Liquid ejection head and liquid ejection device

Abstract

The present invention relates to a liquid ejection head and a liquid ejection device capable of independently adjusting inertia and flow channel resistance. The liquid ejection head of the present invention is characterized in that it is a liquid ejection head comprising a pressure chamber substrate and a connecting plate, wherein the pressure chamber substrate comprises: a first pressure chamber extending in a first direction and applying pressure to liquid; a first supply flow channel; and the connecting plate comprises: a first connecting flow channel extending in a second direction intersecting the first direction and communicating with the first supply flow channel; and a second supply flow channel communicating with the first supply flow channel and the first pressure chamber.

Description

Technical Field

[0001] The present invention relates to a liquid ejecting head and a liquid ejecting device. Background Art

[0002] A liquid ejection head that ejects liquids such as ink from multiple nozzles has long been proposed. For example, Patent Document 1 discloses a liquid ejection head that utilizes a piezoelectric element to change the pressure of the liquid within a pressure chamber, thereby ejecting the liquid from nozzles disposed on a flow channel connected to the pressure chamber. This liquid ejection head is a so-called circulation type that circulates the liquid. Specifically, liquid is drawn from a flow channel connected to the pressure chamber and supplied to the flow channel provided with the nozzles from another flow channel.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2019-147303 Summary of the Invention

[0004] An object of the present invention is to provide a liquid ejection head provided with a supply port capable of independently adjusting inertia and flow path resistance.

[0005] In order to solve the above problems, the preferred embodiment of the present invention involves a liquid ejection head, which is a liquid ejection head having a pressure chamber substrate and a connecting plate, wherein the pressure chamber substrate includes: a first pressure chamber, which extends in a first direction and applies pressure to the liquid; a first supply flow channel, and the connecting plate includes: a first connecting flow channel, which extends in a second direction intersecting the first direction and is connected to the first supply flow channel; a second supply flow channel, which is connected to the first supply flow channel and the first pressure chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0006] Figure 1 It is a schematic diagram showing a partial configuration example of the liquid ejecting device according to the first embodiment.

[0007] Figure 2 A schematic diagram showing the flow path structure in a liquid ejection head.

[0008] Figure 3 for Figure 2 Cross-sectional view of line aa.

[0009] Figure 4 This is a cross-sectional view illustrating the structure of an independent flow channel, etc.

[0010] Figure 5 This is a cross-sectional view illustrating the structure of an independent flow channel, etc.

[0011] Figure 6 It is a cross-sectional view showing a structural example of a liquid ejecting head according to a second embodiment.

[0012] Figure 7 It is a cross-sectional view illustrating independent flow channels and the like.

[0013] Figure 8 It is a cross-sectional view illustrating independent flow channels and the like. DETAILED DESCRIPTION

[0014] A: First embodiment

[0015] In the following description, it is assumed that the X axis, Y axis, and Z axis intersect with each other. The X axis, Y axis, and Z axis are common to all the drawings shown in the following description. Figure 1 As shown in the example, when observing from an arbitrary point, one direction along the X-axis is recorded as the X1 direction, and the direction opposite to the X1 direction is recorded as the X2 direction. The X2 direction is equivalent to the "first direction". Similarly, directions opposite to each other along the Y-axis from an arbitrary point are recorded as the Y1 direction and the Y2 direction. The Y2 direction is equivalent to the "third direction". In addition, directions opposite to each other along the Z-axis from an arbitrary point are recorded as the Z1 direction and the Z2 direction. The Z1 direction is equivalent to the "second direction". Furthermore, the XY plane including the X-axis and the Y-axis is equivalent to the horizontal plane. The Z-axis is an axis along the vertical direction, and the Z2 direction is equivalent to the downward direction in the vertical direction.

[0016] Figure 1 FIG1 is a schematic diagram showing a partial configuration example of a liquid ejection device 100 according to the first embodiment. The liquid ejection device 100 is an inkjet printing device that ejects droplets of a liquid such as ink onto a medium 11. The medium 11 is, for example, printing paper. The medium 11 may also be a printing target made of any material, such as a resin film or fabric.

[0017] The liquid ejection device 100 is provided with a liquid container 12. The liquid container 12 stores ink. The liquid container 12 may be, for example, an ink cartridge that can be attached to and detached from the liquid ejection device 100, an ink bag formed of a flexible film, or an ink tank that can be refilled with ink. The type of ink stored in the liquid container 12 is arbitrary.

[0018] like Figure 1As shown, the liquid ejection device 100 includes a control unit 21, a conveying mechanism 22, a moving mechanism 23, and a liquid ejection head 24. The control unit 21 includes, for example, a processing circuit such as a CPU (Central Processing Unit) or an FPGA (Field Programmable Gate Array) and a storage circuit such as a semiconductor memory, and controls various elements of the liquid ejection device 100, such as the ejection operation of the liquid ejection head 24. The control unit 21 is an example of a "control unit."

[0019] The transport mechanism 22 transports the medium 11 along the Y-axis under the control of the control unit 21. The moving mechanism 23 moves the liquid ejecting head 24 back and forth along the X-axis under the control of the control unit 21. The moving mechanism 23 includes a substantially box-shaped transport body 231 that houses the liquid ejecting head 24, and an endless conveyor belt 232 to which the transport body 231 is fixed. In the first embodiment, a configuration in which a plurality of liquid ejecting heads 24 are mounted on the transport body 231, or a configuration in which the liquid container 12 and the liquid ejecting head 24 are mounted on the transport body 231, can also be employed.

[0020] The liquid ejection head 24 ejects ink supplied from the liquid container 12 onto the medium 11 from each of the plurality of nozzles under the control of the control unit 21. The liquid ejection head 24 forms an image on the surface of the medium 11 by ejecting ink onto the medium 11 in parallel with the transport of the medium 11 by the transport mechanism 22 and the repetitive back-and-forth movement of the transport body 231.

[0021] Figure 2 , which is a schematic diagram showing the flow path structure in the liquid ejection head 24 when the liquid ejection head 24 is viewed from the Z axis. Figure 2 As shown, a plurality of nozzles N are formed on the surface of the liquid ejection head 24 facing the medium 11. The plurality of nozzles N are arranged along the Y axis. The plurality of nozzles N eject ink in the Z axis direction. The nozzles N are one example of a "nozzle".

[0022] like Figure 2 As shown in FIG, a plurality of nozzles N are located on the same straight line, thereby forming a nozzle array L1. The nozzle array L1 is a collection of a plurality of nozzles N arranged on a straight line along the Y axis. Figure 2 As shown, the nozzles N are arranged at a pitch θ. The pitch θ is the distance between the center of one nozzle N and the center of another nozzle N in the Y-axis direction.

[0023] like Figure 2As shown, an independent flow channel array 25 is provided in the liquid ejection head 24. The independent flow channel array 25 is a collection of multiple independent flow channels P. The multiple independent flow channels P extend in the X1 direction and correspond to different nozzles N. The multiple independent flow channels P are connected to the nozzles N. In addition, as shown in FIG. Figure 2 As shown, the multiple independent flow channels P are adjacent to each other in the Y-axis direction. The detailed structure of the independent flow channels P will be described later. Furthermore, the aforementioned "adjacent" means that when any element A and element B are viewed along a specific direction, at least a portion of element A and at least a portion of element B face each other. It is not necessary for all elements A and B to face each other; as long as at least a portion of element A and at least a portion of element B face each other, it can be interpreted as "element A and element B are adjacent."

[0024] like Figure 2 As shown, the independent flow channel P has a pressure chamber Ca1 and a pressure chamber Ca2. The pressure chambers Ca1 and Ca2 in the independent flow channel P extend in the X1 direction. Ink to be ejected from the nozzle N connected to the independent flow channel P is stored in the pressure chambers Ca1 and Ca2. When the pressure in the pressure chambers Ca1 and Ca2 changes, the ink is ejected from the nozzle N. The pressure chamber Ca1 is an example of a "first pressure chamber," and the pressure chamber Ca2 is an example of a "second pressure chamber." In the following description, when there is no need to specifically distinguish between the pressure chambers Ca1 and Ca2, they will be simply described as "pressure chamber C."

[0025] like Figure 2 As shown, the liquid ejection head 24 is provided with a first common liquid chamber R1 and a second common liquid chamber R2. The first common liquid chamber R1 and the second common liquid chamber R2 each extend in the Y-axis direction, spanning the entire range where the multiple nozzles N are distributed. In a top view viewed in the Z-axis direction, the independent flow channel array 25 and the multiple nozzles N are located between the first common liquid chamber R1 and the second common liquid chamber R2. In the following description, the top view viewed in the Z-axis direction is referred to as "top view."

[0026] Multiple independent flow channels P are in common communication with the first common liquid chamber R1. Specifically, the end E1 of each independent flow channel P located in the X2 direction is connected to the first common liquid chamber R1. Similarly, multiple independent flow channels P are in common communication with the second common liquid chamber R2. Specifically, the end E2 of each independent flow channel P located in the X1 direction is connected to the second common liquid chamber R2. In the liquid ejection head 24, each independent flow channel P connects the first common liquid chamber R1 and the second common liquid chamber R2. As a result, ink supplied from the first common liquid chamber R1 to each independent flow channel P is ejected from the nozzle N. Ink that is not ejected is ejected into the second common liquid chamber R2.

[0027] like Figure 2 As shown, the liquid ejection head 24 includes a circulation mechanism 26. The circulation mechanism 26 is a mechanism that causes ink discharged from each independent flow path P into the second common liquid chamber R2 to flow back into the first common liquid chamber R1. The circulation mechanism 26 includes a first supply pump 261, a second supply pump 262, a storage container 263, a circulation flow path 264, and a supply flow path 265.

[0028] The first supply pump 261 is a pump that supplies the ink stored in the liquid container 12 to the storage container 263. The storage container 263 is a sub-tank that temporarily stores the ink supplied from the liquid container 12.

[0029] The circulation flow path 264 is a flow path that allows the second common liquid chamber R2 to communicate with the storage container 263 , and discharges ink from a third communication flow path Ra3 described later via the second common liquid chamber R2 .

[0030] In addition to the ink stored in the liquid container 12 supplied by the first supply pump 261 , the storage container 263 is also supplied with the ink discharged from the independent flow paths P to the second common liquid chamber R2 via the circulation flow path 264 .

[0031] The second supply pump 262 is a pump that delivers ink stored in the storage container 263. The ink delivered from the second supply pump 262 is supplied to the first common liquid chamber R1 via the supply flow path 265. The supply flow path 265 supplies ink to the first communication flow path Ra1 described later.

[0032] like Figure 2 As shown, the independent flow channel P includes a nozzle flow channel Nf. The nozzle flow channel Nf extends in the X1 direction and, as shown in the figure, is located between the pressure chamber Ca1 and the pressure chamber Ca2 when viewed in the Z-axis direction. The nozzle flow channel Nf communicates with the pressure chambers Ca1 and Ca2 and is provided with nozzles N that eject ink supplied from the pressure chamber Ca1.

[0033] like Figure 2 As shown, in the liquid ejection head 24 of the first embodiment, the pressure chambers Ca1 and Ca2 corresponding to the different nozzles N of the nozzle array L1 are arranged linearly along the Y-axis direction. Figure 2 As shown, the array of pressure chambers Ca1 and the array of pressure chambers Ca2 are arranged side by side with a predetermined interval in the X-axis direction. Typically, the positions of the pressure chambers Ca1 and Ca2 in the Y-axis direction are the same.

[0034] Next, the detailed structure of the liquid ejecting head 24 will be described. Figure 3 for, Figure 2 The cross-sectional view of line aa. Figure 3 , a cross section through the independent flow channel P is shown. Figure 3 As shown, the liquid ejection head 24 includes a flow channel structure 30 , a plurality of piezoelectric elements 41 , a housing 42 , a protective substrate 43 , and a wiring substrate 44 .

[0035] The flow channel structure 30 is a structure formed with a flow channel having a first common liquid chamber R1, a second common liquid chamber R2, multiple independent flow channels P, and multiple nozzles N. The flow channel structure 30 is a structure in which a nozzle substrate 31, a communication plate 33, a pressure chamber substrate 34, and a vibration plate 35 are stacked in this order in the Z1 direction. These elements that make up the flow channel structure 30 can be manufactured, for example, by processing a silicon single crystal substrate using common semiconductor manufacturing methods.

[0036] A plurality of nozzles N are formed on the nozzle substrate 31. The plurality of nozzles N are cylindrical through holes through which ink passes. Figure 3 As shown, the nozzle substrate 31 is a plate-shaped member having a surface Fa1 facing the Z2 direction and a surface Fa2 facing the Z1 direction. The communication plate 33 is a plate-shaped member having a surface Fc1 facing the Z2 direction and a surface Fc2 facing the Z1 direction.

[0037] The various elements that make up the flow channel structure 30 are formed into rectangular shapes that are elongated in the Y-axis direction and are bonded together using, for example, an adhesive. For example, the surface Fa2 of the nozzle substrate 31 is bonded to the surface Fc1 of the communication plate 33, and the surface Fc2 of the communication plate 33 is bonded to the surface Fd1 of the pressure chamber substrate 34. The surface Fd2 of the pressure chamber substrate 34 is bonded to the surface Fe1 of the vibration plate 35.

[0038] The connecting plate 33 has a space O12 and a space O22. The space O12 and the space O22 are respectively openings that are long in the Y-axis direction. Figure 3 As shown in FIG. 1 , the space O12 is a reservoir extending in the X1 direction and storing the ink sent from the supply flow path 265. Figure 3 As shown, space O22 extends in the X1 direction and serves as a reservoir for ink supplied from the third communication channel Ra3 (described later). A vibration absorber 361, which encloses space O12, and a vibration absorber 362, which encloses space O22, are provided on surface Fc1 of communication plate 33. Both absorbers 361 and 362 are layered components formed of an elastic material.

[0039] The housing 42 is a shell for storing ink. The housing 42 is joined to the surface Fc2 of the connecting plate 33. The housing 42 includes a space O13 connected to the space O12 and a space O23 connected to the space O22. The space O13 and the space O23 are each a long space in the Y-axis direction. The space O12 and the space O13 are connected to each other to form the first common liquid chamber R1. Similarly, the space O22 and the space O23 are connected to each other to form the second common liquid chamber R2. The vibration absorber 361 forms the wall surface of the first common liquid chamber R1 and absorbs the pressure fluctuations of the ink in the first common liquid chamber R1. The vibration absorber 362 forms the wall surface of the second common liquid chamber R2 and absorbs the pressure fluctuations of the ink in the second common liquid chamber R2.

[0040] The housing 42 is formed with a supply port 421 and a discharge port 422. The supply port 421 is a conduit communicating with the first common liquid chamber R1 and is connected to the supply flow path 265 of the circulation mechanism 26. Ink delivered from the second supply pump 262 to the supply flow path 265 is supplied to the first common liquid chamber R1 via the supply port 421. Meanwhile, the discharge port 422 is a conduit communicating with the second common liquid chamber R2 and is connected to the circulation flow path 264 of the circulation mechanism 26. Ink within the second common liquid chamber R2 is supplied to the circulation flow path 264 via the discharge port 422.

[0041] Pressure chamber Ca1 and pressure chamber Ca2 are provided in the pressure chamber substrate 34. Each pressure chamber C is formed by connecting the surface Fc2 of the plate 33 and the space between the vibration plate 35. Each pressure chamber C is formed into a strip shape along the X-axis when viewed in plan, and extends in the X1 direction.

[0042] The vibration plate 35 is a plate-shaped member capable of elastically vibrating. For example, the vibration plate 35 is formed by laminating a first layer of silicon oxide (SiO2) and a second layer of zirconium oxide (ZrO2). Alternatively, the vibration plate 35 can be integrally formed with the pressure chamber substrate 34 by selectively removing a portion of the thickness of a plate-shaped member of a predetermined thickness corresponding to the pressure chamber C. Alternatively, the vibration plate 35 can be formed as a single layer.

[0043] On the surface Fe2 of the vibration plate 35, a plurality of piezoelectric elements 41 corresponding to different pressure chambers C are provided. The piezoelectric element 41 corresponding to each pressure chamber C overlaps with the pressure chamber C when viewed in a planar manner. Specifically, each piezoelectric element 41 is constructed by stacking a first electrode and a second electrode facing each other and a piezoelectric layer formed between the two electrodes. Each piezoelectric element 41 is an energy generating element that causes the ink in the pressure chamber C to be ejected from the nozzle N by changing the pressure of the ink in the pressure chamber C. The piezoelectric element 41 deforms itself by receiving a driving signal, thereby vibrating the vibration plate 35. When the vibration plate 35 vibrates, the pressure chamber C expands and contracts. As the pressure chamber C expands and contracts, pressure is applied to the ink from the pressure chamber C. As a result, the ink is ejected from the nozzle N.

[0044] The protective substrate 43 is a plate-shaped component provided on the surface Fe2 of the vibration plate 35, and strengthens the mechanical strength of the vibration plate 35 while protecting the plurality of piezoelectric elements 41. A plurality of piezoelectric elements 41 are accommodated between the protective substrate 43 and the vibration plate 35. In addition, a wiring substrate 44 is mounted on the surface Fe2 of the vibration plate 35. The wiring substrate 44 is a mounting component for electrically connecting the control unit 21 and the liquid ejection head 24. It is preferred to use a flexible wiring substrate 44 such as an FPC (Flexible Printed Circuit) or an FFC (Flexible Flat Cable). A driving circuit 45 for supplying a driving signal to each piezoelectric element 41 is mounted on the wiring substrate 44.

[0045] Next, the structure of the independent flow channel P will be described. Figure 3 As shown, the independent flow channel P includes a first connecting flow channel Ra1, a first supply flow channel Rb1, a second supply flow channel Rb2, a pressure chamber Ca1, a second connecting flow channel Ra2, a nozzle flow channel Nf, a fourth connecting flow channel Ra4, a pressure chamber Ca2, a second discharge flow channel Rc2, a first discharge flow channel Rc1, and a third connecting flow channel Ra3. The independent flow channel P is a flow channel in which these elements are integrally formed, and the aforementioned elements are connected in the aforementioned order. The independent flow channel P is a flow channel formed in a plane-symmetrical manner with respect to a symmetry plane parallel to the YZ plane, with the flow channel from the first connecting flow channel Ra1 to the nozzle N and the flow channel from the nozzle N to the third connecting flow channel Ra3.

[0046] The first communication channel Ra1 is a space formed in the communication plate 33. Specifically, Figure 3As shown, the first communication channel Ra1 extends along the Z-axis from the space O12 that constitutes the first common liquid chamber R1 to the surface Fc2 of the communication plate 33. The end of the first communication channel Ra1 connected to the space O12 is the end E1 of the independent channel P. The first communication channel Ra1 is connected to the first supply channel Rb1 and guides ink supplied from the first common liquid chamber R1 to the first supply channel Rb1.

[0047] like Figure 3 As shown, the first supply channel Rb1 is provided in the pressure chamber substrate 34. The first supply channel Rb1 is the space between the surface Fc2 of the connecting plate 33 and the vibration plate 35. The first supply channel Rb1 is a channel that connects the first connecting channel Ra1 and the second supply channel Rb2 and guides the ink supplied from the first connecting channel Ra1 to the second supply channel Rb2. Although the cross-sectional shape of the first supply channel Rb1 viewed along the Y-axis direction is as shown in FIG. Figure 3 Although the shape is trapezoidal as shown, it is not limited to this and may be rectangular or semicircular, for example.

[0048] like Figure 3 As shown, the second supply channel Rb2 is provided on the connecting plate 33. As shown in the figure, the second supply channel Rb2 is a trapezoidal recess extending in the X1 direction and opening in the Z1 direction. The wall of the second supply channel Rb2 on one side in the Z1 direction is formed by the wall surface of the pressure chamber base plate 34, while the wall on the other side in the Z1 direction is formed by the wall surface of the connecting plate 33.

[0049] The second supply channel Rb2 is a channel that communicates with the first supply channel Rb1 and the pressure chamber Ca1 and guides the ink supplied from the first supply channel Rb1 to the pressure chamber Ca1. Figure 3 Although the shape is trapezoidal as shown, it is not limited to this and may be rectangular or semicircular, for example.

[0050] like Figure 3 As shown, the width W1 of the second supply channel Rb2 in the X1 direction is greater than the width W2 of the first supply channel Rb1 in the X1 direction. Furthermore, the width W1 of the second supply channel Rb2 in the X1 direction is smaller than the width W3 of the pressure chamber Ca1 in the X1 direction.

[0051] like Figure 3As shown, the second communication channel Ra2 is a space extending through the communication plate 33. The second communication channel Ra2 extends along the Z-axis. The second communication channel Ra2 extends in the Z1 direction and communicates with the pressure chamber Ca1 and the nozzle channel Nf. The second communication channel Ra2 guides ink extruded from the pressure chamber Ca1 to the nozzle channel Nf.

[0052] The nozzle flow channel Nf is provided on the connecting plate 33 and extends in the X1 direction. The nozzle flow channel Nf is located between the pressure chambers Ca1 and Ca2 when viewed in the Z-axis direction. The nozzle flow channel Nf communicates with the second connecting flow channel Ra2 and the fourth connecting flow channel Ra4, and is provided with nozzles N that eject ink supplied from the pressure chamber Ca1.

[0053] The third communication flow channel Ra3 is a space formed in the communication plate 33. Specifically, Figure 3 As shown, the third communication channel Ra3 extends along the Z axis from the space O22 that constitutes the second common liquid chamber R2 to the surface Fc2 of the communication plate 33. The end of the third communication channel Ra3 connected to the space O22 is the end E2 of the independent channel P. The third communication channel Ra3 is connected to the first discharge channel Rc1 and guides ink supplied from the first discharge channel Rc1 to the second common liquid chamber R2.

[0054] like Figure 3 As shown, the first discharge flow channel Rc1 is provided on the pressure chamber substrate 34. The first discharge flow channel Rc1 is the space between the surface Fc2 of the connecting plate 33 and the vibration plate 35. The first discharge flow channel Rc1 is a flow channel that is connected to the third connecting flow channel Ra3 and the second discharge flow channel Rc2 and guides the ink supplied from the second discharge flow channel Rc2 to the third connecting flow channel Ra3. Although the cross-sectional shape of the first discharge flow channel Rc1 viewed along the Y-axis direction is as shown in FIG. Figure 3 Although the shape is trapezoidal as shown, it is not limited to this and may be rectangular or semicircular, for example.

[0055] like Figure 3 As shown, the second discharge channel Rc2 is provided on the connecting plate 33. As shown in the figure, the second discharge channel Rc2 is a trapezoidal recess extending in the X1 direction and opening in the Z1 direction. The wall of the second discharge channel Rc2 on one side in the Z1 direction is formed by the wall surface of the pressure chamber base plate 34, and the wall on the other side in the Z1 direction is formed by the wall surface of the connecting plate 33.

[0056] The second discharge flow channel Rc2 is connected to the first discharge flow channel Rc1 and the pressure chamber Ca2. The second discharge flow channel Rc2 is a flow channel that guides the ink that has not been ejected from the nozzle N from the pressure chamber Ca2 to the first discharge flow channel Rc1. Although the cross-sectional shape of the second discharge flow channel Rc2 viewed along the Y-axis direction is as shown in FIG. Figure 3 Although the shape is trapezoidal as shown, it is not limited to this and may be rectangular or semicircular, for example.

[0057] like Figure 3 As shown, the width W1 of the second discharge channel Rc2 in the X1 direction is larger than the width W2 of the first discharge channel Rc1 in the X1 direction. Furthermore, the width W1 of the second discharge channel Rc2 in the X1 direction is smaller than the width W3 of the pressure chamber Ca2 in the X1 direction.

[0058] like Figure 3 As shown, the fourth communication channel Ra4 is a space extending through the communication plate 33. It extends along the Z-axis. It extends in the Z1 direction and connects to the pressure chamber Ca2 and the nozzle channel Nf. The fourth communication channel Ra4 guides ink supplied from the nozzle channel Nf to the pressure chamber Ca2.

[0059] In the above configuration, the liquid ejection head 24 circulates ink and simultaneously ejects ink during operation of the liquid ejection device 100. Specifically, ink from the liquid container 12 is supplied to the first common liquid chamber R1 via the supply flow channel 265. Subsequently, a drive signal for driving the piezoelectric element 41 is output by a drive unit, including the drive circuit 45, to the piezoelectric element 41 on the pressure chamber Ca1 side and the piezoelectric element 41 on the pressure chamber Ca2 side, thereby driving the piezoelectric element 41 on the pressure chamber Ca1 side and the piezoelectric element 41 on the pressure chamber Ca2 side simultaneously. As a result, the ink supplied to the first common liquid chamber R1 is ejected from the nozzle N. Furthermore, the ink supplied to the nozzle flow channel Nf that is not ejected from the nozzle N is supplied to the second common liquid chamber R2 via the third communication flow channel Ra3. The piezoelectric element 41 on the pressure chamber Ca1 side is an example of a "first energy generating element," and the piezoelectric element 41 on the pressure chamber Ca2 side is an example of a "second energy generating element."

[0060] The liquid ejection head 24 of the first embodiment circulates the ink during ejection, thereby suppressing thickening of the ink or sedimentation of components near the nozzles N, thereby preventing deterioration of the ink's ejection characteristics. This makes it possible to maintain nearly constant ink ejection characteristics, thereby suppressing variations in the ejection characteristics and improving the ink ejection quality. The aforementioned "ejection characteristics" refer to, for example, the ejection volume or ejection velocity of the ink.

[0061] Hereinafter, the characteristic parts of the first embodiment will be described in detail. Figure 3 The range from the middle of the first common liquid chamber R1 to just before reaching the nozzle N in the illustrated liquid ejection head 24 is described. Although other ranges, particularly the downstream side of the nozzle N in the ink flow direction, are not specifically described, unless otherwise specified, the structure is the same as that of the upstream side of the nozzle N in the ink flow direction described later.

[0062] Figure 4 , is a top view of the independent flow channel P when observed along the Z-axis direction. Figure 4 The following three sections are shown, namely, the section at the position where the first supply channel Rb1 and the pressure chamber Ca1 overlap in the Z-axis direction, namely the D-D' section, the section at the position where the first connecting channel Ra1, the second connecting channel Ra2 and the second supply channel Rb2 overlap in the Z-axis direction, namely the EE' section, and the section at the position where the first common liquid chamber R1 and the nozzle channel Nf overlap in the Z-axis direction, namely the F-F' section.

[0063] Figure 5 : is a side view of the independent flow channel P when observed along the X-axis direction. Figure 5 In the figure, the following three cross sections are shown: the cross section AA' passing through the first supply channel Rb1, the cross section BB' passing through the position where the first supply channel Rb1 and the second supply channel Rb2 overlap in the X-axis direction, and the cross section CC' passing through the second supply channel Rb2. Figure 5 In the CC' cross section, the protective substrate 43 is omitted from illustration.

[0064] Depend on Figure 4 As can be seen, in the liquid ejection head 24 of the first embodiment, the width in the Y2 direction of the first common liquid chamber R1, the first communicating flow channel Ra1, the second communicating flow channel Ra2, the first supply flow channel Rb1, the pressure chamber Ca1, and the nozzle flow channel Nf is the width D2. Furthermore, although the width D2 is uniformly described for each of the aforementioned portions, the widths may vary locally.

[0065] On the other hand, by Figure 4 It can be seen that in the liquid ejection head 24 of the first embodiment, the width of the second supply flow path Rb2 in the Y2 direction is the width D1. Here, the width D1 is smaller than the width D2.

[0066] In addition, by Figure 5It can be seen that in the liquid ejection head 24 of the first embodiment, the width of the first supply flow path Rb1 provided in the pressure chamber substrate 34 in the Z1 direction is the width h2. Figure 5 Although not shown in the figure, the width of the pressure chamber Ca1 in the Z1 direction is also the width h2. Here, the width of the pressure chamber base plate 34 itself in the Z1 direction is also the width h2. In other words, the first supply flow path Rb1 and the pressure chamber Ca1 are provided so as to penetrate the pressure chamber base plate 34.

[0067] On the other hand, by Figure 5 As can be seen, in the first embodiment of the liquid ejection head 24, the width of the second supply flow channel Rb2 provided on the connecting plate 33 in the Z1 direction is width h1. Here, width h1 is smaller than width h2. Here, the width of the connecting plate 33 itself in the Z1 direction is width h3. Width h3 is significantly larger than width h1 or width h2. In other words, the second supply flow channel Rb2 does not penetrate the connecting plate 33, but is formed by scraping off a portion of the surface of the connecting plate 33.

[0068] As can be seen above, in the liquid ejection head 24 of the first embodiment, the second supply channel Rb2 has a smaller width in both the Y1 and Z1 directions than other parts. Therefore, forming the second supply channel Rb2 requires higher machining precision than other parts. In light of this, the liquid ejection head 24 of the first embodiment employs a structure in which the second supply channel Rb2 is disposed on the connecting plate 33 rather than on the pressure chamber substrate 34.

[0069] The reasons for adopting the above-described structure are explained below. For simplicity, the following description will focus solely on the second supply flow channel Rb2. While the second discharge flow channel Rc2 is not specifically described, since the second discharge flow channel Rc2 shares the same structure as the second supply flow channel Rb2, it can achieve the same effects as those achieved by the second supply flow channel Rb2, described later.

[0070] As described above, in the first embodiment, the width D1 of the second supply flow channel Rb2 in the Y2 direction is smaller than the width D2 of the first supply flow channel Rb1 , the pressure chamber Ca1 , the first communication flow channel Ra1 , and the second communication flow channel Ra2 in the Y2 direction.

[0071] Here, generally speaking, the frequency responsiveness of the liquid ejection head depends on both the flow channel resistance and inertia. If this frequency responsiveness is taken into consideration, the flow channel resistance and inertia are required to be controlled separately and independently in the flow channel (hereinafter referred to as the supply port) that is closest to the portion that supplies the liquid to the pressure chamber. In other words, it is not desirable for the flow channel resistance and inertia to change only to the same extent. In addition, inertia refers to the ratio of the pressure applied to the ink by the energy generating element to the acceleration of the ink caused by the pressure, and is related to the fluidity of the ink. The smaller the inertia, the greater the fluidity of the ink. On the other hand, the flow channel resistance is the resistance component that acts on the ink from the flow channel wall surface, etc. when the ink flows.

[0072] When inertia is represented by M, ink density is represented by ρ, flow channel length is represented by L, and flow channel cross-sectional diameter is represented by d, inertia can be represented by the following formula (1).

[0073] M=ρL / πd 2 …(1)

[0074] When the flow channel resistance is defined as R, the ink viscosity is defined as η, the flow channel length is defined as L, and the flow channel cross-sectional diameter is defined as d, the flow channel resistance can be expressed by the following formula (2).

[0075] R=128ηL / πd 4 …(2)

[0076] Referring to equations (1) and (2), it can be seen that both inertia M and flow channel resistance R are proportional to the first power of the flow channel length L. Therefore, while increasing the flow channel length L, for example, increases inertia M, the flow channel resistance R also increases to the same degree. Therefore, when varying the flow channel length L, it is impossible to independently control inertia M and flow channel resistance R.

[0077] On the other hand, referring to equations (1) and (2), it can be seen that inertia M is inversely proportional to the square of the flow channel cross-sectional diameter d, and flow channel resistance R is inversely proportional to the fourth power of the flow channel cross-sectional diameter d. In other words, by varying the flow channel cross-sectional diameter d, inertia M and flow channel resistance R can be varied to varying degrees. Therefore, by varying the flow channel cross-sectional diameter d, inertia M and flow channel resistance R can be independently controlled.

[0078] Furthermore, to form a flow channel on the pressure chamber substrate 34, the pressure chamber substrate 34 undergoes a manufacturing process in which, after being thinned by wafer polishing or other means, the substrate is etched through to form the pressure chambers C. Since even a short etching time penetrates the substrate after thinning, forming the pressure chambers C is relatively easy. However, forming a groove shallower than the substrate thickness is extremely difficult. Consequently, accurately forming a flow channel with a desired cross-sectional diameter d on the pressure chamber substrate 34 is difficult.

[0079] On the other hand, when providing the flow channel on the connecting plate 33, since the connecting plate 33 does not undergo the aforementioned thinning process, etching can be performed on a substrate having a certain thickness. Therefore, since the probability of penetrating the connecting plate 33 is low, the flow channel can be formed more easily than when etching the pressure chamber substrate 34. As a result, the flow channel cross-sectional diameter d can be designed with high precision.

[0080] Furthermore, attempting to independently control the inertia M and the flow resistance R by varying the flow cross-sectional diameters of the first and third connecting flow channels Ra1 and Ra3 presents the following problem. The flow channel lengths of the first and third connecting flow channels Ra1 and Ra3 are calculated by subtracting the Z-axis width of the portion of the connecting plate 33 extending in the X-axis direction from the Z-axis width of the connecting plate 33. In other words, the flow channel lengths of the first and third connecting flow channels Ra1 and Ra3 become fixed values ​​that depend on the connecting plate 33 and the first and second common liquid chambers R1 and R2. As described above, since both the inertia M and the flow resistance R are proportional to the first power of the flow channel length, by making the flow channel length fixed, even with varying the flow channel cross-sectional diameters, it may be impossible to achieve the desired values ​​for the inertia M and flow resistance R. In other words, it is undesirable to adjust the inertia M and flow resistance R by utilizing the portion of the connecting plate 33 extending in the thickness direction, i.e., the Z-axis direction. Furthermore, at least the first supply channel Rb1 and the third supply channel Rb3 are provided between the pressure chambers Ca1 and Ca2 and the first and third communication channels Ra1 and Ra3. Therefore, even if the inertia M and the channel resistance R are adjusted to desired values ​​using the first and third communication channels Ra1 and Ra3, the desired values ​​will ultimately deviate because the first and third supply channels Rb1 and Rb3, which are closer to the pressure chambers Ca1 and Ca2 than the first and third communication channels Ra1 and Ra3, function as buffers to some extent when the piezoelectric elements in the pressure chambers Ca1 and Ca2 are driven. In other words, it is undesirable to adjust the inertia M and the channel resistance R using portions farther from the pressure chambers Ca1 and Ca2. Based on this perspective, in this embodiment, the inertia M and the channel resistance R are not controlled in the first and third communication channels Ra1 and Ra3.

[0081] In view of the above, in the first embodiment, a second supply flow channel Rb2, having a smaller flow channel cross-sectional diameter d than the first supply flow channel Rb1, pressure chamber Ca1, first communication flow channel Ra1, and second communication flow channel Ra2, is provided on the communication plate 33 near the pressure chambers Ca1 and Ca2. The communication plate 33 allows the flow channel cross-sectional diameter to be designed with high precision, as described above. Consequently, the inertia and flow channel resistance can be independently adjusted to desired values.

[0082] B: Second embodiment

[0083] Figure 62 is a cross-sectional view showing an example structure of a liquid ejection head 240 according to a second embodiment. In the aforementioned first embodiment, a structure in which ink circulates from the second common liquid chamber R2 to the first common liquid chamber R1 was illustrated. In contrast, the technical concept of ink circulation is omitted in the second embodiment. Specifically, the liquid ejection head 240 of the second embodiment differs from the first embodiment in that the circulation mechanism 26 is omitted. Furthermore, identical structures to those in the first embodiment are designated with identical reference numerals, and their descriptions are omitted or simplified.

[0084] In the second embodiment, a plurality of independent flow paths P1 are formed on the communication plate 33. The independent flow paths P1 are formed on the communication plate 33 for each nozzle N. Figure 6 As shown, the independent flow channel P1 includes a first connecting flow channel Rd1, a first supply flow channel Re1, a second supply flow channel Re2, a pressure chamber C, and a second connecting flow channel Rd2. The independent flow channel P1 is a flow channel in which these elements are integrally formed. Each of the multiple independent flow channels P1 is formed in a plane-symmetrical manner about a symmetry plane parallel to the YZ plane.

[0085] The first communication flow channel Rd1 is a space formed in the communication plate 33. Specifically, Figure 6 As shown, the first communication channel Rd1 extends along the Z-axis from the space O12 that defines the first common liquid chamber R1 to the surface Fc2 of the communication plate 33. The end of the first communication channel Rd1 connected to the space O12 is the end E3 of the independent channel P1. The first communication channel Rd1 communicates with the first supply channel Re1 and guides ink supplied from the first common liquid chamber R1 to the first supply channel Re1.

[0086] like Figure 6 As shown, the first supply channel Re1 is provided on the pressure chamber substrate 34. The first supply channel Re1 is the space between the surface Fc2 of the connecting plate 33 and the vibration plate 35. The first supply channel Re1 is a channel that connects the first connecting channel Rd1 and the second supply channel Re2 and guides the ink supplied from the first connecting channel Rd1 to the second supply channel Re2. Although the cross-sectional shape of the first supply channel Re1 viewed along the Y-axis direction is as shown in FIG. Figure 6 Although the shape is trapezoidal as shown, it is not limited to this and may be rectangular or semicircular, for example.

[0087] like Figure 6 As shown, the second supply flow channel Re2 is provided on the connecting plate 33. Figure 6As shown, the second supply flow channel Re2 is a trapezoidal recess extending in the X1 direction and opening in the Z1 direction. The wall of the second supply flow channel Re2 on one side in the Z1 direction is formed by the wall surface of the pressure chamber base plate 34, and the wall on the other side in the Z1 direction is formed by the wall surface of the connecting plate 33.

[0088] like Figure 6 As shown, the width W4 of the second supply channel Re2 in the X1 direction is greater than the width W5 of the first supply channel Re1 in the X1 direction. Furthermore, the width W4 of the second supply channel Re2 in the X1 direction is smaller than the width W6 of the pressure chamber C in the X1 direction.

[0089] like Figure 6 As shown, the second communication channel Rd2 is a space extending through the communication plate 33. The second communication channel Rd2 extends along the Z-axis. The second communication channel Rd2 extends in the Z1 direction and communicates with the pressure chamber C and the nozzle N. The second communication channel Rd2 guides ink extruded from the pressure chamber C to the nozzle N. This ink is then ejected from the nozzle N.

[0090] Next, the characteristic part of the second embodiment is described in detail below. Figure 6 In the illustrated liquid ejection head 240 , the independent flow path P1 will be mainly described.

[0091] Figure 7 , which is a top view of the independent flow channel P1 along the Z-axis direction. Figure 7 The following three sections are shown, namely, the section at the position where the first supply channel Re1 overlaps with the pressure chamber C in the Z-axis direction, that is, the J-J' section, the section at the position where the first connecting channel Rd1, the second connecting channel Rd2 and the second supply channel Re2 overlap in the Z-axis direction, that is, the K-K' section, and the section at the position where the first common liquid chamber R1 and the second connecting channel Rd2 overlap in the Z-axis direction, that is, the L-L' section.

[0092] Figure 8 : is a side view of the independent flow channel P1 when observed along the X-axis direction. Figure 8 In FIG, the following three cross sections are shown: a cross section G-G' passing through the first supply channel Re1, a cross section H-H' passing through the position where the first supply channel Re1 and the second supply channel Re2 overlap in the X-axis direction, and a cross section II' passing through the second supply channel Re2. Figure 8 In the II' cross section, the protective substrate 43 is omitted from illustration.

[0093] Depend on Figure 7As can be seen, in the liquid ejection head 240 of the second embodiment, the width in the Y2 direction of the first common liquid chamber R1, the first communication flow channel Rd1, the first supply flow channel Re1, the pressure chamber C, and the second communication flow channel Rd2 is a width D4. Furthermore, although the width D4 is uniformly described for each of the aforementioned portions, the widths may vary locally.

[0094] On the other hand, by Figure 7 It can be seen that in the liquid ejection head 240 of the second embodiment, the width of the second supply flow path Re2 in the Y2 direction is the width D3. Here, the width D3 is smaller than the width D4.

[0095] In addition, by Figure 8 It can be seen that in the liquid ejection head 240 of the second embodiment, the width of the first supply flow channel Re1 provided in the pressure chamber substrate 34 in the Z1 direction is h5. Figure 8 Although not shown in the figure, the width of the pressure chamber C in the Z1 direction is also the width h5. Here, the width of the pressure chamber base plate 34 itself in the Z1 direction is also the width h5. That is, the first supply flow channel Re1 and the pressure chamber C are provided so as to penetrate the pressure chamber base plate 34.

[0096] On the other hand, by Figure 8 As can be seen, in the liquid ejection head 240 of the second embodiment, the width of the second supply flow channel Re2 provided on the connecting plate 33 in the Z1 direction is width h4. Here, width h4 is smaller than width h5. Here, the width of the connecting plate 33 itself in the Z1 direction is width h3. Width h3 is significantly larger than width h4 or width h5. In other words, the second supply flow channel Re2 does not penetrate the connecting plate 33, but is formed by removing a portion of the surface of the connecting plate 33.

[0097] As can be seen from the above, in the liquid ejection head 240 of the second embodiment, the width of the second supply flow channel Re2 in the Y1 direction and the width in the Z1 direction are smaller than those of other parts. Therefore, in order to form the second supply flow channel Re2, a higher processing accuracy is required compared with other parts. In view of this, the liquid ejection head 240 of the second embodiment adopts the following structure in the same manner as the first embodiment, that is, the second supply flow channel Re2 is provided on the connecting plate 33, rather than on the pressure chamber substrate 34. Thus, as in the first embodiment, the flow channel cross-sectional diameter of the second supply flow channel Re2 can be designed with high precision, so that the inertia and flow channel resistance at the supply port can be independently adjusted to the desired values.

[0098] C: Modification

[0099] Although the embodiments of the present disclosure have been described above, the present disclosure is not limited to the aforementioned embodiments, and various modifications may be added. Specific variations that can be applied to the aforementioned embodiments are exemplified below. Any selected embodiments from the following examples may also be appropriately combined within the scope of non-contradiction.

[0100] (1) The energy generating element that changes the pressure of the ink in the pressure chamber C is not limited to the piezoelectric element 41 exemplified in the above embodiment. For example, a heating element that generates bubbles inside the pressure chamber C by heating and thus changes the pressure of the ink may be used as the energy generating element.

[0101] (2) Although the aforementioned embodiment illustrates a serial liquid ejection device 100 that reciprocates a transport body 231 carrying liquid ejection heads 24 and 240, the present invention can also be applied to a row-type liquid ejection device in which a plurality of nozzles N are distributed across the entire width of a medium 11.

[0102] D: Supplement

[0103] The structure of the liquid ejection device 100 is not limited to Figures 2 to 8 The structure illustrated in the figures may be, for example, a general liquid ejecting device that circulates ink other than the structures shown in these drawings. In addition, the liquid ejecting device 100 illustrated in the aforementioned manner may be used in various devices such as facsimile machines or copiers in addition to devices dedicated to printing, and the use of the present invention is not particularly limited. Of course, the use of the liquid ejecting device is not limited to printing. For example, a liquid ejecting device that ejects a solution of a color material can be used as a manufacturing device for forming a color filter of a display device such as a liquid crystal display panel. In addition, a liquid ejecting device that ejects a solution of a conductive material can be used as a manufacturing device for forming wiring or electrodes of a wiring substrate. In addition, a liquid ejecting device that ejects a solution of an organic matter related to a living body can be used as a manufacturing device for manufacturing, for example, a biochip.

[0104] Furthermore, the effects described in this specification are ultimately illustrative or exemplary, and not restrictive. That is, the present invention can achieve other effects that are obvious to those skilled in the art based on the description of this specification in addition to or in place of the above-mentioned effects.

[0105] While preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, the present invention is not limited to the related examples. It is obvious that anyone with general knowledge in the technical field of the present invention will be able to conceive of various variations or modifications within the scope of the technical concept described in the technical solution, and such contents should be understood to fall within the technical scope of the present invention.

[0106] E: Notes

[0107] From the above-described embodiments, for example, the following configurations can be understood.

[0108] A liquid ejection head according to Embodiment 1, one embodiment of the present disclosure, includes a pressure chamber substrate and a connecting plate. The pressure chamber substrate includes a first pressure chamber extending in a first direction and applying pressure to liquid; a first supply flow channel; and the connecting plate includes a first connecting flow channel extending in a second direction intersecting the first direction and communicating with the first supply flow channel; and a second supply flow channel communicating with the first supply flow channel and the first pressure chamber. This embodiment allows the inertia and flow channel resistance to be independently adjusted to desired values.

[0109] According to aspect 2 which is a specific example of aspect 1, the width of the second supply flow channel in the second direction is smaller than the width of the first supply flow channel in the second direction.

[0110] According to aspect 3 which is a specific example of aspect 1 or aspect 2, the width of the second supply flow path in the second direction is smaller than the width of the first pressure chamber in the second direction.

[0111] According to aspect 4, which is a specific example of any one of aspects 1 to 3, the width of the second supply flow path in a third direction intersecting both the first direction and the second direction is smaller than the width of the first supply flow path in the third direction.

[0112] According to aspect 5 which is a specific example of any one of aspects 1 to 4, the width of the second supply flow path in a third direction intersecting both the first direction and the second direction is smaller than the width of the first pressure chamber in the third direction.

[0113] According to aspect 6 which is a specific example of any one of aspects 1 to 5, the width of the second supply flow path in a third direction intersecting both the first direction and the second direction is smaller than the width of the first communication flow path in the third direction.

[0114] According to mode 7, which is a specific example of any one of modes 1 to 6, there is also a nozzle substrate, on which a nozzle for ejecting liquid is provided, and a second connecting flow channel is provided on the connecting plate, the second connecting flow channel extends in the second direction and is connected to the first pressure chamber and the nozzle.

[0115] According to aspect 8 which is a specific example of aspect 7, the width of the second supply flow path in a third direction intersecting both the first direction and the second direction is smaller than the width of the second communication flow path in the third direction.

[0116] According to aspect 9 which is a specific example of any one of aspects 1 to 8, the width of the second supply flow channel in the first direction is larger than the width of the first supply flow channel in the first direction.

[0117] According to aspect 10 which is a specific example of any one of aspects 1 to 9, the width of the second supply flow path in the first direction is smaller than the width of the first pressure chamber in the first direction.

[0118] According to mode 11, which is a specific example of any one of modes 1 to 10, the wall on one side of the second direction of the second supply channel is composed of the wall surface of the pressure chamber substrate, and the wall on the other side in the direction opposite to the second direction is composed of the wall surface of the connecting plate.

[0119] According to aspect 12, which is a specific example of any one of aspects 1 to 11, a reservoir is further provided, the reservoir extending in the first direction, communicating with the first communication flow path, and storing the liquid.

[0120] According to mode 13, which is a specific example of any one of modes 1 to 12, it further comprises: a second pressure chamber, which extends in the first direction and applies pressure to the liquid; a first energy generating element, which generates energy for applying pressure to the liquid in the first pressure chamber by being applied with a driving voltage; and a second energy generating element, which generates energy for applying pressure to the liquid in the second pressure chamber by being applied with a driving voltage.

[0121] A liquid ejection device according to aspect 14 as one aspect of the present disclosure includes: the liquid ejection head according to any one of aspects 1 to 13; and a control unit that controls the ejection operation of the liquid ejection head.

[0122] Explanation of symbols

[0123] 21…control unit; 24, 240…liquid ejection head; 31…nozzle substrate; 33…connecting plate; 34…pressure chamber substrate; 41…piezoelectric unit; 100…liquid ejection device; C, Ca1, Ca2…pressure chamber; N…nozzle; Ra1, Rd1…first connecting flow channel; Ra2, Rd2…second connecting flow channel; Ra3…third connecting flow channel; Ra4…fourth connecting flow channel; Rb1, Re1…first supply flow channel; Rb2, Re2…second supply flow channel; Rc1…first discharge flow channel; Rc2…second discharge flow channel.

Claims

1. A liquid ejection head, characterized in that: It has Pressure chamber base plate and connecting plate, The pressure chamber substrate comprises: a first pressure chamber extending in a first direction and applying pressure to the liquid; The first supply channel, The connecting plate includes: a first communication flow channel extending in a second direction intersecting the first direction and communicating with the first supply flow channel; a second supply channel communicating with the first supply channel and the first pressure chamber; The width of the second supply channel in the second direction is smaller than the width of the first supply channel in the second direction. The width of the second supply flow channel in the second direction is smaller than the width of the first pressure chamber in the second direction. The thickness of the communication plate in the second direction is greater than the thickness of the pressure chamber base plate in the second direction.

2. The liquid ejection head according to claim 1, wherein The width of the second supply flow path in a third direction intersecting both the first direction and the second direction is smaller than the width of the first supply flow path in the third direction.

3. The liquid ejection head according to claim 1, wherein The width of the second supply flow path in a third direction intersecting both the first direction and the second direction is smaller than the width of the first pressure chamber in the third direction.

4. The liquid ejection head according to claim 1, wherein The width of the second supply flow path in a third direction intersecting both the first direction and the second direction is smaller than the width of the first communication flow path in the third direction.

5. The liquid ejection head according to claim 1, wherein It also includes a nozzle substrate on which a nozzle for ejecting liquid is provided. A second communication flow channel is provided on the communication plate. The second communication flow channel extends in the second direction and is communicated with the first pressure chamber and the nozzle.

6. The liquid ejection head according to claim 5, wherein The width of the second supply flow path in a third direction intersecting both the first direction and the second direction is smaller than the width of the second communication flow path in the third direction.

7. The liquid ejection head according to claim 1, wherein A width of the second supply channel in the first direction is greater than a width of the first supply channel in the first direction.

8. The liquid ejection head according to claim 1, wherein A width of the second supply flow channel in the first direction is smaller than a width of the first pressure chamber in the first direction.

9. The liquid ejection head according to claim 1, wherein The wall of the second supply flow path on one side in the second direction is formed by the wall surface of the pressure chamber base plate, and the wall on the other side in the direction opposite to the second direction is formed by the wall surface of the communication plate.

10. The liquid ejection head according to claim 1, wherein A liquid reservoir is further provided, the liquid reservoir extending in the first direction, communicating with the first communication flow path, and storing liquid.

11. The liquid ejection head according to claim 1, wherein Also features: a second pressure chamber extending in the first direction and applying pressure to the liquid; a first energy generating element that generates energy for applying pressure to the liquid in the first pressure chamber by being applied with a driving voltage; The second energy generating element generates energy for applying pressure to the liquid in the second pressure chamber by being applied with a driving voltage.

12. A liquid ejection device comprising: The liquid ejection head according to any one of claims 1 to 11; A control unit controls the ejection operation of the liquid ejection head.

Images