Carrier Spacing Adjustment Device

Abstract

The present invention includes: a plurality of pallets; a plurality of base portions for fixing the plurality of pallets; a guiding mechanism for guiding the movement of the base portions in the direction in which the base portions are arranged in parallel; and a link mechanism for changing the intervals between the base portions in parallel according to the change in the angles of link members connected to the plurality of base portions. At the connection portions between the plurality of base portions and the link members, there is provided an interval fine adjustment mechanism for individually fine-adjusting the positions of the base portions in the direction of their parallel arrangement. Thus, a pallet interval adjustment device capable of finely adjusting the intervals between a plurality of pallets for transporting wafers or the like is provided.

Description

Technical Field

[0001] The present invention relates to a device capable of finely adjusting the intervals between a plurality of pallets for holding wafers and the like. Background Art

[0002] Conventionally, in the manufacture of semiconductors, liquid crystal display panels, etc., it is necessary to transfer a substrate such as a wafer (hereinafter, described by taking a "wafer" as an example) from a storage container to a specified device or the like. In recent years, in the transfer of such wafers, sometimes a plurality of wafers are moved together in order to achieve time reduction or the like. For example, in the transfer of wafers, a robot having a hand with a plurality of pallets is used. In such a robot, for example, there is a robot as shown in Figure 6 FIG. which has a hand 100 (a part is shown) having a plurality of pallets 101 arranged in parallel, and holds a plurality of wafers 111 stored in a storage container 110 with these pallets 101 and transfers them together to a specified device. In addition, there is also a robot that holds a plurality of wafers with a plurality of pallets, transfers them to a storage container, and simultaneously stores them.

[0003] In addition, as such a prior art, there is a wafer transfer robot that holds and transfers a plurality of wafers (for example, refer to Patent Document 1).

[0004] Patent Document 1: Japanese Patent Application Laid-Open No. 2008-300609

[0005] However, when a plurality of pallets are arranged in parallel, sometimes a slight inclination difference or the like is generated between the respective pallets. In such a case, adjustment is performed so that other pallets are horizontal with respect to a reference pallet, but sometimes a slight deviation is generated in the intervals between the plurality of pallets due to this adjustment. In addition, in the above Patent Document 1, there is no description of such a problem. Summary of the Invention

[0006] Therefore, an object of the present invention is to provide a pallet interval adjustment device capable of finely adjusting the intervals between a plurality of pallets for transferring wafers and the like.

[0007] In order to achieve the above object, the present invention includes: a plurality of pallets; a plurality of base portions for fixing the plurality of pallets; a guiding mechanism for guiding the movement of the base portions in the direction in which the base portions are arranged in parallel; and a link mechanism for changing the intervals between the base portions in parallel according to the change in the angle of link members connected to the plurality of base portions. At the connection portions between the plurality of base portions and the link members, an interval fine adjustment mechanism for individually fine-tuning the positions of the base portions in the parallel arrangement direction is provided.

[0008] According to this structure, after changing the intervals between a plurality of base portions arranged in parallel by means of a link mechanism, it is possible to finely adjust the intervals between each base portion and an adjacent base portion individually by means of an interval fine adjustment mechanism provided at the connection portion between the base portion and the link member. Thus, it is possible to finely adjust the intervals between a plurality of pallets individually.

[0009] According to the present invention, it is possible to finely adjust the intervals between a plurality of pallets for carrying wafers or the like individually. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 is a top view showing a pallet interval adjustment device and pallets according to an embodiment of the present invention.

[0011] Figure 2 is a rear view showing an example of a link mechanism for adjusting the intervals between a plurality of base portions to which a plurality of pallets are fixed in parallel.

[0012] Figure 3 is showing Figure 1 an attached drawing of a part of the pallet interval adjustment device shown in, (A) is a top view, and (B) is a front view.

[0013] Figure 4 of (A) and (B) are enlarged views showing the action at the time of adjusting the interval of the base portion by the interval fine adjustment mechanism of the pallet interval adjustment device shown in Figure 3

[0014] Figure 5 is a cross-sectional view showing another example of the drive portion of the pallet interval adjustment device.

[0015] Figure 6 is a side view schematically showing a hand having a plurality of pallets and a storage container storing a plurality of wafers. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0016] Hereinafter, embodiments of the present invention will be described based on the drawings. In the following embodiments, the pallet interval adjustment device 1 provided in the hand 100 of a robot will be described as an example. This pallet interval adjustment device 1 shows an example in which a plurality of pallets are arranged in parallel in the vertical direction. In the following embodiments, the concepts of the front-back, left-right, and up-down directions are set to be consistent with the concepts of the front-back, left-right, and up-down directions shown in Figure 1 and the concept of the up-down direction is set to be consistent with the concept of the up-down direction shown in Figure 2

[0017] (Structure of the pallet interval adjustment device)

[0018] Figure 1 is a top view showing a pallet interval adjustment device 1 and pallets 12 according to an embodiment.​​Figure 2 The rear view of an example of a link mechanism 30 that adjusts the intervals V1 to V4 between a plurality of base portions 20 to 24 to which a plurality of pallets 10 to 14 are fixed in parallel. In Figure 1 , taking the uppermost pallet 12 in Figure 2 as an example for explanation.

[0019] As Figure 1 shown, the pallet 12 that holds the wafer 111 ( Figure 6 ) from below is fixed to the front portion of the base portion 22. The pallet 12 is a thin plate member with a bifurcated front end. The shape of the pallet 12 is not limited to this embodiment. The pallet 12 is fixed to the base portion 22 by bolts or the like. The base portion 22 is arranged in parallel in the vertical direction as Figure 2 shown, and each of the base portions 20 to 24 can adjust the intervals V1 to V4 in the vertical direction through the link members 31 to 35 of the link mechanism 30 as described later. As Figure 1 shown, for the base portion 22, the movement in the left-right direction is restricted by a guide mechanism 40 provided between the hand 100, and the movement in the vertical direction in which the base portion 22 is arranged in parallel can be guided and moved. The guide mechanism 40 has a guide rail 41 that extends in the vertical direction and is provided on the hand 100, and a guide block 42 that is provided on the base portion 22 and is guided by the guide rail 41 to move. The guide block 42 is provided on each of the base portions 20 to 24, and each of the base portions 20 to 24 moves in the vertical direction along the guide rail 41. The guide mechanism 40 can use linear guidance or the like.

[0020] Moreover, at the connection portion between the base portion 22 and the link member 33, an interval fine adjustment mechanism 50 for finely adjusting the interval between the base portion 22 and the adjacent base portion 21 is provided. Through this interval fine adjustment mechanism 50, the interval V2 between the base portion 22 and other base portions 21 can be finely adjusted in the vertical direction.

[0021] As Figure 2 shown, a plurality of base portions 20 to 24 to which a plurality of pallets 10 to 14 arranged in parallel in the vertical direction are fixed can adjust the intervals at a specified interval in the vertical direction through the link mechanism 30. In this example, five base portions 20 to 24 are provided in the vertical direction, and a fixed base portion 20 with a fixed position is provided in the central portion. Relative to this fixed base portion 20, a first movable base portion 21 and a second movable base portion 22 are provided above, and a third movable base portion 23 and a fourth movable base portion 24 are provided below.

[0022] In the fixed base portion 20, the central portion of the first link member 31 is supported by the shaft member 36, and the first link member 31 extends in the tilting direction in the vertical direction. The first link member 31 is connected to the first movable base portion 21 by the second link member 32. The first link member 31 is connected to the second movable base portion 22 by the third link member 33. The first link member 31 is connected to the third movable base portion 23 by the fourth link member 34. The first link member 31 is connected to the fourth movable base portion 24 by the fifth link member 35. The connecting portions of the link members 31 to 35 are rotatable about the shaft member 62.

[0023] With such a link mechanism 30, according to the angular change of the first link member 31, above the fixed base portion 20, the interval V1 between the fixed base portion 20 and the first movable base portion 21 and the interval V2 between the first movable base portion 21 and the second movable base portion 22 are changed. Further, below the fixed base portion 20, the interval V3 between the fixed base portion 20 and the third movable base portion 23 and the interval V4 between the third movable base portion 23 and the fourth movable base portion 24 are changed. Further, with the link mechanism 30, the intervals V1 to V4 are changed at the same interval.

[0024] That is, according to this link mechanism 30, by changing the angle of the first link member 31, the vertical intervals V1 and V2 between the first movable base portion 21 and the second movable base portion 22 above can be adjusted in parallel with respect to the fixed base portion 20 supporting the first link member 31. Further, the vertical intervals V3 and V4 between the third movable base portion 23 and the fourth movable base portion 24 below can be adjusted in parallel with respect to the fixed base portion 20 at the same time. The solid lines shown in the figure indicate the state where the intervals V1 to V4 have been enlarged, and the double-dot chain lines indicate the state where the intervals V1 to V4 have been reduced. Thus, the intervals V1 to V4 of the base portions 20 to 24 arranged in parallel can be adjusted by the link members 31 to 35 of the link mechanism 30. The link mechanism 30 can be configured, for example, to control the angle of the first link member 31 with a motor. In addition, the link mechanism 30 is not limited to the link mechanism 30 of this embodiment. The link mechanism 30 can also be configured to connect the base portions 20 to 24 with link members respectively.

[0025] Then, after adjusting the intervals V1 to V4 of the base portions 20 to 24 by the link mechanism 30, the pallets 10 to 15 are finely adjusted to be parallel. The fine adjustment of the pallets 10 to 15 is based on the fixed pallet 10, and the first pallet 11, the second pallet 12, the third pallet 13, and the fourth pallet 14 are finely adjusted to be parallel. There is no limitation on the mechanism for finely adjusting the pallets 10 to 15 to be parallel. After the pallets 10 to 15 are finely adjusted to be parallel, when there are slight errors in the intervals V1 to V4 of the pallets 10 to 15, fine adjustment is performed by the following interval fine adjustment mechanism 50.

[0026] (Detailed structure of the pallet interval adjustment device)

[0027] Figure 3 It shows Figure 1 The drawings showing a part of the pallet interval adjustment device 1 shown in the figure, (A) is a top view, and (B) is a front view. Figure 4 In (A) and (B) of Figure 3 It is an enlarged view showing the action when the interval fine adjustment mechanism 50 of the pallet interval adjustment device 1 shown in the figure adjusts the intervals of the base portions 21 to 24. Interval fine adjustment mechanisms 50 are respectively provided in the base portions 21 to 24, but in the following description, the interval fine adjustment mechanism 50 provided in the base portion 22 is also taken as an example for explanation.

[0028] As Figure 3 Shown in (A) and (B) of the figure, the interval fine adjustment mechanism 50 of the pallet interval adjustment device 1 has: a displacement block 51 that moves in the left-right direction relative to the base portion 22; a drive portion 54 that moves the displacement block 51 in the left-right direction; and a sliding block 60 that moves in the up-down direction as the displacement block 51 moves. In this embodiment, the displacement block 51 is moved in a direction (left-right direction) orthogonal to the direction (up-down direction) in which the base portions 20 to 24 are arranged side by side, but as long as the displacement block 51 is moved in a direction intersecting the direction in which the base portions 20 to 24 are arranged side by side.

[0029] The displacement block 51 is provided with an inclined groove 58 as a guiding portion that is inclined on a part of the shaft member 62 connected to the link member 33. The guiding portion in this example is the inclined groove 58 that is inclined at a small inclination angle θ. The sliding block 60 is placed in the inclined groove 58 and is guided. In addition, a plurality of long holes 52 extending in the left-right direction are provided in the displacement block 51, and the displacement block 51 is fixed to the base portion 22 by screwing a fixing bolt 53 as a fixing portion inserted into the long holes 52 with an internal thread portion 27 of the base portion 22. The displacement block 51 is stopped from moving by the fixing of the fixing bolt 53. The displacement block 51 can move in the left-right direction relative to the base portion 22 by loosening the fixing bolt 53.

[0030] In this embodiment, the drive unit 54 has a threaded member 55 provided on a bracket portion 26 that is provided so as to project rearward from the base portion 22. The front end portion of the threaded member 55 is screwed into an internal threaded portion 56 provided on the displacement block 51. The head position of the threaded member 55 is fixed by a pressing plate 57 provided on the base portion 22. By fixing the head position of the threaded member 55 with the pressing plate 57, even if the head of the threaded member 55 is rotated, the head does not change its position, and the displacement block 51 is moved in the left - right direction.

[0031] A slide block 60 is built into a part of an inclined groove 58 of the displacement block 51 and is formed in a substantially parallelogram shape along the inclined groove 58. The slide block 60 has a restricting portion 61 that projects from the displacement block 51 toward the base portion 22, and this restricting portion 61 enters a restricting groove 25 provided on the base portion 22. In this figure, the left - right direction gap between the restricting portion 61 and the restricting groove 25 is exaggeratedly shown. Thus, the up - down direction movement of the slide block 60 is allowed, but the left - right direction movement is restricted by the restricting groove 25. In the slide block 60, a shaft member 62 connected to the link member 33 is provided so as to project rearward (the direction near the paper surface). Thus, the shaft members 62 connected to the link members 31 - 35 move in the up - down direction along the restricting groove 25 provided on the base portion 22.

[0032] According to such an interval fine - tuning mechanism 50, when it is necessary to individually fine - tune the intervals of the pallet plates 10 - 15 after adjusting the intervals V1 - V4 of the base portions 20 - 24 to a specified interval by the link mechanism 30, the intervals V1 - V4 can be fine - tuned as follows.

[0033] As Figure 4 shown in (A) of [], if the threaded member 55 of the drive unit 54 is rotated to move the displacement block 51 in the right direction, the slide block 60 built into the inclined groove 58 of the displacement block 51 is subjected to a force F1 in the right direction from the inclined groove 58. However, since the left - right direction movement of the slide block 60 is restricted by the restricting portion 61 in the restricting groove 25, it moves slightly downward by a downward force F2 acting from the inclined groove 58. The inclined groove 58 is inclined at a small inclination angle θ, so the movement of the slide block 60 is a small movement amount. As this movement amount, for example, it is a small movement amount that can be absorbed by the gap of the bearing that supports the shaft member 62 by the third link member 33, the elastic deformation amount of the shaft member 62, etc. And, by this small movement amount, the interval V2 between the second movable base portion 22 and the first movable base portion 21 arranged side by side next to it can be fine - tuned. As this fine - tuning, for example, it can be set to about 0.1 mm of fine - tuning.

[0034] As Figure 4As shown in (B) of , if the threaded member 55 of the drive unit 54 is rotated in the opposite direction to move the displacement block 51 to the left, the slider 60 in the inclined groove 58 built in the displacement block 51 is subjected to a force F3 to the left from the inclined groove 58. However, since the left-right movement of the slider 60 is restricted by the restricting portion 61 in the restricting groove 25, the slider 60 is slightly moved upward by the upward force F4 acting on the inclined groove 58. The inclined groove 58 is inclined at a small inclination angle θ, so the movement of the slider 60 is a small movement amount. As this movement amount, for example, it is a small movement amount that can be absorbed by the clearance of the bearing that supports the shaft member 62 by the third link member 33, the elastic deformation amount of the shaft member 62, etc. Moreover, by this small movement amount, the interval V2 between the second movable base portion 22 and the first movable base portion 21 arranged side by side therewith can be finely adjusted. This fine adjustment can also be set to, for example, a fine adjustment of about 0.1 mm.

[0035] Therefore, according to the pallet interval adjustment device 1, after adjusting the intervals V1 to V4 of the base portions 20 to 24 by the link mechanism 30, the side-by-side arrangement direction positions of the base portions 20 to 24 can be individually finely adjusted by the interval fine adjustment mechanism 50, so that the intervals V1 to V4 of the pallets 10 to 14 can be individually finely adjusted. The fine adjustment of the intervals V1 to V4 by the interval fine adjustment mechanism 50 can be efficiently performed even when the number of pallets 10 to 14 (base portions 20 to 24) increases, and it is possible to achieve shortening of the interval adjustment operation time, reduction of labor, etc.

[0036] (Other structures)

[0037] Figure 5 It is a cross-sectional view showing another example of the drive unit 54 in the pallet interval adjustment device 1. As shown in the figure, the drive unit 54 can be a differential thread mechanism 70. The differential thread mechanism 70 can be provided in all of the first movable base portion 21 to the fourth movable base portion 24. In addition, the same reference numerals are given to the same structures as Figure 3 and their description is omitted.

[0038] The differential thread mechanism 70 of the present embodiment is provided with a large-pitch internal thread portion 71 on the bracket portion 26 that projects rearward from the second movable base portion 22, and a small-pitch internal thread portion 72 is provided on the displacement block 51. The large-pitch internal thread portion 71 and the small-pitch internal thread portion 72 are threads cut in opposite directions. Moreover, the large thread portion 74 of the differential thread 73 is screwed with the large-pitch internal thread portion 71 of the bracket portion 26, and the small thread portion 75 is screwed with the small-pitch internal thread portion 72 of the displacement block 51. At the portion of the large thread portion 74 of the differential thread 73, a gripping portion 76 for rotating the differential thread 73 is provided. In addition, on the large thread portion 74 in the right direction of the bracket portion 26, a lock nut 77 for fixing the position of the differential thread 73 is provided. Furthermore, the differential thread 73 is not limited to this embodiment.

[0039] If the drive unit 54 is the differential thread mechanism 70, when the gripping portion 76 is rotated one turn and the large thread portion 74 moves one pitch in the left-right direction, the displacement block 51 moves in the opposite left-right direction by an amount equal to one pitch of the small thread portion 75. Therefore, the displacement block 51 moves by this difference. Thus, a more minute adjustment can be performed. For example, the differential thread 73 can be configured such that when the gripping portion 76 is rotated one turn and the large thread portion 74 moves one pitch (e.g., 1 mm) to the left direction, the small thread portion 75 moves one pitch (e.g., 0.5 mm) to the right direction. In this case, even when the gripping portion 76 is rotated one turn, the displacement block 51 only moves to the left direction by the difference between the amount of one pitch of the large thread portion 74 and the amount of one pitch of the small thread portion 75 (in this example, 1 mm - 0.5 mm = 0.5 mm). Thus, a more minute adjustment can be performed. In addition, the pitch of the large thread portion 74 and the pitch of the small thread portion 75 in the differential thread mechanism 70 can be arbitrarily set.

[0040] In this way, if the drive unit 54 of the interval fine adjustment mechanism 50 is the differential thread mechanism 70, the change amount of the interval with respect to the adjustment amount of the drive unit 54 can be made more minute, and a more minute interval adjustment can be performed.

[0041] In addition, in the above-described embodiment, the interval fine adjustment mechanism 50 includes: a displacement block 51 that moves in a direction intersecting the direction in which the base portions 20 to 24 are arranged side by side; a drive portion 54 that moves the displacement block 51; a slide block 60 that moves the connection portions of the base portions 21 to 24 and the link members 31 to 35 as the displacement block 51 moves; and a fixing bolt 53 as a fixing portion that stops the movement of the displacement block 51. The base portions 21 to 24 have restriction grooves 25 that allow the slide block 60 to move in the direction in which the base portions 21 to 24 are arranged side by side and restrict movement in a direction orthogonal to this direction. According to this structure, by moving the displacement block 51 in a direction intersecting the direction in which the base portions 20 to 24 are arranged side by side using the drive portion 54, a force can be applied to the slide block 60 to make it move obliquely along the inclined groove 58. As a result, forces (F2, F4) in the direction in which the base portions 20 to 24 are arranged side by side act on the slide block 60, and the connection portions of the base portions 21 to 24 and the link members 31 to 35 can be slightly moved in the direction in which the base portions 20 to 24 are arranged side by side. Thus, the intervals between the juxtaposed base portions 20 to 24 can be individually fine-tuned.

[0042] In addition, the displacement block 51 has an inclined groove 58 as an inclined guiding portion that guides the slide block 60, and the slide block 60 is configured to move in the direction in which the base portions 20 to 24 are arranged side by side with respect to the inclined groove 58 as the guiding portion as the displacement block 51 moves. According to this structure, the amount of movement of the slide block 60 in the direction in which the base portions 20 to 24 are arranged side by side can be reduced with respect to the amount of movement of the displacement block 51 in a direction intersecting the direction in which the base portions 20 to 24 are arranged side by side.

[0043] In addition, the drive portion 54 may be constituted by a differential thread mechanism 70. If configured in this way, the amount of movement of the displacement block 51 with respect to the driving amount of the drive portion 54 can be further reduced by the differential thread mechanism 70 of the drive portion 54.

[0044] Furthermore, the above-described embodiment shows an example. The interval fine adjustment mechanism 50 may be any mechanism as long as, when the displacement block 51 moves in a direction intersecting the direction in which the base portions 20 to 24 are arranged side by side, the slide block 60 moves in the direction in which the base portions 20 to 24 are arranged side by side. Various changes can be made within the scope not impairing the gist of the present invention, and the present invention is not limited to the above-described embodiment.

[0045] Explanation of reference numerals

[0046] 1... Pallet spacing adjustment device; 10... Fixed pallet; 11... First pallet; 12... Second pallet; 13... Third pallet; 14... Fourth pallet; 20... Fixed base portion; 21... First movable base portion; 22... Second movable base portion; 23... Third movable base portion; 24... Fourth movable base portion; 25... Restriction groove; 30... Linkage mechanism; 31... First link member; 32... Second link member; 33... Third link member; 34... Fourth link member; 35... Fifth link member; 40... Guide mechanism; 50... Spacing fine adjustment mechanism; 51... Displacement block; 52... Long hole; 53... Fixed bolt (fixing portion); 54... Driving portion; 55... Threaded member; 58... Inclined groove; 60... Sliding block; 61... Restriction portion; 62... Shaft member; 70... Differential thread mechanism; 73... Differential thread; V1 to V4... Spacing; F1 to F4... Forces.

Claims

1. A pallet spacing adjustment device, characterized in that, Comprising: A plurality of pallets; A plurality of base portions for fixing the plurality of pallets; A guiding mechanism for guiding the movement of the base portion in the direction in which the base portions are arranged side by side; And A link mechanism for changing the interval between the base portions in parallel according to the change in the angle of a link member connected to the plurality of base portions, At the connection portion between the plurality of base portions and the link member, there is provided an interval fine adjustment mechanism for individually fine-adjusting the position of the side-by-side arrangement direction of the base portions, The interval fine adjustment mechanism has: a displacement block that moves in a direction intersecting the direction in which the base portions are arranged side by side; a driving portion that moves the displacement block; a sliding block that moves the connection portion between the base portion and the link member as the displacement block moves; and a fixing portion that stops the movement of the displacement block, The base portion has a limiting groove that allows the sliding block to move in the direction in which the base portions are arranged side by side and restricts the movement of the sliding block in a direction orthogonal to this direction.

2. The pallet interval adjustment device according to claim 1, wherein The displacement block has an inclined guiding portion for guiding the sliding block, The sliding block is configured to move in the direction in which the base portions are arranged side by side relative to the guiding portion as the displacement block moves.

3. The pallet interval adjustment device according to claim 1 or 2, wherein The driving portion is constituted by a differential thread mechanism.

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