Suction cup device

Abstract

The present disclosure relates to a suction cup device. The device comprises: an outer frame having a first surface; and a suction component disposed on the first surface. The suction component comprises a plurality of concentric circular grooves and two linear grooves extending through each circular groove, wherein the two linear grooves intersect and form an acute angle therebetween. By intersecting and forming an acute angle between the two right-angled grooves extending through each circular groove, negative pressure airflow is facilitated, thereby reducing the possibility of vacuum establishment failure.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor process technology, and in particular to a suction cup device. Background Art

[0002] The current substrate trimming process is often used as one of the main methods for substrate size control in semiconductor manufacturing. The substrate trimming process mainly uses a vacuum chuck to absorb and fix the substrate to achieve the purpose of substrate trimming. However, the substrate can experience significant deformation due to stress or temperature during the process. This directly affects the vacuum chuck's insufficient coverage of the vacuum holes on the substrate, resulting in a decrease in adsorption capacity, which may affect product quality and, in severe cases, may cause the substrate to fall. Summary of the Invention

[0003] The present disclosure provides a suction cup device, comprising:

[0004] an outer frame having a first surface;

[0005] The adsorption component is arranged on the first surface, and the adsorption component includes a plurality of circular grooves arranged in concentric circles and two linear grooves passing through each circular groove, wherein the two linear grooves are cross-arranged and sandwiched at an acute angle.

[0006] In some optional embodiments, the adsorption component is provided with a plurality of adsorption holes, wherein the adsorption holes can be used to connect to an air suction device to provide adsorption force.

[0007] In some optional embodiments, the plurality of adsorption holes are evenly distributed.

[0008] In some optional embodiments, the plurality of adsorption holes are arranged in the same circular groove.

[0009] In some optional embodiments, the adsorption holes are arranged at the bottom of the circular groove.

[0010] In some optional embodiments, the adsorption component has a diameter of 265 mm.

[0011] In some optional embodiments, the length of the outer frame is 360 mm.

[0012] In some optional embodiments, a limiting structure is provided on the first surface, and the adsorption component is provided on the first surface through the limiting structure.

[0013] In some optional embodiments, the outer frame is provided with a receiving cavity, the receiving cavity matches the adsorption component, and the adsorption component is at least partially provided in the receiving cavity.

[0014] In some optional embodiments, the adsorption component is provided with a positioning structure.

[0015] In some optional embodiments, the positioning structure includes a positioning plane arranged cocentrically with the circular groove and a plurality of positioning grooves arranged on the positioning plane.

[0016] In some optional embodiments, top ends of the plurality of circular grooves are substantially coplanar with the positioning plane.

[0017] The suction cup device provided herein comprises an outer frame having a first surface; and a suction component disposed on the first surface. The suction component comprises a plurality of concentric circular grooves and two linear grooves extending through each circular groove, wherein the two linear grooves intersect and form an acute angle therebetween. The plurality of concentric circular grooves and the two linear grooves extending through each circular groove form an airflow channel. The intersecting linear grooves and the acute angle therebetween facilitate the formation of negative pressure airflow, thereby reducing the occurrence of vacuum establishment failures. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Other features, objects and advantages of the present disclosure will become more apparent from a reading of the detailed description of non-limiting embodiments made with reference to the following drawings:

[0019] Figure 1A is a structural schematic diagram of an embodiment of a suction cup device according to the present disclosure;

[0020] Figure 1B yes Figure 1A Schematic diagram of the dimension markings of the main structures of the suction cup device.

[0021] Explanation of symbols:

[0022] 11-outer frame; 11a-first surface; 111-limiting structure; 112-accommodating cavity; 12-adsorption component; 121-circular groove; 122-linear groove; 123-adsorption hole; 124-positioning structure; 125-positioning plane; 126-positioning groove; θ-acute angle; p-outer frame length; q-adsorption component diameter. DETAILED DESCRIPTION

[0023] The following describes specific embodiments of the present disclosure in conjunction with the accompanying drawings and examples. Those skilled in the art will readily understand the technical problems solved by the present disclosure and the technical effects produced by the present disclosure through the contents of this specification. It should be understood that the specific embodiments described herein are merely for the purpose of explaining the relevant invention and are not intended to limit the invention. Furthermore, for ease of description, only portions relevant to the relevant invention are shown in the accompanying drawings.

[0024] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of the specification are only used to match the contents recorded in the specification for the understanding and reading of those skilled in the art, and are not used to limit the limiting conditions for the implementation of the present disclosure. Therefore, they have no substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size should still fall within the scope of the technical content disclosed in the present disclosure without affecting the efficacy and purpose that can be achieved by the present disclosure. At the same time, terms such as "on", "first", "second" and "one" quoted in this specification are only for the convenience of description and are not used to limit the scope of the implementation of the present disclosure. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of the present disclosure without substantially changing the technical content.

[0025] It should also be noted that the longitudinal section corresponding to the embodiment of the present disclosure may be a section corresponding to the front view direction, the transverse section may be a section corresponding to the right view direction, and the horizontal section may be a section corresponding to the top view direction.

[0026] In addition, the embodiments of the present disclosure and the features thereof may be combined with each other unless there is any conflict.

[0027] refer to Figure 1A , Figure 1A It is a structural schematic diagram of an embodiment of a suction cup device according to the present disclosure.

[0028] like Figure 1A As shown, the suction cup device 100A may include:

[0029] The outer frame 11 has a first surface 11 a.

[0030] The adsorption component 12 is disposed on the first surface 11 a and includes a plurality of concentric circular grooves 121 and two linear grooves 122 passing through each circular groove 121 . The two linear grooves 122 are intersected and have an acute angle therebetween.

[0031] An air flow channel is constructed by a plurality of concentric circular grooves 121 and two straight grooves 122 passing through each circular groove 121. The two straight grooves 122 are intersected and sandwiched at an acute angle, which is conducive to the formation of negative pressure airflow and reduces the occurrence of vacuum establishment failure.

[0032] In some optional embodiments, such as Figure 1A As shown, the adsorption component 12 is provided with a plurality of adsorption holes 123 , wherein the adsorption holes 123 can be used to connect an air suction device to provide adsorption force.

[0033] Here, the suction device may be a device capable of suctioning air, such as a suction pump.

[0034] In some optional embodiments, such as Figure 1A As shown, the plurality of adsorption holes 123 are evenly distributed.

[0035] In some optional embodiments, such as Figure 1A As shown, a plurality of adsorption holes 123 are disposed in the same circular groove 121 .

[0036] In some optional embodiments, such as Figure 1A As shown, the adsorption holes 123 are disposed at the bottom of the circular groove 121 .

[0037] In some optional embodiments, such as Figure 1A As shown, the first surface 11 a is provided with a limiting structure 111 , and the adsorption component 12 is provided on the first surface 11 a through the limiting structure 111 .

[0038] Here, the limiting structure 111 may be formed by a portion of the outer frame 11 extending toward the adsorption component 12 . The present disclosure does not limit the specific structure of the limiting structure 111 , as long as it can limit the relative position of the adsorption component 12 and the outer frame 11 .

[0039] In some optional embodiments, such as Figure 1A As shown, the outer frame 11 is provided with a receiving cavity 112 , the receiving cavity 112 matches the adsorption component 12 , and the adsorption component 12 is at least partially disposed in the receiving cavity 112 .

[0040] In some optional embodiments, such as Figure 1A As shown, the adsorption component 12 is provided with a positioning structure 124 .

[0041] The positioning structure 124 may be used to limit the relative position of the substrate and the chuck device 100A when the chuck device 100A adsorbs the substrate.

[0042] In some optional embodiments, such as Figure 1A As shown, the positioning structure 124 includes a positioning plane 125 disposed cocentrically with the circular groove 121 and a plurality of positioning grooves 126 disposed on the positioning plane 125 .

[0043] The positioning plane 125 can be used to limit the substrate and the adsorption component 12 to maintain a planar connection, so that the substrate is adsorbed parallel to the adsorption component 12 . The positioning groove 126 can be used to limit the relative position of the substrate and the adsorption component 12 .

[0044] In some optional embodiments, such as Figure 1A As shown, top ends of the plurality of circular grooves 121 are substantially coplanar with the positioning plane 125 .

[0045] Here, the two surfaces being substantially coplanar can be considered to mean that the height difference between the two surfaces is no greater than 5 μm, no greater than 2 μm, no greater than 1 μm or no greater than 0.5 μm.

[0046] refer to Figure 1B , Figure 1B yes Figure 1A Schematic diagram of the dimensions of the main structures of the suction cup device. Figure 1B As shown, in some optional embodiments, the diameter q of the adsorption component 12 is 265 mm.

[0047] The adsorption surface area of ​​the adsorption component 12 can reach 551 square millimeters, the adsorption vacuum coefficient can reach -57 kPa, and the allowable substrate warping is 8 mm.

[0048] In some optional embodiments, such as Figure 1B As shown, the length p of the outer frame 11 is 360 mm.

[0049] The length p of the outer frame 11 matches the size of the current machine, thereby preventing the machine from interfering with the suction cup device 100A and causing damage due to size mismatch.

[0050] In some optional embodiments, such as Figure 1B As shown, two straight grooves 122 are intersected and formed with an acute angle θ, wherein 0°<θ<90°.

[0051] Although the present disclosure has been described and illustrated with reference to specific embodiments of the present disclosure, these descriptions and illustrations do not limit the present disclosure. It will be clearly understood by those skilled in the art that various changes may be made and equivalent components may be substituted within the embodiments without departing from the true spirit and scope of the present disclosure as defined by the appended claims. The illustrations may not necessarily be drawn to scale. Due to variables in the manufacturing process, etc., there may be differences between the technical reproduction in the present disclosure and the actual implementation. There may be other embodiments of the present disclosure that are not specifically described. The description and illustrations should be regarded as illustrative, not restrictive. Modifications may be made to adapt specific circumstances, materials, compositions of matter, methods or processes to the objectives, spirit and scope of the present disclosure. All such modifications fall within the scope of the appended claims. Although the methods disclosed herein have been described with reference to specific operations performed in a specific order, it should be understood that these operations can be combined, subdivided or reordered to form equivalent methods without departing from the teachings of the present disclosure. Therefore, unless specifically indicated herein, the order and grouping of operations do not limit the present disclosure.

Claims

1. A suction cup device, comprising: An outer frame having a first surface, wherein the length of the outer frame matches the size of the current machine; An adsorption component is disposed on the first surface, the adsorption component comprising a plurality of concentric circular grooves and two linear grooves passing through each circular groove, wherein the two linear grooves are intersected and sandwiched at an acute angle; The adsorption component is provided with a positioning structure, the positioning structure comprising a positioning plane arranged concentrically with the circular groove and a plurality of positioning grooves arranged on the positioning plane, and the top ends of the plurality of circular grooves are substantially coplanar with the positioning plane; The positioning plane is used to limit the substrate and the adsorption component to maintain a planar docking, so that the substrate is adsorbed on the adsorption component in parallel, and the positioning groove is used to limit the relative position of the substrate and the adsorption component.

2. The device according to claim 1, wherein The adsorption component is provided with a plurality of adsorption holes, wherein the adsorption holes can be used to connect an air suction device to provide adsorption force.

3. The device according to claim 2, wherein The plurality of adsorption holes are evenly distributed.

4. The device according to claim 3, wherein The plurality of adsorption holes are arranged in the same circular groove.

5. The device according to claim 2, wherein The adsorption holes are arranged at the bottom of the circular groove.

6. The device according to claim 1, wherein The first surface is provided with a limiting structure, and the adsorption component is provided on the first surface through the limiting structure.

7. The device according to claim 1, wherein The outer frame is provided with a receiving cavity, the receiving cavity matches the adsorption component, and the adsorption component is at least partially provided in the receiving cavity.

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