in the groove, avoiding the ion exchange membrane from being subjected to a large tensile stress, thereby effectively reducing the problem of damage to the ion exchange membrane 103 due to fixation.

[0058] It should be noted that, without affecting the fixation of the ion exchange membrane 103, the first gasket 108, the second gasket 109 and the ion exchange membrane 103 may be slightly deformed to varying degrees, and the sum of the thicknesses of the first gasket 108, the second gasket 109 and the ion exchange membrane 103 mentioned above is equal to the depth of the groove structure 101, which means that the sum of the thicknesses of the first gasket 108, the second gasket 109 and the ion exchange membrane 103 when not deformed is equal to the depth of the groove structure 101. Depth; it may also mean that the sum of the thicknesses of the first gasket 108, the second gasket 109 and the ion exchange membrane 103 after deformation is equal to the depth of the groove structure 101, that is, when all three are deformed or at least one of them is deformed, it does not affect the judgment of "equal to" in the present invention, that is, within the numerical range of the minimum sum of the thicknesses of the three (all three are deformed and reach the maximum deformation) to the maximum sum of the thicknesses of the three (none of the three are deformed), the sum of the thicknesses is considered to be equal to the depth of the groove structure 101.

[0059] Specifically, in one example, the shape of the groove structure 101 includes a ring, which can be a circular ring, a square ring, etc., or other continuous closed irregular ring structures. In this example, the groove structure 101 is selected as an integrally formed circular ring structure, such as Figure 1 As shown, the area 110 to be fixed of the ion exchange membrane 103 can be arranged in the groove structure 101 , which is beneficial to improving the stability of the fixation of the ion exchange membrane 103 .

[0060] In another example, the number of the groove structures 101 can be one or at least two. When at least two groove structures are set (not shown in the figure), different groove structures can be set into a concentric ring structure, so that the ion exchange membrane can be fixed in each groove structure based on the scheme of this embodiment, thereby improving the fixing effect.

[0061] Specifically, after the first gasket 108, the second gasket 109 and the to-be-fixed area 110 of the ion exchange membrane 103 are arranged in the groove structure 101, the arrangement state can be referred to as follows: Figure 3 As shown, the ion exchange membrane 103 is fixed by the fixing component. The fixing component can be fixed on the ion membrane skeleton 100 and press or stick to the second gasket 109 at the same time, so as to fix the ion exchange membrane 103 based on pressure and adhesion. Of course, other methods can also be used to fix the ion exchange membrane 103 through the fixing component, which is not limited to this.

[0062] In a specific example, the fixing assembly includes a pressure ring 107 and a fixing member. The pressure ring 107 is pressed on the second gasket 109. The structure of the pressure ring 107 can be found in Figure 4 As shown, the fixing member passes through the pressure ring 107, the second gasket 109, the ion exchange membrane 103 and the first gasket 108, wherein the end of the fixing member away from the pressure ring 107 is fixed to the ion membrane skeleton 100 under the first gasket 108, so as to achieve the fixation of the ion exchange membrane 103. The fixing method between the fixing member and the ion membrane skeleton can be fixed by threaded connection or by interference fit, which is not limited here. In a preferred example, the fixing member is selected as a bolt 115, the lower end of which passes through the pressure ring 107, the second gasket 109, the ion exchange membrane 103, the first gasket 108 in sequence, and then penetrates into the ion membrane skeleton 100, and is fixed by internal and external threads, see Figure 5-7 As shown, in one example, a bolt mounting hole 102 is pre-opened on the ion membrane frame 100, see Figure 1 As shown, the bolts 115 are fixed in the bolt mounting holes 102 after passing through each structural layer in sequence.

[0063] In addition, in one example, the end of the fixing member close to the pressure ring 107 can be fixedly connected to the pressure ring 107, such as a detachable connection through a thread. Of course, in other examples, the end of the fixing member close to the pressure ring 107 can be clamped on the upper surface of the pressure ring 107. For example, when the fixing member is a bolt, the nut is clamped on the pressure ring 107 to fix the ion exchange membrane 103 on the ion membrane skeleton 100. In one example, refer to Figure 4 As shown, the pressure ring 107 is provided with a bolt through hole, and the bolt 115 passes through the pressure ring 107 through the bolt through hole and then penetrates into the ion membrane skeleton 100 for fixation. In a preferred example, the bolt through hole corresponds one by one to the bolt mounting hole 102 in the ion membrane skeleton 100, thereby facilitating the installation positioning and fixation of the ion exchange membrane.

[0064] As an example, the bolt 115 includes a bolt cap 116, a first fixing portion 117 and a second fixing portion 118 connected in sequence, wherein the bolt cap 116 is clamped on the upper surface of the pressure ring 107. For example, when the bolt through hole is formed on the pressure ring 107, the diameter of the bolt cap 116 is greater than the diameter of the bolt through hole, so that the bolt cap 116 is clamped on the upper surface of the pressure ring 107 after the bolt 115 is installed. An external thread is formed on the surface of the second fixing portion 118 to be threadedly connected with the internal thread on the ion membrane skeleton 100. The height of the first fixing portion 117 is equal to the sum of the thickness of the first gasket 108, the ion exchange membrane 103, the second gasket 109 and the pressure ring 107, so that the pressure ring 107, the second gasket 109, the ion exchange membrane 103 and the first gasket 108 are clamped in the middle to achieve fixation, wherein the diameters of the first fixing portion 117 and the second fixing portion 118 can be the same.

[0065] In a preferred example, the diameter of the first fixing portion 117 is greater than the diameter of the second fixing portion 118, and the lower surface of the first fixing portion 117 is in contact with the surface of the ion membrane skeleton 100 exposed by the groove structure 101, that is, the first fixing portion 117 is arranged on the surface of the ion membrane skeleton 100 exposed by the groove structure 101. When the bolt 115 is installed, the first fixing portion 117 plays a limiting role, further improving the installation stability of the ion exchange membrane 103.

[0066] In one example, the pressure ring 107, the first gasket 108 and the second gasket 109 are all annular, and the fixing parts (such as the bolts 115) are evenly distributed. In one example, the number of the bolts 115 is 12, which are evenly distributed on the circumference. Of course, the number can also be selected according to actual conditions, such as 15, 36, etc., but is not limited to this.

[0067] In one example, the compression deformation rate of the pressure ring 107 is less than 5%, such as 3% or 2%. The compression deformation rate here refers to the percentage obtained by dividing the compression deformation by the original thickness of the pressure ring 107. Setting a pressure ring 107 with a compression deformation rate less than 5% (such as a stainless steel pressure ring) can effectively alleviate the leakage problem existing in the fixation of the ion exchange membrane 103. In one example, the first gasket 108 and the second gasket 109 have local non-uniformity, such as the first gasket 108 and the second gasket 109 are deformed during the compression process. The reason is that after the two adjacent bolts 115 are tightened, the deformation of the first gasket 108 and the second gasket 109 is large near the bolts 115, and a gap is easily formed between the gasket and the ion membrane, resulting in leakage. The setting of the pressure ring 107 with a smaller compression deformation rate of the present invention allows a smaller deformation space when the ion exchange membrane 103 is installed, thereby alleviating the deformation of the first gasket 108 and the second gasket 109, and alleviating the above-mentioned warping phenomenon, so that the ion exchange membrane 103 can be effectively fixed, which is beneficial to prevent the ion exchange membrane 103 from leaking. In one example, the material of the pressure ring 107 includes any one of stainless steel, Ti (titanium), and Ta (tantalum), but is not limited to this. In addition, in an optional example, the surface of the pressure ring is coated with a corrosion-resistant layer, which is preferably a corrosion-resistant metal material that is not easily corroded by the electrolyte. In one example, the material of the corrosion-resistant layer includes polytetrafluoroethylene (PTFE), that is, it can be a PTFE material coated on the surface of stainless steel 316L.

[0068] In one example, the material of the first gasket 108 and the second gasket 109 is silicone or rubber material, such as EPDM rubber and fluororubber, which can be the same or different. In this example, it is preferred that the material of the first gasket 108 and the second gasket 109 is the same. In an optional example, the compression rate of the first gasket 108 is generally 80%, that is, the gasket can be compressed by 20%, and the compression rate of the second gasket 109 is generally 80%, that is, the gasket can be compressed by 20%.

[0069] Specifically, the width of the pressure ring 107 is equal to the width of the first gasket 108, and the height of the first fixing portion 117 is equal to the sum of the thicknesses of the first gasket 108, the ion exchange membrane 103, the second gasket 109 and the pressure ring 107. The width of the first gasket 108 and the width of the second gasket 109 refer to the radial annular dimensions, that is, the width is the width of the groove structure 101. The first gasket 108 and the second gasket 109 are just arranged in the groove structure 101. The above-mentioned size arrangement in this example is conducive to the fixing of the first gasket 108, the second gasket 109 and the ion exchange membrane 103 in the groove structure 101 by the pressure ring 107, which is conducive to improving the fixing effect of the ion exchange membrane 103, and further conducive to preventing the ion exchange membrane 103 from leaking.

[0070] As an example, the torque applied by the bolt 115 when fixing the ion exchange membrane is preferably between 10 pounds and 18 pounds, the thickness of the first gasket 108 is between 0.5mm and 1.5mm, the thickness of the second gasket 109 is between 0.5mm and 1.5mm, the depth of the groove structure 101 is between 1.5mm and 3mm, the width of the groove structure 101 is between 6mm and 10mm, and the thickness of the pressure ring 107 is between 4mm and 6mm. Specifically, in the ion exchange membrane fixing device of this example, the groove structure 101 is in the shape of an integrated ring structure, the fixing assembly includes a pressure ring 107 and a fixing member, the fixing member is selected as a bolt 115, the first gasket 108, the second gasket 109, and the pressure ring 107 are all arranged in a corresponding ring shape, the width of the first gasket 108, the second gasket 109 and the groove structure 101 are all equal, in an optional example, the torque of the bolt 115 is 10 pounds, 13 pounds or 18 pounds, the thickness of the first gasket 108 is 1 mm, the thickness of the second gasket 109 is 1 mm, the depth of the groove structure 101 is 2.5 mm, the width of the groove structure 101 is 8 mm, and the thickness of the pressure ring 107 is 5 mm.

[0071] Specifically, in one example, the notch edge of the groove structure 101 includes a passivation structure, that is, the notch of the groove structure 101 is also passivated, such as chamfered, to form the passivation structure. In one example, the radius after chamfering can be 0.4mm-0.6mm, and can be 0.5mm, which is beneficial to prevent damage to the ion exchange membrane.

[0072] Specifically, in one example, the ion exchange membrane 103 is divided into a main membrane area 114 and a region to be fixed 110, wherein the region to be fixed 110 is located at the periphery of the main membrane area 114, wherein the region to be fixed 110 is arranged in the groove structure 101 to realize the fixation of the ion exchange membrane 103, and the size of the groove structure 101 can be set based on the required size of the main membrane area 114 and the region to be fixed 110. In this example, the region to be fixed 110 includes a protective portion 111, a laminated portion 112 and a bent portion 113 in sequence, and the laminated portion 112 is sandwiched between the first gasket 108 and the second gasket 109 to realize fixation based on the fixing component. In addition, the bent portion 11 3 is connected to the main membrane area 114 to transition between the main membrane area 114 and the laminated part 112, wherein the length of the bent portion 113 is the thickness of the second gasket 109, and the small depth of the groove structure 101 is conducive to reducing the tensile deformation of the ion exchange membrane, so that the tensile force on the bent portion 113 is small, which can avoid the problem of the ion exchange membrane 103 being damaged by being torn due to large tensile stress when fixed. In addition, the protective portion 111 is arranged between the other side edge of the second gasket 109 and the edge of the groove structure 101, which is conducive to protecting the fixation of the ion exchange membrane 103 and preventing the ion exchange membrane 103 from falling off due to the stretching and other changes. In addition, see Figure 7 As shown, during the electroplating operation, the ion exchange membrane is subjected to tensile stress due to the gravity of the plating solution on its upper side, and its direction is shown by the arrow in the figure. The protective portion 111 can also prevent the problem of unstable fixation of the ion exchange membrane caused by the tensile stress exerted on the ion exchange membrane by the plating solution, so that the protective portion 111 can improve the stability of the fixation of the ion exchange membrane.

[0073] Also, see Figure 8 As shown, the present invention also provides an electroplating device, the electroplating device includes an ion exchange membrane fixing device 300 as described in any one of the above schemes, the structure of the ion exchange membrane fixing device, etc. refer to the above description, the electroplating device also includes a cathode chamber 301 and an anode chamber 302, wherein the ion exchange membrane 103 is used to isolate the cathode liquid in the cathode chamber 301 of the electroplating device and the anode liquid in the anode chamber 302 of the electroplating device, so that the electrolytes in the two chambers are isolated from each other. In an optional example, the relationship between the ion exchange membrane 103 and the chamber can be referred to Figure 8As shown, the cathode chamber 301 and the anode chamber 302 are respectively located at the upper and lower sides of the ion exchange membrane fixing device 300. The electroplating device using the ion exchange membrane fixing device of this embodiment can effectively fix the ion exchange membrane 103, and is conducive to preventing damage caused by the fixing of the ion exchange membrane 103. Further, it can also effectively prevent leakage caused by the fixing of the ion exchange membrane 103.

[0074] In summary, the ion exchange membrane fixing device and electroplating device of the present invention set the depth of the groove structure equal to the sum of the thicknesses of the first gasket, the second gasket and the ion exchange membrane, which can effectively fix the ion exchange membrane and reduce the problem of damage to the ion exchange membrane due to fixation. Through the setting of the pressure ring, the leakage problem caused by the fixation of the ion membrane can be effectively alleviated.

[0075] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. An ion exchange membrane fixing device, suitable for fixing ion exchange membranes, It is characterized in that The ion exchange membrane fixing device comprises: An ion membrane skeleton, wherein a groove structure is formed on the ion membrane skeleton; A first gasket, disposed at the bottom of the groove structure; A second gasket, disposed in the groove structure and located above the first gasket; Wherein, the ion exchange membrane includes a to-be-fixed area, the to-be-fixed area is at least located between the first gasket and the second gasket, and the sum of the thicknesses of the first gasket, the second gasket and the ion exchange membrane is equal to the depth of the groove structure; and At least one fixing component is at least arranged on the ion membrane skeleton to fix the ion exchange membrane on the ion membrane skeleton.

2. The ion exchange membrane fixing device according to claim 1, It is characterized in that The fixing assembly includes a pressure ring and a fixing piece, wherein the pressure ring is arranged on the second gasket, and the fixing piece sequentially passes through the pressure ring, the second gasket, the ion exchange membrane, and the first gasket and extends into the ion membrane skeleton to be fixed to the ion membrane skeleton.

3. The ion exchange membrane fixing device according to claim 2, It is characterized in that The compression deformation rate of the pressure ring is less than 5%.

4. The ion exchange membrane fixing device according to claim 3, It is characterized in that The material of the pressure ring includes any one of stainless steel, titanium and tantalum.

5. The ion exchange membrane fixing device according to claim 3, It is characterized in that The surface of the pressure ring is plated with a corrosion-resistant layer.

6. The ion exchange membrane fixing device according to claim 2, It is characterized in that The fixing member includes a bolt, which includes a bolt nut, a first fixing part and a second fixing part connected in sequence, wherein an external thread is formed on the surface of the second fixing part, and the diameter of the first fixing part is larger than the diameter of the second fixing part, and the lower surface of the first fixing part is in contact with the surface of the ion membrane skeleton exposed by the groove structure.

7. The ion exchange membrane fixing device according to claim 1, It is characterized in that The notch edge of the groove structure comprises a passivation structure.

8. The ion exchange membrane fixing device according to any one of claims 1 to 7, It is characterized in that The materials of the first gasket and the second gasket include any one of silicone material and rubber material.

9. The ion exchange membrane fixing device according to claim 8, It is characterized in that The ion exchange membrane also includes a main membrane area, the area to be fixed is located at the periphery of the main membrane area, the area to be fixed includes a protective portion, a laminated portion and a bending portion in sequence, the bending portion is connected to the main membrane area, the laminated portion is located between the first gasket and the second gasket, and the protective portion and the bending portion are respectively located on two opposite sides of the second gasket.

10. An electroplating device, It is characterized in that The electroplating device comprises an ion exchange membrane fixing device as described in any one of claims 1 to 9, wherein the ion exchange membrane separates the cathode liquid in the cathode chamber of the electroplating device from the anode liquid in the anode chamber of the electroplating device.

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