VI source power supply control method, device, semiconductor tester and storage medium

Abstract

The present application relates to a VI source power supply control method, device, semiconductor test machine and storage medium, the VI source power supply control method includes: after the control unit is started, obtaining the first power supply information of the low-voltage power supply in the preset low-voltage power-on stage; judging whether the low-voltage power supply is normally powered on in the preset low-voltage power-on stage according to the first power supply information; in the case of judging that the low-voltage power supply is normally powered on in the preset low-voltage power-on stage, initializing the high-voltage VI circuit, and controlling the high-voltage power supply to supply power to the initialized high-voltage VI circuit; detecting the line status information of the high-voltage VI circuit in the preset high-voltage power-on stage, and determining the VI source power supply result according to the line status information. Through the present application, the problem of large power-on startup current of the semiconductor test machine and simultaneous startup of high and low voltage power supplies to damage circuit devices is solved, and the beneficial effects of powering on in stages, controlling the power-on current, and protecting devices and signal links from damage are achieved.

Description

Technical Field

[0001] The present application relates to the field of power management technology, and in particular to a VI source power supply control method, device, semiconductor tester and storage medium. Background Art

[0002] High voltage VI source is mainly used in various semiconductor test equipment, generally refers to the voltage and current source with output voltage capability of more than 200V. High voltage VI source is used for withstand voltage and leakage test of discrete devices above 200V, and can also be used for integrated circuit chip test with integrated discrete devices.

[0003] Since the high-voltage VI source carries high voltage, the high-voltage power supply and the low-voltage power supply of the high-voltage VI source are powered on at the same time. When the high-voltage power supply and the low-voltage power supply are powered on at the same time, the power-on starting current is large, which may easily cause a bus power failure of related test equipment. At the same time, when the high-voltage power supply and the low-voltage power supply are powered on at the same time, the feedback system corresponding to the high-voltage VI source is not fully established when powered on, and the initial state of the high-voltage signal line of the related test equipment is unstable, which may easily cause damage to the high-voltage signal line and line components.

[0004] At present, no effective solution has been proposed for the problem in the related art that the semiconductor tester has a large power-on starting current and the circuit components are damaged due to the simultaneous starting of high and low voltage power supplies. Summary of the invention

[0005] The embodiments of the present application provide a VI source power supply control method, device, semiconductor tester and storage medium to at least solve the problem in the related art that the semiconductor tester has a large power-on starting current and that the high and low voltage power supplies are started at the same time, causing damage to the circuit components.

[0006] In a first aspect, an embodiment of the present application provides a VI source power supply control method, which is applied to a control unit of a semiconductor tester, comprising:

[0007] After the control unit is started, first power supply information of the low-voltage power supply in a preset low-voltage power-on stage is obtained, wherein the first power supply information is used to characterize the power-on state of the low-voltage power supply in the preset low-voltage power-on stage;

[0008] According to the first power supply information, determining whether the low-voltage power supply is powered on normally within the preset low-voltage power-on stage;

[0009] In the case where it is determined that the low-voltage power supply is normally powered on within the preset low-voltage power-on stage, the high-voltage VI circuit is initialized, and the high-voltage power supply is controlled to supply power to the initialized high-voltage VI circuit;

[0010] Detecting line status information of the high-voltage VI line in a preset high-voltage power-on phase, and determining a VI source power supply result according to the line status information.

[0011] In some embodiments, the low-voltage power supply includes a first low-voltage power supply and a second low-voltage power supply, the first low-voltage power supply is electrically connected to the control unit, and judging whether the low-voltage power supply is normally powered on in the preset low-voltage power supply stage according to the first power supply information includes:

[0012] Detecting the power supply status of the first low-voltage power supply, and starting and stopping the second low-voltage power supply according to the power supply status of the first low-voltage power supply;

[0013] After the second low-voltage power supply is powered on, detecting the power supply state of the second low-voltage power supply, and determining whether the power supply state of the second low-voltage power supply includes a second preset power supply state, wherein the second preset power supply state includes the second low-voltage power supply supplying power at a preset voltage and a preset current;

[0014] In the case where it is determined that the power supply state of the second low-voltage power supply includes the preset power supply state, it is determined that the low-voltage power supply is normally powered on within the preset low-voltage power supply stage.

[0015] In some embodiments, detecting the power supply status of the first low-voltage power supply, and starting or stopping the powering on of the second low-voltage power supply according to the power supply status of the first low-voltage power supply includes:

[0016] Detecting a first voltage and a first current corresponding to a power supply state of the first low-voltage power supply;

[0017] respectively determining whether the first voltage and the first current are not greater than corresponding first preset thresholds;

[0018] When it is determined that the first voltage is not greater than the corresponding first preset threshold and the first current is not greater than the corresponding first preset threshold, determining that the first low-voltage power supply is supplying power normally, and starting the second low-voltage power supply to power on;

[0019] When it is determined that the first voltage is greater than the corresponding first preset threshold and the first current is greater than the preset threshold, it is determined that the first low-voltage power supply is abnormal, and the VI source power-on process is terminated.

[0020] In some embodiments, determining whether the power supply state of the second low-voltage power supply includes a second preset power supply state includes:

[0021] Detecting a second voltage and a second current corresponding to the power supply state of the second low-voltage power supply;

[0022] respectively comparing the second voltage with the preset voltage, and the second current with the preset current;

[0023] In the case where it is compared that the second voltage is not greater than the preset voltage and the second current is not greater than the preset current, determining that the power supply state of the second low-voltage power supply includes a second preset power supply state;

[0024] When it is determined that the second voltage is greater than the preset voltage and / or when it is determined that the second current is greater than the preset current, it is determined that the second low-voltage power supply is abnormal, and the VI source power-on process is terminated.

[0025] In some embodiments, before the control unit is started, the method includes: the first low-voltage power supply is powered on after the bus power supply is powered on, and supplies power to the control unit.

[0026] In some embodiments, the line state information includes initialization state information corresponding to the high-voltage VI line, detecting the line state information of the high-voltage VI line in a preset high-voltage power-on phase, and determining the VI source power supply result according to the line state information includes:

[0027] Acquire initialization state information corresponding to the high-voltage VI circuit, wherein the initialization state information includes an initial state of the high-voltage VI circuit after initialization;

[0028] Extracting the initial state of the high-voltage VI circuit after initialization from the initialization state information, and detecting whether the initial state of the high-voltage VI circuit is normal to obtain a detection result;

[0029] In the case that the detection result includes that the initial state of the high-voltage VI line is normal, it is determined that the VI source is supplying power normally, and the VI source power-on process is ended.

[0030] In some of the embodiments, when the detection result includes that the initial state of the high-voltage VI line is abnormal, the method includes: controlling the high-voltage power supply to power off, and ending the VI source power-on process.

[0031] In a second aspect, an embodiment of the present application provides a VI source power supply control device, comprising:

[0032] An acquisition module, used for acquiring first power supply information of the low-voltage power supply in a preset low-voltage power-on stage after the control unit is started, wherein the first power supply information is used to characterize the power-on state of the low-voltage power supply in the preset low-voltage power-on stage;

[0033] A judgment module, used for judging whether the low-voltage power supply is normally powered on within the preset low-voltage power-on stage according to the first power supply information;

[0034] A control module, configured to initialize the high-voltage VI circuit when it is determined that the low-voltage power supply is normally powered on within the preset low-voltage power-on stage, and control the high-voltage power supply to supply power to the initialized high-voltage VI circuit;

[0035] The processing module is used to detect the line state information of the high-voltage VI line in a preset high-voltage power-on stage, and determine the VI source power supply result according to the line state information.

[0036] In a third aspect, an embodiment of the present application provides a semiconductor testing machine, comprising: a control unit, a VI source power supply module and a high-voltage VI line; wherein the control unit is connected to a terminal device through a BUS-PCIE controlled connection, the control unit is electrically connected to the VI source power supply module and the high-voltage VI line respectively, and the high-voltage VI line is also electrically connected to the high-voltage power supply of the VI source power supply module; the control unit is used to execute the VI source power supply control method as described in the first aspect above; the VI source power supply module is used to power the semiconductor testing machine.

[0037] In a fourth aspect, an embodiment of the present application provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the processor executes the computer program, the VI source power supply control method as described in the first aspect above is implemented.

[0038] In a fifth aspect, an embodiment of the present application provides a storage medium on which a computer program is stored, and when the program is executed by a processor, the VI source power supply control method as described in the first aspect above is implemented.

[0039] Compared with the related art, the VI source power supply control method, device, electronic device, semiconductor test machine and storage medium provided in the embodiments of the present application obtain the first power supply information of the low-voltage power supply in the preset low-voltage power-on stage after the control unit is started; judge whether the low-voltage power supply is powered on normally in the preset low-voltage power-on stage according to the first power supply information; initialize the high-voltage VI circuit when it is judged that the low-voltage power supply is powered on normally in the preset low-voltage power-on stage, and control the high-voltage power supply to supply power to the initialized high-voltage VI circuit; detect the line status information of the high-voltage VI circuit in the preset high-voltage power-on stage, and determine the VI source power supply result according to the line status information, so as to solve the problem in the related art that the semiconductor test machine is powered on with large starting current and the line components are damaged due to the simultaneous starting of high and low voltage power supplies, and achieve the beneficial effects of powering on in stages, controlling the power-on current, and protecting the semiconductor test machine components and signal links from damage.

[0040] Details of one or more embodiments of the present application are set forth in the following drawings and description to make other features, objects, and advantages of the present application more readily apparent. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0042] Figure 1 It is a hardware structure block diagram of a terminal of the VI source power supply control method of an embodiment of the present application;

[0043] Figure 2 is a flow chart of a VI source power supply control method according to an embodiment of the present application;

[0044] Figure 3 is a flow chart of a VI source power supply control method according to a preferred embodiment of the present application;

[0045] Figure 4 is a structural block diagram of a VI source power supply control device according to an embodiment of the present application;

[0046] Figure 5 It is a control block diagram of a semiconductor testing machine according to an embodiment of the present application. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application is described and illustrated below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0048] Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, the present application can also be applied to other similar scenarios based on these drawings without creative work. In addition, it can also be understood that although the efforts made in this development process may be complicated and lengthy, for ordinary technicians in this field related to the content disclosed in this application, some changes in design, manufacturing or production based on the technical content disclosed in this application are just conventional technical means, and should not be understood as insufficient content disclosed in this application.

[0049] Reference to "embodiments" in this application means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0050] Unless otherwise defined, the technical terms or scientific terms involved in this application should be understood by people with ordinary skills in the technical field to which this application belongs. The words "one", "a", "a", "the" and the like involved in this application do not indicate a quantitative limitation, and may represent the singular or plural. The terms "include", "comprise", "have" and any of their variations involved in this application are intended to cover non-exclusive inclusions; for example, a process, method, system, product or device that includes a series of steps or modules (units) is not limited to the listed steps or units, but may also include steps or units that are not listed, or may also include other steps or units inherent to these processes, methods, products or devices. The words "connect", "connected", "coupled" and the like involved in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The "multiple" involved in this application refers to two or more. "And / or" describes the association relationship of associated objects, indicating that there may be three relationships, for example, "A and / or B" can represent: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the objects before and after are in an "or" relationship. The terms "first", "second", "third", etc. involved in this application are only used to distinguish similar objects and do not represent a specific ordering of the objects.

[0051] The various technologies described in this application can be used to control the power-on timing of different power supplies during the withstand voltage and leakage test process of a semiconductor tester.

[0052] Before describing and illustrating the embodiments of the present application, the related technologies used in the present application are described as follows:

[0053] From the perspective of power supply structure, the high-voltage VI source mainly includes a bus power supply, a common low-voltage power supply, a floating low-voltage power supply and a floating high-voltage power supply, which together provide power for the high-voltage VI source line.

[0054] The VI source power supply control method embodiment provided in this embodiment can be executed in a terminal, a computer or a similar test platform. Taking running on a terminal as an example, Figure 1 1 is a hardware structure block diagram of a terminal of a VI source power supply control method according to an embodiment of the present invention. Figure 1 As shown, the terminal may include one or more ( Figure 1 Only one is shown in the figure) a processor 102 (the processor 102 may include but is not limited to a processing device such as a microprocessor MCU or a programmable logic device FPGA) and a memory 104 for storing data. Optionally, the terminal may also include a transmission device 106 and an input / output device 108 for communication functions. It can be understood by those skilled in the art that Figure 1 The structure shown is for illustration only and does not limit the structure of the above terminal. Figure 1 More or fewer components as shown, or with Figure 1 Different configurations shown.

[0055] The memory 104 can be used to store computer programs, for example, software programs and modules of application software, such as the computer program corresponding to the VI source power supply control method in the embodiment of the present invention. The processor 102 executes various functional applications and data processing by running the computer program stored in the memory 104, that is, to implement the above method. The memory 104 may include a high-speed random access memory, and may also include a non-volatile memory, such as one or more magnetic storage devices, flash memory, or other non-volatile solid-state memory. In some examples, the memory 104 may further include a memory remotely arranged relative to the processor 102, and these remote memories may be connected to the terminal via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0056] The transmission device 106 is used to receive or send data via a network. The specific example of the above network may include a wireless network provided by a communication provider of the terminal. In one example, the transmission device 106 includes a network adapter (Network Interface Controller, referred to as NIC), which can be connected to other network devices through a base station so as to communicate with the Internet. In one example, the transmission device 106 can be a radio frequency (Radio Frequency, referred to as RF) module, which is used to communicate with the Internet wirelessly.

[0057] This embodiment provides a VI source power supply control method, Figure 2 is a flow chart of a VI source power supply control method according to an embodiment of the present application, such as Figure 2 As shown, the process includes the following steps:

[0058] Step S201, after the control unit is started, first power supply information of the low-voltage power supply in a preset low-voltage power-on stage is obtained, wherein the first power supply information is used to characterize the power-on state of the low-voltage power supply in the preset low-voltage power-on stage.

[0059] In this embodiment, the main body that executes the VI source power supply control method of the embodiment of the present application is the control unit of the semiconductor tester. In a specific embodiment, the control unit is an embedded control unit of the semiconductor tester. In this embodiment, VI source power supply control refers to controlling the power-on and power-on timing of each power supply module of the semiconductor tester.

[0060] In this embodiment, the low-voltage power supply includes a power supply for supplying power to the control unit and a power supply for supplying power to other functional modules. In a specific embodiment, the power supply for supplying power to the control unit is defined as a common low-voltage power supply, and the power supply for supplying power to other functional modules is defined as a floating low-voltage power supply. Because other functional modules will cause power and voltage changes according to different loads, the power supply for supplying power to other functional modules is defined as a floating low-voltage power supply. In this embodiment, before executing the VI source power supply control method of this embodiment, the bus power supply of the semiconductor test needs to be powered on first.

[0061] In this embodiment, the preset low-voltage power-on stage includes the initialization of the control unit after power-on and the corresponding power supply detection, and the power-on and self-test stage of the power supply corresponding to other functional modules; the first power supply information includes status information of whether the power supply of the control unit is normal and whether the power supply of other functional modules is normal, wherein whether the power supply is normal at least includes whether the power supply voltage and the power supply current are normal.

[0062] Step S202: judging whether the low-voltage power supply is powered on normally in a preset low-voltage power-on phase according to the first power supply information.

[0063] In this embodiment, if the power supply voltage and the power supply current corresponding to the first power supply information are both within the preset threshold range, it is determined that the low-voltage power supply is normally powered on within the preset low-voltage power-on stage.

[0064] In this embodiment, if the low voltage power supply is abnormally powered on during the preset low voltage power-on phase, the abnormal low voltage power supply is powered off, the VI source of the semiconductor tester fails to power on, and the VI source power-on process ends.

[0065] Step S203, when it is determined that the low-voltage power supply is normally powered on within the preset low-voltage power-on phase, the high-voltage VI circuit is initialized, and the high-voltage power supply is controlled to supply power to the initialized high-voltage VI circuit.

[0066] In this embodiment, after all low-voltage power supplies are powered on normally within the preset low-voltage power-on stage and are powered on along the preset power supply current and power supply voltage, the low-voltage power supply stage ends and the set high-voltage power supply stage begins; after entering the high-voltage power-on stage, the high-voltage VI circuit is initialized first to enable the subsequent high-voltage power supply to supply power normally; after the high-voltage VI circuit is initialized, the high-voltage power supply begins to supply power to the high-voltage VI circuit; in a specific embodiment, the high-voltage VI circuit is connected to at least a functional module of the semiconductor tester that requires a high-voltage power supply to supply power, for example: a functional module for performing a withstand voltage test, and at the same time, due to different loads, the power of the corresponding high-voltage power supply is different, resulting in the output power supply voltage and power supply current of the high-voltage power supply being floating in different application scenarios, and therefore, in a specific embodiment, the high-voltage power supply can be defined as a floating high-voltage power supply.

[0067] Step S204, detecting the line status information of the high voltage VI line in a preset high voltage power-on phase, and determining the VI source power supply result according to the line status information.

[0068] In this embodiment, after the high-voltage power supply starts to supply power, the line state of the high-voltage VI circuit in the preset high-voltage power-on stage is checked. In this embodiment, it is detected whether the initial state of the high-voltage VI circuit is normal after the high-voltage power supply is powered by the high-voltage power supply. If the initial state of the high-voltage VI circuit is normal, it means that the high-voltage power supply circuit is supplying power normally, the high-voltage power supply is powered on normally, and the power-on process of the semiconductor test machine VI source is ended. If the initial state of the high-voltage VI circuit is abnormal, the high-voltage power supply is controlled to stop supplying power accordingly, that is, the high-voltage power supply is powered off. At the same time, the complete power-on of the semiconductor test VI source fails, and the power-on process is ended.

[0069] Through the above steps S201 to S204, after the control unit is started, the first power supply information of the low-voltage power supply in the preset low-voltage power-on stage is obtained; according to the first power supply information, it is judged whether the low-voltage power supply is powered on normally in the preset low-voltage power-on stage; when it is judged that the low-voltage power supply is powered on normally in the preset low-voltage power-on stage, the high-voltage VI circuit is initialized, and the high-voltage power supply is controlled to supply power to the initialized high-voltage VI circuit; the line status information of the high-voltage VI circuit in the preset high-voltage power-on stage is detected, and the VI source power supply result is determined according to the line status information, so as to solve the problem in the related technology that the power-on starting current of the semiconductor test machine is large and the high and low voltage power supplies are started at the same time to cause damage to the circuit components, and the beneficial effects of powering on in stages, controlling the power-on current, and protecting the semiconductor test machine components and signal links from damage are achieved.

[0070] It should be noted that the VI source power supply control method of the embodiment of the present application is also applicable to the test equipment of the integrated circuit chip integrating discrete devices, so as to solve the problem of safety hazards and damage to circuit devices caused by powering on the high voltage and low voltage of the high voltage VI source together in the related technology.

[0071] In some embodiments, the low-voltage power supply includes a first low-voltage power supply and a second low-voltage power supply, the first low-voltage power supply is electrically connected to the control unit, and judging whether the low-voltage power supply is normally powered on in a preset low-voltage power supply stage according to the first power supply information includes the following steps:

[0072] Step 1: Detect the power supply status of the first low-voltage power supply, and start or stop the power supply of the second low-voltage power supply according to the power supply status of the first low-voltage power supply.

[0073] In this embodiment, by checking the power supply status of the first low-voltage power supply, it is verified whether the first low-voltage power supply is supplying power normally, thereby determining that the control unit is in a normal working state, so that the control unit can control the power-on of other low-voltage power supplies and high-voltage power supplies.

[0074] Step 2, after the second low-voltage power supply is powered on, detect the power supply status of the second low-voltage power supply, and determine whether the power supply status of the second low-voltage power supply includes a second preset power supply status, wherein the second preset power supply status includes the second low-voltage power supply supplying power at a preset voltage and a preset current.

[0075] In this embodiment, by detecting whether the second low-voltage power supply is supplying power normally, the power-on status of the entire preset low-voltage power supply stage is verified; at the same time, by detecting whether the second low-voltage power supply is supplying power normally, it is determined whether the VI source power supply is to continue or directly terminate the VI source power supply process. When it is determined that the second low-voltage power supply is supplying power normally, it is verified that the low-voltage power supply power supplies in the preset low-voltage power supply stage are all powered on normally, thereby determining that the subsequent power supply and high-voltage VI circuit can be powered on and initialized.

[0076] Step 3: when it is determined that the power supply state of the second low-voltage power supply includes a preset power supply state, determine that the low-voltage power supply is normally powered on within the preset low-voltage power supply stage.

[0077] The power supply status of the first low-voltage power supply is detected in the above steps, and the power-on of the second low-voltage power supply is started and stopped according to the power supply status of the first low-voltage power supply; after the second low-voltage power supply is started to power on, the power supply status of the second low-voltage power supply is detected, and it is determined whether the power supply status of the second low-voltage power supply includes a second preset power supply status; when it is determined that the power supply status of the second low-voltage power supply includes the preset power supply status, it is determined that the low-voltage power supply is powered on normally within the preset low-voltage power supply stage, thereby realizing the inspection of whether all low-voltage power supplies in the preset low-voltage power supply stage are powered on normally.

[0078] In some embodiments, detecting the power supply status of the first low-voltage power supply and starting and stopping the power supply of the second low-voltage power supply according to the power supply status of the first low-voltage power supply includes the following steps:

[0079] Step 1: Detect a first voltage and a first current corresponding to a power supply state of a first low-voltage power supply.

[0080] Step 2: Determine whether the first voltage and the first current are not greater than the corresponding first preset thresholds.

[0081] Step 3: when it is determined that the first voltage is not greater than the corresponding first preset threshold and the first current is not greater than the corresponding first preset threshold, determine that the first low-voltage power supply is supplying power normally, and start the second low-voltage power supply to power on.

[0082] Step 4: When it is determined that the first voltage is greater than the corresponding first preset threshold and the first current is greater than the preset threshold, it is determined that the first low-voltage power supply is abnormal, and the VI source power-on process is terminated.

[0083] By detecting the first voltage and the first current corresponding to the power supply status of the first low-voltage power supply in the above steps; respectively judging whether the first voltage and the first current are not greater than the corresponding first preset threshold value; in the case where it is judged that the first voltage is not greater than the corresponding first preset threshold value and the first current is not greater than the corresponding first preset threshold value, determining that the first low-voltage power supply is normally powered, and starting the second low-voltage power supply to power on; in the case where it is judged that the first voltage is greater than the corresponding first preset threshold value and the first current is greater than the preset threshold value, determining that the power supply of the first low-voltage power supply is abnormal, and terminating the VI source power-on process, thereby realizing the detection and judgment of starting and stopping the power-on of the second low-voltage power supply according to the power supply status of the first low-voltage power supply.

[0084] In some embodiments, determining whether the power supply state of the second low-voltage power supply includes the second preset power supply state comprises the following steps:

[0085] Step 1: Detect a second voltage and a second current corresponding to a power supply state of a second low-voltage power supply.

[0086] Step 2: Compare the second voltage with the preset voltage, and the second current with the preset current respectively.

[0087] Step 3: when it is compared that the second voltage is not greater than the preset voltage and the second current is not greater than the preset current, determine that the power supply state of the second low-voltage power supply includes a second preset power supply state.

[0088] Step 4: When it is determined that the second voltage is greater than the preset voltage and / or the second current is greater than the preset current, it is determined that the second low-voltage power supply is abnormal, and the VI source power-on process is terminated.

[0089] By detecting the second voltage and the second current corresponding to the power supply state of the second low-voltage power supply in the above steps; respectively comparing the second voltage with the preset voltage, and the second current with the preset current; when it is compared that the second voltage is not greater than the preset voltage and the second current is not greater than the preset current, determining that the power supply state of the second low-voltage power supply includes the second preset power supply state; when it is determined that the second voltage is greater than the preset voltage, and / or when it is determined that the second current is greater than the preset current, determining that the power supply of the second low-voltage power supply is abnormal, and terminating the VI source power-on process, the power supply state of the second low-voltage power supply is judged, and the VI source power-on process is controlled.

[0090] In some embodiments, before the control unit is started, the following steps are further implemented: the first low-voltage power supply is powered on after the bus power supply is powered on, and the first low-voltage power supply supplies power to the control unit.

[0091] It should be noted that the VI source power supply control method in the embodiment of the present application is performed after the bus power supply is powered on, and the bus power supply and the first low-voltage power supply are powered on in sequence.

[0092] In some embodiments, the line state information includes initialization state information corresponding to the high-voltage VI line, detecting the line state information of the high-voltage VI line in a preset high-voltage power-on phase, and determining the VI source power supply result according to the line state information includes the following steps:

[0093] Step 1: Obtain initialization state information corresponding to the high-voltage VI circuit, wherein the initialization state information includes an initial state of the high-voltage VI circuit after initialization.

[0094] Step 2: extracting the initial state of the high-voltage VI circuit after initialization from the initialization state information, and detecting whether the initial state of the high-voltage VI circuit is normal to obtain a detection result.

[0095] Step 3: when the detection result includes that the initial state of the high-voltage VI line is normal, determine that the VI source is supplying power normally, and end the VI source power-on process.

[0096] The initialization state information corresponding to the high-voltage VI circuit is obtained in the above steps; the initial state of the high-voltage VI circuit after initialization is extracted from the initialization state information, and whether the initial state of the high-voltage VI circuit is normal is detected to obtain a detection result; when the detection result includes that the initial state of the high-voltage VI circuit is normal, it is determined that the VI source is supplying power normally, and the VI source power-on process is terminated, thereby realizing the judgment that the high-voltage power supply is powered on normally based on the line state information of the high-voltage VI circuit in the preset high-voltage power-on stage.

[0097] In some embodiments, detecting line state information of a high voltage VI line in a preset high voltage power-on phase, and determining a VI source power supply result according to the line state information comprises the following steps:

[0098] Step 1: Obtain initialization state information corresponding to the high-voltage VI circuit, wherein the initialization state information includes an initial state of the high-voltage VI circuit after initialization.

[0099] Step 2: extracting the initial state of the high-voltage VI circuit after initialization from the initialization state information, and detecting whether the initial state of the high-voltage VI circuit is normal to obtain a detection result.

[0100] Step 3: When the detection result includes that the initial state of the high-voltage VI circuit is abnormal, the high-voltage power supply is controlled to be powered off, and the VI source power-on process is terminated.

[0101] The initialization state information corresponding to the high-voltage VI circuit is obtained through the above steps; the initial state of the high-voltage VI circuit after initialization is extracted from the initialization state information, and whether the initial state of the high-voltage VI circuit is normal is detected to obtain a detection result; when the detection result includes that the initial state of the high-voltage VI circuit is abnormal, the high-voltage power supply is controlled to be powered off, and the VI source power-on process is terminated, thereby realizing the judgment of abnormal power-on of the high-voltage power supply based on the line state information of the high-voltage VI circuit in the preset high-voltage power-on stage.

[0102] Figure 3 is a flow chart of a VI source power supply control method according to a preferred embodiment of the present application, such as Figure 3 As shown, the process includes the following steps:

[0103] Step S301, the bus power is powered on.

[0104] Step S302: The first low-voltage power supply is powered on and supplies power to the control unit.

[0105] Step S303: the control unit initializes and detects the first low-voltage power supply.

[0106] Step S304, determining whether the first low-voltage power supply is supplying power normally, if yes, executing step S305, otherwise, executing step S312.

[0107] Step S305, the second low-voltage power supply is powered on and self-checked, and then step S306 is executed.

[0108] Step S306, determining whether the second low-voltage power supply is supplying power normally, if yes, executing step S307, otherwise, executing step S312.

[0109] Step S307, the high voltage VI circuit is initialized, and then step S308 is executed.

[0110] Step S308, the high voltage power supply is powered on, and then step S309 is executed.

[0111] Step S309, performing detection on the high voltage VI circuit, and then executing step S310.

[0112] Step S310, determining whether the line status of the high voltage VI line is normal, if not, executing step S311, otherwise, executing step S312.

[0113] Step S311, the high voltage power supply is powered off.

[0114] Step S312, the VI source power-on process ends.

[0115] It should be noted that the steps shown in the above process or the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer executable instructions, and although a logical order is shown in the flowchart, in some cases, the steps shown or described can be executed in an order different from that shown here.

[0116] This embodiment also provides a VI power supply control device, which is used to implement the above-mentioned embodiments and preferred implementation modes, and the descriptions that have been made will not be repeated. As used below, the terms "module", "unit", "subunit", etc. can implement a combination of software and / or hardware of a predetermined function. Although the devices described in the following embodiments are preferably implemented in software, the implementation of hardware, or a combination of software and hardware, is also possible and conceivable.

[0117] Figure 4 is a structural block diagram of a VI power supply control device according to an embodiment of the present application, such as Figure 4 As shown, the device comprises:

[0118] An acquisition module 41 is used to acquire first power supply information of the low-voltage power supply in a preset low-voltage power-on stage after the control unit is started, wherein the first power supply information is used to characterize the power-on state of the low-voltage power supply in the preset low-voltage power-on stage;

[0119] The judging module 42 is coupled to the obtaining module 41 and is used to judge whether the low-voltage power supply is normally powered on within a preset low-voltage power-on stage according to the first power supply information;

[0120] The control module 43 is coupled to the judgment module 42 and is used to initialize the high-voltage VI circuit when it is judged that the low-voltage power supply is normally powered on within the preset low-voltage power-on stage, and control the high-voltage power supply to supply power to the initialized high-voltage VI circuit;

[0121] The processing module 44 is coupled to the control module 43 and is used to detect the line state information of the high-voltage VI line in a preset high-voltage power-on stage, and determine the VI source power supply result according to the line state information.

[0122] In some of the embodiments, the low-voltage power supply includes a first low-voltage power supply and a second low-voltage power supply, the first low-voltage power supply is electrically connected to the control unit, and the judgment module 42 is used to detect the power supply status of the first low-voltage power supply, and start and stop the second low-voltage power supply from powering on according to the power supply status of the first low-voltage power supply; after the second low-voltage power supply starts to power on, the power supply status of the second low-voltage power supply is detected, and it is determined whether the power supply status of the second low-voltage power supply includes a second preset power supply status, wherein the second preset power supply status includes the second low-voltage power supply supplying power at a preset voltage and a preset current; when it is determined that the power supply status of the second low-voltage power supply includes the preset power supply status, it is determined that the low-voltage power supply is powered on normally within the preset low-voltage power supply stage.

[0123] In some of the embodiments, the judgment module 42 is also used to detect the first voltage and the first current corresponding to the power supply status of the first low-voltage power supply; respectively judge whether the first voltage and the first current are not greater than the corresponding first preset threshold value; when it is judged that the first voltage is not greater than the corresponding first preset threshold value and the first current is not greater than the corresponding first preset threshold value, it is determined that the first low-voltage power supply is normally powered, and the second low-voltage power supply is started to power on; when it is judged that the first voltage is greater than the corresponding first preset threshold value and the first current is greater than the preset threshold value, it is determined that the power supply of the first low-voltage power supply is abnormal, and the VI source power-on process is ended.

[0124] In some of the embodiments, the judgment module 42 is also used to detect the second voltage and the second current corresponding to the power supply state of the second low-voltage power supply; compare the second voltage with the preset voltage, and the second current with the preset current respectively; when it is compared that the second voltage is not greater than the preset voltage and the second current is not greater than the preset current, determine that the power supply state of the second low-voltage power supply includes the second preset power supply state; when it is determined that the second voltage is greater than the preset voltage, and / or when it is determined that the second current is greater than the preset current, determine that the power supply of the second low-voltage power supply is abnormal, and end the VI source power-on process.

[0125] In some of the embodiments, the line status information includes initialization status information corresponding to the high-voltage VI line, and the processing module 44 is used to obtain the initialization status information corresponding to the high-voltage VI line, wherein the initialization status information includes the initial state of the high-voltage VI line after initialization; extract the initial state of the high-voltage VI line after initialization from the initialization status information, and detect whether the initial state of the high-voltage VI line is normal to obtain a detection result; when the detection result includes that the initial state of the high-voltage VI line is normal, determine that the VI source is powered normally, and end the VI source power-on process.

[0126] In some of the embodiments, when the detection result includes that the initial state of the high-voltage VI line is abnormal, the device is used to control the high-voltage power supply to power off and end the VI source power-on process.

[0127] It should be noted that the above modules can be functional modules or program modules, and can be implemented by software or hardware. For modules implemented by hardware, the above modules can be located in the same processor; or the above modules can be located in different processors in any combination.

[0128] Figure 5 is a control block diagram of a semiconductor tester according to an embodiment of the present application, such as Figure 5 As shown, the semiconductor tester includes: a control unit 501, a VI source power module 502 and a high-voltage VI line 503; wherein the control unit 501 is connected to the terminal device 504 through BUS-PCIE control. In this embodiment, the terminal device 504 includes but is not limited to a computer. The control unit 501 is electrically connected to the VI source power module 502 and the high-voltage VI line 503 respectively, and the high-voltage VI line 503 is also electrically connected to the high-voltage power supply 505 of the VI source power module 502; the control unit 501 is used to execute the VI source power supply control method as described above; the VI source power module 502 is used to power the semiconductor tester.

[0129] This embodiment further provides an electronic device, including a memory and a processor, wherein the memory stores a computer program, and the processor is configured to run the computer program to execute the steps in any one of the above method embodiments.

[0130] Optionally, the electronic device may further include a transmission device and an input / output device, wherein the transmission device is connected to the processor, and the input / output device is connected to the processor.

[0131] Optionally, in this embodiment, the processor may be configured to perform the following steps through a computer program:

[0132] S1, after the control unit is started, first power supply information of the low-voltage power supply in a preset low-voltage power-on stage is obtained, wherein the first power supply information is used to characterize the power-on state of the low-voltage power supply in the preset low-voltage power-on stage.

[0133] S2: Determine, based on the first power supply information, whether the low-voltage power supply is powered on normally within a preset low-voltage power-on phase.

[0134] S3, when it is determined that the low-voltage power supply is normally powered on within the preset low-voltage power-on phase, the high-voltage VI circuit is initialized, and the high-voltage power supply is controlled to supply power to the initialized high-voltage VI circuit.

[0135] S4, detecting line status information of the high-voltage VI line in a preset high-voltage power-on phase, and determining a VI source power supply result according to the line status information.

[0136] It should be noted that the specific examples in this embodiment can refer to the examples described in the above embodiments and optional implementation modes, and this embodiment will not be described in detail here.

[0137] In addition, in combination with the VI source power supply control method in the above embodiment, the embodiment of the present application can provide a storage medium for implementation. The storage medium stores a computer program; when the computer program is executed by a processor, any one of the VI source power supply control methods in the above embodiment is implemented.

[0138] Those skilled in the art should understand that the technical features of the above embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0139] The above embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A VI source power supply control method, applied to a control unit of a semiconductor tester, characterized in that: include: After the control unit is started, first power supply information of the low-voltage power supply in a preset low-voltage power-on stage is obtained, wherein the first power supply information is used to characterize the power-on state of the low-voltage power supply in the preset low-voltage power-on stage; According to the first power supply information, determining whether the low-voltage power supply is powered on normally within the preset low-voltage power-on stage; In the case where it is determined that the low-voltage power supply is normally powered on within the preset low-voltage power-on stage, the high-voltage VI circuit is initialized, and the high-voltage power supply is controlled to supply power to the initialized high-voltage VI circuit; Detecting line status information of the high-voltage VI line in a preset high-voltage power-on phase, and determining a VI source power supply result according to the line status information; The low-voltage power supply includes a first low-voltage power supply and a second low-voltage power supply, the first low-voltage power supply is electrically connected to the control unit, and judging whether the low-voltage power supply is normally powered on in the preset low-voltage power supply stage according to the first power supply information includes: Detecting the power supply status of the first low-voltage power supply, and starting and stopping the second low-voltage power supply according to the power supply status of the first low-voltage power supply; After the second low-voltage power supply is powered on, detecting the power supply state of the second low-voltage power supply, and determining whether the power supply state of the second low-voltage power supply includes a second preset power supply state, wherein the second preset power supply state includes the second low-voltage power supply supplying power at a preset voltage and a preset current; In the case where it is determined that the power supply state of the second low-voltage power supply includes the preset power supply state, it is determined that the low-voltage power supply is normally powered on within the preset low-voltage power supply stage.

2. The VI source power supply control method according to claim 1, characterized in that: Detecting the power supply status of the first low-voltage power supply, and starting and stopping the powering of the second low-voltage power supply according to the power supply status of the first low-voltage power supply includes: Detecting a first voltage and a first current corresponding to a power supply state of the first low-voltage power supply; respectively determining whether the first voltage and the first current are not greater than corresponding first preset thresholds; When it is determined that the first voltage is not greater than the corresponding first preset threshold and the first current is not greater than the corresponding first preset threshold, determining that the first low-voltage power supply is supplying power normally, and starting the second low-voltage power supply to power on; When it is determined that the first voltage is greater than the corresponding first preset threshold and the first current is greater than the preset threshold, it is determined that the first low-voltage power supply is abnormal, and the VI source power-on process is terminated.

3. The VI source power supply control method according to claim 1, characterized in that: Determining whether the power supply state of the second low-voltage power supply includes a second preset power supply state includes: Detecting a second voltage and a second current corresponding to the power supply state of the second low-voltage power supply; respectively comparing the second voltage with the preset voltage, and the second current with the preset current; In the case where it is compared that the second voltage is not greater than the preset voltage and the second current is not greater than the preset current, determining that the power supply state of the second low-voltage power supply includes a second preset power supply state; When it is determined that the second voltage is greater than the preset voltage and / or when it is determined that the second current is greater than the preset current, it is determined that the second low-voltage power supply is abnormal, and the VI source power-on process is terminated.

4. The VI source power supply control method according to claim 1, characterized in that: Before the control unit is started, the method includes: the first low-voltage power supply is powered on after the bus power supply is powered on, and supplies power to the control unit.

5. The VI source power supply control method according to claim 1, characterized in that: The line status information includes initialization status information corresponding to the high-voltage VI line, detecting the line status information of the high-voltage VI line in a preset high-voltage power-on phase, and determining the VI source power supply result according to the line status information includes: Acquire initialization state information corresponding to the high-voltage VI circuit, wherein the initialization state information includes an initial state of the high-voltage VI circuit after initialization; Extracting the initial state of the high-voltage VI circuit after initialization from the initialization state information, and detecting whether the initial state of the high-voltage VI circuit is normal to obtain a detection result; In the case that the detection result includes that the initial state of the high-voltage VI line is normal, it is determined that the VI source is supplying power normally, and the VI source power-on process is ended.

6. The VI source power supply control method according to claim 5, characterized in that: In the case where the detection result includes that the initial state of the high-voltage VI circuit is abnormal, the method includes: controlling the high-voltage power supply to power off, and ending the VI source power-on process.

7. A VI source power supply control device, characterized in that: include: An acquisition module, used for acquiring first power supply information of the low-voltage power supply in a preset low-voltage power-on stage after the control unit is started, wherein the first power supply information is used to characterize the power-on state of the low-voltage power supply in the preset low-voltage power-on stage; A judgment module, used for judging whether the low-voltage power supply is normally powered on within the preset low-voltage power-on stage according to the first power supply information; A control module, configured to initialize the high-voltage VI circuit when it is determined that the low-voltage power supply is normally powered on within the preset low-voltage power-on stage, and control the high-voltage power supply to supply power to the initialized high-voltage VI circuit; A processing module, used to detect the line state information of the high-voltage VI line in a preset high-voltage power-on stage, and determine the VI source power supply result according to the line state information; The low-voltage power supply includes a first low-voltage power supply and a second low-voltage power supply, the first low-voltage power supply is electrically connected to a control unit, and the judgment module is used to detect the power supply status of the first low-voltage power supply, and start and stop the second low-voltage power supply from powering on according to the power supply status of the first low-voltage power supply; after the second low-voltage power supply starts to power on, the power supply status of the second low-voltage power supply is detected, and it is judged whether the power supply status of the second low-voltage power supply includes a second preset power supply status, wherein the second preset power supply status includes the second low-voltage power supply supplying power at a preset voltage and a preset current; when it is judged that the power supply status of the second low-voltage power supply includes the preset power supply status, it is determined that the low-voltage power supply is powered on normally within the preset low-voltage power supply stage.

8. A semiconductor testing machine, characterized in that: include: A control unit, a VI source power module and a high-voltage VI circuit; wherein the control unit is controlled and connected to the terminal device through BUS-PCIE, the control unit is electrically connected to the VI source power module and the high-voltage VI circuit respectively, and the high-voltage VI circuit is also electrically connected to the high-voltage power supply of the VI source power module; The control unit is used to execute the VI source power supply control method according to any one of claims 1 to 6; The VI source power supply module is used to supply power to the semiconductor tester.

9. An electronic device comprising a memory and a processor, characterized in that: A computer program is stored in the memory, and the processor is configured to run the computer program to execute the VI source power supply control method according to any one of claims 1 to 6.

10. A storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the VI source power supply control method according to any one of claims 1 to 6 is implemented.

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