A cold isostatic pressing forming die and forming method for preparing a green body of a rotary target

Abstract

The present invention relates to the field of rotary target material processing, and in particular to a cold isostatic pressing mold for preparing a rotary target material embryo and a cold isostatic pressing method for preparing a rotary target material embryo. The present invention provides a cold isostatic pressing mold for preparing a rotary target material embryo, comprising a mold body, the mold body comprising a rigid inner mold core and a soft outer mold, a mold cavity is formed between the soft outer mold and the rigid inner mold core to accommodate powder to be molded, and the molding mold comprises a shaping piece and a driving device arranged on the outer side of the soft outer mold, the driving device drives the shaping piece to move inward to clamp the soft outer mold for molding. A cold isostatic pressing method for preparing a rotary target material embryo is also provided. The molding mold and the molding method can be pressed to obtain a relatively regular rotary target material embryo, and after the embryo is sintered, there is no need to turn off a lot of target material, the production efficiency is high and the waste of raw materials is reduced.

Description

Technical Field

[0001] The present invention relates to the field of rotary target processing, and particularly to an isostatic pressing forming die for preparing a green body of a rotary target and an isostatic pressing forming method for preparing a green body of a rotary target. Background Art

[0002] A coating target is a sputtering source that forms various functional thin films on a substrate by magnetron sputtering, multi-arc ion plating or other types of coating systems under appropriate process conditions, and is commonly used in industries such as semiconductor processing. As a kind of target, a rotary target is in a cylindrical shape and is commonly used in the magnetron sputtering coating process. To manufacture a rotary target, raw materials need to be pretreated such as ground and granulated to obtain the powder to be formed. These powders are filled into a forming die with a cylindrical cavity, where the outer mold is a soft rubber sleeve and the inner mold is a rigid metal mold core. After the powder filling is completed, the die together with the powder inside is subjected to cold isostatic pressing medium pressing, and then the green body of the rotary target is formed. Then, workers need to sinter the green body into a target and turn the sintered target into a cylindrical shape. Finally, multiple cylindrical targets after turning are bound together through a binding process to obtain the required rotary target.

[0003] In actual production, since the forming die needs to enter the liquid medium together with the powder to be formed and be pressed, after multiple pressings, the soft rubber sleeve of the forming die is prone to deformation, resulting in the deformation of the cavity of the forming die, and thus the shape of the green body of the target obtained by pressing is irregular. The target obtained by sintering such a green body has uneven wall thickness and an irregular outer surface, and more target material needs to be turned off later to obtain a usable cylindrical rotary target, resulting in low production efficiency and waste of raw materials. Summary of the Invention

[0004] The invention objective of the present invention is to provide an isostatic pressing forming die for preparing a green body of a rotary target. This forming die can press and form a relatively regular green body of a rotary target. After sintering the green body, less target material needs to be turned off, with high production efficiency and reduced waste of raw materials. The present invention also provides an isostatic pressing forming method for preparing a green body of a rotary target. This forming method can prepare a relatively regular green body of a rotary target, with high production efficiency and reduced waste of raw materials.

[0005] Provided is an isostatic pressing forming die for preparing a green body of a rotary target, including a die body. The die body includes a rigid inner mold core and a soft outer mold. A cavity is formed between the soft outer mold and the rigid inner mold core to accommodate the powder to be formed. The forming die includes a shaping member and a driving device arranged outside the soft outer mold. The driving device drives the shaping member to move inward to clamp the soft outer mold for shaping.

[0006] Among them, it includes a support base on which the mold body is placed. The driving device includes a plurality of driving units installed on the support base, and the plurality of driving units are distributed around the circumferential side of the mold body. Correspondingly, the shaping member includes a plurality of shaping blocks respectively installed on the plurality of driving units. Each driving unit drives each shaping block to move inward until the shaping blocks jointly clamp the soft outer mold for shaping.

[0007] Among them, the outer side wall of the soft outer mold is cylindrical, and each of the shaping blocks has an arc-shaped inner side wall that fits the shape of the cylindrical outer side wall of the soft outer mold. These shaping blocks move inward as described above until they surround the soft outer mold and jointly clamp the soft outer mold as described above.

[0008] Among them, each driving unit includes upper and lower driving telescopic rods that extend toward the mold body. The shaping block is specifically installed with its upper part at the end of the upper driving telescopic rod and its lower part at the end of the lower driving telescopic rod.

[0009] Among them, the number of the shaping blocks is four.

[0010] Among them, the shaping block is specifically installed on the driving unit in a detachable manner.

[0011] Among them, a vibrator is provided in the middle of the support base. The upper surface of the vibrator is for placing the mold body and can vibrate the powder to be formed installed in the mold body.

[0012] A cold isostatic pressing forming method for preparing a green body of a rotary target is also provided. The forming method includes the following steps:

[0013] Powder loading step: filling the powder to be formed into the cavity of the mold body;

[0014] Pressing and forming step: placing the mold body together with the powder to be formed into the cold isostatic pressing liquid medium, and allowing the liquid medium to press the soft outer mold of the mold body so as to press the powder to be formed in the cavity into shape;

[0015] The forming mold used is as described above;

[0016] Before the powder loading step, a shaping step is first performed. The shaping step is specifically: controlling the driving device to drive the shaping member to move inward until it clamps the soft outer mold for shaping;

[0017] Specifically in the powder loading step, the powder to be formed is filled into the cavity and compacted so that the powder supports the inner side wall of the soft outer mold.

[0018] Among them, a retraction step is performed between the powder filling step and the pressing and forming step. Specifically, in the retraction step, the driving device is controlled to drive the shaping member to move outward and retract.

[0019] Among them, the forming mold used is as described above. Specifically, in the powder filling step, the operator fills the powder to be formed into the mold cavity when the vibrator is started, and during the process of filling the powder, intermittently presses the powder in the mold cavity from top to bottom to achieve the compaction.

[0020] Beneficial effects: Although the soft outer mold will deform after being used multiple times, since the soft outer mold is clamped by the shaping member for shaping, it can maintain its own shape under the shaping of the shaping member, so that the mold cavity also always maintains a normal shape. Then, after the powder to be formed is filled into the mold cavity and compacted, it can still have a relatively regular shape. In this way, as long as the powder to be formed is pressed and then the mold is opened, a relatively regular green body of the rotating target can be obtained. The wall thickness of the target after sintering the green body is uniform and the outer surface is relatively regular. There is no need to machine off a large amount of the target subsequently, and the production efficiency is high and the waste of raw materials is reduced. Description of the Drawings

[0021] Figure 1 is a schematic structural diagram of the forming mold.

[0022] Figure 2 is Figure 1 an exploded view of the mold body in

[0023] Figure 3 is along Figure 1 the A-A direction sectional view in

[0024] Figure 4 is a schematic structural diagram of the mold body of the forming mold placed on the vibrator.

[0025] Figure 5 is a schematic diagram of a single driving unit.

[0026] Figure 6 is Figure 5 an exploded view of the driving unit of

[0027] Figure 7 is a schematic structural diagram of the shaping member of the forming mold shaping the soft outer mold.

[0028] Symbol Explanation:

[0029] 1 - Forming die; 2 - Die body; 21 - Circular base; 211 - Ring-shaped boss; 22 - Soft plug ring; 3 - Rigid inner die core; 31 - Handle; 4 - Soft outer die; 5 - Mold cavity; 6 - Support base; 7 - Vibrator; 8 - Driving device; 81 - Driving unit; 811 - Driving telescopic rod; 812 - Upper driving telescopic rod; 813 - Upper mounting plate; 814 - Lower driving telescopic rod; 815 - Lower mounting plate; 816 - Through groove; 817 - Bolt; 9 - Shaping part; 91 - Shaping block; 911 - Arc-shaped inner wall; 912 - Threaded hole. Detailed implementation mode

[0030] The following further elaborates on the present invention in conjunction with the detailed implementation mode.

[0031] The cold isostatic pressing forming die is used for forming the green body of the rotating target. The principle is to load the raw material powder to be formed, which has undergone the pre-treatment process, into the mold cavity of the forming die, and then place the die body together with the powder into the cold isostatic pressing liquid medium environment. The liquid medium is used to press the die, so that the powder is pressed into a cylindrical shape consistent with the mold cavity. After opening the die and taking out the material, the required green body of the rotating target can be obtained.

[0032] See Figure 1 , the die body 2 of the cold isostatic pressing forming die 1 includes a cylindrical rigid inner die core 3 and a soft outer die 4 which is also cylindrical. See Figure 2 And Figure 3 , horizontal handles 31 are provided at the top and bottom of the rigid inner die core 3 for gripping, which are used to lift and move the rigid inner die core 3. The bottom of the die body 2 is equipped with a circular base 21. A ring-shaped boss 211 protrudes upward from the top of the circular base 21. The inner diameter of the ring-shaped boss 211 matches the outer diameter of the rigid inner die core 3, and the outer diameter matches the inner diameter of the soft outer die 4. The rigid inner die core 3 is installed inside the ring-shaped boss 211, and the soft outer die 4 is installed outside the ring-shaped boss 211. At this time, the soft outer die 4 is like Figure 1 shown, surrounding the outside of the rigid inner die core 3, and the centers of the two are aligned. A cylindrical mold cavity 5 is formed between the soft outer die 4 and the rigid inner die core 3 for loading and accommodating the raw material powder to be formed. The die body 2 is also equipped with two soft plug rings 22 with the same structure. Both soft plug rings 22 are made of polyurethane. The inner diameter and outer diameter of each soft plug ring 22 match the outer diameter of the rigid inner die core 3 and the inner diameter of the soft outer die 4 respectively. The two soft plug rings 22 are respectively installed at the top and bottom of the mold cavity 5 to block and seal the mold cavity 5, preventing the powder from overflowing and the liquid medium from infiltrating.

[0033] Since the mold body 2 needs to be placed in a liquid medium under pressure together with the powder it contains, after being pressed multiple times, the soft outer mold 4 is prone to deformation, resulting in the deformation of the mold cavity 5, and thus a relatively regular cylindrical-shaped green body of the rotating target cannot be obtained after forming. Therefore, before powder loading, the soft outer mold 4 needs to be shaped first. See Figure 1 and Figure 4 , the forming mold 1 is provided with a support base 6. A vibrator 7 is provided in the middle of the support base 6. The upper surface of the vibrator 7 is used to place the mold body 2 and can vibrate the powder in the mold body 2. Two layers of four driving telescopic rods 811 are installed on the support base 6, and the four driving telescopic rods 811 in each layer are distributed around the circumferential side of the mold body 2, and the ends can extend towards the mold body 2. The four driving telescopic rods 811 in the same layer are in the same horizontal plane, and each driving telescopic rod 811 is perpendicular to the adjacent other driving telescopic rods 811 in the same layer. The upper driving telescopic rods and the lower driving telescopic rods are aligned in parallel one by one. The two driving telescopic rods 812 and 814 that are aligned one above the other (see Figure 5 ) together form a driving unit 81. A shaping block 91 is installed at the end of each driving unit 81, and each shaping block 91 has an arc-shaped inner wall 911 that fits the cylindrical outer wall shape of the soft outer mold 4.

[0034] Taking one driving unit 81 and its corresponding shaping block 91 as an example, see Figure 5 and Figure 6 , in the driving unit 81, an upper mounting plate 813 is installed at the end of the upper driving telescopic rod 812, and a lower mounting plate 815 is installed at the end of the lower driving telescopic rod 814. Four through slots 816 are respectively opened in the two mounting plates for bolts 817 to pass through. Four threaded holes 912 that are aligned with the four through slots 816 of the upper mounting plate 813 are opened in the upper part of the outer wall of the shaping block 91, and four threaded holes 912 that are aligned with the four through slots 816 of the lower mounting plate 815 are also opened in the lower part of the outer wall of the shaping block 91. In this way, the shaping block 91 is installed on the driving unit 81 by tightening the eight bolts 817 to align the through slots 816 and the threaded holes 912 one by one. The remaining driving units install the corresponding shaping blocks in the same way. See Figure 4 and Figure 6 , the four shaping blocks 91 move inward respectively under the drive of their respective driving units 81 and approach the soft outer mold 4 until they surround the soft outer mold 4. As shown in Figure 7 , they jointly clamp the soft outer mold 4 and shape it. Since the shaping block 91 is detachably installed on the driving unit 81 through bolts 817, when different-sized mold bodies are to be used to prepare green bodies of rotating targets of different sizes, the operator only needs to disassemble the original shaping block 91 by loosening and removing the bolts 817 and install a shaping block that matches the size of the replaced soft outer mold through the above installation method.

[0035] The cold isostatic pressing forming method for preparing a green body of a rotary target using a forming die 1 is specifically as follows:

[0036] First, place the circular base 21 of the die body 2 on the upper surface of the vibrator 7. Subsequently, install the rigid inner die core 3 and the flexible outer die 4 on the circular base 21 to center the rigid inner die core 3 and the flexible outer die 4 and form a die cavity 5. Place one of the flexible plug rings 22 at the bottom of the die cavity 5 as a bottom seal, and then perform the shaping step: The operator controls the four driving units 81 to drive the corresponding four shaping blocks 91 to move inward until they jointly clamp the outer side wall of the flexible outer die 4, thereby shaping the flexible outer die 4 into a cylindrical shape, and making the die cavity 5 cylindrical, thus completing the shaping step. After shaping, while the driving unit 81 and the shaping block 91 maintain the state of shaping the flexible outer die 4, perform the powder filling step: Since the powder to be formed contains large-particle powders and small-particle powders with different sizes, the powders to be formed filled into the die cavity 5 are likely to have gaps between them and are not tight enough. Therefore, the operator needs to first turn on the vibrator 7 and start filling the powder to be formed into the die cavity 5. As the powders in the die cavity 5 vibrate with the vibrator 7, the gaps between them are gradually filled with powders of smaller sizes. During the powder filling process, the operator intermittently squeezes the powders in the die cavity 5 from top to bottom. The powders in the die cavity 5 are restricted by the flexible outer die 3 and the shaping block 91 in the horizontal direction, and are squeezed by the operator in the vertical direction, and achieve a compaction effect under the vibration of the vibrator 7. Until the powder is nearly filling the die cavity 5, the operator needs to turn off the vibrator 7 and place another flexible plug ring 22 into the die cavity 5 as the top seal of the die cavity 5, thus completing the powder filling step. At this time, the powders in the die cavity 5 have been compacted to a certain extent and can support the inner side wall of the flexible outer die 4. Then perform the retraction step: The operator controls the four driving units 81 to drive the corresponding four shaping blocks 91 to move outward and retract in the reverse direction, so that the shaping blocks 91 no longer surround and clamp the outer side wall of the flexible outer die 4. After completing the retraction step, the powders in the die cavity 5 keep supporting the inner side wall of the flexible outer die 4, making the flexible outer die 4 maintain a cylindrical shape. At this time, perform the pressing and forming step: Place the die body 2 together with the powder to be formed into the cold isostatic pressing medium, and the liquid medium presses the flexible outer die 4 of the die body 2 to press the powder to be formed in the die cavity 5 into shape. After pressing, take out the die body 2 from the liquid medium environment and then open the die, and a required relatively regular cylindrical green body of the rotary target can be obtained.

[0037] As described above, it is only the implementation mode of the present invention, and does not limit the scope of patent protection in this way. Those skilled in the art make non-substantive changes or substitutions based on the present invention, and still fall within the scope of patent protection.

Claims

1. A cold isostatic pressing forming die for preparing a green body of a rotating target, comprising a die body (2), the die body (2) including a rigid inner die core (3) and a flexible outer die (4), a die cavity (5) being formed between the flexible outer die (4) and the rigid inner die core (3) to accommodate the powder to be formed, characterized in that the forming die (1) includes a shaping member (9) and a driving device (8) disposed outside the flexible outer die (4), the driving device (8) driving the shaping member (9) to move inward to clamp the flexible outer die (4) for shaping; It includes a support base (6), the die body (2) is placed on the support base (6), the driving device (8) includes a plurality of driving units (81) mounted on the support base (6), the plurality of driving units (81) being distributed around the circumferential side of the die body (2), and the shaping member (9) correspondingly includes a plurality of shaping blocks (91) respectively mounted on the plurality of driving units (81), each driving unit (81) respectively driving each shaping block (91) to move inward until the shaping blocks (91) jointly clamp the flexible outer die (4) for shaping; The shaping block (91) is specifically mounted on the driving unit (81) in a detachable manner; There are a plurality of die bodies (2) with different sizes, and one is selected; correspondingly, there are a plurality of shaping members (9) with sizes respectively matching the plurality of die bodies (2), and they are selected according to the die body (2).

2. The cold isostatic pressing forming die for preparing a green body of a rotating target according to claim 1, characterized in that, the outer side wall of the flexible outer die (4) is cylindrical, and each of the shaping blocks (91) has an arc-shaped inner side wall (911) conforming to the shape of the cylindrical outer side wall of the flexible outer die (4), and these shaping blocks (91) move inward as described above until they surround the flexible outer die (4) so as to jointly clamp the flexible outer die (4) as described above.

3. The cold isostatic pressing forming die for preparing a green body of a rotating target according to claim 2, characterized in that, each driving unit (81) includes upper and lower driving telescopic rods, the driving telescopic rod (811) extends towards the die body (2), and the shaping block (91) is specifically mounted at the end of the upper driving telescopic rod (812) at the upper part and at the end of the lower driving telescopic rod (814) at the lower part.

4. The cold isostatic pressing forming die for preparing a green body of a rotating target according to claim 2, characterized in that, the number of the shaping blocks (91) is four.

5. The cold isostatic pressing forming die for preparing a green body of a rotating target according to claim 1, characterized in that, a vibrator (7) is provided in the middle of the support base (6), the upper surface of the vibrator (7) is for placing the die body (2), and the powder to be formed loaded in the die body (2) can be vibrated.

6. A cold isostatic pressing forming method for preparing a green body of a rotating target, the forming method comprising the following steps: Powder loading step: loading the powder to be formed into the die cavity (5) of the die body (2); Compression molding step: Place the mold body (2) together with the powder to be molded it contains into a cold isostatic pressing liquid medium, and let the liquid medium press the flexible outer mold (4) of the mold body (2) so as to compress and mold the powder to be molded in the mold cavity (5); It is characterized in that: The molding die used is as described in any one of claims 1 to 5; Before the powder loading step, a shaping step is first performed. Specifically, the shaping step is: controlling the driving device (8) to drive the shaping member (9) to move inward to clamp the flexible outer mold (4) for shaping; Specifically, in the powder loading step, the powder to be molded is filled into the mold cavity (5) and compacted so that the powder supports the inner wall of the flexible outer mold (4).

7. The cold isostatic pressing molding method for preparing a green body of a rotating target as described in claim 6, It is characterized in that: during A retracting step is performed between the powder loading step and the compression molding step. Specifically, the retracting step is: controlling the driving device (8) to drive the shaping member (9) to move outward and retract.

8. The cold isostatic pressing molding method for preparing a green body of a rotating target as described in claim 6 or 7, It is characterized in that: The molding die used is as described in claim 5. Specifically, in the powder loading step, the operator fills the powder to be molded into the mold cavity (5) when the vibrator (7) is started, and intermittently presses the powder in the mold cavity (5) from top to bottom during the process of loading the powder to achieve the compaction.

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