Extracavity coil driven ultra-clean valve without elastic element

Abstract

The present invention discloses an extra-cavity coil-driven ultra-clean valve without elastic elements. The valve seat is provided with inlet and outlet flow channels both connected to the valve cavity; the inner wall around the valve cavity is provided with a magnetic shell, the magnetic shell is provided with a coil assembly, a permanent magnet or a secondary pole shoe is provided in the magnetic shell above the coil assembly, and a main pole shoe is provided in the magnetic shell below the coil assembly; a space is provided between the gasket on the bottom surface of the main pole shoe and the bottom surface of the valve seat to form a movable transition cavity; a magnetic ring guide sleeve assembly is arranged on the inner circumference of the coil assembly, an inner partition is provided in the magnetic ring guide sleeve assembly, an armature is provided in the inner partition, the lower end of the armature is fixedly connected to the valve core, and the movable valve core extends into the movable transition cavity after passing through the vertical through hole in the center of the main pole shoe. The valve cavity of the present invention has no movable parts outside, the overall structure is compact, and the reliability is high. The structure of the elastic action element is avoided inside the valve cavity, and fatigue failure is not easy to occur. It has the advantages of small size, high control accuracy, and fast response speed.

Description

Technical Field

[0001] The present invention relates to a valve, in particular to an extracavity coil driven ultra-clean valve without elastic components, which is applied to ultra-clean flow control fields such as semiconductors, biomedicine, and electronic-grade chemicals. Background Art

[0002] At present, diaphragm valves and bellows valves are widely used in ultra-clean flow control fields such as semiconductors, biomedicine, and electronic-grade chemicals. Solenoid valves are basic components for controlling fluid automation. If metal elastic components (such as return springs) are used in traditional solenoid valve structures, it will pollute the entire ultra-clean environment. If non-metallic elastic components (such as polytetrafluoroethylene PTFE springs) are used, there will be problems such as insufficient rigidity, difficulty in manufacturing, and short service life.

[0003] In order to meet the requirements of ultra-clean environment, diaphragm valves (for details, see patents WO2007089689A2, CN101365904A, CN1836124A, US20030722168) use flexible membranes or combined diaphragms to separate the medium passage and the actuating parts, and bellows valves use bellows to separate the medium passage and the outside world. In the above valves, the medium contacts only the diaphragm, bellows and valve body, so the cleanliness of the medium can be guaranteed. However, the elastic actuating elements of diaphragm valves and bellows valves are prone to fatigue failure during long-term operation, which is manifested as rupture and perforation of the elastic actuating elements. At the same time, compared with traditional solenoid valves, diaphragm valves and bellows valves have poor flow regulation capabilities for the medium, can only be adjusted in a small range, and have a slow response speed. Solenoid diaphragm valves also have the problem of fatigue failure of elastic actuating elements.

[0004] The Chinese invention with application number CN201911054740.2 provides a manual ultra-clean switch valve, which relies on magnetic force to achieve non-contact control of the valve core movement. Although it avoids leakage and life problems caused by fatigue rupture of the diaphragm, it also has the problems of difficult processing technology for coating the elastic action element with ultra-clean material coating and inability to control the valve opening. The Chinese invention with application number CN202011163914.1 provides an electric ultra-clean valve, which sets a magnetic drive component by combining an embedded permanent magnet and an external control permanent magnet, and uses the principle of minimum magnetic resistance to open and close the valve. The valve position can be controlled, but the motor has a slow response speed to the control of the valve. The valve cavity of the above two inventions has an action part (rotating handwheel, stepper motor) outside, and there is a problem of large overall structure and low reliability of the external structure of the valve cavity. Summary of the invention

[0005] In order to overcome the shortcomings of the prior art, the present invention provides an extra-cavity coil-driven ultra-clean valve without elastic elements. The ultra-clean solenoid valve can meet the needs of an ultra-clean environment. It is driven by a coil outside the valve cavity. There is no elastic actuating element in the valve cavity, and fatigue failure is not prone to occur. At the same time, the opening of the valve can be controlled. The solenoid valve has the advantages of relatively small size, high control accuracy and fast response speed, and solves the technical problem that valves commonly used in the field of ultra-clean flow control have elastic elements such as diaphragms and springs.

[0006] The technical solution adopted by the present invention is:

[0007] The present invention comprises a valve seat, a valve core, a jacket, a gasket, a main pole shoe, a stopper, a coil assembly, a magnetic ring guide sleeve assembly, an armature, a magnetic conductive shell and an inner partition; an inlet flow channel and an outlet flow channel are respectively arranged on both sides of the interior of the valve seat, a jacket is fixedly mounted on the valve seat, a valve cavity is formed between the interior of the jacket and the valve seat, and the inlet flow channel and the outlet flow channel are both connected to the valve cavity;

[0008] A magnetic shell is fixedly arranged on the inner wall around the valve cavity, and a coil assembly is mounted on the magnetic shell. A permanent magnet or a secondary pole shoe is arranged in the magnetic shell above the coil assembly. The top surface of the permanent magnet / secondary pole shoe contacts the top surface of the outer sleeve. A main pole shoe is arranged in the magnetic shell above the coil assembly. A vertical through hole for the valve core to pass through is opened in the center of the main pole shoe. A gasket is arranged on the bottom surface of the main pole shoe, and the gasket is supported by an annular boss on the top surface of the valve seat, so that there is a gap between the gasket and the bottom surface of the valve seat to form a movable transition cavity.

[0009] A magnetic ring guide sleeve assembly is arranged on the inner circumference of the coil assembly, an inner partition is installed in the magnetic ring guide sleeve assembly, an armature is installed in the inner partition, the lower end of the armature is fixedly connected to the upper end of the valve core, and the valve core moves through the vertical through hole in the center of the main pole shoe and extends into the movable transition cavity between the gasket and the valve seat; the lower end of the valve core is located directly above the outlet of the inlet flow channel of the valve seat.

[0010] The integral valve of the present invention is arranged vertically along the direction of gravity, a gap is provided between the armature and the inner partition, and the armature can freely move up and down in the inner partition.

[0011] The coil assembly forms a strong magnetic field in the magnetic ring guide sleeve assembly through the auxiliary structure of the main pole shoe and the permanent magnet / secondary coil. The magnetic field is applied to the armature to drive the armature and the valve core connected to it to move up and down, thereby controlling whether the lower end of the valve core blocks the outlet of the valve seat inlet flow channel, controlling the balance of the magnetic force and gravity on the armature, and stabilizing the armature at any position within the stroke and maintaining the opening, ultimately realizing the opening and closing and opening control of the ultra-clean valve under non-elastic components such as diaphragms.

[0012] The main pole shoe, main magnetic isolation ring and leading sleeve guide the direction of magnetic flux lines to form two main magnetic circuits, thus improving the horizontal characteristics of armature displacement and the magnetic force it receives.

[0013] The lower end surface of the valve core is provided with an inner groove, and the outlet of the valve seat inlet flow channel is provided with a boss on the valve seat surface. When the valve core falls to the outlet of the inlet flow channel, the boss is embedded in the inner groove, so that the valve core blocks the outlet of the valve seat inlet flow channel.

[0014] The coil assembly is mainly composed of a main coil; the magnetic ring guide sleeve assembly is mainly composed of a front guide sleeve, a main isolation magnetic ring and a rear guide sleeve arranged in sequence from bottom to top, the front guide sleeve, the main isolation magnetic ring and the rear guide sleeve are arranged up and down on the same circle, and the main isolation magnetic ring is located between the front guide sleeve and the rear guide sleeve.

[0015] The present invention designs a permanent magnet magnetic source, including but not limited to a special-shaped permanent magnet, to change the relationship between the distance between the permanent magnet and the armature and the change in magnetic force. The magnetic force generated by the permanent magnet replaces the force on the armature generated by the traditional return spring to assist the existing coil in controlling the valve core position.

[0016] The permanent magnet is placed on the upper part of the valve, and the magnetic force generated by the permanent magnet replaces the force on the armature generated by the return spring to assist in control. The magnetic force decreases as the distance between the permanent magnet and the armature increases, and the direction is opposite to the magnetic force generated by the coil.

[0017] The coil assembly is mainly composed of a main coil, a magnetic conductive ring, and a secondary coil arranged in sequence from bottom to top; the magnetic ring guide sleeve assembly is mainly composed of a front guide sleeve, a main magnetic isolation ring, a middle guide sleeve, a secondary magnetic isolation ring, and a rear guide sleeve arranged in sequence from bottom to top. Each magnetic isolation ring and each guide sleeve are arranged up and down on the same circle, the main magnetic isolation ring is located between the front guide sleeve and the middle guide sleeve, and the secondary magnetic isolation ring is located between the middle guide sleeve and the rear guide sleeve.

[0018] The present invention designs a double-coil magnetic source, which may include a primary coil and a secondary coil located on the same side. The magnitude and direction of the control current of the primary coil and the secondary coil are controllable, and the secondary coil replaces the force on the armature generated by the traditional return spring to control the valve core position.

[0019] The secondary coil and the main coil are located on the same side. When the secondary coil is energized, the direction of the magnetic force generated is opposite to that generated by the main coil, and the magnitude is determined by the control current. At the same time, the magnetic flow circuit of the main coil and the secondary coil is led to the armature through the magnetic ring, replacing the force on the armature generated by the traditional return spring to control the valve core position.

[0020] From the above, it can be seen that the present invention has at least two solutions, namely permanent magnet and double coil, which use other magnetic sources to assist the valve core and armature to reset, maintain the opening and closing of the valve, and maintain the opening degree of the valve.

[0021] The surface of the armature is coated with an ultra-clean coating.

[0022] The armature is annular, and the bottom of the annular ring is fixedly connected to the upper end of the valve core.

[0023] The upper surface of the main pole shoe in the magnetic ring guide sleeve assembly and the wall surface of the main pole shoe through hole are both provided with limiting plates, and the limiting plates are located below the inner partition layer.

[0024] The valve seat, valve core, gasket, limit plate, and inner partition are made of ultra-clean materials, including but not limited to fluorine-containing plastics such as perfluoroalkoxy PFA, polytetrafluoroethylene PTFE, polyvinylidene fluoride PVDF, or any combination thereof. The components are connected in a clean and reliable manner, including but not limited to ultrasonic welding, friction welding, vibration welding, heat welding, or any combination thereof. The medium flowing through the valve only contacts the ultra-clean material.

[0025] The valve of the present invention uses ultra-clean materials to separate the medium passage from other valve structures and the outside world, ensuring the requirements of an ultra-clean environment. After the electromagnetic coil outside the valve cavity is energized, it controls the movement of the valve core and the armature to achieve the opening and closing and flow control functions of the valve. At the same time, the structure of the valve cavity containing elastic action elements is avoided. Other magnetic sources are used to assist the valve core and the armature in resetting and maintain the opening and closing and opening of the valve, thereby achieving ultra-clean flow control.

[0026] The present invention adopts ultra-clean materials with good corrosion resistance, thermal stability and self-lubricating properties, including but not limited to fluorine-containing plastics such as perfluoroalkoxy PFA, polytetrafluoroethylene PTFE, polyvinylidene fluoride PVDF, or any combination thereof.

[0027] The valve uses ultra-clean materials (including but not limited to fluorinated plastics such as perfluoroalkoxy PFA, polytetrafluoroethylene PTFE, polyvinylidene fluoride PVDF or any combination thereof) to separate the medium passage from other valve structures and the outside world. The existence form includes an armature 11 with an ultra-clean coating, a directly formed partition (an inner partition 13, a limit plate 6, a gasket 4) and an integrally formed part (a valve seat 1, a valve core 2) to ensure that the medium only contacts the ultra-clean material.

[0028] Ultra-clean materials separate the medium passage from other valve structures and the outside world in the form of ultra-clean coatings on each armature, directly formed partitions and one-piece formed parts. At the same time, the connection method of the coated parts, partitions and one-piece formed parts is a clean and reliable method, including but not limited to ultrasonic welding, friction welding, vibration welding, heat welding or any combination thereof.

[0029] Other magnetic sources for resetting the auxiliary valve core and armature of the valve and maintaining the opening and closing and opening degree of the valve include but are not limited to permanent magnets, double coils or any combination thereof.

[0030] The electromagnetic coil in the coil assembly of the present invention is close to the outer wall of the valve cavity and belongs to the non-acting part. The acting part is divided into two parts, the valve core and the armature, which are connected in a clean and reliable way during the installation process.

[0031] Therefore, the valve uses an electromagnetic coil outside the valve cavity to drive the valve core and armature inside the valve cavity, rather than using an actuating part (including but not limited to a rotating handwheel, a stepping motor or other actuating parts or any combination thereof). The electromagnetic coil is close to the outer wall of the valve cavity, and the overall structure is compact.

[0032] The beneficial effects of the present invention are:

[0033] After the electromagnetic coil of the present invention is energized, it controls the movement of the valve core and the armature to realize the opening and closing of the valve and the flow control function. At the same time, other magnetic sources are used to assist the valve core and the armature to reset and maintain the opening and closing and opening of the valve. Compared with the existing ultra-clean valve, which has no moving parts outside the valve cavity, the present invention driven by the coil outside the cavity has a compact overall structure and high reliability.

[0034] Compared with diaphragm valves and bellows valves, the present invention which has no elastic element in the valve cavity avoids the structure of elastic action elements and is less prone to fatigue failure. At the same time, the present invention has the advantages of relatively small size of the solenoid valve, high control accuracy and fast response speed.

[0035] The present invention can solve and meet the ultra-clean flow control needs of process media in the fields of semiconductors, biomedicine, electronic-grade chemicals, etc., that is, to ensure that the medium is not contaminated by metals, ions, particulate matter, bacteria, etc. while achieving medium transmission control, so as to ensure the subsequent process effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The present invention will be further described below in conjunction with the accompanying drawings and implementation modes.

[0037] Figure 1 This is a schematic structural diagram of the permanent magnet solution of Example I of the present invention.

[0038] Figure 2 This is a schematic diagram of the structure of the double-coil solution of Example II of the present invention.

[0039] In the figure, 1: valve seat; 2: valve core; 3: outer sleeve; 4: gasket; 5: main pole shoe; 6: limit plate; 7: main coil; 8: front guide sleeve; 9: main magnetic isolation ring; 10: rear guide sleeve; 11: armature (ultra-clean coating); 12: magnetic outer shell; 13: inner partition; 14: permanent magnet; 15: middle guide sleeve; 16: magnetic ring; 17: secondary coil; 18: secondary magnetic isolation ring; 19: secondary pole shoe. DETAILED DESCRIPTION

[0040] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0041] Embodiment I:

[0042] like Figure 1As shown, this embodiment includes a valve seat 1, a valve core 2, a sleeve 3, a gasket 4, a main pole shoe 5, a limit plate 6, a main coil 7, a front guide sleeve 8, a main magnetic isolation ring 9, a rear guide sleeve 10, an armature 11, a magnetic conductive shell 12, an inner partition 13 and a permanent magnet 14; an inlet flow channel and an outlet flow channel are respectively provided on both sides of the interior of the valve seat 1, a sleeve 3 is fixedly installed on the valve seat 1, a valve cavity is formed between the interior of the sleeve 3 and the valve seat 1, and the inlet flow channel and the outlet flow channel are both connected to the valve cavity.

[0043] A magnetic shell 12 is tightly and fixedly arranged on the inner wall around the valve cavity, and the magnetic shell 12 is mounted with a main coil 7. A permanent magnet 14 is arranged in the magnetic shell 12 above the main coil 7. The top surface of the permanent magnet 14 contacts the top surface of the inner side of the outer sleeve 3. A main pole shoe 5 is arranged in the magnetic shell 12 above the main coil 7.

[0044] A vertical through hole for the valve core 2 to pass through is opened in the center of the main pole shoe 5, and a gasket 4 is provided on the bottom surface of the main pole shoe 5. The gasket 4 is supported by the annular boss on the top surface of the valve seat 1, so that there is a gap between the gasket 4 and the bottom surface of the valve seat 1 to form a movable transition cavity; the inner circumference of the main coil 7 is arranged by a magnetic ring guide sleeve assembly, and the magnetic ring guide sleeve assembly is mainly composed of a front guide sleeve 8, a main isolation magnetic ring 9 and a rear guide sleeve 10 arranged in sequence from bottom to top. The front guide sleeve 8, the main isolation magnetic ring 9 and the rear guide sleeve 10 are arranged up and down on the same circumference, and the main isolation magnetic ring 9 is located between the front guide sleeve 8 and the rear guide sleeve 10; the magnetic ring guide sleeve assembly is equipped with an inner partition 13, and the inner partition 13 is equipped with an armature 11. The lower end of the armature 11 is fixedly connected to the upper end of the valve core 2. The valve core 2 moves through the vertical through hole in the center of the main pole shoe 5 and then extends into the movable transition cavity between the gasket 4 and the valve seat 1; the lower end of the valve core 2 is located directly above the outlet of the inlet flow channel of the valve seat 1.

[0045] The upper surface of the main pole shoe 5 in the magnetic ring guide sleeve assembly and the wall surface of the through hole of the main pole shoe 5 are both provided with a limiting piece 6, and the limiting piece 6 is located below the inner partition layer 13.

[0046] In the specific implementation, the armature 11 is made of ultra-clean material and coated with an ultra-clean coating. The armature 11 is annular, and the bottom of the annular shape is fixedly connected to the upper end of the valve core 2.

[0047] Working process:

[0048] When the main coil 7 is not energized, the permanent magnet 14 is attracted to the armature 11, and the armature 11 is close to the upper part of the inner partition 13. At this time, the valve opening is maximum, and the medium flows in from the inlet flow channel on the left side of the valve seat 1 and flows out from the outlet flow channel on the right side of the valve seat 1.

[0049] When the main coil 7 starts to be energized, the armature 11 is subjected to a downward magnetic force and starts to separate from the inner partition 13 and move downward.

[0050] When the gravity on the armature 11 and the valve core 2 and the magnetic attraction generated by the main coil 7 are balanced with the attraction of the permanent magnet 14, the valve opening becomes smaller than when no power is supplied, and the valve opening remains unchanged when the control current remains unchanged.

[0051] When the control current of the main coil 7 continues to increase, the armature 11 continues to move downward until the valve core 2 is in close contact with the valve seat 1, and the medium cannot enter the valve cavity from the inlet flow channel on the left side of the valve seat 1. At this time, the valve is closed. After that, the control current of the main coil 7 is reduced, and the valve will open again. The opening of the valve is determined by the control current of the main coil 7.

[0052] The main magnetic circuit is Figure 1 As shown:

[0053] Magnetic circuit 1: formed by main coil 7, main pole shoe 5 - limit plate 6 - air gap - armature 11 - air gap - inner partition 13 - rear guide sleeve 10 - magnetic conductive shell 12 - main pole shoe 5.

[0054] Magnetic circuit 2: formed by main coil 7, main pole shoe 5 - front guide sleeve 8 - inner partition 13 - air gap - armature 11 - air gap - inner partition 13 - rear guide sleeve 10 - magnetic conductive shell 12 - main pole shoe 5.

[0055] Magnetic circuit 3: is formed by permanent magnet 14, permanent magnet 14 - inner partition 13 - air gap - armature 11 - air gap - inner partition 13 - rear guide sleeve 10 - magnetic conductive shell 12 - permanent magnet 14.

[0056] Embodiment II:

[0057] like Figure 2 As shown, the valve includes a valve seat 1, a valve core 2, a sleeve 3, a gasket 4, a main pole shoe 5, a limit plate 6, a main coil 7, a magnetic ring 16, a secondary coil 17, a front guide sleeve 8, a main magnetic isolation ring 9, a middle guide sleeve 15, a secondary magnetic isolation ring 18, a rear guide sleeve 10, an armature 11, a magnetic shell 12, an inner partition 13 and a secondary pole shoe 19; inlet flow channels and outlet flow channels are respectively provided on both sides of the interior of the valve seat 1, a sleeve 3 is fixedly installed on the valve seat 1, a valve cavity is formed between the interior of the sleeve 3 and the valve seat 1, and the inlet flow channel and the outlet flow channel are both connected to the valve cavity.

[0058] A magnetic shell 12 is fixedly arranged on the inner wall around the valve cavity, and the magnetic shell 12 is equipped with a coil assembly. The coil assembly is mainly composed of a main coil 7, a magnetic ring 16, and a secondary coil 17 arranged in sequence from bottom to top. A secondary pole shoe 19 is arranged in the magnetic shell 12 above the coil assembly, and the top surface of the secondary pole shoe 19 is in contact with the inner top surface of the outer sleeve 3.

[0059] A main pole shoe 5 is arranged in the magnetic conductive housing 12 above the coil assembly; a vertical through hole for the valve core 2 to pass through is opened in the center of the main pole shoe 5, and a gasket 4 is arranged on the bottom surface of the main pole shoe 5, and the gasket 4 is supported by the annular boss on the top surface of the valve seat 1, so that there is a gap between the gasket 4 and the bottom surface of the valve seat 1 to form a movable transition cavity; the inner circumference of the coil assembly is arranged by a magnetic ring guide sleeve assembly, which is mainly composed of a front guide sleeve 8, a main isolation magnetic ring 9, a middle guide sleeve 15, a secondary isolation magnetic ring 18, and a rear guide sleeve 10 arranged in sequence from bottom to top, and each isolation magnetic ring and each guide sleeve are arranged up and down on the same circumference, the main isolation magnetic ring 9 is located between the front guide sleeve 8 and the middle guide sleeve 15, and the secondary isolation magnetic ring 18 is located between the middle guide sleeve 15 and the rear guide sleeve 10;

[0060] The upper surface of the main pole shoe 5 in the magnetic ring guide sleeve assembly and the wall surface of the through hole of the main pole shoe 5 are both provided with a limiting piece 6, and the limiting piece 6 is located below the inner partition layer 13.

[0061] The magnetic ring guide sleeve assembly is equipped with an inner partition 13, and the inner partition 13 is equipped with an armature 11. The lower end of the armature 11 is fixedly connected to the upper end of the valve core 2. The valve core 2 moves through the vertical through hole in the center of the main pole shoe 5 and extends into the movable transition cavity between the gasket 4 and the valve seat 1; the lower end of the valve core 2 is located directly above the outlet of the inlet flow channel of the valve seat 1.

[0062] In the specific implementation, the armature 11 is made of ultra-clean material and coated with an ultra-clean coating. The armature 11 is annular, and the bottom of the annular shape is fixedly connected to the upper end of the valve core 2.

[0063] Working process:

[0064] When the main coil 7 and the secondary coil 17 are not energized, the valve core 2 contacts the valve seat 1 due to gravity.

[0065] When the main coil 7 is energized, the armature 11 is subjected to a downward magnetic force, the valve core 2 is in close contact with the valve seat 1, and the medium cannot enter the valve cavity from the inlet flow channel on the left side of the valve seat 1. At this time, the valve is closed.

[0066] When the secondary coil 17 is energized, the armature 11 is subjected to an upward magnetic force generated by the secondary coil 17 until the magnetic force overcomes the resistance. The armature 11 then begins to move upward, and the medium flows in from the inlet flow channel on the left side of the valve seat 1 and flows out from the outlet flow channel on the right side of the valve seat 1, and the valve opens.

[0067] On this basis, by reasonably setting the control current of the main coil 7 and the secondary coil 17 so that the magnetic force of the main coil 7 and the gravity of the armature 11 and the valve core 2 are balanced with the magnetic force of the secondary coil 17, the armature 11 can be stabilized at any position of the stroke, that is, the opening of the valve can be adjusted.

[0068] When the primary coil 7 is not energized and the secondary coil 17 is energized, the armature 11 is close to the upper part of the inner partition 13 and the valve opening is maximum.

[0069] The main magnetic circuit is Figure 2 As shown:

[0070] Magnetic circuit 1: formed by main coil 7, main pole shoe 5 - limit plate 6 - air gap - armature 11 - air gap - inner partition 13 - rear guide sleeve 10 - magnetic conductive shell 12 - main pole shoe 5.

[0071] Magnetic circuit 2: formed by the main coil, main pole shoe 5 - front guide sleeve 8 - inner partition 13 - air gap - armature 11 - air gap - inner partition 13 - rear guide sleeve 10 - magnetic conductive shell 12 - main pole shoe 5.

[0072] Magnetic circuit 3: formed by secondary coil 17, secondary pole shoe 19 - inner partition 13 - air gap - armature 11 - air gap - inner partition 13 - middle guide sleeve 15 - magnetic conductive ring 16 - magnetic conductive shell 12 - secondary pole shoe 19.

[0073] Magnetic circuit 4: formed by secondary coil 17, secondary pole shoe 19 - rear guide sleeve 10 - inner partition 13 - air gap - armature 11 - air gap - inner partition 13 - middle guide sleeve 15 - magnetic conductive ring 16 - magnetic conductive shell 12 - secondary pole shoe 19.

Claims

1. An extracavity coil driven ultra-clean valve without elastic elements, characterized in that: The invention comprises a valve seat (1), a valve core (2), an outer sleeve (3), a gasket (4), a main pole shoe (5), a stopper (6), a coil assembly, a magnetic ring guide sleeve assembly, an armature (11), a magnetic outer sleeve (12) and an inner partition (13); an inlet flow channel and an outlet flow channel are respectively arranged on both sides of the interior of the valve seat (1); a outer sleeve (3) is fixedly mounted on the valve seat (1); a valve cavity is formed between the interior of the outer sleeve (3) and the valve seat (1); the inlet flow channel and the outlet flow channel are both connected to the valve cavity; an inner wall around the valve cavity is provided with a magnetic outer sleeve (12); the magnetic outer sleeve (12) is sleeved with a coil assembly; a permanent magnet (14) or a secondary pole shoe (19) is arranged in the magnetic outer sleeve (12) above the coil assembly; a main pole is arranged in the magnetic outer sleeve (12) above the coil assembly; The main pole shoe (5) is provided with a vertical through hole in the center for the valve core (2) to pass through, and a gasket (4) is provided on the bottom surface of the main pole shoe (5). The gasket (4) is supported by an annular boss on the top surface of the valve seat (1), so that a gap is formed between the gasket (4) and the bottom surface of the valve seat (1) to form a movable transition cavity; a magnetic ring guide sleeve assembly is arranged on the inner circumference of the coil assembly, and an inner partition (13) is installed in the magnetic ring guide sleeve assembly, and an armature (11) is installed in the inner partition (13). The lower end of the armature (11) is fixedly connected to the upper end of the valve core (2), and the valve core (2) is movable through the vertical through hole in the center of the main pole shoe (5) and then extends into the movable transition cavity between the gasket (4) and the valve seat (1); the lower end of the valve core (2) is located directly above the outlet of the inlet flow channel of the valve seat (1); The coil assembly is mainly composed of a main coil (7); the magnetic ring guide sleeve assembly is mainly composed of a front guide sleeve (8), a main magnetic isolation ring (9) and a rear guide sleeve (10) which are arranged in sequence from bottom to top, the front guide sleeve (8), the main magnetic isolation ring (9) and the rear guide sleeve (10) are arranged up and down on the same circumference, and the main magnetic isolation ring (9) is located between the front guide sleeve (8) and the rear guide sleeve (10); Alternatively, the coil assembly is mainly composed of a main coil (7), a magnetic conductive ring (16), and a secondary coil (17) which are arranged in sequence from bottom to top; the magnetic ring guide sleeve assembly is mainly composed of a front guide sleeve (8), a main magnetic isolation ring (9), a middle guide sleeve (15), a secondary magnetic isolation ring (18), and a rear guide sleeve (10) which are arranged in sequence from bottom to top, each magnetic isolation ring and each guide sleeve are arranged up and down on the same circumference, the main magnetic isolation ring (9) is located between the front guide sleeve (8) and the middle guide sleeve (15), and the secondary magnetic isolation ring (18) is located between the middle guide sleeve (15) and the rear guide sleeve (10).

2. The extracavity coil driven ultra-clean valve without elastic elements according to claim 1, characterized in that: The coil assembly forms a magnetic field in the magnetic ring guide sleeve assembly through the auxiliary structure of the main pole shoe (5) and the permanent magnet (14) / secondary coil (17). The magnetic field is applied to the armature (11) to drive the armature (11) and the valve core (2) connected thereto to move up and down, thereby controlling whether the lower end of the valve core (2) blocks the outlet of the inlet flow channel of the valve seat (1), controlling the balance between the magnetic force and gravity on the armature (11), stabilizing the armature (11) at any position within the stroke and maintaining the opening, and finally realizing the opening and closing and opening control of the ultra-clean valve without elastic elements.

3. The extracavity coil driven ultra-clean valve without elastic elements according to claim 1 or 2, characterized in that: The lower end surface of the valve core (2) is provided with an inner groove, and the outlet of the inlet flow channel of the valve seat (1) is provided with a boss on the surface of the valve seat (1); when the valve core (2) falls to the outlet of the inlet flow channel, the boss is embedded in the inner groove, so that the valve core (2) blocks the outlet of the inlet flow channel of the valve seat (1).

4. The extracavity coil driven ultra-clean valve without elastic element according to claim 1, characterized in that: The surface of the armature (11) is coated with an ultra-clean coating.

5. The extracavity coil driven ultra-clean valve without elastic element according to claim 1, characterized in that: The armature (11) is annular, and the bottom of the annular ring is fixedly connected to the upper end of the valve core (2).

6. The extracavity coil driven elastic element-free ultra-clean valve according to claim 1, characterized in that: The upper surface of the main pole shoe (5) in the magnetic ring guide sleeve assembly and the wall surface of the through hole of the main pole shoe (5) are both provided with a limiting plate (6), and the limiting plate (6) is located below the inner partition layer (13).

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