A fixed clamping device for 3D MEMS probe net cleaning process

Abstract

A kind of fixed clamping device for 3D MEMS probe net cleaning process, including upper cover plate and lower bottom plate.The first through-hole of upper cover plate is opened, and the upper gauze is covered in the lower end face;First linear bearing is arranged in the first through-hole, including first inner ring and first outer ring;Upper top ring is embedded in the first through-hole, and the lower end of the upper top ring is provided with first abutting part;Upper top ring is screwed with first through-hole.The second through-hole of lower bottom plate is opened, and the lower gauze is covered in the upper end face;Second linear bearing is arranged in the second through-hole, including second inner ring and second outer ring;Lower top ring is embedded in the second through-hole, and the upper end of the lower top ring is provided with second abutting part;Lower top ring is screwed with second through-hole.Upper cover plate and lower bottom plate are overlapped, and the two gauzes are adjacent, forming a gap for placing 3D MEMS probe net;Upper top ring is rotated downward, and first inner ring is driven to abut with upper gauze, so that the upper gauze is taut;Lower top ring is rotated upward, and second inner ring is driven to abut with lower gauze, so that the lower gauze is taut.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a fixing and clamping device used in a 3D MEMS probe net cleaning process. Background Art

[0002] Probe cards serve as the interface between the chip under test and the tester during wafer testing. They are primarily used to perform preliminary measurements of chip electrical performance before chip separation and packaging, screening out defective chips before proceeding to the packaging process. Probe cards are categorized by structure type: blade probe cards, cantilever probe cards, vertical probe cards, membrane probe cards, and MEMS probe cards. The probe card's main body is a PCB board equipped with multiple probes.

[0003] To increase channel capacity and accommodate finer pitches and higher pin counts, MEMS probes are currently the primary tool used in high-end testing. MEMS probes facilitate the production of high-pin-count probe cards, meeting the testing requirements of high pin counts (10k-30k pins per card), high currents, and long probe compression strokes. They also maintain excellent stability and minimize test scratches, producing only minimal scratch marks even on wafers with extremely narrow pitches. This effectively increases durability and reduces the frequency of probe changes.

[0004] In order to meet the testing requirements of different chips, a 3D MEMS probe card is designed. Figure 11 As shown in FIG, a 3D MEMS probe structure includes a probe 28 and a probe base 29. Considering the cost, processing technology and other conditions, the 3D MEMS probes are designed to be interconnected during the MEMS processing process to form a 3D MEMS probe network 16 composed of multiple 3D MEMS probes, see the attached FIG. Figure 10 As shown, depending on the diameter, the 3D MEMS probe net is typically 6 inches, 8 inches, or 12 inches. The 3D MEMS probe net is then cleaned to remove chemicals from the surface of the 3D MEMS probes. After drying, the 3D MEMS probe net is cut into individual 3D MEMS probes. The 3D MEMS probes are then assembled onto a PCB to form the MEMS probe card required for chip testing.

[0005] In the cleaning process, because the 3D MEMS probe is different from the 2D MEMS probe, the cross-sectional size of the probe part in the thickness direction is variable, so the surface cleanliness in three directions needs to be considered, and the 3D MEMS probe net has been separated from the original silicon wafer into a separate net. The 3D MEMS probe net has the characteristics of large size (6 inches, 8 inches, 12 inches), small thickness (about 50 microns), light weight, easy to bend, etc. If it is directly cleaned, the edge is not fixed, and it is easy to cause the 3D MEMS probe net to bend, wrinkle and deform, thereby causing the probe in the net to bend and be scrapped. Based on the above situation, the 3D MEMS probe net needs to be fixed first, and then cleaned. However, at present, a device for fixing the 3D MEMS probe net in the cleaning process has not been developed.

[0006] Therefore, how to design a fixing and clamping device that can ensure that the 3D MEMS probe net is not bent, deformed and wrinkled in the cleaning process of the 3D MEMS probe net is the research subject of the present application. SUMMARY

[0007] The purpose of the present application is to provide a fixing and clamping device for the cleaning process of the 3D MEMS probe net.

[0008] To achieve the above purpose, the technical scheme adopted by the present application is:

[0009] A fixing and clamping device for the cleaning process of the 3D MEMS probe net, the device comprises an upper cover plate and a lower bottom plate.

[0010] The upper cover plate is provided with a first through hole penetrating from top to bottom, and an upper gauze is fixed on the lower end face of the first through hole; an upper linear bearing is arranged in the first through hole, the upper linear bearing comprises a first inner ring and a first outer ring, and the first outer ring is fixed relative to the hole wall of the first through hole; an upper top ring is also embedded in the first through hole, and the upper top ring is located above the first inner ring of the upper linear bearing, and the lower end of the upper top ring is provided with a first abutting portion abutting on the first inner ring; and the outer periphery of the upper top ring is also provided with external threads, and the inner wall of the first through hole is provided with matching internal threads, and the upper top ring is adjusted in the up-down position relative to the upper cover plate by cooperating the external threads with the internal threads.

[0011] The lower bottom plate is provided with a second through hole penetrating from top to bottom, and a lower gauze is fixed on the upper end face of the second through hole; a lower linear bearing is arranged in the second through hole, and the lower linear bearing comprises a second inner ring and a second outer ring, and the second outer ring is fixed relative to the hole wall of the second through hole; a lower top ring is further embedded in the second through hole, and the lower top ring is located below the second inner ring of the lower linear bearing, and the upper end of the lower top ring is provided with a second pressing part for pressing the second inner ring; and the outer periphery of the lower top ring is further provided with external threads, and the inner wall of the second through hole is provided with matching internal threads, and the lower top ring is matched with the internal threads of the second through hole through the external threads, so that the upper and lower positions of the lower top ring relative to the lower bottom plate can be adjusted.

[0012] The upper cover plate is combined with the lower bottom plate, the first through hole is opposite to the second through hole, the upper gauze is adjacent to the lower gauze, and a gap for placing a 3D MEMS probe net is formed between the upper gauze and the lower gauze; when the upper top ring is rotated downward, the first inner ring is driven to move downward and press against the upper gauze, so that the upper gauze is tightened; when the lower top ring is rotated upward, the second inner ring is driven to move upward and press against the lower gauze, so that the lower gauze is tightened.

[0013] The related contents in the above technical solution are explained as follows:

[0014] 1. In the above scheme, the assembly process is as follows: the upper gauze is fixed on the lower end face of the first through hole of the upper cover plate, the upper linear bearing is sleeved in the first through hole from top to bottom, and the first outer ring is fixed on the hole wall of the first through hole. Then, the upper top ring is threadedly installed in the first through hole from top to bottom, the first pressing part at the lower end of the upper top ring is pressed downward on the first inner ring, so that the first inner ring is forced to move downward and press against the upper gauze, and the upper gauze is tightened downward.

[0015] The lower gauze is fixed on the upper end face of the second through hole of the lower bottom plate, the lower linear bearing is sleeved in the second through hole from bottom to top, and the second outer ring is fixed on the hole wall of the second through hole. Then, the lower top ring is threadedly installed in the second through hole from bottom to top, the second pressing part at the upper end of the lower top ring is pressed upward on the second inner ring, so that the second inner ring is forced to move upward and press against the lower gauze, and the lower gauze is tightened upward.

[0016] The 3D MEMS probe net is laid on the lower gauze, and then the upper cover plate is combined with the lower bottom plate, and the 3D MEMS probe net is located in the gap between the upper gauze and the lower gauze.

[0017] Then, the cleaning process is performed, and the washing water flows through the meshes on the upper gauze and the lower gauze to wash the 3D MEMS probe net between the two gauzes.

[0018] 2. The first outer ring is fixed relative to the hole wall of the first through hole, and the second outer ring is fixed relative to the hole wall of the second through hole. The fixing of the first outer ring and the second outer ring can be achieved in various ways, such as by providing a limiting portion in the first through hole and the second through hole, or by using fasteners and the like.

[0019] 3. In the above scheme, the upper yarn net is adjacent to the lower yarn net, so that the gap formed by the upper yarn net and the lower yarn net is small, and the 3D MEMS probe net is wrapped in the upper and lower yarn nets. Since the thickness of the 3D MEMS probe net is small (about 50 microns), if the gap between the two yarn nets is too large, the probe net is easy to move, resulting in wrinkle deformation.

[0020] 4. In the above scheme, the upper and lower yarn nets are normally in a relaxed state. During the cleaning process, the water flow and air flow need to exert force on the 3D MEMS probe net on both sides. The yarn net in the relaxed state will deform and even extrude the 3D MEMS probe net, resulting in wrinkle of the 3D MEMS probe net and bending of the probe, which is scrapped. The technical scheme adopts an upper top ring and an upper linear bearing, a lower top ring and a lower linear bearing to form a tensioning structure respectively, and the abutting portions of each top ring are respectively applied to the inner rings of the corresponding linear bearings, so as to force the corresponding inner rings to displace to abut against the corresponding yarn nets, and the yarn nets are tensioned under the traction of the inner rings. Preventing deformation of the upper and lower yarn nets during the cleaning process, thereby preventing deformation of the 3D MEMS probe net under the impact of water flow and air flow.

[0021] 5. In the above scheme, the upper top ring is screwed with the first through hole, and the lower top ring is screwed with the lower bottom plate. By rotating the upper and lower top rings, the displacement of the upper and lower top rings is achieved. The rotation of the upper and lower displacement can ensure that the top ring is parallel to the displacement, prevent the yarn net from being tilted and collapsed due to uneven force on the surface of the yarn net, ensure that the grid yarn net is uniformly tight, and the two grid yarn nets are parallel to each other. The speed of the upper and lower displacement of the two top rings can also be controlled to prevent the yarn net from collapsing due to too fast displacement speed.

[0022] 6. In the above scheme, an upper linear bearing is arranged between the upper top ring and the upper yarn net, and a lower linear bearing is arranged between the lower top ring and the lower yarn net. The rotation force of the two top rings is transmitted to the inner ring of the corresponding linear bearing, and is converted into the thrust of the inner ring displacement, so as to prevent the rotation force of the top ring from directly acting on the yarn net, and to prevent the yarn net on the contact surface from being damaged by the rotation force.

[0023] 7. In the above scheme, a radially inward limiting portion is arranged on the inner wall of the first through hole and the second through hole. The limiting portion is a ring-shaped boss.

[0024] 8. In the above scheme, the first abutting portion and the second abutting portion are both ring-shaped bosses.

[0025] 9. The upper linear bearing further comprises first balls between the first outer ring and the first inner ring, and the first outer ring and the first inner ring are movably connected by the first balls; the lower linear bearing further comprises second balls between the second outer ring and the second inner ring, and the second outer ring and the second inner ring are movably connected by the second balls.

[0026] 10. The device further comprises an upper pressing ring and a lower pressing ring, the upper gauze is clamped between the upper pressing ring and the lower end surface of the first through hole; and the lower gauze is clamped between the lower pressing ring and the upper end surface of the second through hole.

[0027] 11. The device further comprises a cross handle, inner walls of the upper top ring and the lower top ring are provided with grooves corresponding to the cross handle, the cross handle is clamped in the grooves, and when the upper top ring and the lower top ring are assembled, the cross handle is rotated to drive the displacement of the upper top ring and the lower top ring. Since the size of the top ring is large, the peripheral part needs to move simultaneously when the top ring moves up and down, and cannot be inclined, which can be realized by the cross handle.

[0028] 12. The upper cover plate is provided with an upper lug, the lower bottom plate is provided with a lower lug, the upper lug and the lower lug are both provided with threaded holes, and the upper lug and the lower lug are fixedly connected by screws.

[0029] 13. The lower end surface of the first through hole and the contact surface of the upper gauze are provided with a first Teflon layer; and the upper end surface of the second through hole and the contact surface of the lower gauze are provided with a second Teflon layer. The Teflon increases the contact friction between the upper cover plate and the upper gauze and between the lower bottom plate and the lower gauze, so that the gauze gauze does not slide when it is tightened.

[0030] 14. The edge of the lower bottom plate is provided with a positioning lining plate. The positioning lining plate realizes rapid positioning.

[0031] The working principle of the present application is that the 3D MEMS probe net is located in the gap formed by the upper and lower gauzes, and the upper and lower gauzes are adjacent, and the 3D MEMS probe net is wrapped between the upper and lower gauzes. The washing water flows through the grid on the gauze to wash the 3D MEMS probe net between the two gauzes.

[0032] Compared with the prior art, the present application has the following advantages due to the use of the above technical scheme:

[0033] 1. The 3D MEMS probe net is clamped between the upper and lower gauzes, and the 3D MEMS probe net is fixed to prevent the 3D MEMS probe net from moving and deforming due to the impact of water flow and air flow during cleaning.

[0034] 2. This invention employs a tensioning structure formed by the upper top ring and upper linear bearing, and the lower top ring and lower linear bearing. The abutting portion of each top ring acts on the inner ring of the corresponding linear bearing, forcing the corresponding inner ring to move and press against the corresponding gauze. The gauze is tensioned by the pulling force of the inner ring. This prevents deformation of the upper and lower gauze during cleaning, which could cause the 3D MEMS probe net to deform under the impact of water and air flow.

[0035] 3. The present invention adopts an upper top ring that is screwed to the first through hole through a thread, and a lower top ring that is screwed to the lower base plate through a thread. By rotating the upper and lower top rings, the two top rings are displaced. The method of rotating the top rings up and down can ensure that the top rings are displaced up and down in parallel, preventing uneven force on the mesh surface from causing tilting and loosening, ensuring that the mesh is evenly taut, and the two mesh meshes are parallel to each other. The up and down displacement speed of the two top rings can also be controlled to prevent the displacement speed from being too fast and causing the mesh to collapse.

[0036] 4. The present invention arranges an upper linear bearing between the upper top ring and the upper gauze, and arranges a lower linear bearing between the lower top ring and the lower gauze, so as to transmit the rotational force of the two top rings to the inner rings of the corresponding linear bearings, and convert it into thrust for the displacement of the inner rings, thereby preventing the rotational force of the top rings from directly acting on the gauze, causing the gauze on the contact surface to be damaged by the rotational force. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Attachment Figure 1 This is an exploded view of a fixed clamping device according to an embodiment of the present invention;

[0038] Attachment Figure 2 A three-dimensional diagram of the assembled fixing and clamping device according to an embodiment of the present invention;

[0039] Attachment Figure 3 This is a cross-sectional view of the assembled fixing and clamping device according to an embodiment of the present invention;

[0040] Attachment Figure 4 This is a cross-sectional view of the upper top ring of the fixed clamping device according to the embodiment of the present invention when it is not pressed downward;

[0041] Attachment Figure 5 This is a cross-sectional view of the upper top ring of the fixed clamping device according to the embodiment of the present invention after being pressed downward;

[0042] Attachment Figure 6 This is a structural schematic diagram of an upper cover plate of a fixed clamping device according to an embodiment of the present invention;

[0043] Attachment Figure 7 This is a structural schematic diagram of the lower base plate of the fixed clamping device according to an embodiment of the present invention;

[0044] Attachment Figure 8 This is a schematic structural diagram of a linear bearing according to an embodiment of the present invention in which the second inner ring has not moved;

[0045] Attachment Figure 9 This is a schematic structural diagram of the linear bearing after the second inner ring moves according to an embodiment of the present invention;

[0046] Attachment Figure 10 Schematic diagram of the structure of the 3D MEMS probe network;

[0047] Attachment Figure 11 Schematic diagram of the structure of a single probe unit on the 3D MEMS probe network.

[0048] In the above drawings: 1. Upper cover plate; 2. Lower base plate; 3. First through hole; 4. Upper gauze; 5. Upper linear bearing; 6. First inner ring; 7. First outer ring; 8. Upper top ring; 9. First supporting part; 10. Second through hole; 11. Lower gauze; 12. Lower linear bearing; 13. Second inner ring; 14. Second outer ring; 15. Lower top ring; 16. 3D MEMS probe mesh; 17. Limiting part; 18. Second ball; 19. Upper pressure ring; 20. Lower pressure ring; 21. Cross handle; 22. Groove; 23. Upper ear; 24. Lower ear; 25. Threaded hole; 26. Positioning liner; 27. Second supporting part; 28. Probe; 29. ​​Probe seat. DETAILED DESCRIPTION

[0049] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0050] Example:

[0051] See attached Figures 1-3 As shown, a fixing clamping device for a 3D MEMS probe net cleaning process includes an upper cover plate 1 and a lower base plate 2.

[0052] See attached Figure 6As shown, the upper cover plate 1 is provided with a first through hole 3 running through from top to bottom, and an upper gauze 4 is fixed to the lower end surface of the first through hole 3; an upper linear bearing 5 is provided in the first through hole 3, and the upper linear bearing 5 includes a first inner ring 6 and a first outer ring 7, and the first outer ring 7 is fixed relative to the hole wall of the first through hole 3; an upper top ring 8 is also embedded in the first through hole 3, and the upper top ring 8 is located above the first inner ring 6 of the upper linear bearing 5, and the lower end of the upper top ring 8 is provided with a first supporting portion 9 that presses against the first inner ring 6; Furthermore, the outer circumference of the upper top ring 8 is provided with an external thread (not shown), and the inner wall of the first through hole 3 is provided with a matching internal thread (not shown). The external thread of the upper top ring 8 cooperates with the internal thread of the first through hole 3, thereby forming a structure in which the upper top ring 8 can be adjusted vertically relative to the upper cover plate 1. The upper linear bearing 5 also includes a first ball, which is located between the first outer ring 7 and the first inner ring 6, and the first outer ring 7 and the first inner ring 6 are movably connected by the first ball. A first Teflon layer (not shown) is provided on the contact surface between the lower end surface of the first through hole 3 and the upper gauze 4.

[0053] See attached Figure 7 As shown, the lower base plate 2 is provided with a second through hole 10 which runs through the bottom and top. The upper end surface of the second through hole 10 is covered with a lower gauze 11 which is fixed thereto. A lower linear bearing 12 is provided in the second through hole 10. Figures 8-9 As shown, the lower linear bearing 12 includes a second inner ring 13 and a second outer ring 14, and the second outer ring 14 is fixed relative to the wall of the second through hole 10; a lower top ring 15 is also embedded in the second through hole 10, and the lower top ring 15 is located below the second inner ring 13 of the lower linear bearing 12, and the upper end of the lower top ring 15 is provided with a second supporting portion 27 that presses against the second inner ring 13; and, the outer circumferential surface of the lower top ring 15 is also provided with an external thread (not shown in the figure), and the inner wall of the second through hole 10 is provided with a matching internal thread (not shown in the figure), and the lower top ring 15 cooperates with the internal thread of the second through hole 10 through its external thread to form a structure in which the upper and lower positions of the lower top ring 15 relative to the lower base plate 2 can be adjusted; the lower linear bearing 12 also includes a second ball 18, and the second ball 18 is located between the second outer ring 14 and the second inner ring 13, and the second outer ring 14 and the second inner ring 13 are movably connected through the second ball 18. A second Teflon layer (not shown) is provided on the contact surface between the upper end surface of the second through hole 10 and the lower gauze 11 .

[0054] The inner walls of the first through hole 3 and the second through hole 10 are each provided with a radially inwardly convex limiting portion 17. The limiting portion 17 is an annular boss. The first abutting portion 9 and the second abutting portion 27 are both annular convex rings. A positioning lining plate 26 is provided on the edge of the lower base plate 2.

[0055] The device further comprises an upper pressing ring 19 and a lower pressing ring 20, the upper gauze 4 is clamped between the upper pressing ring 19 and the lower end surface of the first through hole 3; the lower gauze 11 is clamped between the lower pressing ring 20 and the upper end surface of the second through hole 10.

[0056] Further comprising a cross screw 21, the inner wall of the upper top ring 8 and the lower top ring 15 is provided with a groove 22 corresponding to the cross screw 21, the cross screw 21 is clamped in the groove 22, when assembling the upper top ring 8 and the lower top ring 15, rotating the cross screw 21 promotes its displacement, thereby driving the displacement of the upper top ring 8 and the lower top ring 15.

[0057] The upper cover plate 1 is provided with an upper ear 23, the lower bottom plate 2 is provided with a lower ear 24, the upper ear 23 and the lower ear 24 are both provided with a threaded hole 25, the upper ear 23 and the lower ear 24 are fixedly connected by screws.

[0058] The upper cover plate 1 is overlapped with the lower bottom plate 2, and the first through hole 3 and the second through hole 10 are opposite, the upper gauze 4 and the lower gauze 11 are adjacent, and a gap for placing the 3D MEMS probe gauze 16 is formed between the two; as shown in the figure, when the upper top ring 8 is rotated downward, the first inner ring 6 is driven to move downward and abuts against the upper gauze 4, so that the upper gauze 4 is taut; when the lower top ring 15 is rotated upward, the second inner ring 13 is driven to move upward and abuts against the lower gauze 11, so that the lower gauze 11 is taut. Figures 4-5

[0059] The assembling process is as follows: the upper gauze 4 is fixed on the lower end surface of the first through hole 3 of the upper cover plate 1, the upper linear bearing 5 is sleeved in the first through hole 3 from top to bottom, and the first outer ring 7 is fixed on the hole wall of the first through hole 3. Then the upper top ring 8 is threadedly installed in the first through hole 3 from top to bottom, the cross screw 21 is rotated to rotate the upper top ring 8 downward, the first abutting part 9 at the lower end of the upper top ring 8 presses on the first inner ring 6, forcing the first inner ring 6 to move downward to stop pressing the upper gauze 4, so that the upper gauze 4 is taut downward.

[0060] The lower gauze 11 is fixed on the upper end surface of the second through hole 10 of the lower bottom plate 2, the lower linear bearing 12 is sleeved in the second through hole 10 from bottom to top, and the second outer ring 14 is fixed on the hole wall of the second through hole 10. Then the lower top ring 15 is threadedly installed in the second through hole 10 from bottom to top, the cross screw 21 is rotated to rotate the lower top ring 15 upward, the second abutting part at the upper end of the lower top ring 15 presses on the second inner ring 13, forcing the second inner ring 13 to move upward to stop pressing the lower gauze 11, so that the lower gauze 11 is taut upward.

[0061] ​The 3D MEMS probe net 16 is laid on the lower gauze net 11, and the upper cover plate 1 is correspondingly covered with the lower bottom plate 2, and the 3D MEMS probe net 16 is located in the gap formed by the upper gauze net 4 and the lower gauze net 11.

[0062] After the assembly is completed, a cleaning process is performed, and washing water flows through the meshes on the upper gauze net 4 and the lower gauze net 11 to wash the 3D MEMS probe net 16 between the two gauze nets.

[0063] The above examples are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and to implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit and essence of the present application shall be covered within the protection scope of the present application.

Claims

1. A fixed clamping device for a 3D MEMS probe net cleaning process, characterized by: The device comprises an upper cover plate (1) and a lower base plate (2); The upper cover plate (1) is provided with a first through hole (3) which passes through the upper and lower parts, and an upper gauze (4) is fixed to the lower end surface of the first through hole (3); an upper linear bearing (5) is provided in the first through hole (3), and the upper linear bearing (5) comprises a first inner ring (6) and a first outer ring (7), and the first outer ring (7) is fixed relative to the hole wall of the first through hole (3); an upper top ring (8) is also embedded in the first through hole (3), and the upper top ring (8) is located above the first inner ring (6) of the upper linear bearing (5), and a first supporting portion (9) which presses against the first inner ring (6) is provided at the lower end of the upper top ring (8); and the outer circumferential surface of the upper top ring (8) is also provided with a An external thread is provided, and a matching internal thread is provided on the inner wall of the first through hole (3), and the upper top ring (8) cooperates with the internal thread of the first through hole (3) through its external thread, thereby forming a structure in which the upper top ring (8) can be adjusted in the upper and lower positions relative to the upper cover plate (1); The lower base plate (2) is provided with a second through hole (10) which passes through the lower base plate (2), and a lower mesh (11) is fixed to the upper end surface of the second through hole (10); a lower linear bearing (12) is provided in the second through hole (10), and the lower linear bearing (12) includes a second inner ring (13) and a second outer ring (14), and the second outer ring (14) is fixed relative to the hole wall of the second through hole (10); a lower top ring (15) is also embedded in the second through hole (10), and the lower top ring (15) is located below the second inner ring (13) of the lower linear bearing (12), and the upper end of the lower top ring (15) is provided with a second supporting portion (27) which presses against the second inner ring (13); and the lower The outer circumference of the top ring (15) is also provided with an external thread, and the inner wall of the second through hole (10) is provided with a matching internal thread. The lower top ring (15) cooperates with the internal thread of the second through hole (10) through its external thread, thereby forming a structure in which the upper and lower positions of the lower top ring (15) relative to the lower base plate (2) can be adjusted. The upper cover plate (1) covers the lower base plate (2), and the first through hole (3) and the second through hole (10) are positioned relative to each other, and the upper gauze (4) and the lower gauze (11) are adjacent to each other, and a gap is formed between the two for placing the 3D MEMS probe net (16); when the upper top ring (8) rotates downward, it drives the first inner ring (6) to move downward and abut against the upper gauze (4), so that the upper gauze (4) is tightened; when the lower top ring (15) rotates upward, it drives the second inner ring (13) to move upward and abut against the lower gauze (11), so that the lower gauze (11) is tightened; A circle of radially inwardly convex limiting portions (17) is provided on the inner walls of the first through hole (3) and the second through hole (10); The upper linear bearing (5) further includes a first ball, the first ball being located between the first outer ring (7) and the first inner ring (6), and the first outer ring (7) and the first inner ring (6) being movably connected via the first ball; the lower linear bearing (12) further includes a second ball (18), the second ball (18) being located between the second outer ring (14) and the second inner ring (13), and the second outer ring (14) and the second inner ring (13) being movably connected via the second ball (18).

2. The fixing and clamping device for a 3D MEMS probe net cleaning process according to claim 1, characterized in that: The limiting portion (17) is a ring-shaped boss.

3. The fixing and clamping device for a 3D MEMS probe net cleaning process according to claim 1, characterized in that: The first supporting portion (9) and the second supporting portion (27) are both an annular convex ring.

4. The fixing and clamping device for a 3D MEMS probe net cleaning process according to claim 1, characterized in that: The device further comprises an upper pressing ring (19) and a lower pressing ring (20), wherein the upper gauze (4) is clamped between the upper pressing ring (19) and the lower end surface of the first through hole (3); and the lower gauze (11) is clamped between the lower pressing ring (20) and the upper end surface of the second through hole (10).

5. The fixing and clamping device for a 3D MEMS probe net cleaning process according to claim 1, characterized in that: The cross handle (21) is also included. The inner walls of the upper top ring (8) and the lower top ring (15) are provided with a groove (22) corresponding to the cross handle (21). The cross handle (21) is engaged in the groove (22). When the upper top ring (8) and the lower top ring (15) are assembled, the cross handle (21) is rotated to cause it to move, thereby driving the upper top ring (8) and the lower top ring (15) to move.

6. The fixing and clamping device for a 3D MEMS probe net cleaning process according to claim 1, characterized in that: The upper cover plate (1) is provided with an upper ear (23), and the lower base plate (2) is provided with a lower ear (24). Both the upper ear (23) and the lower ear (24) are provided with a threaded hole (25), and the upper ear (23) and the lower ear (24) are fixedly connected by screws.

7. The fixing and clamping device for a 3D MEMS probe net cleaning process according to claim 1, characterized in that: A first Teflon layer is provided on the contact surface between the lower end surface of the first through hole (3) and the upper gauze (4); and a second Teflon layer is provided on the contact surface between the upper end surface of the second through hole (10) and the lower gauze (11).

8. The fixing and clamping device for a 3D MEMS probe net cleaning process according to claim 1, characterized in that: A positioning lining plate (26) is provided on the edge of the lower base plate (2).

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