Evaporation device

Abstract

The present application relates to the field of evaporation technology, and in particular to an evaporation device. The evaporation device includes a crucible with an evaporation tank; a cover plate, which is covered on the evaporation tank; a nozzle group, which is connected to the evaporation tank, and the nozzle group includes a first nozzle group and a second nozzle group, and the second nozzle group is arranged at both ends of the first nozzle group; the first nozzle group includes a plurality of first nozzles and two end nozzles, and the second nozzle group includes a plurality of second nozzles, and the end nozzles are located at the ends of the first nozzle group along the arrangement direction, and the end nozzles are adjacent to the first nozzle and the second nozzle respectively; the spacing between the end nozzle and the first nozzle or the second nozzle adjacent thereto is a first spacing, the spacing between two adjacent first nozzles is a second spacing, and the spacing between two adjacent second nozzles is a third spacing, and the first spacing is greater than the second spacing, and the second spacing is greater than the third spacing. The evaporation device provided by the present application effectively improves the evaporation quality of the substrate, especially the evaporation quality of the edge of the substrate.

Description

Technical Field

[0001] The present application relates to the field of evaporation technology, and in particular to an evaporation device. Background Art

[0002] In the field of display technology, vacuum coating is a relatively mature film-forming method in the process of display manufacturing. The substrate for film formation is heated and evaporated onto the substrate through an evaporation device. However, the existing evaporation device has poor evaporation quality for the substrate, thereby reducing the quality of the product. In addition, due to the particularity of some materials, the nozzle in the evaporation device is easily blocked during the evaporation process, but the existing nozzle is not easy to disassemble and replace.

[0003] Therefore, there is an urgent need for an evaporation device to solve the above problems. Summary of the invention

[0004] The present application provides an evaporation device to improve the evaporation quality of a substrate, especially the evaporation quality of the edge of the substrate.

[0005] The embodiment of the present application provides an evaporation device, comprising:

[0006] A crucible having an evaporation tank;

[0007] A cover plate, arranged on the evaporation tank;

[0008] A nozzle group is connected to the evaporation tank, the nozzle group includes a first nozzle group and a second nozzle group, and along the arrangement direction of the nozzle group, the second nozzle group is arranged at two ends of the first nozzle group;

[0009] Along the arrangement direction, the first nozzle group includes a plurality of first nozzles and two end nozzles, and the second nozzle group includes a plurality of second nozzles, wherein the end nozzles are located at the ends of the first nozzle group along the arrangement direction, and the end nozzles are adjacent to the first nozzle and the second nozzle respectively;

[0010] The spacing between the end nozzle and the first nozzle or the second nozzle adjacent thereto is a first spacing, the spacing between two adjacent first nozzles is a second spacing, the spacing between two adjacent second nozzles is a third spacing, the first spacing is greater than the second spacing, and the second spacing is greater than the third spacing.

[0011] In a possible design, the nozzle outlet diameters of the first nozzle and the end nozzle are the same, and the nozzle outlet diameter of the first nozzle is 1.5-2 times the nozzle outlet diameter of the second nozzle.

[0012] In a possible design, nozzle outlet angles of the first nozzle, the end nozzle, and the second nozzle are 30°-60°.

[0013] In a possible design, it further includes a nozzle mounting strip for mounting the nozzle group, the cover plate is provided with a fixing groove along the arrangement direction of the nozzle group, and the nozzle mounting strip is detachably disposed in the fixing groove.

[0014] In a possible design, the top surface of the nozzle mounting strip is recessed with a plurality of nozzle mounting holes for mounting the nozzle group, the nozzle mounting holes are linearly distributed along the arrangement direction of the nozzle group, and the nozzle mounting holes are symmetrically distributed along an axial direction perpendicular to the arrangement direction of the nozzle group.

[0015] In a possible design, a nozzle connecting pipe is further included, one end of which is connected to the nozzle group, and the other end of which is connected to the nozzle mounting hole.

[0016] In a possible design, the diameter of the fixing groove gradually decreases from the top to the bottom, and a boss for supporting the nozzle mounting strip is arranged in the fixing groove.

[0017] In a possible design, a top cross-sectional area of ​​the evaporation tank is larger than a bottom cross-sectional area of ​​the evaporation tank.

[0018] In a possible design, it further includes an annular fixing plate, which is arranged around the cover plate and fixed to the top of the crucible.

[0019] In a possible design, the top surface of the crucible is further concavely provided with an annular sealing groove, and the annular fixing plate is provided with a sealing member matched with the annular sealing groove.

[0020] It can be seen that in the above aspects, the evaporation device provided in the present application effectively improves the evaporation quality of the substrate, especially the evaporation quality of the edge of the substrate, by making the first spacing larger than the second spacing, and the second spacing larger than the third spacing. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A front view of the evaporation device provided in an embodiment of the present application;

[0022] Figure 2 A top view of the evaporation device provided in an embodiment of the present application;

[0023] Figure 3 for Figure 1 A schematic cross-sectional view of the middle cover plate and the annular fixing plate;

[0024] Figure 4 for Figure 1 A schematic cross-sectional view of the middle nozzle mounting strip;

[0025] Figure 5 for Figure 1 A top view of the middle nozzle mounting strip;

[0026] Figure 6 for Figure 1 Top view of the middle crucible.

[0027] Reference numerals:

[0028] H1 - first spacing;

[0029] H2 - second spacing;

[0030] H3 - third spacing;

[0031] I-arrangement direction;

[0032] 1- Crucible;

[0033] 11- evaporation tank;

[0034] 12- annular sealing groove;

[0035] 2-cover plate;

[0036] 21-fixing slot;

[0037] 211- boss;

[0038] 3- Nozzle group;

[0039] 31-first nozzle group;

[0040] 311-first nozzle;

[0041] 312-end nozzle;

[0042] 32- second nozzle group;

[0043] 321-second nozzle;

[0044] 4- Nozzle mounting strip;

[0045] 41-nozzle mounting hole;

[0046] 5- annular fixing plate;

[0047] 51-Seal.

[0048] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application. DETAILED DESCRIPTION

[0049] The present application is described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0050] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance; unless otherwise specified or explained, the term "multiple" refers to two or more; the terms "connected" and "fixed" should be understood in a broad sense, for example, "connected" can be a fixed connection, a detachable connection, an integral connection, or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0051] In the description of this specification, it should be understood that the directional words such as "upper" and "lower" described in the embodiments of the present application are described at the angles shown in the accompanying drawings and should not be understood as limiting the embodiments of the present application. In addition, in the context, it should also be understood that when it is mentioned that an element is connected to another element "upper" or "lower", it can not only be directly connected to another element "upper" or "lower", but also indirectly connected to another element "upper" or "lower" through an intermediate element.

[0052] In the field of display technology, vacuum coating is a relatively mature film-forming method in the process of display manufacturing. The substrate for film formation is heated and evaporated onto the substrate through an evaporation device. However, the existing evaporation device has poor evaporation quality for the substrate, thereby reducing the quality of the product. In addition, due to the particularity of some materials, the nozzle in the evaporation device is easily blocked during the evaporation process, but the existing nozzle is not easy to disassemble and replace.

[0053] In order to solve the above problems, the present application provides a vapor deposition device. Figure 1 and Figure 2 As shown, they are respectively a front view and a top view of the evaporation device provided in an embodiment of the present application. The evaporation device comprises a crucible 1, a cover plate 2 and a nozzle group 3, wherein:

[0054] The crucible 1 has an evaporation tank 11 (see Figure 6 ), the cover plate 2 is covered on the evaporation tank 11, the nozzle group 3 is connected to the evaporation tank 11, the nozzle group 3 includes a first nozzle group 31 and a second nozzle group 32, along the arrangement direction I of the nozzle group 3, the second nozzle group 32 is arranged at both ends of the first nozzle group 31; along the arrangement direction I, the first nozzle group 31 includes a plurality of first nozzles 311 and two end nozzles 312, the second nozzle group 32 includes a plurality of second nozzles 321, the end nozzles 312 are located at the ends of the first nozzle group 31 along the arrangement direction I, and the end nozzles 312 are adjacent to the first nozzles 311 and the second nozzles 321 respectively; the spacing between the end nozzle 312 and the first nozzle 311 or the second nozzle 321 adjacent thereto is a first spacing H1 (see Figure 5 ), the spacing between two adjacent first nozzles 311 is the second spacing H2, the spacing between two adjacent second nozzles 321 is the third spacing H3, the first spacing H1 is greater than the second spacing H2, and the second spacing H2 is greater than the third spacing H3. For the first nozzle group 31, after the evaporation material becomes gaseous, it will gradually move to both ends, that is, the concentration of the gas gradually increases and the movement speed gradually decreases as it approaches the two ends of the first nozzle group 31, thereby producing a distribution form with low concentration in the middle and high concentration at both ends. In order to allow the evaporation material at both ends of the evaporation tank 11 to be sprayed evenly, the distribution density of the end nozzle 312 should be smaller, so the spacing between the end nozzle 312 and the adjacent first nozzle 311 or second nozzle 321 (i.e., the first spacing H1) should be greater than the spacing between the two adjacent first nozzles 311 (i.e., the second spacing H2). However, for the second nozzle group 32, since the evaporation source is a rectangular finite element, there is a boundary effect at the two end boundaries (i.e., the position of the second nozzle group 32), which causes the gas at both ends of the evaporation groove 11 to gradually accumulate, thereby forming a gas distribution form with high concentration and relatively unstable movement at the position of the second nozzle group 32. In order to make the gas injection at the second nozzle group 32 stable and uniform, the distribution density of the second nozzle group 32 should be larger. Therefore, the distance between two adjacent second nozzles 321 (i.e., the third distance H3) should be smaller than the distance between two adjacent first nozzles 311 (i.e., the second distance H2).

[0055] In some embodiments, the nozzle outlet diameters of the first nozzle 311 and the end nozzle 312 are the same, and the nozzle outlet diameter of the first nozzle 311 is 1.5-2 times the nozzle outlet diameter of the second nozzle 321. As described above, in order to make the gas injection at the second nozzle group 32 stable and uniform, it is necessary not only to reduce the distance between two adjacent second nozzles 321 (i.e., the third distance H3), but also to reduce the nozzle outlet diameter of the second nozzle 321, so as to achieve the overall uniformity of the evaporation source injection.

[0056] In some embodiments, the nozzle outlet angles of the first nozzle 311, the end nozzle 312 and the second nozzle 321 are 30°-60°, so that the uniformity of the film layer evaporated at various positions on the substrate can be controlled by controlling the spraying angle of the evaporation material.

[0057] In some embodiments, Figure 3 and Figure 4As shown, the evaporation device further includes a nozzle mounting bar 4 for mounting the nozzle group 3, and the cover plate 2 is provided with a fixing groove 21 along the arrangement direction of the nozzle group 3, and the nozzle mounting bar 4 is detachably arranged in the fixing groove 21. By providing the nozzle mounting bar 4, the nozzle group 3 can be replaced as a whole to meet the evaporation requirements with large differences, thereby improving the efficiency of evaporation and facilitating the disassembly effect.

[0058] The diameter of the fixing groove 21 gradually decreases from the top to the bottom, and a boss 211 for supporting the nozzle mounting strip 4 is arranged in the fixing groove 21, so as to increase the stability of the fixing of the nozzle mounting strip 4 and improve the effect of easy disassembly of the nozzle mounting strip 4.

[0059] In some embodiments, the top surface of the nozzle mounting bar 4 is concavely provided with a plurality of nozzle mounting holes 41 for mounting the nozzle groups 3, the nozzle mounting holes 41 are linearly distributed along the arrangement direction I of the nozzle groups 3, and the nozzle mounting holes 41 are symmetrically distributed along the axial direction I perpendicular to the arrangement direction of the nozzle groups 3. By evenly distributing the positions of the nozzle groups 3, the uniformity of evaporation is further improved, and the controllability of the evaporation device is increased.

[0060] In some embodiments, the evaporation device further includes a nozzle connecting tube (not shown in the figure), one end of the nozzle connecting tube is connected to the nozzle group 3, and the other end is connected to the nozzle mounting hole 41. Each nozzle (including the first nozzle 311, the end nozzle 312 and the second nozzle 321) can be connected to the nozzle mounting hole 41, for example, the nozzle is provided with an external thread, and the nozzle mounting hole 41 is provided with an internal thread matching therewith; during the installation process, the nozzle connecting tube can be first installed on the nozzle mounting hole 41, and then the nozzle is installed on the nozzle mounting tube, for example, one end of the nozzle connecting tube has an external thread and the other end has an internal thread. By providing a nozzle connecting tube, the travel of the evaporation material can be reduced to meet the needs of different evaporation requirements. By replacing a single nozzle, on the one hand, it is convenient to clean the nozzle, and on the other hand, it adapts to the evaporation requirements with smaller differences.

[0061] In some embodiments, Figure 6 As shown, the top cross-sectional area of ​​the evaporation tank 11 is larger than the bottom cross-sectional area of ​​the evaporation tank 11 , which is beneficial to the evaporation of the deposition material and reduces the island effect in the crucible 1 .

[0062] In some embodiments, see Figure 3 and Figure 6The evaporation device further includes an annular fixing plate 5, which is arranged around the cover plate 2 and fixed to the top of the crucible 1. For example, the cover plate 2 is connected to the crucible 1 by screws, etc., and the cover plate 2 is extended near the bottom surface of the crucible 1 to surround the cover plate 2. The thickness of the annular fixing plate 5 is less than the thickness of the cover plate 2, so that the cost of manufacturing materials can be reduced as much as possible.

[0063] In some embodiments, the top surface of the crucible 1 is further provided with an annular sealing groove 12 , and the annular fixing plate 5 is provided with a sealing member 51 adapted to the annular sealing groove 12 , so as to improve the sealing of the material in the crucible 1 when the crucible 1 is subjected to evaporation.

[0064] In summary, the evaporation device provided in the embodiment of the present application effectively improves the evaporation quality of the substrate, especially the evaporation quality of the edge of the substrate, by setting the first spacing H1 of the nozzle group 3 to be larger than the second spacing H2, and the second spacing H2 to be larger than the third spacing H3. In addition, the cover plate 2 is detachably connected to the crucible 1, so that the nozzle group 3 can be quickly replaced as a whole; and the cover plate 2 is detachably connected to the nozzle group 3, so that a single nozzle can be replaced, so as to improve the efficiency of evaporation and facilitate disassembly.

[0065] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A vapor deposition device, characterized in that: include: A crucible (1) having an evaporation groove (11), wherein a top cross-sectional area of ​​the evaporation groove (11) is larger than a bottom cross-sectional area of ​​the evaporation groove (11); A cover plate (2) is arranged on the evaporation tank (11); A nozzle group (3) is connected to the evaporation tank (11), the nozzle group (3) comprising a first nozzle group (31) and a second nozzle group (32), and along an arrangement direction (I) of the nozzle group (3), the second nozzle group (32) is arranged at two ends of the first nozzle group (31); Along an arrangement direction (I), the first nozzle group (31) comprises a plurality of first nozzles (311) and two end nozzles (312), the nozzle outlet diameters of the first nozzles (311) and the end nozzles (312) being the same, the second nozzle group (32) comprises a plurality of second nozzles (321), the end nozzles (312) being located at the ends of the first nozzle group (31) along the arrangement direction (I), and the end nozzles (312) being adjacent to the first nozzles (311) and the second nozzles (321), respectively; The spacing between the end nozzle (312) and the first nozzle (311) or the second nozzle (321) adjacent thereto is a first spacing (H1), the spacing between two adjacent first nozzles (311) is a second spacing (H2), the spacing between two adjacent second nozzles (321) is a third spacing (H3), the first spacing (H1) is greater than the second spacing (H2), and the second spacing (H2) is greater than the third spacing (H3).

2. The evaporation device according to claim 1, characterized in that: The nozzle outlet diameter of the first nozzle (311) is 1.5 to 2 times the nozzle outlet diameter of the second nozzle (321).

3. The evaporation device according to claim 2, characterized in that: The nozzle outlet angles of the first nozzle (311), the end nozzle (312) and the second nozzle (321) are 30°-60°.

4. The evaporation device according to claim 1, characterized in that: It also comprises a nozzle mounting strip (4) for mounting the nozzle group (3); the cover plate (2) is provided with a fixing groove (21) along the arrangement direction of the nozzle group (3); and the nozzle mounting strip (4) is detachably disposed in the fixing groove (21).

5. The evaporation device according to claim 4, characterized in that: A plurality of nozzle mounting holes (41) for mounting the nozzle group (3) are recessed on the top surface of the nozzle mounting strip (4), the nozzle mounting holes (41) being linearly distributed along an arrangement direction (I) of the nozzle group (3), and the nozzle mounting holes (41) being symmetrically distributed along an axial direction perpendicular to the arrangement direction (I) of the nozzle group (3).

6. The evaporation device according to claim 5, characterized in that: It also comprises a nozzle connecting pipe, one end of which is connected to the nozzle group (3), and the other end of which is connected to the nozzle mounting hole (41).

7. The evaporation device according to claim 4, characterized in that: The diameter of the fixing groove (21) gradually decreases from the top to the bottom, and a boss (211) for supporting the nozzle mounting strip (4) is provided in the fixing groove (21).

8. The evaporation device according to any one of claims 1 to 7, characterized in that: It also comprises an annular fixing plate (5), wherein the annular fixing plate (5) is arranged around the four sides of the cover plate (2), and the annular fixing plate (5) is fixedly arranged on the top of the crucible (1).

9. The evaporation device according to claim 8, characterized in that: The top surface of the crucible (1) is also concavely provided with an annular sealing groove (12), and the annular fixing plate (5) is provided with a sealing member (51) adapted to the annular sealing groove (12).

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