Mother panel conveying device, display panel inspection device and display panel inspection equipment

Abstract

According to an embodiment of the present invention, a mother panel conveying device may include: a platform module, which absorbs and fixes the other side of the mother panel in a normal state with one side of the mother panel facing upward; a conveying module, which absorbs the other side of the mother panel that is transformed from the normal state to the flipped state on the platform module, and then moves to a first position for inspecting whether the display panel has defects; a vacuum adsorption module, which inspects whether the display panel has defects; and a picking module, which absorbs the other side of the mother panel that is moved to the first position by the conveying module, and then moves to a second position to inspect whether the display panel has defects.

Description

Technical Field

[0001] The present invention relates to a mother panel conveying device, a display panel inspection device and a display panel inspection equipment, and more particularly, to a mother panel conveying device, a display panel inspection device and a display panel inspection equipment that can inspect whether display panels of various sizes included in a large mother panel are defective in a face-down manner. Background Art

[0002] Organic light-emitting diodes (OLEDs) used as flat panel display devices have the advantages of a wide field of view, excellent contrast, and a fast response speed, and therefore have recently been widely used in smartphones, televisions, and the like.

[0003] An organic light emitting diode (OLED) is a pixel that emits light and color through electrical signals by depositing an organic layer for forming an organic light emitting layer on a panel as a substrate.

[0004] If a pixel is realized by forming an organic layer by deposition on a panel as a substrate, it should be checked whether the pixel has defects before the packaging process.

[0005] Conventionally, in order to prevent contamination from scattered particles during inspection, inspection is performed face down, that is, inspection is performed with the side of the display panel to be inspected where the deposition portion is located facing downward.

[0006] Display panels can be made into various sizes according to their purpose of use. They will be provided on a mother glass panel in the manufacturing process. The mother glass panel can be a single type with multiple display panels of the same size or a mixed type formed by mixing display panels of various sizes to improve chamfering efficiency.

[0007] In the past, in order to inspect whether a display panel has defects, a deposition portion of the display panel on a mother panel is placed on a fishbone type platform module with the side facing downward. The fishbone type platform module clamps a portion of a side where the deposition portion is located, where an outer contour of the deposition portion is not formed, with the deposition portion facing downward, and then moves into a chamber for inspection.

[0008] Afterwards, the other side of the mother panel without the deposition part is sucked by the vacuum panel and moved to the position of the probe block of the probe unit, and then the contact pad of the display panel is brought into contact with the probe block for inspection.

[0009] However, the conventional inspection method can be used to inspect the display panel on a smaller mother panel, but serious problems will occur when inspecting whether the display panel on a large mother panel is defective by face-down method, so the conventional inspection method is difficult to apply.

[0010] That is to say, for a large mother panel, if it is configured on a fishbone type platform module with the side where the deposition portion is located facing downward, the fishbone type platform module will support the outer contour portion of the side where the deposition portion is located where the deposition portion is not formed. At this time, the central portion of the large mother panel sinks due to its own weight, so accurate inspection is actually impossible.

[0011] In addition to the above-mentioned problems, the conventional inspection method also has the following problems.

[0012] The probe unit can only be installed with a probe block for inspecting whether one type of display panel is defective. Therefore, when there are display panels of various sizes to be inspected on the mother panel and the display panels to be inspected are different, it is necessary to replace the probe unit with a new one that matches them.

[0013] The replacement work of the probe unit is usually performed manually by a worker, which causes a problem that the time required for the replacement work increases and the productivity decreases.

[0014] Furthermore, workers are often injured or receive electric shocks when replacing the probe unit.

[0015] Therefore, there is an urgent need to research and develop equipment that can quickly and accurately inspect whether various types of display panels on a large mother panel have defects using a face-down method to prevent contamination from scattered particles during inspection. Summary of the invention

[0016] Problems to be solved by the invention

[0017] The present invention is directed to a mother panel conveying device, a display panel inspection device and a display panel inspection apparatus, which can inspect whether display panels of various sizes included in a large mother panel are defective in a face-down manner without replacing a probe unit or a probe block.

[0018] Solutions for solving problems

[0019] A mother panel conveying device according to an embodiment of the present invention may include: a platform module, which adsorbs and fixes the other side of the mother panel in a normal state with one side of the mother panel facing upward, one side of the mother panel has at least one type of display panel, and the display panel is deposited with an organic layer for forming an organic light-emitting layer, and the platform module rotates to make the mother panel change from the normal state to a flipped state with the one side facing downward; a conveying module, which adsorbs the other side of the mother panel that is transformed from the normal state to the flipped state on the platform module, and then moves the mother panel to a first position for checking whether the display panel has defects while maintaining the flipped state; a vacuum adsorption module, which checks whether the display panel has defects by interacting with a probe unit equipped with a probe block; and a picking module, which adsorbs the other side of the mother panel that is moved to the first position by the conveying module, and then moves to a second position while maintaining the flipped state, and the mother panel is adsorbed on the other side while maintaining the flipped state through the vacuum adsorption module, and checks whether the display panel has defects through the interaction.

[0020] The vacuum adsorption module of the mother panel conveying device according to one embodiment of the present invention is characterized in that the electrode plate of the display panel and the probe block can be brought into contact by moving the position while keeping the mother panel in the flipped state, thereby inspecting whether the display panel has defects in the flipped state.

[0021] The transport module of the mother panel transport device according to an embodiment of the present invention is characterized in that if the other surface is adsorbed by the pickup module, the transport module can release the adsorption and separate from the mother panel, and then move to the original position.

[0022] The second position of the mother panel conveying device according to an embodiment of the present invention is characterized in that it can be a position where the pickup module rises to the vacuum adsorption module based on the first position.

[0023] The platform module of the mother panel conveying device of one embodiment of the present invention is characterized in that it can include a plurality of platform units, which adsorb the other surface of the mother panel in the normal state so that the central part of the mother panel will not sink due to its own weight, and the plurality of platform units are respectively arranged at intervals from each other to form a first space between each other.

[0024] The above-mentioned conveying module of the mother panel conveying device of one embodiment of the present invention is characterized in that it can include multiple conveying units. If the above-mentioned platform module is rotated to change the state of the above-mentioned mother panel from the above-mentioned normal state to the above-mentioned flipped state, the above-mentioned multiple conveying units are inserted into the above-mentioned first space and adsorb the above-mentioned other surface of the above-mentioned mother panel configured in the above-mentioned flipped state, so that the central part of the above-mentioned mother panel will not sink due to its own weight.

[0025] The picking module of the mother panel conveying device according to one embodiment of the present invention is characterized in that it can move from the state of being located at the third position to the first position by descending through the vacuum adsorption module, and adsorb the other side of the mother panel moved to the first position through the conveying module, and then move to the second position by ascending so as to adsorb the other side of the mother panel through the vacuum adsorption module.

[0026] The pickup module of the mother panel conveying device according to an embodiment of the present invention is characterized in that it can include a plurality of pickup units which are arranged at intervals from each other so as to uniformly absorb the other surface of the mother panel.

[0027] The picking module of the mother panel conveying device according to one embodiment of the present invention is characterized in that if the other surface of the mother panel moved to the second position is adsorbed by the vacuum adsorption module, the picking module can release the adsorption and separate from the mother panel, and then return to the third position.

[0028] Effects of the Invention

[0029] According to the mother panel conveying device, display panel inspection device and display panel inspection equipment of the present invention, it is possible to inspect whether display panels of various sizes included in a large mother panel are defective in a face-down manner without replacing the probe unit or the probe block, thereby maximizing the accuracy and speed of defect inspection. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a diagram for explaining inspection of a display panel for defects by the display panel inspection apparatus of the present invention.

[0031] Figure 2 1 and 2 are diagrams for explaining various embodiments of combinations of display panels included in a mother panel mountable on a platform module provided in a display panel inspection apparatus of the present invention.

[0032] Figure 3 It is a block diagram for explaining the structure of the display panel inspection device of the present invention.

[0033] Figure 4 It is a diagram for explaining the display panel inspection equipment of the present invention.

[0034] Figure 5 and Figure 6 is a diagram for explaining the air flow in the inspection process execution device provided in the display panel inspection device of the present invention; wherein, Figure 5 is along Figure 4 A schematic cross-sectional view of line AA, Figure 6 is along Figure 4 A schematic cross-sectional view of line BB.

[0035] Figure 7 The present invention is a flowchart for explaining a process in which a mother panel is adsorbed on a vacuum adsorption module by a mother panel conveying device provided in the display panel inspection apparatus of the present invention.

[0036] Figure 8 This is a diagram for explaining a state where a mother panel is normally mounted on a platform module provided in the mother panel conveying device of the present invention.

[0037] Fig. 9 and Fig.10 It is used to illustrate Figure 8 The diagram shows a situation where the mother panel in a normal state is transformed into a flipped state by rotating the platform module.

[0038] Fig.11 This is a diagram for explaining a state in which a conveying module of the mother panel conveying device provided in the present invention enters a stage module.

[0039] Fig.12 and Fig.13 This is a diagram for explaining a situation in which a conveying module provided in the mother panel conveying device of the present invention absorbs a mother panel in an inverted state.

[0040] Fig.14 This is a diagram for explaining a state in which a conveyance module provided in the mother panel conveyance device of the present invention moves to a first position.

[0041] Fig.15 and Fig.16 It is a diagram for explaining a situation in which a pickup module provided in the mother panel conveying device of the present invention descends and absorbs a mother panel in an inverted state.

[0042] Fig.17 This is a diagram for explaining a state in which a conveyance module provided in the mother panel conveyance device of the present invention returns to an original position.

[0043] Fig.18 It is a diagram for explaining a state in which the pickup module provided in the mother panel conveying device of the present invention rises to the second position.

[0044] Fig.19It is a diagram for explaining a state in which the pickup module provided in the mother panel conveying device of the present invention rises to the third position.

[0045] Fig. 20 It is a diagram for explaining a display panel inspection device provided in the display panel inspection equipment of the present invention.

[0046] Figure 21 to Figure 27 This is a diagram for explaining a method of inspecting individual display panels when a vacuum adsorption module provided in the mother panel conveying device of the present invention adsorbs a mother panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, and inspects whether there are defects.

[0047] Fig.28 This is a diagram for explaining the position movement of unused probe blocks when inspecting whether a display panel has a defect using the display panel inspection apparatus of the present invention. DETAILED DESCRIPTION

[0048] A mother panel conveying device according to an embodiment of the present invention may include: a platform module, which adsorbs and fixes the other side of the mother panel in a normal state with one side of the mother panel facing upward, one side of the mother panel has at least one type of display panel, and the display panel is deposited with an organic layer for forming an organic light-emitting layer, and the platform module rotates to make the mother panel change from the normal state to a flipped state with the one side facing downward; a conveying module, whose adsorption state is changed from the normal state to the flipped state of the other side of the mother panel on the platform module, and then the mother panel is moved to a first position for checking whether the display panel has defects while maintaining the flipped state; a vacuum adsorption module, which checks whether the display panel has defects by interacting with a probe unit equipped with a probe block; a picking module, which adsorbs the other side of the mother panel moved to the first position by the conveying module, and then moves to a second position while maintaining the flipped state, and the mother panel is adsorbed on the other side while maintaining the flipped state through the vacuum adsorption module, and the display panel is checked for defects through the interaction.

[0049] Best Mode for Carrying Out the Invention

[0050] Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the concept of the present invention is not limited to the embodiments mentioned, and a technician who understands the concept of the present invention can easily propose other backward inventions or other embodiments within the scope of the concept of the present invention by adding, changing, deleting, etc. other structural elements within the same concept, but this is also included in the scope of the concept of the present invention.

[0051] Furthermore, structural elements having the same functions within the scope of the same concept shown in the drawings of the respective embodiments are described using the same reference numerals.

[0052] 1. Display panel and mother panel

[0053] Figure 1 is a diagram for explaining how to inspect a display panel for defects by the display panel inspection apparatus of the present invention; Figure 2 1 and 2 are diagrams for explaining various embodiments of combinations of display panels included in a mother panel mountable on a platform module provided in a display panel inspection apparatus of the present invention.

[0054] Reference Figure 1 The display panel DP is a panel as a substrate on which an organic layer for forming an organic light-emitting layer is deposited to realize pixels. Before the packaging process, the display panel inspection device 1000 of the present invention (refer to Figure 3 and Figure 4 ) to check for defects.

[0055] In order to check whether a pixel is defective, the display panel DP may have: a first electrode plate EP1, which is formed along a first edge area, and the first edge area is one of the edge areas of the upper surface of the display panel DP; a second electrode plate EP2, which is formed along a second edge area, and the second edge area is another edge area of ​​the edge area of ​​the upper surface; a third electrode plate EP3, which is formed along a third edge area, and the third edge area is another edge area of ​​the edge area of ​​the upper surface; and a fourth electrode plate EP4, which is formed along a fourth edge area, and the fourth edge area is another edge area of ​​the edge area of ​​the upper surface.

[0056] However, the formation position and number of the electrode plates of the display panel DP described above may vary according to the panel characteristics. Figure 1 Taking the display panel DP shown as an example, the process of inspecting whether there are defects is described.

[0057] In terms of manufacturing process, the size depends on the platform module 110 (see Figure 3 and Figure 4 ) to form a plurality of the above-mentioned display panels DP, which can be manufactured by processes such as cutting. The above-mentioned mother panel MP can be a glass substrate serving as a basis for producing the display panels DP.

[0058] In order to minimize the blank space and improve the efficiency of defect inspection, that is, to improve the chamfering efficiency, the mother panel MP may be a single type having a plurality of display panels DP of the same size or a mixed type having display panels DP of various sizes mixed therein.

[0059] For example, the mother panel MP may be as follows: Figure 2 The mixed type of two 98-inch display panels shown in (a) is as follows Figure 2 (b) shows a mixed type of three 65-inch display panels and six 32-inch display panels, such as Figure 2 (c) shows 18 31.5-inch display panels of a single type, such as Figure 2 A mixed type of two 49-inch display panels and two 75-inch display panels as shown in (d) and Figure 2 (e) shows a mixed type of three 65-inch display panels and two 55-inch display panels, but is not necessarily limited to this. The mother panel MP may be a mixed type panel suitable for display panels of various sizes.

[0060] The display panel inspection device 1000 of the present invention can inspect whether all display panels included in the mixed type mother panel MP of the above-mentioned various combinations are defective; below, the case where the above-mentioned mother panel is a mixed type formed by 3 65-inch display panels and 2 55-inch display panels is explained as a typical example.

[0061] 2. Display panel inspection equipment

[0062] Figure 3 is a block diagram for explaining the structure of a display panel inspection device of the present invention; Figure 4 It is a diagram for explaining the display panel inspection equipment of the present invention.

[0063] Reference Figure 3 and Figure 4 The display panel inspection device 1000 of the present invention may be an inspection device that can inspect whether the display panels DP of various sizes included in the mother panel MP are defective by a back adsorption method (i.e., a face-down method) without replacing the probe unit PU (refer to Fig. 20 ) or a probe block BP, thereby maximizing the accuracy and rapidity of defect inspection, and the like. The display panel inspection device 1000 may include an inspection process preparation device 1100 and an inspection process execution device 1200.

[0064] The inspection process preparation equipment 1100 may be the following equipment: if in a normal state in which a mother panel MP having at least one type of display panel DP on one side faces upward, the other side of the mother panel MP is adsorbed on the platform module 110, then the platform module 110 rotates to make the mother panel MP change from the normal state to a flipped state in which the one side faces downward, and then the conveying module 120 receives the mother panel MP in the flipped state, and moves the mother panel MP to equipment for subsequent processes while maintaining the flipped state, wherein the display panel DP is deposited with an organic layer for forming an organic light-emitting layer.

[0065] The inspection process execution equipment 1200 can be the following equipment: if the picking module 130 adsorbs the other side of the mother panel MP entering through the conveying module 120, and then the vacuum adsorption module 140 adsorbs the mother panel MP in the flipped state by moving the position of the picking module 130, then the electrode plate of the display panel DP is brought into contact with the probe block PB of the probe unit PU of the display panel inspection device 200 through the position movement of the vacuum adsorption module 140 to inspect whether the display panel DP has defects.

[0066] On the other hand, in the display panel inspection device 1000 of the present invention, the structural elements from the mother panel MP being installed on the platform module 110 to the mother panel MP being adsorbed on the vacuum adsorption module 140 by the conveying module 120 with the help of the pickup module 130 can be defined as the mother panel conveying device 100; Figures 7 to 28 The process of inspecting whether the display panel DP adsorbed to the vacuum adsorption module 140 by the mother panel conveying device 100 is defective by the display panel inspection device 200 will be described in detail.

[0067] Figure 5 and Figure 6 is a diagram for explaining the air flow in the inspection process execution device provided in the display panel inspection device of the present invention; wherein, Figure 5 is along Figure 4 A schematic cross-sectional view of line AA, Figure 6 is along Figure 4 A schematic cross-sectional view of line BB.

[0068] and Figure 3 and Figure 4 Reference Figure 5 and Figure 6The inspection process execution equipment 1200 may include: a first space portion 300, which is used to make the electrode plate and the probe block PB of the display panel DP contact to inspect whether the above-mentioned display panel DP has defects; and a second space portion 400, which is provided with a visual module 410 that can be moved, and the above-mentioned visual module 410 is used to photograph the display panel DP as the object of the above-mentioned inspection to see whether it has defects, so as to confirm whether there are stains or scratches on the above-mentioned display panel DP; the above-mentioned second space portion 400 may be located at the lower part of the above-mentioned first space portion 300.

[0069] For example, the visual module 410 may include four camera units, and the working distances (WD) of the camera units are different according to the size of the display panel DP as the photographing object, so the camera units can be moved upward or downward.

[0070] In addition, the four camera units need to capture the entire area of ​​the display panel DP corresponding to the size of the display panel DP as the object of capture, and therefore need to be located in the center of the 1 / 4 area of ​​the display panel DP as the object of capture, and for this purpose, they can be moved forward or backward, left or right. In addition, as needed, they can also rotate forward or reverse to correspond to the rotation of the display panel DP as the object of capture.

[0071] On the other hand, the inspection of whether the display panel DP is defective in the inspection process preparation equipment 1100 and the inspection process performing equipment 1200 may be performed under a nitrogen atmosphere.

[0072] In particular, for the inspection process execution equipment 1200 , the nitrogen gas needs to be stably circulated in the first space portion 300 and the second space portion 400 without stagnation.

[0073] To this end, the inspection process execution equipment 1200 may include: a forced circulation module 310, which is located in the upper part of the first space part 300; a first circulation pipe module 320, which connects the upper part and the lower part for the circulation of the nitrogen in the first space part 300; and a second circulation pipe module 420, which connects the first space part 300 and the second space part 400.

[0074] The second circulation pipe module 420 may allow the nitrogen gas flowing from the first space portion 300 into the second space portion 400 to flow back into the first space portion 300 for circulation, and a forced suction module 430 may be disposed on the second circulation pipe module 420 .

[0075] Among them, the above-mentioned forced circulation module 310 and the above-mentioned forced suction module 420 are used as a suction fan. The above-mentioned forced suction module 420 can be located on the above-mentioned second circulation pipe module 410 to inhale the above-mentioned nitrogen flowing into the above-mentioned second space part 400 from the above-mentioned first space part 300 and discharge it to the above-mentioned first space part 300.

[0076] Therefore, the inspection process performing apparatus 1200 performs the inspection process on the display panel under a uniform nitrogen atmosphere.

[0077] On the other hand, when maintaining the inspection process preparation equipment 1100 and the inspection process execution equipment 1200, workers are required to enter the interior, so the atmosphere may be switched to a clean dry air (CDA) atmosphere.

[0078] 3. Mother panel transport device

[0079] Figure 7 The present invention is a flowchart for explaining a process in which a mother panel is adsorbed on a vacuum adsorption module by a mother panel conveying device provided in the display panel inspection apparatus of the present invention.

[0080] First, refer to Figure 3 and Figure 4 The mother panel conveying device 100 may include a platform module 110 , a conveying module 120 , a picking module 130 , a vacuum adsorption module 140 , and the like.

[0081] The platform module 110 is a structural element that absorbs and fixes the other side of the mother panel MP in a normal state with one side of the mother panel MP facing upward. One side of the mother panel MP can have at least one type of display panel DP, and the display panel DP has an organic layer deposited thereon for forming an organic light-emitting layer.

[0082] The other surface of the mother panel MP may be entirely a non-deposition portion.

[0083] The platform module 110 may be rotated to inspect the display panel in a face-down manner, whereby the mother panel MP disposed in the normal state and adsorbed to the platform module 110 may be in a reversed state with one surface facing downward.

[0084] The conveying module 120 may be a structural element that adsorbs the other side of the mother panel MP that is transformed from the normal state to the flipped state on the platform module 110, and then moves the mother panel MP to a first position for inspecting whether there are defects while maintaining the flipped state.

[0085] The pickup module 130 may be a structural element as follows: it adsorbs the other side of the mother panel MP moved to the first position through the transport module 120, and then moves to the second position while maintaining the flipped state, the second position being a position raised based on the first position, and the pickup module 130 may enable the plate-shaped vacuum adsorption module 140 described later to adsorb the mother panel MP in the flipped state.

[0086] The vacuum adsorption module 140 may be a structural element as follows: if the mother panel MP in the flipped state is moved to the second position through the transport module 120, the mother panel MP can be adsorbed while maintaining smoothness in the flipped state, and then the display panel can be inspected for defects through interaction with the probe block PB of the probe unit PU of the display panel inspection device 200.

[0087] If the mother panel MP is adsorbed in the flipped state by the vacuum adsorption module 140, the vacuum adsorption module 140 moves the position of the electrode plate of the display panel DP and the probe block PB while keeping the mother panel MP in the flipped state, thereby being able to inspect whether the display panel DP has defects in the flipped state.

[0088] Among them, the reason why the above-mentioned mother panel finally needs to be adsorbed on the vacuum adsorption module 140 while maintaining the above-mentioned flipped state is to accurately control the position of the display panel DP used to inspect whether the display panel has defects and maintain the smoothness of the display panel DP. Moreover, if the display panel inspection device 200 is moved in a state in which the mother panel MP is adsorbed by other structural elements instead of the vacuum adsorption module 140, problems such as smoothness may occur and accurate inspection of defects cannot be guaranteed.

[0089] Hereinafter, a process of adsorbing the mother panel MP to the vacuum adsorption module 140 by the mother panel conveying device 100 of the present invention will be described.

[0090] Reference Figure 7The steps of adsorbing the mother panel to the vacuum adsorption module through the mother panel conveying device 100 of the present invention may include: a first step S10, the mother panel MP is configured on the platform module 110 in a normal state; a second step S20, the platform module 110 rotates; a third step S30, the conveying module 120 enters and adsorbs the mother panel MP; a fourth step S40, the conveying module 120 moves to the first position; a fifth step S50, the picking module 130 descends and adsorbs the mother panel MP; a sixth step S60, the conveying module 120 returns; a seventh step S70, the picking module 130 rises to the second position; an eighth step S80, the display panel DP is adsorbed by the vacuum adsorption module 140; and a ninth step S90, the picking module 130 rises and moves to the third position.

[0091] Below, refer to Figures 8 to 19 The above steps are described in detail.

[0092] Figure 8 This is a diagram for explaining a state where a mother panel is normally mounted on a platform module provided in the mother panel conveying device of the present invention.

[0093] Reference Figure 8 , the mother panel MP can be arranged on the platform module 110 in a normal state ( S10 ) and then adsorbed.

[0094] For the convenience of explanation, a surface of the mother panel MP having at least one display panel DP is indicated by shadow.

[0095] On the other hand, the method of placing the mother panel MP on the platform module 110 is not particularly limited, and may be various methods, such as an automatic method using a robot device or a manual method using a worker in a nitrogen atmosphere.

[0096] The platform module 110 may include a plurality of platform units 112 which absorb the other surface SF2 of the mother panel MP in the normal state; the platform units 112 may be spaced apart from each other to form a first space S1 therebetween.

[0097] For example, Figure 8 As shown, nine platform units 112 may be formed, but the present invention is not necessarily limited thereto. As long as the mother panel MP to be supported can be stably supported so that the center portion thereof does not sink due to its own weight, the number may be changed.

[0098] The platform units 112 may each include a suction unit 114 such as a suction pad for suctioning the mother panel MP, wherein the number of the suction units 114 is not limited.

[0099] Fig. 9 and Fig.10 It is used to illustrate Figure 8 The diagram shows a situation where the mother panel in a normal state is transformed into a flipped state by rotating the platform module.

[0100] Reference Fig. 9 and Fig.10 The platform module 110 may rotate R ( S20 ) while adsorbing the mother panel MP in a normal state, wherein the rotation direction is not limited.

[0101] The driving method for rotating the platform module 110 is not particularly limited. For example, the platform module 110 may be rotated by a known motor.

[0102] When the stage module 110 rotates, the mother panel MP adsorbed in a normal state is changed to a reversed state in which the surface SF1 where the deposition portion is located faces downward.

[0103] The mother panel MP is kept in a flipped state during the defect inspection, so that the display panel DP can be inspected for defects in a face-down manner.

[0104] Fig.11 1 is a diagram for explaining a situation in which a conveying module of a mother panel conveying device provided in the present invention enters a platform module. Fig.12 and Fig.13 This is a diagram for explaining a situation in which a conveying module provided in the mother panel conveying device of the present invention absorbs a mother panel in an inverted state.

[0105] Reference Figures 11 to 13 If the mother panel MP is turned over by the rotation of the platform module 110 , the transport module 120 enters the platform module 110 and absorbs the mother panel MP ( S30 ).

[0106] The conveying module 120 may include a plurality of conveying units 122 inserted into the first space S1 provided by the platform unit 112 and adsorbing the other surface SF2 of the mother panel MP disposed in a reversed state.

[0107] Similar to the platform unit 112 , the transport units 122 may be arranged at intervals.

[0108] For example, as shown in the figure, eight conveying units 122 may be formed, but the present invention is not necessarily limited thereto.

[0109] The transport unit 122 may enter the first space S1 provided by the mother panel MP and the platform unit 112 , and absorb the other side SF2 of the mother panel MP. In order to absorb the mother panel MP, the transport unit 122 may move in the vertical direction as required.

[0110] The transport units 122 may each include a suction unit 124 such as a suction pad for suctioning the mother panel MP, wherein the number of the suction units 124 is not limited.

[0111] As described above, when the mother panel MP is sucked by the conveying unit 122 , the suction of the mother panel MP by the stage unit 112 is released, so that the mother panel MP and the conveying unit 122 move in conjunction with each other.

[0112] Fig.14 This is a diagram for explaining a state in which a conveyance module provided in the mother panel conveyance device of the present invention moves to a first position.

[0113] Reference Fig.14 The transfer module 120 can move to a first position for inspecting whether there is a defect by adsorbing the mother panel MP in the reversed state while maintaining the reversed state (S40).

[0114] The first position may mean a lower position based on the position where the vacuum adsorption module 140 and the pickup module 130 are configured. In subsequent steps, the pickup module 130 may keep the mother panel MP in the flipped state and stably adsorb the mother panel MP in the flipped state.

[0115] Fig.15 and Fig.16 A diagram for explaining a situation in which a pickup module provided in the mother panel conveying device of the present invention descends and adsorbs a mother panel in a flipped state; Fig.17 This is a diagram for explaining a state in which a conveyance module provided in the mother panel conveyance device of the present invention returns to an original position.

[0116] Reference Fig.15 and Fig.16 The pickup module 130 may move from the third position to the first position by descending through the vacuum adsorption module 140, and may adsorb the mother panel MP in the reversed state moved to the first position by the conveying module 120 (S50).

[0117] The pickup module 130 may include a plurality of pickup units 132 that are spaced apart from each other to uniformly absorb the other surface SF2 of the mother panel MP to prevent the mother panel MP from sinking.

[0118] If the mother panel MP is adsorbed by the pickup module 130, Fig.17 As shown, the transport module 120 may be released from adsorption and separated from the mother panel MP, and moved to an original position ( S60 ).

[0119] The transport module 120 moved to the original position may be operated to inspect other display panels disposed on other mother panels.

[0120] Fig.18 It is a diagram for explaining a state in which the pickup module provided in the mother panel conveying device of the present invention rises to the second position.

[0121] Reference Fig.18 After the pickup module 130 absorbs the mother panel MP in the flipped state, it can be moved to the second position by rising (S70), so that the vacuum absorption module 140 can absorb the mother panel MP (S80).

[0122] The second position may be a position that is raised to the vacuum adsorption module 140 by the pickup module 130 based on the first position, and the vacuum adsorption module 140 may stably adsorb the mother panel MP in a flipped state through the pickup module 130 .

[0123] The vacuum adsorption module 140 may include a plurality of adsorption units such as adsorption pads for adsorbing the mother panel MP.

[0124] Fig.19 It is a diagram for explaining a state in which the pickup module provided in the mother panel conveying device of the present invention rises to the third position.

[0125] Reference Fig.19 If the other surface SF2 of the mother panel MP moved to the second position is adsorbed by the vacuum adsorption module 140, the pickup module 130 may release the adsorption and separate from the mother panel MP, and then rise and return to the third position (S90).

[0126] Then, whether there is a defect may be inspected through interaction with the above-mentioned vacuum adsorption module 140 and the display panel inspection apparatus 200 including the probe unit PU having the probe block PB installed therein.

[0127] The interaction may mean that the vacuum adsorption module 140 moves to contact the electrode plate of the display panel DP and the probe block PB of the probe unit PU configured on the mother panel MP, so as to inspect whether the display panel DP has defects.

[0128] Hereinafter, a process of inspecting whether the display panel DP is defective by the display panel inspection apparatus 200 will be described in detail.

[0129] 4. Display panel inspection device

[0130] Fig. 20 It is a diagram for explaining a display panel inspection device provided in the display panel inspection equipment of the present invention.

[0131] Reference Fig. 20 The display panel inspection device 200 may include a probe unit PU and a support unit 210 , wherein the probe unit PU supports the probe block PB, and the probe unit PU is movably mounted on the support unit 210 .

[0132] The above-mentioned supporting unit 210 may be a frame formed in a plate shape, and the above-mentioned probe unit PU may include: a first probe unit PU1, which supports a plurality of first probe blocks PB1 arranged along a horizontal direction; a second probe unit PU2, which supports a plurality of second probe blocks PB2 arranged along a vertical direction; a third probe unit PU3, which supports a plurality of third probe blocks PB3 arranged along the above-mentioned horizontal direction; and a fourth probe unit PU4, which supports a plurality of fourth probe blocks PB4 arranged along the above-mentioned vertical direction.

[0133] Among them, the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 can move along the horizontal direction D1, D2 or the vertical direction D3, D4 on the support unit 210, and by moving in the horizontal direction D1, D2 and the vertical direction D3, D4, the result of moving along the diagonal direction D5 can be obtained.

[0134] The lateral directions D1 and D2 and the longitudinal directions D3 and D4 may be directions for forming a square corresponding to the shape of the display panel DP.

[0135] In addition, the first probe unit PU1 , the second probe unit PU2 , the third probe unit PU3 , and the fourth probe unit PU4 may also move directly along the diagonal direction D5 on the supporting unit 210 .

[0136] On the other hand, the multiple first probe blocks PB1, the multiple second probe blocks PB2, the multiple third probe blocks PB3 and the multiple fourth probe blocks PB4 are respectively installed on the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 in a movable position manner.

[0137] As described above, by moving the positions of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and / or the fourth probe unit PU4 on the supporting unit 210 and the multiple first probe blocks PB1 on the first probe unit PU1, the multiple second probe blocks PB2 on the second probe unit PU2, the multiple third probe blocks PB3 on the third probe unit PU3 and the multiple fourth probe blocks PB4 on the fourth probe unit PU4, the display panels DP of various sizes included in the mother panel MP can be inspected for defects without replacing the probe units, and regardless of the configuration status of the display panels DP of various sizes included in the mother panel MP, that is, regardless of whether the long sides are configured along the horizontal direction D1, D2 or the vertical direction D3, D4, the inspection can be performed by appropriate corresponding measures.

[0138] Figure 21 to Figure 27 This is a diagram for explaining a method of inspecting individual display panels when a vacuum adsorption module provided in the mother panel conveying device of the present invention adsorbs a mother panel to be inspected, which is a combination of a 65-inch display panel and a 55-inch display panel, and inspects whether there are defects.

[0139] First, the mother panel MP adsorbed to the vacuum adsorption module 140 in a reversed state is described as an example in which the display panel DP is a mixed type formed by three 65-inch display panels DP1, DP2, DP3 and two 55-inch display panels DP4, DP5.

[0140] Furthermore, each display panel has: a plurality of first electrode plates formed along a first edge region, wherein the first edge region is one of the edge regions on the upper surface of the display panel; a plurality of second electrode plates formed along a second edge region, wherein the second edge region is another edge region on the upper surface; a plurality of third electrode plates formed along a third edge region, wherein the third edge region is another edge region on the upper surface; and a plurality of fourth electrode plates formed along a fourth edge region, wherein the fourth edge region is another edge region on the upper surface.

[0141] In addition, after the 65-inch display panels DP1, DP2, and DP3 are inspected first, when the inspection is completed, the remaining 55-inch display panels DP4 and DP5 are inspected as an example.

[0142] Reference Fig.21In order to check whether the 65-inch display panels DP1, DP2, and DP3 included in the mother panel MP adsorbed on the above-mentioned vacuum adsorption module 140 are defective, the first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the fourth probe unit PU4 can be moved on the supporting unit 210.

[0143] In other words, in order to make the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the 65-inch display panels DP1, DP2, and DP3 respectively contact at least a portion of the multiple first probe blocks PB1 of the first probe unit PU1, at least a portion of the multiple second probe blocks PB2 of the second probe unit PU2, at least a portion of the multiple third probe blocks PB3 of the third probe unit PU3, and at least a portion of the multiple fourth probe blocks PB4 of the fourth probe unit PU4, at least one of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the fourth probe unit PU4 can be moved in position on the support unit 210.

[0144] At least one of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 can move directly along the diagonal direction D5, or as shown in the figure, move along the diagonal direction D5 by moving along the horizontal direction D1, D2 and the longitudinal direction D3, D4.

[0145] Among them, the position movement of each of the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 on the support unit 210 can be achieved by using various structural elements such as linear motion guides, motors, ball screws and ball nuts, but this is only an example and various well-known movement methods can also be used to achieve it.

[0146] If the probe blocks that need to contact the above-mentioned multiple first electrode plates, the above-mentioned multiple second electrode plates, the above-mentioned multiple third electrode plates and the above-mentioned multiple fourth electrode plates respectively are a part of the above-mentioned multiple first probe blocks PB1, a part of the above-mentioned multiple second probe blocks PB2, a part of the above-mentioned multiple third probe blocks PB3 and a part of the above-mentioned multiple fourth probe blocks PB4, then the above-mentioned first probe unit PU1, the above-mentioned second probe unit PU2, the above-mentioned third probe unit PU3 and the above-mentioned fourth probe unit PU4 can move directly along the diagonal direction D5, or move along the above-mentioned diagonal direction D5 by moving along the above-mentioned transverse directions D1, D2 and the above-mentioned longitudinal directions D3, D4.

[0147] In this case, the first probe unit PU1, the second probe unit PU2, the third probe unit PU3, and the fourth probe unit PU4 may have a pinwheel shape.

[0148] On the other hand, even if the probe blocks that need to contact the above-mentioned multiple first electrode plates, the above-mentioned multiple second electrode plates, the above-mentioned multiple third electrode plates and the above-mentioned multiple fourth electrode plates respectively are all of the above-mentioned multiple first probe blocks PB1, all of the above-mentioned multiple second probe blocks PB2, all of the above-mentioned multiple third probe blocks PB3 and all of the above-mentioned multiple fourth probe blocks PB4, the above-mentioned first probe unit PU1, the above-mentioned second probe unit PU2, the above-mentioned third probe unit PU3 and the above-mentioned fourth probe unit PU4 can also move directly along the diagonal direction D5 according to the situation, or move to the above-mentioned diagonal direction D5 by moving in the above-mentioned lateral directions D1, D2 and the above-mentioned longitudinal directions D3, D4.

[0149] The first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 can be moved on the first probe unit PU1, the second probe unit PU2, the third probe unit PU3 and the fourth probe unit PU4 respectively, wherein the moving method is not particularly limited.

[0150] As described above, the display panel inspection device 200 of the present invention can inspect whether all 65-inch display panels DP1, DP2, DP3 and 55-inch display panels DP4, DP5 formed on the above-mentioned mother panel MP are defective by moving the position of the above-mentioned probe unit PU and / or the above-mentioned probe block PB without replacing the probe unit and / or the probe block, which is described in detail below.

[0151] The display panel inspection device 200 of the present invention detects whether a mother panel MP having three 65-inch display panels DP1 , DP2 , DP3 and two 55-inch display panels DP4 , DP5 is adsorbed on the vacuum adsorption module 140 by a detection unit not shown.

[0152] The above-mentioned detection unit may include a shooting unit using a camera and / or various detection units, etc., which can detect the size of the display panel DP constituting the above-mentioned mother panel MP before or during moving to a position where the above-mentioned probe unit PU is configured, when the above-mentioned mother panel is adsorbed on the above-mentioned vacuum adsorption module 140.

[0153] If the size and / or type of the display panels DP1, DP2, DP3, DP4, DP5 constituting the above-mentioned mother panel MP is detected by the above-mentioned detection unit, the control unit determines the display panels DP1, DP2, DP3, DP4, DP5 to be inspected first; below, as described above, the case where the 65-inch display panel is determined as the priority inspection object relative to the 55-inch display panels DP4 and DP5 is explained as an example.

[0154] The sizes and / or types of the display panels DP1, DP2, DP3, DP4, DP5 formed on the mother panel MP are detected by the above-mentioned control unit. When the 65-inch display panels DP1, DP2, DP3 are preferentially detected among the detected display panels, the above-mentioned control panel can move the probe unit PU and the probe block PB so that the probe block PB contacts the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate arranged on the above-mentioned 65-inch display panel DP to achieve electrical connection.

[0155] That is, the first probe unit PU1 moves in the diagonal direction D5 by moving along the lower direction D4 (toward the third probe unit PU3) in the longitudinal directions D3 and D4 and along the right direction D1 in the transverse directions D1 and D2 in no particular order, but is not necessarily limited to this and may also move directly along the diagonal direction D5.

[0156] At this time, the probe block to be inspected among the multiple first probe blocks PB1 can be moved along the left direction D2 of the horizontal directions D1 and D2 on the first probe unit PU1, but as shown in the figure, it can also remain unchanged according to the arrangement state of the electrode plates of the display panel.

[0157] Furthermore, the second probe unit PU2 moves in the diagonal direction D5 by moving in the left direction D2 (toward the fourth probe unit PU4) in the lateral directions D1 and D2 and in the lower direction D4 in the longitudinal directions D3 and D4 in no particular order. However, it is not necessarily limited to this and may also move directly in the diagonal direction D5.

[0158] At this time, the probe block to be inspected among the multiple second probe blocks PB2 can be moved along the upper direction D3 of the longitudinal directions D3 and D4 on the second probe unit PU2, but as shown in the figure, it can also remain unchanged depending on the arrangement state of the electrode plates of the display panel.

[0159] Furthermore, the third probe unit PU3 moves in the diagonal direction D5 by moving in the upper direction D3 (toward the first probe unit PU1) in the longitudinal directions D3 and D4 and in the left direction D2 in the transverse directions D1 and D2 in no particular order, but is not necessarily limited to this and may also move directly in the diagonal direction D5.

[0160] At this time, the probe block that needs to be checked among the multiple third probe blocks PB3 can be moved on the third probe unit PU3 along the right direction D1 in the horizontal directions D1 and D2, but as shown in the figure, it can also remain unchanged depending on the arrangement state of the electrode plates of the display panel.

[0161] Furthermore, the fourth probe unit PU4 moves in the right direction D1 (toward the second probe unit PU2) in the lateral directions D1 and D2 and in the upper direction D3 in the longitudinal directions D3 and D4 in no particular order, and as a result, can move along the diagonal direction D5, but is not necessarily limited to this, and can also move directly along the diagonal direction D5.

[0162] At this time, the probe block to be inspected among the plurality of fourth probe blocks PB4 can be moved along the lower direction D4 of the longitudinal directions D3 and D4 on the fourth probe unit PU4, but as shown in the figure, it can also remain unchanged depending on the arrangement state of the electrode plates of the display panel.

[0163] As a result, the first probe unit 110 , the second probe unit 120 , the third probe unit 130 , and the fourth probe unit 140 may be moved in a pinwheel shape.

[0164] Furthermore, the first probe block PB1 and the third probe block PB3 required for inspection can be respectively moved in opposite directions on the first probe unit PU1 and the third probe unit PU3 according to the arrangement state of the electrode plate of the display panel, and the second probe block PB2 and the fourth probe block PB4 required for inspection can be respectively moved in opposite directions on the second probe unit PU2 and the fourth probe unit PU4 according to the arrangement state of the electrode plate of the display panel.

[0165] Of course, as described above, according to the arrangement state of the electrode plates of the display panel, the positions of the first probe block PB1 , the second probe block PB2 , the third probe block PB3 and the fourth probe block PB4 may not be changed.

[0166] Through the position movement of the probe unit PU and the position movement of the probe block PB, a part of the multiple first probe blocks PB1, a part of the multiple second probe blocks PB2, a part of the multiple third probe blocks PB3 and a part of the multiple fourth probe blocks PB4 are accurately configured at positions corresponding to the first electrode plate, second electrode plate, third electrode plate and fourth electrode plate of the 65-inch display panels DP1, DP2 and DP3, respectively.

[0167] When the position movement of the probe unit PU and the probe block PB is completed, the vacuum adsorption module 140 moves so that the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the first 65-inch display panel DP1 constituting the mother panel MP are respectively located on the upper parts of the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4.

[0168] The position movement of the vacuum adsorption module 140 may include linear movement and / or rotational movement, etc. In addition, various movement modes may also be applicable.

[0169] Furthermore, various configuration states of the display panel DP1 that need to be checked can be realized.

[0170] When the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the first 65-inch display panel DP1 are respectively located on the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4, as shown in FIG. Fig. 22 As shown, by moving the position of the vacuum adsorption module 140, the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the first 65-inch display panel DP1 respectively contact the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 to achieve electrical connection, thereby checking whether the first 65-inch display panel DP1 has defects.

[0171] On the other hand, when the inspection of whether the first 65-inch display panel DP1 is defective is completed, the position of the vacuum adsorption module 140 is moved to release the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the first 65-inch display panel DP1 from contact with the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 respectively.

[0172] Then, if Fig.23As shown, the position of the vacuum adsorption module 140 is moved to realize that the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the second 65-inch display panel DP2 are in contact with the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 respectively, thereby inspecting whether the second 65-inch display panel DP2 has defects.

[0173] When the inspection of whether the second 65-inch display panel DP2 is defective is completed, the position of the vacuum adsorption module 140 is moved to release the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the second 65-inch display panel DP2 from contact with the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 respectively.

[0174] Then, if Fig.24 As shown, by moving the position of the vacuum adsorption module 140, the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the third 65-inch display panel DP3 are respectively brought into contact with the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4, thereby inspecting whether the third 65-inch display panel DP3 has defects.

[0175] When the inspection of whether the third 65-inch display panel DP3 is defective is completed, the position of the vacuum adsorption module 140 is moved to release the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the third 65-inch display panel DP3 from contact with the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 respectively.

[0176] Then, in order to inspect whether the 55-inch display panels DP4 and DP5 are defective by the display panel inspection device 200 of the present invention, as shown in FIG. Fig.25 As shown, the control unit can move the probe units PU1, PU2, PU3, PU4 and the probe blocks PB1, PB2, PB3, PB4 so that the probe blocks PB1, PB2, PB3, PB4 contact the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate arranged on the 55-inch display panels DP4, DP5 to achieve electrical connection.

[0177] By moving the positions of probe units PU1, PU2, PU3, PU4 and probe blocks PB1, PB2, PB3, PB4, the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 are respectively moved to positions that exactly correspond to the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the 55-inch display panels DP4 and DP5.

[0178] When the position movement of the probe units PU1, PU2, PU3, PU4 and the probe blocks PB1, PB2, PB3, PB4 is completed, the vacuum adsorption module 140 moves the position so that the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the first 55-inch display panel DP4 constituting the mother panel MP are respectively located on the upper parts of the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4.

[0179] The position movement of the vacuum adsorption module 140 may include linear movement and / or rotational movement, etc. In addition, various movement modes may also be applicable.

[0180] When the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the first 55-inch display panel DP4 are respectively located on the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4, as shown in FIG. Fig.26 As shown, by moving the position of the vacuum adsorption module 140, the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the first 55-inch display panel DP4 respectively contact the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 to achieve electrical connection, thereby inspecting whether the first 55-inch display panel DP4 has defects.

[0181] On the other hand, when the inspection of whether the first 55-inch display panel DP4 is defective is completed, the position of the vacuum adsorption module 140 is moved to release the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the first 55-inch display panel DP4 from contact with the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 respectively.

[0182] Then, if Fig. 27As shown, by moving the position of the vacuum adsorption module 140, the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the second 55-inch display panel DP5 are respectively brought into contact with the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4, thereby inspecting whether the second 55-inch display panel DP5 has defects.

[0183] When the inspection of whether the second 55-inch display panel DP5 is defective is completed, the position of the vacuum adsorption module 140 is moved to release the contact between the first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate of the second 55-inch display panel DP5 and the first probe block PB1, the second probe block PB2, the third probe block PB3 and the fourth probe block PB4 respectively, thereby completing the inspection of whether all the display panels DP1, DP2, DP3, DP4 and DP5 included in the mother panel are defective.

[0184] As described above, when the inspection of whether all display panels DP1, DP2, DP3, DP4, DP5 formed on one mother panel are defective is completed, the above-mentioned mother panel MP is moved to perform the next process (for example, packaging process, etc.), and the inspection process for other mother panels is repeated.

[0185] Fig.28 This is a diagram for explaining the position movement of unused probe blocks when inspecting whether a display panel has a defect using the display panel inspection apparatus of the present invention.

[0186] Reference Fig.28 , when an inspection is performed to determine whether a display panel is defective, a portion of a plurality of probe blocks on an arbitrary probe unit may not be used for the inspection.

[0187] Hereinafter, a case where only the outermost probe block PBX is not used for inspection among a plurality of probe blocks on an arbitrary probe unit will be described as an example, but it is stated here that the same is applicable even if there are a plurality of probe blocks not used for inspection.

[0188] When inspecting a display panel of a specific size, when the probe blocks among the multiple probe blocks on any probe unit that need to contact the multiple electrode plates are partial probe blocks, the remaining probe blocks PBX among the above multiple probe blocks can be moved in position to prevent contact with other display panels on the above mother panel except for the display panel that is being inspected for defects by contacting the above multiple electrode plates through the above partial probe blocks among the above multiple probe blocks.

[0189] Specifically, the probe block PBX may include: a probe main body portion PBX1, which is installed on the above-mentioned probe unit PU; and a probe variable portion PBX2, which is installed on the above-mentioned probe main body portion PBX1 in a movable position toward the upper part or the lower part, and has a probe. If the above-mentioned probe variable portion PBX2 is equivalent to the above-mentioned remaining probe block, it can be moved from the above-mentioned probe main body portion PBX1 to the lower part, thereby preventing contact with other display panels on the above-mentioned mother panel.

[0190] The method for moving the position of the probe variable portion PBX2 on the probe body PBX1 may be driven by a driver, but is not necessarily limited thereto, and any known driving method may be applied.

[0191] The structure and features of the present invention are described above based on the embodiments of the present invention, but the present invention is not limited thereto, and technicians in the technical field to which the present invention belongs clearly know that various changes or modifications can be made within the scope of the concept of the present invention, and therefore such changes or modifications fall within the scope of the claims.

Claims

1. A mother panel conveying device, characterized in that: include: a platform module, which absorbs and fixes the other side of the mother panel in a normal state with one side of the mother panel facing upward, wherein one side of the mother panel has at least one type of display panel, and the display panel is deposited with an organic layer for forming an organic light-emitting layer, and the platform module rotates to make the mother panel change from the normal state to a flipped state with one side facing downward; a conveying module, which absorbs the other side of the mother panel that is transformed from the normal state to the flipped state on the platform module, and then moves the mother panel to a first position for inspecting whether the display panel has defects while maintaining the flipped state; a vacuum adsorption module for inspecting whether the display panel has defects by interacting with a probe unit on which a probe block is installed; and a pick-up module that absorbs the other side of the mother panel moved to the first position by the conveying module, and then moves to the second position while maintaining the flipped state, wherein the other side of the mother panel is absorbed while maintaining the flipped state by the vacuum absorption module, and the display panel is inspected for defects through the interaction, The platform module includes a plurality of platform units, which absorb the other side of the mother panel in the normal state so that the central part of the mother panel does not sink due to its own weight. The plurality of platform units are spaced apart from each other to form a first space between them. The transport module includes a plurality of transport units. If the platform module is rotated to change the state of the mother panel from the normal state to the flipped state, the plurality of transport units are inserted into the first space and adsorb the other side of the mother panel configured in the flipped state so that the central portion of the mother panel does not sink due to its own weight.

2. The mother panel conveying device according to claim 1, characterized in that: The vacuum adsorption module moves the position of the mother panel while keeping the mother panel in the flipped state so that the electrode plate of the display panel contacts the probe block, thereby inspecting whether the display panel has defects in the flipped state.

3. The mother panel conveying device according to claim 1, characterized in that: If the other surface is adsorbed by the pickup module, the transport module releases the adsorption and separates from the mother panel, and then moves to the original position.

4. The mother panel conveying device according to claim 1, characterized in that: The second position is a position where the pickup module rises to the vacuum adsorption module based on the first position.

5. The mother panel conveying device according to claim 1, characterized in that: The picking module moves to the first position from the state of being located at the third position by descending through the vacuum adsorption module, and adsorbs the other side of the mother panel moved to the first position through the conveying module, and then moves to the second position by ascending so as to adsorb the other side of the mother panel through the vacuum adsorption module.

6. The mother panel conveying device according to claim 5, characterized in that: The pickup module includes a plurality of pickup units which are arranged at intervals from each other so as to uniformly absorb the other surface of the mother panel.

7. The mother panel conveying device according to claim 5, characterized in that: If the other surface of the mother panel moved to the second position is adsorbed by the vacuum adsorption module, the pickup module releases adsorption and separates from the mother panel, and then returns to the third position.

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