Display panel, mask, mask assembly, and method for manufacturing mask assembly

Abstract

A display panel (1000), a mask plate (120, 120') for evaporation, a mask plate assembly (110, 110'), and a method for manufacturing the mask plate assembly (110, 110'). The display panel (1000) comprises: a substrate (30); a display area (1) and a peripheral area (2); wherein a first type of virtual sub-pixel unit (31, 31A) and a second type of virtual sub-pixel unit (31', 31A') are provided in the peripheral area (2), the first type of virtual sub-pixel unit (31, 31A) comprising a first virtual luminescent material layer (32, 43A) and a first virtual auxiliary luminescent layer (42A), and the second type of virtual sub-pixel unit (31', 31A') comprising a second virtual A luminescent material layer (32', 43A'), and a second virtual auxiliary luminescent layer (42A'); wherein the first virtual luminescent material layer (32, 43A) and the first structural layer in the first virtual auxiliary luminescent layer (42A) are arranged in the same layer as the second virtual luminescent material layer (32', 43A') and the second structural layer in the second virtual auxiliary luminescent layer (42A'), and at least one of the size and shape of the orthographic projection of the second structural layer on the base substrate (30) is different from the orthographic projection of the first structural layer on the base substrate (30).

Description

Technical Field

[0001] The present disclosure relates to the fields of display technology and mask technology, and in particular to a display panel, a mask, a mask assembly, and a method for manufacturing the mask assembly. Background Art

[0002] With advancements in display technology, organic light-emitting diode (OLED) displays are a hot topic in current flat panel display research. However, the fabrication of OLED displays often requires the use of masks for vapor deposition to form various patterned film layers, such as the organic light-emitting layer.

[0003] Before using a mask to form a patterned film layer, the mask must be stretched and welded to a mask frame to form a mask assembly. Before welding the mask to the mask frame, the mask and mask frame must be aligned to prevent misalignment. With the advent of high-resolution OLED display panels, the alignment requirements for masks and mask frames have become even higher. A more efficient mask and mask frame alignment solution is needed. Summary of the Invention

[0004] An embodiment of the present disclosure provides a display panel, comprising: a base substrate; and a display area and a peripheral area arranged on the base substrate, wherein the peripheral area is arranged around the display area; wherein a plurality of virtual sub-pixel units are arranged in the peripheral area, and the plurality of virtual sub-pixel units include a first type of virtual sub-pixel unit and a second type of virtual sub-pixel unit, the first type of virtual sub-pixel unit includes a first virtual luminescent material layer and a first virtual auxiliary luminescent layer, the second type of virtual sub-pixel unit includes a second virtual luminescent material layer and a second virtual auxiliary luminescent layer, the second virtual luminescent material layer and the first virtual luminescent material layer are made of the same material and are arranged in the same layer, the second virtual auxiliary luminescent layer and the first virtual auxiliary luminescent layer are made of the same material and are arranged in the same layer, the first virtual auxiliary luminescent layer is located on the side of the first virtual luminescent material layer facing the base substrate and is located on the base substrate The board faces the side of the first virtual luminescent material layer, the second virtual auxiliary luminescent layer is located on the side of the second virtual luminescent material layer facing the base substrate and on the side of the base substrate facing the second virtual luminescent material layer, the orthographic projection of the first virtual luminescent material layer on the base substrate is at least partially overlapped with the orthographic projection of the first virtual auxiliary luminescent layer on the base substrate, and the orthographic projection of the second virtual luminescent material layer on the base substrate is at least partially overlapped with the orthographic projection of the second virtual auxiliary luminescent layer on the base substrate; wherein, the first structural layer in the first virtual luminescent material layer and the first virtual auxiliary luminescent layer is arranged in the same layer as the second structural layer in the second virtual luminescent material layer and the second virtual auxiliary luminescent layer, and at least one of the size and shape of the orthographic projection of the second structural layer on the base substrate is different from the orthographic projection of the first structural layer on the base substrate.

[0005] In some embodiments, in at least one of the first direction and the second direction, a maximum dimension of an orthographic projection of the second virtual luminescent material layer on the substrate is 15% to 30% larger than a maximum dimension of an orthographic projection of the first virtual luminescent material layer on the substrate.

[0006] In some embodiments, in at least one of the first direction and the second direction, the maximum size of the orthographic projection of the second virtual auxiliary light-emitting layer on the base substrate is 15% to 30% larger than the maximum size of the orthographic projection of the first virtual auxiliary light-emitting layer on the base substrate, and the second direction is perpendicular to the first direction.

[0007] In some embodiments, the multiple virtual sub-pixel units also include a third type of virtual sub-pixel unit and a fourth type of virtual sub-pixel unit, the third type of virtual sub-pixel unit includes a third virtual luminescent material layer, the fourth type of virtual sub-pixel unit includes a fourth virtual luminescent material layer, the third virtual luminescent material layer and the fourth virtual luminescent material layer are made of the same material, and the materials of the third virtual luminescent material layer and the fourth virtual luminescent material layer are different from the materials of the first virtual luminescent material layer and the second virtual luminescent material layer; wherein, at least one of the size and shape of the orthographic projection of the fourth virtual luminescent material layer on the substrate is different from the orthographic projection of the third virtual luminescent material layer on the substrate.

[0008] In some embodiments, in at least one of a first direction and a second direction, the maximum size of the orthographic projection of the fourth virtual light-emitting material layer on the substrate is 15% to 30% larger than the maximum size of the orthographic projection of the third virtual light-emitting material layer on the substrate, and the second direction is perpendicular to the first direction.

[0009] In some embodiments, a size of an orthographic projection of the fourth virtual luminescent material layer on the substrate in at least one of the first direction and the second direction is different from a size of an orthographic projection of the second virtual luminescent material layer on the substrate.

[0010] In some embodiments, the third type of virtual sub-pixel unit also includes a third virtual auxiliary light-emitting layer, which is located on the side of the third virtual light-emitting material layer facing the substrate and on the side of the substrate facing the third virtual light-emitting material layer. The fourth type of virtual sub-pixel unit also includes a fourth virtual auxiliary light-emitting layer, which is located on the side of the fourth virtual light-emitting material layer facing the substrate and on the side of the substrate facing the fourth virtual light-emitting material layer. The fourth virtual auxiliary light-emitting layer and the third virtual auxiliary light-emitting layer are made of the same material, wherein at least one of the size and shape of the orthographic projection of the fourth virtual auxiliary light-emitting layer on the substrate substrate is different from the orthographic projection of the third virtual auxiliary light-emitting layer on the substrate substrate.

[0011] In some embodiments, in at least one of a first direction and a second direction, the maximum size of the orthographic projection of the fourth virtual auxiliary light-emitting layer on the base substrate is 15% to 30% larger than the maximum size of the orthographic projection of the third virtual auxiliary light-emitting layer on the base substrate, and the second direction is perpendicular to the first direction.

[0012] In some embodiments, the display area includes multiple display sub-pixel units, and at least one display sub-pixel unit includes: a first electrode, a display auxiliary light-emitting layer located on a side of the first electrode away from the base substrate, a display light-emitting material layer located on a side of the display auxiliary light-emitting layer away from the base substrate, and a second electrode located on a side of the display light-emitting material layer away from the base substrate, wherein the multiple display sub-pixel units include display sub-pixel units of a first color and display sub-pixel units of a second color, the display auxiliary light-emitting layer and the second virtual auxiliary light-emitting layer in the display sub-pixel unit of the first color are made of the same material and arranged in the same layer, and the display light-emitting material layer and the second virtual light-emitting material layer in the display sub-pixel unit of the first color are made of the same material and arranged in the same layer; the display auxiliary light-emitting layer and the fourth virtual auxiliary light-emitting layer in the display sub-pixel unit of the second color are made of the same material and arranged in the same layer, and the display light-emitting material layer and the fourth virtual light-emitting material layer in the display sub-pixel unit of the second color are made of the same material and arranged in the same layer.

[0013] In some embodiments, a projection of at least one of the second virtual light-emitting material layer, the second virtual auxiliary light-emitting layer, the fourth virtual light-emitting layer, and the fourth virtual auxiliary light-emitting layer on the base substrate has an axisymmetric shape.

[0014] In some embodiments, at least one of the first type of virtual sub-pixel unit and the second type of virtual sub-pixel unit further includes: a first electrode, the first electrode being located on a side of the base substrate facing the first virtual auxiliary light-emitting layer and the second virtual auxiliary light-emitting layer; a pixel defining layer, the pixel defining layer being located on a side of the first electrode away from the base substrate and on a side of the first virtual auxiliary light-emitting layer and the second virtual auxiliary light-emitting layer facing the base substrate; and a second electrode, the second electrode being located on a side of the first virtual light-emitting material layer and the second virtual light-emitting material layer away from the base substrate, wherein the pixel defining layer separates the first electrode from the first virtual auxiliary light-emitting layer and the second virtual auxiliary light-emitting layer.

[0015] An embodiment of the present disclosure also provides a mask plate for evaporation, comprising: a mask pattern area, the mask pattern area including one or more groups of evaporation patterns, at least one group of evaporation patterns including: a display pattern area, a display pixel opening is provided in the display pattern area, the display pixel opening is used to evaporate the film layer in the sub-pixel structure on the display panel; and a peripheral pattern area, the peripheral pattern area is located at the periphery of the display pattern area, a positioning opening is provided in the peripheral pattern area, the positioning opening is used to position the mask plate, and a virtual pixel opening is also provided in the peripheral pattern area, the virtual pixel opening is used to evaporate the film layer in the virtual sub-pixel structure on the display panel, wherein at least one of the size and shape of the positioning opening is different from the display pixel opening and the virtual pixel opening.

[0016] In some embodiments, in at least one of a first direction and a second direction, the maximum size of the positioning opening is greater than the maximum size of the display pixel opening and the virtual pixel opening, and the second direction is perpendicular to the first direction.

[0017] In some embodiments, in at least one of the first direction and the second direction, the maximum dimension of the positioning opening is 15% to 30% larger than the maximum dimensions of the display pixel opening and the virtual pixel opening.

[0018] In some embodiments, a plurality of positioning openings are provided in the peripheral pattern area, and the plurality of positioning openings are symmetrically distributed relative to the center of the display pattern area.

[0019] In some embodiments, the plurality of positioning openings include a first positioning opening, a second positioning opening, a third positioning opening, and a fourth positioning opening, and the first positioning opening, the second positioning opening, the third positioning opening, and the fourth positioning opening are respectively located at four corners of the mask pattern area of ​​the mask template.

[0020] In some embodiments, the mask plate also includes a fixing area and a thickness transition area located between the fixing area and the mask pattern area. The fixing area is located around the mask pattern area and is used to be fixed to the mask plate frame. The thickness of the fixing portion is greater than the thickness of the mask pattern area.

[0021] An embodiment of the present disclosure also provides a mask template assembly, comprising: one or more mask templates as described in any of the above embodiments; and a mask template frame, wherein the mask template frame is used to support and fix the mask template, wherein the mask template also includes a fixing area, which is located around the mask pattern area and is fixed to the mask template frame.

[0022] In some embodiments, the mask template assembly includes a plurality of the mask templates, the pattern area of ​​at least one of the mask templates includes multiple groups of evaporation patterns, and there is a spacing area between two adjacent groups of evaporation patterns, and the mask template assembly also includes: at least one support bar, which is used to support the mask template, and the positive projection of the support bar on the mask template falls into the spacing area of ​​the mask template; and at least one covering bar, which is located at the boundary of adjacent mask templates and covers the gap between adjacent mask templates.

[0023] An embodiment of the present disclosure also provides a method for manufacturing a mask template assembly, the method comprising: performing preliminary alignment of the mask template and the mask template frame using positioning openings on the mask template; after the preliminary alignment is successful, performing fine alignment of the mask template and the mask template frame using display pixel openings or virtual pixel openings on the mask template; and fixing the finely aligned mask template and the mask template assembly together.

[0024] In some embodiments, the use of positioning openings on the mask plate to preliminarily align the mask plate and the mask plate frame includes: providing a reference position of the positioning openings on the mask plate relative to the mask plate frame; capturing the actual position of the positioning openings on the mask plate relative to the mask plate frame; calculating the error between the reference position and the actual position, and determining whether the mask plate and the mask plate frame have been successfully aligned based on the error. If the error is within a first threshold range, the alignment is considered successful; otherwise, the actual position of the mask plate is readjusted for realignment.

[0025] In some embodiments, the precisely aligning the mask and the mask frame using the display pixel openings or virtual pixel openings on the mask includes: providing a reference position of a predetermined display pixel opening or virtual pixel opening on the mask relative to the mask frame;

[0026] capturing the actual position of the predetermined display pixel openings or virtual pixel openings on the mask relative to the mask frame;

[0027] An error between a reference position and an actual position of the predetermined display pixel opening or virtual pixel opening relative to the frame is calculated, and based on the error, it is determined whether the mask plate and the frame have been successfully aligned. If the error is within a second threshold range, the alignment is considered successful; otherwise, the actual position of the mask plate is readjusted for realignment, and the second threshold is less than the first threshold. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Other features, objects and advantages of the present disclosure will become more apparent from a reading of the detailed description of non-limiting embodiments made with reference to the following drawings:

[0029] Figure 1A is a schematic diagram of an OLED display panel;

[0030] Figure 1B for Figure 1A An enlarged schematic diagram of a boundary area P between a display area and a peripheral area of ​​an OLED display panel is shown;

[0031] Figure 1C for Figure 1A Schematic diagram of the light-emitting element film layer structure of the sub-pixel unit in the display area of ​​the OLED display panel shown;

[0032] Figure 1D for Figure 1A A schematic diagram of the film structure of a virtual sub-pixel unit of a first color in the peripheral area of ​​an OLED display panel is shown;

[0033] Figure 1E for Figure 1A Schematic diagram of the film structure of the virtual sub-pixel unit of the second color in the peripheral area of ​​the OLED display panel shown;

[0034] Figure 1F for Figure 1A A schematic diagram of the film structure of another virtual sub-pixel unit of the first color in the peripheral area of ​​the OLED display panel is shown;

[0035] Figure 2 is a schematic diagram of a mask assembly according to some embodiments of the present disclosure;

[0036] Figure 3A is a schematic diagram of a mask according to some embodiments of the present disclosure;

[0037] Figure 3B for Figure 3A An enlarged schematic diagram of the local E in FIG;

[0038] Figure 4 For the Figure 3B A schematic cross-sectional view taken along line AA in FIG.

[0039] Figure 5 The figure schematically shows the alignment operation of the mask and the mask frame in forming the mask assembly;

[0040] Figure 6 Schematically illustrates a flow chart for manufacturing a mask assembly according to some embodiments of the present disclosure;

[0041] Figure 7A Schematic diagrams of masks according to other embodiments of the present disclosure;

[0042] Figure 7B for Figure 7A An enlarged schematic diagram of the local F in FIG;

[0043] Figure 8 A schematic diagram showing the process of evaporating a film layer on a substrate to be evaporated using a mask assembly is shown;

[0044] Figure 9A is a schematic diagram of a mask according to some other embodiments of the present disclosure; and

[0045] Figure 9B Schematic diagram of a mask assembly according to some other embodiments of the present disclosure. DETAILED DESCRIPTION

[0046] The present disclosure will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the relevant invention and are not intended to limit the invention. It should also be noted that, for ease of description, only portions relevant to the invention are shown in the accompanying drawings.

[0047] It should be noted that, unless there is any conflict, the embodiments and features in the embodiments of the present disclosure may be combined with each other.

[0048] Furthermore, in the following detailed description, for ease of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. However, it will be apparent that one or more embodiments can be practiced without these specific details.

[0049] It should be understood that, although the terms first, second, etc. can be used here to describe different elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, without departing from the scope of the exemplary embodiments, the first element can be named as the second element, and similarly, the second element can be named as the first element. As used herein, the term "and / or" includes any combination and all combinations of one or more related listed items.

[0050] It should be understood that when an element or layer is referred to as being "formed on" another element or layer, the element or layer may be formed directly or indirectly on the other element or layer. That is, for example, there may be intermediate elements or intermediate layers. Conversely, when an element or layer is referred to as being "formed directly on" another element or layer, there are no intermediate elements or intermediate layers. Other terms used to describe the relationship between elements or layers (e.g., "between" versus "directly between," "adjacent" versus "directly adjacent," etc.) should be interpreted in a similar manner.

[0051] The terms used herein are for the purpose of describing specific embodiments only and are not intended to limit the embodiments. As used herein, unless the context clearly indicates otherwise, the singular form is intended to include the plural form. It will also be understood that when the terms "comprise" and / or "include" are used herein, the presence of the features, wholes, steps, operations, elements and / or components is indicated, but the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or combinations thereof is not excluded.

[0052] In this document, unless otherwise specified, the expressions "located on the same layer" or "disposed on the same layer" generally mean that the first component and the second component can be made of the same material and can be formed by the same patterning process. The expressions "located on different layers" or "disposed on different layers" generally mean that the first component and the second component are formed by different patterning processes.

[0053] Figure 1A schematically shows an OLED display panel 1000, which includes a display area 1 and a peripheral area 2 surrounding the display area 1. The peripheral area 2 can be arranged around the display area 1, for example. A plurality of sub-pixel units are provided in the display area 1, each of which includes a light-emitting structure and a pixel driving circuit. The light-emitting structure includes, for example, a cathode, an anode, and a light-emitting functional layer located between the cathode and the anode. The light-emitting functional layer can include, for example, an organic light-emitting layer, a hole transport layer (located between the organic light-emitting layer and the anode), and an electron transport layer (located between the organic light-emitting layer and the cathode). The pixel driving circuit can include, for example, electronic devices such as thin-film transistors and storage capacitors. The peripheral area 2 is mainly used for arranging wiring and some peripheral electronic devices (such as driver ICs (integrated circuits)). However, in order to prevent the sub-pixel units in the display area 1 close to the peripheral area 2 from being affected by the peripheral area 2, a transition area 3 is provided in the area of ​​the peripheral area 2 adjacent to the display area 1. Some virtual sub-pixel units 31 can be provided in the transition area 3. Figure 1B An enlarged view of a region P near the boundary between the display region 1 and the peripheral region 2 is shown. Figure 1B FIG. 1 shows the display sub-pixel units 11 in the display area 1 and the dummy sub-pixel units located in the transition area 3. The provision of such dummy sub-pixel units can provide a similar environment for the display sub-pixel units 11 in the display area 1 near the peripheral area 2 as for the display sub-pixel units 11 in the display area 1 far from the peripheral area 2, thereby preventing differences in display brightness between different display sub-pixel units 11.

[0054] The organic light-emitting layer in the OLED display panel is an essential structure in the film structure for achieving light emission. When the display panel is working, the organic light-emitting layer can be stimulated to emit light by controlling the voltage applied to the anode and cathode. The organic light-emitting layer can be produced, for example, by vapor deposition. In the process of vapor deposition of the organic light-emitting layer, a mask (or high-precision metal mask (FMM)) assembly is required. The mask assembly generally includes a mask and a mask frame for holding the mask. The mask is generally fixed to the mask frame by welding.

[0055] Figure 2 The mask assembly 100 according to some embodiments of the present disclosure is shown. The mask assembly 100 includes a mask frame 110 and three masks 120 fixed to the mask frame 110. It should be noted that, Figure 2 The number of mask plates 120 shown in the figure is merely exemplary, and the embodiments of the present disclosure are not limited thereto. For example, a mask plate assembly 100 may include one mask plate 120, two mask plates 120, four mask plates 120, or more mask plates 120. The mask plate assembly 100 may also include a covering strip 130, which is located on the side of the mask plate away from the mask plate frame 110, and is used to cover the gap between adjacent mask plates 120, and is used to prevent the evaporated material from passing through the gap between adjacent mask plates to reach the substrate to be evaporated during evaporation. Multiple mask plates 120 located on the same mask plate frame 110 can be arranged side by side. Figure 2 In the example, each mask plate 120 is provided with only one set of evaporation patterns, that is, the patterns on the entire mask plate 120 are only used to evaporate the patterns on one display panel. However, the embodiments of the present disclosure are not limited thereto. For example, for Figure 9A and Figure 9B The mask plate 120' shown in the figure can be provided with multiple groups of evaporation patterns 128 on the same mask plate 120'. Each group of evaporation patterns 128 corresponds to one display panel, that is, using such a mask plate 120', the film layer structures on multiple display panels can be evaporated at the same time. Figure 9B As can be seen above, the mask plate assembly 100' may further include one or more support bars 140 for supporting the mask plate 120'. The orthographic projections of the support bars 140 on the mask plate 120' fall within the spacers 129 of the mask plate 120'. The spacers 129 are located between adjacent vapor deposition patterns 128 and serve to separate adjacent vapor deposition patterns 128. The support bars 140 may be formed separately from the mask bars 130, or may be integrally formed.

[0056] Figure 3AThe mask plate 120 according to some embodiments of the present disclosure is shown. The mask plate 120 includes a mask pattern area 121 and a fixing area 122. The fixing area 122 is used to fix with the mask plate frame 110, for example, by welding. The fixing area 122 is located around the mask pattern area 121. In order to facilitate the fixing operation (such as welding operation), the thickness of the fixing area 122 can be greater than the thickness of the mask pattern area 121. The mask pattern area 121 includes a display pattern area 123 (at Figure 3A In the display pattern area 123, there are provided a plurality of display pixel openings 125 (which may be arranged in an array, for example), and the display pixel openings 125 are used for evaporating the film layer (such as the organic light-emitting layer) in the display sub-pixel structure on the display panel. The so-called display sub-pixel structure refers to the sub-pixel structure for generating image pixels in the display area of ​​the display panel, which may include a light-emitting structure, etc. The peripheral pattern area 124 is located around the display pattern area 123. Figure 3A In the illustrated example, the peripheral pattern region 124 is arranged to surround the display pattern region 123. Positioning openings 126 are provided in the peripheral pattern region 124. During the manufacturing process of the mask plate assembly 100 or 100', before the mask plate 120 is secured to the mask plate frame 110, the mask plate 120 needs to be positioned relative to the mask plate frame 110 to ensure that the display pixel openings 125 on the mask plate 120 are correctly aligned with the substrate 200 to be deposited during the evaporation process. When multiple sets of evaporation patterns 128 are provided on the same mask plate, each set of evaporation patterns 128 can, for example, include a display pattern region 123 and a peripheral pattern region 124.

[0057] Figure 8 The schematic diagram illustrates the process of evaporating a film layer onto a substrate 200 using mask assemblies 100 and 100'. As can be seen from the figure, during the evaporation process, the mask assemblies 100 and 100' are placed between the evaporation source 300 and the substrate 200 to be deposited. The organic evaporation material emitted from the evaporation source 300 can pass through the pixel openings 125 and reach the corresponding locations on the substrate 200. However, the locations on the substrate 200 corresponding to the unopened portions of the mask 120 are blocked by the organic evaporation material and are either not deposited with the organic material or only deposited with a very small amount of the organic material. This allows the desired organic film layer structure to be formed on the substrate 200. If the mask 120 and the mask frame 110 are misaligned relative to each other, the display pixel openings 125 on the mask 120 may be misaligned with their correct positions on the substrate 200, resulting in a decrease in product yield.

[0058] Figure 5The process of aligning a mask 120 relative to a mask frame 110 according to some embodiments of the present disclosure is illustrated. Prior to the alignment operation, the mask frame 110 is fixed, and a reference coordinate system is established based on the mask frame 110. The coordinates of the desired position (or reference position) of the positioning opening 126 on the mask 120 in the reference coordinate system are determined (e.g., the coordinates of the reference position are (x0, y0)). Then, after the mask 120 is loaded, a position capturer (e.g., a camera) 400 is used to determine the coordinates of the actual position of the positioning opening 126 on the mask 120 in the reference coordinate system (e.g., the coordinates of the actual position are (x, y)). The error between the coordinates (x0, y0) of the reference position of the positioning opening 126 and the coordinates (x, y) of the actual position are then calculated. The position of the mask 120 relative to the mask frame 110 is then adjusted based on the error, gradually reducing the error until it falls below a certain threshold. For example, the absolute value or square of (x-x0) and the absolute value or square of (y-y0) must be less than a certain threshold value for the alignment to be considered successful. In some embodiments of the present disclosure, the reference position of the center of the positioning opening 126 can be used as the reference position of the positioning opening 126, while the actual position of the center of the positioning opening 126 can be used as the actual position of the positioning opening 126. In some embodiments, at least one of the position capturer (e.g., a camera) 400 and the mask 120 is movable (e.g., horizontally) to facilitate the capture of the positioning opening 126. Figure 5 Only a small number of positioning openings 126 and display pixel openings 125 are schematically shown.

[0059] For display panels with lower resolution and larger size, certain display pixel openings 125 can be directly selected for alignment, or the shape and size of the positioning openings 126 do not require special design. However, for high-resolution display panels, directly using the display pixel openings 125 to align the mask plate 120 and the mask plate frame 110 may cause problems. The higher the resolution of the OLED display panel, the smaller the size of the organic light-emitting layer in the sub-pixel unit required, and the corresponding smaller the size of the display pixel openings 125 on the mask plate 120. For example, the size of the display pixel openings 125 of the mask plate 120 with a resolution of 500 PPI is approximately 35 μm by 60 μm, while the size of the display pixel openings 125 of the mask plate 120 with a resolution of 1000 PPI is approximately 15 μm by 35 μm. As described above, during the process of aligning the mask plate 120 and the mask plate frame 110, the position of the openings of the mask plate 120 is captured by a position capturer (e.g., a camera) 400. The camera's field of view is fixed. When the apertures are smaller and more densely distributed, the number of apertures within the same field of view of the camera increases significantly. In this case, if the sizes and shapes of the positioning apertures 126 and the display pixel apertures 125 are not differentiated, the camera may misalign the apertures during rapid scanning, thereby affecting the efficiency of the alignment operation.

[0060] To this end, in the embodiment of the present disclosure, a positioning opening 126 is designed, which has a shape and / or size that is somewhat different from the display pixel opening 125. In other words, at least one of the size and shape of the positioning opening 126 is different from the display pixel opening 125. For example, Figure 3A and Figure 3B In the example given, the display pixel opening 125 has a hexagonal shape. The display pixel opening 125 is in a first direction (ie Figure 3B The maximum size in the X direction is x2, and the maximum size in the second direction (i.e. Figure 3B The maximum dimension in the Y direction is y2. The positioning opening 126 has an oblong shape. Figure 3B The maximum size in the X direction is x1, and the maximum size in the second direction (i.e. Figure 3BThe maximum dimension in the Y direction (in the Y direction) is y1. Here, x1 is greater than x2, and y1 is greater than y2. From the perspective of convenient alignment, it is advantageous for the size of the positioning opening 126 to be larger than the display pixel opening 125. This allows the position capturer 400 to more easily capture the position of the positioning opening 126, thereby improving alignment efficiency. If the maximum dimension of the positioning opening 126 is not much different from the maximum dimension of the display pixel opening 125, the positioning opening 126 and the display pixel opening 125 will not be distinguishable, which is not conducive to the alignment of the mask and the mask frame. If the maximum dimension of the positioning opening 126 exceeds the maximum dimension of the display pixel opening 125 by too much, it may also damage the strength of the local part of the mask. In some embodiments, the maximum dimension of the positioning opening 126 in the first direction is 15% to 30% larger than the maximum dimension of the display pixel opening 125. In some embodiments, the maximum dimension of the positioning opening 126 in the second direction is 15% to 30% larger than the maximum dimension of the display pixel opening 125. However, this is not required. For example, in some embodiments, the maximum dimension of the positioning opening 126 in the first direction and the maximum dimension of the second direction can both be smaller than the corresponding dimensions of the display pixel opening 125, or one of the maximum dimension of the positioning opening 126 in the first direction and the maximum dimension of the second direction can be larger than the corresponding dimension of the display pixel opening 125, while the other can be smaller. This is sufficient as long as the difference between the positioning opening 126 and the pixel opening 125 is sufficient to enable the position capturer 400 to more quickly and accurately capture the position of the positioning opening 126. In some embodiments, the positioning opening 126 can have an axisymmetric shape to uniformly distribute stress near the positioning opening 126.

[0061] In another embodiment, the positioning opening 126 may have a shape that is more obviously different from the display pixel opening 125. For example, Figure 7A and 7B As shown, the positioning opening 126 can have a circular shape. Figure 3A 、 3B The shapes of the positioning openings 126 shown in Figures 7A and 7B are merely schematic, and the embodiments of the present disclosure are not limited thereto. For example, the positioning openings 126 may also have various shapes such as elliptical, rectangular, hexagonal, etc.

[0062] As mentioned above, the display area 1 of the OLED display panel is provided with a display sub-pixel unit 11, and the transition area 3 of the peripheral area 2 of the OLED display panel close to the display area 1 is provided with a virtual sub-pixel unit 31. Therefore, the display pattern area 123 in the mask 100 according to the embodiment of the present disclosure corresponds to the display area 1 of the OLED display panel, and the display pixel opening 125 located in the display pattern area 123 can be used to realize the evaporation of the light-emitting material layer in the display sub-pixel unit 11 (the position of the light-emitting material layer 12 in the display sub-pixel unit 11 is 1 / 2). Figure 1B ). Accordingly, the peripheral pattern area 124 in the mask plate 100 in the embodiment of the present disclosure corresponds to the peripheral area 2 of the OLED display panel. Due to the production requirements of the virtual sub-pixel unit 31, a virtual pixel opening 125' can also be provided in the peripheral pattern area 124, the position of which can correspond to the virtual sub-pixel unit 31 in the peripheral area 2, for example, it can be used to realize the evaporation of the light-emitting material layer in the virtual sub-pixel unit 31 (the position of the light-emitting material layer 32 in the virtual sub-pixel unit 31 is also Figure 1B As an example, the additional dummy pixel openings 125 ′ in the peripheral pattern region 124 may have the same size and shape as the dummy pixel openings 125 in the display pattern region 123 .

[0063] Since the peripheral pattern area 124 does not correspond to the display area 1 of the display panel, the positioning openings 126 can be set in the peripheral pattern area 124 to avoid affecting the production of the display sub-pixel unit 11. For ease of production, the positioning openings 126 can be realized by replacing the original virtual pixel openings 125', or by changing the shape and size of certain virtual pixel openings 125'. In some embodiments, a plurality of positioning openings 126 can be provided in the peripheral pattern area 124. These positioning openings 126 can be symmetrically distributed relative to the center of the display pattern area 123, which can make the stress distribution of the mask plate 120 more uniform. For example, the plurality of positioning openings 126 may include a first positioning opening 1261, a second positioning opening 1262, a third positioning opening 1263 and a fourth positioning opening 1264. The first positioning opening 1261, the second positioning opening 1262, the third positioning opening 1263, and the fourth positioning opening 1264 are respectively located at the four corners of the mask pattern area 121 of the mask plate 120. In some embodiments, each positioning opening 126 may be surrounded by the virtual pixel opening 125'. In the case where multiple groups of evaporation patterns 128 are provided on the same mask plate 120', the first positioning opening 1261', the second positioning opening 1262', the third positioning opening 1263', and the fourth positioning opening 1264' may also be provided at the four corners of the entire mask pattern area 121 of the mask plate 120', as shown in FIG. Figure 9A As shown. Positioning holes may also be added to other locations in the mask pattern area 121, such as a fifth positioning hole 1265' and a sixth positioning hole 1266'. These positioning holes may also be located at the corners of a group of vapor deposition patterns 128 (i.e., near the intersection of the support bars 140 and the cover bars 130).

[0064] Taking into account the difference in shape and size between the positioning openings 126 and the display pixel openings 125 (and the virtual pixel openings 125'), the positioning openings 126 are not suitable for being set in the display pattern area 123. In some cases, it is also desirable to utilize the openings in the display pattern area 123 for positioning to ensure positioning accuracy. To this end, the embodiments of the present disclosure also provide a method for aligning a mask plate and a mask plate frame. This method can be used in the manufacturing process of the mask plate assembly. After the positioning openings 126 are provided on the mask plate 120, the position of the mask plate 120 relative to the mask plate frame 110 can be preliminarily aligned with the help of the positioning openings 126 provided in the peripheral pattern area 124 of the mask plate 120, and then the position of the mask plate 120 relative to the mask plate frame 110 can be precisely aligned with the help of the display pixel openings 125 provided in the display pattern area 123 of the mask plate 120. During the initial alignment operation, the position capturer (e.g., a camera) 400 can more easily capture the positioning openings 126 of the mask plate 120, thereby improving alignment efficiency. After completing the initial alignment, precise alignment using the display pixel openings 125 can ensure accuracy. Compared with directly aligning the mask plate 120 and the mask plate 110 using the pixel openings 125, this significantly improves alignment efficiency and effectively reduces manual adjustments during the alignment process.

[0065] The method for manufacturing the mask plate assembly using the above-mentioned alignment method is as follows. Figure 6 The method for making a mask assembly may include:

[0066] Step S1: using the positioning holes on the mask plate to initially align the mask plate and the mask plate frame; and

[0067] Step S2: After the preliminary alignment is successful, the mask and the mask frame are precisely aligned using the display pixel openings on the mask.

[0068] The above step S1 may further include, for example:

[0069] Step S10: providing a reference position of the positioning opening on the mask relative to the mask frame;

[0070] Step S20: capturing the actual position of the positioning opening on the mask relative to the mask frame;

[0071] Step S30: Calculate the error between the reference position and the actual position, and determine whether the mask and the mask frame have been successfully aligned based on the error. If the error is within a first threshold range, the alignment is considered successful. Otherwise, the actual position of the mask is readjusted for realignment.

[0072] In the above step S20, a position capture device 400 such as a camera can be used to capture the actual position of the positioning opening 126. For example, this can be achieved through an image processing method. For example, the edge of the positioning opening 126 can be obtained first and the dimensions of the positioning opening 126 in the first direction and the second direction can be calculated to determine that the positioning opening 126 is correctly captured, and then the position of the center of the positioning opening 126 can be further identified to determine the coordinates of the actual position of the positioning opening 126 relative to the mask template frame 110.

[0073] For example, if the coordinates of the reference position of the positioning opening 126 are (x0, y0) and the coordinates of the actual position are (x, y), then the error between the reference position and the actual position can be defined as (x-x0) 2 +(y-y0) 2 By adjusting the position of the mask 120 relative to the mask frame 110, the error is gradually reduced to within the first threshold range, thereby completing the preliminary alignment. Those skilled in the art will appreciate that the above definition of the error between the reference position and the actual position is exemplary, and the error may be defined in other ways based on actual needs.

[0074] The above step S2 may further include, for example:

[0075] Step S40: providing a reference position of a predetermined display pixel opening on the mask relative to the frame;

[0076] Step S50: capturing the actual position of the predetermined display pixel opening on the mask relative to the frame;

[0077] Step S60: Calculate the error between the reference position and the actual position of the predetermined display pixel opening relative to the frame, and determine whether the mask and the frame have been successfully aligned based on the error. If the error is within a second threshold range, the alignment is considered successful. Otherwise, the actual position of the mask is readjusted for realignment.

[0078] The operation process of step S2 is similar to step S1, but the alignment accuracy of the mask 120 and the mask frame 110 can be higher due to the use of finer display pixel openings 125 in the display pattern area 123. The second threshold is smaller than the first threshold.

[0079] Although the above description uses the display pixel opening 125 as an example for precise positioning, the embodiments of the present disclosure are not limited thereto. For example, a virtual pixel opening 125' may be used to replace the display pixel opening 125 for precise positioning. Specific details are omitted.

[0080] The method for making a mask assembly may further include:

[0081] Step S70: fixing the precisely aligned mask plate and the mask plate assembly together.

[0082] Step S70 can be accomplished, for example, by welding. Thicker components are more reliable in welding processes than thinner components. Therefore, the thickness of the fixing region 122 of the mask plate 120 can be greater than the thickness of the mask pattern region 121. For example, the thickness of the mask pattern region 121 of the mask plate 120 can be 5 to 20 microns, such as 10 microns; while the thickness of the fixing region 122 of the mask plate 120 can be 20 to 30 microns, such as 25 microns.

[0083] In addition, in order to prevent a sharp change in stress between the fixing region 122 and the mask pattern region 121, a thickness transition region 127 may be provided between the fixing region 122 and the mask pattern region 121. Figure 4 The width of the thickness transition region can be, for example, 2 to 20 mm.

[0084] The mask plates 120, 120' and the mask plate assemblies 100, 100' of the embodiments of the present disclosure are particularly suitable for evaporating the light-emitting material layer on a high-resolution OLED display panel. For example, the maximum size of the display pixel opening 125 and the virtual pixel opening 125' in the first direction can be, for example, 10 to 25 microns (e.g., 15 microns), and the maximum size in the second direction can be, for example, 25 to 45 microns (e.g., 35 microns). However, the embodiments of the present disclosure are not limited thereto. The mask plates 120, 120' and the mask plate assemblies 100, 100' according to the embodiments of the present disclosure can also be used for evaporating other film layer structures on an OLED display panel.

[0085] In the embodiment of the present disclosure, the display pixel openings 125, dummy pixel openings 125', and positioning openings 126 on the mask plates 120 and 120' are through holes, which can be manufactured, for example, using laser lithography, chemical etching, electroforming, etc., with a manufacturing accuracy of, for example, ±1 micron to 1.5 microns. In the embodiment of the present disclosure, the material of the mask plate 120 can be, for example, a nickel-iron alloy, which can contain one or more elements such as silicon, manganese, titanium, oxygen, carbon, oxygen, and phosphorus.

[0086] An embodiment of the present disclosure further provides a display panel 1000 having a structure corresponding to the above-mentioned mask plate 120 .

[0087] In some embodiments, a plurality of virtual sub-pixel units are provided in the peripheral area 2 . Figure 1BTwo different types of virtual sub-pixel units are shown, hereinafter referred to as first-type virtual sub-pixel units 31 and second-type virtual sub-pixel units 31'. The first-type virtual sub-pixel unit 31 includes a first virtual luminescent material layer 32, and the second-type virtual sub-pixel unit 31' includes a second virtual luminescent material layer 32'. The second virtual luminescent material layer 32' and the first virtual luminescent material layer 32 are made of the same material, for example, both can be made of an organic material that emits red light. The second virtual luminescent material layer 32' is formed on a substrate 30 (see FIG. Figures 1C to 1E ) are different in size and shape from the orthographic projection of the first virtual light-emitting material layer 32 on the base substrate 30. Figure 1B In the illustrated example, the orthographic projection of the first virtual luminescent material layer 32 on the substrate 30 is hexagonal, while the orthographic projection of the second virtual luminescent material layer 32' on the substrate 30 is oval. The orthographic projection of the second virtual luminescent material layer 32' on the substrate 30 is also larger in both the X and Y directions (the X and Y directions are mutually perpendicular) than the orthographic projection of the first virtual luminescent material layer 32 on the substrate 30. However, this is merely exemplary, and the embodiments of the present disclosure are not limited thereto, as long as at least one of the size and shape of the orthographic projection of the second virtual luminescent material layer 32' on the substrate 30 differs from the orthographic projection of the first virtual luminescent material layer 32 on the substrate 30.

[0088] In some embodiments, the maximum dimension of the orthographic projection of the second dummy luminescent material layer 32 ′ on the base substrate 30 in the first direction (eg, X direction) is larger than the maximum dimension of the orthographic projection of the first dummy luminescent material layer 32 on the base substrate 30 in the first direction, for example, 15% to 30% larger.

[0089] In some embodiments, the maximum dimension of the orthographic projection of the second virtual light-emitting material layer 32' on the base substrate 30 in a second direction (e.g., the Y direction) perpendicular to the first direction is larger than the maximum dimension of the orthographic projection of the first virtual light-emitting material layer 32 on the base substrate 30 in the second direction, for example, 15% to 30% larger.

[0090] As mentioned above, the light-emitting material layer in the display panel (including the above-mentioned first virtual light-emitting material layer and the second virtual light-emitting material layer) can be produced by evaporation with the help of a mask (such as a fine metal mask (FMM)). During the evaporation process, in order to enable the mask and the mask frame to be positioned more quickly and accurately, a positioning opening 126 can be provided in the peripheral pattern area of ​​the mask. The positioning opening 126 is significantly different from the display pixel opening 125 and the virtual pixel opening 125' in at least one of the shape and size. Accordingly, in the virtual pixel unit of the display panel, the film layer evaporated by such a mask assembly 100, 100' will also have corresponding size changes at the position corresponding to the positioning opening 126. The second virtual light-emitting material layer 32' in the above-mentioned second type of virtual sub-pixel unit 31' has such a structure. In the display panel, the film layers evaporated by FMM mainly include the light-emitting material layer and the auxiliary light-emitting layer.

[0091] Figure 1C A schematic diagram of the film structure of the display sub-pixel unit in the display area 1 is provided. The figure shows three display sub-pixel units. In the first display sub-pixel unit 11A, there is a first electrode 21A (e.g., an anode), a display auxiliary light-emitting layer 22A located on the side of the first electrode 21A away from the base substrate 30, a display light-emitting material layer 23A located on the side of the display auxiliary light-emitting layer 22A away from the base substrate 30, and a second electrode 24 (e.g., a cathode) located on the side of the display light-emitting material layer 23A away from the base substrate 30. Similarly, the second display sub-pixel unit 11B comprises a first electrode 21B (e.g., an anode), a display-auxiliary light-emitting layer 22B located on a side of the first electrode 21B away from the substrate 30, a display-auxiliary light-emitting material layer 23B located on a side of the display-auxiliary light-emitting layer 22B away from the substrate 30, and a second electrode 24 (e.g., a cathode) located on a side of the display-auxiliary light-emitting material layer 23B away from the substrate 30. The third display sub-pixel unit 11C comprises a first electrode 21C (e.g., an anode), a display-auxiliary light-emitting layer 22C located on a side of the first electrode 21C away from the substrate 30, a display-auxiliary light-emitting material layer 23C located on a side of the display-auxiliary light-emitting layer 22C away from the substrate 30, and a second electrode 24 (e.g., a cathode) located on a side of the display-auxiliary light-emitting material layer 23C away from the substrate 30. The pixel-defining layer 28 has an opening region for defining the display-auxiliary light-emitting material layers 23A, 23B, and 23C and the display-auxiliary light-emitting layers 22A, 22B, and 22C.

[0092] Here, the "display luminescent material layer" and "display auxiliary luminescent layer" primarily refer to the "luminescent material layer" and "auxiliary luminescent layer" in the sub-pixel units in the display area used for image display, to distinguish them from the "virtual luminescent material layer" and "virtual auxiliary luminescent layer" in the dummy pixel units. The "display luminescent material layer" and "display auxiliary luminescent layer" in the sub-pixel units in the display area can participate in luminescence when in operation, while the "virtual luminescent material layer" and "virtual auxiliary luminescent layer" in the dummy pixel units are inoperative.

[0093] An encapsulation structure may also be provided on the side of the second electrode 24 away from the base substrate 30, for example, including a first inorganic encapsulation layer 25, an organic encapsulation layer 26, and a second inorganic encapsulation layer 27 stacked in sequence. An insulating layer 40 and a driving circuit structure such as a thin film transistor 44 may also be provided between the base substrate 30 and the first electrodes 21A, 21B, and 21C. Since the content of this disclosure is mainly related to the evaporation of the light-emitting material layer and the auxiliary light-emitting layer, the insulating layer 40 and the driving circuit structure are no longer shown and discussed in detail. As an example, the first display sub-pixel unit 11A, the second display sub-pixel unit 11B, and the third display sub-pixel unit 11C may respectively represent a display sub-pixel unit of a first color, a display sub-pixel unit of a second color, and a display sub-pixel unit of a third color. These three colors may be, for example, red (R), green (G), and blue (B). However, the embodiments of the present disclosure are not limited thereto. For example, the display panel may include display sub-pixel units of only two colors, four colors, or more colors.

[0094] Figure 1D An exemplary cross-sectional view of a first type of virtual sub-pixel unit 31A and a second type of virtual sub-pixel unit 31A' is given. Figure 1C By comparison, it can be seen that in the virtual sub-pixel unit, the pixel definition layer 28 may not have an opening area. In the first type of virtual sub-pixel unit 31A, the first electrode 41A' is located on the side of the pixel definition layer 28 facing the base substrate 30, while the first virtual auxiliary light-emitting layer 42A, the first virtual light-emitting material layer 43A and the second electrode 24 are sequentially stacked on the other side of the pixel definition layer 28 away from the base substrate 30. Figure 1DAs shown, the orthographic projection of the first virtual light-emitting material layer 43A on the base substrate 30 at least partially overlaps with the orthographic projection of the first virtual auxiliary light-emitting layer 42A on the base substrate 30. In the second type of virtual sub-pixel unit 31A', corresponding to the first type of virtual sub-pixel unit 31A, it also has a first electrode 41A' and a second virtual auxiliary light-emitting layer 42A' located on the side of the pixel defining layer 28 away from the base substrate 30, and a second virtual light-emitting material layer 43A' located on the side of the second virtual auxiliary light-emitting layer 42A' away from the base substrate 30. Figure 1D As shown, the orthographic projection of the second dummy light-emitting material layer 43A' on the base substrate 30 at least partially overlaps with the orthographic projection of the second dummy auxiliary light-emitting layer 42A' on the base substrate 30. The second dummy auxiliary light-emitting layer 42A' and the first dummy auxiliary light-emitting layer 42A are made of the same material and arranged on the same layer. For example, the second dummy auxiliary light-emitting layer 42A' and the first dummy auxiliary light-emitting layer 42A may correspond to sub-pixel units of the same color. However, the orthographic projection of the second dummy auxiliary light-emitting layer 42A' on the base substrate 30 is larger than the orthographic projection of the first dummy auxiliary light-emitting layer 42A on the base substrate 30. For example, in at least one of a first direction and a second direction that are perpendicular to each other, the maximum size of the orthographic projection of the second dummy auxiliary light-emitting layer 42A' on the base substrate 30 is 15% to 30% larger than the maximum size of the orthographic projection of the first dummy auxiliary light-emitting layer 42A on the base substrate 30. However, this is merely exemplary, and the embodiments of the present disclosure are not limited thereto, as long as at least one of the size and shape of the orthographic projection of the second virtual auxiliary light-emitting layer 42A′ on the base substrate 30 is different from the orthographic projection of the first virtual auxiliary light-emitting layer 42A on the base substrate 30 so that the two can be easily distinguished. In some embodiments, the first structure layer of the first virtual light-emitting material layer 43A and the first virtual auxiliary light-emitting layer 42A (which can be either the first virtual light-emitting material layer 43A or the first virtual auxiliary light-emitting layer 42A) is arranged in the same layer as the second structure layer of the second virtual light-emitting material layer 43N and the second virtual auxiliary light-emitting layer 42A′ (the second structure layer can be either the first virtual light-emitting material layer 43A or the first virtual auxiliary light-emitting layer 42A that is arranged in the same layer as the first structure layer), and at least one of the size and shape of the orthographic projection of the second structure layer on the base substrate 30 is different from the orthographic projection of the first structure layer on the base substrate 30.

[0095] In the first-type virtual sub-pixel unit 31A and the second-type virtual sub-pixel unit 31A', the pixel defining layer 28 separates the first electrodes 41A, 41A' from the first virtual auxiliary light-emitting layer 42A and the second virtual auxiliary light-emitting layer 42A'. Those skilled in the art should understand that the pixel defining layer 28 in the virtual sub-pixel unit and the pixel defining layer 28 in the pixel area are essentially the same layer. However, in the virtual sub-pixel unit, the structure of the pixel defining layer 28 is different from that in the display area, and it does not have an opening area. Therefore, in the first-type virtual sub-pixel unit 31A and the second-type virtual sub-pixel unit 31A', any light-emitting functional layer does not contact the first electrodes 41A, 41A'.

[0096] In some embodiments, when one fine metal mask is used to evaporate the auxiliary light-emitting layer and another fine metal mask is used to evaporate the light-emitting material layer, the positioning openings on the two fine metal mask plates may be located in the same virtual sub-pixel unit or may not be located in the same virtual sub-pixel unit. Figure 1D In the example shown, the maximum size of the orthographic projection of the second virtual auxiliary light-emitting layer 42A' on the base substrate 30 is larger than the orthographic projection of the first virtual auxiliary light-emitting layer 42A on the base substrate 30, and the maximum size of the orthographic projection of the second virtual light-emitting material layer 43A' on the base substrate 30 is also larger than the orthographic projection of the first virtual light-emitting material layer 43A on the base substrate 30. Moreover, the maximum size of the orthographic projection of the second virtual auxiliary light-emitting layer 42A' on the base substrate 30 is substantially consistent with the maximum size of the orthographic projection of the second virtual light-emitting material layer 43A' on the base substrate 30. This means that the second type of virtual sub-pixel unit 3iA' corresponds not only to the positioning opening on the mask plate used for evaporating the first virtual auxiliary light-emitting layer 42A, but also to the positioning opening on the mask plate used for evaporating the first virtual light-emitting material layer 43A. However, in other embodiments, for example Figure 1F As shown, the maximum size of the orthographic projection of the second virtual light-emitting material layer 43A" on the base substrate 30 is larger than the orthographic projection of the first virtual light-emitting material layer 43A on the base substrate 30, but the maximum size of the orthographic projection of the second virtual auxiliary light-emitting layer 42A" on the base substrate 30 is substantially consistent with the orthographic projection of the first virtual auxiliary light-emitting layer 42A on the base substrate 30. This means that the second type of virtual sub-pixel unit 31A" does not correspond to the positioning opening on the mask plate used for evaporating the first virtual auxiliary light-emitting layer 42A, but only corresponds to the positioning opening on the mask plate used for evaporating the first virtual light-emitting material layer 43A.

[0097] Considering that the display panel may have sub-pixel units of different colors, the virtual sub-pixel units may also have more types. Figure 1EAs shown, the multiple virtual sub-pixel units may also include a third type of virtual sub-pixel unit 31B and a fourth type of virtual sub-pixel unit 31B', the third type of virtual sub-pixel unit 31B includes a third virtual luminescent material layer 43B, the fourth type of virtual sub-pixel unit 31B' includes a fourth virtual luminescent material layer 43B', the third virtual luminescent material layer 43B and the fourth virtual luminescent material layer 43B' are made of the same material and are arranged on the same layer. The materials of the third virtual luminescent material layer 43B and the fourth virtual luminescent material layer 43B' are different from those of the first virtual luminescent material layer 43A and the second virtual luminescent material layer 43A'. That is, the third type of virtual sub-pixel unit 31B and the fourth type of virtual sub-pixel unit 31B' have different colors from the sub-pixel units corresponding to the first type of virtual sub-pixel unit 31A and the second type of virtual sub-pixel unit 31A'. In Figure 1E In the example, the size of the orthographic projection of the fourth virtual light-emitting material layer 43B′ on the base substrate 30 is significantly larger than the orthographic projection of the third virtual light-emitting material layer 43B on the base substrate 30 .

[0098] In some embodiments, in at least one of a first direction and a second direction, the maximum dimension of the orthographic projection of the fourth dummy luminescent material layer 43B' on the base substrate 30 is 15% to 30% larger than the maximum dimension of the orthographic projection of the third dummy luminescent material layer 43B on the base substrate 30, and the second direction is perpendicular to the first direction. However, this is merely exemplary and the embodiments of the present disclosure are not limited thereto. As long as at least one of the size and shape of the orthographic projection of the fourth dummy luminescent material layer 43B' on the base substrate 30 differs from the orthographic projection of the third dummy luminescent material layer 43B on the base substrate 30 to facilitate differentiation between the two, the requirements are met.

[0099] In some embodiments, the orthographic projection of the fourth dummy luminescent material layer 43B′ on the base substrate 30 has a size different from the orthographic projection of the second dummy luminescent material layer 43A′ on the base substrate 30 in at least one of the first and second directions.

[0100] In some embodiments, as Figure 1EAs shown, the third type of virtual sub-pixel unit 31B further includes a third virtual auxiliary light-emitting layer 42B, which is located on the side of the third virtual light-emitting material layer 43B facing the substrate 30 and on the side of the substrate 30 facing the third virtual light-emitting material layer 43B. The fourth type of virtual sub-pixel unit 31B' further includes a fourth virtual auxiliary light-emitting layer 42B', which is located on the side of the fourth virtual light-emitting material layer 43B' facing the substrate 30 and on the side of the substrate 30 facing the fourth virtual light-emitting material layer 43B'. The fourth virtual auxiliary light-emitting layer 42B' and the third virtual auxiliary light-emitting layer 42B are made of the same material and are arranged in the same layer. Figure 1E As shown, the orthographic projection of the third virtual light-emitting material layer 43B on the base substrate 30 at least partially overlaps with the orthographic projection of the third virtual auxiliary light-emitting layer 42B on the base substrate 30. The orthographic projection of the fourth virtual light-emitting material layer 43B' on the base substrate 30 at least partially overlaps with the orthographic projection of the fourth virtual auxiliary light-emitting layer 42B' on the base substrate 30. The orthographic projection of the fourth virtual auxiliary light-emitting layer 42B' on the base substrate 30 is significantly larger than the orthographic projection of the third virtual auxiliary light-emitting layer 42B on the base substrate 30. For example, in at least one of a first direction and a second direction, the maximum size of the orthographic projection of the fourth virtual auxiliary light-emitting layer 42B' on the base substrate 30 is 15% to 30% larger than the maximum size of the orthographic projection of the third virtual auxiliary light-emitting layer 42B on the base substrate 30, where the second direction is perpendicular to the first direction. However, this is merely exemplary, and the embodiments of the present disclosure are not limited thereto, as long as at least one of the size and shape of the orthographic projection of the fourth virtual auxiliary light-emitting layer 42B' on the base substrate 30 is different from the orthographic projection of the third virtual auxiliary light-emitting layer on the base substrate to facilitate the distinction between the two.

[0101] In some embodiments, the multiple display sub-pixel units include display sub-pixel units of a first color and display sub-pixel units of a second color, the display auxiliary light-emitting layer 22A and the second virtual auxiliary light-emitting layer 42A', 42A" in the display sub-pixel unit of the first color are made of the same material and arranged on the same layer, the display light-emitting material layer 23A and the second virtual light-emitting material layer 43A', 43A" in the display sub-pixel unit of the first color are made of the same material and arranged on the same layer; the display auxiliary light-emitting layer 22B and the fourth virtual auxiliary light-emitting layer 42B' in the display sub-pixel unit of the second color are made of the same material and arranged on the same layer, and the display light-emitting material layer 23B and the fourth virtual light-emitting material layer 43B' in the display sub-pixel unit of the second color are made of the same material and arranged on the same layer.

[0102] In some embodiments, a projection of at least one of the second dummy light-emitting material layer 43A', 43A", the second dummy auxiliary light-emitting layer 42A', 42A", the fourth dummy light-emitting layer 43B' and the fourth dummy auxiliary light-emitting layer 42B' on the base substrate has an axisymmetric shape.

[0103] The above description is merely a preferred embodiment of the present disclosure and an illustration of the technical principles employed. Those skilled in the art should understand that the scope of the invention herein is not limited to the technical solutions formed by the specific combination of the above-mentioned technical features, but also encompasses other technical solutions formed by any combination of the above-mentioned technical features or their equivalents without departing from the inventive concept. For example, a technical solution formed by replacing the above-mentioned features with (but not limited to) technical features with similar functions disclosed in this disclosure.

Claims

1. A display panel, comprising: substrate; as well as A display area and a peripheral area are provided on the base substrate, wherein the peripheral area is provided around the display area; wherein a plurality of virtual sub-pixel units are provided in the peripheral area, the plurality of virtual sub-pixel units including a first type of virtual sub-pixel unit and a second type of virtual sub-pixel unit, the first type of virtual sub-pixel unit including a first virtual luminescent material layer and a first virtual auxiliary luminescent layer, the second type of virtual sub-pixel unit including a second virtual luminescent material layer and a second virtual auxiliary luminescent layer, the second virtual luminescent material layer and the first virtual luminescent material layer being made of the same material and arranged in the same layer, the second virtual auxiliary luminescent layer and the first virtual auxiliary luminescent layer being made of the same material and arranged in the same layer, the first virtual auxiliary luminescent layer being located on a side of the first virtual luminescent material layer facing the substrate and on a side of the substrate facing the first virtual luminescent material layer, the second virtual auxiliary luminescent layer being located on a side of the second virtual luminescent material layer facing the substrate and on a side of the substrate facing the second virtual luminescent material layer, the orthographic projection of the first virtual luminescent material layer on the substrate at least partially overlaps with the orthographic projection of the first virtual auxiliary luminescent layer on the substrate, and the orthographic projection of the second virtual luminescent material layer on the substrate at least partially overlaps with the orthographic projection of the second virtual auxiliary luminescent layer on the substrate; The first virtual light-emitting material layer and the first structure layer in the first virtual auxiliary light-emitting layer are arranged in the same layer as the second virtual light-emitting material layer and the second structure layer in the second virtual auxiliary light-emitting layer, and at least one of a size and a shape of an orthographic projection of the second structure layer on the base substrate is different from that of the orthographic projection of the first structure layer on the base substrate; In at least one of the first direction and the second direction, a maximum size of an orthographic projection of the second dummy luminescent material layer on the base substrate is 15% to 30% larger than a maximum size of an orthographic projection of the first dummy luminescent material layer on the base substrate; and The display area includes multiple display sub-pixel units, and at least one display sub-pixel unit includes: a display luminescent material layer, and the size and shape of the orthographic projection of the display luminescent material layer on the base substrate are basically the same as the size and shape of the orthographic projection of the first virtual luminescent material layer on the base substrate.

2. The display panel according to claim 1, wherein: In at least one of the first direction and the second direction, the maximum size of the orthographic projection of the second virtual auxiliary light-emitting layer on the base substrate is 15% to 30% larger than the maximum size of the orthographic projection of the first virtual auxiliary light-emitting layer on the base substrate, and the second direction is perpendicular to the first direction.

3. The display panel according to claim 1, wherein: The plurality of virtual sub-pixel units further include a third type of virtual sub-pixel unit and a fourth type of virtual sub-pixel unit, the third type of virtual sub-pixel unit includes a third virtual luminescent material layer, the fourth type of virtual sub-pixel unit includes a fourth virtual luminescent material layer, the third virtual luminescent material layer and the fourth virtual luminescent material layer are made of the same material, and the materials of the third virtual luminescent material layer and the fourth virtual luminescent material layer are different from the materials of the first virtual luminescent material layer and the second virtual luminescent material layer; Wherein, at least one of a size and a shape of an orthographic projection of the fourth virtual luminescent material layer on the base substrate is different from that of the orthographic projection of the third virtual luminescent material layer on the base substrate.

4. The display panel according to claim 3, wherein: In at least one of a first direction and a second direction, the maximum size of the orthographic projection of the fourth virtual luminescent material layer on the substrate is 15% to 30% larger than the maximum size of the orthographic projection of the third virtual luminescent material layer on the substrate, and the second direction is perpendicular to the first direction.

5. The display panel according to claim 3, wherein: A size of an orthographic projection of the fourth virtual light-emitting material layer on the substrate in at least one of the first direction and the second direction is different from a size of an orthographic projection of the second virtual light-emitting material layer on the substrate. The display panel according to claim 3 , wherein: The third type of virtual sub-pixel unit also includes a third virtual auxiliary light-emitting layer, which is located on the side of the third virtual light-emitting material layer facing the substrate and on the side of the substrate facing the third virtual light-emitting material layer. The fourth type of virtual sub-pixel unit also includes a fourth virtual auxiliary light-emitting layer, which is located on the side of the fourth virtual light-emitting material layer facing the substrate and on the side of the substrate facing the fourth virtual light-emitting material layer. The fourth virtual auxiliary light-emitting layer and the third virtual auxiliary light-emitting layer are made of the same material, wherein at least one of the size and shape of the orthographic projection of the fourth virtual auxiliary light-emitting layer on the substrate is different from the orthographic projection of the third virtual auxiliary light-emitting layer on the substrate.

7. The display panel according to claim 6, wherein: In at least one of a first direction and a second direction, a maximum size of an orthographic projection of the fourth virtual auxiliary light-emitting layer on the base substrate is 15% to 30% larger than a maximum size of an orthographic projection of the third virtual auxiliary light-emitting layer on the base substrate, and the second direction is perpendicular to the first direction.

8. The display panel according to claim 6 or 7, wherein: The display area includes a plurality of display sub-pixel units, and at least one display sub-pixel unit includes: a first electrode, a display auxiliary light-emitting layer located on a side of the first electrode away from the base substrate, a display light-emitting material layer located on a side of the display auxiliary light-emitting layer away from the base substrate, and a second electrode located on a side of the display light-emitting material layer away from the base substrate. Among them, the multiple display sub-pixel units include display sub-pixel units of a first color and display sub-pixel units of a second color, the display auxiliary light-emitting layer and the second virtual auxiliary light-emitting layer in the display sub-pixel unit of the first color are made of the same material and arranged on the same layer, and the display light-emitting material layer and the second virtual light-emitting material layer in the display sub-pixel unit of the first color are made of the same material and arranged on the same layer; the display auxiliary light-emitting layer and the fourth virtual auxiliary light-emitting layer in the display sub-pixel unit of the second color are made of the same material and arranged on the same layer, and the display light-emitting material layer and the fourth virtual light-emitting material layer in the display sub-pixel unit of the second color are made of the same material and arranged on the same layer.

9. The display panel according to claim 6 or 7, wherein: A projection of at least one of the second virtual light-emitting material layer, the second virtual auxiliary light-emitting layer, the fourth virtual light-emitting layer, and the fourth virtual auxiliary light-emitting layer on the base substrate has an axisymmetric shape.

10. The display panel according to any one of claims 1 and 3 to 7, wherein: At least one of the first type of virtual sub-pixel unit and the second type of virtual sub-pixel unit further includes: a first electrode, the first electrode being located on a side of the base substrate facing the first virtual auxiliary light-emitting layer and the second virtual auxiliary light-emitting layer; a pixel defining layer, the pixel defining layer being located on a side of the first electrode away from the base substrate and on a side of the first and second virtual auxiliary light-emitting layers facing the base substrate; and a second electrode, the second electrode being located on a side of the first virtual light-emitting material layer and the second virtual light-emitting material layer away from the substrate; The pixel defining layer separates the first electrode from the first virtual auxiliary light-emitting layer and the second virtual auxiliary light-emitting layer.

11. A mask for evaporation, comprising: A mask pattern area, wherein the mask pattern area includes one or more groups of evaporation patterns, at least one group of evaporation patterns includes: A display pattern area, in which a display pixel opening is provided, and the display pixel opening is used for evaporating a film layer in a sub-pixel structure on a display panel; and A peripheral pattern area, the peripheral pattern area is located around the display pattern area, a positioning opening is provided in the peripheral pattern area, the positioning opening is used to position the mask, and a virtual pixel opening is also provided in the peripheral pattern area, the virtual pixel opening is used to evaporate the film layer in the virtual sub-pixel structure on the display panel, wherein at least one of the size and shape of the positioning opening is different from those of the display pixel opening and the dummy pixel opening; In at least one of a first direction and a second direction, a maximum dimension of the positioning opening is 15% to 30% larger than a maximum dimension of the display pixel opening and the dummy pixel opening, the second direction being perpendicular to the first direction; and The virtual pixel opening in the peripheral pattern area has the same size and shape as the virtual pixel opening in the display pattern area.

12. The mask according to claim 11, wherein: A plurality of positioning openings are provided in the peripheral pattern area, and the plurality of positioning openings are symmetrically distributed relative to the center of the display pattern area.

13. The mask according to claim 12, wherein: The plurality of positioning openings include a first positioning opening, a second positioning opening, a third positioning opening, and a fourth positioning opening, which are respectively located at four corners of the mask pattern area of ​​the mask plate. The mask according to claim 11 , wherein: The mask plate also includes a fixing area and a thickness transition area located between the fixing area and the mask pattern area. The fixing area is located around the mask pattern area and is used to be fixed to the mask plate frame. The thickness of the fixing area is greater than the thickness of the mask pattern area.

15. A mask assembly comprising: One or more masks according to any one of claims 11 to 14; as well as A mask frame, the mask frame is used to support and fix the mask, Wherein, the mask plate further includes a fixing area, which is located around the mask pattern area and fixed to the mask plate frame.

16. The mask assembly according to claim 15, wherein: The mask plate assembly includes a plurality of the mask plates, wherein the pattern area of ​​at least one of the mask plates includes a plurality of groups of vapor deposition patterns, and a spacer area is provided between two adjacent groups of vapor deposition patterns, and the mask plate assembly further includes: at least one support bar, the support bar being used to support the mask, wherein an orthographic projection of the support bar on the mask falls into a spaced area of ​​the mask; and At least one masking strip is located at a boundary between adjacent mask plates and covers a gap between adjacent mask plates.

17. A method for manufacturing a mask plate assembly, wherein the mask plate assembly is the mask plate assembly according to claim 15 or 16, the method comprising: Use the positioning holes on the mask plate to preliminarily align the mask plate and the mask plate frame; After the preliminary alignment is successful, the mask and the mask frame are precisely aligned using the display pixel openings or virtual pixel openings on the mask; as well as The precisely aligned mask plate and mask plate assembly are fixed together.

18. The method according to claim 17, wherein The preliminary alignment of the mask plate and the mask plate frame by using the positioning openings on the mask plate includes: Providing a reference position of the positioning opening on the mask relative to the mask frame; Capturing the actual position of the positioning opening on the mask relative to the mask frame; The error between the reference position and the actual position is calculated, and based on the error, it is determined whether the mask and the mask frame have been successfully aligned. If the error is within a first threshold range, the alignment is considered successful. Otherwise, the actual position of the mask is readjusted for realignment.

19. The method according to claim 17, wherein The method of precisely aligning the mask plate and the mask plate frame by using the display pixel openings or virtual pixel openings on the mask plate comprises: Providing a reference position of a predetermined display pixel opening or a virtual pixel opening on the mask relative to the mask frame; capturing the actual position of the predetermined display pixel openings or virtual pixel openings on the mask relative to the mask frame; An error between a reference position and an actual position of the predetermined display pixel opening or virtual pixel opening relative to the frame is calculated, and based on the error, it is determined whether the mask plate and the frame have been successfully aligned. If the error is within a second threshold range, the alignment is considered successful; otherwise, the actual position of the mask plate is readjusted for realignment, and the second threshold is less than the first threshold.

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