A servo-driven double swing arm device

Abstract

The present invention discloses a servo-driven double swing arm device, which includes a swing arm rotation control device and a swing arm vertical up-and-down control mechanism. The swing arm rotation control device includes a rotating shaft with an air circuit inside, and the rotating shaft is connected to a rotating servo motor through a coaxial coupler. The swing arm vertical up-and-down control mechanism includes a swing arm middle seat arranged at the bottom of the rotating shaft. Swing arm assemblies are respectively installed on the front and rear sides of the swing arm middle seat in a vertically sliding manner. The swing arm assemblies are drivingly connected to a lifting servo motor, and the lifting servo motor is signal-connected to the control device. Compared with the prior art, the lightweight rotating shaft reduces the rotational inertia, improves the movement accuracy of the swing arm, uses a servo motor for driving to reduce costs, and the air circuit structure composed of a pneumatic slip ring reduces the influence of the air pipe on the high-speed movement of the swing arm, eliminates the pulling of the swing arm by the traditional air circuit connection method, and improves the swing arm setting and accuracy.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor packaging equipment, and in particular to a servo-driven double swing arm device. Background Art

[0002] At present, the domestic semiconductor wafer packaging technology has developed rapidly, and the demand for die bonding equipment for semiconductor wafers is increasing. In the mid- and low-end packaging market, the demand for die bonding efficiency is getting higher and higher, and high efficiency has become one of the important technical indicators for measuring die bonders.

[0003] In the prior art, most semiconductor die bonding equipment adopts a single swing arm type, linear type or double swing arm type robotic arm structure. Among them, the single swing arm type semiconductor die bonding equipment is provided with a rotating shaft swing arm capable of rotating 90° or 180° and a longitudinal shaft structure connecting the rotating shaft swing arm to drive the die bonding head to perform two-axis movement cooperation. This single swing arm type semiconductor die bonding equipment has the disadvantages of relatively low working efficiency and increased cost due to the use of a high-performance motor; the linear type semiconductor die bonding equipment includes a linear motor or a lead screw driving device, and the pickup head performs a linear displacement under the driving action of the linear motor or the lead screw driving device. The width of the frame of the semiconductor wafer and the size of the wafer will cause the periodic moving distance of the pickup head to change, reducing the packaging efficiency; in the existing double swing arm type semiconductor die bonding equipment, the rotation drive adopts a hollow servo motor or a DDR motor, and the Z-axis lifting load acts on the rotation mechanism, resulting in a large load on the rotation mechanism and a large rotational inertia, making it difficult to stop stably. Therefore, it is necessary to make improvements. Summary of the Invention

[0004] Aiming at the deficiencies of the prior art, the purpose of the present invention is to provide a servo-driven double swing arm device to reduce the load of the rotation mechanism in semiconductor die bonding equipment and improve the stability and reliability of the servo-driven swing arm.

[0005] To achieve the above object, the technical solution adopted by the present invention is: a servo-driven double swing arm device, including a control device, a rotating shaft seat, a rotating shaft rotatably connected to the rotating shaft seat, and a rotating servo motor fixed on the top of the rotating shaft seat. The rotating servo motor is electrically connected to the control device, and the output shaft of the rotating servo motor is coaxially connected to the rotating shaft; a swing arm middle seat is provided at the bottom of the rotating shaft, and a swing arm assembly is slidably mounted up and down on the front and rear sides of the swing arm middle seat. The swing arm assembly is drivingly connected to a lifting servo motor, and the lifting servo motor is signal-connected to the control device.

[0006] In a further technical solution, symmetrically arranged first and second swing arm seats are respectively installed on the front and rear sides of the middle seat of the swing arm in a vertically sliding manner. The first swing arm seat is connected to a first lifting servo motor, and a first swing arm is fixedly connected to the outside of the first swing arm seat; the second swing arm seat is connected to a second lifting servo motor, and a second swing arm is fixedly connected to the outside of the second swing arm seat; a first annular groove body is fixedly connected to the upper part of the first swing arm seat, and a second annular groove body is fixedly connected to the upper part of the second swing arm seat. Between the first annular groove body and the first lifting servo motor, and between the second annular groove body and the second lifting servo motor, there are respectively provided a link-type lifting transmission mechanism with the same structure. The link-type lifting transmission mechanism includes a longitudinal link that slides vertically on the side of the rotating shaft seat. The top of the longitudinal link is in transmission connection with the corresponding lifting servo motor, and a link bearing is installed at the bottom of the longitudinal link. The link bearings are respectively installed in the corresponding first annular groove body and the second annular groove body in a rolling manner.

[0007] In a further technical solution, the first annular groove body and the second annular groove body are arranged one above the other. The first annular groove body and the second annular groove body respectively include an arc-shaped groove with the same specifications, and the arc angle of the arc-shaped groove is 180° - 250°.

[0008] In a further technical solution, both ends of the arc-shaped groove are closed to form corresponding rotation limiting parts, and the rotation limiting parts are respectively in abutting limit cooperation with the corresponding link bearings.

[0009] In a further technical solution, lifting travel switch devices are respectively arranged on the front and rear sides of the rotating shaft seat. The lifting travel switch devices are electrically connected to the control device; a travel trigger piece is fixedly connected to the top of the longitudinal link, and the travel trigger piece is in trigger cooperation with the lifting travel switch devices.

[0010] In a further technical solution, a cam is respectively installed on the output shafts of the first lifting servo motor and the second lifting servo motor. The cam is rotationally connected to a cam link, and the bottom of the cam link is hingedly connected to the longitudinal link.

[0011] In a further technical solution, at least one rotating shaft bearing is fixed inside the rotating shaft seat. The rotating shafts are respectively connected in series to each rotating shaft bearing, and a coupling is connected between the top of the rotating shaft and the output shaft of the rotating servo motor.

[0012] In a further technical solution, a pneumatic slip ring assembly is sleeved on the upper middle part of the rotating shaft. The pneumatic slip ring assembly includes a fixed slip ring and a rotating slip ring that are coaxially and rotatably arranged up and down. Among them, the fixed slip ring is fixed to the rotating shaft seat, and the fixed slip ring is provided with a pneumatic connection port for connecting to an external pneumatic device; the rotating slip ring is coaxially connected to the rotating shaft, and an air groove is formed on the upper surface of the rotating slip ring. The air groove is arranged to be closed along the circumferential direction. The lower surface of the fixed slip ring is in airtight cooperation with the upper surface of the rotating slip ring, and the air groove and the lower surface of the fixed slip ring are covered to form a rotating air path. A pneumatic connection port for connecting the swing arm assembly is formed on the side of the rotating slip ring. The pneumatic connection port and the pneumatic connection port are respectively communicated with the rotating air path.

[0013] In a further technical solution, a rotating stroke trigger ring is fixed to the outer edge of the rotating slip ring. The circumferential extension range of the rotating stroke trigger ring is 180° - 330°; a rotating stroke switch device is arranged at a position of the rotating shaft seat close to the rotating shaft. The rotating stroke switch device is electrically connected to the control device, and the rotating stroke switch device and the rotating stroke trigger ring are in trigger cooperation.

[0014] In a further technical solution, a motor protection frame for protecting the rotating servo motor is arranged at the top of the rotating shaft seat, and a dust-proof mesh cover is covered on the motor protection frame; a heat dissipation fan device is fixed to the top of the motor protection frame, and the heat dissipation fan device is electrically connected to the control device.

[0015] After adopting the above structure, the advantages of the present invention compared with the prior art are as follows: The present invention provides a servo-driven double swing arm device for semiconductor packaging equipment. The double swing arms are symmetrically distributed front and back, making the force on the rotating mechanism more balanced, reducing the inertia ratio, and improving the tuning period to improve its stability and production efficiency; the lifting of the swing arm is directly connected to the servo motor through a chute and a connecting rod mechanism, with high efficiency. The lifting mechanism and the rotating mechanism are connected through a chute and a bearing, greatly reducing the load on the rotating motor, enabling it to be driven by a servo motor, improving performance and reducing costs; the double swing arm structure can synchronously complete the picking and placing of chips, saving time and having high production efficiency; the rotating shaft of the double swing arm adopts a titanium alloy material with low density and high rigidity, reducing the rotating load and improving the performance of the rotating motor; the air path structure composed of a pneumatic slip ring reduces the influence of the air pipe on the high-speed movement of the swing arm, eliminates the pulling of the traditional air path connection method on the swing arm, and improves the swing arm tuning and accuracy. Description of the Drawings

[0016] The present invention will be further described below with reference to the drawings and embodiments.

[0017] Figure 1 is a schematic structural diagram of the present invention.

[0018] Figure 2 is a schematic structural diagram of the present invention from a sectional view angle.

[0019] Figure 3 It is a sectional view of the present invention.

[0020] Figure 4 It is a schematic structural view of the connecting rod type lifting transmission mechanism of the present invention.

[0021] Figure 5 It is a schematic structural view of the air circuit slip ring assembly of the present invention.

[0022] Figure 6 It is an exploded schematic view of the air circuit slip ring assembly of the present invention. Specific embodiments

[0023] The following are only the preferred embodiments of the present invention, and do not limit the protection scope of the present invention accordingly.

[0024] A servo-driven double swing arm device, as Figures 1 to 6 shown, includes a control device, a rotating shaft seat 41, a rotating shaft 20 rotatably connected to the rotating shaft seat 41 (the rotating shaft 20 is made of titanium alloy material), and a rotating servo motor 1 fixed on the top of the rotating shaft seat 41. The rotating servo motor 1 is electrically connected to the control device, and is coaxially connected between the output shaft of the rotating servo motor 1 and the rotating shaft 20; a swing arm middle seat is provided at the bottom of the rotating shaft 20, and a swing arm assembly is slidably mounted up and down on the front and rear sides of the swing arm middle seat respectively. The swing arm assembly is drivingly connected to a lifting servo motor, and the lifting servo motor is signal-connected to the control device. A servo-driven double swing arm device for semiconductor packaging equipment, the double swing arms can synchronously pick up and place chips, saving time and having high production efficiency; the double swing arms are symmetrically distributed front and rear, making the rotating mechanism more balanced in force, reducing the inertia ratio, and improving the tuning period so as to improve its stability and production efficiency. The rotating shaft of the double swing arms is made of titanium alloy material with low density and high rigidity, reducing the rotating load and improving the performance of the rotating motor.

[0025] Specifically, the front and rear sides of the swing arm middle seat are respectively slidably installed with a symmetrically arranged first swing arm seat 3111 and a second swing arm seat 3211, the first swing arm seat 3111 is connected to the first lifting servo motor 21, and the outer side of the first swing arm seat 3111 is fixedly connected to the first swing arm 31; the second swing arm seat 3211 is connected to the second lifting servo motor 22, and the outer side of the second swing arm seat 3211 is fixedly connected to the second swing arm 32; the upper part of the first swing arm seat 3111 is fixedly connected to the first annular groove body 311, and the upper part of the second swing arm seat 3211 is fixedly connected to the second annular groove body 321 A connecting rod type lifting transmission mechanism with the same structure is respectively arranged between the first annular groove body 311 and the first lifting servo motor 21, and between the second annular groove body 321 and the second lifting servo motor 22. The connecting rod type lifting transmission mechanism includes a longitudinal connecting rod 232 that slides up and down on the side of the rotating shaft seat 41. The top of the longitudinal connecting rod 232 is connected to the corresponding lifting servo motor. A connecting rod bearing 233 is installed at the bottom of the longitudinal connecting rod 232. The connecting rod bearing 233 is respectively installed in the corresponding first annular groove body 311 and the second annular groove body 321. The swing arm lifting is directly connected to the servo motor through the slide groove and the connecting rod mechanism, which is highly efficient. The lifting mechanism and the rotating mechanism are connected through the slide groove and the bearing, which greatly reduces the load of the rotating motor, so that it can be driven by the servo motor, improve performance and reduce costs.

[0026] Specifically, an air path connected to an external air pressure device is provided inside the rotating shaft 20, and a pneumatic slip ring connected to an external air pressure device is provided at the middle and lower part of the rotating shaft 20. The input end of the pneumatic slip ring is connected to the air path, and the output end is respectively connected to the first swing arm 31 and the second swing arm 32. The air path structure composed of the pneumatic slip ring reduces the influence of the air pipe on the high-speed movement of the swing arm, eliminates the pulling of the swing arm by the traditional air path connection method, and improves the setting and accuracy of the swing arm.

[0027] Specifically, the first annular groove body 311 and the second annular groove body 321 are arranged vertically, and the first annular groove body 311 and the second annular groove body 321 respectively include an arc-shaped groove of the same specification, and the arc angle of the arc-shaped groove is 180°-250°.

[0028] Specifically, the two ends of the arc-shaped groove are closed and form corresponding rotation limit parts, which are respectively matched with the corresponding connecting rod bearings 233. The rotation limit parts are used to limit the rotation axis, which can reduce the loss of the rotation servo motor and improve the positioning accuracy of the swing arm.

[0029] Specifically, a lifting stroke switch device 2322 is respectively provided on the front and rear sides of the rotating shaft seat 41, and the lifting stroke switch device 2322 is electrically connected to the control device; a stroke trigger plate 2321 is fixedly connected to the top of the longitudinal connecting rod 232, and the stroke trigger plate 2321 cooperates with the lifting stroke switch device 2322 for triggering.

[0030] Specifically, a cam 230 is respectively installed on the output shafts of the first lifting servo motor 21 and the second lifting servo motor 22. The cam 230 is rotatably connected to a cam link 231, and the bottom of the cam link 231 is hingedly connected to a longitudinal link 232. This cam-type link structure can complete the periodic linkage of a specific lifting stroke, with a simple structure, high stability and reliability, and high precision.

[0031] Specifically, at least one rotating shaft bearing 411 is fixed inside the rotating shaft seat 41. The rotating shaft 20 is respectively inserted through each rotating shaft bearing 411, and a coupling 410 is connected between the top end of the rotating shaft 20 and the output shaft of the rotating servo motor 1.

[0032] Specifically, a pneumatic slip ring assembly 412 is sleeved on the middle and upper part of the rotating shaft 20. The pneumatic slip ring assembly 412 includes a fixed slip ring 4121 and a rotating slip ring 4122 that are rotatably arranged coaxially up and down. Among them, the fixed slip ring 4121 is fixed to the rotating shaft seat, and the fixed slip ring 4121 is provided with a pneumatic connection port for connecting to an external pneumatic device; the rotating slip ring 4122 is coaxially connected to the rotating shaft 20, and an air groove is provided on the upper surface of the rotating slip ring 4122. The air groove is arranged to be closed along the circumferential direction. The lower surface of the fixed slip ring 4121 is hermetically fitted with the upper surface of the rotating slip ring 4122, and the air groove and the lower surface of the fixed slip ring 4121 are covered to form a rotating air path. A pneumatic connection port for connecting to the swing arm assembly is provided on the side of the rotating slip ring 4122, and the pneumatic connection port and the pneumatic connection port are respectively communicated with the rotating air path.

[0033] Specifically, a rotating stroke trigger ring 4131 is fixed on the outer edge of the rotating slip ring 4122. The circumferential extension range of the rotating stroke trigger ring 4131 is 180° - 330°; a rotating stroke switch device 4132 is arranged at a position of the rotating shaft seat 41 close to the rotating shaft 20. The rotating stroke switch device 4132 is electrically connected to the control device, and the rotating stroke switch device 4132 is trigger-matched with the rotating stroke trigger ring 4131.

[0034] Preferably, the fixed slip ring 4121 is provided with a first air pressure inlet 4123 and a second air pressure inlet 4124 which are respectively externally connected to different air pressure devices. The first air pressure inlet 4123 and the second air pressure inlet 4124 form a distance difference with the center point of the fixed slip ring 4121 as a reference, and the second air pressure inlet 4124 is located outside the first air pressure inlet 4123; the upper surface of the rotating slip ring 4122 is provided with two first air grooves 4125 and second air grooves 4126 with a radial interval, and the first air grooves 4125 and the second air grooves 4126 respectively surround and form a first rotating air path and a second rotating air path with the lower surface of the fixed slip ring 4121; the side parts of the rotating slip ring 4122 are respectively provided with a first air pressure outlet port and a second air pressure outlet port. The inside of the first air groove 4125 is provided with a first groove inner opening 4002 connecting the first air pressure outlet port, and the first air pressure outlet port penetrates through the circumferential side surface of the rotating slip ring 4122 and forms a first external interface 4001; the inside of the second air groove 4126 is provided with a second groove inner opening 4004 connecting the second air pressure outlet port, and the second air pressure outlet port penetrates through the circumferential side surface of the rotating slip ring 4122 and forms a second external interface 4003; the first external interface 4001 and the second external interface 4003 are respectively connected to the first swing arm 31 and the second swing arm 32 on both sides through air pipes, and the independent lifting actions of the first swing arm 31 and the second swing arm 32 are realized.

[0035] Specifically, a motor protection frame 42 for protecting the rotating servo motor 1 is arranged at the top of the rotating shaft seat 41, and the motor protection frame 42 is covered with a dust-proof mesh cover; a heat dissipation fan device 43 is fixed at the top of the motor protection frame 42, and the heat dissipation fan device 43 is electrically connected to the control device.

[0036] The above content is only a preferred embodiment of the present invention. For those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. The content of this specification should not be construed as a limitation to the present invention.

Claims

1. A servo-driven double swing arm device, characterized in that: It includes a control device, a rotating shaft seat (41), a rotating shaft (20) rotatably connected to the rotating shaft seat (41), and a rotating servo motor (1) fixed on the top of the rotating shaft seat (41). The rotating servo motor (1) is electrically connected to the control device, and the output shaft of the rotating servo motor (1) is coaxially connected to the rotating shaft (20). A swing arm middle seat is provided at the bottom of the rotating shaft (20). Swing arm assemblies are respectively slidably mounted up and down on the front and rear sides of the swing arm middle seat. The swing arm assemblies are drivingly connected to a lifting servo motor, and the lifting servo motor is signal-connected to the control device. An air path slip ring assembly (412) is sleeved on the middle upper part of the rotating shaft (20). The air path slip ring assembly (412) includes a fixed slip ring (4121) and a rotating slip ring (4122) that are coaxially rotatably arranged up and down. Among them, the fixed slip ring (4121) is fixed to the rotating shaft seat. The fixed slip ring (4121) is provided with a pneumatic connection port for connecting to an external pneumatic device. The rotating slip ring (4122) is coaxially connected to the rotating shaft (20). An air groove is provided on the upper surface of the rotating slip ring (4122). The air groove is closed along the circumferential direction. The lower surface of the fixed slip ring (4121) is hermetically fitted with the upper surface of the rotating slip ring (4122), and the air groove and the lower surface of the fixed slip ring (4121) are covered to form a rotating air path. A pneumatic connection outlet for connecting the swing arm assembly is provided on the side of the rotating slip ring (4122). The pneumatic connection port and the pneumatic connection outlet are respectively communicated with the rotating air path. At least one rotating shaft bearing (411) is fixed inside the rotating shaft seat (41). The rotating shaft (20) is respectively inserted through each rotating shaft bearing (411). A coupling (410) is connected between the top end of the rotating shaft (20) and the output shaft of the rotating servo motor (1). The first external interface (4001) and the second external interface (4003) are respectively connected to the first swing arm (31) and the second swing arm (32) on both sides through air pipes, and the independent lifting actions of the first swing arm (31) and the second swing arm (32) are realized.

2. The servo-driven double swing arm device according to claim 1, wherein: A first swing arm seat (3111) and a second swing arm seat (3211) are symmetrically mounted on the front and rear sides of the swing arm middle seat in a sliding manner up and down, respectively; the first swing arm seat (3111) is connected to a first lifting servo motor (21), and the outer side of the first swing arm seat (3111) is fixedly connected to a first swing arm (31); the second swing arm seat (3211) is connected to a second lifting servo motor (22), and the outer side of the second swing arm seat (3211) is fixedly connected to a second swing arm (32); the upper part of the first swing arm seat (3111) is fixedly connected to a first annular groove body (311), and the upper part of the second swing arm seat (3211) is fixedly connected to a second annular groove body (321). A connecting rod type lifting transmission mechanism with the same structure is respectively provided between the first annular groove body (311) and the first lifting servo motor (21), and between the second annular groove body (321) and the second lifting servo motor (22). The connecting rod type lifting transmission mechanism comprises a longitudinal connecting rod (232) which slides up and down on the side of the rotating shaft seat (41), the top of the longitudinal connecting rod (232) is drivingly connected to the corresponding lifting servo motor, and a connecting rod bearing (233) is installed at the bottom of the longitudinal connecting rod (232), and the connecting rod bearing (233) is rollingly installed in the corresponding first annular groove body (311) and the second annular groove body (321).

3. The servo-driven double swing arm device according to claim 2, characterized in that: The first annular groove body (311) and the second annular groove body (321) are arranged vertically, and the first annular groove body (311) and the second annular groove body (321) respectively comprise an arc-shaped groove of the same specification, and the arc angle of the arc-shaped groove is 180°-250°.

4. A servo-driven double swing arm device according to claim 3, characterized in that: The two ends of the circular arc groove are arranged in a closed manner and form corresponding rotation limiting parts, and the rotation limiting parts are respectively matched with the corresponding connecting rod bearings (233) for abutment and limiting.

5. The servo-driven double swing arm device according to claim 4, characterized in that: A lifting stroke switch device (2322) is provided on the front and rear sides of the rotating shaft seat (41), respectively, and the lifting stroke switch device (2322) is electrically connected to the control device; a stroke trigger plate (2321) is fixedly connected to the top of the longitudinal connecting rod (232), and the stroke trigger plate (2321) is triggered and matched with the lifting stroke switch device (2322).

6. The servo-driven double swing arm device according to claim 5, characterized in that: The output shafts of the first lifting servo motor (21) and the second lifting servo motor (22) are respectively provided with a cam (230), the cam (230) being rotatably connected to a cam connecting rod (231), the bottom of the cam connecting rod (231) being hingedly connected to the longitudinal connecting rod (232).

7. A servo-driven double swing arm device according to claim 1, characterized in that: A rotation stroke trigger ring piece (4131) is fixed to the outer edge of the rotation slip ring (4122), and the extension range of the rotation stroke trigger ring piece (4131) in the circumferential direction is 180°-330°; a rotation stroke switch device (4132) is provided at a position of the rotating shaft seat (41) close to the rotating shaft (20), the rotation stroke switch device (4132) is electrically connected to the control device, and the rotation stroke switch device (4132) and the rotation stroke trigger ring piece (4131) are triggered and matched.

8. A servo-driven double swing arm device according to claim 1, characterized in that: A motor guard frame (42) for protecting the rotary servo motor (1) is provided at the top of the rotary shaft seat (41), and a dust-proof mesh cover is covered on the motor guard frame (42); a heat dissipation fan device (43) is fixed at the top of the motor guard frame (42), and the heat dissipation fan device (43) is electrically connected to the control device.

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