Stage device, pattern forming device, and method for manufacturing article

Abstract

The present invention relates to a stage device, a pattern forming device, and a method for manufacturing an article. In order to provide a stage device capable of suppressing a decrease in positioning accuracy while maintaining an increase in throughput, the stage device of the present invention comprises: a stage; a drive unit that drives the stage; a first and a second amplifier that respectively outputs an output signal obtained by amplifying an input signal using pulse width modulation control and linear control to the drive unit; a switch that turns on or off the first and second connections between the first and second amplifiers and the drive unit; and a control unit that calculates the input signal according to an instruction value for driving the stage and outputs it to the first and second amplifiers, wherein the control unit determines a switching condition of the switch according to parameters of the stage and the drive unit and the instruction value so that the output voltage of the second amplifier converges to the maximum output voltage, and controls the switch according to the determined switching condition.

Description

Technical Field

[0001] The present invention relates to a mounting table device, a pattern forming device and a method for manufacturing an article. Background Art

[0002] In a stage device used in a pattern forming apparatus, improvements in both throughput and positioning accuracy are required.

[0003] Japanese Patent Application Laid-Open No. 2001-128488 discloses a stage device that improves throughput by applying a large thrust using a large current from a PWM amplifier during non-exposure, and improves positioning accuracy by applying a stable thrust using a high-quality current from a linear amplifier during exposure.

[0004] The stage device disclosed in Japanese Patent Application Laid-Open No. 2001-128488 includes a selector that selects the use of a PWM amplifier when the output current is equal to or greater than a predetermined value, and selects the use of a linear amplifier when the output current is less than the predetermined value.

[0005] At this time, when a motor as an inductive load is used as a driving unit of the stage, the phase of the load current waveform and the phase of the load voltage waveform deviate from each other according to the frequency of the command value. Therefore, depending on the current command value, even if the output current is less than the predetermined value, there is a case where the maximum output voltage of the linear amplifier is exceeded, and there is a possibility that the positioning accuracy is reduced. Summary of the invention

[0006] Therefore, an object of the present invention is to provide a stage device capable of suppressing a decrease in positioning accuracy while maintaining an improvement in throughput.

[0007] The stage device involved in the present invention is characterized in that it comprises: a stage; a drive unit that drives the stage; a first amplifier that outputs an output signal obtained by amplifying an input signal using pulse width modulation control to the drive unit; a second amplifier that outputs an output signal obtained by amplifying the input signal using linear control to the drive unit; a switch that sets a first connection between the first amplifier and the drive unit to be on or off, and sets a second connection between the second amplifier and the drive unit to be on or off; and a control unit that operates the input signal according to an instruction value for driving the stage and outputs the signal to the first amplifier and the second amplifier, wherein the control unit determines a switching condition of the switch in a manner that causes the output voltage of the second amplifier to converge to a maximum output voltage based on parameters of the stage and the drive unit and the instruction value, and controls the switch according to the determined switching condition. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1AThis is a block diagram of a position control system included in the stage device according to the first embodiment.

[0009] Figure 1B This is a block diagram of a speed control system included in the stage device according to the first embodiment.

[0010] Figure 2 This is a flowchart showing the switching condition determination process in the stage device according to the first embodiment.

[0011] Figure 3A This is a diagram showing a command waveform used in the switching condition determination process.

[0012] Figure 3B This is a diagram showing a block diagram used in the switching condition determination process.

[0013] Figure 3C 1 is a diagram showing a load current waveform and a load voltage waveform used in the switching condition determination process.

[0014] Figure 4 This is a block diagram of a position control system included in the stage device according to the second embodiment.

[0015] Figure 5A This is a partially enlarged block diagram of a position control system included in a certain stage device.

[0016] Figure 5B This is a diagram showing how a switch is switched in a conventional mounting table device.

[0017] Fig. 6A It is a diagram showing a state of switching a switch in the position control system included in the stage device according to the second embodiment.

[0018] Figure 6B It is a diagram showing a state of switching a switch in the position control system included in the stage device according to the second embodiment.

[0019] Figure 6C It is a diagram showing a state of switching a switch in the position control system included in the stage device according to the second embodiment.

[0020] Fig.6D It is a diagram showing a state of switching a switch in the position control system included in the stage device according to the second embodiment.

[0021] Figure 7 This is a block diagram of a position control system included in the stage device according to the third embodiment.

[0022] Fig. 8AThis is a flowchart showing a switching condition determination process in the stage device according to the third embodiment.

[0023] Figure 8B This is a flowchart showing a switching condition determination process in the stage device according to the third embodiment.

[0024] Fig. 9A It is a diagram showing a load current waveform and a load voltage waveform for determining a switching condition in the mounting table device according to the third embodiment.

[0025] Fig. 9B It is a diagram showing a load current waveform and a load voltage waveform for determining a switching condition in the mounting table device according to the third embodiment.

[0026] Fig. 9C It is a diagram showing a switching condition table for determining switching conditions in the stage device according to the third embodiment.

[0027] Fig.10 It is a structural diagram of an exposure apparatus including the stage device according to the present embodiment.

[0028] Fig.11A This is a diagram showing an example of a block diagram of a control system included in a conventional mounting table device.

[0029] Fig. 11B 1 is a diagram showing an example of a position waveform, a velocity waveform, and an acceleration waveform in a control system provided in a conventional stage device.

[0030] Fig. 12A This is a diagram showing an example of a block diagram of a motor driver included in a conventional mounting table device.

[0031] Fig. 12B This is a diagram showing an example of a motor current waveform and a motor voltage waveform in a motor driver included in a conventional mounting table device.

[0032] Fig. 12C This is a diagram showing an example of a motor current waveform and a motor voltage waveform in a motor driver included in a conventional mounting table device. DETAILED DESCRIPTION

[0033] Hereinafter, the mounting table device according to the present embodiment will be described in detail with reference to the attached drawings. In addition, in the drawings shown below, in order to facilitate understanding of the present embodiment, the drawings are drawn with a scale different from the actual scale.

[0034] The stage device according to the present embodiment uses a motor driver that combines a PWM (Pulse Width Modulation) amplifier that can efficiently pass a large current and a linear amplifier that can pass a high-quality current with little distortion.

[0035] In a stage device used in a semiconductor exposure apparatus, improvements in both throughput and positioning accuracy are required.

[0036] In order to improve both, a stage device including a motor driver combining a PWM amplifier that amplifies and outputs an input signal by pulse width modulation control and a linear amplifier that amplifies and outputs an input signal by linear control is proposed.

[0037] Fig.11A A block diagram showing a control system included in a conventional mounting table device is shown.

[0038] in addition, Fig. 11B An example of a position waveform, a velocity waveform, and an acceleration waveform included in a drive command value 101 used in a conventional stage device is shown.

[0039] exist Fig.11A In the conventional stage device shown, position control is performed by inputting the difference between the position command included in the drive command value 101 and the stage position detected by the stage position detection unit (not shown) into the position controller 102.

[0040] Then, the current command value of the motor driver is output from the position controller 102 , and the difference between the output current command value and the motor current value detected by the current detection unit (not shown) is input to the current controller 103 and processed by calculation, thereby performing constant current control.

[0041] Next, the current output from the current controller 103 is input to both the PWM amplifier 104 and the linear amplifier 105 .

[0042] Then, an output current from one of the PWM amplifier 104 and the linear amplifier 105 selected by the switch as the switching unit 106 is input to the motor 107, and the motor 107 under constant current control drives the stage 108, thereby performing position control.

[0043] Here, the PWM amplifier 104 can efficiently flow a large current by performing high-speed switching control on FET (Field Effect Transistor) or the like.

[0044] However, it is known that ripple noise and nonlinear distortion are generated in the PWM amplifier 104 due to switching.

[0045] On the other hand, the linear amplifier 105 generates large heat due to the bias current generated in the output stage of the transistor, and thus has low efficiency, but can flow high-quality current with little distortion.

[0046] Furthermore, in the stage device used in the exposure device, for example, Fig. 11B The drive command waveform shown is used to control the drive of the mounting table.

[0047] For example, when performing exposure between positions C and D while moving the stage from a predetermined position A to position B, a positive acceleration changing into a trapezoidal shape is first applied to accelerate the stage, thereby accelerating the stage to position C during the period from time t0 to t'.

[0048] Thereafter, by setting the acceleration to 0, the stage is moved to position D at a constant speed during the period from time t' to time t".

[0049] Then, a negative acceleration in an inverse trapezoidal shape is provided to decelerate the stage, and the stage is decelerated and moved to position B during the period from time t″ to t1.

[0050] Here, in order to improve the throughput, it is required to drive the mounting table 108 at a high acceleration by passing a large current through the motor 107 in the acceleration section between the time t0 and t′ and the deceleration section between the time t″ and t1.

[0051] On the other hand, in order to perform high-precision exposure by controlling the moving speed of stage 108 with high precision in the constant speed section between time t′ and t″, it is required that a high-quality current with little distortion flow through the motor driver.

[0052] Therefore, in the stage device used in the exposure device, the PWM amplifier 104 is used for drive control in the acceleration and deceleration intervals requiring a large current, while the linear amplifier 105 is switched to perform drive control in the constant speed interval and the stop interval after time t1.

[0053] This makes it possible to achieve an improvement in throughput and an improvement in positioning accuracy along with higher acceleration.

[0054] Moreover, in Fig.11A In the conventional mounting stage device shown in FIG. 1 , the comparator 109 compares the current command value to the current controller 103 with the preset switching current setting value 110 .

[0055] Thus, a switch serving as the switching unit 106 for switching between the PWM amplifier 104 and the linear amplifier 105 is controlled.

[0056] Fig. 12A A block diagram showing a motor driver included in a conventional mounting table device.

[0057] in addition, Fig. 12B and Fig. 12C An example of a motor current waveform I(R) and a motor voltage waveform V(vtg) when a motor driver included in a conventional stage device performs constant current driving is shown.

[0058] exist Fig. 12A In the motor driver shown, the current controller 103 performs constant current control by calculating the difference between the current command value 111 and the motor current detected by the current detection unit (not shown).

[0059] Here, the maximum output voltage of the PWM amplifier 104 is set to ±200 V, the maximum output voltage of the linear amplifier 105 is set to ±40 V, and the switching current setting value 110 is set to ±1 A.

[0060] In addition, the current command value 111 is compared with the switching current setting value 110 by the comparator 109 .

[0061] It is assumed that the linear amplifier 105 is selected by switching the switch as the switching unit 106 in the case where the current command value 111 is a small current smaller than ±1 A as the switching current setting value 110 .

[0062] On the other hand, when the current command value 111 is a large current of ±1 A or more as the switching current setting value 110 , the PWM amplifier 104 is selected by switching the switch as the switching means 106 .

[0063] Here, the motor 107 is an inductive load based on a winding coil. The motor 107 can be equivalently represented by an RL circuit composed of a resistance value R and an inductance value L. Here, as an example, R=13Ω and L=28mH.

[0064] Fig. 12B and Fig. 12C An example of a motor current waveform I(R) and a motor voltage waveform V(vtg) when constant current driving is performed using such a motor 107 is shown.

[0065] Here, Fig. 12B The case where a current command value 111 with a frequency of 30 Hz and an amplitude of ±5 A is input is shown. Fig. 12C The case where a current command value 111 having a frequency of 50 Hz and an amplitude of ±5 A is input is shown.

[0066] As described above, the motor 107 is an inductive load, so the phase of the motor current waveform I(R) and the phase of the motor voltage waveform V(vtg) are deviated from each other according to the frequency of the current command value 111 .

[0067] exist Fig. 12B In the example shown, when the current command value 111 is ±1A, even if the PWM amplifier 104 is switched to the linear amplifier 105 , the motor voltage converges to the maximum output voltage ±40V of the linear amplifier 105 as shown by the white circle.

[0068] Therefore, switching between the PWM amplifier 104 and the linear amplifier 105 can be performed satisfactorily.

[0069] However, in Fig. 12C In the example shown, when the current command value 111 is switched from the PWM amplifier 104 to the linear amplifier 105 when the current command value 111 is ±1A, the motor voltage sometimes exceeds the maximum output voltage of the linear amplifier 105 by ±40V as shown by the black circle.

[0070] Therefore, the switching between the PWM amplifier 104 and the linear amplifier 105 cannot be performed appropriately.

[0071] As described above, in the conventional method of switching the amplifier by comparing the current command value to the motor driver with the preset switching current setting value, there is a possibility that the maximum output voltage of the linear amplifier may be exceeded when switching the amplifier using the switching current setting value.

[0072] In this case, the control accuracy of the mounting table may be reduced due to current fluctuations in the motor driver.

[0073] Therefore, in order to solve the above-mentioned problems, the stage device according to the present embodiment adopts the following configuration.

[0074] Specifically, in the stage device according to the present embodiment, a calculation unit is provided that determines in advance the switching condition between the PWM amplifier and the linear amplifier by referring to the motor parameter and the drive command value.

[0075] Here, the motor parameters include the resistance value, inductance value, thrust constant, and effective load of the motor.

[0076] Then, in the calculation unit, for example, a velocity waveform and an acceleration waveform are generated by performing a differentiation calculation on the position command value included in the drive command value.

[0077] Next, a load current waveform is generated by referring to the effective load and thrust constant values ​​of the motor, and a load voltage waveform is calculated by inputting the generated load current waveform into a load model obtained from the resistance and inductance values ​​of the motor.

[0078] Then, the back electromotive force is obtained by referring to the speed waveform and the thrust constant of the motor, and the load voltage waveform is corrected.

[0079] Finally, the load current waveform and the corrected load voltage waveform are referred to to determine a switching condition setting value such that the motor voltage converges to the maximum output voltage of the linear amplifier when switching between the PWM amplifier and the linear amplifier.

[0080] Then, based on the determined switching condition setting value, a switching unit that switches between the PWM amplifier and the linear amplifier is controlled.

[0081] As described above, in the stage device according to the present embodiment, the optimum switching condition between the PWM amplifier and the linear amplifier is calculated based on the drive command value.

[0082] This can reduce the current fluctuation that occurs when switching between the PWM amplifier and the linear amplifier, thereby achieving the effect of suppressing the vibration of the stage device and improving the control accuracy.

[0083] [First embodiment]

[0084] Figure 1A and Figure 1B Block diagrams of a position control system and a speed control system used in the stage device according to the first embodiment are respectively shown.

[0085] Furthermore, in the stage device according to the present embodiment, the drive control of the stage is performed using one of the position control system and the speed control system.

[0086] like Figure 1A As shown, in the position control system of the stage device according to the present embodiment, the difference between the position command value included in the drive command value 1 (command value) and the value indicating the stage position detected by the stage position detection unit (not shown) is input to the position controller 2. Thus, position control is performed.

[0087] Here, as the stage position detection means, an encoder, a laser interferometer, or the like selected according to the required accuracy can be used.

[0088] Then, the current command value of the motor driver is output from the position controller 2 (control unit), and the difference between the output current command value and the motor current value detected by the current detection unit (not shown) is input to the current controller 3 (control unit) and processed, thereby performing constant current control.

[0089] In addition, as the current detection means, a current probe, a shunt resistor, or the like is generally used.

[0090] Next, the current (input current) output from the current controller 3 is input to both the PWM amplifier 4 (first amplifier) ​​and the linear amplifier 5 (second amplifier).

[0091] Then, the output current (output signal) from one of the PWM amplifier 4 and the linear amplifier 5 selected by the switch S (switcher) as the switching means 6 is input to the motor 7 (driving unit), and the motor 7 controlled by a constant current drives the mounting table 8, thereby performing position control.

[0092] In other words, the switch S as the switching unit 6 turns on or off the first connection between the PWM amplifier 4 and the motor 7 , and turns on or off the second connection between the linear amplifier 5 and the motor 7 .

[0093] On the other hand, Figure 1B As shown, in the speed control system of the stage device according to the present embodiment, the difference between the speed command value included in the drive command value 1 and the value indicating the stage speed detected by the stage speed detection unit (not shown) is input to the speed controller 12 (control unit). Thus, speed control is performed.

[0094] Here, in the stage speed detection means, a method of performing a differential operation on the position output from an encoder or a laser interferometer or the like can be used.

[0095] Then, a current command value of the motor driver is output from the speed controller 12, and a difference between the output current command value and the motor current value detected by a current detection unit (not shown) is input to the current controller 3 and processed, thereby performing constant current control.

[0096] In addition, as the current detection means, a current probe, a shunt resistor, or the like is generally used.

[0097] Next, the current output from the current controller 3 is input to both the PWM amplifier 4 and the linear amplifier 5 .

[0098] Then, the output current from one of the PWM amplifier 4 and the linear amplifier 5 selected by the switch S as the switching means 6 is input to the motor 7, and the motor 7 under constant current control drives the mounting table 8, thereby performing speed control.

[0099] Then, in the stage device according to the present embodiment, a calculation unit 10 (control unit) is provided for predetermining switching conditions of the PWM amplifier 4 and the linear amplifier 5 by referring to the motor parameter 11 and the position command value, the speed command value, etc. included in the drive command value 1.

[0100] In other words, in the stage device according to the present embodiment, the calculation unit 10 determines the switching conditions of the PWM amplifier 4 and the linear amplifier 5 before starting to drive the stage 8 based on the position command value, the speed command value, and the like.

[0101] Then, the comparator 9 (control unit) compares the output from the calculation unit 10 and the output from the position controller 2 or the speed controller 12 with each other, thereby performing switching control of the switch S.

[0102] Here, the motor parameters 11 (parameters) include the resistance value, inductance value, thrust constant, and effective load of the motor 7 .

[0103] Figure 2 1 is a flowchart showing a switching condition determination process in the calculation unit 10 included in the stage device according to the present embodiment.

[0104] in addition, Figure 3A , Figure 3B as well as Figure 3C A command waveform used in the switching condition determination process, a block diagram showing the switching condition determination process, and a load current waveform and a load voltage waveform used in the switching condition determination process are respectively shown.

[0105] like Figure 2 As shown, in the switching condition determination process, first, the velocity command waveform vel(t) and the acceleration command waveform acc(t) are acquired (step S11).

[0106] Specifically, in Figure 1A When the position command waveform pos(t) is provided as the drive command value 1, the velocity command waveform vel(t) can be generated by performing a first differential operation on the position command waveform pos(t). In addition, the acceleration command waveform acc(t) can be generated by performing a second differential operation on the position command waveform pos(t).

[0107] On the other hand, in Figure 1B As shown in the figure, when the speed command waveform vel(t) is given as the drive command value 1, the acceleration command waveform acc(t) can be generated by performing a differential operation once.

[0108] Figure 3A An example of the position command waveform pos(t), the velocity command waveform vel(t), and the acceleration command waveform acc(t) acquired as described above is shown.

[0109] Next, a load current waveform i(t) in the motor 7 is generated (step S12).

[0110] Specifically, when the effective load of the motor 7 is represented by M, the thrust F(t) required to drive the motor 7 is expressed as in the following equation (1) using the acceleration command waveform acc(t).

[0111] F(t)=M×acc(t)…(1)

[0112] In addition, in the mounting table device according to the present embodiment, the mass of the mounting table 8 may be used as the effective load M of the motor 7 .

[0113] Next, the load current waveform i(t) in the motor 7 is expressed as in the following equation (2) using the thrust F(t) when the thrust constant of the motor 7 is represented as Kf.

[0114] i(t)=F(t) / Kf…(2)

[0115] Therefore, the load current waveform i(t) in the motor 7 can be generated as shown in the following equation (3) based on equations (1) and (2).

[0116] i(t)=M×acc(t) / Kf…(3)

[0117] Next, a load model for generating a load voltage waveform v(t) from the load current waveform i(t) is generated (step S13).

[0118] Specifically, the motor 7 used in the stage device according to the present embodiment is an inductive load based on a winding coil. Figure 3B As shown, an RL circuit composed of a resistance value R and an inductance value L of a coil of the motor 7 is used as a load model.

[0119] Next, by inputting the load current waveform i(t) generated in step S12 into the load model generated in step S13 , a load voltage waveform v(t) is generated (step S14 ).

[0120] Specifically, since the load model generated in step S13 is equivalent to the RL circuit as described above, the generated load voltage waveform v(t) can be expressed as in the following equation (4).

[0121] v(t)=i(t)×(R+jωL)…(4)

[0122] Next, since the motor 7 is represented by an RL circuit as described above, a back electromotive force is generated in a direction that hinders the coil current. Therefore, the load voltage waveform v(t) is corrected accordingly to generate a corrected load voltage waveform vc(t) (step S15).

[0123] Specifically, the back electromotive force waveform vb(t) can be expressed as shown in the following equation (5) from the back electromotive force coefficient and the speed command waveform vel(t).

[0124] vb(t)=Kf×vel(t)…(5)

[0125] In addition, here, since it is known that the back electromotive force coefficient becomes the same value as the thrust constant Kf of the motor 7, the thrust constant Kf of the motor 7 is substituted into the formula (5).

[0126] Then, as shown in the following equation (6), the corrected load voltage waveform vc(t) can be obtained from the difference between the load voltage waveform v(t) and the back electromotive force waveform vb(t) generated in step S14.

[0127] vc(t)=v(t)-vb(t)…(6)

[0128] also, Figure 3B A block diagram showing the processing of step S13 to step S15 described here is shown.

[0129] Next, by referring to the load current waveform i(t) generated in step S12 and the corrected load voltage waveform vc(t) generated in step S15, a switching condition is determined such that the output voltage of the linear amplifier 5 converges within ±40V of the maximum output voltage (step S16).

[0130] For example, in Figure 3C In the load current waveform i(t) and load voltage waveform vc(t) shown, the linear amplifier 5 is switched to the PWM amplifier 4 when the load current reaches ±0.5 A. As a result, as shown by the white circle, the output voltage of the linear amplifier 5 can be brought within ±40 V of the maximum output voltage.

[0131] That is, the comparator 9 compares ±0.5A, which is the switching condition determined by the operation unit 10 in step S16, with the current command value output from the position controller 2 or the speed controller 12. Then, based on the comparison by the comparator 9, when the load current is less than ±0.5A, the switch S is controlled so as to select the linear amplifier 5.

[0132] As described above, in the stage device according to the present embodiment, it is possible to perform switching between the linear amplifier 5 and the PWM amplifier 4 in a favorable manner.

[0133] As described above, in the stage device according to the present embodiment, the calculation unit 10 is provided for predetermining the switching condition between the PWM amplifier 4 and the linear amplifier 5 by the switching means 6 by referring to the motor parameter 11 and the drive command value 1 .

[0134] Thus, the PWM amplifier 4 and the linear amplifier 5 can be switched in a favorable manner, and a stage device can be provided that further improves positioning accuracy by suppressing a decrease in positioning accuracy while maintaining an improvement in throughput.

[0135] [Second embodiment]

[0136] Figure 4 A block diagram showing a position control system included in the stage device according to the second embodiment.

[0137] like Figure 4 As shown, in the stage device according to the present embodiment, position control is performed by inputting a position difference between a position command value included in a drive command value 1 and a stage position detected by a stage position detection unit (not shown) into a position controller 2 .

[0138] In addition, as the stage position detection means, an encoder, a laser interferometer, or the like selected according to the required accuracy can be used.

[0139] Next, the position controller 2 outputs a current command value for the motor driver, and the current controller 3 performs constant current control by calculating the difference between the output current command value and the motor current value detected by a current detection unit (not shown).

[0140] In addition, as the current detection means, a current probe, a shunt resistor, or the like is generally used.

[0141] Next, the current output from the current controller 3 is input to both the PWM amplifier 4 and the linear amplifier 5 .

[0142] Then, the switches S1 (first switch) and S2 (second switch) as the switching means 6 select the current output from one of the PWM amplifier 4 and the linear amplifier 5, and the motor 7 controlled by the constant current drives the stage 8, thereby performing position control.

[0143] In other words, the switch S1 as the switching means 6 turns on or off the first connection between the PWM amplifier 4 and the motor 7. On the other hand, the switch S2 as the switching means 6 turns on or off the second connection between the linear amplifier 5 and the motor 7.

[0144] In addition, the stage device according to the present embodiment may also use a speed control system based on the speed command value included in the drive command value 1 , similarly to the stage device according to the first embodiment.

[0145] Furthermore, the processing in the speed control system included in the stage device according to the present embodiment is also the same as that of the stage device according to the first embodiment, and therefore the description thereof will be omitted here.

[0146] The stage device according to the present embodiment is provided with a calculation unit 10 that predetermines a switching condition between the PWM amplifier 4 and the linear amplifier 5 by referring to the motor parameter 11 and the drive command value 1 including the position command value, the speed command value, and the like.

[0147] Here, the motor parameters 11 include the resistance value, inductance value, thrust constant, and effective load of the motor 7 .

[0148] like Figure 4 As shown, in the stage device according to the present embodiment, switches S1 and S2 as switching means 6 are independently provided at the output stages of the PWM amplifier 4 and the linear amplifier 5 , respectively.

[0149] Moreover, similarly to the stage device according to the first embodiment described above, the switching condition is determined by the calculation unit 10 .

[0150] Then, the comparator 9 compares the threshold value based on the determined switching condition with the current command value, and independently controls the switches S1 and S2 , thereby switching the output of the PWM amplifier 4 and the output of the linear amplifier 5 .

[0151] Figure 5A and Figure 5B A partially enlarged block diagram of a position control system included in a certain stage device and a state when the switch S is switched are shown respectively.

[0152] In addition, the mounting stage device shown here has the same structure as the mounting stage device according to the present embodiment, except that a single switch S is provided as the switching means 6 instead of the switches S1 and S2.

[0153] Consider Figure 5A 1 and 2. The state shown in FIG. 1 is a state where the switch S is operated at time T1 to transition from a state where the PWM amplifier 4 is selected (contact point C1) to a state where the linear amplifier 5 is selected (contact point C2).

[0154] At this time, if a delay or the like occurs in the operation of the switch S, a period in which both the contacts C1 and C2 are turned off occurs before the linear amplifier 5 is selected at time T2.

[0155] In this case, the motor 7 is an inductive load based on the winding coil, so when the coil end of the motor 7 is released in the state where the current is energized, as shown in FIG. Figure 5B As shown, a large surge voltage is generated across the coil of the motor 7 .

[0156] Fig. 6A , Figure 6B , Figure 6C as well as Fig.6D A state when the switches S1 and S2 are switched in the position control system provided in the stage device according to the present embodiment is shown.

[0157] like Fig. 6A As shown, in the stage device according to the present embodiment, at a predetermined time before time T1, the switch S1 is turned on, while the switch S2 is turned off, so that the PWM amplifier 4 is selected (state 1, Figure 6B ).

[0158] Next, between time T1 and time T2, both the switch S1 and the switch S2 are turned on, so that the PWM amplifier 4 and the linear amplifier 5 are selected (state 2, Figure 6C ).

[0159] Then, at a predetermined time after the time T2, the switch S1 is turned off, while the switch S2 is turned on, so that the linear amplifier 5 is selected (state 3, Fig.6D ).

[0160] In the stage device according to the present embodiment, as described above, the switches S1 and S2 as the switching means 6 are independently provided in the output stages of the PWM amplifier 4 and the linear amplifier 5 , respectively.

[0161] Then, when switching between the PWM amplifier 4 and the linear amplifier 5 , the time during which both the switches S1 and S2 are turned on is set so as not to release the coil end.

[0162] This can prevent a surge voltage from being generated at both ends of the coil of the motor 7 , and can improve the reliability of positioning of the mounting table 8 .

[0163] As described above, in the stage device according to the present embodiment, the calculation unit 10 is provided for predetermining the switching condition between the PWM amplifier 4 and the linear amplifier 5 by the switching means 6 by referring to the motor parameter 11 and the drive command value 1 .

[0164] Furthermore, in the stage device according to the present embodiment, since the switching means 6 is constituted by the two switches S1 and S2 , it is possible to prevent a surge voltage from being generated at both ends of the coil of the motor 7 due to switching between the PWM amplifier 4 and the linear amplifier 5 .

[0165] This makes it possible to more satisfactorily switch between the PWM amplifier 4 and the linear amplifier 5 , and to provide a stage device that further improves positioning accuracy by suppressing a decrease in positioning accuracy while maintaining an improvement in throughput.

[0166] [Third Embodiment]

[0167] Figure 7 A block diagram showing a position control system used in the stage device according to the third embodiment.

[0168] In the stage device according to the first embodiment, before the stage 8 starts to be driven, the position command value or the speed command value included in the drive command value 1 is input to the calculation unit 10. Then, the calculation unit 10 calculates the switching condition of the switching unit 6 by referring to the motor parameter 11 and the input position command value or speed command value to make a decision.

[0169] At this time, as described above, since the load current waveform i(t) and the load voltage waveform vc(t) need to be calculated every time the stage 8 is driven, there is a possibility that a delay will occur before the driving of the stage 8 starts.

[0170] Therefore, in the stage device according to the present embodiment, by adopting the following configuration, it is possible to suppress the occurrence of such a delay in driving the stage 8 .

[0171] like Figure 7 As shown, in the position control system included in the stage device according to the present embodiment, the speed command value or the acceleration command value included in the drive command value 1 is input to the calculation unit 15 (control unit).

[0172] Then, the calculation unit 15 obtains a position command value by integrating the input speed command value or acceleration command value, and outputs the obtained position command value to the position controller 2 .

[0173] Next, the difference between the output position command value and the value indicating the position of the stage detected by the stage position detection unit (not shown) is input to the position controller 2. Thus, position control is performed.

[0174] Here, as the stage position detection means, an encoder, a laser interferometer, or the like selected according to the required accuracy can be used.

[0175] Then, a current command value of the motor driver is output from the position controller 2 , and a difference between the output current command value and the motor current value detected by a current detection unit (not shown) is input to the current controller 3 and processed, thereby performing constant current control.

[0176] In addition, as the current detection means, a current probe, a shunt resistor, or the like is generally used.

[0177] Next, the current output from the current controller 3 is input to both the PWM amplifier 4 and the linear amplifier 5 .

[0178] Then, the output current from one of the PWM amplifier 4 and the linear amplifier 5 selected by the switch S as the switching means 6 is input to the motor 7, and the motor 7 under constant current control drives the stage 8, thereby performing position control.

[0179] In other words, the switch S as the switching unit 6 turns on or off the first connection between the PWM amplifier 4 and the motor 7 , and turns on or off the second connection between the linear amplifier 5 and the motor 7 .

[0180] In addition, in the mounting table device involved in this embodiment, the following is used Figure 7 The position control system shown in FIG. 1 may also be used, but is not limited thereto. Figure 1B Speed ​​control system shown.

[0181] In this case, the speed command value included in the drive command value 1 only needs to be output to the speed controller 12 , so the calculation unit 15 can be omitted.

[0182] Furthermore, in the stage device according to the present embodiment, a switching condition determination unit 13 (control unit) is provided for predetermining the switching conditions of the PWM amplifier 4 and the linear amplifier 5 by referring to the switching condition table 14 and the speed command value and the acceleration command value included in the drive command value 1.

[0183] In other words, in the stage device according to the present embodiment, the switching condition determination unit 13 determines the switching condition between the PWM amplifier 4 and the linear amplifier 5 before the driving of the stage 8 based on the position command value starts.

[0184] That is, in the stage device according to the present embodiment, the switching condition table 14 is prepared in advance. Then, when the stage 8 is driven, the switching conditions of the PWM amplifier 4 and the linear amplifier 5 can be determined by referring to the switching condition table 14 and the speed command value and the acceleration command value included in the drive command value 1.

[0185] Then, the comparator 9 compares the output from the switching condition determination unit 13 and the output from the position controller 2 with each other, thereby performing switching control of the switch S.

[0186] Fig. 8A This is a flowchart showing the creation process of the switching condition table 14 in the stage device according to the present embodiment.

[0187] Note that this processing may be performed in the computing unit 15 or in another computing unit (not shown).

[0188] like Fig. 8AAs shown, in the switching condition table preparation process, first, the amplitudes vel and acc (speed and acceleration data) of the speed command waveform vel(t) and the acceleration command waveform acc(t) assumed when driving the mounting table 8 are obtained (step S21).

[0189] Furthermore, the amplitudes vel and acc assumed here may also be input by a user, for example.

[0190] in addition, Fig. 9A and Fig. 9B Examples of assumed amplitudes vel and acc are shown.

[0191] Next, based on the input amplitudes vel and acc, a velocity command waveform vel(t) and an acceleration command waveform acc(t) are generated (step S22).

[0192] Here, it is assumed that in the stage device according to the present embodiment, the frequency and waveform of each of the velocity command waveform vel(t) and the acceleration command waveform acc(t) do not change.

[0193] That is, in Fig. 9A and Fig. 9B In the example shown, in each of the velocity command waveform vel(t) and the acceleration command waveform acc(t), one cycle is 24 ms and has a trapezoidal wave shape without changing.

[0194] Next, a load current waveform i(t) in the motor 7 is generated (step S23). Specifically, when the effective load of the motor 7 is M, the thrust F(t) required to drive the motor 7 is expressed as shown in the following equation (7) using the acceleration command waveform acc(t).

[0195] F(t)=M×acc(t)…(7)

[0196] In addition, in the mounting table device according to the present embodiment, the mass of the mounting table 8 may be used as the effective load M of the motor 7 .

[0197] Next, the load current waveform i(t) in the motor 7 is expressed as in the following equation (8) using the thrust F(t) when the thrust constant of the motor 7 is represented as Kf.

[0198] i(t)=F(t) / Kf…(8)

[0199] Therefore, the load current waveform i(t) in the motor 7 can be generated as shown in the following equation (9) based on equations (7) and (8).

[0200] i(t)=M×acc(t) / Kf…(9)

[0201] Next, a load model for generating a load voltage waveform v(t) from the load current waveform i(t) is generated (step S24).

[0202] Specifically, the motor 7 used in the stage device according to the present embodiment is an inductive load based on a winding coil. Figure 3B As shown, an RL circuit composed of a resistance value R and an inductance value L of a coil of the motor 7 is used as a load model.

[0203] Next, by inputting the load current waveform i(t) generated in step S23 into the load model generated in step S24 , a load voltage waveform v(t) is generated (step S25 ).

[0204] Specifically, since the load model generated in step S24 is equivalent to the RL circuit as described above, the generated load voltage waveform v(t) can be expressed as in the following equation (10).

[0205] v(t)=i(t)×(R+jωL)…(10)

[0206] Next, since the motor 7 is represented by an RL circuit as described above, a back electromotive force is generated in a direction that hinders the coil current. Therefore, the load voltage waveform v(t) is corrected accordingly to generate a corrected load voltage waveform vc(t) (step S26).

[0207] Specifically, the back electromotive force waveform vb(t) can be expressed as shown in the following equation (11) from the back electromotive force coefficient and the speed command waveform vel(t).

[0208] vb(t)=Kf×vel(t)…(11)

[0209] In addition, here, since it is known that the back electromotive force coefficient becomes the same value as the thrust constant Kf of the motor 7, the thrust constant Kf of the motor 7 is substituted into the formula (11).

[0210] Then, as shown in the following equation (12), the corrected load voltage waveform vc(t) can be obtained from the difference between the load voltage waveform v(t) and the back electromotive force waveform vb(t) generated in step S25.

[0211] vc(t)=v(t)-vb(t)…(12)

[0212] Next, by referring to the load current waveform i(t) generated in step S23 and the corrected load voltage waveform vc(t) generated in step S26, a switching condition is determined such that the output voltage of the linear amplifier 5 converges within ±40V of the maximum output voltage (step S27).

[0213] For example, consider Fig. 9A The case shown is where the amplitude vel of the velocity command waveform vel(t) is vel1, and the amplitude acc of the acceleration command waveform acc(t) is acc1 (the amplitude of the load current waveform i(t) is ±3 A).

[0214] At this time, by referring to the load current waveform i(t) generated in step S23 and the corrected load voltage waveform vc(t) generated in step S26, a switching condition is determined such that the output voltage of the linear amplifier 5 is within ±40 V of the maximum output voltage. 11 (A).

[0215] In addition, consider Fig. 9B The case shown is where the amplitude vel of the velocity command waveform vel(t) is vel2, and the amplitude acc of the acceleration command waveform acc(t) is acc2 (the amplitude of the load current waveform i(t) is ±5 A).

[0216] At this time, by referring to the load current waveform i(t) generated in step S23 and the corrected load voltage waveform vc(t) generated in step S26, a switching condition is determined such that the output voltage of the linear amplifier 5 is within ±40 V of the maximum output voltage. 22 (A).

[0217] Then, it is determined whether the switching condition has been determined as described above for all assumed combinations of the amplitudes vel and acc (step S28).

[0218] When it is determined that the switching condition has not been performed for all the combinations (No in step S28), the process returns to step S21 and the switching condition determination process is continued.

[0219] On the other hand, when it is determined that the process has been performed for all the combinations (YES in step S28 ), the switching condition table 14 is created based on the obtained results (step S29 ), and the switching condition table creation process is terminated.

[0220] Fig. 9C An example of the switching condition table 14 created in step S29 is shown.

[0221] Figure 8B This is a flowchart showing the switching condition determination process in the switching condition determination unit 13 included in the stage device according to the present embodiment.

[0222] like Figure 8B As shown, in the switching condition determination process, first, the amplitudes vel and acc of the velocity command waveform vel(t) and the acceleration command waveform acc(t) included in the drive command value 1 are acquired (step S31).

[0223] Then, the switching condition determination unit 13 determines a current value corresponding to the switching condition of the PWM amplifier 4 and the linear amplifier 5 using the switching condition table 14 based on the input amplitudes vel and acc (step S32 ).

[0224] As described above, in the stage device according to the present embodiment, when the stage 8 is driven, the switching condition can be immediately obtained by referring to the amplitude vel and acc included in the drive command value 1 and the switching condition table 14 .

[0225] In addition, by creating the switching condition table 14 so that the amplitude vel and acc satisfy the relationship between the following equations (13) and (14), even if there are no values ​​corresponding to the input amplitudes vel and acc, the switching conditions can be determined by referring to nearby values.

[0226] vel1 <vel2<vel3<vel4<vel5…(13)

[0227] acc1 <acc2<acc3<acc4<acc5…(14)

[0228] For example, when a value between vel2 and vel3 is input for the amplitude vel, and a value between acc2 and acc3 is input for the amplitude acc, switching conditions corresponding to the larger values, vel3 and acc3, may be determined.

[0229] As a result, the switching condition becomes stricter, that is, the current value corresponding to the switching condition becomes smaller, so the PWM amplifier 4 and the linear amplifier 5 can be switched safely.

[0230] As described above, the stage device according to the present embodiment includes the switching condition determination unit 13 that determines in advance the switching conditions of the PWM amplifier 4 and the linear amplifier 5 by referring to the switching condition table 14 and the amplitudes vel and acc included in the drive command value 1 .

[0231] That is, in the stage device according to the present embodiment, the switching condition table 14 is prepared by calculating the load current waveform i(t) and the load voltage waveform vc(t) at the combination of amplitudes vel and acc assumed in advance and determining the switching condition.

[0232] Then, when driving the mounting table 8 , the switching conditions of the PWM amplifier 4 and the linear amplifier 5 can be determined simply by referring to the switching condition table 14 and the amplitudes vel and acc included in the drive command value 1 .

[0233] This makes it possible to switch between the PWM amplifier 4 and the linear amplifier 5 in a satisfactory manner, and to provide a stage device that can further improve throughput while suppressing a decrease in positioning accuracy.

[0234] Although preferred embodiments have been described above, the present invention is not limited to these embodiments, and various modifications and changes can be made within the scope of the gist of the invention.

[0235] According to the present invention, it is possible to provide a stage device capable of suppressing a decrease in positioning accuracy while maintaining an improvement in throughput.

[0236] [Exposure device]

[0237] Fig.10 A configuration diagram of an exposure apparatus 900 including a stage device according to the present embodiment is shown.

[0238] The exposure device 900 includes a lamp lighting device 401 (light source), an illumination optical system 402 , a slit 403 , an imaging optical system 404 , an original plate mounting table 405 , a projection optical system 406 , and a substrate mounting table 407 .

[0239] In addition, the stage device according to the present embodiment is used to control the driving of the original plate stage 405 and the substrate stage 407, for example.

[0240] The lamp lighting device 401 is a light source such as a high-pressure mercury lamp that emits ultraviolet light.

[0241] The illumination optical system 402 includes a first bending mirror 501 , a first condensing lens 502 , a fly-eye lens 503 , a second condensing lens 504 , and a second bending mirror 505 .

[0242] The original plate mounting table 405 is a mask mounting table for holding the original plate O, which can be Fig.10 Driven in the Y-axis direction shown in .

[0243] The projection optical system 406 is a projection optical system for projecting and transferring the pattern drawn on the original plate O onto the substrate P coated with a photosensitive agent.

[0244] Furthermore, in the exposure device 900, a projection optical system 406 based on an Offner type optical system is used.

[0245] In the case of the Offner type optical system, in order to ensure a good image area, the original plate O is irradiated in an arc shape. In addition, the irradiation shape of the exposure light reaching the substrate P is also in an arc shape.

[0246] The light passing through the original plate O reaches the substrate P after being reflected by the trapezoidal mirror 601, the concave mirror 602, the convex mirror 603, the concave mirror 602, and the trapezoidal mirror 601 in order, and the pattern on the original plate O is transferred to the substrate P.

[0247] The substrate stage 407 is a wafer stage for holding the substrate P, and is driven in the Y direction synchronously with the original stage 405 to perform exposure of the substrate P. The substrate stage 407 can be driven in the X direction in addition to the Y direction, and when multiple panels are exposed on the substrate P, the substrate stage 407 is driven in the X and Y directions to perform exposure.

[0248] The exposure light emitted from the lamp lighting device 401 passes through the illumination optical system 402 , the slit 403 , and the imaging optical system 404 , and then irradiates the original plate O placed on the original plate placing table 405 .

[0249] Then, the exposure light transmitted through the original plate O passes through the projection optical system 406 , irradiates the substrate P placed on the substrate mounting table 407 , and exposes the exposure area on the substrate P.

[0250] Furthermore, although the embodiment in which the stage device according to the present embodiment is provided in an exposure device is described above, the present invention is not limited thereto, and the stage device according to the present embodiment can also be applied to a pattern forming device such as an imprint device or a drawing device.

[0251] The imprint apparatus referred to herein is an apparatus that forms a pattern of a cured product to which a pattern of a pattern is transferred by bringing an imprint material supplied onto a substrate and a pattern material into contact with each other and then applying energy for curing the imprint material.

[0252] The drawing device refers to a device that forms a pattern (latent image pattern) on a substrate by drawing on the substrate using a charged particle beam (electron beam) or a laser beam.

[0253] [Production method]

[0254] The method for manufacturing an article according to the present embodiment is suitable for manufacturing, for example, micro devices such as semiconductor devices, and articles such as elements having a microstructure.

[0255] The method for manufacturing an article according to the present embodiment includes a step of forming a latent image pattern on a photosensitive agent applied to a substrate using the exposure device 900 described above (an exposure step of exposing the substrate).

[0256] The method for manufacturing an article according to the present embodiment includes a developing step (processing step) of developing the substrate on which the latent image pattern is formed in the exposure step.

[0257] Moreover, the manufacturing method of the article involved in this embodiment includes other well-known manufacturing steps (oxidation, film formation, evaporation, doping, planarization, etching, photosensitive agent stripping, cutting, bonding, packaging, etc.) performed on the substrate after development in the development step.

[0258] The method for manufacturing an article according to the present embodiment is more advantageous than conventional methods in at least one of the performance, quality, productivity, and production cost of the article.

[0259] The method for manufacturing an article according to the present embodiment is not limited to being performed using the exposure device 900 described above, and may be performed using a pattern forming device such as an imprint device or a drawing device that includes the stage device according to the present embodiment.

Claims

1. A mounting table device, characterized in that: have: Loading table; a motor for driving the mounting table; a first amplifier that outputs an output signal obtained by amplifying an input signal using pulse width modulation control to the motor; a second amplifier that outputs an output signal obtained by amplifying the input signal using linear control to the motor; a switch capable of switching the connection between the first amplifier and the motor, and capable of switching the connection between the second amplifier and the motor; as well as Control Department, wherein the control unit controls the switch according to a switching condition of the switch, wherein the switching condition of the switch is determined based on a load current waveform and a load voltage waveform in the motor obtained based on a parameter of the motor and a command value related to driving the mounting table, so that the output voltage of the second amplifier converges to a maximum output voltage, The parameters include a resistance value of the motor, an inductance value of the motor, a thrust constant of the motor, and a mass of the mounting table.

2. The mounting table device according to claim 1, characterized in that: The control unit determines the switching condition before starting to drive the mounting table based on the command value.

3. The mounting table device according to claim 1, characterized in that: The control unit generates a speed command waveform and an acceleration command waveform based on the command value, generates the load current waveform based on the acceleration command waveform, the mass of the mounting table and the thrust constant of the motor, generates a load model based on the resistance value and inductance value of the motor, generates the load voltage waveform by inputting the load current waveform into the load model, and corrects the load voltage waveform using a back electromotive force waveform obtained based on the speed command waveform and the thrust constant of the motor, thereby obtaining the load current waveform and the load voltage waveform.

4. The mounting table device according to claim 1, characterized in that: The control unit determines the switching condition based on a switching condition table created based on the parameter and the command value.

5. The mounting table device according to claim 4, characterized in that: The control unit generates a speed command waveform and an acceleration command waveform for each of a plurality of speed and acceleration data inputted, generates the load current waveform according to the acceleration command waveform, the mass of the mounting table and the thrust constant of the motor, generates a load model according to the resistance value and the inductance value of the motor, generates the load voltage waveform by inputting the load current waveform into the load model, corrects the load voltage waveform using a back electromotive force waveform obtained according to the speed command waveform and the thrust constant of the motor, thereby obtaining the load current waveform and the load voltage waveform, determines the switching condition according to the obtained load current waveform and load voltage waveform, and prepares the switching condition table.

6. The mounting table device according to claim 1, characterized in that: The control unit controls the switch so that it transitions from a state in which one of the connection between the first amplifier and the motor and the connection between the second amplifier and the motor is set to be valid and the other is set to be invalid, to a state in which one of the connection between the first amplifier and the motor and the connection between the second amplifier and the motor is set to be invalid and the other is set to be valid after both the connection between the first amplifier and the motor and the connection between the second amplifier and the motor are set to be valid.

7. A pattern forming device for forming a pattern on a substrate, characterized in that: The mounting table device according to any one of claims 1 to 6 is provided, wherein the mounting table device controls driving of the mounting table on which the substrate is mounted.

8. A method for manufacturing an article, characterized in that: have: A step of forming a pattern on the substrate using the pattern forming device according to claim 7; and A step of processing the substrate on which the pattern is formed to obtain an article.

9. A method for driving a mounting table, characterized in that: The stage is driven using a stage device, the stage device comprising: a stage; a motor for driving the stage; a first amplifier that outputs an output signal obtained by amplifying an input signal using pulse width modulation control to the motor; a second amplifier that outputs an output signal obtained by amplifying the input signal using linear control to the motor; a switch that can switch the connection between the first amplifier and the motor, and can switch the connection between the second amplifier and the motor; and the control department, The method comprises: A step of obtaining a load current waveform and a load voltage waveform in the motor based on the parameters of the motor and a command value related to driving the mounting table; The step of determining the switching condition of the switcher in such a manner that the output voltage of the second amplifier converges to the maximum output voltage based on the obtained load current waveform and load voltage waveform in the motor; and The step of controlling the switch according to the determined switching condition of the switch, The parameters include a resistance value of the motor, an inductance value of the motor, a thrust constant of the motor, and a mass of the mounting table.

10. The method according to claim 9, characterized in that The step of determining includes the step of determining the switching condition before starting the driving of the mounting table based on the command value.

11. The method according to claim 9, characterized in that The steps of performing the determination include: The step of generating a speed command waveform and an acceleration command waveform according to the command value; generating the load current waveform according to the acceleration command waveform, the mass of the mounting table, and the thrust constant of the motor; The step of generating a load model according to the resistance value and the inductance value of the motor; a step of generating the load voltage waveform by inputting the load current waveform into the load model; and The step of correcting the load voltage waveform using a back electromotive force waveform obtained from the speed command waveform and a thrust constant of the motor.

12. The method according to claim 9, characterized in that The step of determining includes the step of determining the switching condition based on a switching condition table created based on the parameter and the command value.

13. The method according to claim 12, characterized in that The following steps are involved: A speed command waveform and an acceleration command waveform are generated for each of a plurality of speed and acceleration data inputted, the load current waveform is generated according to the acceleration command waveform, the mass of the mounting table and the thrust constant of the motor, a load model is generated according to the resistance value and the inductance value of the motor, the load voltage waveform is generated by inputting the load current waveform into the load model, the load voltage waveform is corrected using a back electromotive force waveform obtained according to the speed command waveform and the thrust constant of the motor, thereby obtaining the load current waveform and the load voltage waveform, the switching condition is determined according to the obtained load current waveform and load voltage waveform, and the switching condition table is prepared.

14. The method according to claim 9, characterized in that The step of performing the control includes the following steps: controlling the switch so as to change from a state in which one of the connection between the first amplifier and the motor and the connection between the second amplifier and the motor is set to be valid and the other is set to be invalid, to a state in which one of the connection between the first amplifier and the motor and the connection between the second amplifier and the motor is set to be invalid and the other is set to be valid after both the connection between the first amplifier and the motor and the connection between the second amplifier and the motor are set to be valid.

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