Tool holding fixture, cutting device and method of mounting a cutting tool

Abstract

Provided are a tool holding jig, a cutting device, and a cutting tool mounting method that can reduce the risk of damage to a cutting tool of a washer type. The tool holding jig holds a cutting tool of a washer type via a ring-shaped pressing flange, and has a ring-shaped flange holding portion that suction-holds a first ring surface of the pressing flange, and a ring-shaped non-contact suction portion that is disposed at an outer peripheral portion of the flange holding portion, generates negative pressure by ejecting fluid toward an outer peripheral portion of the pressing flange held by the flange holding portion, and pulls the cutting tool toward the pressing flange. The cutting tool pulled toward the pressing flange by the non-contact suction portion is held to the pressing flange by suction force acting from the flange holding portion via a plurality of through holes provided in the pressing flange in a manner that passes from a second ring surface to the first ring surface, the second ring surface being located on the opposite side of the pressing flange from the first ring surface and in contact with one surface of the cutting tool.

Description

TECHNICAL FIELD

[0001] The present application relates to a tool holding jig that holds a ring-type cutting tool via a pressing flange, a cutting device having the tool holding jig, and a cutting tool mounting method that mounts a ring-type cutting tool on a receiving flange using the tool holding jig. BACKGROUND

[0002] A cutting device for cutting various plate-like workpieces such as semiconductor wafers is known. The cutting device has a spindle, and a cutting tool is attached to one end portion of the spindle. The cutting tool is a consumable item, and the used cutting tool is normally replaced by an operator through manual work.

[0003] The replacement work of the cutting tool requires skill. Also, when a different kind of cutting tool is erroneously attached to the spindle, the workpiece can be damaged. Therefore, the replacement work of the cutting tool is important in the cutting of the workpiece, and is an operation that requires attention.

[0004] To eliminate human error in the replacement work of the cutting tool, a tool changer that automatically replaces the used cutting tool with a new cutting tool instead of the manual work of the operator has been developed (for example, refer to Patent Literature 1).

[0005] The tool changer takes as a replacement object a hub-type cutting tool in which a ring-shaped base (i.e., a hub) formed of metal such as aluminum and a cutting edge provided on the outer peripheral portion of the base are integrated.

[0006] The tool changer detaches the used hub-type cutting tool from the spindle while holding the hub, and also attaches the new hub-type cutting tool to the spindle while holding the hub.

[0007] However, as the cutting tool, not only the hub-type cutting tool but also a ring-type cutting tool that does not have a base (i.e., is composed only of a ring-shaped cutting edge) is often used. The ring-type cutting tool is fixed to the spindle by being sandwiched by a ring-shaped receiving flange fixed to the spindle and a ring-shaped pressing flange attached to the receiving flange.

[0008] Since the hub that is the holding object is not present in the ring-type cutting tool, it is difficult to mechanically hold the ring-type cutting tool. Therefore, a tool changer that holds the ring-type cutting tool by suction via the ring-shaped pressing flange has been proposed (for example, refer to Patent Literature 2).

[0009] The pressing flange includes a flange surface that comes into contact with the ring-type cutting tool and a ring surface on the side opposite to the flange surface. Also, a plurality of through holes that pass through from the flange surface to the ring surface are formed in the pressing flange between the inner diameter and the outer diameter.

[0010] If a negative pressure is applied to the flange surface from the tool replacement jig via the plurality of through holes in a state where the suction portion of the tool replacement jig is in contact with the annular surface of the press flange, the grommet-type cutting tool can be suction-held by the flange surface.

[0011] Patent Document 1: Japanese Patent Application Publication No. 2007-98536

[0012] Patent Document 2: Japanese Patent Application Publication No. 2016-64450

[0013] However, in order to suction-hold the grommet-type cutting tool, the suction portion of the tool replacement jig is pressed against the annular surface of the press flange in a state where the grommet-type cutting tool is arranged on the flange surface side. At this time, the grommet-type cutting tool can be damaged by being pressed. SUMMARY

[0014] The present application was achieved in view of this problem, and an object thereof is to provide a tool-holding jig capable of reducing the risk of damage to a grommet-type cutting tool when the grommet-type cutting tool is held via a press flange.

[0015] According to one embodiment of the present application, a tool-holding jig holds a grommet-type cutting tool via an annular press flange that is installed to a front end portion of a main shaft so as to sandwich the cutting tool with a receiving flange fixed to the front end portion, the tool-holding jig including: an annular flange-holding portion that suction-holds a first annular surface of the press flange; and an annular non-contact suction portion that is arranged at an outer peripheral portion of the flange-holding portion, generates a negative pressure by ejecting a fluid toward an outer peripheral portion of the press flange held by the flange-holding portion, and thereby draws the cutting tool toward the press flange, the cutting tool drawn toward the press flange by the non-contact suction portion being held to the press flange by a suction force applied from the flange-holding portion via a plurality of through holes provided in the press flange so as to pass from a second annular surface to the first annular surface, the second annular surface being located on a side of the press flange opposite the first annular surface and being in contact with one surface of the cutting tool.

[0016] It is preferable that the non-contact suction portion eject the fluid in a manner that generates a swirling flow of the fluid around the outer peripheral portion of the press flange.

[0017] Further, it is preferable that the non-contact suction portion include an annular protrusion and a plurality of openings provided at an outer peripheral side surface of the annular protrusion, each of the plurality of openings being connected to a flow path in a manner that ejects the fluid at a prescribed angle inclined with respect to a tangent direction of the outer peripheral side surface.

[0018] Further, preferably, the flange holding portion includes a ring-shaped pad portion in contact with the first annular surface of the pressing flange.

[0019] Further, preferably, the flange holding portion is connected to a first flow path that applies negative pressure to the flange holding portion via a first on-off valve, and the non-contact suction portion is connected to a second flow path that supplies fluid to the non-contact suction portion via a second on-off valve.

[0020] Further, preferably, the tool holding jig further includes a pressure measurer that measures the negative pressure generated in the first flow path, and a suction determiner that determines whether the pressing flange is suctioned by the flange holding portion by comparing the negative pressure of the first flow path measured by the pressure measurer with a first pressure, and determines whether the cutting tool is suctioned by the second annular surface of the pressing flange by comparing the negative pressure of the first flow path measured by the pressure measurer with a second pressure that is larger than the first pressure.

[0021] Further, preferably, the flange holding portion has a positioning fitting portion that fits with a cylindrical protrusion disposed in a manner that penetrates an opening of the annular pressing flange.

[0022] Further, preferably, the tool holding jig further includes a camera unit that photographs a mark formed on the one surface of the cutting tool and including information related to the type of the cutting tool, and a mark reader that reads the mark photographed by the camera unit.

[0023] Further, preferably, the flange holding portion is connected to a third flow path via a third on-off valve, and the cutting tool is separated from the second annular surface of the pressing flange by ejecting fluid from the third flow path toward the cutting tool suctioned and held by the flange holding portion on the second annular surface of the pressing flange.

[0024] According to another aspect of the present application, there is provided a cutting device having a cutting unit in which a cutting tool is mounted to a receiving flange fixed to a front end portion of a main shaft, the cutting device including a tool storage plate that stores the cutting tool, a replacement device that replaces the cutting tool mounted to the receiving flange, and a moving unit that moves the replacement device between a replacement position at which the cutting tool is replaced and a retreat position, the replacement device including the tool holding jig described above, a nut holding portion that holds a pressing nut fastened to the receiving flange, and a nut turning portion that turns the pressing nut.

[0025] Also, according to another aspect of the present application, there is provided a method of mounting a cutting tool using a tool holding jig to mount a ring-shaped cutting tool on a receiving flange fixed to a front end portion of a main shaft, the tool holding jig having a ring-shaped flange holding portion that suction holds a first ring surface of a pressing flange mounted to the front end portion, and a ring-shaped non-contact suction portion disposed at an outer peripheral portion of the flange holding portion that generates a negative pressure by ejecting fluid toward an outer peripheral portion of the pressing flange held by the flange holding portion to draw the cutting tool toward the pressing flange, the pressing flange having a plurality of through holes provided in a manner that passes from a second ring surface to the first ring surface, the second ring surface being located on an opposite side of the pressing flange from the first ring surface and contacting one surface of the cutting tool, the method of mounting the cutting tool having the steps of: a pressing flange holding step of suction holding, by the flange holding portion, the first ring surface of the pressing flange whose second ring surface is supported by a tool storage plate; a pressing flange approaching step of bringing the second ring surface of the suction held pressing flange to approach the cutting tool placed on the tool storage plate so that the second ring surface is within a prescribed length from the cutting tool; a cutting tool drawing step of drawing the cutting tool toward the second ring surface by generating a negative pressure from the non-contact suction portion after the pressing flange approaching step; a cutting tool holding step of holding the cutting tool approached to the second ring surface in the cutting tool drawing step on the second ring surface by suction force from the plurality of through holes; and a mounting step of mounting the cutting tool and the pressing flange on the receiving flange fixed to the main shaft in a manner that the cutting tool is clamped by the receiving flange and the pressing flange in a state where the cutting tool is held on the second ring surface of the pressing flange by the suction force.

[0026] The tool holding jig according to one embodiment of the present application has a ring-shaped flange holding portion that suction holds a first ring surface of a pressing flange. In addition, the tool holding jig has a ring-shaped non-contact suction portion disposed at an outer peripheral portion of the flange holding portion that generates a negative pressure by ejecting fluid toward an outer peripheral portion of the pressing flange held by the flange holding portion to draw a ring-shaped cutting tool toward the pressing flange.

[0027] The plurality of through holes are provided in the pressing flange in a manner that passes from a second ring surface located on an opposite side of the pressing flange from the first ring surface and contacting one surface of the cutting tool to the first ring surface. After the first ring surface of the pressing flange is suction held by the flange holding portion, the cutting tool is drawn toward the pressing flange by the negative pressure generated by ejecting fluid from the non-contact suction portion.

[0028] Further, the cutting tool is suction-held to the pressing flange via the plurality of through holes on the pressing flange. Thus, since the cutting tool can be suction-held without the tool exchange jig pressing the cutting tool of the gasket type via the pressing flange, it is possible to reduce the risk of damage to the cutting tool of the gasket type. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 is a perspective view of a cutting device of the first embodiment.

[0030] Figure 2 is an exploded perspective view of a cutting unit.

[0031] Figure 3 is a partial cross-sectional side view of the cutting unit.

[0032] Figure 4 is a perspective view of the tool exchange unit at standby.

[0033] Figure 5 is a perspective view of the tool exchange unit at exchange work.

[0034] Figure 6 is a side view of the exchange device.

[0035] Figure 7 is an enlarged perspective view of a tool holding jig.

[0036] Figure 8 is a partial cross-sectional side view of the tool holding jig or the like.

[0037] Figure 9 is a perspective view of a tool storage plate.

[0038] Figure 10 is a view showing a cutting tool pulling-in step.

[0039] Figure 11 is a view showing a cutting tool holding step.

[0040] Figure 12 is a view showing a cutting tool removal step.

[0041] Figure 13 is a flowchart of a cutting tool mounting method.

[0042] Figure 14 is a partial cross-sectional side view showing a modification of the cutting unit.

[0043] Figure 15 is a perspective view of the front side of a tool holding jig.

[0044] Figure 16 is a perspective view of the back side of the tool holding jig.

[0045] Figure 17 Fig. 2 is a partial cross-sectional side view of a tool holding jig or the like according to the second embodiment.

[0046] Figure 18 Fig. 3 is a view showing a state in which the cutting tool is detached.

[0047] Figure 19 Fig. 4 is a perspective view of a cutting device according to the third embodiment.

[0048] Explanation of Reference Numerals

[0049] 2: cutting device; 4: base; 4a: opening; 4b: opening; 6: elevator; 6a: lifting table; 8: cassette; 8a: support plate; 10: cleaning unit; 11: workpiece; 12: rotary table; 13: belt; 14: guide rail; 15: frame; 16: table cover; 17: workpiece unit; 18: dust and drip prevention cover; 20: chuck table; 20a: clamping unit; 22: dressing table; 24: cover member; 26: cutting unit; 28: spindle housing; 30: spindle; 30a: threaded hole; 32: receiving flange; 32a: first boss portion; 32b: flange surface; 32c: recess; 32d: second boss portion; 32e: third boss portion; 32f: support portion; 32g: communication passage; 34: cutting tool; 34a: mark; 34b: inner peripheral portion; 36: pressing flange; 36a: protruding portion; 36a1: outer peripheral side surface; 36a2: surface; 36b: through opening; 36c: flange surface; 36d: annular surface; 36e: through hole; 36f: outer peripheral portion; 38: washer; 40: bolt; 42: pressing nut; 42a: internal thread; 42b: annular groove; 42c: fitting hole; 50: door portion; 52: first conveying unit; 52a: suction unit; 52b: gripping mechanism; 54: second conveying unit; 54a: suction unit; 56: tool exchange unit; 58: base plate; 60: lifting mechanism; 62: first support member; 64: first rotation mechanism; 66: first arm; 68: second rotation mechanism; 70: second arm; 72: third rotation mechanism; 74: second support member; 76: exchange device; 76a: housing; 76b: rotation shaft; 78: tool holding jig; 80: nut holding portion; 82: protruding portion; 84: pin; 86: motor; 88: output shaft; 90: claw portion; 92: cover member; 94: actuator; 98: frame; 98a: outer side recess; 98b: outer peripheral wall; 98c: notch; 98d: inner side recess; 100: flange holding portion; 102: base portion; 104a: inner side lip portion; 104b: outer side lip portion; 104c: recess; 106: through hole; 110: first flow path; 112: air supply source; 114: first valve; 116: ejector; 118: pressure measurer; 120: bypass flow path; 122: bypass flow path valve; 124: non-contact suction portion; 124a: annular protruding portion; 124b: outer peripheral side surface; 124c: opening; 124d: outer side recess; 126: second flow path; 128: second valve; 130: camera unit; 132: lens; 134: temporary placement cover; 136: hinge; 138: placement table; 140: tool storage plate; 140a: one face; 142: tool case; 142a: first protruding portion; 142b: second protruding portion; 144: first recess; 146: second recess; 146a: third protruding portion; 150: control unit; 152a: suction determination portion; 152b: mark reading portion; 154: rotary joint.156: boss portion; 158: annular groove; 160: suction passage; 162: electromagnetic valve; 164: suction source; 170: suction source; 172: three-way valve; 174: connection flow path; 176: housing case. DETAILED DESCRIPTION

[0050] An embodiment of one mode of the present application will be described with reference to the drawings. Figure 1 is a perspective view of a cutting device 2 of Embodiment 1. Figure 1 The X-axis direction (machining feed direction), the Y-axis direction (index feed direction), and the Z-axis direction (vertical direction, height direction) shown are directions perpendicular to each other.

[0051] In addition, in Figure 1 , a portion of a constituent element is represented by a functional block. The cutting device 2 has a base 4 that supports each constituent element. A lift 6 that is lifted by a lifting mechanism (not shown) is provided at a corner portion of the base 4.

[0052] A cassette 8 is placed on an upper surface of a lifting table 6a of the lift 6. The cassette 8 has, for example, a pair of side surfaces that face each other and a connection portion that connects the pair of side surfaces. A plurality of support plates 8a that are arranged at a prescribed interval in the height direction are provided on the inner side of each side surface.

[0053] One workpiece 11 is supported by a pair of support plates 8a that are at the same height position on the inner side of each side surface. The workpiece 11 is, for example, a disc-shaped wafer made of a semiconductor material such as silicon. The material, shape, configuration, size, and the like of the workpiece 11 are not limited.

[0054] A plurality of division intended lines (interval lines) that intersect each other are provided on the front surface side of the workpiece 11. A device such as an IC (Integrated Circuit) is formed on the front surface side of each region divided by the plurality of division intended lines.

[0055] A circular tape (dicing tape) 13 is attached on the back surface (a surface on the side opposite the front surface) of the workpiece 11. The tape 13 has a diameter larger than the diameter of the workpiece 11, and the back surface side of the workpiece 11 is attached to the central portion of the tape 13.

[0056] Further, a ring-shaped frame 15 made of metal is attached to the outer peripheral portion of the tape 13. The workpiece 11 is housed in the cassette 8 in the manner of a workpiece unit 17 that is supported by the frame 15 via the tape 13. One or a plurality of workpieces 11 are housed in the cassette 8.

[0057] An opening 4a is formed in a region adjacent to the elevator 6 in the X-axis direction. A cleaning unit 10 that cleans the machined object 11 after cutting is disposed in the opening 4a. The cleaning unit 10 has a rotary table 12 that rotates about a rotation axis parallel to the Z-axis direction.

[0058] A nozzle (not shown) for spraying a gas-liquid mixed fluid obtained by mixing a liquid such as pure water and air is disposed above the rotary table 12. A pair of guide rails 14 is provided above the cleaning unit 10.

[0059] The pair of guide rails 14 moves in such a manner as to approach or separate from each other in the Y-axis direction by a drive mechanism (not shown). Thereby, the position of the machined object unit 17 in the Y-axis direction is adjusted. An opening 4b is formed in a position adjacent to the guide rails 14 in the Y-axis direction.

[0060] The opening 4b is a rectangular opening having a long side portion in the X-axis direction. A rectangular worktable cover 16 that covers a portion of the opening 4b is provided in the opening 4b. Folded dust and drip covers 18 that can be extended and contracted in the X-axis direction are provided on both sides of the worktable cover 16 in the X-axis direction.

[0061] A chuck table 20 for suction-holding the machined object unit 17 and the like is provided above the worktable cover 16. The chuck table 20 has a disc-shaped frame (not shown) formed of a metal such as stainless steel.

[0062] A disc-shaped recess is formed in the upper portion of the frame, and a disc-shaped porous plate (not shown) is fixed in the recess. The lower surface side of the porous plate is connected to one end side of a flow path. An attraction source (not shown) such as an ejector is connected to the other end side of the flow path.

[0063] When the attraction source is activated, a negative pressure is generated in the substantially flat upper surface (holding surface) of the porous plate. For example, after the machined object unit 17 is placed on the chuck table 20 in such a manner that the front surface of the machined object 11 is exposed, when the attraction source is activated, the back surface side of the machined object 11 is suction-held by the holding surface.

[0064] A clamping unit 20a that clamps the frame 15 of the machined object unit 17 is provided in the side portion of the chuck table 20. For example, a pair of clamping units 20a is provided in such a manner as to pass through the center of the holding surface of the chuck table 20.

[0065] A pair of finishing tables 22 is disposed on the worktable cover 16 in such a manner as to be separated in the Y-axis direction on one end side of the chuck table 20 in the X-axis direction. The finishing tables 22 are smaller than the chuck table 20 and have a rectangular shape when viewed from above.

[0066] The dressing table 22 has a substantially flat upper surface (holding surface). One face side of a rectangular plate-shaped dressing plate (not shown) is attracted and held on the holding surface of the dressing table 22. The dressing plate is used when dressing the cutting tool 34 (described later).

[0067] A rotary drive source (not shown) such as a motor is arranged below the table cover 16, and rotates the chuck table 20 about a rotary shaft that is substantially parallel to the Z-axis direction. The rotary shaft of the rotary drive source is connected to the lower surface of the frame of the chuck table 20.

[0068] A ball screw type X-axis moving mechanism (machining feed unit) (not shown) is provided below the rotary drive source. By operating the X-axis moving mechanism, the table cover 16 and the chuck table 20 are moved in the X-axis direction.

[0069] The region of the opening 4b that is adjacent to the opening 4a in the Y-axis direction is a carry-in and carry-out region in which the workpiece 11 is carried in and carried out. Also, the region of the opening 4b that is located on the opposite side of the carry-in and carry-out region in the X-axis direction is a cutting region in which the workpiece 11 is cut.

[0070] A cuboid-shaped cover member 24 formed of metal or the like is provided above the cutting region. A pair of cutting units 26 is arranged inside the space covered by the cover member 24. Here, the cutting units 26 are arranged in the X-axis direction. Figure 2 and Figure 3 The structure of the cutting unit 26 will be described.

[0071] Figure 2 is an exploded perspective view of the cutting unit 26, Figure 3 is a partial cross-sectional side view of the cutting unit 26. The cutting unit 26 has a cylindrical spindle housing 28. A portion of a cylindrical spindle 30 is arranged inside the spindle housing 28. The spindle 30 is rotatably supported by the spindle housing 28.

[0072] A rotary drive source (not shown) such as a motor is provided at one end portion of the spindle 30. The other end portion (front end portion) of the spindle 30 protrudes from the spindle housing 28, and a threaded hole 30a is formed at the front end portion of the spindle 30.

[0073] A substantially disc-shaped receiving flange 32 is arranged at the front end portion of the spindle 30. A first boss portion 32a is formed at one face side of the central portion of the receiving flange 32. The inner side of the first boss portion 32a is fitted to the front end portion of the spindle 30.

[0074] An annular flange surface 32b that contacts the gasket-type cutting tool 34 is provided on the other face side of the central portion of the receiving flange 32, i.e., the side opposite the first boss portion 32a. An annular recess 32c is formed at a position inside the flange surface 32b.

[0075] A second boss portion 32d is formed at a position inside the recess 32c. A third boss portion 32e is formed at a position inside the second boss portion 32d in such a manner that the second boss portion 32d protrudes toward the other face side of the receiving flange 32.

[0076] An external thread is formed on the outer peripheral side surface of the third boss portion 32e. Further, an annular support portion 32f for supporting the gasket 38 and the bolt 40 is formed on the inside of the third boss portion 32e.

[0077] An annular press flange 36 that holds the cutting tool 34 together with the receiving flange 32 is arranged on the other face side of the receiving flange 32. The press flange 36 has an annular protruding portion 36a on the side facing the receiving flange 32.

[0078] The protruding portion 36a has a shape that fits into the recess 32c described above. A through opening (opening) 36b having an inner diameter that is substantially the same as the outer diameter of the second boss portion 32d is formed at a position inside the protruding portion 36a, and a flange surface (second annular surface) 36c that is a surface that contacts the cutting tool 34 is formed at a position outside the protruding portion 36a.

[0079] The protruding portion 36a protrudes from the flange surface 36c, and an outer peripheral side surface 36a1 that connects in a perpendicular manner to the inner peripheral end portion of the flange surface 36c is formed on the bottom portion of the outer peripheral portion of the protruding portion 36a.

[0080] The protruding portion 36a has an annular surface 36a2, and a corner portion having a circular arc shape is formed on the outer peripheral portion on the side of the surface 36a2. That is, the outer diameter of the protruding portion 36a gradually decreases as it progresses from the bottom side of the protruding portion 36a toward the surface 36a2 of the protruding portion 36a.

[0081] An annular surface (first annular surface) 36d is formed on the side opposite the protruding portion 36a and the flange surface 36c. A plurality of through holes 36e that pass through from the annular surface 36d to the flange surface 36c are formed in the press flange 36.

[0082] Each of the through holes 36e is formed in such a manner that it faces the radial outer side of the press flange 36 as it progresses from the annular surface 36d toward the flange surface 36c. Four through holes 36e are formed in the press flange 36, for example. The four through holes 36e each have a hole diameter of about 1 mm, for example, and are arranged substantially equidistantly along the circumferential direction of the annular surface 36d.

[0083] An annular pressing nut 42 is arranged in contact with the annular surface 36d on the outer peripheral portion of the third boss portion 32e of the receiving flange 32. An internal thread 42a is formed on the inner peripheral side surface of the pressing nut 42.

[0084] An annular groove 42b is formed on the outer peripheral side surface of the pressing nut 42, which is used when the pressing nut 42 is gripped. Further, a plurality of fitting holes 42c, into which a pin 84 described later is fitted, are formed on one annular side surface of the pressing nut 42.

[0085] Here, a summary of the process of mounting the cutting tool 34 to the front end portion of the spindle 30 will be described. First, the shaft of the bolt 40 is fastened in the threaded hole 30a in a state where the washer 38 is arranged on the support portion 32f. Thereby, the receiving flange 32 is fixed to the front end portion of the spindle 30.

[0086] Next, the protruding portion 36a is fitted to the recessed portion 32c in a state where the cutting tool 34 is suction-held by the flange surface 36c (details will be described later). At this time, the inner peripheral side surface of the through opening 36b is in contact with the second boss portion 32d.

[0087] In this state, the cutting tool 34 is fixed between the receiving flange 32 and the pressing flange 36 by fastening the pressing nut 42 to the third boss portion 32e, and the cutting tool 34 and the pressing flange 36 are mounted to the receiving flange 32.

[0088] Here, returning to Figure 1 Other constituent elements of the cutting device 2 will be described. A door portion 50 is provided on the side surface of the cover member 24 on the in-out area side. The door portion 50 opens and closes the side surface of the cover member 24 by moving in the up-down direction or the left-right direction.

[0089] A first conveyance unit 52 is provided above the base 4. The first conveyance unit 52 is movable in the X-axis direction and the Y-axis direction by a horizontal direction moving mechanism (not shown). The first conveyance unit 52 has a cylinder arranged in the Z-axis direction with a long side portion.

[0090] A part of a rod is housed in the cylinder. When the cylinder is operated, the rod moves in the Z-axis direction. An adsorption unit 52a is provided on the lower end portion of the rod. The adsorption unit 52a has a substantially cross-shaped bracket in a plan view and a plurality of adsorption heads (not shown) provided on the lower surface side of the bracket.

[0091] The adsorption unit 52a is capable of adsorbing the frame 15 of the workpiece unit 17. A gripping mechanism 52b capable of gripping a part of the outer peripheral portion of the frame 15 is provided on the end portion of the adsorption unit 52a on the side of the elevator 6.

[0092] An arm portion of a second conveyance unit 54 is provided above the first conveyance unit 52. The second conveyance unit 54 is movable in the X-axis direction and the Y-axis direction by a horizontal direction moving mechanism (not shown).

[0093] The second conveyance unit 54 also has a cylinder in which a rod is housed, the cylinder being arranged in the Z-axis direction. An adsorption unit 54a is provided at a lower end portion of the rod. The adsorption unit 54a also has a substantially cross-shaped bracket and a plurality of adsorption heads (not shown) provided on a lower surface side of the bracket.

[0094] Here, a process of cutting the workpiece 11 using the cutting device 2 will be described briefly. First, the workpiece unit 17 is pulled out from the cassette 8 toward the pair of rails 14 by the first conveyance unit 52 in a state in which the gripping mechanism 52b is gripping the frame 15.

[0095] After the position of the workpiece unit 17 in the Y-axis direction is adjusted by the pair of rails 14, the frame 15 is adsorbed by the adsorption unit 52a, and the workpiece unit 17 is conveyed toward the chuck table 20 in the loading and unloading area by the first conveyance unit 52. Figure 1 The chuck table 20 in the loading and unloading area is shown.

[0096] Then, in a state in which the back surface side of the workpiece 11 is held by suction by the chuck table 20, the chuck table 20 is moved toward the cutting area by operating the X-axis moving mechanism. After that, the workpiece 11 is cut by the cutting unit 26 after alignment and the like.

[0097] After the cutting, the chuck table 20 is moved again toward the loading and unloading area. Then, the frame 15 is adsorbed by the adsorption unit 54a, and the workpiece unit 17 is conveyed from the chuck table 20 toward the cleaning unit 10 by the second conveyance unit 54.

[0098] When the workpiece 11 is cleaned, the rotary table 12 is rotated in a state in which the back surface side of the workpiece 11 is held by suction by the rotary table 12. Then, the workpiece 11 is cleaned by spraying the gas-liquid mixed fluid toward the front surface side of the workpiece 11, and after that, the workpiece 11 is dried.

[0099] After the drying, the workpiece unit 17 is conveyed toward the pair of rails 14 by the first conveyance unit 52. After that, the workpiece unit 17 is pushed out from the pair of rails 14 toward the cassette 8 by the gripping mechanism of the first conveyance unit 52.

[0100] However, as the cutting proceeds, the cutting tool 34 wears, and thus the worn cutting tool 34 needs to be replaced. The cutting apparatus 2 of the present embodiment has a tool replacement unit 56 for replacing the grommet-type cutting tool 34.

[0101] Using Figure 4 and Figure 5 The tool replacement unit 56 will be described. Figure 4 is a perspective view of the tool replacement unit 56 at standby, Figure 5 is a perspective view of the tool replacement unit 56 at the time of replacement work of replacing the used cutting tool 34 with a new cutting tool 34.

[0102] The tool replacement unit 56 has a base plate 58 fixed with respect to the base 4. A lifting mechanism 60 for moving the multi-joint robot in the Z-axis direction is provided to the base plate 58.

[0103] The lifting mechanism 60 has a motor (not shown) provided to the lower portion of the base plate 58 and a drive pulley (not shown) coupled to the rotation axis of the motor. Further, a driven pulley (not shown) is provided to the upper portion of the base plate 58.

[0104] One toothed endless belt (not shown) is provided over the drive pulley and the driven pulley, and a first support member 62 made of metal is fixed to a portion of the toothed endless belt. The first support member 62 moves in the Z-axis direction in conjunction with the movement of the toothed endless belt.

[0105] For example, when the rotation axis of the motor of the lifting mechanism 60 is rotated in a prescribed direction, the first support member 62 is raised, and when the rotation axis of the motor is rotated in the opposite direction to the prescribed direction, the first support member 62 is lowered. Note that the lifting mechanism 60 is not limited to the toothed endless belt structure.

[0106] The lifting mechanism 60 can also be a ball screw type lifting mechanism. The ball screw type lifting mechanism has a pair of rails (not shown) disposed with the long sides in the Z-axis direction. A moving plate (not shown) is installed on the pair of rails so as to be slidable in the Z-axis direction.

[0107] A nut portion (not shown) is provided to one face side of the moving plate. The nut portion is screwed with a ball screw that is substantially parallel to the rails. A pulse motor (not shown) is coupled to one end of the ball screw.

[0108] Further, the first support member 62 described above is fixed to the other face of the moving plate. When the pulse motor is rotated in a prescribed direction, the first support member 62 is raised, and when the pulse motor is rotated in the opposite direction to the prescribed direction, the first support member 62 is lowered.

[0109] A first rotary mechanism 64 having a rotary drive source such as a motor is attached to the first support 62. The rotary axis of the rotary drive source is disposed substantially in parallel with the Z-axis direction. A first arm 66 having one end portion disposed substantially perpendicular to the Z-axis direction in the long side direction is attached to the rotary axis.

[0110] A second rotary mechanism 68 is attached to the other end portion of the first arm 66. The second rotary mechanism 68 has a rotary drive source such as a motor whose rotary axis is disposed substantially in parallel with the Z-axis direction. A second arm 70 having one end portion disposed substantially perpendicular to the Z-axis direction in the long side direction is attached to the rotary axis.

[0111] A third rotary mechanism 72 is attached to the other end portion of the second arm 70. The third rotary mechanism 72 has a rotary drive source such as a motor whose rotary axis is disposed substantially in parallel with the Z-axis direction. A second support 74 made of metal is attached to the rotary axis.

[0112] A replacement device 76 is fixed to the second support 74. The replacement device 76 is moved between a retreat position shown in Fig. 1 and a replacement position shown in Fig. 2 by movement units respectively composed of the above-mentioned lifting mechanism 60, the first rotary mechanism 64, the first arm 66, the second rotary mechanism 68, the second arm 70, the third rotary mechanism 72, and the like. Figure 4 The replacement device 76 is moved between the retreat position shown in Fig. 1 and the replacement position shown in Fig. 2. Figure 5

[0113] The replacement device 76 has a substantially cylindrical housing 76a. Inside the housing 76a, a rotary drive source (not shown) for rotating the housing 76a around a rotary axis 76b in the height direction of the cylinder of the housing 76a is housed.

[0114] Figure 6 Fig. 6 is a side view of the replacement device 76. A pair of tool holding jigs 78 is disposed on the side surface of the housing 76a in a manner sandwiching the rotary axis 76b. Further, a nut holding portion 80 for rotating the press nut 42 is provided on the side surface of the housing 76a between the pair of tool holding jigs 78.

[0115] The nut holding portion 80 has a convex portion 82 including a small diameter portion in a cylindrical shape and a large diameter portion disposed coaxially with the small diameter portion. Four pins 84 whose one ends are forced by a force applying member such as a spring are disposed at equal intervals along the circumferential direction of the large diameter portion at one end portion of the large diameter portion. An output shaft (predetermined rotary axis) 88 of a motor (rotary drive source) 86 is connected to one end portion of the small diameter portion on the side opposite to the large diameter portion. The motor 86 and the output shaft 88 constitute a nut rotating portion.

[0116] ​Four claw portions 90 are disposed at equal intervals in the circumferential direction of the convex portion 82 around the output shaft 88, and the base end portions of the claw portions 90 are connected to the small-diameter portion of the convex portion 82. The front end portions of the claw portions 90 protrude beyond one end portion of the large-diameter portion of the convex portion 82 and are located outside the large-diameter portion and the small-diameter portion.

[0117] A biasing member (not shown) such as a compression spring is disposed between the region between the front end portion and the base end portion of each claw portion 90 and the outer peripheral portion of the large-diameter portion, and each claw portion 90 is biased to the outside in the radial direction of the convex portion 82. A cover member 92 in the shape of a cylinder is provided on the outside of the claw portions 90.

[0118] The cover member 92 is movable in the lengthwise direction of the output shaft 88 by an actuator 94 such as a cylinder that is fixed to the output shaft 88. When the cover member 92 is pushed out to the outside, the front end portions of the claw portions 90 move in a manner that approaches the convex portion 82.

[0119] In contrast, when the cover member 92 is pulled in to the inside, the front end portions of the claw portions 90 move in a manner that moves away from the convex portion 82 by the biasing member. In this way, by moving the cover member 92, the front end portions of the claw portions 90 can be brought closer to each other or moved farther apart from each other.

[0120] In the case of rotating the press nut 42 using the nut holding portion 80, first, the above-described pin 84 is inserted into the fitting hole 42c. Then, by pushing the cover member 92 out to the outside, the front end portions of the claw portions 90 are engaged with the annular groove 42b.

[0121] In the state in which the press nut 42 is held by the plurality of claw portions 90, when the output shaft 88 is rotated in a prescribed direction by causing the motor 86 to operate, the nut holding portion 80 is rotated in the prescribed direction, and the press nut 42 is detached from the receiving flange 32. In addition, if the nut holding portion 80 is rotated in the opposite direction of the prescribed direction, the press nut 42 can be fastened to the receiving flange 32.

[0122] Next, the configuration of the tool holding jig 78 will be described. Figure 7 is an enlarged perspective view of the tool holding jig 78, Figure 8 is a partial cross-sectional side view of the tool holding jig 78 and the like. In addition, in Figure 8 , a portion of the constituent elements is represented by a functional block, and the flow path of a fluid is simplified and represented by a line.

[0123] The tool holding jig 78 has a bottomed cylindrical frame 98 formed of metal or the like. A ring-shaped flange holding portion 100 formed of an elastic material such as rubber, resin, or an elastomer is disposed at the opening portion of the frame 98.

[0124] The flange retaining portion 100 includes an annular base 102 disposed on the bottom side of the frame 98. An annular inner lip 104a is formed on the inner circumferential side of one surface of the base 102, protruding from the base 102 toward the opening side of the frame 98.

[0125] The inner lip 104a has an inclined surface that slopes toward the radial center of the frame 98 such that the diameter of the base end is larger than the diameter of the front end. An annular outer lip 104b is formed on the outer periphery of one surface of the base 102, protruding from the base 102 toward the opening of the frame 98.

[0126] The outer lip 104b has an inclined surface that slopes radially outward toward the frame 98 in such a way that the diameter of the base end is smaller than the diameter of the front end. The inner lip 104a and the outer lip 104b function as annular pads that contact the annular surface 36d of the pressing flange 36.

[0127] An annular recess 104c is formed on one side of the base 102 by means of an inner lip 104a, an outer lip 104b, and the base 102. Alternatively, instead of the inner lip 104a and the outer lip 104b, two O-rings of different diameters can be arranged concentrically on the base 102 to form an annular recess 104c on one side of the base 102.

[0128] A plurality of through holes 106 penetrating the base 102 are formed on the bottom side of the recess 104c. In this embodiment, four through holes 106 are formed in a manner that they are spaced apart from each other along the circumference of the recess 104c (see reference). Figure 7 ).

[0129] like Figure 8 As shown, the through-hole 106 is connected to one end of the first flow path 110. Furthermore, an air supply source 112 is connected to the other end of the first flow path 110. The air supply source 112 may include, for example, a compressor for compressed air, a container for storing compressed air, and a filter for removing water droplets or dust from the air.

[0130] In the first flow path 110, a first valve (first on / off valve) 114 is provided between the air supply source 112 and the through hole 106. The first valve 114 is, for example, an electrically controlled solenoid valve.

[0131] An injector 116 is provided between the first valve 114 and the through hole 106. When the first valve 114 is in the open state and air is supplied from the air supply source 112 to the injector 116, the injector 116 generates negative pressure according to the Venturi effect.

[0132] The negative pressure generated by the ejector 116 acts on the through-hole 106 via the first flow path 110. The pressure measurer 118 (pressure sensor) for measuring the pressure at the position between the ejector 116 and the through-hole 106 is provided in the first flow path 110.

[0133] The pressure (e.g., negative pressure) in the first flow path 110 is measured, for example, by measuring the gage pressure (difference between absolute pressure and atmospheric pressure) using the pressure measurer 118. The bypass flow path (third flow path) 120 connecting between the air supply source 112 and the first valve 114 and between the pressure measurer 118 and the through-hole 106 is connected to the first flow path 110.

[0134] That is, the bypass flow path 120 is connected to the through-hole 106 (i.e., flange holding portion 100) via the first flow path 110. The bypass flow path valve (third on-off valve) 122 is provided in the bypass flow path 120. The bypass flow path valve 122 is, for example, an electromagnetic valve whose opening and closing are controlled by electricity.

[0135] If the first valve 114 is made to be in the closed state and the bypass flow path valve 122 is made to be in the open state, air (fluid) is ejected from the bypass flow path 120. In this way, air can be ejected to the presser flange 36 held by suction by the through-hole 106 to the flange holding portion 100.

[0136] The outer side recess 98a in the shape of a ring is formed in the outer peripheral portion of the flange holding portion 100 by the bottom and the outer peripheral wall 98b of the frame 98 and the outer peripheral side portion of the flange holding portion 100. The non-contact suction portion 124 in the shape of a ring formed of metal or the like is provided in the outer side recess 98a.

[0137] The non-contact suction portion 124 includes the annular protrusion 124a protruding toward the opening portion side of the frame 98 to a degree not protruding more than the opening portion of the flange holding portion 100. The plurality of openings 124c is formed in the outer peripheral side surface 124b of the annular protrusion 124a.

[0138] In the present embodiment, eight openings 124c are formed at substantially equal intervals along the circumferential direction of the annular protrusion 124a, but the number of openings 124c is not limited to eight. Each opening 124c is connected to one end of the second flow path 126.

[0139] The other end of the second flow path 126 is connected to the air supply source 112. The second valve (second on-off valve) 128 is provided between the air supply source 112 and the opening 124c. The second valve 128 is, for example, an electromagnetic valve whose opening and closing are controlled by electricity.

[0140] One end of the second flow path 126 is connected in a manner that the tangent direction with respect to the outer peripheral side surface 124b is inclined at a prescribed angle θ of an acute angle (see FIG. 4).Figure 7 ). When the 2nd valve 128 is made to be an open state, air is supplied to the 2nd flow path 126.

[0141] The outer peripheral wall 98b of the frame 98 exists outside the outer peripheral side surface 124b across the outside recessed portion 124d of the non-contact attraction portion 124. A plurality of cutouts 98c are formed in the outer peripheral wall 98b. In the present embodiment, four cutouts 98c are formed at substantially equal intervals along the circumferential direction of the outer peripheral wall 98b, but the number of cutouts 98c is not limited to four.

[0142] When the 2nd valve 128 is made to be an open state, air (fluid) is ejected from the plurality of openings 124c in a direction inclined at a prescribed angle Θ with respect to the tangential direction of the outer peripheral side surface 124b. By the air ejected from the openings 124c, a swirling flow is generated in the outside recessed portion 124d.

[0143] The swirling flow swirls in a manner expanding to the outside in the radial direction of the frame 98 as it advances to the outside from the opening portion of the frame 98. Therefore, when the swirling flow is generated, the pressure in the vicinity of the opening portion of the frame 98 drops in accordance with Bernoulli's theorem. By this, a negative pressure is generated in the vicinity of the opening portion of the frame 98.

[0144] In addition, in a case where the outer peripheral wall 98b is not provided, air escapes to the outside of the frame 98, and it is difficult to form a swirling flow. In the present embodiment, compared to a case where the outer peripheral wall 98b is not provided, it is easy to form a swirling flow having an appropriate flow rate, and thus it is possible to generate an appropriate negative pressure in the vicinity of the opening portion of the frame 98.

[0145] A cylindrical inside recessed portion 98d is formed in the frame 98 at a position inside compared to the flange holding portion 100. This inside recessed portion 98d is formed to a position deeper than the outside recessed portion 98a, and functions as a positioning fitting portion as described later.

[0146] A lens 132 constituting an optical system of a camera unit 130 is disposed at the bottom of the inside recessed portion 98d. The camera unit 130 also has a light source (not shown) such as an LED that irradiates light to an object, and a photographing element (not shown) such as a CMOS image sensor or a CCD image sensor that performs photographing via the optical system including the lens 132 and the like.

[0147] Here, returning again to Figure 1 The other constituent elements of the cutting device 2 will be described. One end side of a rectangular temporary placement cover 134 is fixed to the edge portion of the tool exchange unit 56 side of the opening 4b in a manner rotatable via a hinge 136.

[0148] The temporary placement cover 134 becomes as shown in FIG. 6 when cutting of the workpiece 11 is performed. Figure 1the state shown by the double-dot chain line. In contrast, when the replacement work of the cutting tool 34 is performed with the cutting tool replacement unit 56, the temporary placement cover 134 becomes the state shown by the double-dot chain line. Figure 1

[0149] In the base 4, a disc-shaped placement stage 138 is arranged on the outside of the edge portion on the side opposite to the cover member 24. A rotary drive source (not shown) such as a motor is arranged below the placement stage 138.

[0150] An output shaft of the rotary drive source is connected to the center portion of the bottom surface of the placement stage 138. If the rotary drive source is operated, the placement stage 138 rotates in a prescribed direction. A disc-shaped tool storage plate 140 is placed on the upper surface of the placement stage 138.

[0151] Figure 9 is a perspective view of the tool storage plate 140. A first recess 144 in which the tool case 142 is arranged and a second recess 146 in which the pressing flange 36 is arranged are formed on one face 140a side of the tool storage plate 140.

[0152] In the present embodiment, two second recesses 146 are arranged in a manner of sandwiching the center of one face 140a. Further, in the circumferential direction of one face 140a, four first recesses 144 are respectively arranged in one circular arc-shaped region and another circular arc-shaped region between the two second recesses 146.

[0153] In addition, the number of the first recesses 144 and the second recesses 146 is not limited to the example shown in the drawing. In the first recess 144, only the second cover which is separate from the first cover among the first cover and the second cover which respectively constitute the tool case 142 made of resin is arranged. Figure 9

[0154] A first protrusion 142a in a cylindrical shape is provided to the second cover. The first protrusion 142a functions as a positioning portion which engages with the opening portion of the grommet-type cutting tool 34 to position the cutting tool 34 with respect to the second cover. By arranging the cutting tool 34 to the first protrusion 142a, the cutting tool 34 is housed in the tool case 142.

[0155] A mark 34a is provided to at least one of the two faces of the cutting tool 34 in a ring shape. The mark 34a is provided to the cutting tool 34 in a manner of, for example, a letter, a bar code, a two-dimensional code, or the like.

[0156] The mark 34a can be directly printed on the cutting tool 34, or a sticker on which the mark 34a is marked can be attached to the cutting tool 34. The mark 34a is, for example, captured by the camera unit 130 of the above-described cutting tool replacement unit 56.

[0157] ​​The marker 34a includes information related to the kind of the cutting tool 34. The information is, for example, the outer diameter, the inner diameter, the thickness, the kind of abrasive grains, the grain size of the abrasive grains, the kind of binder, the serial number, and the identification information for identifying the accommodated tool case 142, and the like.

[0158] In addition, a marker including identification information for identifying the cutting tool 34 arranged in the prescribed tool case 142 is provided on the tool case 142 in the form of characters, a bar code, a two-dimensional code, or the like. The marker can also be captured by the camera unit 130.

[0159] In addition, the tool storage plate 140 can also be formed of glass, plastic, or the like, and at least a portion thereof is transparent. For example, in the case where the portions corresponding to the first recess 144, the second recess 146, and the like are transparent, the identification information of the cutting tool 34 or the tool case 142 can be read by the camera unit 130 through the tool storage plate 140.

[0160] A second protrusion 142b that protrudes more than the first protrusion 142a and has a smaller diameter than the first protrusion 142a is provided inside the first protrusion 142a. The second protrusion 142b is used to press the flange 36 against the cutting tool 34 as described later.

[0161] Further, a third protrusion (protrusion) 146a that is cylindrical is provided in the second recess 146. The third protrusion 146a determines the position of the press flange 36 by being inserted through the through opening 36b of the press flange 36. The press flange 36 is arranged in the second recess 146 with the flange face 36c supported to the bottom of the second recess 146 in a manner that the annular face 36d is exposed.

[0162] In addition, a marker including identification information for identifying the press flange 36 arranged in the second recess 146 can also be provided on the third protrusion 146a in the form of characters, a bar code, a two-dimensional code, or the like. The marker can also be captured by the camera unit 130.

[0163] In addition, a third recess (not shown) for arranging a rectangular dressing plate can also be provided in the tool storage plate 140. The third recess has an opening that is rectangular when the tool storage plate 140 is viewed from above.

[0164] Further, a marker including information of the kind of abrasive grains, the grain size of the abrasive grains, the concentration, the kind of binder, the serial number, and the like can also be provided on the dressing plate in the form of characters, a bar code, a two-dimensional code, or the like. In addition, a marker including identification information for identifying the dressing plate arranged in the third recess can also be recorded on the third recess in the form of characters, a bar code, a two-dimensional code, or the like.

[0165] In addition, a marker including identification information for identifying the cutting tool 34 arranged in the prescribed tool case 142 is provided on the tool case 142 in the form of characters, a bar code, a two-dimensional code, or the like. The marker can also be captured by the camera unit 130. Figure 9The image shows only the second cover of the tool housing 142, but the second cover located below and the first cover located above the second cover in a manner that covers the second cover can also be combined and configured in the first recess 144.

[0166] In this case, a portion of the outer periphery of the first cover has an engaging portion (not shown) such as a claw that engages with the second cover. A connecting component (not shown) such as adhesive tape is attached to a portion of the outer periphery located on the side opposite to the engaging portion relative to the center of the first cover.

[0167] The first cover is connected to a portion of the outer periphery of the second cover via a connecting member. The connecting member functions as a hinge between the first and second covers, which are opened and closed with the connecting member as a fulcrum.

[0168] The combination of the first cover and the second cover is configured such that the engaging portion is located on the outer periphery of one surface 140a, and the connecting portion is located on the center side of one surface 140a. In addition, a through opening (not shown) is formed on a portion of the bottom surface of the first recess 144 to allow the disc-shaped suction pad (not shown) to move in and out.

[0169] A suction mechanism (not shown) is disposed below the through opening. This suction mechanism has a suction pad that attracts and holds the lower surface of the second cover. Furthermore, a lifting mechanism (not shown) is disposed near the suction mechanism to lift the engaging portion of the first cover from below and release the engagement of the first cover.

[0170] A pressing mechanism (not shown) is disposed near the lifting mechanism and on the outer periphery of one surface 140a. The pressing mechanism has a pressing pin that can extend and retract radially along one surface 140a. The pressing mechanism opens the first cover by extending the pressing pin toward the center of one surface 140a and pressing the inside of the first cover with the connecting part as the fulcrum.

[0171] A rod member (not shown) is disposed near the center of a surface 140a and is arranged substantially parallel to the surface 140a. The rod member is capable of moving forward and backward radially along the surface 140a. A pair of rollers (not shown) are connected to one end of the rod member.

[0172] The lever component is used when closing the first cover. Specifically, the lever component moves toward the outer periphery of a surface 140a, and the outer side of the first cover is pressed by a pair of rollers, closing the first cover with the connecting part as a fulcrum.

[0173] In this way, by using the suction mechanism, the lifting mechanism, the pushing mechanism and the rod component to open and close the tool housing 142, the tool housing 142 can be automatically opened and closed on the cutting device 2 side during the change of operation while normally protecting the cutting tool 34.

[0174] Back toFigure 1 Other components of the cutting device 2 will be described. The operation of the elevator 6, the guide rail 14, the rotation drive source and the X-axis moving mechanism for the chuck table 20, the cutting unit 26, the first conveyance unit 52, the second conveyance unit 54, the tool exchange unit 56, the placement table 138, and the like are controlled by the control unit 150.

[0175] The control unit 150 is constituted by, for example, a computer including a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), a SRAM (Static Random Access Memory), a ROM (Read Only Memory), an auxiliary storage device such as a flash memory, a hard disk drive, and a solid state drive.

[0176] A software is stored in the auxiliary storage device, and the function of the control unit 150 is realized by causing the processing device and the like to operate in accordance with the software. A predetermined program for comparing the pressure measured by the pressure gauge 118 with a predetermined pressure is stored in the auxiliary storage device.

[0177] The predetermined program functions as an adsorption determination section 152a. The adsorption determination section 152a monitors the negative pressure (gauge pressure) measured by the pressure gauge 118. In addition, the adsorption determination section 152a compares the gauge pressure measured by the pressure gauge 118 with a predetermined pressure.

[0178] Specifically, the adsorption determination section 152a compares the gauge pressure measured by the pressure gauge 118 with a first predetermined gauge pressure (first pressure) and a second predetermined gauge pressure (second pressure) that is larger than the first gauge pressure.

[0179] Thus, the adsorption determination section 152a determines whether the adsorption of the adsorption target in the tool holding jig 78 is successful. In addition, the magnitudes of the first gauge pressure and the second gauge pressure are appropriately adjusted in accordance with the size of the through hole 36e and the performance of the suction source such as the ejector 116.

[0180] Other programs for decoding various marks such as the mark 34a photographed by the camera unit 130 are stored in the auxiliary storage device. The other programs function as a mark reading section 152b for reading information contained in the various marks.

[0181] The information read out by the mark reading section 152b is displayed on a display device (not shown) such as a liquid crystal display or a touch panel. The display device is provided, for example, on one side surface of a housing (not shown) that covers the base 4.

[0182] Next, the mounting method of the cutting tool 34 to the receiving flange 32 using the tool replacement unit 56 will be described with reference to Figure 8 and Figures 10 to 13 etc. In addition, Figure 13 is a flowchart of the mounting method of the cutting tool 34.

[0183] First, the temporary placement cover 134 is brought to a horizontal state as shown by the double-dotted line in Figure 1 . Next, the first arm 66 of the tool replacement unit 56 and the like are unfolded as shown in Figure 5 . Next, the one tool holding jig 78 is brought into opposition with the pressing flange 36 of the tool storage plate 140 as shown in Figure 8 .

[0184] Next, the replacement device 76 is lowered so that the inner recessed portion 98d is engaged with the third protrusion 146a. In the present embodiment, since the inner recessed portion 98d functions as a positioning engagement portion, the flange holding portion 100 can be smoothly disposed on the annular surface 36d.

[0185] Next, the first valve 114 is brought to an open state, and the annular surface 36d of the pressing flange 36 is suction-held (pressing flange holding step S10) by the flange holding portion 100 by the negative pressure generated by the ejector 116 (refer to Figure 8 ).

[0186] When the pressing flange 36 is suctioned by the flange holding portion 100, the amount of air inflow to the flange holding portion 100 decreases, and the magnitude of the negative pressure measured by the pressure gauge 118 exceeds the magnitude of the first gage pressure (for example, -0.005 MPa) that is predetermined.

[0187] For example, the negative pressure measured by the pressure gauge 118 is -0.011 MPa, and the magnitude of the negative pressure exceeds the magnitude of the first gage pressure. In this case, the suction determination portion 152a determines that the pressing flange 36 is suction-held by the flange holding portion 100.

[0188] After the pressing flange holding step S10, the replacement device 76 is moved in the horizontal direction so that the flange surface 36c of the suction-held pressing flange 36 approaches the cutting tool 34 placed on the tool storage plate 140.

[0189] In addition, at this time, the above-described mark 34a is photographed by the camera unit 130, and the information contained in the mark 34a is read by the mark reading portion 152b. Next, the replacement device 76 is lowered.

[0190] Then, the flange surface 36c is brought to a distance of a prescribed length or less from the cutting tool 34 (pressing flange approach step S20). For example, the surface 36a2 of the pressing flange 36 is brought into contact with the upper surface of the first protrusion 142a.

[0191] After the pressing flange approach step S20, the second valve 128 is brought to an open state in a state where the first valve 114 is in an open state, and air (fluid) is injected from each opening 124c toward the outer peripheral portion 36f of the pressing flange 36.

[0192] A negative pressure is generated by a rotational flow of the air generated around the outer peripheral portion 36f, the cutting tool 34 is attracted in a manner of rising toward the flange surface 36c, and is drawn close to the flange surface 36c (cutting tool drawing close step S30).

[0193] Figure 10 Fig. 12 is a view showing the cutting tool drawing close step S30. After the cutting tool drawing close step S30, the second valve 128 is brought to a closed state in a state where the first valve 114 is in an open state.

[0194] Thus, the cutting tool 34 that approached the flange surface 36c is held by the flange surface 36c in a state of contact with the flange surface 36c by the attraction force acting from the through-hole 36e (cutting tool holding step S40).

[0195] Figure 11 Fig. 13 is a view showing the cutting tool holding step S40. In the cutting tool holding step S40, the tool holding jig 78 holds the cutting tool 34 by attraction via the pressing flange 36. Therefore, the pressing flange 36 and the tool holding jig 78 function as a holding unit that holds the cutting tool 34 by attraction.

[0196] In the present embodiment, when the cutting tool 34 is held by attraction, the tool exchange jig presses the cutting tool 34 without passing through the pressing flange 36, and thus it is possible to reduce the risk of breakage of the cutting tool 34 due to pressing of the cutting tool 34.

[0197] Further, in the cutting tool holding step S40, the inner peripheral portion 34b of the cutting tool 34 is in contact with the outer peripheral side surface 36al of the protrusion 36a. Therefore, it is possible to automatically determine the position of the cutting tool 34 by the protrusion 36a.

[0198] When the cutting tool 34 is held by attraction by the flange surface 36c, the amount of inflow of air to the flange holding portion 100 is further reduced, and the magnitude of the negative pressure measured by the pressure gauge 118 exceeds the magnitude of the second predetermined gage pressure (for example, -0.04 MPa).

[0199] For example, the negative pressure measured by the pressure gauge 118 is -0.055 MPa, and the magnitude of the negative pressure exceeds the magnitude of the 2nd table pressure. In this case, the suction determination section 152a determines that the cutting tool 34 is attracted and held by the press flange 36.

[0200] Thus, the suction determination section 152a determines whether the cutting tool 34 is suctioned by the flange face 36c, in addition to determining whether the press flange 36 is suctioned by the flange holding section 100, based on the measurement result of the table pressure measured by the pressure gauge 118.

[0201] After the cutting tool holding step S40, the 2nd arm 70 is inserted into the open door section 50, and the nut holding section 80 of the exchange device 76 is brought into opposition with the press nut 42 of the cutting unit 26.

[0202] After the pin 84 is inserted into the fitting hole 42c, the front end section of each claw section 90 is engaged with the annular groove 42b of the press nut 42, and the press nut 42 is held. In this state, the nut holding section 80 is rotated in a prescribed direction, and the press nut 42 is detached from the receiving flange 32 (press nut detachment step S50).

[0203] After the press nut detachment step S50, the housing 76a is rotated 90 degrees around the rotation axis 76b, and the cutting tool 34 of the cutting unit 26 from which the press nut 42 is detached is brought into opposition with the other tool holding jig 78 that does not hold the cutting tool 34.

[0204] Then, the press flange 36 and the cutting tool 34 mounted to the spindle 30 are attracted and held by the other tool holding jig 78. Thus, the cutting tool 34 and the like are detached from the spindle 30 (cutting tool detachment step S60).

[0205] After that, the housing 76a is rotated again so that one tool holding jig 78 is brought into opposition with the receiving flange 32. Then, the 1st valve 114 is brought to the closed state, and the bypass flow path valve 122 is brought to the open state, and thus air is injected from the flange holding section 100 toward the cutting tool 34 and the press flange 36.

[0206] Thus, the cutting tool 34 and the press flange 36 are separated toward the receiving flange 32. Also at this time, the 1st flow path 110, the bypass flow path 120, the bypass flow path valve 122, the flange holding section 100, and the like function as an injection unit that injects air.

[0207] After that, the press nut 42 held by the nut holding section 80 is inserted into the 3rd boss section 32e, and is rotated in the opposite direction of the prescribed direction, and the press nut 42 is fastened to the receiving flange 32.

[0208] Thus, the cutting tool 34 and the pressing flange 36 are installed to the receiving flange 32 in a manner that the cutting tool 34 is clamped by the receiving flange 32 and the pressing flange 36 (installation step S70).

[0209] The used cutting tool 34 detached from the cutting unit 26 is returned to the tool storage plate 140. Specifically, the other tool holding jig 78 is positioned on the empty tool case 142 so that the inner peripheral side surface of the protrusion 36a is engaged with the second protrusion 142b.

[0210] In addition, at this time, the tool case 142 to which the cutting tool 34 is returned can be determined using the camera unit 130 or the like. After the protrusion 36a is engaged with the second protrusion 142b, the cutting tool 34 is detached.

[0211] Figure 12 is a view showing a case where the cutting tool 34 is detached. The used cutting tool 34 is difficult to be detached by making the first valve 114 in the closed state only because the cutting tool 34 is wetted with cutting water such as pure water. Therefore, the bypass passage valve 122 is made in the open state, and air (fluid) is injected from the flange holding portion 100 to the cutting tool 34. In this case, the flange holding portion 100 or the like also functions as the above-mentioned injection unit.

[0212] By the injection of air from the flange holding portion 100, even the cutting tool 34 wetted with cutting water can be detached from the flange holding portion 100. The cutting tool 34 after the detachment is separated from the pressing flange 36 and moves to the outer peripheral portion of the first protrusion 142a.

[0213] Next, in a case where the pressing flange 36 is separated from the tool holding jig 78, the first valve 114 is made in the open state again to suction-retain the pressing flange 36, and the pressing flange 36 is disposed on the empty second recessed portion 146. Then, the pressing flange 36 is separated from the flange holding portion 100 by injecting air.

[0214] Next, a modification of the cutting unit 26 will be described. Figure 14 is a partial cross-sectional side view showing a modification of the cutting unit 26. The cutting unit 26 of the modification has a rotary joint 154 fixed to the front end portion of the spindle housing 28.

[0215] The rotary joint 154 has a boss portion 156 in a cylindrical shape. An annular groove 158 is formed in the inner peripheral portion of the boss portion 156. A cylindrical suction passage 160 is formed in the annular groove 158 at a position corresponding to the top of the boss portion 156. The suction passage 160 is connected to a suction source 164 such as an injector via a solenoid valve 162.

[0216] A communication path 32g is formed in the receiving flange 32. One end of the communication path 32g is formed in the outer peripheral side surface of the first boss portion 32a. Even if the receiving flange 32 is rotated, the one end of the communication path 32g always faces the annular groove 158. Therefore, when the electromagnetic valve 162 is made to be in the open state, a negative pressure always acts in the communication path 32g.

[0217] The other end of the communication path 32g is located at a position that is located more inward in the radial direction of the receiving flange 32 than the recessed portion 32c and is located more outward than the second boss portion 32d. The other end of the communication path 32g is an opening that faces the pressing flange 36.

[0218] When the electromagnetic valve 162 is made to be in the open state, a negative pressure acts on the other end of the communication path 32g, and the pressing flange 36 is held by the receiving flange 32 by the negative pressure. In this way, in this modification example, since the pressing flange 36 is held by the negative pressure, the pressing nut 42 can be omitted. Also, the external thread of the third boss portion 32e of the receiving flange 32 can be omitted.

[0219] Further, in the exchange device 76, the nut holding portion 80 can be omitted. Therefore, the structure of the exchange device 76 can be simplified compared to the first embodiment, and further, the exchange device 76 can be made compact.

[0220] Next, a modification example of the exchange device 76 will be described. In this modification example, the tool holding jig 78 is not moved by a moving unit such as the lifting mechanism 60. In this modification example, the tool holding jig 78 is mounted to the cutting device 2 in a manner that an operator can move it by hand.

[0221] Figure 15 is a perspective view of the front side of the tool holding jig 78, Figure 16 is a perspective view of the back side of the tool holding jig 78. The tool holding jig 78 has a semi-cylindrical base portion 166. In addition, in Figure 15 and Figure 16 in the drawings, a part of a constituent element is represented by a functional block, and a flow path of a fluid, a wiring, and the like are simplified and represented by a line.

[0222] The base portion 166 functions as, for example, a handle portion when an operator holds the tool holding jig 78. A frame 98 including the flange holding portion 100, the non-contact suction portion 124, and the like is joined to one end side of the base portion 166. The ejector 116 is housed in the bottom portion of the base portion 166.

[0223] A pressure measurer 118 is connected to the first flow path 110 between the ejector 116 and the through-hole 106. The pressure measurer 118 of this example is mounted to the tool holding jig 78. A suction determination portion 152a is connected to the pressure measurer 118.

[0224] The pressure measuring device 118 and the adsorption determination unit 152a are mounted on the base 166, but they can also be disposed at any position between the base 166 and the cover member (not shown) covering the base 166. The adsorption determination unit 152a is, for example, composed of an integrated circuit such as an ASIC (Application Specific Integrated Circuit).

[0225] One or more LEDs (not shown) may also be connected to the adsorption determination unit 152a. The adsorption determination unit 152a is disposed on the side of the cover component and can make one or more LEDs light up according to whether the adsorption of the pressing flange 36 and the cutting tool 34 is successful.

[0226] Furthermore, a camera unit 130 is mounted on the base 166. In addition to the aforementioned lens 132, imaging element, etc., the camera unit 130 is also connected to a mark reading unit 152b for decoding various marks such as the captured mark 34a.

[0227] The tag reading unit 152b is mounted on the base 166, but it can also be configured at any position between the base 166 and the cover member covering the base 166. The tag reading unit 152b is, for example, composed of an integrated circuit such as an ASIC.

[0228] A first valve (first on / off valve) 114 with a lever is disposed on the upper part of the base 166 in a manner that protrudes from the cover component. In addition, a second valve (second on / off valve) 128 with a button is disposed in a manner that protrudes from the cover component.

[0229] In use Figure 15 and Figure 16 When the cutting tool 34 is replaced by the tool holding fixture 78 shown, the operator first removes the pressing nut 42 by manual operation (pressing nut removal step S4).

[0230] Next, a tool holding fixture 78 is inserted into the inside of the cover member 24 through the door 50. Then, the cutting tool 34 and the pressing flange 36 are attracted and held by the tool holding fixture 78 and removed from the spindle 30 (cutting tool removal step S8).

[0231] Next, the tool holding fixture 78 is positioned on the tool storage plate 140. Then, by injecting air from the flange holding portion 100, the cutting tool 34 is disengaged from the flange holding portion 100 and placed in the empty tool housing 142.

[0232] After that, in the case of directly using the pressing flange 36, the pressing flange approach step S20 is performed, followed by the cutting tool approach step S30 and the cutting tool holding step S40.

[0233] In addition, in the case of replacing the pressing flange 36 mounted on the main shaft 30 with a new pressing flange 36, the pressing flange holding step S10 is performed, followed by S20 to S40.

[0234] Then, the first valve 114 is brought to the closed state, and the bypass flow path valve 122 is brought to the open state, whereby air is injected from the flange holding portion 100 toward the cutting tool 34 and the pressing flange 36.

[0235] Thus, the cutting tool 34 and the pressing flange 36 are separated from the receiving flange 32. Finally, the pressing nut 42 is fastened to the receiving flange 32 by the operator, and the cutting tool 34 and the like are mounted on the receiving flange 32 (mounting step S70).

[0236] Next, the use Figure 17 and Figure 18 of the second embodiment will be described. Hereinafter, mainly the points different from the tool holding jig 78 of the first embodiment will be described. Figure 17 is a partial cross-sectional side view of the tool holding jig 78 of the second embodiment.

[0237] In the first flow path 110, an attracting source 170 such as a vacuum pump or an injector is arranged on the side opposite to the through-hole 106 with respect to the first valve 114. If the first valve 114 is brought to the open state, negative pressure can be applied to the through-hole 106, and the annular surface 36d of the pressing flange 36 can be held by attraction by the flange holding portion 100.

[0238] Also, in the second embodiment, a three-way valve (second on-off valve) 172 of a three-position closed center type that is electromagnetically driven is connected between the second flow path 126 and the air supply source 112. The three-way valve 172 has two output portions.

[0239] One of the two output portions is connected to the second flow path 126, and the other output portion is connected to one end of a connection flow path 174. The other end of the connection flow path 174 is connected to the first flow path 110.

[0240] The air supply source 112 is connected to the input portion of the three-way valve 172. The three-way valve 172 is controlled to be in any one of a first open state in which air from the air supply source 112 is output to the second flow path 126, a second open state in which the air is output to the connection flow path 174, and a closed state in which neither the air is output to the second flow path 126 nor the air is output to the connection flow path 174.

[0241] In the tool holding jig 78 of the second embodiment, the ejector 116 described in the first embodiment is not mounted, and the air supply source 112 is arranged outside the tool holding jig 78. Thus, there is an advantage that the tool holding jig 78 can be made compact.

[0242] In addition, the first valve 114, the pressure measurer 118, the three-way valve 172, and the like can be arranged outside the exchange device 76, or can be mounted integrally with the frame 98 to the tool holding jig 78.

[0243] In the pressing flange holding step S10 using the tool holding jig 78 of the second embodiment, after the three-way valve 172 is controlled to the closed state as shown in FIG. 8, the first valve 114 is brought to the open state. Thus, the pressing flange 36 is suction-held by the flange holding portion 100. Figure 17

[0244] Further, in the cutting tool pulling-in step S30 after the pressing flange approaching step S20, after the first valve 114 is brought to the open state, the three-way valve 172 is brought to the first open state. Thus, a rotational flow is generated by the air ejected from the opening 124c.

[0245] By the rotational flow, a negative pressure is generated in the non-contact suction portion 124, and the cutting tool 34 is pulled in to the flange face 36c. Subsequently, with the first valve 114 in the open state, the three-way valve 172 is brought to the closed state. Thus, the cutting tool 34 is suction-held by the flange face 36c (cutting tool holding step S40) (refer to FIG. 9). Figure 17

[0246] On the other hand, after the mounting step S70, when air is ejected from the through-hole 36e, after the first valve 114 is brought to the closed state, the three-way valve 172 is brought to the second open state. Thus, air is ejected from the flange holding portion 100.

[0247] At this time, the flange holding portion 100, the first flow path 110, the three-way valve 172, the connection flow path 174, and the like function as an ejection unit. Figure 18 is a view showing a case where the cutting tool 34 is detached. Thus, the cutting tool 34 can be separated from the pressing flange 36.

[0248] In addition, the tool holding jig 78 of the second embodiment can be mounted to the exchange device 76 in a manner that it is moved by a moving unit including the lifting mechanism 60 shown in FIG. 1, or can be mounted to the cutting device 2 in a manner that it can be moved by hand by an operator. Figure 4

[0249] Next, the third embodiment will be described. Figure 19 ​​​This is a perspective view of the cutting device 2 according to the third embodiment. The cutting device 2 of the third embodiment differs from the one in that the storage box 176 of the tool storage plate 140 is arranged between the elevator 6 and the box 8.

[0250] A door (not shown) that can be opened and closed is provided on the side of the cleaning unit 10 of the storage box 176. When the knife storage plate 140 is removed from the storage box 176, the elevator 6 is raised, so that the storage box 176 is moved to approximately the same height as the pair of guide rails 14.

[0251] Then, the door (not shown) of the storage box 176 is opened, and the tool storage plate 140 is pulled out onto a pair of guide rails 14 using the holding mechanism 52b of the first conveying unit 52. Afterward, the tool storage plate 140 is moved onto the temporary placement cover 134 using the adsorption unit 52a.

[0252] Furthermore, as a variation of the third embodiment, the tool storage plate 140 can also be housed in the box 8. Moreover, the structure and method of the above embodiments can be appropriately modified and implemented as long as they do not depart from the scope of the present invention. Each embodiment and its variations can also be combined with other embodiments.

[0253] Furthermore, the tool holding fixture 78 is not limited to holding the cutting tool 34, but can also attract and hold the dressing plate. The tool holding fixture 78 can attract and hold the dressing plate using the flange holding part 100, or it can attract and hold the dressing plate using the non-contact attraction part 124.

Claims

1. A tool holding jig that holds a washer-type cutting tool via a ring-shaped pressing flange installed to a front end portion of a main shaft in a manner of sandwiching the cutting tool with a receiving flange fixed to the front end portion, characterized by comprising: a ring-shaped flange holding portion that suction-holds a first ring surface of the pressing flange; and a ring-shaped non-contact suction portion that is arranged at an outer peripheral portion of the flange holding portion, generates negative pressure by jetting fluid toward an outer peripheral portion of the pressing flange held by the flange holding portion, and thereby draws the cutting tool toward the pressing flange, the cutting tool drawn toward the pressing flange by the non-contact suction portion is held to the pressing flange by suction force acting from the flange holding portion via a plurality of through holes provided in the pressing flange in a manner of passing from a second ring surface to the first ring surface, the second ring surface being located on the opposite side of the pressing flange from the first ring surface and contacting one surface of the cutting tool, the non-contact suction portion jets fluid in a manner of generating a rotational flow of the fluid around the outer peripheral portion of the pressing flange, and thereby suction-attracts and draws the cutting tool toward the second ring surface of the pressing flange.

2. The tool holding jig according to claim 1, characterized in that the non-contact suction portion has: a ring-shaped convex portion; and a plurality of openings provided at an outer peripheral side surface of the ring-shaped convex portion, each of the plurality of openings is connected to a flow path in a manner of jetting fluid at a prescribed angle inclined with respect to a tangential direction of the outer peripheral side surface.

3. The tool holding jig according to claim 1 or 2, characterized in that the flange holding portion includes a ring-shaped pad portion that contacts the first ring surface of the pressing flange.

4. The tool holding jig according to claim 1 or 2, characterized in that the flange holding portion is connected to a first flow path that generates negative pressure acting on the flange holding portion via a first on-off valve, and the non-contact suction portion is connected to a second flow path that supplies fluid to the non-contact suction portion via a second on-off valve.

5. The tool holding jig according to claim 4, characterized by further comprising: a pressure measurer that measures negative pressure generated in the first flow path; and a suction determination portion that determines whether or not the pressing flange is suctioned by the flange holding portion by comparing the negative pressure of the first flow path measured by the pressure measurer with a first pressure, and determines whether or not the cutting tool is suctioned by the second ring surface of the pressing flange by comparing the negative pressure of the first flow path measured by the pressure measurer with a second pressure that is larger than the first pressure.

6. The tool holding jig according to claim 1 or 2, characterized in that the flange holding portion has a positioning fitting portion that fits with a cylindrical convex portion arranged in a manner of passing through an opening in the ring-shaped pressing flange.

7. The tool holding jig according to claim 1 or 2, characterized by further comprising: ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ a camera unit that photographs a mark formed on the one face of the cutting tool and including information related to a kind of the cutting tool; and a mark reading unit that reads the mark photographed by the camera unit.

8. The tool holding jig according to claim 1 or 2, wherein the flange holding portion is connected to a third flow path via a third on-off valve, the cutting tool is separated from the second annular face of the pressing flange by ejecting fluid from the third flow path toward the cutting tool held by the flange holding portion on the second annular face of the pressing flange.

9. A cutting device having a cutting unit in which a cutting tool is attached to a receiving flange fixed to a front end portion of a spindle, characterized by the cutting device having: a tool storage plate that stores the cutting tool; a replacement device that replaces the cutting tool attached to the receiving flange; and a moving unit that moves the replacement device between a replacement position at which the cutting tool is replaced and a retreat position, the replacement device having: the tool holding jig according to any one of claims 1 to 8; a nut holding portion that holds a pressing nut fastened to the receiving flange; and a nut turning portion that turns the pressing nut.

10. A method of attaching a cutting tool using a tool holding jig to attach a grommet-type cutting tool to a receiving flange fixed to a front end portion of a spindle, characterized by the tool holding jig having: an annular flange holding portion that attractively holds a first annular face of an annular pressing flange attached to the front end portion; an annular non-contact suction portion disposed at an outer peripheral portion of the flange holding portion that generates a negative pressure by ejecting fluid toward an outer peripheral portion of the pressing flange held by the flange holding portion to draw the cutting tool close to the pressing flange, the pressing flange having a plurality of through holes provided in a manner that passes from a second annular face to the first annular face, the second annular face being located on a side of the pressing flange opposite the first annular face and contacting one face of the cutting tool, the non-contact suction portion attracting and drawing the cutting tool close to the second annular face of the pressing flange by ejecting fluid in a manner that generates a swirling flow of fluid around the outer peripheral portion of the pressing flange, the method of attaching the cutting tool having steps of: a pressing flange holding step of attractively holding, by the flange holding portion, the first annular face of the pressing flange on which the second annular face is supported by a tool storage plate; a pressing flange approaching step of bringing the second annular face of the attractively held pressing flange close to the cutting tool placed on the tool storage plate so that the distance between the second annular face and the cutting tool is below a prescribed length; a cutting tool drawing step of, after the pressing flange approaching step, attracting the cutting tool by generating a negative pressure from the non-contact suction portion to draw the cutting tool close to the second annular face; a cutting tool holding step of holding the cutting tool drawn close to the second annular face in the cutting tool drawing step on the second annular face by an attractive force from the plurality of through holes; and mounting step of mounting the cutting tool and the pressing flange on the receiving flange in a manner of clamping the cutting tool with the receiving flange and the pressing flange in a state where the cutting tool is held on the second annular face of the pressing flange by the attractive force, while the main shaft is fixed to the receiving flange.

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