Processing equipment

Abstract

The present invention provides a processing device that can easily transport boxes of various sizes corresponding to the size of a plate-like workpiece. In the processing device (1), in a box carrier (40) and a storage container (50), a box (41) is placed on a receiving plate (52). Furthermore, when the box (41) is moved, the receiving plate (52) on which the box (41) is placed is supported by a supporting mechanism (70) of a box transporting mechanism. Furthermore, the supporting mechanism (70) moves between the storage container (50) and the box carrier (40). Therefore, unlike a structure in which the box (41) is directly supported to move the box, even if the size of the box (41) changes, there is no need to adjust the supporting mechanism (70). Therefore, in this embodiment, boxes (41) of various sizes corresponding to the size of a plate-like workpiece (2) can be easily transported using the supporting mechanism (70).

Description

Technical Field

[0001] The present invention relates to a processing device. Background Art

[0002] In a grinding device for grinding a rectangular plate-shaped workpiece using a grinding tool, for example, a plurality of plate-shaped workpieces are held by a holding surface of a chuck table, and these plurality of plate-shaped workpieces are simultaneously ground to the same thickness.

[0003] A plurality of plate-shaped workpieces are stored in a box (storage rack). Each plate-shaped workpiece is taken out from the box and conveyed to the holding surface and held.

[0004] The box can store, for example, 20 plate-shaped workpieces. The chuck table has, for example, a holding surface capable of holding 6 plate-shaped workpieces. Therefore, for one grinding process, 6 plate-shaped workpieces are conveyed to the holding surface.

[0005] In the above example, since 20 plate-shaped workpieces are stored in the box, for example, when the grinding process of the plate-shaped workpieces held on the holding surface by the third conveyance is completed, the grinding processes of 18 plate-shaped workpieces are completed. As a result, 2 plate-shaped workpieces remain in the box. Therefore, at the next fourth conveyance, after these 2 plate-shaped workpieces are conveyed to the holding surface, the empty box is replaced with another box storing 20 plate-shaped workpieces, and then 4 plate-shaped workpieces are conveyed from this box to the holding surface.

[0006] Thus, sometimes the box is replaced in the middle of conveying a predetermined number of plate-shaped workpieces to the holding surface of the chuck table. Therefore, a storage area is prepared, and the box is prepared in this storage area. In addition, in the technique disclosed in Patent Document 1, a box conveyance mechanism is used to convey the box between the storage area and the box mounting table.

[0007] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2008-130634

[0008] However, rectangular plate-shaped workpieces have various different sizes. Therefore, the size of the box varies according to the size of the plate-shaped workpiece. Therefore, if the sizes of the boxes are different, it may be difficult for the box conveyance mechanism for conveying the boxes to convey the boxes. Summary of the Invention

[0009] Accordingly, an object of the present invention is to easily convey boxes of various sizes corresponding to the size of a plate-like workpiece. The processing apparatus (this processing apparatus) of the present invention includes: a holding unit having a holding surface for holding a quadrilateral plate-like workpiece; a processing unit for processing the plate-like workpiece; a box mounting table for mounting a box having a plurality of layers capable of accommodating a plurality of plate-like workpieces; a workpiece conveying mechanism for conveying the plate-like workpiece accommodated in the box mounted on the box mounting table to the holding surface; a storage for mounting a plurality of such boxes; and a box conveying mechanism for conveying the box mounted on the storage to the box mounting table, wherein the storage includes: a workbench; a mounting plate interposed between the workbench and the box; and a block disposed on the mounting plate for positioning the box, and the mounting plate has: a mounting portion formed on the lower surface of the mounting plate for positioning the mounting plate relative to the workbench; and a recess formed on the lower surface of the mounting plate and supported by the box conveying mechanism, and the box conveying mechanism includes: a supporting mechanism for supporting the lower surface of the mounting plate on which the box is mounted; and a moving mechanism for moving the supporting mechanism between the storage and the box mounting table, and the supporting mechanism includes: a top plate connected to the moving mechanism; four columns hanging down from the top plate; a supporting portion extending horizontally from the lower end of the column for supporting the recess of the mounting plate; and a column rotating mechanism capable of positioning the supporting portion at any position between a position for supporting the recess and a position outside the outer periphery of the mounting plate by rotating the column.

[0010] Further, in this processing apparatus, the column rotating mechanism may include: a rotating plate disposed at the upper ends of the four columns and extending horizontally; a common rotation shaft disposed horizontally offset from the axis of the column on the rotating plate and revolving about the axis of the column; a link plate having openings into which the four common rotation shafts can enter and connecting the four common rotation shafts so as to be capable of revolving; and a horizontal driving portion for moving the link plate in the horizontal direction.

[0011] Further, in this processing apparatus, the box conveying mechanism may further include: a weight detection portion for detecting the weight applied to the supporting mechanism when the supporting mechanism supports the mounting plate by the four supporting portions; and a determination portion for determining whether plate-like workpieces are accommodated in all the layers of the box based on the detection result of the weight detection portion.

[0012] In this processing apparatus, in the cassette stage and the storage, the cassette is placed on the adapter plate. Moreover, when moving the cassette, the adapter plate on which the cassette is placed is supported by the support mechanism of the cassette transfer mechanism. Further, this support mechanism is moved between the storage and the cassette stage by the movement mechanism of the cassette transfer mechanism. Therefore, unlike a configuration in which the cassette is directly supported and moved, even if the size of the cassette changes, it is not necessary to adjust the cassette transfer mechanism. Thus, in this processing apparatus, various sizes of cassettes corresponding to the size of the plate-shaped workpiece can be easily transferred by the cassette transfer mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a perspective view showing the structure of the processing apparatus.

[0014] Figure 2 (a) is a perspective view showing the structure of the adapter plate from the upper surface side, Figure 2 (b) is a perspective view showing the structure of the adapter plate from the lower surface side.

[0015] Figure 3 is a perspective view showing the structure of the cassette transfer mechanism.

[0016] Figure 4 is a perspective view showing the cassette transfer operation performed using the support mechanism of the cassette transfer mechanism.

[0017] Figure 5 is a perspective view showing the cassette transfer operation performed using the support mechanism of the cassette transfer mechanism.

[0018] Figure 6 is a perspective view showing the cassette transfer operation performed using the support mechanism of the cassette transfer mechanism.

[0019] Figure 7 is a perspective view showing the support mechanism of another configuration.

[0020] Figure 8 is Figure 7 a perspective view showing a part of the support mechanism shown enlarged.

[0021] Figure 9 is Figure 7 a top view of the support mechanism shown.

[0022] Figure 10 is a perspective view showing the support operation of the adapter plate performed using Figure 7 the support mechanism shown.

[0023] Figure 11 is a perspective view showing the support operation of the adapter plate performed using Figure 7 the support mechanism shown.

[0024] Figure 12 is a perspective view showing the supporting operation of the bonding plate using the Figure 7 shown supporting mechanism.

[0025] Figure 13 is a perspective view showing another structure of the supporting mechanism.

[0026] Reference Numeral Explanation

[0027] 1: Processing device; 2: Plate-shaped workpiece; 3: First device base; 5: Second device base; 10: Rough grinding section; 12: First holding surface; 13: First chuck table; 11: Rough grinding feed unit; 15: Rough grinding unit; 17: Rough grinding wheel; 18: Rough grinding tool; 30: Fine grinding section; 32: Second holding surface; 33: Second chuck table; 31: Fine grinding feed unit; 35: Fine grinding unit; 37: Fine grinding wheel; 38: Fine grinding tool; 40: Cassette stage; 41: Cassette; 50: Storage; 51: Workbench; 52: Bonding plate; 521: Upper surface; 522: Lower surface; 53: Block; 54: Groove; 55: Cutout portion; 56: Placement portion; 57: Recess; 180: Cassette transfer space; 60: Cassette transfer mechanism; 61: Housing plate; 62: Detection section; 63: Control section; 64: Judgment section; 70: Supporting mechanism; 71: Top plate; 72: Column; 73: Supporting portion; 75: Rotary cylinder; 77: Supporting mechanism; 80: Linkage mechanism; 81: Rotary plate; 82: Public rotation axis; 83: Linkage plate; 84: First link member; 841: Opening; 85: Second link member; 851: Second rotation axis; 90: Linear cylinder; 91: Rod; 92: First rotation axis; 95: Rotary cylinder; 100: Moving mechanism; 120: X-axis moving mechanism; 130: Z-axis moving mechanism; 170: Transfer space; 171: Transfer unit; 173: Housing plate; 175: Transfer pad; 177: Z-axis moving mechanism; 179: Y-axis direction moving mechanism. Detailed Embodiment

[0028] As Figure 1 shown, the processing device 1 of the present embodiment grinds the quadrilateral plate-shaped workpiece 2 through the rough grinding section 10 and the fine grinding section 30.

[0029] The processing device 1 has a first device base 3 and a second device base 5 disposed behind (+Y direction side) the first device base 3. On the first device base 3, the loading and unloading of the plate-shaped workpiece 2 are performed. On the second device base 5, the plate-shaped workpiece 2 is processed by the rough grinding section 10 or the fine grinding section 30.

[0030] On the front side (-Y direction side) of the first device base 3, a cassette stage 40 and a storage 50 are provided. A cassette 41 is placed on the cassette stage 40, and the cassette 41 houses a plate-like workpiece 2 before processing. In the storage 50, a plurality of the same cassettes 41 housing the plate-like workpieces 2 before processing can be placed.

[0031] The cassette 41 has a plurality of layers (shelves) capable of housing a plurality of plate-like workpieces, and one plate-like workpiece 2 is housed in each layer.

[0032] The cassette 41 has an opening facing the +Y direction side. A robot 155 is disposed on the +Y direction side of this opening. The robot 155 conveys (houses) the processed plate-like workpiece 2 into a cassette (not shown) for housing the processed workpieces.

[0033] In addition, the robot 155 takes out the plate-like workpiece 2 before processing from the cassette 41 and places it on the temporary placement table 154 of the temporary placement unit 152.

[0034] The temporary placement table 154 is for temporarily placing the plate-like workpiece 2 taken out from the cassette 41. The temporary placement table 154 is configured to be able to place 2 plate-like workpieces 2. The temporary placement unit 152 further has a moving unit 153 for moving the temporary placement table 154 in the X-axis direction.

[0035] When the robot 155 places the plate-like workpiece 2 on the temporary placement table 154 of the temporary placement unit 152, the temporary placement unit 152 positions the temporary placement table 154 at the rough grinding position on the +X direction side ( Figure 1 the position of the temporary placement table 154 shown).

[0036] On the second device base 5 located on the +Y direction side of the temporary placement unit 152, a rough grinding unit 10 and a fine grinding unit 30 are disposed.

[0037] The rough grinding unit 10 has a first chuck table 13 for holding the plate-like workpiece 2. The first chuck table 13 is an example of a holding unit for holding the plate-like workpiece 2 and has a first holding surface 12 for sucking and holding the plate-like workpiece 2. The first holding surface 12 communicates with a suction source (not shown) and can suck and hold 2 plate-like workpieces 2 simultaneously.

[0038] The first chuck table 13 can rotate about a central axis passing through the center of the first holding surface 12 and extending in the Z-axis direction while sucking and holding the plate-like workpiece 2 by the first holding surface 12.

[0039] In addition, a first column 14 is erected on the rear side (+Y direction side) of the second device base 5. Moreover, the rough grinding section 10 has a rough grinding unit 15 for rough grinding the plate-shaped workpiece 2 on the front surface of the first column 14 and a rough grinding feed unit 11 for feeding the rough grinding unit 15 for grinding.

[0040] The rough grinding unit 15 is an example of a processing unit for processing the plate-shaped workpiece 2, and has a rough grinding wheel 17 including a rough grinding tool 18. The rough grinding tool 18 is an example of a processing tool and is a tool including relatively large abrasive grains.

[0041] In addition, the rough grinding section 10 has a first altimeter 19 for measuring the thickness of the plate-shaped workpiece 2 held by the first holding surface 12 of the first chuck table 13.

[0042] In the rough grinding section 10, the plate-shaped workpiece 2 held by the first holding surface 12 of the first chuck table 13 is rough ground by the rough grinding tool 18 that rotates by the rotation of the main shaft 16 of the rough grinding unit 15.

[0043] The finish grinding section 30 has a second chuck table 33 for holding the plate-shaped workpiece 2. The second chuck table 33 is an example of a holding unit for holding the plate-shaped workpiece 2 and has a second holding surface 32 for sucking and holding the plate-shaped workpiece 2. The second holding surface 32 communicates with an unillustrated suction source and can suck and hold two plate-shaped workpieces 2 simultaneously.

[0044] The second chuck table 33 can rotate about a central axis that passes through the center of the second holding surface 32 and extends in the Z-axis direction while the plate-shaped workpiece 2 is sucked and held by the second holding surface 32.

[0045] In addition, a second column 34 is erected on the rear side of the second device base 5 adjacent to the first column 14. Moreover, the finish grinding section 30 has a finish grinding unit 35 for finish grinding the plate-shaped workpiece 2 on the front surface of the second column 34 and a finish grinding feed unit 31 for feeding the finish grinding unit 35 for grinding.

[0046] The finish grinding unit 35 is an example of a processing unit for processing the plate-shaped workpiece 2 and has a finish grinding wheel 37 including a finish grinding tool 38. The finish grinding tool 38 is an example of a processing tool and is a tool including relatively small abrasive grains.

[0047] In addition, the finish grinding section 30 has a second altimeter 39 for measuring the thickness of the plate-shaped workpiece 2 held by the second holding surface 32 of the second chuck table 33.

[0048] In the fine grinding section 30, a plate-shaped workpiece 2 held by a second holding surface 32 of a second chuck table 33 is finely ground by a fine grinding tool 38 that rotates by the rotation of a main shaft 36 of a fine grinding unit 35.

[0049] In addition, in a transfer space 170 indicated by a dashed line between the rough grinding section 10 and the fine grinding section 30 on the second apparatus base 5, two transfer units 171 for the rough grinding section 10 and the fine grinding section 30 are provided. Figure 1 In the present embodiment, the transfer unit 171 and the robot 155 constitute an example of a workpiece transfer mechanism that transfers the plate-shaped workpiece 2 stored in a cassette 41 placed on a cassette stage 40 to the first holding surface 12 and the second holding surface 32.

[0050]

[0051] Figure 1 The transfer unit 171 for the rough grinding section 10 is shown. The transfer unit 171 for the rough grinding section 10 has, on the +X side surface of a housing plate 173 extending in the Y-axis direction: a transfer pad 175 for holding the plate-shaped workpiece 2; a Z-axis moving mechanism 177 for moving the transfer pad 175 in the Z-axis direction; and a Y-axis moving mechanism 179 for moving the transfer pad 175 and the Z-axis moving mechanism 177 in the Y-axis direction. The transfer pad 175 can hold two plate-shaped workpieces 2 simultaneously.

[0052] The transfer unit 171 for the rough grinding section 10 simultaneously holds two plate-shaped workpieces 2 temporarily placed on a temporary placement table 154 at a rough grinding position on the +X direction side by the transfer pad 175, transfers these two plate-shaped workpieces 2 onto the first chuck table 13 of the rough grinding section 10, and places them on the first holding surface 12.

[0053] In addition, after rough grinding, the transfer unit 171 for the rough grinding section 10 simultaneously holds two plate-shaped workpieces 2 on the first holding surface 12 of the first chuck table 13 by the transfer pad 175, and places these two plate-shaped workpieces 2 on the temporary placement table 154 of the temporary placement unit 152.

[0054] In addition, after placing the roughly ground plate-shaped workpiece 2 on the temporary placement table 154 of the temporary placement unit 152, the temporary placement unit 152 moves the temporary placement unit 152 from the rough grinding position on the +X direction side to the fine grinding position on the -X direction side by a moving unit 153.

[0055] Figure 1 In addition, in the transfer space 170, a transfer unit 171 for the fine grinding section 30 is also arranged on the -X side of the transfer unit 171 for the rough grinding section 10. Refer to Figure 1The structure of the transfer unit 171 for the rough grinding section 10 is shown. The transfer unit 171 for the finish grinding section 30 is configured to have a transfer pad 175, a Z-axis movement mechanism 177, and a Y-axis direction movement mechanism 179 on the -X side surface of the housing plate 173.

[0056] The transfer unit 171 for the finish grinding section 30 uses the transfer pad 175 to simultaneously hold two sheet-like workpieces 2 temporarily placed on the temporary placement table 154 at the finish grinding position on the -X direction side, and transfers these two sheet-like workpieces 2 onto the second chuck table 33 of the finish grinding section 30 and places them on the second holding surface 32.

[0057] In addition, after finish grinding, the transfer unit 171 for the finish grinding section 30 uses the transfer pad 175 to simultaneously hold two sheet-like workpieces 2 on the second holding surface 32 of the second chuck table 33, and transfers these two sheet-like workpieces 2 to the rotary table 157 of the cleaning unit 156.

[0058] The cleaning unit 156 is a rotary cleaning unit for cleaning the sheet-like workpiece 2. The cleaning unit 156 has a rotary table 157 for holding the sheet-like workpiece 2 and nozzles 158 for spraying cleaning water and drying air toward the rotary table 157. The rotary table 157 is configured to be able to hold two sheet-like workpieces 2 simultaneously.

[0059] In the cleaning unit 156, the rotary table 157 holding the sheet-like workpiece 2 rotates, and cleaning water is sprayed toward the sheet-like workpiece 2 to perform rotary cleaning on the sheet-like workpiece 2. After that, drying air is blown onto the sheet-like workpiece 2 to dry the sheet-like workpiece 2.

[0060] The sheet-like workpiece 2 cleaned by the cleaning unit 156 is carried into a box for storing the processed workpieces by the robot 155.

[0061] In addition, as Figure 1 shown, the storage 50 has a rectangular parallelepiped-shaped worktable 51 and a mounting plate 52 between the worktable 51 and the box 41. In addition, as Figure 2 shown in (a) of

[0062] That is, Figure 2 the upper surface 521 of the mounting plate 52 shown in (a) of

[0063] In addition, two cut portions 55 are respectively formed on two side surfaces extending in the longitudinal direction (Y-axis direction) of the mouthpiece adapter 52.

[0064] In addition, as Figure 2 shown in (b) of [], three mounting portions 56 in the form of conical concave portions for positioning the mouthpiece adapter 52 relative to the workbench 51 are formed on the lower surface 522 of the mouthpiece adapter 52.

[0065] In this regard, as Figure 1 shown, three plate support portions 511 in the form of conical convex portions corresponding to each mouthpiece adapter 52 are provided on the workbench 51. The three mounting portions 56 of the mouthpiece adapter 52 are arranged on the lower surface 522 of the mouthpiece adapter 52 so as to be able to engage with the three plate support portions 511.

[0066] By engaging the mounting portion 56 of the mouthpiece adapter 52 with the plate support portion 511 of the workbench 51, the mouthpiece adapter 52 can be well positioned relative to the workbench 51.

[0067] In addition, plate support portions 411 identical to the plate support portions 511 are also provided on the cassette mounting table 40 (see Figure 6 ).

[0068] In addition, in the present embodiment, by engaging the mounting portion 56 of the mouthpiece adapter 52 with the plate support portion 511 of the workbench 51, the mouthpiece adapter 52 is placed on the workbench 51 in such a manner that a gap is formed between the mouthpiece adapter 52 and the workbench 51.

[0069] In addition, as Figure 2 shown in (b) of [], elongated groove-shaped concave portions 57 are formed on the lower surface 522 of the mouthpiece adapter 52 at positions corresponding to the four cut portions 55. Each concave portion 57 extends perpendicularly to the side surface of the mouthpiece adapter 52 starting from the cut portion 55. The concave portion 57 is the portion of the mouthpiece adapter 52 supported by the cassette transfer mechanism 60 (see Figure 3 ).

[0070] In addition, as Figure 1 shown, the processing device 1 is provided with a cassette transfer space 180 shown by a dotted line above the robot 155. A cassette transfer mechanism 60 for transferring the cassette 41 placed in the magazine 50 to the cassette mounting table 40 is provided in the cassette transfer space 180. Figure 3 shown in

[0071] The cassette transfer mechanism 60 includes: a support mechanism 70 that supports the lower surface 522 of the mouthpiece adapter 52 on which the cassette 41 is placed; and a moving mechanism 100 that moves the support mechanism 70 between the magazine 50 and the cassette mounting table 40.

[0072] The moving mechanism 100 is provided on the front surface (-Y side surface) of the housing plate 61 extending in the X-axis direction of the cassette transfer mechanism 60.

[0073] The moving mechanism 100 has an X-axis moving mechanism 120 that moves the support mechanism 70 in the X-axis direction and a Z-axis moving mechanism 130 that moves the support mechanism 70 in the Z-axis direction.

[0074] The X-axis moving mechanism 120 includes a pair of guide rails 123 extending in the X-axis direction, an X-axis table 124 mounted on the guide rails 123, a ball screw 125 extending parallel to the guide rails 123, and a drive motor 126 that rotates the ball screw 125.

[0075] The pair of guide rails 123 are arranged on the front surface of the housing plate 61 parallel to the X-axis direction. The X-axis table 124 is provided on the pair of guide rails 123 so as to be slidable along these guide rails 123. The Z-axis moving mechanism 130 and the support mechanism 70 are mounted on the X-axis table 124.

[0076] The ball screw 125 is screwed into a nut portion (not shown) provided on the X-axis table 124. The drive motor 126 is connected to one end of the ball screw 125 and rotationally drives the ball screw 125. By rotationally driving the ball screw 125, the X-axis table 124, the Z-axis moving mechanism 130, and the support mechanism 70 move in the X-axis direction along the guide rails 123.

[0077] The Z-axis moving mechanism 130 has: a pair of guide rails 131 that extend in the Z-axis direction; a Z-axis table 132 that is mounted on the guide rails 131; a ball screw 133 that extends parallel to the guide rails 131; a drive motor 135 that rotates the ball screw 133; an encoder 136 that detects the rotational speed and position of the drive motor 135; and an arm 137 that supports the support mechanism 70.

[0078] The pair of guide rails 131 are arranged on the side surface of the X-axis table 124 parallel to the Z-axis direction. The Z-axis table 132 is provided on the pair of guide rails 131 so as to be slidable along these guide rails 131. The arm 137 is mounted on the Z-axis table 132.

[0079] The ball screw 133 is screwed into a nut portion (not shown) provided on the back side of the Z-axis table 132. The drive motor 135 is connected to one end of the ball screw 133 and rotationally drives the ball screw 133. By rotationally driving the ball screw 133, the Z-axis table 132, the arm 137, and the support mechanism 70 supported by the arm 137 move in the Z-axis direction along the guide rails 131. In addition, at this time, the encoder 136 measures the moving distance of the support mechanism 70 in the Z-axis direction.

[0080] The arm 137 has: a first arm portion 138 which is mounted on the Z-axis stage 132 and extends along the Y-axis direction; and a second arm portion 139 which extends downward from the front end of the first arm portion 138. The support mechanism 70 is held at the front end (lower end) of the second arm portion 139.

[0081] As Figure 3 shown, the support mechanism 70 has: a top plate 71 which is connected to the second arm portion 139 of the arm 137 in the moving mechanism 100; and four columns 72 which penetrate through the top plate 71 and hang down from the top plate 71. The four columns 72 are arranged at positions where they can be simultaneously engaged with the four cutout portions 55 of the mounting plate 52 as shown in (a) of Figure 2 .

[0082] In addition, the support mechanism 70 has a support portion 73 which extends horizontally from the lower end of the column 72. The support portion 73 is configured to be able to support (i.e., engage with) the recess 57 provided on the lower surface 522 of the mounting plate 52 (refer to Figure 2 (b)).

[0083] Furthermore, the support mechanism 70 has a rotary cylinder 75 as an example of a column rotation mechanism on the upper surface of the top plate 71 corresponding to each column 72. The rotary cylinder 75 is mounted on the upper end of the column 72 which penetrates through the top plate 71 and protrudes upward, and rotates the column 72. By rotating the column 72, the rotary cylinder 75 can position the support portion 73 provided at the front end of the column 72 at any position between the position where it supports the recess 57 of the mounting plate 52 and the position outside the outer periphery of the mounting plate 52.

[0084] In addition, as Figure 3 shown, the cassette transfer mechanism 60 has: a weight detection portion 62 which detects the weight applied to the support mechanism 70; and a control portion 63 which is used to control the operation of the cassette transfer mechanism 60.

[0085] Here, the transfer operation of the cassette 41 by the cassette transfer mechanism 60 will be described. Hereinafter, the operation of loading the cassette 41 arranged on the workbench 51 of the storage 50 onto the cassette stage 40 will be described.

[0086] First, the control portion 63 controls the Figure 3 shown moving mechanism 100. As Figure 4 shown, the support mechanism 70 is arranged directly above the cassette 41 on the mounting plate 52 placed on the workbench 51. At this time, the control portion 63 controls the rotary cylinder 75 to rotate the column 72, thereby making the extending direction of the support portion 73 parallel to the side surface in the length direction of the mounting plate 52 where the cutout portion 55 is provided. Thus, the support portion 73 is arranged at a position outside the outer periphery of the mounting plate 52. In this state, the control portion 63 controls the moving mechanism 100. AsFigure 4 As shown by arrow 301 in the figure, lower the support mechanism 70.

[0087] Thereby, as Figure 5 shown, the column 72 of the support mechanism 70 is fitted into the cutout portion 55 of the mounting plate 52 on which the cassette 41 is placed. In addition, the support portion 73 at the front end of the column 72 is arranged at a position lower than the lower surface 522 of the mounting plate 52 (refer to Figure 2 (b) of the figure) which is placed on the workbench 51 with a gap.

[0088] In this state, as Figure 5 shown, the control unit 63 controls the rotary cylinder 75, and as shown by arrow 302, rotates the column 72 by approximately 90 degrees. Thereby, the support portion 73 provided at the front end of the column 72 is arranged directly below the concave portion 57 of the mounting plate 52, that is, at a position for supporting the concave portion 57 of the mounting plate 52.

[0089] After that, the control unit 63 controls the moving mechanism 100, and as Figure 6 shown by arrow 303 in the figure, raises the support mechanism 70. Thereby, the support portion 73 is fitted into the concave portion 57 of the mounting plate 52 to support the concave portion 57. In this way, the support mechanism 70 supports the cassette 41 together with the mounting plate 52 through the four support portions 73.

[0090] In addition, when the support mechanism 70 supports the mounting plate 52 through the four support portions 73, the weight detection unit 62 detects the weight applied to the support mechanism 70, that is, the total weight of the mounting plate 52 and the cassette 41. Then, the determination unit 64 of the control unit 63 determines whether the plate-like workpieces 2 are stored in all layers of the cassette 41 according to the detection result of the weight detection unit 62.

[0091] In addition, the weight detection unit 62 may also sandwich a piezoelectric element (not shown) between the first arm portion 138 and the second arm portion 139 of the arm 137, and detect the weight according to the pressure applied to the piezoelectric element.

[0092] In addition, the weight detection unit 62 may also detect the weight according to the load current value applied to the motor when the support mechanism 70 is raised by driving the motor 135.

[0093] When the determination unit 64 determines that the plate-like workpieces 2 are not stored in all layers of the cassette 41, the control unit 63 notifies the operator of this situation using a display unit such as a touch panel (not shown) provided in the processing device 1. Furthermore, the determination unit 64 returns the mounting plate 52 to the workbench 51 and ends the process.

[0094] On the other hand, when the determination unit 64 determines that the plate-shaped workpiece 2 is stored in all layers of the cassette 41, the control unit 63 controls the moving mechanism 100 to move the supporting mechanism 70 as shown by the arrows 304 and 305, and places the supporting mechanism 70 supporting the cassette 41 and the adapter plate 52 on the cassette stage 40. At this time, the placement portion 56 of the adapter plate 52 is fitted into the plate supporting portion 411 of the cassette stage 40.

[0095] Next, the control unit 63 controls the rotary cylinder 75 to rotate the column 72 by approximately 90 degrees, whereby the extending direction of the supporting portion 73 is parallel to the side surface of the adapter plate 52 provided with the cutout portion 55. Thereby, the supporting portion 73 is disposed at a position outside the outer periphery of the adapter plate 52, and the supporting of the adapter plate 52 by the supporting mechanism 70 is released. After that, the control unit 63 controls the moving mechanism 100 to separate the supporting mechanism 70 from the cassette stage 40 and dispose it at a specified position.

[0096] As described above, in the processing apparatus 1 of the present embodiment, in the cassette stage 40 and the storage 50, the cassette 41 is placed on the adapter plate 52. Moreover, when moving the cassette 41, the supporting mechanism 70 of the cassette conveying mechanism 60 supports the adapter plate 52 on which the cassette 41 is placed. Further, the supporting mechanism 70 is moved between the storage 50 and the cassette stage 40 by the moving mechanism 100 of the cassette conveying mechanism 60. Therefore, unlike a configuration in which the cassette 41 is directly supported and moved, even if the size of the cassette 41 changes, it is not necessary to adjust the cassette conveying mechanism 60. Therefore, in the present embodiment, the cassette conveying mechanism 60 can easily convey various sizes of cassettes 41 corresponding to the size of the plate-shaped workpiece 2.

[0097] In addition, in the present embodiment, based on the detection result of the weight detection unit 62 of the cassette conveying mechanism 60, the determination unit 64 determines whether the plate-shaped workpiece 2 is stored in all layers of the cassette 41 supported by the supporting mechanism 70. Moreover, when it is determined that the plate-shaped workpiece 2 is not stored in all layers, the cassette 41 is returned to the workbench 51 of the storage 50. Thereby, it is possible to suppress failures such as transporting an empty cassette 41 to the cassette stage 40.

[0098] In addition, the determination unit 64 may be configured to determine the number of plate-shaped workpieces 2 in the cassette 41 based on the detection result of the weight detection unit 62. In this case, when the number of plate-shaped workpieces 2 stored in the cassette 41 is equal to or more than a specified number, the control unit 63 may continue the process of placing the cassette 41 and the adapter plate 52 on the cassette stage 40.

[0099] In addition, in the present embodiment, as Figure 3As shown, the support mechanism 70 has a rotary cylinder 75 on the upper surface of the top plate 71 corresponding to each column 72 to rotate the column 72 mounted on the lower surface of the top plate 71.

[0100] In the cassette transfer mechanism 60, it may also have Figure 7 a support mechanism 77 as shown to replace the support mechanism 70. The support mechanism 77 has a structure as follows compared with the structure of the above support mechanism 70: It has a link mechanism 80 instead of the rotary cylinder 75 as the column rotation mechanism. The link mechanism 80 uses one drive source to rotate four columns 72 simultaneously.

[0101] As Figure 7 shown, the link mechanism 80 has a substantially disk-shaped rotating plate 81 corresponding to each column 72. The rotating plate 81 is disposed at the upper ends of four columns 72 that penetrate the top plate 71 and protrude upward, and extends in the horizontal direction.

[0102] In addition, the link mechanism 80 has a common rotation shaft 82 disposed on the rotating plate 81. The common rotation shaft 82 is offset from the axis of the column 72 in the horizontal direction and is disposed on the rotating plate 81. The common rotation shaft 82 can revolve around the axis of the column 72 as the rotating plate 81 and the column 72 rotate.

[0103] Furthermore, the link mechanism 80 has a link plate 83. The link plate 83 has openings into which four common rotation shafts 82 can enter, and connects the four common rotation shafts 82 so that they can revolve.

[0104] That is, the link plate 83 has a pair of first link members 84 and a second link member 85 connected to these first link members 84.

[0105] The first link member 84 extends along the length direction (Y-axis direction) of the top plate 71. As shown in the enlarged view of Figure 8 , openings 841 into which the common rotation shaft 82 can enter are provided at both ends of the first link member 84. That is, in the present embodiment, the openings 841 at both ends of each first link member 84 are engaged with the common rotation shafts 82 of the rotating plates 81 of a pair of columns 72 arranged along the length direction (Y-axis direction) of the top plate 71.

[0106] The second link member 85 extends along the short side direction (X-axis direction) of the top plate 71 and is fixed to the pair of first link members 84.

[0107] In addition, the link mechanism 80 has a linear motion cylinder 90 as a horizontal drive unit for moving the link plate 83 in the horizontal direction.

[0108] As Figure 9As shown, the linear cylinder 90 is mounted on the top plate 71 in a state where it can rotate on the XY plane via the first rotation shaft 92 in a direction along the approximate Y-axis. In addition, the linear cylinder 90 has a rod 91 that expands and contracts in the direction along the approximate Y-axis. The front end of the rod 91 engages with the second rotation shaft 851 provided at the front end of the second link member 85 in a manner that can rotate relative to the second rotation shaft 851.

[0109] In this structure, the control unit 63 controls Figure 3 the moving mechanism 100 shown in the figure, and arranges the support mechanism 77 directly above the cassette 41 of the mounting board 52 placed on the workbench 51 (refer to Figure 4 ).

[0110] At this time, as Figure 10 shown, the control unit 63 controls the linear cylinder 90 to make the rod 91 in a contracted state. As a result, the extending direction of the support portion 73 provided at the front end of the column 72 is parallel to the side surface in the length direction of the top plate 71, that is, parallel to the side surface in the length direction of the mounting board 52. Thus, the support portion 73 is arranged at a position outside the outer periphery of the mounting board 52.

[0111] In this state, the control unit 63 controls the moving mechanism 100 to lower the support mechanism 77. As a result, the column 72 of the support mechanism 77 is fitted into the cutout portion 55 of the mounting board 52 (refer to Figure 2 (a)). In addition, the support portion 73 at the front end of the column 72 is arranged at a position below the lower surface 522 of the mounting board 52 that is placed on the workbench 51 with a gap (refer to Figure 2 (b)).

[0112] In addition, in Figures 10 to 12 order to avoid complication of the drawings and for convenience, the depiction of the cassette 41 placed on the mounting board 52 and the cutout portion 55 formed on the side surface of the mounting board 52 is omitted.

[0113] After that, as Figure 11 shown, the control unit 63 controls the linear cylinder 90 to extend the rod 91 in the direction of the approximate +Y as indicated by the arrow 400. As a result, the second link member 85 of the link plate 83 connected to the rod 91 via the second rotation shaft 851 and the pair of first link members 84 connected to the second link member 85 receive a force in the direction along the approximate +Y.

[0114] As a result, the link plate 83 moves horizontally in the direction along the approximate +Y. That is, the pair of first link members 84 horizontally move in the direction along the approximate +Y while causing the common rotation shaft 82 of the rotation plates 81 connected to both ends to revolve around the axis of the column 72. By causing the common rotation shaft 82 to revolve, as Figure 11As shown, the rotating plate 81, the column 72, and the supporting portion 73 provided at the front end of the column 72 rotate counterclockwise.

[0115] Then, the control unit 63 controls the linear actuator 90 so that the rod 91 further extends in the substantially +Y direction as indicated by the arrow 400. As a result, the common rotation shaft 82 further rotates revolutionarily, and the rotating plate 81, the column 72, and the supporting portion 73 further rotate counterclockwise. As a result, as Figure 12 shown, the column 72 rotates approximately 90 degrees, and the supporting portion 73 is disposed directly below the concave portion 57 of the mounting plate 52, that is, at a position for supporting the concave portion 57 of the mounting plate 52.

[0116] After that, the control unit 63 controls the moving mechanism 100 (refer to Figure 3 ) to raise the supporting mechanism 77. As a result, the supporting portion 73 engages with the concave portion 57 of the mounting plate 52 to support the concave portion 57. In this way, the supporting mechanism 77 supports the cassette 41 together with the mounting plate 52 through the four supporting portions 73.

[0117] After that, the control unit 63 controls the moving mechanism 100 to move the supporting mechanism 77. After placing the mounting plate 52 on the cassette stage 40, the control unit 63 controls the linear actuator 90 to contract the rod 91. As a result, the common rotation shaft 82 rotates revolutionarily in the opposite direction, and the supporting portion 73 of the column 72 is parallel to the side surface in the longitudinal direction of the mounting plate 52. As a result, the supporting portion 73 is disposed at a position outside the outer periphery of the mounting plate 52, and the support of the mounting plate 52 by the supporting mechanism 77 is released.

[0118] In this way, even when the cassette transfer mechanism 60 has the supporting mechanism 77, the supporting mechanism 77 can support the mounting plate 52 on which the cassette 41 is placed, and the moving mechanism 100 of the cassette transfer mechanism 60 can move the supporting mechanism 77 between the storage 50 and the cassette stage 40. Therefore, even if the size of the cassette 41 changes, the cassette 41 can be easily transferred without adjusting the cassette transfer mechanism 60.

[0119] In addition, when using the supporting mechanism 77, the control unit 63 can also determine whether to continue the process of placing the cassette 41 and the mounting plate 52 on the cassette stage 40 based on the determination of the determination unit 64 based on the detection result of the weight detection unit 62.

[0120] In addition, in the supporting mechanism 77, the linear actuator 90 is used to move a pair of first link members 84, thereby rotating the common rotation shafts 82 revolutionarily and changing the orientation of the supporting portions 73. In this regard, as Figure 13 shown, the link mechanism 80 of the supporting mechanism 77 may have a rotary cylinder 95 provided at the upper end of one column 72 instead of the linear actuator 90.

[0121] In this structure, by rotating the rotary cylinder 95, the rotary plate 81 at the upper end of the column 72 of the rotary cylinder 95 rotates, for example, in the counterclockwise direction. As a result, one first link member 84 whose one end is connected to the common rotation shaft 82 of the rotary plate 81, the second link member 85 connected to the first link member 84, and the other first link member 84 are subjected to a force along the substantially +Y direction as indicated by the arrow 405.

[0122] As a result, the same as the structure shown in Figures 7 to 12 The common rotation shaft 82 of the rotary plate 81 connected to the other end of one first link member 84 and both ends of the other first link member 84 revolves around the axis of the column 72, and at the same time, the entire link plate 83 moves in the substantially +Y direction. By revolving the common rotation shaft 82, as Figure 13 shown, the rotary plate 81, the column 72, and the support portion 73 provided at the front end of the column 72 rotate in the counterclockwise direction.

[0123] Therefore, in this structure, the cassette 41 together with the adapter plate 52 can also be supported by the support mechanism 77 by fitting the support portion 73 into the recess 57 of the adapter plate 52.

Claims

1. A processing device, comprising: A holding unit having a holding surface for holding a quadrilateral plate-shaped workpiece; a processing unit for processing a plate-shaped workpiece; A cassette stage for mounting a cassette having a plurality of layers capable of accommodating a plurality of plate-shaped workpieces; a workpiece conveying mechanism for conveying a plate-shaped workpiece contained in the box mounted on the box carrier to the holding surface; A storage container capable of holding a plurality of the boxes; as well as A box conveying mechanism conveys the box placed on the storage device to the box carrier. in, The storage device has: Workbench; an adapter plate interposed between the workbench and the box; and A block is arranged on the receiving plate to position the box. The adapter plate has: a loading portion formed on a lower surface of the receiving plate and capable of positioning the receiving plate relative to the workbench; and a recessed portion formed on the lower surface of the receiving plate and supported by the box conveying mechanism, The box transport mechanism has: a supporting mechanism that supports the lower surface of the receiving plate on which the cartridge is placed; and a moving mechanism that moves the supporting mechanism between the storage device and the box carrier, The supporting mechanism has: a top plate connected to the moving mechanism; 4 columns, which hang down from the top plate; a supporting portion extending from the lower end of the column in a horizontal direction to support the recessed portion of the receiving plate; and The column rotating mechanism can position the support portion at any one of a position supporting the recessed portion and a position outside the outer periphery of the receiving plate by rotating the column.

2. The processing device according to claim 1, wherein: The column rotation mechanism has: A rotating plate, which is disposed at the upper end of each of the four columns and extends in the horizontal direction; A revolution axis, which is offset in the horizontal direction from the axis of the column and is arranged on the rotating plate, and revolves around the axis of the column; a connecting rod plate having an opening into which the four revolving shafts can enter, and connecting the four revolving shafts to be able to revolve; and The horizontal driving part moves the link plate in a horizontal direction.

3. The processing device according to claim 1, wherein: The box transport mechanism also has: a weight detection unit that detects a weight applied to the support mechanism when the support mechanism supports the receiving plate via the four support units; and A determination unit determines whether or not the plate-shaped workpieces are stored in all the layers of the box based on the detection result of the weight detection unit.

Images