In-situ testing method and sample stage capable of carrying micro-nanoscale samples

By designing a sample table and in-situ testing method that can be equipped with micro-nano-scale samples, the equipment angle limitation and inconvenience of operation of micro-nano-scale samples transfer and testing in the prior art is solved, convenient sample preparation and testing is realized, and operation safety and fault tolerance are improved.

CN113325021BActive Publication Date: 2025-06-06EAST CHINA UNIV OF SCI & TECH
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Patent Information

Application Number
CN202110596603.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-05-31
Publication Date
2025-06-06
Estimated Expiration
2041-05-31

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Abstract

The present invention discloses a sample stage capable of carrying micro-nano scale samples, comprising a base, a cover and a metal wire. The base is in a cubic shape, and threaded holes are respectively arranged on the six faces of the cube. The cover is fixedly connected to the upper surface of the base by screws. The middle and bottom of the metal wire are located between the cover and the base. The cover and the base clamp the middle and bottom of the metal wire. The top of the metal wire is a plane. The micro-nano scale sample is fixed on the plane of the top of the metal wire by a micro-deposition welding process. An in-situ testing method is provided, wherein the micro-nano scale sample is fixed on the top of the metal wire in the above-mentioned sample stage, and the sample stage is clamped on a micro-mechanical tester to perform in-situ testing on the micro-nano scale sample. The in-situ testing method of the present invention and the sample stage capable of carrying micro-nano scale samples can conveniently prepare, transfer and test micro-nano scale samples.
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Citation Information

Patent Citations

  • Sample table capable of carrying micro-nano scale sample

    CN214844915U