Interlocking circuit, laser and logic control method of interlocking circuit

Abstract

The present application discloses an interlocking circuit, a laser, and a logic control method of an interlocking circuit. When the interlocking signal received is normal, the interlocking control circuit outputs a first power signal to the contactor circuit, so that the contactor circuit is turned on; after the contactor circuit is powered on, it outputs a second power signal to the interlocking control circuit, so that the interlocking control circuit is turned on; when the interlocking signal received is abnormal, the interlocking control circuit remains turned on, and stops outputting the first power signal to the contactor circuit, so that the contactor circuit is turned off. In the technical solution of the present application, after the interlocking signal changes from normal to abnormal, the interlocking control circuit remains turned on, and the contactor circuit is turned off, forming an interlock. It is ensured that the device will not be repeatedly started and shut down due to repeated generation of the interlocking signal, thereby avoiding interlocking failure.

Description

Technical Field

[0001] The present application belongs to the field of laser technology, and in particular relates to an interlocking circuit, a laser, and a logic control method of the interlocking circuit. Background Art

[0002] Excimer laser is a pulsed gas laser for deep ultraviolet feature applications and is an excellent laser light source for microelectronic lithography systems. Usually, an interlock circuit needs to be set in the laser to avoid damage to the equipment when the laser fails.

[0003] The existing interlocking circuit usually cuts off the related working equipment only after the interlocking signal is generated. The repeated interlocking signal can easily cause the equipment to start and stop for a long time, causing harm. At the same time, if there is a large current, there is a possibility of relay adhesion, resulting in interlocking failure, thus causing danger. Summary of the invention

[0004] In view of this, the embodiments of the present application provide an interlocking circuit, a laser, and a logic control method of the interlocking circuit to solve the problem of interlocking failure in the interlocking circuit in the prior art.

[0005] A first aspect of an embodiment of the present application provides an interlocking circuit, the interlocking circuit comprising a contactor circuit and an interlocking control circuit; wherein,

[0006] The interlock control circuit is used to output a first power signal to the contactor circuit when the received interlock signal is normal, so that the contactor circuit is turned on;

[0007] The contactor circuit is used to output a second power supply signal to the interlock control circuit after power-on, so that the interlock control circuit is turned on;

[0008] The interlock control circuit is also used to keep conducting when the received interlock signal is abnormal, and stop outputting the first power supply signal to the contactor circuit, so that the contactor circuit is turned off.

[0009] Preferably, the interlock control circuit includes a first relay, the first relay includes a first coil, a first common contact, a second common contact, a first normally open contact, a second normally open contact, a first normally closed contact and a second normally closed contact; a first end of the first coil is grounded, and a second end of the first coil is connected to the second common contact;

[0010] When the first coil is not attracted, the first common contact is connected to the first normally closed contact, and the first common contact also receives an interlock signal; the second common contact is connected to the second normally closed contact, and the second common contact is also connected to the contactor circuit;

[0011] When the first coil is attracted, the first common contact is connected to the first normally open contact, and the second common contact is connected to the second normally open contact.

[0012] Preferably, the interlock control circuit is further configured to remain conductive when the received interlock signal changes from abnormal to normal.

[0013] Preferably, the interlock circuit also includes a reset circuit, which is used to send a reset signal when triggered. The interlock control circuit is disconnected when receiving the reset signal, and outputs a first power signal to the contactor circuit, so that the contactor circuit is turned on.

[0014] Preferably, the reset circuit comprises a reset switch, a first end of the reset switch is connected to the interlock control circuit, and a second end of the reset switch is connected to the contactor circuit.

[0015] Preferably, the reset switch is a normally open reset switch.

[0016] Preferably, the contactor circuit comprises a second coil, a third normally closed contact, a fourth normally closed contact, a third normally open contact, a fourth normally open contact, a fifth normally open contact and a sixth normally open contact; wherein

[0017] The third normally closed contact is connected to the power supply, and the fourth normally closed contact is grounded; the third normally open contact, the fourth normally open contact, the fifth normally open contact and the sixth normally open contact are all connected to the interlock control circuit, the sixth normally open contact is also connected to the first end of the second coil, and the second end of the second coil is grounded.

[0018] Preferably, the interlock circuit also includes an interlock indication circuit. When the interlock control circuit receives an abnormal interlock signal, it stops outputting the first power signal to the contactor circuit, so that the contactor circuit is turned off and the interlock indication circuit sends an alarm signal.

[0019] Preferably, the interlock indication circuit comprises an indicator light, a first end of the indicator light is connected to the power supply, and a second end of the indicator light is connected to the third normally closed contact.

[0020] A second aspect of the embodiments of the present application provides a laser, wherein the laser includes the interlocking circuit as described above.

[0021] A third aspect of the embodiments of the present application provides a logic control method of an interlocking circuit, including:

[0022] S1: When the interlocking signal received is normal, the interlocking control circuit outputs a first power signal to the contactor circuit, so that the contactor circuit is turned on;

[0023] S2: after the contactor circuit is powered on, it outputs a second power supply signal to the interlock control circuit, so that the interlock control circuit is turned on;

[0024] S3: When the received interlock signal is abnormal, the interlock control circuit remains turned on and stops outputting the first power signal to the contactor circuit, so that the contactor circuit is turned off.

[0025] Preferably, the logic control method further includes:

[0026] S4: When the interlock signal changes from abnormal to normal, the interlock control circuit remains turned on;

[0027] S5: The reset circuit sends a reset signal to the interlock control circuit to turn off the interlock control circuit;

[0028] S6: The interlock control circuit outputs a first power signal to the contactor circuit, so that the contactor circuit is turned on and the circuit returns to an initial state.

[0029] The beneficial technical effect of the present application is that the technical solution of the present application includes a contactor circuit and an interlocking control circuit, forming an interlocking circuit. Among them, when the interlocking signal received is normal, the interlocking control circuit outputs a first power signal to the contactor circuit, so that the contactor circuit is turned on; after the contactor circuit is powered on, it outputs a second power signal to the interlocking control circuit, so that the interlocking control circuit is turned on; when the interlocking signal received is abnormal, the interlocking control circuit remains turned on, and stops outputting the first power signal to the contactor circuit, so that the contactor circuit is turned off. In the technical solution of the present application, after the interlocking signal changes from normal to abnormal, the interlocking control circuit remains turned on, and the contactor circuit is turned off, forming an interlock. It ensures that the device will not repeatedly start and shut down the device due to repeated generation of the interlocking signal, thereby avoiding interlocking failure. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0031] Figure 1 It is a functional module diagram of the first embodiment of the interlocking circuit provided in the embodiment of the present application;

[0032] Figure 2 is a functional module diagram of a second embodiment of an interlocking circuit provided in an embodiment of the present application;

[0033] Figure 3It is a circuit structure diagram of an interlocking circuit embodiment provided in an embodiment of the present application.

[0034] Description of Figure Numbers:

[0035] Label Name Label Name

[0036] 100 interlock control circuit KT1 first coil

[0037] 200 contactor circuit KM1 second coil

[0038] 300 reset circuit LED indicator

[0039] 400 interlock indication circuit RESET reset switch DETAILED DESCRIPTION

[0040] In order to enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only one embodiment of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work should fall within the scope of protection of the present application.

[0041] The term "comprising" and any variations thereof in the specification and claims of the present application and the above-mentioned drawings are intended to cover non-exclusive inclusions. For example, a process, method or system, product or device comprising a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices. In addition, the terms "first", "second" and "third" etc. are used to distinguish different objects, rather than to describe a specific order.

[0042] This embodiment provides an interlocking circuit, which is applied to an excimer laser. The excimer laser is a pulsed gas laser for deep ultraviolet characteristic applications and is an excellent laser light source for microelectronic lithography systems.

[0043] Reference Figure 1 The interlock circuit includes a contactor circuit 200 and an interlock control circuit 100. The interlock control circuit 100 is used to output a first power signal to the contactor circuit 200 when the received interlock signal is normal, so that the contactor circuit 200 is turned on.

[0044] The contactor circuit 200 is used to output a second power signal to the interlock control circuit 100 after power-on, so that the interlock control circuit 100 is turned on. It should be noted that the contactor circuit 200 includes a contactor, and the contactor circuit 200 can control the power supply to supply power to the interlock control circuit 100.

[0045] The interlock control circuit 100 is also used to remain on when the received interlock signal is abnormal, and stop outputting the first power signal to the contactor circuit 200, so that the contactor circuit 200 is turned off. In this embodiment, the interlock control circuit 100 includes a relay, which can remain on when the interlock signal is abnormal, so that the contactor circuit 200 will not cause repeated power supply and discharge of the device due to repeated interlock signals.

[0046] The technical solution of the present application sets up the interlock circuit including the contactor circuit 200 and the interlock control circuit 100; wherein, when the interlock signal received is normal, the interlock control circuit 100 outputs a first power signal to the contactor circuit 200, so that the contactor circuit 200 is turned on; after the contactor circuit 200 is powered on, it outputs a second power signal to the interlock control circuit 100, so that the interlock control circuit 100 is turned on; when the interlock signal received is abnormal, the interlock control circuit 100 remains turned on, and stops outputting the first power signal to the contactor circuit 200, so that the contactor circuit 200 is turned off. In the technical solution of the present application, after the interlock signal changes from normal to abnormal, the interlock control circuit 100 remains turned on, and the contactor circuit 200 is turned off, forming an interlock. It is ensured that the device will not be repeatedly started and closed due to repeated generation of the interlock signal, thereby avoiding interlock failure.

[0047] Reference Figure 3 In one embodiment, the interlock control circuit 100 includes a first relay. In the interlock control circuit 100, 1, 2, 3, 4, 5 and 6 respectively represent a first common contact, a first normally open contact, a first normally closed contact, a second common contact, a second normally open contact and a second normally closed contact.

[0048] The first relay includes a first coil KT1, a first common contact 1, a second common contact 4, a first normally open contact 2, a second normally open contact 5, a first normally closed contact 3 and a second normally closed contact 6; the first end of the first coil KT1 is grounded, and the second end of the first coil KT1 is connected to the second common contact 4.

[0049] When the first coil KT1 is not energized, the first common contact 1 is connected to the first normally closed contact 3 , and the first common contact 1 also receives an interlock signal; the second common contact 4 is connected to the second normally closed contact 6 , and the second common contact 4 is also connected to the contactor circuit 200 .

[0050] When the first coil KT1 is energized, the first common contact 1 is connected to the first normally open contact 2, and the second common contact 4 is connected to the second normally open contact 5; the first end of the first coil KT1 is grounded, and the second end of the first coil KT1 is connected to the second common contact 4.

[0051] It is worth noting that when the first coil KT1 is powered on, the second common contact 4 is connected to the second normally open contact 5 , and the power supply supplies power to the first coil KT1 through the second common contact 4 and the second normally open contact 5 .

[0052] Reference Figure 2 and Figure 3 In one embodiment, the interlock circuit also includes a reset circuit 300, and the reset circuit 300 is used to send a reset signal when a trigger is received. The interlock control circuit 100 is disconnected when receiving the reset signal, and outputs a first power signal to the contactor circuit 200, so that the contactor circuit 200 is turned on.

[0053] It is understandable that by setting the reset circuit 300, the normal power supply state of the device can be restored only after the reset switch is pressed manually, thereby ensuring the safety of personnel and the safety of the device.

[0054] In one embodiment, the reset circuit 300 includes a reset switch RESET, a first end of the reset switch RESET is connected to the interlock control circuit 100, and a second end of the reset switch RESET is connected to the contactor circuit 200. In this embodiment, the reset switch RESET is a normally open reset switch.

[0055] Reference Figure 3 In one embodiment, the contactor circuit 200 includes a first contactor. a, b, c, d, e and f in the contactor circuit 200 are all power supply contacts, NC1 and NC2 are the third normally closed contact and the fourth normally closed contact, NO1, NO2, NO3 and NO4 are the third normally open contact, the fourth normally open contact, the fifth normally open contact and the sixth normally open contact respectively. The first contactor includes a second coil KM1, a third normally closed contact, a fourth normally closed contact, a third normally open contact, a fourth normally open contact, a fifth normally open contact and a sixth normally open contact; wherein

[0056] The third normally closed contact NC1 is connected to the power supply POWER, and the fourth normally closed contact NC2 is grounded; the third normally open contact NO1, the fourth normally open contact NO2, the fifth normally open contact NO3 and the sixth normally open contact NO4 are all connected to the interlocking control circuit 100, and the sixth normally open contact NO4 is also connected to the first end of the second coil KM1, and the second end of the second coil KM1 is grounded.

[0057] It is worth noting that when the second coil KM1 is powered on, the third normally closed contact NC1 and the fourth normally closed contact NC2 are disconnected, and the third normally open contact NO1 and the fourth normally open contact NO2 are connected, and the fifth normally open contact NO3 and the sixth normally open contact NO4 are connected; when the second coil KM1 is powered off, the third normally closed contact NC1 and the fourth normally closed contact NC2 are connected, and the third normally open contact NO1 and the fourth normally open contact NO2 are disconnected, and the fifth normally open contact NO3 and the sixth normally open contact NO4 are disconnected.

[0058] Reference Figure 2 and Figure 3 In one embodiment, the interlock circuit also includes an interlock indication circuit 400. When the interlock control circuit 100 receives an abnormal interlock signal INTERLOCK, it stops outputting the first power signal to the contactor circuit 200, so that the contactor circuit 200 is turned off, and the interlock indication circuit 400 sends an alarm signal.

[0059] In one embodiment, the interlock indication circuit 400 includes an indicator light LED, a first end of the indicator light LED is connected to a power supply POWER, and a second end of the indicator light LED is connected to the third normally closed contact NC1.

[0060] It should be noted that the interlock indication circuit 400 can prompt relevant personnel to confirm and eliminate the fault in a timely manner. In this embodiment, an indicator light is used to emit a light signal to give an alarm.

[0061] In summary, now combined with Figure 3 To further elaborate on the technical solution of this application, the working process of the interlocking circuit is as follows:

[0062] 1. Before powering on, ensure that the INTERLOCK signal is in a normally closed state;

[0063] 2. After power-on, the power supply POWER closes the loop normally through INTERLOCK, and the common contact 1 of KT1 connects the KM1 coil to the ground via the normally closed contact 3, so that KM1 is attracted, the normally open contact of KM1 is closed, and the power supply contact is closed;

[0064] 3. After KM1 is energized: KT1 coil first obtains power from the power supply through the third and fourth normally open contacts NO1 / NO2, which causes KT1 to be energized, and contacts 4 and 5 of KT1 are energized, so that KT1 can obtain power from the power supply through contacts 4, 5 and NO1 / NO2;

[0065] 4. The fifth and sixth normally open contacts NO3\NO4 of KM1 (closed at this time) are connected to the KM1 coil and ground; KM1 is still in the attracted state; the power supply contacts of KM1 are closed;

[0066] 5. When the INTERLOCK signal is abnormal, the KM1 coil power supply circuit is disconnected; the KM1 coil power supply is disconnected, causing the KM1 power supply contact to be disconnected; at the same time, the LEDs connected to the third and fourth normally closed contacts NC1 / NC2 are energized, causing the interlock indicator to light up;

[0067] 6. At this time, when the INTERLOCK signal returns to normal from the abnormal state, since KT1 is in the energized state, the KM1 coil cannot be powered through the KT1 normally closed contacts 1 and 3 (disconnected at this time), and the KM1 power supply coil remains in the disconnected state;

[0068] 7. When the RESET button is pressed manually at this time, the KT1 coil loses power and the KT1 normally closed contact returns to the closed state; if the INTERLOCK signal is in the normal closed state at this time, the KM1 coil power supply circuit can be restored, and the KM1 power supply contact is closed; the LED indicator loses power; and the initial startup state is restored.

[0069] The main purpose of this application is to ensure that the power supply relay will not cause repeated power supply and discharge of the equipment due to repeated INTERLOCK signals through some logical control; as long as the interlock signal is generated, regardless of whether the INTERLOCK signal returns to normal, the contactor KM1 will be de-energized and unable to start for a long time; only when the reset button is pressed manually can the normal power supply state of the equipment be restored, ensuring the safety of personnel while also ensuring the safety of equipment.

[0070] The second aspect of the embodiment of the present application provides a laser, which includes the interlocking circuit as described above. The laser uses some logic control to ensure that the power supply relay will not cause repeated power supply and discharge of the device due to repeated interlocking signals INTERLOCK; as long as the interlocking signal INTERLOCK is generated, regardless of whether the interlocking signal INTERLOCK is restored to normal; the power supply contactor will be in a state of power failure and inability to start for a long time; only after the reset button is manually pressed can the normal power supply state of the device be restored, ensuring the safety of personnel while also ensuring the safety of the equipment.

[0071] A third aspect of the embodiments of the present application provides a logic control method of an interlocking circuit, including:

[0072] S1: When the interlocking signal received is normal, the interlocking control circuit outputs a first power signal to the contactor circuit, so that the contactor circuit is turned on;

[0073] S2: after being powered on, the contactor circuit outputs a second power signal to the interlock control circuit, so that the interlock control circuit is turned on;

[0074] S3: When the received interlock signal is abnormal, the interlock control circuit remains turned on and stops outputting the first power signal to the contactor circuit, so that the contactor circuit is turned off.

[0075] S4: When the interlock signal changes from abnormal to normal, the interlock control circuit remains turned on;

[0076] S5: The reset circuit sends a reset signal to the interlock control circuit to turn off the interlock control circuit;

[0077] S6: The interlock control circuit outputs a first power signal to the contactor circuit, so that the contactor circuit is turned on and the circuit returns to an initial state.

[0078] In the embodiments provided in the present application, it should be understood that the disclosed interlock circuit can be implemented in other ways. For example, the interlock circuit embodiments described above are only schematic, for example, the division of the units is only a logical function division, and there may be other division methods in actual implementation, for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed.

[0079] The embodiments described above are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. Such modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. An interlock circuit, characterized in that: The interlock circuit includes a contactor circuit and an interlock control circuit; wherein, The interlock control circuit is used to output a first power signal to the contactor circuit when the received interlock signal is normal, so that the contactor circuit is turned on; The contactor circuit is used to output a second power supply signal to the interlock control circuit after power-on, so that the interlock control circuit is turned on; The interlock control circuit is also used to keep conducting when the received interlock signal is abnormal, and stop outputting the first power supply signal to the contactor circuit, so that the contactor circuit is turned off; wherein: The interlock control circuit includes a first relay, the first relay includes a first coil, a first common contact, a second common contact, a first normally open contact, a second normally open contact, a first normally closed contact and a second normally closed contact; a first end of the first coil is grounded, and a second end of the first coil is connected to the second common contact; When the first coil is not attracted, the first common contact is connected to the first normally closed contact, and the first common contact also receives an interlock signal; the second common contact is connected to the second normally closed contact, and the second common contact is also connected to the contactor circuit; When the first coil is attracted, the first common contact is connected to the first normally open contact, and the second common contact is connected to the second normally open contact; The contactor circuit includes a second coil, a third normally closed contact, a fourth normally closed contact, a third normally open contact, a fourth normally open contact, a fifth normally open contact and a sixth normally open contact; wherein: The third normally closed contact is connected to the power supply, and the fourth normally closed contact is grounded; the third normally open contact, the fourth normally open contact, the fifth normally open contact and the sixth normally open contact are all connected to the interlock control circuit, the sixth normally open contact is also connected to the first end of the second coil, and the second end of the second coil is grounded.

2. The interlock circuit according to claim 1, characterized in that: The interlock control circuit is also used to keep conducting when the received interlock signal changes from abnormal to normal.

3. The interlock circuit according to claim 2, characterized in that: The interlock circuit also includes a reset circuit, which is used to send a reset signal when it is triggered. The interlock control circuit is disconnected when receiving the reset signal, and outputs a first power supply signal to the contactor circuit, so that the contactor circuit is turned on.

4. The interlock circuit according to claim 3, characterized in that: The reset circuit includes a reset switch, a first end of the reset switch is connected to the interlock control circuit, and a second end of the reset switch is connected to the contactor circuit.

5. The interlock circuit according to claim 4, characterized in that: The reset switch is a normally open reset switch.

6. The interlock circuit according to claim 5, characterized in that: The interlock circuit also includes an interlock indication circuit. When the interlock control circuit receives an abnormal interlock signal, it stops outputting the first power signal to the contactor circuit, so that the contactor circuit is turned off, and the interlock indication circuit sends an alarm signal.

7. The interlock circuit according to claim 6, characterized in that: The interlock indication circuit comprises an indicator light, a first end of the indicator light is connected to a power supply, and a second end of the indicator light is connected to the third normally closed contact.

8. A laser, characterized in that: The laser comprises an interlock circuit as claimed in any one of claims 1 to 7.

9. A logic control method of an interlock circuit, using the interlock circuit according to claim 1, characterized in that: The method includes: S1: When the interlocking signal received is normal, the interlocking control circuit outputs a first power signal to the contactor circuit, so that the contactor circuit is turned on; S2: after the contactor circuit is powered on, it outputs a second power supply signal to the interlock control circuit, so that the interlock control circuit is turned on; S3: When the received interlock signal is abnormal, the interlock control circuit remains turned on and stops outputting the first power signal to the contactor circuit, so that the contactor circuit is turned off.

10. The logic control method of the interlock circuit according to claim 9, characterized in that: The logic control method further includes: S4: When the interlock signal changes from abnormal to normal, the interlock control circuit remains turned on; S5: The reset circuit sends a reset signal to the interlock control circuit to turn off the interlock control circuit; S6: The interlock control circuit outputs a first power signal to the contactor circuit, so that the contactor circuit is turned on and the circuit returns to an initial state.

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