Floating structure, interface device, circuit board unit, semiconductor testing method and equipment

Abstract

The present invention relates to a floating structure, interface device, circuit board unit, semiconductor testing method and equipment for semiconductor testing. The floating structure includes: a frame, a floating plate, and a limiting member. The floating plate includes an output terminal located at a side edge. The floating plate is elastically mounted on the frame and can at least elastically tilt relative to the frame to at least adjust the orientation of the output terminal. The output terminal is configured for mounting a connector. The limiting member is mounted on the frame. A limiting structure is provided on the limiting member. The limiting structure is configured to at least form an inclination angle range that limits the inclination angle of the floating plate. The floating plate and the limiting structure are movably limited and assembled to elastically tilt within the inclination angle range. The floating plate can move in multiple directions relative to the frame. After satisfying rough positioning, the connector can play a flexible automatic deviation correction effect when docking with the interface terminal of an external device, flexibly matching during the alignment connection process and automatically and accurately aligning.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a floating structure, an interface device, a circuit board unit, a semiconductor testing method and equipment for semiconductor testing. Background Art

[0002] A semiconductor tester usually has multiple groups of circuit board units and an external device with an interface end. For example, an interface test board is used as the external device. The external device is installed on the semiconductor tester and aligned with the multiple groups of relatively independent circuit board units in the semiconductor tester. When the electrical signals are transmitted between the multiple groups of circuit board units and the external device through connectors, the test of the device under test on the external device can be achieved.

[0003] Conventional technology often aligns external devices and multiple circuit board units through mechanical hard connections, placing high demands on structural component manufacturing tolerances, guidance accuracy within semiconductor testers, and assembly. As the number of circuit board units increases and the signal density of connectors increases, alignment deviations can easily occur, leading to unreliable connections and failing to meet current development needs. Summary of the Invention

[0004] Based on this, it is necessary to provide a floating structure, an interface device, a circuit board unit, a semiconductor testing method and equipment for semiconductor testing to address the problem of alignment deviation between external equipment and circuit board units.

[0005] The present invention provides a floating structure for semiconductor testing, the floating structure comprising:

[0006] frame;

[0007] a floating plate, the floating plate including an output end located at a side edge, the floating plate being elastically mounted on the frame and at least elastically tiltable relative to the frame to adjust at least the orientation of the output end, the output end being configured for mounting a connector;

[0008] A limiting member is assembled on the frame, and a limiting structure is provided on the limiting member. The limiting structure is configured to at least form an inclination angle range that limits the inclination angle of the floating plate. The floating plate and the limiting structure are movably limited and assembled to elastically tilt within the inclination angle range.

[0009] In one embodiment, the floating plate is configured to be able to elastically move relative to the frame to adjust the orientation of the output end and the position relative to the frame. The limiting structure is configured to form an inclination angle range that limits the inclination angle of the floating plate and a displacement range of the movable position of the output end. The floating plate and the limiting structure are movably limitedly assembled to elastically move within the inclination angle range and the displacement range.

[0010] In one embodiment, the floating structure further comprises:

[0011] At least one elastic member, the floating plate is elastically assembled on the frame through the elastic member.

[0012] In one embodiment, the frame includes at least a pair of wall panels, and the floating plate is elastically assembled between the pair of wall panels.

[0013] In one embodiment, the two side walls of the floating plate have a plurality of symmetrical mounting positions, each of the mounting positions is equipped with the elastic member, and the floating plate is elastically assembled with a pair of the wall panels via the elastic members on the two side walls.

[0014] In one embodiment, the number of the mounting positions is eight, and the mounting positions are symmetrically arranged on two side walls of the floating plate to form four pairs, and a line connecting the four mounting positions on the same side wall of the floating plate is a rectangle.

[0015] In one embodiment, the limiting member is assembled between a pair of the wall panels, and the limiting member is located between a plurality of the elastic members.

[0016] In one embodiment, the floating structure further comprises:

[0017] At least one adjusting member is assembled on the floating plate and / or the wall plate, and the adjusting member is configured to adjust the inclination angle of the floating plate through the elastic member.

[0018] In one embodiment, the limiting member is a column member, the limiting structure is a limiting groove provided on the column member, a limiting hole is provided on the floating plate, and the limiting hole is plugged into and fitted with the column member and limitedly assembled in the limiting groove.

[0019] In one embodiment, the limiting groove is an annular groove surrounding the column member, and the width of the annular groove is greater than the depth of the limiting hole;

[0020] The limiting hole has a first movable gap with the annular groove in a direction parallel to the output end, and the limiting hole has a second movable gap with the annular groove in a direction perpendicular to the output end, and the first movable gap is less than or equal to the second movable gap.

[0021] The present invention also provides an interface device, comprising:

[0022] said floating structure;

[0023] A connector is provided at an output end of the floating board, and the connector is configured to be used for connecting an external device having an interface end.

[0024] The present invention also provides a circuit board unit, comprising:

[0025] The interface device,

[0026] Wherein, the floating plate is a circuit board,

[0027] Alternatively, the floating plate is configured to mount a circuit board or to indirectly mount the circuit board via a circuit board fixture.

[0028] Alternatively, the frame is configured to be used for directly mounting a circuit board or indirectly mounting a circuit board via a circuit board fixing bracket;

[0029] The head end of the connector is configured to be connected to an external device having an interface end, and the tail end of the connector is configured to be electrically connected to the circuit board.

[0030] The present invention also provides a semiconductor testing method, according to the circuit board unit, the steps are as follows:

[0031] At least one circuit board is mounted in the circuit board fixing frame, each of the circuit boards is electrically connected to at least one of the interface devices,

[0032] Alternatively, a circuit board is mounted on the frame, wherein the circuit board is electrically connected to at least one of the interface devices.

[0033] Alternatively, a circuit board is mounted on the floating board, the circuit board being electrically connected to at least one of the interface devices,

[0034] Alternatively, a plurality of interface devices are prepared, wherein the floating board is a circuit board, and the circuit board is electrically connected to the connector;

[0035] The plurality of interface devices are electrically connected to the plurality of interface terminals of the external device at the same time.

[0036] The present invention also provides a semiconductor testing device, which includes the circuit board unit.

[0037] The above-mentioned floating structure and interface device can provide automatic correction function under the premise of meeting rough positioning. When the connector is installed on the output end of the floating board, since the floating board can move in multiple directions relative to the frame, after meeting the rough positioning, the connector can play a flexible automatic correction effect when docking with the interface end of the external device, realizing flexible matching and automatic and precise alignment during the alignment connection process, which is more convenient and reliable, and can reduce the processing accuracy of structural parts and the assembly requirements of the test machine. It has the characteristics of self-centering, allowing the circuit board unit to be blindly inserted, and meeting the effective connection between the circuit board unit and the external device. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 A schematic diagram of an interface device provided by one embodiment of the present invention in an ideal state before docking;

[0039] Figure 2 A schematic diagram of an interface device provided by one embodiment of the present invention in an inclined state before docking;

[0040] Figure 3 A schematic diagram of an X-axis offset state of an interface device provided by one embodiment of the present invention;

[0041] Figure 4 A schematic diagram of an interface device provided by one embodiment of the present invention in an X-axis direction offset state after docking;

[0042] Figure 5 A bottom view of an interface device provided in accordance with an embodiment of the present invention;

[0043] Figure 6 A schematic diagram of a limiting structure of an interface device in an inclined state according to another embodiment of the present invention;

[0044] Figure 7 A perspective view of an interface device provided in accordance with an embodiment of the present invention;

[0045] Figure 8 A plan view of an interface device provided for one embodiment of the present invention;

[0046] Figure 9 A schematic diagram of the internal structure of an interface device provided in one embodiment of the present invention.

[0047] Figure Number:

[0048] 001, floating structure; 002, connector; 003, conductive component; 004, positioning member; 005, external equipment;

[0049] 100, frame; 200, floating plate; 300, limiter; 400, elastic member; 500, adjustment member;

[0050] 110, siding;

[0051] 210, output end; 220, mounting position; 230, column head; 240, limiting hole; 250, first movable gap; 260, second movable gap;

[0052] 310. Limiting structure; 311. Limiting groove. DETAILED DESCRIPTION

[0053] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0054] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0055] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0056] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0057] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0058] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0059] See Figures 1 to 5 As shown, an embodiment of the present invention provides a floating structure 001 for semiconductor testing, wherein the floating structure 001 includes: a frame 100, a floating plate 200, and a limiting member 300. The floating plate 200 includes an output end 210 located at a side edge. The floating plate 200 is elastically assembled on the frame 100 and can at least be elastically tilted relative to the frame 100 to at least adjust the orientation of the output end 210. The output end 210 is configured to be used for installing a connector 002. The limiting member 300 is assembled on the frame 100. A limiting structure 310 is provided on the limiting member 300. The limiting structure 310 is configured to at least form an inclination angle range that limits the inclination angle of the floating plate 200. The floating plate 200 and the limiting structure 310 are movably limitedly assembled to elastically tilt within the inclination angle range.

[0060] The floating structure 001 can be arranged between the external device and the circuit board unit of ATE (Automatic Test Equipment, meaning integrated circuit automatic test machine) for accurate alignment of the two. The external device has an interface end, for example, it can include an interface test board and other similar test board devices. In addition, the floating structure 001 can also be used in scenarios where the circuit board unit is aligned with other devices, or in the alignment of two devices that require floating connections. The connector 002 arranged on the floating structure 001 can be engaged or electrically connected with the external device 005 having an interface end, for example, the connector 002 has a male terminal and the interface end of the external device 005 has a female terminal, or the connector 002 has a female terminal and the interface end of the external device 005 has a male terminal.

[0061] The floating plate 200 of the floating structure 001 can be a conventional plate or a circuit board. When the floating plate 200 is a conventional plate, it can be directly connected to the circuit board, allowing the connector 002 to form a stable electrical connection with the circuit board. When the floating plate 200 is a conventional plate, it can also be connected to a circuit board holder, allowing the connector 002 to form a stable electrical connection with the circuit board on the holder. When the floating plate 200 is a circuit board, the connector 002 can directly form an electrical connection with the circuit board, making electrical connection easier. Electrical signals are transmitted from the circuit board to the connector 002, and finally, after the connector 002 is aligned with the interface of the external device 005, they are transmitted to the external device 005, completing the test of the external device 005.

[0062] It should be noted that, for the connection of circuit boards, in addition to using a floating board directly as a circuit board, a floating board directly connected to a circuit board, and a floating board indirectly connected to a circuit board through a circuit board fixing frame, the connection can also be achieved through a frame and a circuit board. In some embodiments, the frame 100 can be configured to be used for directly installing a circuit board or indirectly installing a circuit board through other additional structures. For example, a connecting circuit board fixing frame can be set on the frame 100, and the circuit board fixing frame can be used as an additional structure for installing circuit boards in semiconductor testing equipment, wherein the number of installed circuit boards is not limited to one or more.

[0063] The floating plate 200 is elastically assembled on the frame 100 and can at least be elastically tilted relative to the frame 100. Therefore, the floating plate 200 is elastically assembled on the frame 100, and can not only be elastically tilted relative to the frame 100, but also the elastic assembly can be adjusted according to needs to be able to perform various movements such as elastic displacement and elastic rotation relative to the frame 100, so that not only the direction of the output end 210 can be adjusted, but also the spatial movement position, steering and other elastic movements of the output end 210 can be adjusted when needed. There are many ways to elastically assemble the floating plate 200 on the frame 100. After being elastically assembled on the frame 100, the floating plate 200 can also perform various movements relative to the frame 100, so that the output end 210 can perform multi-directional movement relative to the frame 100, not limited to one movement or one direction of movement.

[0064] When the connector 002 is installed on the output end 210 of the floating plate 200, since the floating plate 200 can move in multiple directions relative to the frame 100, after meeting the rough positioning, the connector 002 can play a flexible automatic correction effect when docking with the interface end of the external device 005, and realize flexible matching and automatic precise alignment during the alignment connection process, which is more convenient and reliable, and can reduce the processing accuracy of structural parts and the assembly requirements of the test machine. It has the characteristics of self-centering, allowing the circuit board unit to be blindly inserted, and meeting the effective connection between the circuit board unit and the external device.

[0065] After the floating plate 200 is assembled with the limiting structure 310, the limiting structure 310 can restrict the actual movement of the floating plate 200 relative to the frame 100, allowing the floating plate 200 to move within a controllable range, thereby ensuring interfacing with the interface of the external device 005 while maintaining stability. The limiting structure 310's restriction of the floating plate 200's movement can at least include limiting the tilt angle of the floating plate 200 during elastic tilting. Furthermore, when the floating plate 200 has multiple other possible motions, the limiting structure 310 is not limited to controlling the movement of the floating plate 200.

[0066] In one embodiment, the floating plate 200 is configured to be able to elastically move relative to the frame 100 to adjust the orientation of the output end 210 and the position relative to the frame 100. The limiting structure 310 is configured to form an inclination angle range that limits the inclination angle of the floating plate 200 and a displacement range of the movable position of the output end 210. The floating plate 200 and the limiting structure 310 are movably limited and assembled to elastically move within the inclination angle range and the displacement range.

[0067] The position of the output end 210 relative to the frame 100 can be determined by taking the frame 100 as a reference for the relative position of the output end 210. For example, when determining the relative position of the output end 210, a certain position of the frame 100 can be selected as a reference, and a certain position on the output end 210 can be used as an active point. By determining the relative position of the active point relative to the reference, the relative position of the output end 210 relative to the frame 100 can be determined relatively. When selecting a certain position on the frame 100 and the output end 210, the center position of the frame 100 or any other position can be selected. As long as the relative position of the output end 210 can be determined with the frame 100 as a reference, no limitation is made here.

[0068] In this embodiment, the elastic activity of the floating plate 200 relative to the frame 100 is determined to be not only capable of adjusting the orientation of the output end 210, but also capable of adjusting the position relative to the frame 100. Therefore, when both the position and orientation of the output end 210 can be adjusted, the output end 210 can achieve multi-angle and multi-directional movement relative to the frame 100 in three-dimensional space, further improving the flexibility of the movement of the output end 210, and achieving a flexible correction effect during the docking process after satisfying the rough positioning.

[0069] The elastic assembly of the floating plate 200 and the frame 100 is not limited to a single elastic component or a combination of multiple components that achieve an elastic effect. For example, the floating structure 001 includes at least one elastic component 400, through which the floating plate 200 is elastically assembled to the frame 100. When there is only one elastic component 400, the floating plate 200 and the frame 100 can be elastically assembled at one side wall of the floating plate 200. When there are two or more elastic components 400, the floating plate 200 and the frame 100 can be elastically assembled at one or both side walls of the floating plate 200. The elastic component 400 can be a spring, a steel wire rope, or other elastically deformable structure. Alternatively, the floating plate 200 can also be elastically assembled to the frame 100 by integrating a portion of elastic material into the floating plate 200, rather than using a separate elastic component 400. These configurations can be tailored to the needs of those skilled in the art and are not limited here.

[0070] The structure of the frame 100 can be in various structural forms. For example, the frame 100 can be composed of multiple plate-like parts, or the frame 100 can be a shell-like structure, etc. In one embodiment, the frame 100 includes at least a pair of wall panels 110, but in addition to this pair of wall panels 110, it is not limited to the pair of wall panels 110 to form a stable assembly connection through other components. The floating plate 200 is elastically assembled between the pair of wall panels 110. At this time, the floating plate 200 can remain roughly parallel to the pair of wall panels 110, or at least remain roughly parallel to the pair of wall panels 110 in an elastically stable state. Because the output end 210 is formed on the side edge of the floating plate 200, the direction of the output end 210 is mainly determined by the inclination angle of the floating plate 200. The inclination angle can be in multiple directions, including inclination around the x-axis, around the y-axis and around the z-axis, and the two side walls of the floating plate 200 face the pair of wall panels 110 for elastic assembly with the pair of wall panels 110.

[0071] For the elastic assembly between the floating plate 200 and the pair of wall panels 110, the two sidewalls of the floating plate 200 may have a plurality of symmetrical mounting locations 220, each of which is equipped with an elastic member 400. Thus, the floating plate 200 can be elastically assembled with the pair of wall panels 110 via the elastic members 400 on the two sidewalls. The number of mounting locations 220 is not limited, but the number of mounting locations 220 on the floating plate 200 should be consistent with the number of elastic members 400 on the pair of wall panels 110. For example, if the pair of wall panels 110 have connection locations for connecting the elastic members 400, the number of mounting locations 220 and the number of connection locations should be consistent.

[0072] The number of mounting positions 220 can be six, eight, ten, twelve, fourteen, or the like. For example, eight mounting positions 220 are symmetrically arranged on two sidewalls of the floating plate 200 to form four pairs, with the line connecting the four mounting positions 220 on the same sidewall of the floating plate 200 forming a rectangle. Therefore, the four pairs of eight mounting positions 220 can provide elastic balance control for the floating plate 200 at four locations on the floating plate 200. After the floating plate 200 is elastically assembled on the frame 100, the tilt angle of the floating plate 200 can be balanced and adjusted through the four pairs of mounting positions 220.

[0073] The limiting member 300 is assembled between a pair of the wall panels 110 and is located between the plurality of elastic members 400. The limiting member 300 can be integrally formed with the wall panels 110 or be a separate structure. The number of limiting members 300 can be one or more, and the limiting members 300 include, but are not limited to, limiting columns or pins. The limiting member 300 is located between a plurality or some of the elastic members 400. The limiting member 300 can be located in the central area or edge area of ​​the floating plate 200, in conjunction with the elastically balanced plurality of elastic members 400, to stably limit the floating plate 200 while the floating plate 200 is in a stable motion state.

[0074] See Figure 6 As shown, the floating structure 001 further includes at least one adjusting member 500, which is mounted on the floating plate 200 or the wall panel 110. The adjusting member 500 is configured to adjust the tilt angle of the floating plate 200 via the elastic member 400. The adjusting member 500 can be a single adjusting component or an adjusting assembly composed of multiple components. Because the elastic member 400 has elastic expansion and contraction properties, the actual length and external elastic force of the elastic member 400 vary with the degree of elastic expansion and contraction of the elastic member 400. Therefore, the adjusting member 500 can apply a suitable external force to the elastic member 400 to change the actual length, external elastic force, and other properties of the elastic member 400, thereby adjusting the elastic force of the elastic member 400 on the floating plate 200, thereby fine-tuning the tilt angle of the floating plate 200. This is not limited to adjustment of the floating plate 200 in an elastically stable state or an elastically moving state.

[0075] The adjusting member 500 can be implemented by a simple nut. In this case, a column head 230 is provided on both the floating plate 200 and the wall plate 110. The column head 230 is provided at a position on the floating plate 200 and the wall plate 110 for connecting the elastic member 400, such as the mounting position 220 or the connecting position. The elastic member 400 is a spring having a hollow inner cavity. The two ends of the spring are respectively engaged with the column heads 230 on the floating plate 200 and the wall plate 110. At least one of the column heads 230 has an external thread. When the adjusting member 500 is a nut, the nut can be threadedly mounted on the column head 230 with the external thread. At this time, the spring matched with the column head 230 with the external thread can be mounted on one end of the column head 230 and elastically abut against the end face of the nut after being mounted. When the thread of the adjusting nut on the column head 230 is rotated, the nut can move axially on the column head 230, thereby adjusting the force applied axially to the spring, causing the length of the spring to change after being stressed or the elastic force generated to the outside to change, which can adjust the inclination angle of the floating plate 200.

[0076] The adjustment function of the adjustment member 500 can also be automatically controlled and adjusted through an external control device, and the inclination angle of the floating plate 200 can be initially positioned according to needs. For example, the position information of the floating plate 200 can be obtained first, and it can be determined whether the floating plate 200 is in a predetermined initial equilibrium position based on the position information. When it is determined that the floating plate 200 is not in the initial equilibrium position, the length information of all the elastic members 400 is obtained, and the elastic force of the elastic member 400 with the shortest length is adjusted based on the length information to make the floating plate 200 in the initial equilibrium position.

[0077] Specifically, when the floating plate 200 is detected to be in a predetermined initial equilibrium position, such as when the floating plate 200 is not parallel to the wall panel 110, the length information of all the elastic members 400 can be compared to identify the elastic member 400 with the smallest length, and then the elastic member 400 with the smallest length can be adjusted. One method is to adjust the length of the elastic member 400, such as by using a nut to adjust the position of the elastic member 400, thereby increasing the compression of the spring, thereby shortening the actual distance between the floating plate 200 and the wall panel 110, and pushing the floating plate 200 toward the opposite side to achieve position adjustment of the floating plate 200. Another method for adjusting the elastic force of the elastic member 400 is to adjust the elastic coefficient of the elastic member 400, such as by replacing the elastic member 400 with a more appropriate elastic coefficient, to adjust the position of the floating plate 200 to the initial equilibrium position.

[0078] The limiting member 300 can adopt various structural forms, for example, it can be a single limiting member or a limiting assembly composed of multiple members. In one embodiment, the limiting member 300 is a columnar member, which can be a cylinder or a prism. The limiting structure 310 is a limiting groove 311 opened on the columnar member, and a limiting hole 240 is opened on the floating plate 200. The size and shape of the limiting groove 311 and the limiting hole 240 can be determined according to the assembly relationship between the two. The limiting hole 240 is plugged into and fitted with the columnar member and limitedly assembled in the limiting groove 311. The limiting hole 240 can change its position or angle relative to the limiting groove 311 through various movements of the floating plate 200. Therefore, the movement of the floating plate 200 can be indirectly restricted by limiting the movement of the limiting hole 240 through the limiting groove 311. This restriction is not limited to the above-mentioned inclination angle range or displacement range. In addition, it can also be the rotation range of the floating plate 200.

[0079] The limiting groove 311 is an annular groove circumferentially extending around the column. Its width is greater than the depth of the limiting hole 240. This portion of the annular groove's width exceeding the depth of the limiting hole 240 allows the limiting hole 240 to move in the width direction of the annular groove, which can be represented as the X-axis direction. This also allows the floating plate 200 to move in the X-axis direction between the pair of wall panels 110. Furthermore, since the limiting groove 311 is an annular groove, the limiting hole 240 can actually rotate about the annular groove, as long as the annular groove's structural configuration does not restrict the rotation of the limiting hole 240.

[0080] The limiting hole 240 has a first movable gap 250 with the annular groove in a direction parallel to the output end 210, and this direction can be expressed as the Z-axis direction, so that the floating plate 200 is allowed to reciprocate in the Z-axis direction to adjust the position of the output end 210 in the Z-axis direction. The limiting hole 240 has a second movable gap 260 with the annular groove in a direction perpendicular to the output end 210, and this direction can be expressed as the Y-axis direction, so that the floating plate 200 is allowed to reciprocate in the Y-axis direction to adjust the position of the output end 210 in the Y-axis direction. When restricting the movement of the floating plate 200 along the Y-axis or Z-axis, the first movable gap 250 can be made smaller than or equal to the second movable gap 260, so that the floating plate 200 can move more flexibly in the Y-axis direction, while the movement in the Z-axis direction is relatively restricted. In addition, those skilled in the art can also set the actual dimensions of the width of the first movable gap 250, the second movable gap 260 and the limiting groove 311 as needed, so as to form reasonable restrictions on the movement of the floating plate 200 in the X-axis, Y-axis and Z-axis directions.

[0081] Therefore, by limiting the width of the first movable gap 250, the second movable gap 260 and the limiting groove 311, the floating plate 200 can move in the X-axis, Y-axis and Z-axis directions, and move in three-dimensional space, thereby realizing the change of the position of the floating plate 200 and its output end 210 relative to the frame 100. The displacement range can be limited by the width of the first movable gap 250, the second movable gap 260 and the limiting groove 311, wherein the limiting hole can be elliptical or runway-shaped.

[0082] For an example of the use of the floating structure 001, see Figure 1 As shown, in an ideal state, the connector 002 can form an accurate docking with the external device 005, but refer to Figure 2As shown, when the external device 005 is tilted at a small angle, for example, the interface end on the external device 005 is offset in the -Z axis direction by an angle a, at this time, the connector 002 can be roughly positioned using the positioning member 004. During the process of inserting the positioning member 004 into the interface end, the floating plate 200 can be deflected in the +X axis direction under the action of elasticity.

[0083] like Figure 3 and Figure 4 As shown, when the interface end of the external device 005 is offset toward the x-axis relative to the floating structure 001, after the positioning member 004 of the connector 002 is roughly aligned, the floating plate 200 has a tendency to move toward the -X direction under the action of elasticity, and through the positioning and guiding function of the limit member 300, the floating plate 200 can move toward the -X axis along the limit member 300, thereby completing accurate docking with the interface end of the external device 005.

[0084] See Figures 7 to 9 The present invention further provides an interface device, comprising the floating structure 001 and a connector 002. Connector 002 is disposed at the output end 210 of the floating plate 200 and is configured to connect to an external device 005 having an interface end. Since the specific structure, functional principles, and technical effects of floating structure 001 have been described in detail above, they will not be repeated here. For any technical details regarding floating structure 001, please refer to the above description.

[0085] The connector 002 may include a connector circuit board and a high-density connector. The high-density connector is electrically connected to the connector circuit board in a stacked manner. The high-density connector may have a large number of embedded springs or spring pins, forming a structure that mates with the interface end of the external device 005. The springs or spring pins are elastic, thus allowing for flexible mating and displacement when the interface device and the interface end mate. The connector 002 may also be other types of electrical connectors 002, optical communication connectors 002, fluid connectors 002, etc., without limitation herein.

[0086] The structural shape of the high-density connector and the connector circuit board can be determined as needed, such as a square plate or a circular plate, etc. A positioning member 004 can be set on the connector 002, for example, a positioning pin is used as the positioning member 004, and the positioning member 004 is a component for positioning and cooperating with the external device 005. It can be connected to the high-density connector, or simultaneously connected to the high-density connector and the connector circuit board. A cone top can be set at the end of the positioning member 004 away from the connector 002, and the conical surface of the cone top can realize the initial self-alignment when the external device and the interface device are aligned and connected.

[0087] The tail end of connector 002 can be electrically connected to the circuit board through a conductive component 003. The conductive component 003 can be a conductive structure of any form. In order to ensure stable electrical conduction, the conductive component 003 can be a conductive cable, and the conductive cable is electrically connected to the connector 002 through a cable connector 002, or the conductive component 003 can also be a flexible printed board, and the flexible printed board is electrically connected to the connector 002.

[0088] The present invention also provides a circuit board unit, which includes an interface device, and the interface device includes the floating structure 001. The floating board is a circuit board, or the floating board is configured to be used to install a circuit board, or to indirectly install a circuit board through a circuit board fixing frame, or the frame 100 is configured to be used to directly install a circuit board or to install a circuit board through a circuit board fixing frame, and the circuit board fixing frame is configured to install at least one circuit board, and the specific number of circuit boards that can be installed can be one or more. A connector 002 is provided on the floating board 200, and the head end of the connector 002 is configured to be connected to an external device 005 having an interface end, and the tail end of the connector 002 is configured to be electrically connected to the circuit board.

[0089] The present invention also provides a semiconductor testing method. According to the circuit board unit, the steps are as follows: at least one circuit board is installed in the circuit board fixing frame. The number of installed circuit boards can be one or more, that is, one circuit board fixing frame can install one circuit board, or multiple stacked circuit boards can be installed, each of the circuit boards is electrically connected to at least one of the interface devices, or the circuit board is installed on the frame, the circuit board is electrically connected to at least one of the interface devices, or the circuit board is installed on the floating board, the circuit board is electrically connected to at least one of the interface devices, or multiple interface devices are prepared, wherein the floating board is a circuit board, the circuit board is electrically connected to the connector, and the circuit board is electrically connected to the connector; multiple interface devices are electrically connected to multiple interface ends of the external device 005 at the same time. At this time, a structure for synchronous large-scale testing can be realized, effectively improving the testing efficiency.

[0090] The present invention further provides a semiconductor testing device, comprising the circuit board unit. Since the specific structures, functional principles, and technical effects of the floating structure 001, the interface device, and the circuit board unit have been described in detail above, they will not be repeated here.

[0091] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0092] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. A floating structure for semiconductor testing, characterized in that: The floating structure comprises: frame; a floating plate, the floating plate including an output end located at a side edge, the floating plate being elastically mounted on the frame and at least elastically tiltable relative to the frame to adjust at least the orientation of the output end, the output end being configured for mounting a connector; A limiting member is assembled on the frame, and a limiting structure is provided on the limiting member. The limiting structure is a limiting groove opened on the limiting member, and a limiting hole is opened on the floating plate. The limiting hole is plugged into and matched with the limiting member and limitedly assembled in the limiting groove. The limiting structure is configured to at least form an inclination angle range that limits the inclination angle of the floating plate. The floating plate and the limiting structure are movably limitedly assembled to elastically tilt within the inclination angle range.

2. The floating structure according to claim 1, characterized in that: The floating plate is configured to be able to elastically move relative to the frame to adjust the orientation of the output end and its position relative to the frame. The limiting structure is configured to form an inclination angle range that limits the inclination angle of the floating plate and a displacement range of the movable position of the output end. The floating plate and the limiting structure are movably limitedly assembled to elastically move within the inclination angle range and the displacement range.

3. The floating structure according to claim 1, wherein: The floating structure comprises: At least one elastic member, the floating plate is elastically assembled on the frame through the elastic member.

4. The floating structure according to claim 3, characterized in that: The frame body at least comprises a pair of wall plates, and the floating plate is elastically assembled between the pair of wall plates.

5. The floating structure according to claim 4, characterized in that: The two side walls of the floating plate have a plurality of symmetrical installation positions, each of the installation positions is equipped with the elastic member, and the floating plate is elastically assembled with a pair of the wall panels via the elastic members on the two side walls.

6. The floating structure according to claim 5, characterized in that: The number of the mounting positions is eight, and the mounting positions are symmetrically arranged on the two side walls of the floating plate to form four pairs. The connecting line of the four mounting positions on the same side wall of the floating plate is a rectangle.

7. The floating structure according to claim 5, characterized in that: The limiting member is assembled between a pair of the wall panels, and the limiting member is located between the plurality of elastic members.

8. The floating structure according to claim 5, characterized in that: The floating structure further comprises: At least one adjusting member is assembled on the floating plate and / or the wall plate, and the adjusting member is configured to adjust the inclination angle of the floating plate through the elastic member.

9. The floating structure according to any one of claims 1 to 8, characterized in that: The limiting groove is an annular groove surrounding the limiting member, and the width of the annular groove is greater than the depth of the limiting hole; The limiting hole has a first movable gap with the annular groove in a direction parallel to the output end, and the limiting hole has a second movable gap with the annular groove in a direction perpendicular to the output end, and the first movable gap is less than or equal to the second movable gap.

10. An interface device, characterized in that: The interface device comprises: The floating structure according to any one of claims 1 to 9; A connector is provided at an output end of the floating board, and the connector is configured to be used for connecting an external device having an interface end.

11. A circuit board unit, characterized in that: The circuit board unit include: The interface device according to claim 10, Wherein, the floating plate is a circuit board, Alternatively, the floating plate is configured to mount a circuit board or to indirectly mount the circuit board via a circuit board fixture. Alternatively, the frame is configured to be used for directly mounting a circuit board or indirectly mounting a circuit board via a circuit board fixing bracket; The head end of the connector is configured to be connected to an external device having an interface end, and the tail end of the connector is configured to be electrically connected to the circuit board.

12. A semiconductor testing method, characterized in that: According to the circuit board unit according to claim 11, the steps are as follows: At least one circuit board is mounted in the circuit board fixing frame, each of the circuit boards is electrically connected to at least one of the interface devices, Alternatively, a circuit board is mounted on the frame, wherein the circuit board is electrically connected to at least one of the interface devices. Alternatively, a circuit board is mounted on the floating board, the circuit board being electrically connected to at least one of the interface devices, Alternatively, a plurality of interface devices are prepared, wherein the floating board is a circuit board; The plurality of interface devices are electrically connected to the plurality of interface terminals of the external device at the same time.

13. A semiconductor testing device, characterized in that: The semiconductor testing equipment includes the circuit board unit according to claim 11.

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