A flexible support structure for a large-aperture transmissive reflector
Through the design of flexible support structure, the flexible mechanism applies correction force and adjust support force to the mirror, which solves the problems of gravity deformation and environmental sensitivity of the transmission mirror, improves the mirror quality and assembly efficiency, and reduces the risk of light scattering.
Patent Information
- Application Number
- CN202110410792.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2021-04-14
- Publication Date
- 2025-07-08
- Estimated Expiration
- 2041-04-14
AI Technical Summary
The support structure of the existing transmission mirror is rigid support and cannot compensate for gravity deformation, resulting in large deformation of the mirror surface and is sensitive to temperature fluctuations and vibrations. The frictional uncertainty affects the assembly and adjustment process and quality consistency.
A flexible support structure is adopted, including a mirror frame, a surface correction assembly, a first support assembly, a second support assembly and a third support assembly, and a flexible mechanism applies correction force and adjusts support force to the reflector, compensates for gravity deformation through flexible deformation, and maintains the reflector and the support structure well in contact with the reflector through a posture compensation mechanism.
Reduce mirror deformation, improve mirror quality, reduce assembly difficulty, improve stability and beam quality, reduce light scattering risks, and have light transmission capabilities for online diagnosis.
Smart Images

Figure CN113138452B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of precision opto-mechanics, and particularly to a flexible support structure for a large-aperture transmissive mirror. Background Art
[0002] The transport mirror is a key optical element in the target field of an ICF device. Its surface accuracy and structural stability will directly affect the transmission quality and pointing accuracy of high-power laser beams. The transport mirror has the characteristics of large aperture, non-circular aperture (rectangular), large mass, variable orientation, high requirements for surface accuracy and structural stability. Limited by the manufacturing process and cost of the transport mirror, improving the support performance of the transport mirror through reasonable support methods and opto-mechanical structure design has become an important means to enhance the performance of the transport mirror. Currently, the ICF devices at home and abroad mainly adopt two methods: three-point back support based on interference fit (expansion structure) and circumferential multi-point support based on screw pressing. Both support methods are passive support structures and do not have the ability to compensate and correct the gravity deformation of the transport mirror; both support methods are rigid support structures, which are prone to structural deformation of the transport mirror and are sensitive to environmental conditions such as temperature fluctuations, vibrations, and shocks; in addition, for the transport mirror with the mirror surface facing down, both support methods mainly balance the self-weight of the mirror body through the friction of the connection surface, resulting in a large clamping force on the mirror body, causing a large additional deformation on the mirror surface, and the uncertainty and difficulty in accurately measuring the friction force will have an adverse impact on the alignment process, efficiency, and quality consistency of the support structure.
[0003] Among the transport mirrors in the target field of the ICF device, the inclined transport mirror is the most critical for improving the beam quality and pointing accuracy of the target field. It has the characteristics of large self-weight deformation and difficult to control. Its support design is the most representative in the target field transmission reflection environment and is also a key task in the support design of the target field transport mirror. Summary of the Invention
[0004] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a flexible support structure for a large-aperture transmissive mirror, which is used for the support structure design of large-aperture rectangular transmissive mirrors placed obliquely or horizontally in the target field of an ICF device.
[0005] The object of the present invention is achieved by the following technical solutions: A flexible support structure for a large-aperture transmission mirror, comprising a frame, a surface correction assembly, a first support assembly, a second support assembly and a third support assembly. The frame has a structure with an internal cavity. The mirror is placed inside the frame and is supported in the frame by the surface correction assembly, the first support assembly, the second support assembly and the third support assembly. The mirror is of a rectangular structure, and four sides of the mirror are supported on the frame by one first support assembly, second support assembly and third support assembly respectively. The surface correction assembly is supported between the top of the mirror and the frame. Specifically, the mirror has a rectangular aperture, the mirror surface faces downward and is inclined, and an annular rectangular cut groove is provided on the side surface of the mirror.
[0006] Specifically, a plurality of surface correction assemblies are provided and are evenly distributed. The surface correction assembly includes a correction flexible hinge, a first gasket and a first connecting plate. The correction flexible hinge is fixed on the first connecting plate, the first connecting plate is fixed on the frame, and the first gasket is fixed on the correction flexible hinge. The first gasket contacts the top surface of the mirror.
[0007] Specifically, the first support assembly includes a second connecting plate, a circumferential flexible hinge, a first normal flexible hinge and a second gasket. The circumferential flexible hinge and the first normal flexible hinge are both fixed on the second connecting plate. A second gasket is provided on both the circumferential flexible hinge and the first normal flexible hinge. The second connecting plate is fixed on the frame. The second gasket on the circumferential flexible hinge fits against the bottom edge of the annular rectangular cut groove, and the second gasket provided on the first normal flexible hinge fits against the upper groove side edge of the annular rectangular cut groove.
[0008] Specifically, the third support assembly and the first support assembly are of a symmetric structure.
[0009] Specifically, the second support assembly includes a third connecting plate, a second normal flexible hinge and a third gasket. The second normal flexible hinge is fixed on the third connecting plate, the third gasket is fixed on the second normal flexible hinge, and the third gasket fits against the upper groove side edge of the annular rectangular cut groove.
[0010] Specifically, the circumferential flexible hinge, the first normal flexible hinge, the second normal flexible hinge and the correction flexible hinge all include a rotating mechanism, a driving mechanism and an attitude compensation mechanism. The rotating mechanism, the driving mechanism and the attitude compensation mechanism are all connected to the flexible hinge block. The attitude compensation mechanism is a series biaxial flexible mechanism based on an arc cut groove. The attitude compensation mechanism contacts the mirror to provide two-dimensional angular deformation to ensure good contact with the corresponding surface of the mirror. The rotating mechanism is a uniaxial flexible mechanism based on an arc cut groove, which is used to convert the rotation angle of the mechanism into the displacement output of the entire end of the flexible hinge. The driving mechanism is a uniaxial flexible mechanism based on a diamond cut groove.
[0011] Specifically, adjustment screws are threadedly connected to the first connecting plate, the second connecting plate, and the third connecting plate. One end of each adjustment screw abuts against the corresponding driving mechanism, and the driving mechanism converts the tightening torque of the adjustment screw into a torque on the rotating mechanism.
[0012] The present invention has the following advantages:
[0013] 1. The circumferential multi-point support method of the present invention utilizes the normal force at the contact surface between the mirror and the support structure to balance the self-weight of the mirror to achieve the support of the mirror, avoiding the support structure from applying additional clamping force to the mirror, which is beneficial to reducing the additional mirror surface deformation introduced by the clamping force.
[0014] 2. The circumferential support method of the present invention adopts a fully flexible floating support structure scheme, which can adjust the contact force between the mirror and the support structure, thereby controlling and optimizing the distribution of the support force to further improve and enhance the performance of the support structure.
[0015] 3. The support method of the present invention adopts a semi-active support mode. Through the surface shape correction component, a correction force can be applied to the mirror to compensate for the gravity deformation of the mirror, further improving the surface shape quality of the mirror surface.
[0016] 4. Compared with the existing circumferential multi-point support scheme based on screw pressing, the support scheme of the present invention has fewer support points, which is beneficial to reducing the assembly difficulty of the support components, improving the assembly efficiency and process consistency.
[0017] 5. The flexible support structure in the present invention provides the mirror with positioning, support, and surface shape correction capabilities, while ensuring that the mirror and the support structure maintain a non-relatively sliding contact state during the alignment process, effectively reducing the adverse impact of the friction force at the contact surface between the mirror and the support structure on the support performance. Moreover, the elastic deformation of the flexible mechanism can suppress the structural deformation of the mirror caused by factors such as temperature fluctuations, vibrations, and impacts, and at the same time effectively reduce the position and attitude changes of the mirror, thereby enhancing the stability of the support structure.
[0018] 6. Compared with the existing back support method, the support structure is located outside the light passing aperture of the mirror surface, which can effectively reduce light scattering and reduce the risk of damage to optical elements and structural parts and optical surface contamination caused by scattered light. Moreover, it has a certain backlight transmission ability to facilitate the online diagnosis and monitoring of the beam quality. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a schematic diagram of the flexible support structure of the large-aperture transmission mirror of the present invention;
[0020] Figure 2 It is a schematic diagram of the flexible support structure of the large-aperture transmission mirror after removing the mirror frame of the present invention;
[0021] Figure 3 Schematic diagram of the first support component structure of the present invention;
[0022] Figure 4 Schematic diagram of the back structure of the first support component of the present invention;
[0023] Figure 5 Schematic diagram of the third support component structure of the present invention;
[0024] Figure 6 Schematic diagram of the back structure of the third support component of the present invention;
[0025] Figure 7 Schematic diagram of the second support component structure of the present invention;
[0026] Figure 8 Schematic diagram of the surface correction component structure of the present invention;
[0027] Figure 9 Schematic diagram of the calculation model of the output force of the correction flexible hinge and circumferential flexible hinge of the present invention;
[0028] Figure 10 Schematic diagram of the calculation model of the output force of the normal flexible hinge of the present invention;
[0029] Figure 11 Schematic diagram of the structure and support principle of the mirror of the present invention;
[0030] Figure 12 is Figure 11 Schematic diagram of the enlarged structure at position A in
[0031] Figure 13 Schematic diagram of the structure of the correction flexible hinge and circumferential flexible hinge of the present invention;
[0032] Figure 14 Schematic diagram of the structure of the first normal flexible hinge and the second normal flexible hinge of the present invention;
[0033] In the figure: 1 - mirror, 103 - annular rectangular groove, 2 - surface correction component, 3 - first support component, 4 - second support component, 5 - third support component, 6 - mirror frame, 7 - second gasket, 8 - adjusting screw, 9 - correction flexible hinge, 10 - circumferential flexible hinge, 11 - first normal flexible hinge, 12 - second connecting plate, 13 - third gasket, 14 - second normal flexible hinge, 15 - third connecting plate, 16 - first connecting plate, 17 - first gasket, 18 - rotating mechanism, 19 - driving mechanism, 20 - attitude compensation mechanism, 21 - flexible hinge block, 22 - flexible block. Detailed implementation manners
[0034] In order to make the objectives, technical solutions and advantages of the present invention more clear and understandable, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention, that is, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. The components of the embodiments of the present invention generally described and illustrated in the drawings here can be arranged and designed in a variety of different configurations.
[0035] Therefore, the detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present invention.
[0036] It should be noted that relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising one..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.
[0037] The present invention will be further described below in conjunction with the accompanying drawings, but the scope of protection of the present invention is not limited to the following.
[0038] Such as Figures 1 to 14As shown in the figure, a flexible support structure for a large-aperture transmissive mirror includes a mirror frame 6, a surface correction assembly 2, a first support assembly 3, a second support assembly 4, and a third support assembly 5. The mirror frame 6 has a structure with an internal cavity. The mirror 1 is placed inside the mirror frame 6 and is supported in the mirror frame 6 by the surface correction assembly 2, the first support assembly 3, the second support assembly 4, and the third support assembly 5. The mirror 1 has a rectangular structure, and all four sides of the mirror 1 are supported on the mirror frame 6 by one first support assembly 3, second support assembly 4, and third support assembly 5 respectively. The surface correction assembly 2 is supported between the top of the mirror 1 and the mirror frame 6. The first support assembly 3, second support assembly 4, and third support assembly 5 provided on the opposite sides of the mirror 1 are symmetrically arranged. In this embodiment, there are four surface correction assemblies 2, which are respectively arranged at the four corners of the mirror 1 to support the four corners. The present invention utilizes the grooved surface of the annular rectangular groove 103 in the mirror 1 to apply normal displacement constraints 104 in the circumferential and normal directions of the mirror 1 by means of discrete points, so as to realize the constraint and positioning of the mirror; among them, the normal displacement constraint at the circumferential grooved surface S1 is used for the translational freedom and all rotational freedoms of the mirror 1 in the direction perpendicular to the grooved surface S1, and the normal displacement constraint at the normal grooved surface S2 is used to constrain the translational freedom of the mirror 1 in the direction normal to the normal of the grooved surface S2; the normal displacement constraint at the circumferential grooved surface S1 is provided by the circumferential flexible hinges 10 of the first support assembly 3 and the third support assembly 5, and the normal displacement constraint at the normal grooved surface S2 is provided by the first normal flexible hinges 11 of the first support assembly 3 and the third support assembly 5 and the second normal flexible hinges 14 on the second support assembly 4; the correction flexible hinge 9 of the surface correction assembly 2 can provide a constraint for the translational freedom of the mirror 1 in the direction of the negative normal perpendicular to the top surface of the mirror 1; the correction flexible hinge 9, the circumferential flexible hinge 10, the first normal flexible hinge 11, and the second normal flexible hinge 14 are all flexible mechanisms. By utilizing their elastic deformation characteristics, the binding forces and supporting forces at each constraint point of the mirror 1 can be appropriately controlled, and then the positioning, support, and surface shape correction of the mirror can be jointly completed; among them, the rotating mechanism and the driving mechanism in the flexible hinge can convert the input displacement and torque of the adjusting screw 8 into the output force of the flexible hinge, and then adjust the binding forces and supporting forces at each constraint point; the attitude compensation mechanism has a certain two-dimensional angular movement ability, can conform to the change of the attitude of the mirror 1, eliminate the gap between the contact surfaces of the mirror 1 and the gasket, ensure good contact between the two, so as to reduce local stress; the quantitative relationships (ignoring the friction between the contact surfaces of the gasket 7 and the mirror 1) between the output forces F1 at the ends of the correction flexible hinge 9 and the circumferential flexible hinge 10, the output forces F2 at the ends of the first normal flexible hinge 11 and the second normal flexible hinge 14, and the tightening torque T of the adjusting screw are respectively
[0039]
[0040] In the formula, L1 is the distance between the driving mechanism and the rotating mechanism in the vertical direction in the correction flexible hinge 8 and the circumferential flexible hinge 10, L2 is the distance between the attitude compensation mechanism 20 and the rotating mechanism in the horizontal direction in the first normal flexible hinge 11 and the second normal flexible hinge 14, K1 is the rotational stiffness of the rotating mechanism, K2 is the translational stiffness of the driving mechanism, λ and φ are respectively the lead angle and the equivalent friction angle of the adjusting screw 8, and p and n are the pitch and the number of turns of the adjusting screw 8. Further, the mirror 1 has a rectangular aperture, the mirror surface of the mirror 1 faces downward and is inclined, and an annular rectangular cut groove 103 is provided on the side surface of the thickness of the mirror 1. The annular rectangular cut groove 103 is arranged around the mirror 1 for one week, and its position dimension h and shape dimensions w and d are obtained according to mechanical calculations.
[0041] Further, a plurality of surface correction assemblies 2 are provided and are evenly distributed. The surface correction assembly 2 includes a correction flexible hinge 9, a first gasket 17 and a first connecting plate 16. The correction flexible hinge 9 is fixed on the first connecting plate 16, the first connecting plate 16 is fixed on the mirror frame 6, and the first gasket 17 is fixed on the correction flexible hinge 9. The first gasket 17 is in contact with the top surface of the mirror 1. The first gasket 17 is connected to the output end of the correction flexible hinge 9 by a hole-shaft fit, and is connected to the top surface 103 of the mirror 1 by direct contact. The correction flexible hinge 9 can be connected to the first connecting plate 16 by bolts, and then the first connecting plate 16 is fixed on the mirror frame 6 by bolts; the correction flexible hinge 9 is a flexible mechanism for restricting the movement of the mirror 1 along the top surface 103 direction and applying a certain correction force to the mirror 1 to compensate for the gravity deformation of the mirror 1; the correction force output by the correction flexible hinge 9 is controlled by the adjusting screw 8.
[0042] Further, the first support assembly 3 includes a second connecting plate 12, a circumferential flexible hinge 10, a first normal flexible hinge 11, and a second gasket 7. The circumferential flexible hinge 10 and the first normal flexible hinge 11 are both fixed to the second connecting plate 12. A second gasket 7 is provided on each of the circumferential flexible hinge 10 and the first normal flexible hinge 11. The second connecting plate 12 is fixed to the lens frame 6. The second gasket 7 on the circumferential flexible hinge 10 is in contact with the bottom edge of the groove of the annular rectangular groove 103, and the second gasket 7 provided on the first normal flexible hinge 11 is in contact with the upper side edge of the groove of the annular rectangular groove 103. The second gasket 7 is connected to the ends of the circumferential flexible hinge 10 and the first normal flexible hinge 11 by a hole-shaft fit. The circumferential flexible hinge 10 is connected to the middle surface S1 of the annular rectangular groove 103 through the second gasket 7 for circumferential positioning and support of the mirror 1; the first normal flexible hinge 11 is connected to the middle surface S2 of the annular rectangular groove 103 through the second gasket 7 for normal positioning and support of the mirror 1; the circumferential flexible hinge 10 and the first normal flexible hinge 11 are both flexible mechanisms, which can provide adjustable supporting forces, thereby improving the distribution state of the supporting forces to reduce the deformation of the mirror 1 and improve the installation accuracy of the spatial position and orientation of the mirror 1; the supporting forces output by the circumferential flexible hinge 10 and the first normal flexible hinge 11 are controlled by adjusting screws 8.
[0043] Further, the third support assembly 5 and the first support assembly 3 are of symmetric structures. The third support assembly 5 and the first support assembly 3 are composed of the same components. The difference lies in that the positions where the circumferential flexible hinge 10 and the first normal flexible hinge 11 are connected to the second connecting plate 12 are different. The circumferential flexible hinge 10 and the first normal flexible hinge 11 are both installed side by side on the second connecting plate 12. The left-right order of the circumferential flexible hinge 10 and the first normal flexible hinge 11 during installation in the third support assembly 5 and the first support assembly 3 is different. During use, the second support assembly 4 on the same side of the mirror 1 is arranged between the first support assembly 3 and the third support assembly 5. In this way, the circumferential flexible hinge 10 and the first normal flexible hinge 11 of the third support assembly 5 and the first support assembly 3 are also symmetrically arranged with respect to the second support assembly 4 respectively.
[0044] Further, the second support assembly 4 includes a third connecting plate 15, a second normal flexible hinge 14, and a third gasket 13. The second normal flexible hinge 14 is fixed to the third connecting plate 15. The third gasket 13 is fixed to the second normal flexible hinge 14. The third gasket 13 is in contact with the upper side edge of the groove of the annular rectangular groove 103. The third gasket 13 is connected to the end of the second normal flexible hinge 14 by a hole-shaft fit.
[0045] Furthermore, the circumferential flexible hinge 10, the first normal flexible hinge 11, the second normal flexible hinge 14, and the calibration flexible hinge 9 all include a rotating mechanism 18, a driving mechanism 19, and an attitude compensation mechanism 20. The rotating mechanism 18, the driving mechanism 19, and the attitude compensation mechanism 20 are all connected to the flexible hinge block 21. The attitude compensation mechanism 20 is a series biaxial flexible mechanism based on an arc slot. The attitude compensation mechanism 20 contacts the mirror 1 to provide two-dimensional angular deformation, ensuring good contact with the corresponding surface of the mirror 1. The rotating mechanism 18 is a uniaxial flexible mechanism based on an arc slot, which is used to convert the rotation angle of the mechanism into the displacement output of the entire flexible hinge end. The driving mechanism 19 is a uniaxial flexible mechanism based on a diamond slot. The central axes of the driving mechanisms in the calibration flexible hinge 9 and the circumferential flexible hinge 10 coincide with the attitude compensation mechanism 20 to avoid the additional bending moment generated by the driving force at the gasket affecting the contact effect. The central axes of the driving mechanisms of the first normal flexible hinge 11 and the second normal flexible hinge 14 are perpendicular to the attitude compensation mechanism 20, as Figure 13 shown in the schematic distribution structure of the rotating mechanism 18, the driving mechanism 19, and the attitude compensation mechanism 20 in the calibration flexible hinge 9 and the circumferential flexible hinge 10, as Figure 14 shown in the schematic distribution structure of the rotating mechanism 18, the driving mechanism 19, and the attitude compensation mechanism 20 in the first normal flexible hinge 11 and the second normal flexible hinge 14; the rotating mechanism 18 is a uniaxial flexible mechanism based on an arc slot, as Figure 13 and Figure 14 shown, the flexible hinge block 21 is L-shaped. Two parallel arc slots are opened on the adjacent two sides at one end of the flexible hinge block 21 to form a uniaxial flexible mechanism. A thin wall is formed between the two arc slots. A part of the connecting block is cut out and connected to the flexible hinge block 21 through the thin wall, thus forming the rotating mechanism 18. The connecting plates of each flexible hinge are connected to the connecting block by bolts. The attitude compensation mechanism 20 is a series biaxial flexible mechanism formed by opening two parallel arc slots on the opposite two sides at the other end of the flexible hinge block 21. The axes of the arc slots opened on the adjacent two sides in the attitude compensation mechanism 20 are perpendicular to form two perpendicular thin walls. The driving mechanism 19 is a diamond slot opened at the corner of the L-shaped flexible hinge block 21. A flexible block 22 with a diamond frame structure is cut out in the diamond slot. The flexible block 22 and the flexible hinge block 21 are of an integral structure. The specific slot parameters of the rotating mechanism 18, the driving mechanism 19, and the attitude compensation mechanism 20 are determined according to mechanical analysis and calculation.
[0046] Furthermore, adjusting screws 8 are threadedly connected to the first connecting plate 16, the second connecting plate 12, and the third connecting plate 15. One end of the adjusting screw 8 abuts against the corresponding driving mechanism 19, and the driving mechanism 19 converts the tightening torque of the adjusting screw 8 into the torque on the rotating mechanism 18. Specifically, one end of the adjusting screw 8 abuts against the flexible block in the diamond slot.
[0047] The above is only a preferred embodiment of the present invention, and does not impose any formal restrictions on the present invention. Any person skilled in the art can make many possible changes and modifications to the technical solution of the present invention by using the above technical content without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment with equivalent changes. Therefore, all content that does not depart from the technical solution of the present invention, any changes, modifications, equivalent changes and modifications made to the above embodiments according to the technology of the present invention, all fall within the protection scope of this technical solution.
Claims
1. A flexible support structure for a large-aperture transmissive mirror, characterized in that: It includes a frame (6), a face shape correction component (2), a first support component (3), a second support component (4), and a third support component (5). The frame (6) has a structure with an internal cavity. The mirror (1) is placed inside the frame (6), and the mirror (1) is supported inside the frame (6) by the face shape correction component (2), the first support component (3), the second support component (4), and the third support component (5). The mirror (1) has a rectangular structure, and all four side edges of the mirror (1) are supported on the frame (6) by a first support component (3), a second support component (4), and a third support component (5). The face shape correction component (2) is supported between the top of the mirror (1) and the frame (6). A plurality of the face shape correction components (2) are provided and are evenly distributed. The face shape correction component (2) includes a correction flexure hinge (9), a first gasket (17), and a first connecting plate (16). The correction flexure hinge (9) is fixed on the first connecting plate (16), the first connecting plate (16) is fixed on the frame (6), the first gasket (17) is fixed on the correction flexure hinge (9), and the first gasket (17) contacts the top surface of the mirror (1). The first support component (3) includes a second connecting plate (12), a circumferential flexure hinge (10), a first normal flexure hinge (11), and a second gasket (7). The circumferential flexure hinge (10) and the first normal flexure hinge (11) are both fixed on the second connecting plate (12). A second gasket (7) is provided on both the circumferential flexure hinge (10) and the first normal flexure hinge (11). The second connecting plate (12) is fixed on the frame (6). The second gasket (7) on the circumferential flexure hinge (10) fits against the bottom edge of the groove of the annular rectangular groove (103), and the second gasket (7) provided on the first normal flexure hinge (11) fits against the upper groove side edge of the annular rectangular groove (103). The third support component (5) and the first support component (3) have a symmetric structure. The second support component (4) includes a third connecting plate (15), a second normal flexure hinge (14), and a third gasket (13). The second normal flexure hinge (14) is fixed on the third connecting plate (15), the third gasket (13) is fixed on the second normal flexure hinge (14), and the third gasket (13) fits against the upper groove side edge of the annular rectangular groove (103).
2. The flexible support structure of a large-aperture transmission mirror according to claim 1, wherein: The mirror (1) has a rectangular aperture, the mirror surface of the mirror (1) faces downward and is inclined, and an annular rectangular groove (103) is provided on the side surface of the mirror (1).
3. A flexible support structure for a large-aperture transmission mirror according to claim 1, characterized in that: The circumferential flexible hinge (10), the first normal flexible hinge (11), the second normal flexible hinge (14) and the calibration flexible hinge (9) all include a rotating mechanism (18), a driving mechanism (19) and an attitude compensation mechanism (20). The rotating mechanism (18), the driving mechanism (19) and the attitude compensation mechanism (20) are all connected to the flexible hinge block (21). The attitude compensation mechanism (20) is a series biaxial flexible mechanism based on an arc-shaped groove. The attitude compensation mechanism (20) contacts the mirror (1) to provide two-dimensional angular deformation, ensuring good contact with the corresponding surface of the mirror (1). The rotating mechanism (18) is a uniaxial flexible mechanism based on an arc-shaped groove, which is used to convert the rotation angle of the mechanism into the displacement output of the entire flexible hinge end. The driving mechanism (19) is a uniaxial flexible mechanism based on a diamond-shaped groove.
4. A flexible support structure for a large-aperture transmission mirror according to claim 3, characterized in that: Adjusting screws (8) are threadedly connected to the first connecting plate (16), the second connecting plate (12) and the third connecting plate (15). One end of the adjusting screw (8) abuts against the corresponding driving mechanism (19), and the driving mechanism (19) converts the tightening torque of the adjusting screw (8) into the torque on the rotating mechanism (18).
Citation Information
Patent Citations
Small-size reflecting-mirror flexible support structure suitable for thermal cycle condition
CN106569312A