Retention device

Abstract

Suppress defects in a ceramic tubular member. The holding device is a device that includes a plate-like member, a tubular member, and a connecting member, and holds an object on the holding surface of the plate-like member. The tubular member is formed of ceramic, and one end of the tubular member on one side in a first direction orthogonal to the holding surface is joined to a second surface of the plate-like member. The tubular member has a flange portion formed with a first through hole at the other end in the first direction. The connecting member is disposed on the other side in the first direction of the tubular member, and is formed with a hole for screw engagement of a fastening member passing through the first through hole of the flange portion so as to open at a third surface which is an end surface on one side in the first direction. A specific portion of the outer edge line of the fourth surface of the tubular member, which is a portion overlapping with the smallest imaginary circle including the fourth surface, does not contact the third surface of the connecting member.

Description

Technical Field

[0001] The technology disclosed in this specification relates to a holding device for holding an object. Background Art

[0002] There is known a heating device (also referred to as a "base") that holds an object (e.g., a semiconductor wafer) and heats it to a predetermined temperature (e.g., around 400 to 800°C). The heating device is used, for example, as part of a semiconductor manufacturing device such as a film forming device (CVD film forming device, sputtering film forming device, etc.) or an etching device (plasma etching device, etc.).

[0003] Generally, the heating device includes a plate-like member and a tubular member. The plate-like member is a plate-like member having a surface (hereinafter referred to as a "holding surface") that is substantially orthogonal to a predetermined direction (hereinafter referred to as the "first direction") and a surface (hereinafter referred to as a "back surface") located on the side opposite to the holding surface. The tubular member (also referred to as a "shaft") is a tubular member extending in the first direction and is joined to the back surface of the plate-like member at one end on the first direction side. A heater electrode as a resistance heating element is disposed inside the plate-like member. When a voltage is applied to the heater electrode, the heater electrode generates heat and heats the object held on the holding surface of the plate-like member.

[0004] The heating device further includes a connection member (also referred to as an "adapter") disposed on the other side of the tubular member in the first direction (the side opposite to the side opposite to the plate-like member). The connection member is a member for mounting the tubular member to another member (e.g., a vacuum chamber). The connection member is formed of a metal material such as aluminum, for example.

[0005] The tubular member and the connection member of the heating device are joined by a fastening member such as a threaded member (see, for example, Patent Document 1). More specifically, a flange portion is formed at one end of the tubular member on the side opposite to the connection member, and a through hole is formed in the flange portion. The tubular member and the connection member are joined by screwing a fastening member passing through the through hole in the flange portion with a hole formed in the surface of the connection member on the side opposite to the tubular member.

[0006] Prior Art Documents

[0007] Patent Documents

[0008] Patent Document 1: Japanese Patent Laid-Open No. 10-298767 Summary of the Invention

[0009] Problems to be Solved by the Invention

[0010] Generally, the tubular member of the heating device is formed of ceramic that is prone to defects. Therefore, when the tubular member and the connecting member are fastened by the fastening member, if there is a slight inclination between the two members, the connecting member contacts a portion near the outer edge line on the end face (the face opposite to the connecting member) of the tubular member, which may cause defects near the outer edge line.

[0011] In addition, such problems are not limited to heating devices, but are common problems in holding devices that include a plate-like member, a ceramic tubular member, a connecting member, and hold an object on the surface of the plate-like member.

[0012] In this specification, a technique that can solve the above problems is disclosed.

[0013] Solutions to the problems

[0014] The technique disclosed in this specification can be implemented, for example, in the following forms.

[0015] The holding device disclosed in this specification includes: a plate-like member having a first surface substantially orthogonal to a first direction and a second surface located on the side opposite to the first surface; and a tubular member extending in the first direction and formed of ceramic. The tubular member is joined to the second surface of the plate-like member at one end in the first direction, and has a flange portion protruding in a direction substantially orthogonal to the first direction at the other end in the first direction and formed with a first through hole extending in the first direction. The holding device holds an object on the first surface of the plate-like member. The holding device further includes a connecting member disposed on the other side of the tubular member in the first direction. The connecting member is formed with a hole for threadedly engaging a fastening member passing through the first through hole of the flange portion and opening at a third surface that is an end face on the one side in the first direction. A part of a fourth surface that is an end face on the other side of the tubular member in the first direction contacts the third surface of the connecting member, and a specific part of the outer edge line of the fourth surface of the tubular member that overlaps with the smallest imaginary circle including the fourth surface does not contact the third surface of the connecting member.

[0016] The part of the outer edge line of the fourth surface (the end face on the side opposite to the connecting member) of the above-mentioned tubular member is a part where, when the tubular member and the connecting member are fastened by a fastening member and a slight inclination occurs between the tubular member and the connecting member, a defect of the tubular member is likely to occur due to the contact between the tubular member and the connecting member. In particular, a specific part of the outer edge line of the fourth surface of the tubular member (i.e., the outermost peripheral part of the outer edge line), which is the part overlapping with the smallest imaginary circle including the fourth surface, is the part most likely to cause the above-mentioned defect. As described above, in this holding device, the specific part of the outer edge line of the fourth surface of the tubular member does not contact the third surface of the connecting member. Therefore, according to this holding device, even when a slight inclination occurs between the above two members, it is possible to suppress the contact between the specific part of the outer edge line of the fourth surface of the tubular member and the connecting member, and as a result, it is possible to suppress the occurrence of defects in the tubular member.

[0017] (2) In the above holding device, the following structure can be adopted: the entire outer edge line of the fourth surface of the tubular member does not contact the third surface of the connecting member. According to such a structure, it is possible to more reliably suppress the occurrence of defects in the tubular member.

[0018] (3) In the above holding device, the following structure can be adopted: the third surface of the connecting member has a part overlapping with the specific part of the outer edge line of the fourth surface of the tubular member when viewed in the first direction, and in the first direction, the third surface of the connecting member is separated from the specific part of the outer edge line of the fourth surface of the tubular member. According to such a structure, regardless of the size relationship between the outer diameters of the flange portion of the tubular member and the connecting member, etc., it is possible to suppress the occurrence of defects in the tubular member.

[0019] (4) In the above-mentioned holding device, the following structure can be adopted: The holding device further includes a spacer. The spacer is disposed on the one side in the first direction with respect to the flange portion. The spacer is formed with a second through-hole that communicates with the first through-hole of the flange portion and through which the fastening member passes. A part of the fifth surface, which is the end surface on the one side in the first direction of the flange portion, contacts the sixth surface, which is the end surface on the other side in the first direction of the spacer. And, the entire outer edge line of the fifth surface of the flange portion does not contact the sixth surface of the spacer. In the form of using the spacer to fasten the tubular member and the connecting member, a part of the outer edge line of the fifth surface (the end surface on the side opposite to the spacer) of the flange portion of the above-mentioned tubular member is a portion that is likely to cause damage to the tubular member due to the contact between the tubular member and the spacer when a slight inclination occurs between the spacer and the tubular member. In the above structure, the entire outer edge line of the fifth surface of the flange portion of the tubular member does not contact the sixth surface of the spacer. Therefore, according to the above structure, even when a slight inclination occurs between the above two members, it is possible to suppress the contact between the outer edge line portion of the fifth surface of the flange portion of the tubular member and the spacer. As a result, it is possible to suppress the occurrence of damage to the tubular member.

[0020] (5) In the above-mentioned holding device, the following structure can be adopted: A plurality of the first through-holes are formed in the flange portion of the tubular member, and a plurality of holes for threadedly engaging a plurality of the fastening members passing through the plurality of the first through-holes in the flange portion are formed in the connecting member. In such a structure, when fastening the tubular member and the connecting member with a plurality of fastening members, it is easy to generate a slight inclination between the tubular member and the connecting member due to the deviation of the fastening force of each fastening member, and the above-mentioned damage is likely to occur. However, in the present holding device, since a specific portion of the outer edge line of the fourth surface of the tubular member does not contact the third surface of the connecting member, it is possible to suppress the contact between the specific portion of the outer edge line of the fourth surface of the tubular member and the connecting member. As a result, it is possible to suppress the occurrence of damage to the tubular member.

[0021] (6) In the above-mentioned holding device, the following structure can be adopted: The holding device further includes the fastening member. According to such a structure, in the holding device having the fastening member for fastening the tubular member and the connecting member, it is possible to suppress the contact between the specific portion of the outer edge line of the fourth surface of the tubular member and the connecting member. As a result, it is possible to suppress the occurrence of damage to the tubular member.

[0022] (7) In the above-described holding device, the following structure may be adopted: the holding device further includes an internal electrode disposed inside the plate-like member. With such a structure, in a holding device having an internal electrode disposed inside a plate-like member, it is possible to suppress contact between a specific portion of the outer edge line of the fourth surface of the tubular member and the connecting member. As a result, generation of defects in the tubular member can be suppressed.

[0023] In addition, the technology disclosed in this specification can be implemented in various forms. For example, it can be implemented in forms such as a heating device, a holding device, and a manufacturing method thereof. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a perspective view schematically showing the external structure of the heating device 100 of the present embodiment.

[0025] Figure 2 is an explanatory view schematically showing the sectional structure of the heating device 100 of the present embodiment.

[0026] Figure 3 is an explanatory view showing the structure of the lower surface S4 of the tubular member 20.

[0027] Figure 4 is an explanatory view showing the sectional structure of the tubular member 20.

[0028] Figure 5 is an explanatory view showing the structure of the upper surface S3 of the connecting member 80.

[0029] Figure 6 is an explanatory view showing the sectional structure of the connecting member 80.

[0030] Figure 7 is an explanatory view showing the structure of the lower surface S6 of the spacer 90.

[0031] Figure 8 is an explanatory view showing the sectional structure of the spacer 90. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0032] A. Embodiment:

[0033] A-1. Structure of the heating device 100:

[0034] Figure 1 is a perspective view schematically showing the external structure of the heating device 100 of the present embodiment, Figure 2 is an explanatory view schematically showing the sectional structure of the heating device 100 of the present embodiment. In Figure 2 is shown the following Figures 3 to 8XZ cross-sectional structure of the heating device 100 at the position of II-II. In each figure, the mutually orthogonal XYZ axes for specifying directions are shown. In this specification, for convenience, the positive direction of the Z axis is referred to as the upward direction, and the negative direction of the Z axis is referred to as the downward direction. However, the heating device 100 can actually be arranged in a direction different from such an orientation.

[0035] The heating device 100 is a device for holding an object (e.g., a semiconductor wafer W) and heating it to a specified temperature (e.g., around 400 to 800 °C), and is also referred to as a susceptor. The heating device 100 is used, for example, as a part of a semiconductor manufacturing device such as a film forming device (CVD film forming device, sputtering film forming device, etc.) or an etching device (plasma etching device, etc.). The heating device 100 is an example of the holding device in the claims.

[0036] As Figure 1 and Figure 2 shown, the heating device 100 includes a plate-like member 10, a tubular member 20, and a connecting member 80.

[0037] The plate-like member 10 is a substantially disc-shaped member having a surface (hereinafter referred to as "holding surface S1") that is substantially orthogonal to a specified direction (the Z-axis direction in this embodiment) and a surface (hereinafter referred to as "back surface S2") located on the side opposite to the holding surface S1. The plate-like member 10 is formed of ceramics such as aluminum nitride (AlN) and aluminum oxide (Al 2 O 3 ). The diameter of the plate-like member 10 is, for example, on the order of 100 mm or more and 500 mm or less, and the thickness (length in the up-and-down direction) of the plate-like member 10 is, for example, on the order of 3 mm or more and 20 mm or less. The holding surface S1 of the plate-like member 10 corresponds to the first surface in the claims, the back surface S2 corresponds to the second surface in the claims, the Z-axis direction corresponds to the first direction in the claims, the upper side along the Z-axis direction corresponds to one side of the first direction in the claims, and the lower side along the Z-axis direction corresponds to the other side of the first direction in the claims.

[0038] The tubular member 20 is a substantially circular tubular member extending in the above-mentioned specified direction (Z-axis direction). The tubular member 20 is formed of a ceramic such as aluminum nitride or alumina, similarly to the plate-like member 10. In the present embodiment, the tubular member 20 has an upper flange portion 22 protruding in a direction orthogonal to the Z-axis direction (hereinafter referred to as the "plane direction") at the upper end (the side opposite to the plate-like member 10). Further, the tubular member 20 has a lower flange portion 23 protruding in the plane direction at the lower end (the side opposite to the connecting member 80). The upper flange portion 22 and the lower flange portion 23 are formed over the entire circumference of the tubular member 20. In addition, hereinafter, the portion of the tubular member 20 other than the upper flange portion 22 and the lower flange portion 23 will be referred to as the main body portion 21. The outer diameter of the main body portion 21 of the tubular member 20 is, for example, 30 mm or more and 90 mm or less, and the height (length in the vertical direction) of the tubular member 20 is, for example, 100 mm or more and 300 mm or less. The lower flange portion 23 corresponds to the flange portion in the claims.

[0039] The plate-like member 10 and the tubular member 20 are arranged such that the back surface S2 of the plate-like member 10 faces the upper surface S3 of the tubular member 20 in the vertical direction. The tubular member 20 is joined to the vicinity of the center of the back surface S2 of the plate-like member 10 by a joint portion 30 formed of a known joining material.

[0040] As Figure 2 shown, a heater electrode 50 as a heating resistor is disposed inside the plate-like member 10. The heater electrode 50 is formed of a material containing a metal such as tungsten or molybdenum, for example. In the present embodiment, the heater electrode 50 constitutes a linear pattern extending in a substantially concentric circle shape when viewed in the Z-axis direction. The both end portions of the linear pattern of the heater electrode 50 are disposed near the center portion of the plate-like member 10, and the upper end portions of the through-hole conductors 52 are connected to the respective end portions. Further, a pair of recesses 12 are formed in the back surface S2 of the plate-like member 10, and conductive power supply electrodes (electrode pads) 54 are provided at the positions of the respective recesses 12. In the present embodiment, the power supply electrode 54 is substantially circular when viewed in the Z-axis direction and is formed of a material containing tungsten (for example, a mixed material of tungsten and aluminum nitride). The lower end portion of the through-hole conductor 52 is connected to the power supply electrode 54. As a result, the heater electrode 50 and the power supply electrode 54 are electrically connected via the through-hole conductor 52.

[0041] In addition, a through hole 24 extending in the Z-axis direction is formed across the entire length of the tubular member 20. A plurality of terminal members 70 are accommodated in the through hole 24. The terminal member 70 is, for example, a columnar member that is substantially circular when viewed in the Z-axis direction, and is formed of a material containing nickel (Ni) (for example, pure nickel, a nickel-containing alloy (such as kovar alloy)). The upper end portion of the terminal member 70 is joined to the power supply electrode 54 by a metal brazing material 56 (such as a gold brazing material).

[0042] When a voltage is applied to the heater electrode 50 from a power supply (not shown) via each terminal member 70, each power supply electrode 54, each via conductor 52, etc., the heater electrode 50 generates heat and heats an object (such as a semiconductor wafer W) held on the holding surface S1 of the plate-like member 10 to a specified temperature (for example, about 400 to 800 °C).

[0043] The connecting member 80 is disposed below the tubular member 20 and is a member for mounting the tubular member 20 to another member (such as a vacuum chamber (not shown)). The connecting member 80 is, for example, substantially cylindrical and extends along the above-specified direction (Z-axis direction), and is formed of a metal material such as aluminum. The connecting member 80 and the tubular member 20 are arranged such that the upper surface S3 of the connecting member 80 faces the lower surface S4 of the tubular member 20 in the Z-axis direction, and are joined to each other by a plurality of threaded members 99 as described below. A through hole 84 communicating with the through hole 24 of the tubular member 20 is formed in the connecting member 80, and the above-described terminal member 70 is disposed in the space formed by the through hole 24 of the tubular member 20 and the through hole 84 of the connecting member 80. The upper surface S3 of the connecting member 80 corresponds to the third surface in the claims, and the lower surface S4 of the tubular member 20 corresponds to the fourth surface in the claims.

[0044] In addition, as described later Figures 3 to 6 As shown, a plurality of through holes 26 extending in the Z-axis direction are formed in the main body portion 21 of the tubular member 20, and a plurality of through holes 86 extending in the Z-axis direction and communicating with the through holes 26 of the tubular member 20 are formed in the connecting member 80. The space (space extending in the Z-axis direction) formed by the through holes 26 of the tubular member 20 and the through holes 86 of the connecting member 80 is used, for example, as a gas flow path for supplying an inert gas such as nitrogen or argon to form an air curtain (not shown) surrounding the holding surface S1 of the plate-like member 10, the semiconductor wafer W, etc., and as a space for accommodating a high-frequency body (not shown) connected to a high-frequency electrode (not shown) disposed on the plate-like member 10.

[0045] A - 2. Detailed structure near the joint portion between the tubular member 20 and the connecting member 80:

[0046] Next, the detailed structure near the joint portion between the tubular member 20 and the connection member 80 of the heating device 100 of the present embodiment will be described. Figure 3 It is an explanatory view showing the structure of the lower surface S4 of the tubular member 20. Figure 4 It is an explanatory view showing the sectional structure of the tubular member 20. Figure 5 It is an explanatory view showing the structure of the upper surface S3 of the connection member 80. Figure 6 It is an explanatory view showing the sectional structure of the connection member 80. Figure 7 It is an explanatory view showing the structure of the lower surface S6 of the spacer 90 described later. Figure 8 It is an explanatory view showing the sectional structure of the spacer 90. In Figure 4 the XY sectional structure of the tubular member 20 at the position of IV-IV shown in Figure 2 is shown, and in Figure 6 the XY sectional structure of the connection member 80 at the position of VI-VI shown in Figure 2 is shown, and in Figure 8 the XY sectional structure of the spacer 90 at the position of VIII-VIII shown in Figure 2 is shown.

[0047] As described above, the tubular member 20 has a lower flange portion 23 that protrudes in the surface direction at the lower end (see Figures 2 to 4 ). The lower flange portion 23 is formed over the entire circumference of the tubular member 20. In the present embodiment, eight through holes 25 are formed in the lower flange portion 23 and are arranged substantially evenly in the circumferential direction. Each through hole 25 formed in the lower flange portion 23 is a hole through which a threaded member 99 passes. Further, in the present embodiment, each through hole 25 formed in the lower flange portion 23 is not a closed hole but a hole (notch) that opens on the outer peripheral surface of the lower flange portion 23. That is, in the present specification, a through hole formed in a certain member and extending in a certain direction includes not only a hole that is closed without opening on the outer peripheral surface of the member around that direction but also a hole (notch) that opens on that outer peripheral surface. The through hole 25 corresponds to the first through hole in the claims, and the threaded member 99 corresponds to the fastening member in the claims.

[0048] In addition, as shown in Figure 5 and Figure 6 , eight threaded holes 85 that open on the upper surface S3 are formed in the connection member 80. Each threaded hole 85 is arranged substantially evenly in the circumferential direction. A plurality of threaded members 99 that penetrate through the through holes 25 of the lower flange portion 23 of the tubular member 20 are threadedly engaged with the threaded holes 85 of the connection member 80 (see Figure 2 ). Thereby, the tubular member 20 and the connection member 80 are joined to each other. The threaded hole 85 corresponds to the hole formed in the connection member 80 in the claims.

[0049] In addition, as shown in Figure 5 and Figure 6 , a substantially circular ring-shaped recess (groove) 88 surrounding the through-hole 84 is formed on the upper surface S3 of the connecting member 80, and an O-ring 89 is disposed in the recess 88 (see Figure 2 ). In addition, in Figure 5 and Figure 6 , in order to avoid complication of the drawings, the O-ring 89 is simply shown by a single-dot chain line. Due to the presence of the O-ring 89, the space formed by the through-hole 84 is sealed. In addition, in the present embodiment, the recess 88 is also continuously formed at the portion where each through-hole 86 is formed, and the O-ring 89 has a shape surrounding each through-hole 86. As a result, the space formed by each through-hole 86 is also sealed.

[0050] In addition, the heating device 100 of the present embodiment further includes two spacers 90 disposed above the upper flange portion 23 of the tubular member 20 (see Figure 2 ). As shown in Figure 7 and Figure 8 , each spacer 90 is a plate-shaped member that is substantially semicircular in shape when viewed in the Z-axis direction, and is formed of a metal material such as aluminum, for example. The two spacers 90 are arranged such that they form a substantially circular shape when viewed in the Z-axis direction when the two spacers 90 are combined together. Eight through-holes 95 are formed in the group of the two spacers 90 thus arranged, which are arranged substantially evenly along the circumferential direction (that is, each spacer 90 is formed with four through-holes 95). Each through-hole 95 communicates with each through-hole 25 formed in the lower flange portion 23 of the tubular member 20, and a threaded member 99 passes therethrough (see Figure 2 ). The two spacers 90 are in contact with the upper surface S5 of the lower flange portion 23 and also in contact with the base surface of the threaded member 99, and function as gaskets (washers). The through-hole 95 corresponds to the second through-hole in the claims.

[0051] (Relationship between the lower surface S4 of the tubular member 20 and the upper surface S3 of the connecting member 80)

[0052] In the heating device 100 of the present embodiment, irregularities are formed on the upper surface S3 of the connecting member 80. As a result, a part of the lower surface S4 of the tubular member 20 is in contact with the upper surface S3 of the connecting member 80, and the remaining part of the lower surface S4 of the tubular member 20 is not in contact with the upper surface S3 of the connecting member 80. Hereinafter, this will be described in detail.

[0053] As shown in Figure 3 and Figure 4As shown, the outer edge line Lx of the lower surface S4 of the tubular member 20 is composed of a portion overlapping with the smallest imaginary circle VC including the lower surface S4 (hereinafter referred to as "outer peripheral portion Lx1") and a portion other than the outer peripheral portion Lx1 (the portion constituting the inner peripheral surface of the through hole 25, hereinafter referred to as "inner side portion Lx2"). In the outer edge line Lx of the lower surface S4 of the tubular member 20, the outer peripheral portion Lx1 is the portion defining the outermost peripheral surface of the lower flange portion 23, and the inner side portion Lx2 is the portion defining the inner peripheral surface of the through hole 25. In addition, in Figure 5 and Figure 6 , in order to represent the positional relationship between the outer edge line Lx of the lower surface S4 of the tubular member 20 and the connecting member 80, the position of the outer edge line Lx when viewed in the Z-axis direction is represented by a dashed line. The outer peripheral portion Lx1 in the outer edge line Lx of the lower surface S4 of the tubular member 20 corresponds to a specific portion in the claims.

[0054] As Figure 5 and Figure 6 shown, in the heating device 100 of the present embodiment, the outer diameter of the upper surface S3 of the connecting member 80 is larger than the outer diameter of the lower surface S4 of the tubular member 20. Therefore, on the upper surface S3 of the connecting member 80, there is a portion overlapping with the outer edge line Lx (outer peripheral portion Lx1 and inner side portion Lx2) of the lower surface S4 of the tubular member 20 when viewed in the Z-axis direction.

[0055] In addition, as Figure 2 , Figure 5 and Figure 6 shown, a concave portion (a portion recessed downward) 87 is formed on the upper surface S3 of the connecting member 80. The concave portion 87 is composed of a band-shaped outer peripheral portion 87a having a substantially constant width along the entire outer periphery of the upper surface S3 of the connecting member 80 when viewed in the Z-axis direction and a substantially semi-circular inner side portion 87b extending inward from the outer peripheral portion 87a toward the position where each threaded hole 85 is formed. As Figure 5 and Figure 6As shown, when viewed in the Z-axis direction, the entire outer peripheral portion Lx1 of the outer edge line Lx of the lower surface S4 of the tubular member 20 overlaps with the outer peripheral portion 87a of the concave portion 87 formed in the upper surface S3 of the connecting member 80. Accordingly, the entire outer peripheral portion Lx1 is separated from the upper surface S3 of the connecting member 80 in the Z-axis direction and does not contact the upper surface S3. Further, when viewed in the Z-axis direction, a part of the inner side portion Lx2 of the outer edge line Lx of the lower surface S4 of the tubular member 20 overlaps with the outer peripheral portion 87a of the concave portion 87, and the remaining part does not overlap with the outer peripheral portion 87a of the concave portion 87. However, the remaining part overlaps with the inner side portion 87b of the concave portion 87. Accordingly, the entire inner side portion Lx2 is also separated from the upper surface S3 of the connecting member 80 in the Z-axis direction and does not contact the upper surface S3. As described above, in the heating device 100 of the present embodiment, the entire outer edge line Lx of the lower surface S4 of the tubular member 20 is separated from the upper surface S3 of the connecting member 80 in the Z-axis direction and does not contact the upper surface S3.

[0056] (Relationship between the upper surface S5 of the lower flange portion 23 of the tubular member 20 and the lower surface S6 of the spacer 90)

[0057] In the heating device 100 of the present embodiment, irregularities are formed on the lower surface S6 of each spacer 90. As a result, a part of the upper surface S5 of the lower flange portion 23 of the tubular member 20 contacts the lower surface S6 of each spacer 90, and the remaining part of the upper surface S5 of the lower flange portion 23 of the tubular member 20 does not contact the lower surface S6 of each spacer 90. Hereinafter, this will be described in detail. In addition, the upper surface S5 of the lower flange portion 23 of the tubular member 20 corresponds to the fifth surface in the claims, and the lower surface S6 of the spacer 90 corresponds to the sixth surface in the claims.

[0058] As Figure 2 shown, the side surface of the lower flange portion 23 of the tubular member 20 is parallel to the Z-axis direction. Accordingly, as Figure 3 and Figure 4As shown, the outer edge line Ly of the upper surface S5 of the lower flange portion 23 of the tubular member 20 coincides with the outer edge line Lx of the lower surface S4 of the tubular member 20 when observed in the Z-axis direction. That is, the outer edge line Ly of the upper surface S5 of the lower flange portion 23 of the tubular member 20 is composed of a portion (hereinafter referred to as "outer peripheral portion Ly1") that overlaps with the smallest imaginary circle VC including the upper surface S5 and a portion other than the outer peripheral portion Ly1 (the portion constituting the inner peripheral surface of the through hole 25, hereinafter referred to as "inner side portion Ly2"). In the outer edge line Ly of the upper surface S5 of the lower flange portion 23 of the tubular member 20, the outer peripheral portion Ly1 is the portion defining the outermost peripheral surface of the lower flange portion 23, and the inner side portion Ly2 is the portion defining the inner peripheral surface of the through hole 25. In addition, in Figure 7 and Figure 8 , in order to represent the positional relationship between the outer edge line Ly of the upper surface S5 of the lower flange portion 23 of the tubular member 20 and the spacer 90, the position of the outer edge line Ly when observed in the Z-axis direction is represented by a dashed line.

[0059] As Figure 7 and Figure 8 shown, in the heating device 100 of the present embodiment, the outer diameter of the region formed by the lower surfaces S6 of the two spacers 90 is larger than the outer diameter of the upper surface S5 of the lower flange portion 23 of the tubular member 20. Therefore, the lower surface S6 of each spacer 90 has a portion that overlaps with the outer edge line Ly (outer peripheral portion Ly1 and inner side portion Ly2) of the upper surface S5 of the lower flange portion 23 of the tubular member 20 when observed in the Z-axis direction.

[0060] In addition, as Figure 2 , Figure 7 and Figure 8 shown, a concave portion (a portion recessed upward) 97 is formed on the lower surface S6 of each spacer 90. The concave portion 97 is composed of a strip-shaped outer peripheral portion 97a having a substantially constant width along the entire outer periphery of the lower surface S6 of each spacer 90 when observed in the Z-axis direction and a substantially rectangular inner side portion 97b that extends inward from the outer peripheral portion 97a toward the position where each through hole 95 is formed. As Figure 7 and Figure 8As shown, when viewed in the Z-axis direction, the entire outer peripheral portion Ly1 of the outer edge line Ly of the upper surface S5 of the lower flange portion 23 of the tubular member 20 overlaps with the outer peripheral portion 97a of the concave portion 97 formed in the lower surface S6 of each spacer 90. Therefore, the entire outer peripheral portion Ly1 is separated from the lower surface S6 of the spacer 90 in the Z-axis direction and does not contact the lower surface S6. Further, when viewed in the Z-axis direction, a part of the inner side portion Ly2 of the outer edge line Ly of the upper surface S5 of the lower flange portion 23 of the tubular member 20 overlaps with the outer peripheral portion 97a of the concave portion 97, and the remaining part does not overlap with the outer peripheral portion 97a of the concave portion 97. However, the remaining part overlaps with the inner side portion 97b of the concave portion 97. Therefore, the entire inner side portion Ly2 is also separated from the lower surface S6 of the spacer 90 in the Z-axis direction and does not contact the lower surface S6. As described above, in the heating device 100 of the present embodiment, the entire outer edge line Ly of the upper surface S5 of the lower flange portion 23 of the tubular member 20 is separated from the lower surface S6 of the spacer 90 in the Z-axis direction and does not contact the lower surface S6.

[0061] A-3. Effects of the present embodiment:

[0062] As described above, the heating device 100 of the present embodiment includes: a plate-like member 10 having a holding surface S1 substantially orthogonal to the Z-axis direction and a back surface S2 on the side opposite to the holding surface S1; and a tubular member 20 extending in the Z-axis direction and formed of ceramics. The heating device 100 is a holding device for holding an object on the holding surface S1 of the plate-like member 10. The tubular member 20 is joined to the back surface S2 of the plate-like member 10 at the upper end portion, and has a lower flange portion 23 protruding in the surface direction at the lower end portion. A through hole 25 extending in the Z-axis direction is formed in the lower flange portion 23. Further, the heating device 100 of the present embodiment further includes a connecting member 80 disposed below the tubular member 20. A threaded hole 85 is formed in the connecting member 80 so as to open on the upper surface S3 of the connecting member 80. A threaded member 99 penetrating through the through hole 25 of the lower flange portion 23 of the tubular member 20 is threadedly engaged with the threaded hole 85. Further, in the heating device 100 of the present embodiment, a part of the lower surface S4 of the tubular member 20 contacts the upper surface S3 of the connecting member 80, and the outer peripheral portion Lx1, which is a portion of the outer edge line Lx of the lower surface S4 of the tubular member 20 and overlaps with the smallest imaginary circle VC including the lower surface S4, does not contact the upper surface S3 of the connecting member 80.

[0063] A part of the outer edge line Lx of the lower surface S4 (the end face on the side opposite to the connecting member 80) of the tubular member 20 described above is a part where, when the tubular member 20 and the connecting member 80 are fastened with a threaded member 99, in the case where a slight inclination occurs between the tubular member 20 and the connecting member 80, a defect of the tubular member 20 is likely to occur due to the contact between the tubular member 20 and the connecting member 80. In particular, the outer peripheral portion Lx1 (i.e., the outermost peripheral side portion of the outer edge line Lx) of the outer edge line Lx of the lower surface S4 of the tubular member 20, which is the portion overlapping with the smallest imaginary circle VC including the lower surface S4, is the portion most likely to generate the above-mentioned defect. As described above, in the heating device 100 of the present embodiment, the outer peripheral portion Lx1 of the outer edge line Lx of the lower surface S4 of the tubular member 20 does not contact the upper surface S3 of the connecting member 80. Therefore, according to the heating device 100 of the present embodiment, even when a slight inclination occurs between the above two members, it is possible to suppress the contact between the outer peripheral portion Lx1 of the outer edge line Lx of the lower surface S4 of the tubular member 20 and the connecting member 80, and as a result, it is possible to suppress the generation of defects of the tubular member 20.

[0064] In addition, in the heating device 100 of the present embodiment, the entire outer edge line Lx of the lower surface S4 of the tubular member 20 does not contact the upper surface S3 of the connecting member 80. Therefore, according to the heating device 100 of the present embodiment, it is possible to more reliably suppress the generation of defects of the tubular member 20.

[0065] In addition, in the heating device 100 of the present embodiment, the upper surface S3 of the connecting member 80 has a portion overlapping with the outer peripheral portion Lx1 of the outer edge line Lx of the lower surface S4 of the tubular member 20 when viewed in the Z-axis direction, and in the Z-axis direction, the upper surface S3 of the connecting member 80 is separated from the outer peripheral portion Lx1 of the outer edge line Lx of the lower surface S4 of the tubular member 20. Therefore, according to the heating device 100 of the present embodiment, regardless of the size relationship of the outer diameters between the lower flange portion 23 of the tubular member 20 and the connecting member 80, etc., it is possible to suppress the generation of defects of the tubular member 20.

[0066] In addition, the heating device 100 of the present embodiment further includes a spacer 90 disposed above the lower flange portion 23 of the tubular member 20. A through hole 95 is formed in the spacer 90. The through hole 95 of the spacer 90 communicates with the through hole 25 of the lower flange portion 23 of the tubular member 20 and is a hole through which a threaded member 99 passes. Further, in the heating device 100 of the present embodiment, a part of the upper surface S5 of the lower flange portion 23 of the tubular member 20 contacts the lower surface S6 of the spacer 90, and the entire outer edge line Ly of the upper surface S5 of the lower flange portion 23 does not contact the lower surface S6 of the spacer 90. In a form where the spacer 90 is used to fasten the tubular member 20 and the connecting member 80, a part of the outer edge line Ly of the upper surface S5 (the end surface on the side opposite to the spacer 90) of the lower flange portion 23 of the tubular member 20 is a portion where the tubular member 20 is likely to be damaged due to contact between the tubular member 20 and the spacer 90 when a slight inclination occurs between the spacer 90 and the tubular member 20. As described above, in the heating device 100 of the present embodiment, the entire outer edge line Ly of the upper surface S5 of the lower flange portion 23 of the tubular member 20 does not contact the lower surface S6 of the spacer 90. Therefore, according to the heating device 100 of the present embodiment, even when a slight inclination occurs between the above two members, it is possible to suppress contact between the outer edge line Ly portion of the upper surface S5 of the lower flange portion 23 of the tubular member 20 and the spacer 90, and as a result, it is possible to suppress the occurrence of damage to the tubular member 20.

[0067] In addition, in the heating device 100 of the present embodiment, a plurality of through holes 25 are formed in the lower flange portion 23 of the tubular member 20, and a plurality of threaded holes 85 for threadedly engaging a plurality of threaded members 99 passing through the plurality of through holes 25 of the lower flange portion 23 of the tubular member 20 are formed in the connecting member 80. Therefore, in the heating device 100 of the present embodiment, when the tubular member 20 and the connecting member 80 are fastened by a plurality of threaded members 99, it is easy to generate a slight inclination between the tubular member 20 and the connecting member 80 due to the deviation of the fastening force of each threaded member 99, and the above-described damage is likely to occur. However, in the heating device 100 of the present embodiment, as described above, since the outer peripheral portion Lx1 of the outer edge line Lx of the lower surface S4 of the tubular member 20 does not contact the upper surface S3 of the connecting member 80, even when a slight inclination occurs between the above two members, it is possible to suppress contact between the outer peripheral portion Lx1 of the outer edge line Lx of the lower surface S4 of the tubular member 20 and the connecting member 80, and as a result, it is possible to suppress the occurrence of damage to the tubular member 20.

[0068] In addition, the heating device 100 of the present embodiment further includes a threaded member 99. Therefore, in the heating device 100 having the threaded member 99 for fastening the tubular member 20 and the connecting member 80 according to the present embodiment, it is possible to suppress the contact between the outer peripheral portion Lx1 of the outer edge line Lx of the lower surface S4 of the tubular member 20 and the connecting member 80. As a result, it is possible to suppress the occurrence of defects in the tubular member 20.

[0069] In addition, the heating device 100 of the present embodiment further includes a heater electrode 50, and the heater electrode 50 is an internal electrode disposed inside the plate-like member 10. Therefore, in the heating device 100 having the internal electrode disposed inside the plate-like member 10 according to the present embodiment, it is possible to suppress the contact between the outer peripheral portion Lx1 of the outer edge line Lx of the lower surface S4 of the tubular member 20 and the connecting member 80. As a result, it is possible to suppress the occurrence of defects in the tubular member 20.

[0070] B. Modification example:

[0071] The technology disclosed in this specification is not limited to the above-described embodiments, and can be modified in various forms without departing from the gist thereof. For example, the following modifications can also be made.

[0072] The structure of the heating device 100 in the above-described embodiment is merely an example, and various modifications can be made. For example, in the above-described embodiment, the entire outer edge line Lx of the lower surface S4 of the tubular member 20 does not contact the upper surface S3 of the connecting member 80, but it can also be set such that in the outer edge line Lx, the outer peripheral portion Lx1 does not contact the upper surface S3 of the connecting member 80, while the inner portion Lx2 (at least a part thereof) contacts the upper surface S3 of the connecting member 80.

[0073] In addition, in the above-described embodiment, the structure in which the outer peripheral portion Lx1 of the outer edge line Lx of the lower surface S4 of the tubular member 20 does not contact the upper surface S3 of the connecting member 80 is realized by forming the concave portion 87 on the upper surface S3 of the connecting member 80, but this structure can also be realized by making the outer diameter of the upper surface S3 of the connecting member 80 smaller than the outer diameter of the lower surface S4 of the tubular member 20.

[0074] In addition, in the above-described embodiment, the entire outer edge line Ly of the upper surface S5 of the lower flange portion 23 of the tubular member 20 does not contact the lower surface S6 of the spacer 90. However, it may be configured such that in the outer edge line Ly, the outer peripheral portion Ly1 does not contact the lower surface S6 of the spacer 90, while the inner portion Ly2 (at least a part thereof) contacts the lower surface S6 of the spacer 90. Additionally, it may be configured such that the entire outer edge line Ly of the upper surface S5 of the lower flange portion 23 of the tubular member 20 contacts the lower surface S6 of the spacer 90. Further, it may be configured such that the heating device 100 does not include the spacer 90.

[0075] In addition, in the above-described embodiment, a plurality of through holes 25 are formed in the lower flange portion 23 of the tubular member 20, and a plurality of threaded holes 85 for screwing a plurality of threaded members 99 passing through the plurality of through holes 25 in the lower flange portion 23 of the tubular member 20 are formed in the connecting member 80. However, it may be configured such that one through hole 25 is formed in the lower flange portion 23 of the tubular member 20, and one threaded hole 85 for screwing one threaded member 99 passing through the one through hole 25 in the lower flange portion 23 of the tubular member 20 is formed in the connecting member 80.

[0076] In addition, in the above-described embodiment, the heating device 100 includes the heater electrode 50 as an internal electrode disposed inside the plate-like member 10. However, the heating device 100 may also include other electrodes (for example, RF electrodes) as internal electrodes disposed inside the plate-like member 10.

[0077] In addition, the materials forming the respective components constituting the heating device 100 in the above-described embodiment are merely examples, and each component may also be formed of other materials. For example, in the above-described embodiment, the plate-like member 10 is made of ceramic, but the plate-like member 10 may also be made of a material other than ceramic (for example, metal such as aluminum or aluminum alloy). Additionally, in the above-described embodiment, the connecting member 80 and the spacer 90 are made of metal, but the connecting member 80 and the spacer 90 may also be made of a material other than metal.

[0078] In addition, in the heating device 100 of the above-described embodiment, the through hole 26 of the tubular member 20 and the through hole 86 of the connecting member 80 are formed to form a space that is used as a gas flow path for supplying purge gas and a space for accommodating a high-frequency body. However, these holes may not be provided, or holes for forming other spaces may be further formed.

[0079] In addition, the technology disclosed in this specification is not limited to the heating device, and similarly, it can also be applied to other holding devices that include a plate-like member, a ceramic tubular member, a connecting member, and hold an object on the surface of the plate-like member.

[0080] Description of Reference Numerals

[0081] 10. Plate-like member; 12. Recess; 20. Tubular member; 21. Main body portion; 22. Upper flange portion; 23. Lower flange portion; 24. Through hole; 25. Through hole; 26. Through hole; 30. Joint portion; 50. Heater electrode; 52. Through-hole conductor; 54. Power supply electrode; 56. Metal brazing material; 70. Terminal member; 80. Connection member; 84. Through hole; 85. Threaded hole; 86. Through hole; 87. Recess; 87a. Outer peripheral portion; 87b. Inner portion; 88. Recess; 89. O-ring; 90. Spacer; 95. Through hole; 97. Recess; 97a. Outer peripheral portion; 97b. Inner portion; 99. Threaded member; 100. Heating device; Lx1. Outer peripheral portion; Lx2. Inner portion; Lx. Outer edge line; Ly1. Outer peripheral portion; Ly2. Inner portion; Ly. Outer edge line; S1. Holding surface; S2. Back surface; S3. Upper surface; S4. Lower surface; S5. Upper surface; S6. Lower surface; VC. Imaginary circle; W. Semiconductor wafer.

Claims

1. A holding device, characterized in that, the holding device comprises: a plate-like member having a first surface orthogonal to a first direction and a second surface located on the side opposite to the first surface; and a tubular member extending along the first direction and formed of ceramics. One end of the tubular member in the first direction is joined to the second surface of the plate-like member, and the other end of the tubular member in the first direction has a flange portion that protrudes in a direction orthogonal to the first direction and is formed with a first through hole extending along the first direction, the holding device holds an object on the first surface of the plate-like member, the holding device further comprises a connecting member disposed on the other side of the tubular member in the first direction. The connecting member is formed with a hole for threadedly engaging a fastening member passing through the first through hole of the flange portion so as to open on a third surface that is an end surface on the one side in the first direction, a part of a fourth surface that is an end surface on the other side of the tubular member in the first direction contacts the third surface of the connecting member, and a specific portion of the outer edge line of the fourth surface of the tubular member that overlaps with a part of the smallest imaginary circle including the fourth surface does not contact the third surface of the connecting member, on the third surface of the connecting member, there is a portion that overlaps with the specific portion of the outer edge line of the fourth surface of the tubular member when observed in the first direction, in the first direction, the third surface of the connecting member is separated from the specific portion of the outer edge line of the fourth surface of the tubular member.

2. The holding device according to claim 1, characterized in that, the entire outer edge line of the fourth surface of the tubular member does not contact the third surface of the connecting member.

3. The holding device according to claim 1 or 2, characterized in that, the holding device further comprises a spacer disposed on the one side of the flange portion in the first direction. The spacer is formed with a second through hole that communicates with the first through hole of the flange portion and through which the fastening member passes, a part of a fifth surface that is an end surface on the one side of the flange portion in the first direction contacts a sixth surface that is an end surface on the other side of the spacer in the first direction, and the entire outer edge line of the fifth surface of the flange portion does not contact the sixth surface of the spacer.

4. The holding device according to claim 1 or 2, characterized in that, a plurality of the first through holes are formed in the flange portion of the tubular member, and a plurality of holes for threadedly engaging a plurality of the fastening members passing through the plurality of the first through holes of the flange portion are formed in the connecting member.

5. The holding device according to claim 1 or 2, characterized in that, the holding device further comprises the fastening member.

6. The holding device according to claim 1 or 2, characterized in that, The holding device further includes an internal electrode disposed inside the plate-like member.

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