A graphite boat sheet and graphite boat
By filling the hollow areas of the graphite boat sheet with conductive sheets, the problem of uneven coating caused by the uneven electric field of the graphite boat sheet was solved, thus achieving uniform coating of silicon solar cells and improving the load-bearing capacity of the graphite boat.
Patent Information
- Application Number
- CN202010726930.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-07-26
- Publication Date
- 2025-12-12
- Estimated Expiration
- 2040-07-26
AI Technical Summary
The existing graphite boat sheet has poor contact at the locking point, resulting in uneven electric field and uneven coating of silicon solar cells. This is especially noticeable on large-size silicon solar cells, where it manifests as a reddish center, affecting product quality.
Conductive sheets with electrical conductivity are filled in the hollow areas of the graphite boat sheet. The thickness of the conductive sheets is less than that of the supporting frame to compensate for the lack of electric field. The conductive sheets are provided with vent holes and reinforcing ribs to enhance the structural strength and facilitate the removal of the silicon wafer.
This achieves uniformity of the electric field, ensures uniformity of silicon solar cell coating, avoids central reddening, improves product quality, and increases the load-bearing capacity of the graphite boat.
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Figure CN113990782B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to a graphite boat piece, in particular to a graphite boat piece. BACKGROUND
[0002] The graphite boat is an indispensable device in the process of producing solar silicon battery piece, which is used for the front and back surface coating process of silicon battery piece. The graphite boat generally includes a plurality of pieces of parallel and spaced graphite boat pieces, graphite guide rods and graphite blocks for fixing the graphite boat pieces. The existing graphite boat piece is generally provided with three clamping points for fixing the silicon battery piece. The area of the graphite boat piece corresponding to the placement of the silicon battery piece is hollow. Referring to Figure 7 After power on, the current passes through the graphite boat piece, the clamping point and the silicon wafer, and a uniform electric field is formed between the adjacent silicon wafers to ensure the uniformity of the coating.
[0003] However, the existing graphite boat piece only relies on three clamping points to fix the silicon wafer and conduct electricity. If the contact at the clamping point is poor, the electric field of the corresponding silicon wafer will be uneven, and the coating will be correspondingly uneven. At the same time, the size of the current silicon battery piece is also large. Large-size silicon battery pieces have higher requirements for current. This problem is particularly serious. If the clamping point is not in good contact, the large-size battery piece will appear "red" in the center of the coating, which is inconsistent with the normal blue color at the edge, causing color difference and becoming a defective product. SUMMARY
[0004] The present application provides a graphite boat piece with uniform coating; solves the problem of uneven coating in the prior art.
[0005] The above technical problems of the present application are mainly solved by the following technical scheme: a graphite boat piece, comprising a long strip-shaped bearing frame, both ends of the bearing frame are provided with graphite boat ears for connecting electrodes, a plurality of linearly spaced bearing units are arranged on the bearing frame, each bearing unit comprises a hollow area and a first clamping point, a second clamping point and a third clamping point for supporting a square silicon wafer, the hollow area is located in the area constrained by the first clamping point, the second clamping point and the third clamping point, characterized in that: the hollow area is filled with a conductive sheet with conductive ability, and the thickness of the conductive sheet is less than the thickness of the bearing frame.
[0006] The bearing frame is long and sheet-shaped. In actual production, the bearing frame also supports the silicon battery piece. In order to prevent itself from being deformed due to gravity, a plurality of hollow areas are arranged on the bearing frame to reduce its own weight. Since the conductive sheet in the present application also has conductivity, the conductive sheet can compensate for the missing electric field of the original hollow area, so that the electric field formed by the graphite boat piece is more uniform, the coating formed by the silicon battery piece is more uniform, and the problem of red center of the silicon wafer coating is solved.
[0007] Preferably, the load-bearing frame is provided with a plurality of weight-reducing holes, which can be through holes or blind holes.
[0008] Preferably, the conductive sheet is provided with a plurality of reinforcing ribs arranged in a cross shape, which can improve the structural strength of the conductive sheet and prevent the graphite boat sheet from deforming while ensuring the formation of an electric field.
[0009] Preferably, the conductive sheet is provided with through ventilation holes, which can not only reduce the self-weight but also facilitate the unloading of the silicon cell sheet. When the silicon cell sheet is on the graphite boat sheet, it will be tightly attached to the surface of the load-bearing frame. The ventilation holes can balance the air pressure on both sides of the silicon cell sheet and facilitate the falling of the silicon cell sheet. The ventilation holes can be circular, polygonal, strip-shaped or any other shape.
[0010] Preferably, the conductive sheet can be coplanar with one side of the load-bearing frame and recessed on the other side, or both sides can be recessed compared with the load-bearing frame.
[0011] Preferably, the conductive sheet is a detachable metal sheet provided with a flange that can be embedded in the hollowed-out area. Since the metal sheet will be etched by acid, this type of conductive sheet is detachably embedded in the load-bearing frame. When the present application needs to be pickled, the conductive sheet needs to be disassembled.
[0012] Preferably, the load-bearing frame of the edge of the hollowed-out area is provided with an embedding groove that can be embedded with the flange. The depth of the embedding groove is consistent with the thickness of the flange to ensure that the flange on the conductive sheet is embedded in the embedding groove with a flat edge.
[0013] Preferably, the thickness of the load-bearing frame is 2 to 4 mm, and the thickness of the conductive sheet is 0.3 to 1 mm.
[0014] The present application also provides a graphite boat comprising a plurality of graphite boat sheets, graphite guide rods, graphite blocks and ceramic bushings, characterized in that the graphite boat sheets are the novel graphite boat sheets described above. Since the novel graphite boat sheets described above have the technical effects described above, the graphite boat provided with the novel graphite boat sheets also has the same technical effects. Compared with the existing graphite boat, the graphite boat provided by the present application can have smaller spacing between the graphite boat sheets, and the uniformity of the coating film can be ensured even with smaller spacing. This can increase the number of silicon wafers carried by the graphite boat and increase the production capacity.
[0015] Therefore, the present application has the following characteristics compared with the prior art: 1. The newly added thin and conductive conductive sheet in the hollowed-out area of the load-bearing frame can compensate for the lack of the electric field in the original hollowed-out area, making the electric field formed by the graphite boat sheet more uniform and the coating film formed by the silicon cell sheet more uniform.
[0016] Further, the conductive sheet is provided with a through ventilation hole, which can not only reduce the dead weight, but also facilitate unloading of the silicon wafer. BRIEF DESCRIPTION OF DRAWINGS
[0017] BRIEF DESCRIPTION OF DRAWINGS Figure 1 is a structural schematic diagram of the present application;
[0018] BRIEF DESCRIPTION OF DRAWINGS Figure 2 is a sectional view of the present application;
[0019] BRIEF DESCRIPTION OF DRAWINGS Figure 3 is another sectional view of the present application;
[0020] BRIEF DESCRIPTION OF DRAWINGS Figure 4 is a sectional view of Example 2;
[0021] BRIEF DESCRIPTION OF DRAWINGS Figure 5 is a partial structural schematic diagram of Example 3;
[0022] BRIEF DESCRIPTION OF DRAWINGS Figure 6 is a partial structural schematic diagram of Example 4;
[0023] BRIEF DESCRIPTION OF DRAWINGS Figure 7 is a partial structural schematic diagram of the existing graphite wafer sheet. DETAILED DESCRIPTION
[0024] The technical solutions of the present application will be further specifically described below by means of examples and in combination with the drawings.
[0025] Example 1: see Figure 1 A graphite wafer sheet, comprising a long strip-shaped bearing frame 1, both ends of the bearing frame 1 are provided with graphite wafer ears 11 for connecting electrodes, and a plurality of shaft holes 14 are provided on the upper and lower sides of the bearing frame 1, a plurality of bearing units 2 are arranged on the bearing frame 1 in linear intervals, each bearing unit 2 comprises a hollow area 3 and three first clamping points 41, second clamping points 42 and third clamping points 43 which can be used to support square silicon wafers, the hollow area 3 is located in the square area constrained by the first clamping points 41, the second clamping points 42 and the third clamping points 43, and the square is arranged obliquely, the hollow area 3 is filled with a conductive sheet 5 having conductive capacity, the thickness of the bearing frame 1 is 3 mm, and the thickness of the conductive sheet 5 is 0.5 mm. In actual production, the two side surfaces of the position where the hollow area on the bearing frame is located are cut and processed by machining, and a thin conductive sheet (see Figure 2 and Figure 3 ) is machined, that is, the conductive sheet is integrally made with the bearing frame.
[0026] see Figure 1 A plurality of weight reduction holes 12 are provided on the bearing frame 1, and the weight reduction holes are square blind holes.
[0027] see Figure 1The ventilation hole 51 is arranged at the center of the conductive sheet 5.
[0028] Embodiment 2: see Figure 4 The conductive sheet 5 is a detachable metal sheet, and the edge of the conductive sheet 5 is provided with a flange 52 which can be embedded in the hollow area 3. The hollow area 3 is cut on the bearing frame 1, and the embedding groove 13 which can be embedded in the flange 52 is cut on the bearing frame 1 at the edge of the hollow area 3. The depth of the embedding groove 13 is consistent with the thickness of the flange 52. The conductive sheet 5 is the same as that in Embodiment 1, and thus will not be described here.
[0029] Embodiment 3: see Figure 5 The ventilation hole 51 on the conductive sheet 5 is a long strip, and the number of the ventilation hole 51 is four and the ventilation holes are distributed at equal intervals. The ventilation hole 51 is the same as that in Embodiment 1, and thus will not be described here. The long strip-shaped ventilation hole can save more self-weight, and is beneficial to reduce the overall weight.
[0030] Embodiment 4: see Figure 6 The conductive sheet 5 is provided with a plurality of reinforcing ribs 53 which are distributed in the shape of a cross. The width of the reinforcing rib 53 is 10 mm. The reinforcing rib 53 is the same as that in Embodiment 1, and thus will not be described here. The reinforcing rib 53 can improve the structural strength of the conductive sheet 5 and prevent the graphite boat sheet from being deformed while ensuring the formation of an electric field.
[0031] The graphite boat disclosed in the embodiment also comprises a plurality of graphite boat sheets, graphite guide rods, graphite blocks and ceramic shaft sleeves. The graphite boat sheets are the novel graphite boat sheets described above. The graphite boat has the same technical effects as the novel graphite boat sheets. The installation of the graphite boat sheets, graphite guide rods, graphite blocks and ceramic shaft sleeves is the prior art, and thus will not be described here.
[0032] It will be apparent to those skilled in the art that the present application can be varied in many ways, and such variations are not considered to be outside the scope of the present application. All such modifications which would be apparent to one skilled in the art are intended to be included within the scope of the present claims.
Claims
1. A graphite boat piece, comprising a long strip-shaped bearing frame (1), both ends of the bearing frame (1) are provided with graphite boat ears (11) for connecting electrodes, a plurality of bearing units (2) are arranged on the bearing frame (1) at intervals, each bearing unit (2) comprises a hollow area (3) and a first clamping point (41), a second clamping point (42) and a third clamping point (43) which can be used to support a square silicon wafer, the hollow area (3) is located in the area constrained by the first clamping point (41), the second clamping point (42) and the third clamping point (43), characterized in that: the hollow area (3) is filled with a conductive sheet (5) having conductive ability, the thickness of the conductive sheet (5) is less than the thickness of the bearing frame (1), and the conductive sheet (5) is provided with a ventilation hole (51); a plurality of lightening holes (12) are arranged on the bearing frame (1), and the lightening holes (12) are square blind holes. One side of the conductive sheet (5) is coplanar with the bearing frame (1), and the other side is recessed. Both sides of the conductive sheet (5) are recessed compared with both sides of the bearing frame (1).
2. The graphite pan sheet of claim 1, wherein: The conductive sheet (5) is a detachable metal sheet, the edge of which is provided with a turned edge (52) which can be embedded in the hollow area (3), and the bearing frame (1) on the edge of the hollow area (3) is provided with an embedded groove (13) which can be embedded in the turned edge (52), and the depth of the embedded groove (13) is consistent with the thickness of the turned edge (52).
3. The graphite pan sheet of claim 1, wherein: The thickness of the bearing frame is 2-4 mm, and the thickness of the conductive sheet is 0.3-1 mm.
4. The graphite pan sheet according to claim 2 or 3, characterized in that: The ventilation hole (51) is long strip-shaped, and the number is four and is arranged at equal intervals.
5. The graphite pan sheet of claim 1, wherein: A plurality of reinforcing ribs (53) are arranged on the conductive sheet (5) in a cross shape.
6. The graphite pan sheet of claim 1, wherein: The graphite boat piece is the graphite boat piece of any one of claims 1-7.
7. The graphite pan sheet of claim 1, wherein: 8. A graphite boat comprising a plurality of graphite boat pieces, graphite guide rods, graphite blocks and ceramic bushings, characterized in that:
Citation Information
Patent Citations
Bearing device and semiconductor processing equipment
CN106653663A
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CN205789907U
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CN207611760U
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