Transfer alignment system and transfer alignment method

By designing a transfer alignment system for MicroLED production, the problem of huge transfer costs in the existing MicroLED production process is solved, and fully automated and high-precision transfer of luminescent units is realized, reducing production costs.

CN113808986BActive Publication Date: 2025-05-23MAXWELL TECH (ZHUHAI) CO LTD
View PDF 2 Cites 0 Cited by

Patent Information

Application Number
CN202111063168.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-09-10
Publication Date
2025-05-23
Estimated Expiration
2041-09-10

AI Technical Summary

Technical Problem

In the existing MicroLED production process, huge transfer solutions lead to excessive production costs, limiting their large-scale promotion and use.

Method used

A transfer alignment system is designed, which includes a first stage, a second stage, a plane moving mechanism, an adsorption platform, a alignment camera and a processor. By aligning the camera, the processor controls the movement of the second stage to realize the alignment state between the first light emitting unit and the second light emitting unit.

Benefits of technology

It realizes fully automated and high-precision light emitting unit transfer, providing an efficient solution for huge transfers in MicroLED production process, reducing production costs.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN113808986B_ABST
    Figure CN113808986B_ABST
Patent Text Reader

Abstract

The embodiments of the present application provide a transfer alignment system and a transfer alignment method for transferring and aligning a first light-emitting unit and a second light-emitting unit. The transfer alignment system includes: a first carrier and a second carrier, respectively used to carry the first light-emitting unit and the second light-emitting unit transported by a loading mechanism; a plane moving mechanism, used to drive the movement of the first carrier and the second carrier on a horizontal plane; an adsorption platform, arranged in the alignment area, used to adsorb the first light-emitting unit on the first carrier after the first carrier moves to the alignment area; an alignment camera, arranged in the alignment area, used to collect the first coordinate data of the first light-emitting unit and the second coordinate data of the second light-emitting unit respectively; a processor, used to control the movement of the second carrier according to the first coordinate data and the second coordinate data, so that the second light-emitting unit is in an aligned state with the first light-emitting unit. In this way, the massive transfer of light-emitting units in the MicroLED production process is realized in a fully automated and high-precision manner.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present application relates to the field of automatic control technology, and in particular to a transfer alignment system and a transfer alignment method. Background Art

[0002] Since the birth of the world's first television in 1925 and the application of the world's first color television in 1929, the display industry has developed over the past century, from the initial electronic cathode ray tube to the LCD screen, which has driven the development of televisions from large to smaller flat-panel TVs. With the continuous advancement of science and production technology, more energy-saving and bendable OLED screens were introduced in recent years. Compared with OLED screens, LCD screens are too thick, have low contrast, and slow response speed; although OLED screens have many advantages, their lifespan is not long enough and their resolution is low. Considering the advantages and disadvantages of the first two, the concepts of MicroLED and MiniLED have been proposed in recent years. MiniLED is to reduce the size of the direct-type LED backlight module, and make the panel color palette very good and the contrast very high; however, this approach increases the use of LEDs, the cost is very high, and it is not easy to promote and use on a large scale.

[0003] The difference between MicroLED and OLED is that it is not made of organic matter, but a new material, gallium nitride, so it will not have image burn-in (commonly known as screen burn-in) like OLED even after a long time of use. MicroLED displays have perfect black, excellent colors, and near-perfect tilt angles like OLED, and they will be brighter, less prone to aging, and cheaper than OLED in the long run. MicroLED TVs are also based on a modular system that allows users to customize screen size. Compared with OLED, the production cost of MicroLED is still too high, and the existing mass transfer solutions lead to excessively high production costs. Summary of the invention

[0004] In order to solve the above technical problems, the embodiments of the present application provide a transfer alignment system and a transfer alignment method.

[0005] In a first aspect, an embodiment of the present application provides a transfer alignment system for transferring and aligning a first light emitting unit and a second light emitting unit; the transfer alignment system includes:

[0006] The first carrier and the second carrier are used to carry the first light-emitting unit and the second light-emitting unit transported by the loading mechanism, respectively;

[0007] A plane moving mechanism, used for driving the first stage and the second stage to move on a horizontal plane;

[0008] an adsorption platform, disposed in the alignment area, and used for adsorbing the first light-emitting unit on the first carrier after the first carrier moves to the alignment area;

[0009] an alignment camera, disposed in the alignment area, for respectively collecting first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit;

[0010] The processor is used to control the movement of the second stage according to the first coordinate data and the second coordinate data, so that the second light-emitting unit is in an aligned state with the first light-emitting unit.

[0011] According to a specific embodiment of the present disclosure, the planar movement mechanism includes a transverse axis drive component and a longitudinal axis drive component, and the control ends of the transverse axis drive component and the longitudinal axis drive component are both communicatively connected to the processor;

[0012] The driving direction of the transverse axis driving assembly is perpendicular to the driving direction of the longitudinal axis driving assembly.

[0013] According to a specific implementation of the present disclosure, the transfer alignment system further includes a lifting mechanism and an adjustment mechanism, and control ends of the lifting mechanism and the adjustment mechanism are both communicatively connected to the processor;

[0014] The lifting mechanism is used to drive the first carrier to approach or move away from the adsorption platform in the alignment area;

[0015] The adjustment mechanism is used to adjust the movement of the second carrier.

[0016] According to a specific embodiment of the present disclosure, the adjustment mechanism includes a six-degree-of-freedom drive mechanism.

[0017] According to a specific implementation of the present disclosure, the alignment camera includes a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both communicatively connected to the processor;

[0018] The image acquisition area of ​​the first alignment camera faces the adsorption platform and is used to acquire first coordinate data of the first light-emitting unit on the adsorption platform;

[0019] The image acquisition area of ​​the second alignment camera faces the second stage, and is used to acquire second coordinate data of the second light-emitting unit on the second stage.

[0020] According to a specific embodiment of the present disclosure, the adsorption platform is further provided with three separate alignment detection sensors, and the alignment detection sensors are located between the adsorption platform and the second carrier;

[0021] The alignment detection sensor is used to detect the parallelism of the second carrier relative to the adsorption platform.

[0022] In a second aspect, an embodiment of the present application provides a transfer alignment method, which is applied to the transfer alignment system described in any one of the first aspects; the method comprises:

[0023] The loading mechanism loads the first light emitting unit onto the first stage, and loads the second light emitting unit onto the second stage;

[0024] The plane moving mechanism moves the first carrier to the alignment area, and the adsorption platform adsorbs the first light-emitting unit on the first carrier;

[0025] The plane moving mechanism moves the second stage to the alignment area;

[0026] The alignment camera collects first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit on the second stage respectively;

[0027] The processor controls the movement of the second stage according to the first coordinate data and the second coordinate data so that the second light emitting unit is aligned with the first light emitting unit.

[0028] According to a specific implementation of the present disclosure, the transfer alignment system further includes a lifting mechanism and an adjustment mechanism, and control ends of the lifting mechanism and the adjustment mechanism are both communicatively connected to the processor;

[0029] After the step of the planar moving mechanism moving the first stage to the alignment area, the method further comprises:

[0030] The lifting mechanism drives the first carrier to approach the adsorption platform in the alignment area;

[0031] The processor controls the movement of the second stage according to the first coordinate data and the second coordinate data, comprising:

[0032] The processor determines adjustment data according to the first coordinate data and the second coordinate data;

[0033] The adjustment mechanism adjusts the movement of the second stage according to the adjustment data.

[0034] According to a specific embodiment of the present disclosure, the adsorption platform is further provided with three separate alignment detection sensors, and the alignment detection sensors are located between the adsorption platform and the second carrier;

[0035] After the step of the planar moving mechanism moving the second stage to the alignment area, the method further comprises:

[0036] The alignment detection sensor detects the parallelism of the second carrier relative to the adsorption platform;

[0037] The adjustment mechanism adjusts the movement of the second stage according to the parallelism.

[0038] According to a specific implementation of the present disclosure, the alignment camera includes a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both communicatively connected to the processor;

[0039] The step of respectively collecting the first coordinate data of the first light-emitting unit and the second coordinate data of the second light-emitting unit on the second stage by the alignment camera comprises:

[0040] The image acquisition area of ​​the first alignment camera faces the adsorption platform, and acquires first coordinate data of a first marking point of a first light-emitting unit on the adsorption platform;

[0041] The image acquisition area of ​​the second alignment camera faces the second stage, and acquires second coordinate data of a second marking point of a second light-emitting unit on the second stage.

[0042] The transfer alignment system and transfer alignment method provided in the present application are used to transfer and align the first light-emitting unit and the second light-emitting unit. The transfer alignment system includes: a first carrier and a second carrier, respectively used to carry the first light-emitting unit and the second light-emitting unit transported by the loading mechanism; a plane moving mechanism, used to drive the movement of the first carrier and the second carrier on the horizontal plane; an adsorption platform, arranged in the alignment area, used to adsorb the first light-emitting unit on the first carrier after the first carrier moves to the alignment area; an alignment camera, arranged in the alignment area, used to collect the first coordinate data of the first light-emitting unit and the second coordinate data of the second light-emitting unit respectively; a processor, used to control the movement of the second carrier according to the first coordinate data and the second coordinate data, so that the second light-emitting unit is in an aligned state with the first light-emitting unit. In this way, the massive transfer of light-emitting units in the MicroLED production process is realized in a fully automated and high-precision manner. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present application and should not be regarded as limiting the scope of protection of the present application. In each of the drawings, similar components are numbered similarly.

[0044] Figure 1 A schematic structural diagram of a transfer alignment system provided in an embodiment of the present application is shown;

[0045] Figures 2 to 7 A partial structural schematic diagram of a transfer alignment system provided in an embodiment of the present application is shown.

[0046] Summary of reference numerals:

[0047] Horizontal axis driving assembly 1, gantry 2, laser working unit 3, upper alignment device 4;

[0048] Lifting mechanism 5, first stage 6, second stage 7, upper alignment mounting plate 8, upper alignment Y axis 9, upper alignment XZ axis 10, upper alignment camera 11, alignment detection sensor 12, adsorption platform 13;

[0049] Adjustment mechanism 15 , lower alignment camera 16 , lower alignment drive shaft 17 , lifting mechanism 18 . DETAILED DESCRIPTION

[0050] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0051] The components of the embodiments of the present application generally described and shown in the drawings herein may be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0052] Hereinafter, the terms "including", "having" and their cognates, which may be used in various embodiments of the present application, are intended only to indicate specific features, numbers, steps, operations, elements, components, or combinations of the foregoing items, and should not be understood as first excluding the existence of one or more other features, numbers, steps, operations, elements, components, or combinations of the foregoing items or adding the possibility of one or more features, numbers, steps, operations, elements, components, or combinations of the foregoing items.

[0053] Furthermore, the terms “first”, “second”, “third”, etc. are merely used for distinguishing descriptions and are not to be understood as indicating or implying relative importance.

[0054] Unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meanings as those generally understood by those skilled in the art to which the various embodiments of the present application belong. The terms (such as those defined in generally used dictionaries) will be interpreted as having the same meanings as the contextual meanings in the relevant technical field and will not be interpreted as having idealized meanings or overly formal meanings unless clearly defined in the various embodiments of the present application.

[0055] Example 1

[0056] See also Figure 1 , is a schematic diagram of a transfer alignment system provided in an embodiment of the present application, wherein the provided transfer alignment system is used to transfer the first light emitting unit and the second light emitting unit. Figure 1 As shown, the transfer alignment system mainly includes:

[0057] The first carrier 6 and the second carrier 7 are respectively used to carry the first light-emitting unit and the second light-emitting unit transported by the loading mechanism;

[0058] A plane moving mechanism, used for driving the first stage 6 and the second stage 7 to move on a horizontal plane;

[0059] An adsorption platform 13, disposed in the alignment area, for adsorbing the first light-emitting unit on the first carrier 6 after the first carrier 6 moves to the alignment area;

[0060] An alignment camera, disposed in the alignment area, for respectively collecting first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit;

[0061] The processor is used to control the movement of the second stage 7 according to the first coordinate data and the second coordinate data, so that the second light-emitting unit is in an aligned state with the first light-emitting unit.

[0062] The transfer alignment system provided in this embodiment is applied to the transfer alignment process of the light emitting unit in the microLED processing technology. Figure 2 As shown, the upper part is a schematic diagram of the first light-emitting unit Carrier1 and the second light-emitting unit Carrier2 that need to be transferred and aligned, and the lower part is a schematic diagram of the light-emitting unit after the transfer and alignment. The processor is the main control device of the transfer and alignment process, controlling the operation of the carrier, the moving mechanism, the adsorption platform 13, etc.

[0063] The transfer alignment system provided, such as Figure 3 As shown, it is a schematic diagram of the structure of the first carrier 6. Figure 4Schematic diagram of the structure of the second carrier 7. The first carrier 6 and the second carrier 7 are used to carry the first light-emitting unit and the second light-emitting unit transported by the feeding mechanism respectively. The plane moving mechanism is used to drive the first carrier 6 and the second carrier 7 to move on the horizontal plane.

[0064] According to a specific embodiment of the present disclosure, the planar movement mechanism includes a transverse axis drive component 1 and a longitudinal axis drive component 5, and the control ends of the transverse axis drive component 1 and the longitudinal axis drive component 5 are both communicatively connected to the processor;

[0065] The driving direction of the transverse axis driving assembly 1 is perpendicular to the driving direction of the longitudinal axis driving assembly 5 .

[0066] The plane moving mechanism includes a transverse axis driving component 1 and a longitudinal axis driving component 5. The transverse axis driving component 1 can drive the first carrier 6 or the second carrier 7 to move along the transverse axis on the horizontal plane, and the longitudinal axis driving component 5 can drive the first carrier 6 or the second carrier 7 to move along the longitudinal axis on the horizontal plane. Usually, a reference coordinate system is established, the driving direction of the transverse axis driving component 1 is parallel to the x-axis, and the driving direction of the longitudinal axis driving component 5 is parallel to the y-axis, such as Figure 5 The schematic diagram of the structure of the longitudinal axis driving component 5 driven along the y-axis is shown.

[0067] An alignment area is set, in which the transfer alignment is completed, and the adsorption platform 13 and the alignment camera are both set in the alignment area. After the planar driving mechanism moves the first stage 6 to the alignment area, the adsorption platform 13 adsorbs the first light-emitting unit on the first stage 6. Thereafter, the first stage 6 is moved away, and the second stage 7 is moved below the adsorption platform 13.

[0068] During alignment, after the second carrier 7 moves to below the adsorption platform 13 , the second light-emitting unit on the second carrier 7 and the first light-emitting unit under the adsorption platform 13 are located in the alignment area, but are not completely aligned.

[0069] The alignment camera is used to collect the first coordinate data of the first light-emitting unit and the second coordinate data of the second light-emitting unit, and send them to the processor. The processor controls the movement of the second stage 7 according to the first coordinate data and the second coordinate data, so that the second light-emitting unit is aligned with the first light-emitting unit.

[0070] According to a specific embodiment of the present disclosure, the transfer alignment system further includes a lifting mechanism 18 and an adjustment mechanism 15, and the control ends of the lifting mechanism 18 and the adjustment mechanism 15 are both communicatively connected to the processor;

[0071] The lifting mechanism 18 is used to drive the first carrier 6 to approach or move away from the adsorption platform 13 in the alignment area;

[0072] The adjustment mechanism 15 is used to adjust the movement of the second carrier 7 .

[0073] In this embodiment, considering that the adsorption platform 13 has a certain height, a driving mechanism in the vertical direction is added, including a lifting mechanism 18 for driving the first carrier 6 and an adjustment mechanism 15 for driving the second carrier 7. The vertical direction here can be the z-axis in the reference coordinate system. Specifically, the adjustment mechanism 15 may include a six-degree-of-freedom driving mechanism, which adjusts the state of the six-axis motion platform 15 by controlling the movement of the six axes. The adjustment mechanism 15 is also connected to a lower alignment camera 16 and a lower alignment drive shaft 17. The lower alignment drive shaft 17 includes a motor screw module, and the motor screw module drives the screw to drive the lower alignment camera 16 to lift and focus.

[0074] By adding a driving mechanism in the vertical direction perpendicular to the horizontal plane, light-emitting units, adsorption platforms 13 or working platforms of different heights and thicknesses can be used.

[0075] According to another specific implementation of the present disclosure, the alignment camera includes a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both communicatively connected to the processor;

[0076] The image acquisition area of ​​the first alignment camera faces the adsorption platform 13, and is used to acquire first coordinate data of the first light-emitting unit on the adsorption platform 13;

[0077] The image acquisition area of ​​the second alignment camera faces the second stage 7 and is used to acquire second coordinate data of the second light-emitting unit on the second stage 7 .

[0078] In this embodiment, two alignment cameras are set to collect coordinate data of two light-emitting units in different directions. The first alignment camera is aligned upward, that is, it collects the coordinate data of the first light-emitting unit adsorbed under the adsorption platform 13 upward. The second alignment camera is aligned downward, that is, it collects the coordinate data of the second light-emitting unit on the second carrier 7 downward. Figure 6 The structure diagram of the upper alignment mechanism toward the adsorption platform 13 is shown as follows. Figure 7 It is a schematic diagram of the structure of the lower alignment mechanism toward the second carrier 7. In this way, light-emitting units in different directions can be collected synchronously to achieve synchronous positioning.

[0079] According to a specific embodiment of the present disclosure, the adsorption platform 13 is further provided with three separate alignment detection sensors 12, and the alignment detection sensors 12 are located between the adsorption platform 13 and the second carrier 7;

[0080] The alignment detection sensor 12 is used to detect the parallelism of the second carrier 7 relative to the adsorption platform 13 .

[0081] Of course, in addition to the above-mentioned main functional components, the transfer alignment system may also include other auxiliary functional components. Figure 1 As shown, the entire system is set on a base, which can be a marble base, providing a stable support function for the entire system. Holes are opened in the non-operating or non-supporting areas on both sides of the gantry to achieve the purpose of weight reduction. In addition, drag chains are set on both sides of the system as a transmission mechanism to realize the transfer of the light-emitting unit on the alignment station. In addition, there are some conventional fixing screws, buckles, seals, etc., which will not be repeated.

[0082] See also Figures 1 to 7 , the implementation process of the provided transfer alignment system will be explained below with reference to a specific example.

[0083] The loading mechanism loads the first light-emitting unit Carrier 1 and the second light-emitting unit Carrier 2 to the first carrier 6 and the second carrier 7 respectively. The horizontal axis driving assembly 1 and the vertical axis driving assembly 5 drive the first carrier 6 to move under the upper alignment device 4, and the lifting mechanism 18 lifts the first light-emitting unit Carrier 1 to be close to the adsorption platform 13, and the adsorption platform 13 adsorbs the first light-emitting unit Carrier 1, and the lifting mechanism 18 is lowered to complete the loading of the first light-emitting unit Carrier 1.

[0084] Afterwards, the second carrier 7 is driven by the transverse axis driving assembly 1 and the longitudinal axis driving assembly 5 to move below the adsorption platform 13 of the upper alignment device 4. At this time, the six-degree-of-freedom adjustment mechanism 15 is raised, and the second carrier 7 is close to the adsorption platform 13.

[0085] The alignment detection sensor 12 contacts the second stage 7, and the parallelism of the second stage 7 relative to the adsorption platform 13 is detected by the three distributed alignment detection sensors 12, and then the six-degree-of-freedom adjustment mechanism 15 adjusts the parallelism of the second stage 7. The second stage 7 moves to the bottom of the upper alignment camera 11 of the upper alignment device 4 under the drive of the horizontal axis driving assembly 1 and the vertical axis driving assembly 5.

[0086] Driven by the horizontal axis driving component 1, the vertical axis driving component 5 and the lower alignment Z axis, the lower alignment camera 16 captures the Mark point 1 of the first light-emitting unit Carrier 1 that has been adsorbed on the adsorption platform 13, and uploads the data to the processor. Driven by the upper alignment XZ axis 10 and the upper alignment Y axis 9, the upper alignment camera 11 aligns the Mark point 2 of the second light-emitting unit Carrier 2 on the second light-emitting unit Carrier 2 carrier 7, locates the Mark point 2 of the second light-emitting unit Carrier 2, and uploads the position data to the system. By comparing the positions of the Mark point 1 and the Mark point 2 of the first light-emitting unit Carrier 1 and the second light-emitting unit Carrier 2, the system transmits the motion instructions to the horizontal axis driving component 1 and the vertical axis driving component 5 to adjust the horizontal plane position of the second carrier 7, accurately align the two, and then the six-degree-of-freedom adjustment mechanism 15 adjusts the second carrier 7 to the aligned state.

[0087] like Figure 7 As shown, the upper alignment mounting plate 8 serves as a mounting bracket for the upper alignment camera 11, the alignment detection sensor 12 and the adsorption platform 13. The adsorption platform 13 is a ceramic plate that can adsorb products after ventilation. The alignment detection sensor 12 can detect the parallelism of the bottom carrier when they are close to the adsorption platform 13. If a deviation is found, the data is fed back to the system, and the parallelism of the two is adjusted by adjusting the six-axis motion platform.

[0088] This embodiment uses two sets of upper and lower alignments to capture the Mark points of the first light-emitting unit Carrier 1 and the second light-emitting unit Carrier 2 respectively, and then drives each axis to move and align with the Mark points through comparison by the software system.

[0089] The transfer alignment system and transfer alignment method provided in the present application are used to transfer and align the first light-emitting unit and the second light-emitting unit. The transfer alignment system includes: a first carrier and a second carrier, respectively used to carry the first light-emitting unit and the second light-emitting unit transported by the loading mechanism; a plane moving mechanism, used to drive the movement of the first carrier and the second carrier on the horizontal plane; an adsorption platform, arranged in the alignment area, used to adsorb the first light-emitting unit on the first carrier after the first carrier moves to the alignment area; an alignment camera, arranged in the alignment area, used to collect the first coordinate data of the first light-emitting unit and the second coordinate data of the second light-emitting unit respectively; a processor, used to control the movement of the second carrier according to the first coordinate data and the second coordinate data, so that the second light-emitting unit is in an aligned state with the first light-emitting unit. In this way, the massive transfer of light-emitting units in the MicroLED production process is realized in a fully automated and high-precision manner.

[0090] Example 2

[0091] In addition, the present application also provides a transfer alignment method, which is applied to the transfer alignment system described in the above embodiment. The transfer alignment method mainly includes the following steps:

[0092] The loading mechanism loads the first light emitting unit onto the first stage, and loads the second light emitting unit onto the second stage;

[0093] The plane moving mechanism moves the first carrier to the alignment area, and the adsorption platform adsorbs the first light-emitting unit on the first carrier;

[0094] The plane moving mechanism moves the second stage to the alignment area;

[0095] The alignment camera collects first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit on the second stage respectively;

[0096] The processor controls the movement of the second stage according to the first coordinate data and the second coordinate data so that the second light emitting unit is aligned with the first light emitting unit.

[0097] The transfer alignment system provided in this embodiment is applied to the transfer alignment process of the light-emitting unit in the microLED processing technology. It is a schematic diagram of the first light-emitting unit Carrier 1 and the second light-emitting unit Carrier 2 that need to be transferred and aligned. The processor is the main control device of the transfer alignment process, controlling the operation of the carrier, the moving mechanism, the adsorption platform, etc.

[0098] An alignment area is set, and the transfer alignment is completed in the alignment area. The adsorption platform and the alignment camera are both set in the alignment area. After the planar driving mechanism moves the first stage to the alignment area, the adsorption platform adsorbs the first light-emitting unit on the first stage. Thereafter, the first stage is moved away, and the second stage is moved below the adsorption platform.

[0099] During alignment, after the second carrier moves to below the adsorption platform, the second light-emitting unit on the second carrier and the first light-emitting unit under the adsorption platform are located in the alignment area, but are not completely aligned.

[0100] The alignment camera is used to collect the first coordinate data of the first light-emitting unit and the second coordinate data of the second light-emitting unit, and send them to the processor. The processor controls the movement of the second stage according to the first coordinate data and the second coordinate data, so that the second light-emitting unit is aligned with the first light-emitting unit.

[0101] According to a specific implementation of the present disclosure, the transfer alignment system further includes a lifting mechanism and an adjustment mechanism, and control ends of the lifting mechanism and the adjustment mechanism are both communicatively connected to the processor;

[0102] After the step of the planar moving mechanism moving the first stage to the alignment area, the method further comprises:

[0103] The lifting mechanism drives the first carrier to approach the adsorption platform in the alignment area;

[0104] The processor controls the movement of the second stage according to the first coordinate data and the second coordinate data, comprising:

[0105] The processor determines adjustment data according to the first coordinate data and the second coordinate data;

[0106] The adjustment mechanism adjusts the movement of the second stage according to the adjustment data.

[0107] In this embodiment, considering that the adsorption platform has a certain height, a driving mechanism in the vertical direction is added, including a lifting mechanism for driving the first stage and an adjustment mechanism for driving the second stage, and the vertical direction here can be the z-axis in the reference coordinate system. Specifically, the adjustment mechanism can include a six-degree-of-freedom driving mechanism.

[0108] By adding a driving mechanism in the vertical direction perpendicular to the horizontal plane, light-emitting units, adsorption platforms or working platforms of different heights and thicknesses can be used.

[0109] According to a specific embodiment of the present disclosure, the adsorption platform is further provided with three separate alignment detection sensors, and the alignment detection sensors are located between the adsorption platform and the second carrier;

[0110] After the step of the planar moving mechanism moving the second stage to the alignment area, the method further comprises:

[0111] The alignment detection sensor detects the parallelism of the second carrier relative to the adsorption platform;

[0112] The adjustment mechanism adjusts the movement of the second stage according to the parallelism.

[0113] An alignment detection sensor is added to detect the parallelism of the second carrier relative to the adsorption platform, and the movement of the second carrier is adjusted accordingly so that the second carrier and the adsorption platform maintain a high degree of parallelism, thereby ensuring the parallel alignment of the second light-emitting unit and the first light-emitting unit.

[0114] According to a specific implementation of the present disclosure, the alignment camera includes a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both communicatively connected to the processor;

[0115] The step of respectively collecting the first coordinate data of the first light-emitting unit and the second coordinate data of the second light-emitting unit on the second stage by the alignment camera comprises:

[0116] The image acquisition area of ​​the first alignment camera faces the adsorption platform, and acquires first coordinate data of a first marking point of a first light-emitting unit on the adsorption platform;

[0117] The image acquisition area of ​​the second alignment camera faces the second stage, and acquires second coordinate data of a second marking point of a second light-emitting unit on the second stage.

[0118] In this embodiment, two alignment cameras are set to collect coordinate data of two light-emitting units in different directions respectively. Among them, the first alignment camera is upward alignment, that is, it collects the coordinate data of the first light-emitting unit adsorbed under the adsorption platform upward. The second alignment camera is downward alignment, that is, it collects the coordinate data of the second light-emitting unit on the second stage downward. In this way, light-emitting units in different directions can be collected synchronously to achieve synchronous positioning.

[0119] The transfer alignment method provided by the present application is to carry the first light-emitting unit and the second light-emitting unit transported by the loading mechanism through the first stage and the second stage; the plane moving mechanism is used to drive the movement of the first stage and the second stage on the horizontal plane; the adsorption platform is arranged in the alignment area, and is used to adsorb the first light-emitting unit on the first stage after the first stage moves to the alignment area; the alignment camera is arranged in the alignment area, and is used to collect the first coordinate data of the first light-emitting unit and the second coordinate data of the second light-emitting unit respectively; the processor is used to control the movement of the second stage according to the first coordinate data and the second coordinate data, so that the second light-emitting unit is aligned with the first light-emitting unit. In this way, the mass transfer of light-emitting units in the MicroLED production process is fully automated and highly accurate.

[0120] In several embodiments provided in the present application, it should be understood that the disclosed devices and methods can also be implemented in other ways. The device embodiments described above are merely schematic. For example, the flowcharts and structure diagrams in the accompanying drawings show the possible architecture, functions and operations of the devices, methods and computer program products according to multiple embodiments of the present application. In this regard, each box in the flowchart or block diagram can represent a module, a program segment or a part of a code, and the module, a program segment or a part of a code contains one or more executable instructions for implementing the specified logical function. It should also be noted that in an alternative implementation, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two consecutive boxes can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the structure diagram and / or the flow diagram, and the combination of boxes in the structure diagram and / or the flow diagram, can be implemented with a dedicated hardware-based system that performs a specified function or action, or can be implemented with a combination of dedicated hardware and computer instructions.

[0121] In addition, the functional modules or units in the various embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.

[0122] The above description is only a specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application.

Claims

1. A transfer alignment system, It is characterized in that Used to shift the first light-emitting unit and the second light-emitting unit to a different position; The transfer alignment system comprises: The first carrier and the second carrier are used to carry the first light-emitting unit and the second light-emitting unit transported by the loading mechanism, respectively; A plane moving mechanism, used for driving the first stage and the second stage to move on a horizontal plane; an adsorption platform, disposed in the alignment area, and used for adsorbing the first light-emitting unit on the first carrier after the first carrier moves to the alignment area; an alignment camera, disposed in the alignment area, for respectively collecting first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit; A processor, configured to control the movement of the second stage according to the first coordinate data and the second coordinate data, so that the second light-emitting unit is aligned with the first light-emitting unit, and light-emitting units in different directions can be collected synchronously to achieve synchronous positioning; The alignment camera comprises a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both communicatively connected to the processor; The image acquisition area of ​​the first alignment camera faces the adsorption platform and is used to acquire first coordinate data of the first light-emitting unit on the adsorption platform; The image acquisition area of ​​the second alignment camera faces the second stage, and is used to acquire second coordinate data of the second light-emitting unit on the second stage.

2. The system according to claim 1, It is characterized in that The planar moving mechanism comprises a transverse axis driving component and a longitudinal axis driving component, and the control ends of the transverse axis driving component and the longitudinal axis driving component are both communicatively connected with the processor; The driving direction of the transverse axis driving assembly is perpendicular to the driving direction of the longitudinal axis driving assembly.

3. The system according to claim 1, It is characterized in that The transfer alignment system further includes a lifting mechanism and an adjustment mechanism, and control ends of the lifting mechanism and the adjustment mechanism are both communicatively connected to the processor; The lifting mechanism is used to drive the first carrier to approach or move away from the adsorption platform in the alignment area; The adjustment mechanism is used to adjust the movement of the second carrier.

4. The system according to claim 3, It is characterized in that The adjustment mechanism includes a six-degree-of-freedom drive mechanism.

5. The system according to claim 1, It is characterized in that The adsorption platform is also provided with three separate alignment detection sensors, and the alignment detection sensors are located between the adsorption platform and the second carrier; The alignment detection sensor is used to detect the parallelism of the second carrier relative to the adsorption platform.

6. A transfer alignment method, It is characterized in that A transfer alignment system applied to any one of claims 1 to 5; the method comprising: The loading mechanism loads the first light emitting unit onto the first stage, and loads the second light emitting unit onto the second stage; The plane moving mechanism moves the first carrier to the alignment area, and the adsorption platform adsorbs the first light-emitting unit on the first carrier; The plane moving mechanism moves the second stage to the alignment area; The alignment camera collects first coordinate data of the first light-emitting unit and second coordinate data of the second light-emitting unit on the second stage respectively; The processor controls the movement of the second stage according to the first coordinate data and the second coordinate data so that the second light emitting unit is aligned with the first light emitting unit.

7. The method according to claim 6, It is characterized in that The transfer alignment system further includes a lifting mechanism and an adjustment mechanism, and control ends of the lifting mechanism and the adjustment mechanism are both communicatively connected to the processor; After the step of the planar moving mechanism moving the first stage to the alignment area, the method further comprises: The lifting mechanism drives the first carrier to approach the adsorption platform in the alignment area; The step of the processor controlling the movement of the second stage according to the first coordinate data and the second coordinate data comprises: The processor determines adjustment data according to the first coordinate data and the second coordinate data; The adjustment mechanism adjusts the movement of the second stage according to the adjustment data.

8. The method according to claim 7, It is characterized in that The adsorption platform is also provided with three separate alignment detection sensors, and the alignment detection sensors are located between the adsorption platform and the second carrier; After the step of the planar moving mechanism moving the second stage to the alignment area, the method further comprises: The alignment detection sensor detects the parallelism of the second carrier relative to the adsorption platform; The adjustment mechanism adjusts the movement of the second stage according to the parallelism.

9. The method according to claim 6, It is characterized in that The alignment camera comprises a first alignment camera and a second alignment camera, and data terminals of the first alignment camera and the second alignment camera are both communicatively connected to the processor; The step of respectively collecting the first coordinate data of the first light-emitting unit and the second coordinate data of the second light-emitting unit on the second stage by the alignment camera comprises: The image acquisition area of ​​the first alignment camera faces the adsorption platform, and acquires first coordinate data of a first marking point of a first light-emitting unit on the adsorption platform; The image acquisition area of ​​the second alignment camera faces the second stage, and acquires second coordinate data of a second marking point of a second light-emitting unit on the second stage.

Citation Information

Patent Citations

  • Transfer alignment system

    CN216084830U

  • Method of and apparatus for bonding light-emitting element

    US6208419B1