Apparatus for manufacturing display devices

Abstract

An apparatus for manufacturing a display device, the apparatus including a droplet discharger including a nozzle configured to discharge a droplet, a first detector on a falling path of the droplet falling from the droplet discharger and configured to detect a shape of the droplet, a second detector spaced apart from the first detector and configured to detect the shape of the droplet falling from the droplet discharger, and a controller configured to calculate at least one of a volume of the droplet, a falling speed of the droplet, a falling path of the droplet, and a discharge angle at which the droplet is discharged from the nozzle, based on results detected by the first detector and the second detector.

Description

[0001] Cross-reference to related applications

[0002] This application claims priority and benefit to Korean Patent Application No. 10-2020-0048858, filed with the Korean Intellectual Property Office on April 22, 2020, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] One or more example embodiments relate to an apparatus for manufacturing a display device. Background Technology

[0004] In recent years, mobile electronic devices have become widely used. Recently, in addition to small electronic devices such as mobile phones, tablet computers have also been utilized as mobile electronic devices.

[0005] Such mobile electronic devices include display devices to support various functions or provide users with visual information such as images or videos. As the size of other components used to drive the display device decreases, the area occupied by the display device in mobile electronic devices tends to increase, and structures that are flexible in a flat state to have specific angles have been developed.

[0006] To manufacture a display device, various layers can be formed. In this case, at least one layer can be formed when droplets are deposited de novo onto a substrate. In this case, for accurate image representation of the display device, droplets can be deposited at desired locations using a de novo deposition method.

[0007] The information disclosed in this background section is only intended to enhance the understanding of the background, and therefore, the information discussed in this background section does not necessarily constitute prior art. Summary of the Invention

[0008] Typically, when a droplet is dropped onto a substrate, its volume is measured after the droplet has been dropped onto the substrate. In this case, it is impossible to accurately measure the droplet volume, and because volume measurement requires a table or membrane for the experiment, it can consume a significant amount of space and cost. One or more embodiments provide an apparatus for accurately measuring droplets used in the manufacture of display devices, in which the structure and cost are simplified.

[0009] Additional aspects will be set forth in part in the description which follows, and will be apparent in part from the description, or may be learned by practicing the embodiments presented in this disclosure.

[0010] According to one or more embodiments, an apparatus for manufacturing a display device includes: a droplet emitter including a nozzle configured to emit droplets; a first detector on the fall path of a droplet falling from the droplet emitter and configured to detect the shape of the droplet; a second detector spaced apart from the first detector and configured to detect the shape of the droplet falling from the droplet emitter; and a controller configured to calculate at least one of the following based on the results detected by the first and second detectors: droplet volume, droplet fall velocity, droplet fall path, and discharge angle of the droplet emitted from the nozzle.

[0011] According to some example embodiments, the first detector and the second detector may each include a confocal microscope or a color confocal line sensor.

[0012] According to some example embodiments, the first detector and the second detector may be arranged in opposite directions relative to the droplet's fall path.

[0013] According to some example embodiments, the first detector and the second detector are configured to detect the local shape of the outer surface of a droplet falling from the droplet emitter at specific time intervals.

[0014] According to some example embodiments, the first detector and the second detector can be configured to detect the local shape of the outer surface of the droplet projected onto an arbitrary plane.

[0015] According to some example embodiments, the controller can be configured to calculate the outer surface of the droplet by connecting portions other than the local shape of the outer surface of the droplet detected by the first and second detectors.

[0016] According to some example embodiments, the controller is configured to calculate the three-dimensional shape of the droplet by rotating the calculated outer surface of the droplet relative to the droplet's fall path, and to calculate the volume of the droplet by using the three-dimensional shape of the droplet.

[0017] According to some example embodiments, the controller can be configured to calculate the center of the droplet by using the three-dimensional shape of the droplet.

[0018] According to some example embodiments, the device may further include: a third detector spaced apart from the first detector along the droplet's fall path; and a fourth detector arranged opposite to the third detector relative to the droplet's fall path.

[0019] According to some example embodiments, the device may further include: a first reflector, corresponding to a third detector, and configured to deflect laser light emitted from the third detector and light reflected from the droplet; and a second reflector, corresponding to a fourth detector, and configured to deflect laser light emitted from the fourth detector and light reflected from the droplet.

[0020] According to some example embodiments, the first detector and the second detector can be configured to detect droplets at specific time intervals, and the controller can be configured to calculate the droplet's fall path or the droplet's discharge angle by connecting the centers of the droplets detected by the first detector and the second detector.

[0021] According to some example embodiments, the first detector and the second detector can be configured to detect a droplet at specific time intervals as the droplet falls, and the controller can be configured to calculate the droplet's falling velocity based on the distance the droplet travels within a specific time point.

[0022] According to some example embodiments, the device may further include a containment unit configured to contain droplets discharged from the nozzle.

[0023] According to one or more embodiments, an apparatus for manufacturing a display device includes: a droplet emitter including a nozzle configured to emit droplets; a plurality of detectors on the fall path of a droplet falling from the droplet emitter; and a controller configured to calculate at least one of the following based on the detection results of the plurality of detectors: droplet volume, droplet fall velocity, droplet fall path, and discharge angle of the droplet emitted from the nozzle.

[0024] According to some example embodiments, the plurality of detectors may each include: a first detector, located on the fall path of the droplets falling from the droplet emitter and configured to detect the shape of the droplets; and a second detector, arranged opposite to the first detector relative to the fall path of the droplets and configured to detect the shape of the droplets falling from the droplet emitter.

[0025] According to some example embodiments, the plurality of detectors may further include: a third detector spaced apart from the first detector along the droplet's fall path; and a fourth detector arranged opposite to the third detector relative to the droplet's fall path.

[0026] According to some example embodiments, the device may further include: a first reflector, corresponding to a third detector, and configured to deflect laser light emitted from the third detector and light reflected from the droplet; and a second reflector, corresponding to a fourth detector, and configured to deflect laser light emitted from the fourth detector and light reflected from the droplet.

[0027] According to some example embodiments, the multiple detectors may further include a confocal microscope or a color confocal line sensor.

[0028] According to some example embodiments, multiple detectors can be configured to detect the local shape of droplets falling from the droplet emitter at specific time intervals.

[0029] According to some example embodiments, the controller can be configured to calculate the outer surface of the droplet by connecting portions other than the local shape of the outer surface of the droplet detected by multiple detectors, calculate the three-dimensional shape of the droplet by rotating the calculated outer surface of the droplet relative to the droplet's fall path, and calculate the volume of the droplet by using the three-dimensional shape of the droplet.

[0030] Other aspects, features, and characteristics of some exemplary embodiments will become more apparent from the following detailed description, claims, and drawings used to carry out this disclosure, in addition to those described above. Attached Figure Description

[0031] The above and other aspects, features, and characteristics of specific exemplary embodiments of the present disclosure will become more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0032] Figure 1 These are schematic perspective views of an apparatus for manufacturing a display device according to some example embodiments;

[0033] Figure 2 This is a schematic perspective view of a portion of an apparatus for manufacturing a display device according to some example embodiments;

[0034] Figure 3 yes Figure 2 A schematic plan view of the local shape of the droplet at the first position;

[0035] Figure 4 Is using Figure 3 A schematic perspective view of the three-dimensional shape of a droplet calculated from its local shape.

[0036] Figure 5 yes Figure 2 A schematic plan view of the local shape of the droplet at the second position;

[0037] Figure 6 Is using Figure 5 A schematic perspective view of the three-dimensional shape of a droplet calculated from its local shape.

[0038] Figure 7 yes Figure 2 A schematic plan view of the local shape of the droplet at the third position;

[0039] Figure 8 Is using Figure 7 A schematic perspective view of the three-dimensional shape of a droplet calculated from its local shape.

[0040] Figure 9 From Figure 2A schematic perspective view of the droplet discharge path of the droplets emitted by the droplet emitter and the point on which the droplets are dropped onto the display substrate.

[0041] Figure 10 This is a schematic perspective view of a portion of an apparatus for manufacturing a display device according to some example embodiments;

[0042] Figure 11 It is located in Figure 10 A schematic planar view of the local shape of the droplet at the first time point;

[0043] Figure 12 It is located in Figure 10 A schematic planar view of the local shape of the droplet at the second time point;

[0044] Figure 13 It is located in Figure 10 A schematic planar view of the local shape of the droplet at the third time point;

[0045] Figure 14 This is a schematic perspective view of the planar shape of a droplet detected using a device for manufacturing a display device, according to some example embodiments;

[0046] Figure 15 This is a schematic perspective view of a portion of an apparatus for manufacturing a display device according to some example embodiments;

[0047] Figure 16 This is a schematic perspective view of a portion of an apparatus for manufacturing a display device according to some example embodiments;

[0048] Figure 17 This is a schematic plan view of a display device manufactured using equipment for manufacturing display devices, according to some example embodiments; and

[0049] Figure 18 This is a schematic cross-sectional view of a display device manufactured using equipment for manufacturing display devices, according to some example embodiments. Detailed Implementation

[0050] Reference will now be made in more detail to aspects of some exemplary embodiments illustrated in the accompanying drawings, in which the same reference numerals throughout refer to the same elements. In this respect, the embodiments may take different forms and should not be construed as limited to the description set forth herein. Therefore, embodiments are described below only by reference to the accompanying drawings to explain aspects of this description. As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items. Throughout this disclosure, the expression “at least one of a, b, and c” indicates only a, only b, only c, a and b, a and c, b and c, a, b, and c, or all or variations thereof.

[0051] Because this disclosure allows for various modifications and numerous embodiments, specific embodiments will be illustrated in the accompanying drawings and described in more detail in the written description. A full understanding of this disclosure, its advantages, and the objectives achieved by implementing this disclosure will be obtained by referring to the accompanying drawings, which illustrate exemplary embodiments according to this disclosure. However, this disclosure may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

[0052] It will be understood that although the terms “first,” “second,” etc., may be used in this document to describe various components, these components should not be limited by these terms. These terms are only used to distinguish one component from another.

[0053] As used herein, unless the context clearly indicates otherwise, the singular forms “one” and “the” are intended to include the plural forms as well.

[0054] It will be further understood that the terms “comprising” and / or “including” as used herein specify the presence of a stated feature or component, but do not exclude the presence or addition of one or more other features or components.

[0055] It will be understood that when a layer, area, or component is referred to as being "formed on" another layer, area, or component, that layer, area, or component may be formed directly or indirectly on the other layer, area, or component. That is, for example, intermediate layers, areas, or components may exist.

[0056] For ease of illustration, the dimensions of the components in the accompanying drawings may be exaggerated. In other words, because the dimensions and thicknesses of the components in the accompanying drawings are arbitrarily illustrated for ease of illustration, the following embodiments are not limited thereto.

[0057] According to some examples, expressions such as "A and / or B" indicate A, B, or A and B. Furthermore, expressions such as "at least one of A and B" indicate A, B, or A and B.

[0058] In the example embodiments described below, the description of a line extending "in a first direction or a second direction" includes the line extending in a straight line, and includes the line extending in a zigzag shape or curve along the first direction or the second direction.

[0059] In the embodiments described below, when a component is referred to as "in a plane," it should be understood that the component is viewed from above, and when a component is referred to as "in a cross-section," it should be understood that the component is vertically cut and viewed from the side. In the embodiments described below, when components "overlap" each other, the components overlap both "in a plane" and "in a cross-section."

[0060] In the following description, aspects of some exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings, and the same reference numerals in the drawings refer to the same reference elements.

[0061] Figure 1 These are schematic perspective views of an apparatus for manufacturing a display device according to some example embodiments, and Figure 2 This is a schematic perspective view of a portion of an apparatus for manufacturing a display device, according to some example embodiments.

[0062] refer to Figure 1 and Figure 2 The apparatus 100 for manufacturing a display device may include a support 110, a frame 120, a moving unit 130, a droplet emitter 140, a detector 150, a receiving unit 160, and a controller 180.

[0063] The support member 110 may include a platform 111, a guide member 112, a substrate moving member 113, and a substrate rotating member 114. The platform 111 may include alignment marks for aligning the display substrate S.

[0064] The display substrate S can be a substrate used in a display device under manufacture. The display substrate S may include glass or polymer resin, such as polyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyimide, polycarbonate (PC), cellulose triacetate (TAC), or cellulose acetate propionate.

[0065] The guide members 112 can be spaced apart from each other on both sides of the platform 111, while the substrate moving member 113 is located between the guide members 112. The length of the guide member 112 can be greater than the length of the edge of the display substrate S. In this case, the length of the guide member 112 and the length of the edge of the display substrate S can be... Figure 1 Measured in the X direction.

[0066] According to some example embodiments, the frame 120 may be located on the guide member 112. According to some example embodiments, the guide member 112 may include a specific track to enable the frame 120 to move linearly along the length of the guide member 112. For example, the guide member 112 may include a linear motion track.

[0067] The substrate moving member 113 can be arranged on the platform 111. The substrate moving member 113 can extend along the length of the guide member 112. For example, refer to... Figure 1 The substrate moving member 113 may extend in the X direction. Furthermore, the substrate moving member 113 may include a guide rail to enable the substrate rotating member 114 to move linearly. For example, the substrate moving member 113 may include a linear motion track.

[0068] The substrate rotating member 114 can be arranged to rotate on the substrate moving member 113. When the substrate rotating member 114 rotates, the display substrate S arranged on the substrate rotating member 114 can rotate. According to some example embodiments, the substrate rotating member 114 can rotate about a rotation axis perpendicular to a surface of the platform 111 on which the display substrate S is located. When the substrate rotating member 114 rotates about a rotation axis perpendicular to a surface of the platform 111 on which the display substrate S is located, the display substrate S arranged on the substrate rotating member 114 can also rotate about a rotation axis perpendicular to the surface of the platform 111 on which the display substrate S is located. In this case, after the display substrate S is arranged on the substrate rotating member 114, the substrate rotating member 114 can fix the display substrate S. For example, the substrate rotating member 114 may include one of a vacuum chuck, an electrostatic chuck, and an adhesive chuck.

[0069] The frame 120 can be arranged on the guide members 112. That is, the frame 120 can be arranged on the guide members 112 spaced apart from each other, and the substrate moving member 113 is between the guide members 112.

[0070] The frame 120 is movable along the length of the guide member 112. According to some example embodiments, the frame 120 can move linearly, either manually or automatically, by further including motors, cylinders, etc. For example, the frame 120 can move linearly automatically due to linear motion blocks that move along a linear motion track.

[0071] The moving unit 130 can move linearly on the rack 120. For example, the rack 120 may include specific tracks to enable the moving unit 130 to move linearly. In this case, the droplet emitter 140 may be arranged on the moving unit 130 and move together with the moving unit 130 as the moving unit 130 moves.

[0072] The moving unit 130 and the droplet emitter 140 can be arranged in various ways. For example, the moving unit 130 and the droplet emitter 140 can each be provided as a single unit. In this case, the droplet emitter 140 may include a head and at least one nozzle disposed on the head to emit droplets DR.

[0073] According to some example embodiments, multiple droplet emitters 140 may be provided, and a single moving unit 130 may be provided. In this case, the droplet emitters 140 may be located on a single moving unit 130 and may move simultaneously as the moving unit 130 moves. In this case, the droplet emitter 140 may include at least one head comprising at least one nozzle.

[0074] According to some example embodiments, the moving unit 130 and the droplet emitter 140 may each be provided as a plurality. In this case, one or more droplet emitters 140 may be located on one moving unit 130, and other droplet emitters 140 may be located on another moving unit 130.

[0075] For convenience, the following description will primarily focus on the case where a droplet emitter 140 is located on a moving unit 130.

[0076] The moving unit 130 may include multiple moving units. In this case, the number of moving units 130 may correspond to the number of droplet emitters 140. For example, the moving unit 130 may include a first moving unit 131, a second moving unit 132, and a third moving unit 133.

[0077] The first moving unit 131 and the second moving unit 132 can be separated from each other, and the second moving unit 132 and the third moving unit 133 can also be separated from each other. The gap between the first moving unit 131 and the second moving unit 132 can be the same as the gap between the second moving unit 132 and the third moving unit 133. According to some example embodiments, the gap between the first moving unit 131 and the second moving unit 132 can be different from the gap between the second moving unit 132 and the third moving unit 133. In the above cases, the first moving unit 131 to the third moving unit 133 can move independently.

[0078] The moving unit 130 can move linearly on the rack 120. For example, the moving unit 130 can move along the length of the rack 120. For example, at least one of the first moving units 131 to the third moving unit 133 can move in the +Y direction or the -Y direction.

[0079] According to some example embodiments, the moving unit 130 can move linearly in a manual manner. According to some example embodiments, the moving unit 130 can move linearly automatically by means of a motor, cylinder, etc. For example, the moving unit 130 may include a linear motion block that moves along a linear motion track.

[0080] Droplet emitter 140 may be located on moving unit 130. For example, first droplet emitter 141 may be located on first moving unit 131. As another example, second droplet emitter 142 may be located on second moving unit 132. As another example, third droplet emitter 143 may be located on third moving unit 133.

[0081] The droplet emitter 140 can discharge droplets DR onto the display substrate S or the receiving unit 160. In this case, the droplet DR can be liquid crystal, alignment liquid, or red, green, and blue ink in which pigments and solvents are mixed. According to some example embodiments, the droplet DR can be a high molecular weight organic material or a low molecular weight organic material corresponding to the emitting layer of the organic light-emitting display device. According to some example embodiments, the droplet DR can include a solution containing inorganic particles such as quantum dots.

[0082] The amount of droplet DR provided by the first droplet emitter 141 to the third droplet emitter 143 can be adjusted. In this case, the first droplet emitter 141 to the third droplet emitter 143 can be electrically connected to the controller 180 respectively. Therefore, the amount of droplet DR emitted from the first droplet emitter 141 to the third droplet emitter 143 can be adjusted by the controller 180 respectively. In the above case, at least one of the first droplet emitter 141 to the third droplet emitter 143 may include at least one nozzle for emitting a droplet DR. In this case, when multiple nozzles are present, at least one nozzle can provide droplet DR to the following reference. Figure 18 The described opening 19OP. For example, one nozzle can provide the droplet DR into one opening 19OP. According to some example embodiments, at least two nozzles can provide the droplet DR into one opening 19OP.

[0083] Detector 150 can detect and measure the shape of the droplet DR emitted from droplet emitter 140. For example, detector 150 can detect and measure the local shape of the outer surface of the droplet DR emitted from droplet emitter 140, or detect and measure the local shape of the cross-section of the droplet DR emitted from droplet emitter 140. Detector 150 can be provided in multiple ways. For example, detector 150 may include a first detector 151 and a second detector 152. The first detector 151 and the second detector 152 may be parallel to each other and spaced apart from each other in the X direction.

[0084] Detector 150 can be of various types. For example, detector 150 may include a confocal microscope, an interference microscope, or a color confocal line sensor. In this case, a confocal microscope can be used to obtain two-dimensional images of an object with different depths and to reconstruct a three-dimensional structure based on the two-dimensional image. Examples of confocal microscopes may include color confocal microscopes and color line confocal microscopes. Interference microscopes can be used to examine changes in fine structural irregularities and phase transitions, and to measure fixed quantities. Examples of interference microscopes may include laser interference microscopes and white light interference microscopes. In the following description, for convenience, the case where detector 150 includes a color line confocal microscope will be primarily described.

[0085] The first detector 151 can be provided in multiple forms, and thus detect multiple droplet DRs. According to some example embodiments, the first detector 151 can be provided in multiple forms, and one first detector 151 can be arranged to correspond to one droplet emitter 140 and detect droplet DRs emitted from one droplet emitter 140. According to some example embodiments, the first detector 151 can be provided in multiple forms, and some of the first detectors 151 can detect at least one droplet DR emitted from some of the droplet emitters 140, and other first detectors 151 can detect at least one droplet DR emitted from other droplet emitters 140.

[0086] Furthermore, the second detector 152 can be provided as a single detector, detecting multiple droplet DRs simultaneously. According to some example embodiments, the second detector 152 can be provided as a plurality of detectors, and one second detector 152 can be arranged corresponding to one droplet emitter 140 and detecting droplet DRs emitted from one droplet emitter 140. According to some example embodiments, the second detector 152 can be provided as a plurality of detectors, and some of the second detectors 152 can detect at least one droplet DR emitted from some of the droplet emitters 140, while other second detectors 152 can detect at least one droplet DR emitted from other droplet emitters 140.

[0087] The receiving unit 160 may be located between the guiding members 112. In this case, the receiving unit 160 may temporarily store the droplet DR when it falls from the droplet emitter 140 and is measured. The receiving unit 160 may be located on the platform 111. According to some example embodiments, the receiving unit 160 may be located on the lower surface of the platform 111. In this case, a hole may be formed in the portion of the platform 111 on which the receiving unit 160 is located.

[0088] The controller 180 can calculate at least one of the three-dimensional shape of the droplet DR, the falling velocity of the droplet DR, the falling path of the droplet DR, and the discharge angle of the droplet DR based on the measurement results of the detector 150. In addition, the controller 180 can have complete control over the equipment 100 used to manufacture the display device.

[0089] The apparatus 100 described above for manufacturing a display device can provide droplet DR to a display substrate S and form an organic layer on the display substrate S. In this case, it is necessary to accurately discharge the droplet DR discharged from the apparatus 100 onto the display substrate S. For this purpose, when discharging the droplet DR to the receiving unit 160 after arranging each droplet discharger 140 corresponding to the receiving unit 160, the droplet DR can be detected by a first detector 151 and a second detector 152. According to some example embodiments, each droplet discharger 140 can discharge the droplet DR to the display substrate S, and the first detector 151 and the second detector 152 can detect the droplet DR. According to some example embodiments, the droplet DR can be provided from the droplet discharger 140 to a test substrate having the same shape as the display substrate S and located on a support plate, which is located separately on the portion where the substrate rotation member 114 or the receiving unit 160 is located, and the droplet DR can also be detected by the first detector 151 and the second detector 152. However, for convenience, the description will mainly focus on the situation where the droplet emitter 140 discharges droplets DR into the receiving unit 160 and the first detector 151 and the second detector 152 can detect the droplets DR.

[0090] The first detector 151 and the second detector 152 can detect droplets DR emitted from the droplet emitter 140 to the receiving unit 160. The first detector 151 and the second detector 152 can be located in the fall path of the droplets DR falling from the droplet emitter 140. Furthermore, the first detector 151 and the second detector 152 can be configured to be opposite each other relative to the fall path of the droplets DR. For example, the first detector 151 and the second detector 152 can be separated from each other in the X direction.

[0091] The first detector 151 and the second detector 152 can detect the local shape of the outer surface of the discharged droplet DR. For example, detector 150 can irradiate the outer surface of the droplet DR with laser light into the shape of the droplet DR. Figure 2 The laser reflected from the droplet DR is detected on the first plane SF1, which is parallel to the YZ plane.

[0092] For example, the position of the droplet DR falling from the droplet emitter 140 can vary over time. For instance, when the droplet DR passes a first time point after falling from the droplet emitter 140, the droplet DR located at the first position PO1 may have a long tail due to the suction from the nozzle of the droplet emitter 140. Furthermore, when the droplet DR passes a second time point after falling from the droplet emitter 140, the droplet DR located at the second position PO2 may have a shorter tail than the droplet DR located at the first position PO1. When the droplet DR passes a third time point after falling from the droplet emitter 140, the droplet DR located at the third position PO3 may have a shorter tail than the droplet DR located at the second position PO2. Therefore, the shape of the droplet DR can be almost spherical.

[0093] As described above, the first detector 151 and the second detector 152 can detect the droplet DR at a first time point, a second time point, and a third time point. In this case, the interval between the time when the droplet DR begins to fall from the droplet emitter 140 and the first time point, the interval between the first time point and the second time point, and the interval between the second time point and the third time point can be the same as each other. That is, the first detector 151 and the second detector 152 can detect the position of the falling droplet DR according to time by detecting the droplet DR at specific time intervals. Figure 2 The illustration shows that the first detector 151 and the second detector 152 can detect droplet DR from a first time point to a third time point, but one or more embodiments are not limited thereto. The first detector 151 and the second detector 152 can detect droplet DR at multiple time points. For example, the first detector 151 and the second detector 152 can detect droplet DR from a first time point to a tenth time point, from a first time point to a twentieth time point, or from a first time point to an Nth time point (where N is a natural number).

[0094] As described above, the controller 180 can calculate the three-dimensional shape of the droplet DR based on the local shape of the outer surface of the droplet DR. In this case, the controller 180 can calculate the volume of the droplet DR based on its three-dimensional shape. Furthermore, the controller 180 can calculate the droplet DR's falling path based on the positions of the droplet DR detected by the first detector 151 and the second detector 152 at each time point. The controller 180 can calculate the droplet DR's discharge angle by connecting the droplet DR's falling path to the initial point where the droplet DR is discharged and by calculating the angle formed by the length direction of the nozzle of the droplet discharger 140 and the falling path. The controller 180 can calculate the droplet DR's discharge velocity based on the position of the droplet DR at each time.

[0095] The controller 180 can control at least one of the droplet emitter 140 and the moving unit 130 based on at least one of the droplet DR's volume, fall path, discharge angle, and discharge velocity.

[0096] For example, the controller 180 can control the amount or rate of droplet DR emitted from the droplet emitter 140. Furthermore, the controller 180 can change the position of the droplet emitter 140 using the moving unit 130 and adjust the emission angle and fall path of the droplet DR to position it at a desired location. According to some example embodiments, the controller 180 can clean the droplet emitter 140 based on the emission angle or fall path of the droplet DR, or control the moving speed of the display substrate S or the moving speed of the droplet emitter 140. The control methods described above will be described in more detail below.

[0097] The methods for measuring the droplet DR's fall path, fall velocity, discharge angle, and volume will be described in more detail below.

[0098] Figure 3 yes Figure 2 A schematic plan view of the local shape of the droplet DR at the first position PO1, and Figure 4 Is using Figure 3 A schematic perspective view of the three-dimensional shape of a droplet calculated from the local shape of the droplet DR.

[0099] refer to Figure 3 and Figure 4 When the droplet DR is located at a first position PO1 after being discharged from the droplet emitter 140 at a first time point, the first detector 151 and the second detector 152 can detect a portion of the first plane SF1 of the droplet DR located at the first position PO1. In this case, since the range of the laser beams emitted from the first detector 151 and the second detector 152 differs according to the color of the laser beam, the first detector 151 and the second detector 152 can respectively detect the wavelength of the laser beam reflected from the droplet DR and returned to the first detector 151 and the second detector 152, and can detect the distance from the first detector 151 and the second detector 152 to the outer surface of the droplet DR. In this case, the first detector 151 and the second detector 152 can be arranged in a direction perpendicular to the falling path of the droplet DR. That is, the first detector 151 and the second detector 152 can be located on the side of the falling path of the droplet DR (e.g., Figure 3 (in the X direction). Furthermore, the first detector 151 and the second detector 152 can be arranged on opposite sides of the droplet DR's fall path. For example, when the first detector 151 is arranged in the +X direction relative to the droplet DR's fall path, the second detector 152 can be arranged in the -X direction.

[0100] like Figure 3 As shown, the first detector 151 and the second detector 152 can detect the falling path of the droplet DR, or they can detect a portion of the outer surface of the droplet DR located on the first plane SF1 parallel to the falling path of the droplet DR. More specifically, the first detector 151 can detect a portion of the outer surface DR_1a of the droplet DR located on the first plane SF1, and the second detector 152 can detect a portion of the outer surface DR_1b of the droplet DR located on the first plane SF1.

[0101] The outer surfaces DR_1a and DR_1b of the droplet DR detected by the first detector 151 and the second detector 152 can be symmetrical about each other with respect to the center line CL. According to some example embodiments, the shapes of the outer surfaces DR_1a and DR_1b of the droplet DR detected by the first detector 151 and the second detector 152 can be different from each other with respect to the center line CL. In this case, the center line CL can be any line parallel to a straight line perpendicular to a surface of the display substrate S onto which the droplet DR is discharged, a straight line that is the same as or parallel to the falling path of the droplet DR, or a straight line formed by connecting the two ends of portions of the outer surfaces of the droplet DR detected by the first detector 151 and the second detector 152. For example, the center line CL can be any straight line in or parallel to the Z-axis direction.

[0102] When the shape of the outer surface of the droplet DR is detected by the first detector 151 and the shape is equal to or greater than a certain angle, the shape may no longer be detected. For example, when the first detector 151 is perpendicular to the shape of the outer surface of the droplet DR at 0 degrees, the shape of the outer surface of the droplet DR may not be detected when the angle formed by the first detector 151 and the shape of the outer surface of the droplet DR is equal to or greater than 75 degrees or 85 degrees.

[0103] Furthermore, when detecting the shape of the outer surface of the droplet DR using the second detector 152, the shape of the outer surface of the droplet DR may not be detected if the angle formed by the second detector 152 and the shape of the outer surface of the droplet DR is equal to or greater than a certain range. For example, when the second detector 152 is perpendicular to the shape of the outer surface of the droplet DR at 0 degrees, the shape of the outer surface of the droplet DR may not be detected if the angle formed by the second detector 152 and the shape of the outer surface of the droplet DR is equal to or greater than 75 degrees or 85 degrees.

[0104] Therefore, according to some example embodiments, the controller 180 of the device 100 can calculate the outer surface of the droplet DR by connecting portions other than the local shapes of the outer surfaces DR_1a and DR_1b of the droplet DR detected by the first detector 151 and the second detector 152. For example, the controller 180 can calculate the shape of the outer surface of the droplet DR by connecting portions of the local shapes of the outer surface of the droplet DR that are not detected by the first detector 151 and the second detector 152 to each other relative to the centerline CL. In this case, the portions of the local shapes of the outer surface of the droplet DR that are not detected by the first detector 151 and the second detector 152 are connected to each other either by a straight line or by a curve through which the center of the droplet DR is calculated.

[0105] The controller 180 can calculate the three-dimensional shape of the droplet DR using the calculated shape of the droplet DR. For example, the controller 180 can calculate the three-dimensional shape of the droplet DR by rotating the calculated outer surface of the droplet DR relative to the centerline CL. The controller 180 can store the three-dimensional shape of the droplet DR described above. In this case, the controller 180 can calculate the first center CE1 of the droplet DR. In this case, the first center CE1 can be the centroid of the three-dimensional shape of the droplet DR or the geometric center of the three-dimensional shape, etc.

[0106] As described above, controller 180 can calculate the droplet DR at... Figure 2 The X, Y, and Z axes relative to Figure 2 The controller 180 determines the location of a virtual point where the X, Y, and Z axes intersect. For example, the controller 180 can set the center of the nozzle end of the droplet DR from which it falls as a reference point, and compare this center with the calculated first center CE1 of the droplet DR to identify how much the first center CE1 of the droplet DR has moved from the reference point in the X, Y, and Z axis directions. In this case, the controller 180 can calculate the distance from the reference point to the first center CE1 of the droplet DR in the Y-axis direction. Furthermore, after calculating the first center CE1 of the droplet DR based on the detection results of the first detector 151 and the second detector 152, the controller 180 can calculate the distance from the reference point to the first center CE1 of the droplet DR in the X-axis direction. Additionally, the controller 180 can calculate the distance between the calculated first center CE1 of the droplet DR and the reference point in the Z-axis direction. The controller 180 can calculate each distance as described above, and then can calculate and store the X, Y, and Z coordinates of the first center CE1 of the droplet DR relative to the reference point.

[0107] Figure 5 yes Figure 2 A schematic plan view of the local shape of the droplet at the second position PO2, and Figure 6Is using Figure 5 A schematic perspective view of the 3D shape of a droplet calculated from its local shape.

[0108] refer to Figure 5 and Figure 6 When the second time point arrives after the droplet DR is discharged, the droplet DR can fall further from the first position PO1 and may be located at the second position PO2. The first detector 151 and the second detector 152 can detect the droplet DR located at the second position PO2. In this case, the method by which the first detector 151 and the second detector 152 detect the droplet DR can be the same as described above. In this case, the first plane SF1 formed thereon on some surfaces of the droplet DR detected by the first detector 151 and the second detector 152 can be... Figure 3 and Figure 4 The first plane SF1 is the same as or parallel to the plane.

[0109] like Figure 5 As shown, the first detector 151 and the second detector 152 can detect the falling path of the droplet DR, or they can detect a portion of the outer surface of the droplet DR located on the first plane SF1 parallel to the falling path of the droplet DR. More specifically, the first detector 151 can detect a portion of the outer surface DR_2a of the droplet DR located on the first plane SF1, and the second detector 152 can detect a portion of the outer surface DR_2b of the droplet DR located on the first plane SF1.

[0110] The outer surface DR_2a detected by the first detector 151 and the outer surface DR_2b detected by the second detector 152 can be symmetrical to each other with respect to the center line CL described above. According to some example embodiments, the shape of the outer surface DR_2a detected by the first detector 151 and the shape of the outer surface DR_2b detected by the second detector 152 can be different from each other with respect to the center line CL.

[0111] The controller 180 can calculate the outer surface of the droplet DR by connecting portions other than the local shapes of the outer surfaces DR_2a and DR_2b of the droplet DR detected by the first detector 151 and the second detector 152. For example, the controller 180 can calculate the shape of the outer surface of the droplet DR by connecting portions of the local shape of the outer surface of the droplet DR that are not detected by the first detector 151 and the second detector 152 relative to the center line CL. In this case, the portions of the local shape of the outer surface of the droplet DR that are not detected by the first detector 151 and the second detector 152 can be connected by a straight line or by a curve through the center of the calculated droplet DR.

[0112] The controller 180 can calculate the 3D shape of the droplet DR using the calculated outer surface of the droplet DR. More specifically, the controller 180 can calculate the 3D shape of the droplet DR by rotating the calculated outer surface of the droplet DR relative to the aforementioned centerline CL. The controller 180 can store the above-mentioned 3D shape of the droplet DR. In this case, the controller 180 can calculate the second center CE2 of the droplet DR. In this case, the second center CE2 can be the centroid of the 3D shape of the droplet DR or the geometric center of the 3D shape, etc.

[0113] The controller 180 can set the center of the droplet DR from the end of the nozzle of the droplet emitter 140 from which it falls as a reference point, and compare this center with the calculated second center CE2 of the droplet DR to identify how much the second center CE2 of the droplet DR has moved from the reference point in the X, Y, and Z axis directions. In this case, the controller 180 can calculate the distance from the reference point to the second center CE2 in the Y axis direction. Furthermore, after calculating the second center CE2 of the droplet DR based on the detection results of the first detector 151 and the second detector 152, the controller 180 can calculate the distance between the second center CE2 of the droplet DR and the reference point in the X axis direction. Furthermore, the controller 180 can calculate the distance between the second center CE2 of the droplet DR and the reference point in the Z axis direction. The controller 180 can calculate each distance as described above, and can calculate and store the X, Y, and Z coordinates of the second center CE2 of the droplet DR relative to the reference point.

[0114] Figure 7 yes Figure 2 A schematic plan view of the local shape of the droplet at the third position. Figure 8 Through Figure 7 A schematic perspective view of the 3D shape of the droplet calculated from its local shape, and Figure 9 From Figure 2 A schematic perspective view of the droplet discharge path of the droplet emitter and the point where the droplet falls on the display substrate.

[0115] refer to Figure 7 and Figure 8 When the third time point arrives after the droplet DR is discharged, the droplet DR can fall further from the second position PO2 and may be located at the third position PO3. The first detector 151 and the second detector 152 can detect the droplet DR located at the third position PO3. In this case, the method by which the first detector 151 and the second detector 152 detect the droplet DR can be the same as described above. In this case, the first plane SF1 formed on some surfaces of the droplet DR detected by the first detector 151 and the second detector 152 can be... Figure 3 and Figure 4 The first plane SF1 shown is the same as or parallel to it.

[0116] like Figure 7 As shown, the first detector 151 and the second detector 152 can detect the falling path of the droplet DR, or they can detect a portion of the outer surface of the droplet DR located on the first plane SF1 parallel to the falling path of the droplet DR. More specifically, the first detector 151 can detect a portion of the outer surface DR_3a of the droplet DR located on the first plane SF1, and the second detector 152 can detect a portion of the outer surface DR_3b of the droplet DR located on the first plane SF1.

[0117] The outer surface DR_3a detected by the first detector 151 and the outer surface DR_3b detected by the second detector 152 may be symmetrical to each other with respect to the center line CL described above. According to some example embodiments, the shape of the outer surface DR_3a detected by the first detector 151 and the shape of the outer surface DR_3b detected by the second detector 152 may be different from each other with respect to the center line CL described above.

[0118] The controller 180 can calculate the outer surface of the droplet DR by connecting portions other than the local shapes of the outer surfaces DR_3a and DR_3b of the droplet DR detected by the first detector 151 and the second detector 152. For example, the controller 180 can calculate the outer surface of the droplet DR by connecting portions of the local shapes of the outer surface of the droplet DR that are not detected by the first detector 151 and the second detector 152 relative to the center line CL. In this case, the portions of the local shapes of the outer surface of the droplet DR that are not detected by the first detector 151 and the second detector 152 can be connected by a straight line or by a curve through the center of the calculated droplet DR.

[0119] The controller 180 can calculate the 3D shape of the droplet DR using the calculated outer surface of the droplet DR. More specifically, the controller 180 can calculate the 3D shape of the droplet DR by rotating the calculated outer surface of the droplet DR relative to the aforementioned centerline CL. The controller 180 can store the above 3D shape of the droplet DR. In this case, the controller 180 can calculate the third center CE3 of the droplet DR. In this case, the third center CE3 can be the centroid of the 3D shape of the droplet DR or the geometric center of the 3D shape, etc. In this case, the 3D shape of the droplet DR at the third position PO3 can be the same as or similar to a sphere.

[0120] As described above, the controller 180 can set the center of the droplet DR from the end of the nozzle of the droplet emitter 140 from which it falls as a reference point, and compare this center with the calculated third center CE3 of the droplet DR to identify how much the third center CE3 of the droplet DR has moved from the reference point in the X-axis, Y-axis, and Z-axis directions. In this case, the controller 180 can calculate the distance from the reference point to the third center CE3 in the Y-axis direction. Furthermore, after calculating the third center CE3 of the droplet DR based on the detection results of the first detector 151 and the second detector 152, the controller 180 can calculate the distance between the third center CE3 of the droplet DR and the reference point in the X-axis direction. Furthermore, the controller 180 can calculate the distance between the third center CE3 of the droplet DR and the reference point in the Z-axis direction. As described above, the controller 180 can calculate each distance and can calculate and store the X, Y, and Z coordinates of the third center CE3 of the droplet DR relative to the reference point.

[0121] As described above, the controller 180 can calculate the 3D shape of the droplet DR at the first position PO1, the second position PO2, and the third position PO3, and can calculate the volume of the droplet DR at each position using the calculated 3D shape. For example, the controller 180 can calculate the volume of the 3D shape of the droplet DR at each position by calculating the volume of the droplet DR at each position. In this case, the largest of the calculated volumes can be the volume of the droplet DR discharged from the droplet emitter 140.

[0122] exist Figures 2 to 8 In one embodiment, for convenience, the volume of the droplet DR at the first position PO1 to the third position PO3 is calculated, and the volume of the droplet DR discharged from the droplet emitter 140 is also calculated. However, one or more embodiments are not limited to this. By using a first detector 151 and a second detector 152 to detect the droplet DR at multiple positions, and calculating the volume of the droplet DR at each position, the volume of the droplet DR discharged from the droplet emitter 140 can be calculated.

[0123] According to some example embodiments, the apparatus 100 for manufacturing a display device can detect droplet DR by using a first detector 151 and a second detector 152, and therefore, droplet DR emitted from droplet emitter 140 can be detected accurately and precisely.

[0124] Furthermore, by calculating the shape of the droplet DR by means of the shape not detected by the detectors 151 and 152 connected to the outer surface of the droplet DR, the shape, volume, emission angle and emission velocity of the droplet DR can be accurately measured or calculated.

[0125] The controller 180 can calculate the falling velocity of the droplet DR based on the time it takes for the droplet DR to move from one position to another and the distance between the moving positions. Specifically, the controller 180 can calculate the falling velocity of the droplet DR based on the distance in the Z-axis direction from the end of the nozzle of the droplet emitter 140 to the first position PO1 and the time taken to move such a distance. Furthermore, the controller 180 can calculate the falling velocity of the droplet DR based on the distance in the Z-axis direction between the first position PO1 and the second position PO2 and the time taken for the droplet DR to fall from the first position PO1 to the second position PO2. Additionally, the controller 180 can calculate the falling velocity of the droplet DR based on the distance between the second position PO2 and the third position PO3 and the time taken for the droplet DR to fall from the second position PO2 to the third position PO3. The average falling velocity of the droplet DR can be calculated by taking the arithmetic mean of the calculated falling velocities.

[0126] The controller 180 can calculate the falling velocity of the droplet DR by creating a virtual straight line connecting the centers of the droplets DR at various locations and connecting such a line to the point where the droplet DR is discharged from the droplet emitter 140. Furthermore, the controller 180 can calculate the discharge angle of the droplet DR by determining the angle formed by the centerline CL and the falling path of the droplet DR as the discharge angle of the droplet DR and calculating that angle. According to some example embodiments, the controller 180 can determine the discharge angle of the droplet DR as the angle formed by the falling path of the droplet DR and any straight line perpendicular to the end of the nozzle of the droplet emitter 140 from which the droplet DR is discharged.

[0127] As described above, the controller 180 can calculate the discharge angle and fall path of the droplet DR of the droplet emitter 140 in each of the X, Y, and Z axis directions. For example, as described above, the controller 180 can calculate the angle at which the droplet DR is discharged from the end of the nozzle of the droplet emitter 140 in the X or Y axis direction based on the position of each of the first center CE1, second center CE2, and third center CE3 of the droplet DR. Specifically, as described above, the controller 180 can calculate the discharge angle and fall path of the droplet DR by connecting the X and Y coordinates of the droplet DR relative to a reference point.

[0128] Through the above process, the controller 180 can calculate at least one of the following: the 3D shape, volume, falling velocity, falling path, and discharge angle of the droplet DR.

[0129] Then, as described above, the controller 180 can accurately control the droplet emitter 140 based on the above description.

[0130] When droplets DR are provided to the reference through the nozzle Figure 18 When the pixel defining layer 19 has an opening 19OP, the controller 180 can compare the measured volume of the droplet DR with a preset volume. When it is determined that the measured volume of the droplet DR is less than the preset volume, the controller 180 can control the droplet emitter 140 to increase the amount of droplet DR emitted from the droplet emitter 140 compared to the existing volume. Conversely, when it is determined that the measured volume of the droplet DR is greater than the preset volume, the controller 180 can control the droplet emitter 140 to decrease the amount of droplet DR emitted from the droplet emitter 140 compared to the existing volume. Furthermore, when the measured volume of the droplet DR is equal to the preset volume, the controller 180 can control the droplet emitter 140 to maintain its current state. In this case, when the preset volume is the total amount of droplet DR to be provided to an opening 19OP of the pixel defining layer 19, the time spent emitting the droplet DR from the droplet emitter 140 can be adjusted according to the measured amount of droplet DR.

[0131] Conversely, when droplet DRs are supplied to the opening 19OP of the pixel defining layer 19 through at least two nozzles, the controller 180 can calculate the volume of the droplet DRs discharged from each nozzle. In this case, the controller 180 can control the droplet DRs supplied through at least one of the at least two nozzles such that the volume of the droplet DR corresponds to the total amount (e.g., a set or predetermined total amount) of droplet DRs to be supplied to the opening 19OP of the pixel defining layer 19. For example, the controller 180 can control the volume of droplet DRs discharged from one of the at least two nozzles so that the volume corresponds to the total amount (e.g., a set or predetermined total amount) of droplet DRs, and can control the other nozzles to stop operating. According to some example embodiments, the controller 180 can control the volume of droplet DRs supplied from the at least two nozzles separately so that the volume corresponds to the total amount (e.g., a set or predetermined total amount) of droplet DRs. According to some example embodiments, some of the nozzles and the other nozzles of the at least three nozzles can be driven such that the volume provided from the at least three nozzles corresponds to the total amount of droplet DR (e.g., a set or predetermined total amount). For example, when the three nozzles provide droplet DR to an opening 19OP of the pixel defining layer 19, and the total amount of droplet DR to be provided to the opening 19OP of the pixel defining layer 19 (e.g., a set or predetermined total amount) is 20 mm. 3 The amount of droplets DR discharged from one of the three nozzles is 9 mm. 3 The amount of droplet DR discharged from another of the three nozzles is 10 mm. 3 The amount of droplets DR emitted from the other three nozzles is 11 mm. 3At this time, one and another of the three nozzles can be driven, and the other nozzle can be de-driven. The amount of droplet DR (e.g., a set amount or a predetermined amount) can be accurately provided to each opening 19OP of the pixel defining layer 19. According to some example embodiments, when using multiple nozzles, by differently controlling the time spent discharging droplet DR from each nozzle, the total amount of droplet DR to be provided to one opening 19OP of the pixel defining layer 19 can be matched to a value (e.g., a set value or a predetermined value).

[0132] The controller 180 can compare the calculated droplet DR falling speed (or average falling speed) with the falling speed (e.g., a set or predetermined falling speed). In this case, the controller 180 can control the moving speed of the display substrate S or the droplet emitter 140 based on the above falling speed. For example, when the droplet emitter 140 emits droplets DR onto the display substrate S, if the calculated droplet falling speed (or average falling speed) is less than the falling speed (e.g., a set or predetermined falling speed), the controller 180 can control the moving speed of the display substrate S or the droplet emitter 140 to be faster than the moving speed (e.g., a set or predetermined moving speed). Conversely, when the droplet emitter 140 emits droplets DR onto the display substrate S, if the calculated droplet falling speed (or average falling speed) is greater than the falling speed (e.g., a set or predetermined falling speed), the controller 180 can control the moving speed of the display substrate S or the droplet emitter 140 to be slower than the moving speed (e.g., a set or predetermined moving speed). Therefore, through the above process, the droplets can be emitted to an accurate location.

[0133] refer to Figure 9 When the droplet DR is discharged onto the display substrate S and provided to the opening 19OP of the pixel defining layer 19, the display substrate S or the droplet discharger 140 can be moved. In this case, the controller 180 can compare the falling path of the droplet DR with a falling path (e.g., a set or predetermined falling path) as described above, and can control the movement of the display substrate S or the droplet discharger 140.

[0134] For example, the controller 180 can compare the droplet DR's falling path with a falling path (e.g., a set or predetermined falling path). In this case, the controller 180 can calculate the falling path of the droplet DR within the direction of movement of the display substrate S or the droplet emitter 140. Based on the above falling path, the controller 180 can calculate the point on the display substrate S where the droplet DR is provided. Specifically, the controller 180 can determine whether the calculated point on the display substrate S where the droplet DR is provided is on any straight line parallel to the direction of movement of the display substrate S or the droplet emitter 140 (e.g., the Y-axis direction) when the droplet DR passes through the point (e.g., the set or predetermined point) D0.

[0135] When the calculated point of the droplet DR is determined to be on any straight line, the controller 180 can compare the calculated point of the droplet DR with a point (e.g., a set point or a predetermined point) D0. For example, when the calculated point of the droplet DR is a first point D1, the controller 180 can make the moving speed of the display substrate S or the droplet emitter 140 less than the moving speed (e.g., a set or predetermined moving speed). Conversely, when the calculated point of the droplet DR is a second point D2, the controller 180 can make the moving speed of the display substrate S or the droplet emitter 140 greater than the moving speed (e.g., a set or predetermined moving speed).

[0136] When it is determined that the calculated droplet DR point is not on any straight line, the controller 180 can clean the droplet emitter 140. For example, when the calculated droplet DR point is the third point D3 or the fourth point D4, the controller 180 can clean the droplet emitter 140. According to some example embodiments, the controller 180 can adjust the position of the droplet emitter 140 by controlling the movement unit 130 so that the calculated droplet DR point is on any straight line.

[0137] The controller 180 can compare the calculated discharge angle of the droplet DR with a discharge angle (e.g., a set or predetermined discharge angle). In this case, the controller 180 can calculate the discharge angle of the droplet DR in each of the X and Y axis directions. As described above, when the calculated discharge angle of the droplet DR is in the X-axis direction rather than in the direction of movement of the display substrate S or the droplet emitter 140, the controller 180 can clean the droplet emitter 140. According to some example embodiments, the droplet emitter 140 can be cleaned by brushing or using a cleaning solution.

[0138] When the calculated discharge angle of the droplet DR is not in the X-axis direction but in the moving direction of the display substrate S or the droplet emitter 140, the controller 180 can compare the discharge angle of the droplet DR calculated in the Y-axis direction, which is the moving direction of the display substrate S or the droplet emitter 140, with a discharge angle (e.g., a set or predetermined discharge angle). In this case, when the calculated discharge angle of the droplet DR is a first discharge angle θ1, the controller 180 can control the moving speed of the display substrate S or the droplet emitter 140 to be less than a moving speed (e.g., a set or predetermined moving speed). Conversely, when the calculated discharge angle of the droplet DR is a second discharge angle θ2, the controller 180 can control the moving speed of the display substrate S or the droplet emitter 140 to be greater than a moving speed (e.g., a set or predetermined moving speed). Therefore, under the above control, the droplet DR can be provided at an accurate position on the display substrate S according to the discharge angle of the droplet DR.

[0139] The above controls can be performed individually or in combination. That is, when at least two of the 3D shape, volume, falling speed, falling path, and discharge angle of the droplet DR differ from the set or predetermined values, the controller 180 can jointly control each component of the equipment 100 used to manufacture the display device, and thus be able to accurately deliver the droplet DR to the display substrate S.

[0140] Figure 10 This is a schematic perspective view of a portion of an apparatus for manufacturing a display device according to some example embodiments. Figure 11 It is located in Figure 10 A schematic planar diagram of the local shape of the droplet at the first time point. Figure 12 It is located in Figure 10 A schematic planar view of the local shape of the droplet at the second time point, and Figure 13 It is located in Figure 10 A schematic planar view of the local shape of the droplet at the third time point.

[0141] refer to Figures 10 to 13 The first detector 151 and the second detector 152 can detect a portion of the planar shape of the droplet DR by using laser light that is irradiated onto and reflected from an arbitrary second plane SF2 perpendicular to the droplet DR's fall path. In this case, based on the detection results of the first detector 151 and the second detector 152, when the droplet DR passes through the arbitrary second plane SF2 perpendicular to the droplet DR's fall path, the controller 180 can calculate the shape in which the second plane SF2 overlaps with the droplet DR. In this case, the second plane SF2 can be parallel to the XY plane.

[0142] For example, the position of the droplet DR falling from the droplet emitter 140 can change over time. For instance, when the droplet DR passes a first time point T1 after falling from the droplet emitter 140, it may have a long tail due to the suction from the nozzle of the droplet emitter 140. Furthermore, when the droplet DR passes a second time point T2 after falling from the droplet emitter 140, it may have a shorter tail compared to the droplet DR at the first time point T1. When the droplet DR passes a third time point T3 after falling from the droplet emitter 140, it may have a shorter tail compared to the droplet DR at the second time point T2. Therefore, the shape of the droplet DR can be almost spherical.

[0143] As described above, the first detector 151 and the second detector 152 can detect the droplet DR at a first time point T1, a second time point T2, and a third time point T3. In this case, the interval between the time when the droplet DR begins to fall from the droplet emitter 140 and the first time point T1, the interval between the first time point T1 and the second time point T2, and the interval between the second time point T2 and the third time point T3 can be the same for each other. That is, the first detector 151 and the second detector 152 can detect the falling droplet DR at specific time intervals. Figures 10 to 13 The illustration shows that the first detector 151 and the second detector 152 can detect droplet DR from a first time point T1 to a third time point T3, but one or more embodiments are not limited thereto. The first detector 151 and the second detector 152 can detect droplet DR at multiple time points. For example, the first detector 151 and the second detector 152 can detect droplet DR from a first time point to a tenth time point, from a first time point to a twentieth time point, or from a first time point to an Nth time point.

[0144] refer to Figure 10 and Figure 11 When the first time point T1 arrives after the droplet DR is discharged, the first detector 151 and the second detector 152 can detect the local shape of the droplet DR. More specifically, the first detector 151 can detect a portion of the outer surface DR_1a of the droplet DR located on the second plane SF2, and the second detector 152 can detect a portion of the outer surface DR_1b of the droplet DR located on the second plane SF2.

[0145] The outer surface DR_1a of the droplet DR detected by the first detector 151 and the outer surface DR_1b of the droplet DR detected by the second detector 152 can be symmetrical to each other. According to some example embodiments, the shape of the outer surface DR_1a of the droplet DR detected by the first detector 151 and the shape of the outer surface DR_1b of the droplet DR detected by the second detector 152 can be different from each other.

[0146] As referenced above Figure 3 As described, the shape of the outer surface of the droplet DR may not be detected when the angle of its shape is equal to or greater than a certain degree. Therefore, according to some example embodiments, the controller 180 of the device 100 can calculate the outer surface of the droplet DR by connecting portions other than the local shapes of the outer surfaces DR_1a and DR_1b of the droplet DR detected by the first detector 151 and the second detector 152. For example, the controller 180 can calculate the shape of the outer surface of the droplet DR by connecting the portions of the local shapes of the outer surface of the droplet DR that are not detected by the first detector 151 and the second detector 152 to each other. In this case, the portions of the local shapes of the outer surface of the droplet DR that are not detected by the first detector 151 and the second detector 152 are connected to each other by a straight line or by a curve relative to the center of the droplet DR. For example, the portions of the local shapes of the outer surface of the droplet DR that are not detected by the first detector 151 and the second detector 152 can be connected by a curve, and therefore, the shape of the outer surface of the droplet DR can be circular.

[0147] refer to Figure 10 and Figure 12 The first detector 151 and the second detector 152 can detect the local shape of the outer surface of the droplet DR at a second time point T2 after the droplet DR is discharged. More specifically, the first detector 151 can detect a portion of the outer surface DR_2a of the droplet DR located on the second plane SF2, and the second detector 152 can detect a portion of the outer surface DR_2b of the droplet DR located on the second plane SF2.

[0148] As described above, the controller 180 can calculate the shape of the outer surface of the droplet DR by identifying portions of the local shape of the outer surface that are not detected by the first detector 151 and the second detector 152. In this case, the shape of the outer surface of the droplet DR at the second time point T2 can have a larger size than the shape of the outer surface of the droplet DR at the first time point T1.

[0149] refer to Figure 10 and Figure 13 The first detector 151 and the second detector 152 can detect the local shape of the outer surface of the droplet DR at a third time point T3 after the droplet DR is discharged. More specifically, the first detector 151 can detect a portion of the outer surface DR_3a of the droplet DR located on the second plane SF2, and the second detector 152 can detect a portion of the outer surface DR_3b of the droplet DR located on the second plane SF2.

[0150] Then, as described above, the controller 180 can calculate the shape of the outer surface of the droplet DR by identifying portions of the local shape of the outer surface of the droplet DR that are not detected by the first detector 151 and the second detector 152. In this case, the shape of the outer surface of the droplet DR at the third time point T3 can have a larger size than the shape of the outer surface of the droplet DR at the first time point T1 or the second time point T2.

[0151] Figure 14 This is a schematic perspective view of the planar shape of a droplet detected using a device for manufacturing a display device, according to some example embodiments.

[0152] refer to Figures 10 to 14 Based on the detection results of the first detector 151 and the second detector 152, the controller 180 can calculate the shape of the outer surface of the droplet DR on the second plane SF2 according to the time it takes for the droplet DR to pass through any second plane SF2 perpendicular to the droplet DR's falling path, and can calculate the 3D shape of the droplet DR by overlapping the calculated outer surfaces of the droplet DR.

[0153] More specifically, the first detector 151 and the second detector 152 can detect the local shape of the outer surface of the droplet DR at a first time point T1. The controller 180 can calculate the first external shape DR-1 of the droplet DR at the first time point T1 by connecting the detected local shape of the outer surface of the droplet DR. The first detector 151 and the second detector 152 can detect the local shape of the outer surface of the droplet DR at a second time point T2. The controller 180 can calculate the second external shape DR-2 of the droplet DR at the second time point T2 by connecting the detected local shape of the outer surface of the droplet DR. The first detector 151 and the second detector 152 can detect the local shape of the outer surface of the droplet DR at a third time point T3. The controller 180 can calculate the third external shape DR-3 of the droplet DR at the third time point T3 by connecting the detected local shape of the outer surface of the droplet DR.

[0154] As described above, the first detector 151 and the second detector 152 can detect the local shape of the outer surface of the droplet DR at time point N. The controller 180 can calculate the Nth external shape DR-N of the droplet DR at time point N by connecting the detected partial shape of the outer surface of the droplet DR, where N is a natural number. After the droplet DR is discharged, the calculated shape of the outer surface of the droplet DR can increase and then decrease over time.

[0155] Controller 180 can calculate the 3D shape of the droplet DR because, as Figure 14As shown, the calculated first outer shape DR-1 to the Nth outer shape DR-N are stacked and connected to each other in the direction of droplet DR discharge. The controller 180 can calculate the volume of droplet DR by using the calculated 3D shapes.

[0156] Based on the volume of the droplet DR calculated as described above, the controller 180 can control the amount of droplet DR discharged from the droplet emitter 140. Alternatively, based on the calculated volume of the droplet DR, the controller 180 can determine which of the at least two nozzles of the droplet emitter 140 must be driven. Furthermore, the controller 180 can control the total amount of droplet DR supplied to the display substrate S by controlling the discharge rate of the droplet emitter 140.

[0157] Therefore, the apparatus 100 for manufacturing a display device can regulate the droplet DR supplied to the display substrate S.

[0158] Figure 15 This is a schematic perspective view of a portion of an apparatus for manufacturing a display device, according to some example embodiments. Figure 15 Implementation examples and Figure 2 The difference in the embodiment is that, in addition to the first detector 151 and the second detector 152, it further includes a third detector 153 to a sixth detector 156. Because... Figure 2 and Figure 15 The same reference numerals in the figures refer to the same elements, so descriptions that have already been provided need not be provided again, and the differences between them will be described in detail.

[0159] refer to Figure 15 The first detector 151 and the second detector 152 can be arranged opposite to each other. The first detector 151 and the second detector 152 can be arranged in different directions relative to the falling path of the droplet DR. That is, the first detector 151 and the second detector 152 can be separated from each other in the X direction, which is perpendicular to the Z direction of the droplet DR's fall.

[0160] The third detector 153 and the fifth detector 155 can be aligned to be separate from the first detector 151 along the droplet DR's fall path. That is, the third detector 153 and the fifth detector 155 can be separated from the first detector 151 in the Z direction of the droplet DR's fall. The fourth detector 154 and the sixth detector 156 can be aligned to be separate from the second detector 152 along the droplet DR's fall path. That is, the fourth detector 154 and the sixth detector 156 can be separated from the second detector 152 in the Z direction of the droplet DR's fall. For example, the fourth detector 154 can be arranged opposite the third detector 153, and the sixth detector 156 can be arranged opposite the fifth detector 155.

[0161] The third detector 153 and the fourth detector 154 can detect droplets DR passing through the same region, the first detector 151 and the second detector 152 can detect droplets DR passing through the same region, and the fifth detector 155 and the sixth detector 156 can detect droplets DR passing through the same region. In this case, the regions detected by the third detector 153 and the fourth detector 154, the regions detected by the first detector 151 and the second detector 152, and the regions detected by the fifth detector 155 and the sixth detector 156 can be different from each other, or they can be continuous or separate from each other.

[0162] When the first detector 151 to the sixth detector 156 are arranged as described above, the first reflector 171 may be set to correspond to the third detector 153, the second reflector 172 may be set to correspond to the fourth detector 154, the third reflector 173 may be set to correspond to the fifth detector 155, and the fourth reflector 174 may be set to correspond to the sixth detector 156.

[0163] The first reflector 171 to the fourth reflector 174 can guide the laser beams emitted from the third detector 153 to the sixth detector 156 to the falling path of the droplet DR, respectively. For example, the first reflector 171 to the fourth reflector 174 can be of the mirror type.

[0164] According to some example embodiments, the apparatus for manufacturing a display device can accurately and precisely detect droplets DR emitted from the droplet emitter 140 by using the first detector 151 to the sixth detector 156.

[0165] Figure 16 This is a schematic perspective view of a portion of an apparatus for manufacturing a display device, according to some example embodiments. Figure 16 Implementation examples and Figure 15 The difference in the embodiments lies in the inclusion of a seventh detector 157, an eighth detector 158, a ninth detector 159, and a tenth detector 161, in addition to the first detectors 151 to the sixth detectors 156. Because... Figure 15 and Figure 16 The same reference numerals in the figures refer to the same elements, so descriptions that have already been provided need not be provided again, and the differences between them will be described in detail.

[0166] refer to Figure 16The seventh detector 157 and the eighth detector 158 can be arranged along the fall path of the droplet DR falling from the droplet emitter 140, but can be arranged in the opposite direction to the fall path of the droplet DR. The seventh detector 157 and the eighth detector 158 can be spaced apart from each other in the X direction, which is perpendicular to the Z direction of the droplet DR's fall. For example, the eighth detector 158 can be arranged opposite the seventh detector 157.

[0167] The ninth detector 159 and the tenth detector 161 may be on the path of the droplet DR falling from the droplet emitter 140, but may be arranged in opposite directions relative to the path of the droplet DR. The ninth detector 159 and the tenth detector 161 may be spaced apart from each other in the X direction, which is perpendicular to the Z direction of the droplet DR's fall. For example, the ninth detector 159 may be arranged opposite the tenth detector 161.

[0168] The third detector 153 and the fourth detector 154 can detect droplets DR passing through the same region, the seventh detector 157 and the eighth detector 158 can detect droplets DR passing through the same region, and the first detector 151 and the second detector 152 can detect droplets DR passing through the same region. Furthermore, the ninth detector 159 and the tenth detector 161 can detect droplets DR passing through the same region, and the fifth detector 155 and the sixth detector 156 can detect droplets DR passing through the same region. In this case, the regions detected by the third detector 153 and the fourth detector 154, the regions detected by the seventh detector 157 and the eighth detector 158, the regions detected by the first detector 151 and the second detector 152, the regions detected by the ninth detector 159 and the tenth detector 161, and the regions detected by the fifth detector 155 and the sixth detector 156 can be different from each other, or they can be continuous or separate.

[0169] When the seventh detector 157 to the tenth detector 161 are arranged as described above, the fifth reflector 175 may be set to correspond to the seventh detector 157, the sixth reflector 176 may be set to correspond to the eighth detector 158, the seventh reflector 177 may be set to correspond to the ninth detector 159, and the eighth reflector 178 may be set to correspond to the tenth detector 161.

[0170] The fifth reflector 175 to the eighth reflector 178 can respectively guide the laser beams emitted from the seventh detector 157 to the tenth detector 161 to the falling path of the droplet DR. For example, the fifth reflector 175 to the eighth reflector 178 can be of the mirror type.

[0171] According to some example embodiments, the apparatus for manufacturing a display device can accurately and precisely detect droplets DR emitted from the droplet emitter 140 by using the first detector 151 to the tenth detector 161.

[0172] Figure 17 This is a schematic plan view of a display device manufactured using equipment for manufacturing display devices, according to some example embodiments. Figure 18 This is a schematic cross-sectional view of a display device manufactured using equipment for manufacturing display devices, according to some example embodiments.

[0173] refer to Figure 17 and Figure 18 The display device 1 may include a display area DA and a non-display area NDA surrounding the display area DA. The non-display area NDA may surround the display area DA. The display device 1 may provide an image by using light emitted by a plurality of pixels PX arranged in the display area DA. No image may be displayed in the non-display area NDA. According to some example embodiments, a data signal may be provided to each of the plurality of pixels PX via a data line DLn, and a scan signal may be provided to each of the plurality of pixels PX via a scan line SL.

[0174] The display device 1 may include a display substrate S. The display substrate S may include a substrate 10, an intermediate layer of the display layer DL, and a layer excluding the common electrode 23.

[0175] The display layer DL and the thin-film encapsulation layer TFE can be located on the substrate 10. The display layer DL may include the pixel circuit layer PCL and the display element layer DEL.

[0176] The substrate 10 may include glass or a polymer resin, such as polyethersulfone, polyarylate, polyetherimide, polyethylene naphthalate, polyethylene terephthalate, polyphenylene sulfide, polyimide, PC, TAC, or cellulose acetate propionate.

[0177] A barrier layer may be further located between the display layer DL and the substrate 10. The barrier layer prevents the penetration of external impurities and may include materials such as silicon nitride (SiN). x (x>0) or silicon dioxide (SiO) x One or more layers of inorganic materials (x > 0).

[0178] The pixel circuit layer PCL may be located on the substrate 10. The pixel circuit layer PCL may include a thin film transistor (TFT), a buffer layer 11 located below and / or on the elements of the thin film transistor TFT, a first insulating layer 13a, a second insulating layer 13b, a third insulating layer 15, and a planarization layer 17.

[0179] Buffer layer 11 may include materials such as SiN x Silicon oxynitride (SiON) or SiO x Inorganic insulating materials, and may be one or more layers including the above inorganic insulating materials.

[0180] The thin-film transistor (TFT) may include a semiconductor layer 12, and the semiconductor layer 12 may include polycrystalline silicon. Alternatively, the semiconductor layer 12 may include amorphous silicon, oxide semiconductor, or organic semiconductor, etc. The semiconductor layer 12 may include a channel region 12c and drain regions 12a and source regions 12b located on both sides of the channel region 12c. The gate electrode 14 may overlap with the channel region 12c.

[0181] The gate electrode 14 may include a low-resistance metallic material. The gate electrode 14 may include a conductive material comprising molybdenum (Mo), aluminum (Al), copper (Cu), or titanium (Ti), and may be one or more layers comprising the above materials.

[0182] The first insulating layer 13a between the semiconductor layer 12 and the gate electrode 14 may include materials such as SiO2 and SiN. x Inorganic insulating materials of SiON, alumina (Al2O3), titanium oxide (TiO2), tantalum oxide (Ta2O5), hafnium oxide (HfO2) or zinc oxide (ZnO).

[0183] The second insulating layer 13b may cover the gate electrode 14. Similar to the first insulating layer 13a, the second insulating layer 13b may include SiO2 or SiN. x , SiON, Al2O3, TiO2, Ta2O5, HfO2 or ZnO.

[0184] On the second insulating layer 13b, the upper electrode Cst2 of the storage capacitor Cst can be disposed. The upper electrode Cst2 can overlap with the gate electrode 14 below the upper electrode Cst2. In this case, the gate electrode 14 and the upper electrode Cst2, which overlap each other and are located between the second insulating layer 13b, can form the storage capacitor Cst. That is, the gate electrode 14 can be used as the lower electrode Cst1 of the storage capacitor Cst.

[0185] As described above, the storage capacitor Cst and the thin-film transistor TFT can overlap. In some embodiments, the storage capacitor Cst may not overlap with the thin-film transistor TFT.

[0186] The upper electrode Cst2 may include aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), molybdenum (Mo), titanium (Ti), tungsten (W) and / or copper (Cu), and may be one or more layers comprising the above materials.

[0187] The third insulating layer 15 may cover the upper electrode Cst2. The third insulating layer 15 may include SiO2, SiN x The materials used include SiON, Al2O3, TiO2, Ta2O5, HfO2, or ZnO. The third insulating layer 15 may be one or more layers comprising the aforementioned inorganic insulating materials.

[0188] Drain electrode 16a and source electrode 16b may each be located on the third insulating layer 15. Drain electrode 16a and source electrode 16b may comprise materials with good conductivity. Drain electrode 16a and source electrode 16b may comprise conductive materials such as Mo, Al, Cu, and Ti, and may be one or more layers comprising these materials. According to some example embodiments, drain electrode 16a and source electrode 16b may have a Ti / Al / Ti multilayer structure.

[0189] Planarization layer 17 may include an organic insulating layer. Planarization layer 17 may include organic materials, such as general polymers such as polymethyl methacrylate (PMMA) or polystyrene (PS), polymer derivatives having phenolic groups, acrylic polymers, imide polymers, aryl ether polymers, amide polymers, fluorinated polymers, p-xylene polymers, vinyl alcohol polymers, and blends thereof.

[0190] The display element layer DEL can be disposed on the pixel circuit layer PCL having the above structure. The display element layer DEL may include an organic light-emitting diode (OLED), and the pixel electrode 21 of the OLED can be electrically connected to the thin-film transistor (TFT) through contact holes defined in the planarization layer 17.

[0191] A pixel (PX) can include an organic light-emitting diode (OLED) and a thin-film transistor (TFT). Each pixel (PX) can emit, for example, red, green, or blue light from the OLED, or it can emit red, green, blue, or white light.

[0192] Pixel electrode 21 may include a conductive oxide such as indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide (In2O3), indium gallium oxide (IGO), or zinc aluminum oxide (AZO). According to some example embodiments, pixel electrode 21 may include a reflective layer comprising Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr, or compounds thereof. According to some example embodiments, pixel electrode 21 may further include a layer comprising ITO, IZO, ZnO, or In2O3 on / below the aforementioned reflective layer.

[0193] A pixel defining layer 19 having an opening 19OP exposing the central portion of the pixel electrode 21 can be disposed on the pixel electrode 21. The pixel defining layer 19 may include an organic insulating material and / or an inorganic insulating material. The opening 19OP may define an emission region (hereinafter referred to as the emission region EA) for light emitted from an organic light-emitting diode (OLED). For example, the width of the opening 19OP may correspond to the width of the emission region EA.

[0194] The emitting layer 22 may be located within the opening 19OP of the pixel defining layer 19. The emitting layer 22 may comprise a high-molecular-weight organic material or a low-molecular-weight organic material that emits light of a specific color. According to some example embodiments, the emitting layer 22 may comprise a quantum dot material. The emitting layer 22 may be formed by discharging droplets with equipment used to manufacture a display device.

[0195] According to some example embodiments, the first functional layer and the second functional layer may be located on and below the emitter layer 22. The first functional layer may include, for example, a hole transport layer (HTL) or a combination of an HTL and a hole injection layer (HIL). The second functional layer is an element located on the emitter layer 22 and may be omitted according to some example embodiments. The second functional layer may include an electron transport layer (ETL) and / or an electron injection layer (EIL). When the common electrode 23 described below completely covers the substrate 10, the first functional layer and / or the second functional layer may be a common layer that completely covers the substrate 10.

[0196] The common electrode 23 may include a conductive material with a low work function. For example, the common electrode 23 may include a transparent (semi-transparent) layer comprising Ag, Mg, Al, Pt, Pd, Au, Ni, Nd, Ir, Cr, Li, Ca, or alloys thereof. Alternatively, the common electrode 23 may further include a layer comprising ITO, IZO, ZnO, or In2O3 on top of the transparent (semi-transparent) layer comprising the above materials.

[0197] The thin-film encapsulation layer TFE can be located on the common electrode 23. According to some example embodiments, the thin-film encapsulation layer TFE includes at least one inorganic encapsulation layer and at least one organic encapsulation layer, and according to some example embodiments, Figure 18 The thin-film encapsulation layer TFE is shown to include a first inorganic encapsulation layer 31, an organic encapsulation layer 32, and a second inorganic encapsulation layer 33 stacked in sequence.

[0198] The first inorganic encapsulation layer 31 and the second inorganic encapsulation layer 33 may include materials selected from Al2O3, TiO2, Ta2O5, HfO2, ZnO, SiO2, and SiN. xOr at least one inorganic material from the group consisting of SiON. The organic encapsulation layer 32 may include polymeric materials. Polymeric materials may include acrylic resins, epoxy resins, polyimides, and polyethylene, etc. According to some example embodiments, the organic encapsulation layer 32 may include acrylates.

[0199] According to some example embodiments, the thin-film encapsulation layer TFE can have a structure in which a substrate 10 and a transparent upper substrate are coupled by a sealing member, and thus, the internal space between the substrate 10 and the upper substrate is sealed. In this case, a desiccant or filler, etc., can be located in the internal space. The sealing member can be a sealant, and according to some example embodiments, the sealing member can include a material cured by laser. For example, the sealing member can be a glass frit. For example, the sealing member can include urethane resins, epoxy resins, acrylic resins, or silicone as an inorganic sealant, such as organic sealants. Urethane resins can include, for example, urethane acrylates. Acrylic resins can include, for example, butyl acrylate, ethylhexyl acrylate, etc. The sealing member can include a material cured by thermosetting.

[0200] According to some example embodiments, when droplets emitted from a droplet emitter are detected by using a detector, the shape, volume, emission angle, and emission velocity of the droplets can be accurately measured or calculated.

[0201] Furthermore, according to some example embodiments, droplets emitted from the droplet emitter can be detected by a detector in the air.

[0202] Furthermore, according to some example embodiments, when the outer surface of a droplet is calculated by using the shape of the outer surface of the droplet that is not detected by the detector, the shape, volume, emission angle, and emission velocity of the droplet can be accurately measured or calculated.

[0203] According to one or more embodiments, a display device capable of accurately and precisely measuring droplets in real time and providing detailed images can be realized. However, the scope of this disclosure is not limited to its effects.

[0204] It should be understood that the embodiments described herein are to be considered in a descriptive sense only and are not intended for limiting purposes. The description of features or aspects within each embodiment should generally be considered applicable to other similar features or aspects in other embodiments. Although one or more embodiments have been described with reference to the accompanying drawings, those skilled in the art will understand that various changes in form and detail may be made without departing from the spirit and scope defined by the appended claims and their equivalents.

Claims

1. An apparatus for manufacturing a display device, the apparatus comprising: A droplet emitter, including a nozzle configured to emit droplets; A first detector is located on the path of the droplet falling from the droplet emitter and is configured to detect the shape of the droplet. A second detector, spaced apart from the first detector, is configured to detect the shape of the droplets falling from the droplet emitter; as well as The controller is configured to calculate at least one of the following based on the results detected by the first detector and the second detector: the volume of the droplet, the droplet's falling velocity, the droplet's falling path, and the discharge angle at which the droplet is discharged from the nozzle.

2. The apparatus of claim 1, wherein, The first detector and the second detector each include a confocal microscope or a color confocal line sensor.

3. The apparatus of claim 1, wherein, The first detector and the second detector are arranged in opposite directions relative to the droplet's falling path.

4. The apparatus of claim 1, wherein, The first detector and the second detector are configured to detect the local shape of the outer surface of the droplets falling from the droplet emitter at specific time intervals, and The first detector and the second detector are configured to detect the local shape of the outer surface of the droplet projected onto an arbitrary plane.

5. The apparatus of claim 4, wherein, The controller is configured to calculate the outer surface of the droplet by connecting portions other than the local shape of the outer surface of the droplet detected by the first detector and the second detector.

6. The apparatus of claim 5, wherein, The controller is configured to calculate the three-dimensional shape of the droplet by rotating the calculated outer surface of the droplet relative to the droplet's fall path, and to calculate the volume of the droplet using the three-dimensional shape of the droplet. The controller is configured to calculate the center of the droplet by using the three-dimensional shape of the droplet.

7. The device according to claim 1, further comprising: A third detector is spaced apart from the first detector along the droplet's fall path; and The fourth detector is arranged opposite to the third detector relative to the droplet's fall path.

8. The device according to claim 7, further comprising: A first reflector, corresponding to the third detector, is configured to deflect laser light emitted from the third detector and to deflect light reflected from the droplet; as well as The second reflector, corresponding to the fourth detector, is configured to redirect the laser emitted from the fourth detector and the light reflected from the droplet.

9. The apparatus of claim 1, wherein, The first detector and the second detector are configured to detect the droplet at specific time intervals, and the controller is configured to calculate the droplet's fall path or the droplet's discharge angle by connecting the centers of the droplet detected by the first detector and the second detector.

10. The apparatus of claim 1, wherein, The first detector and the second detector are configured to detect the droplet at specific time intervals as it falls, and the controller is configured to calculate the droplet's falling velocity based on the distance the droplet travels within the specific time point.

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